CN101166672A

CN101166672A - Mask container

Info

Publication number: CN101166672A
Application number: CNA200680014669XA
Authority: CN
Inventors: A·M·蒂本; C·安德森; B·威斯曼
Original assignee: Entegris Inc
Current assignee: Entegris Inc
Priority date: 2005-02-27
Filing date: 2006-02-27
Publication date: 2008-04-23
Also published as: TW200702255A

Abstract

A hinged mask-package container with a spring latch for use in the transportation and storage of substrates. The container has a base and lid secured by a slidable spring latch that accepts the container's lid by sliding along the rail when the lid is pressed down to meet the base and then secures the lid and base by sliding back into its original position. The container also employs a living hinge made by an overmolding process whereby the hinge is formed in a first mold and then the container lid and base are formed and joined to the hinge in a second mold.

Description

Mask container

Related application

The application's case is advocated the right based on the 60/657th, No. 314 U.S. Provisional Application case of filing an application on February 27th, 2005, and this U.S. Provisional Application case is incorporated herein in full with way of reference.

Technical field

The present invention relates to sealable hinge type breech locked container, it is used for storing and transporting is making the used mask of integrated circuit.

Background technology

For example semiconductor subassembly such as integrated circuit is to be made by semiconductor wafer.For this reason, use quite easily crisp mask (or light shield) to come projection and define size and the position of these structures in final products.These masks generally are the smooth substrate format of essence.In manufacturing process, little foreign matter particulate may fall on mask or the substrate, thereby damages mask or at the system product, perhaps otherwise disturb manufacturing process.These foreign matters are present in the environment of storage and transportation mask.Because mask has easily crisp character, and need prevent that the foreign matter particulate from adhering on the mask, thereby use container.These containers have the double action that the protection mask was not damaged and provided dustless microenvironment.Mask container is to be made by independent overhead guard or lid and bottom or pedestal traditionally always.These parts are molded respectively forming, and wherein each part all has and its back side all-in-one-piece hinge.Then, utilize a metal hinge pin and the hinge finished is assembled container.When overhead guard closes when closing firmly this packing, sliding with hand is positioned at the simple breech lock of C shape of the available hand slip on the guide rail of frame piece front, makes it mesh lug on overhead guard.Hinge is by making with overhead guard and pedestal identical materials traditionally, and exists plastics that plastic friction contact and plastics are contacted metal friction usually, and this can cause wearing and tearing and produce particulate.Therefore, be desirable to provide very much and a kind ofly can be fastened to breech lock on the pedestal automatically by lid, and a kind of hinge that can incorporate into by minimum number of assembling steps, its do not exist plastics to plastics or plastics to the metal friction contact and thereby can not produce particulate together.

Summary of the invention

The present invention is by providing a kind of container that is used to store and transport mask and a kind of by using overlapping molding technology molded container assembly and a hinge of the living fortune method of making container in regular turn, and certain degree ground satisfies the demand in the industry.This container comprises a lid, a pedestal, a hinge and a bolt lock mechanism.In one embodiment, this hinge is to be made by penetrating contour forming by one first material.This hinge is positioned in the mould, with this pedestal of molding and the cover of overlapping in the above.Penetrating contour forming by one second thus makes pedestal and lid integral body be formed up on the hinge-or be mechanically attached on the hinge by the overlapping molding.This hinge has a hinge of living and transporting, and it is not to have friction or wearability contact action.Comprise this bolt lock mechanism that is configured to the latch of slip of C shape breech lock frame form and integrally formed spring track on the engages base front slidably.Spring makes latch bias to an original normal position, i.e. " breech lock " position.To cover on the pedestal in the process, when a slope shape inclined-plane that a slope shape extension (i.e. a camming surface) of lid compresses breech lock when (cooperates camming surface), this breech lock can automatically activate, that is shifts out position latching and admit also breech lock overhead guard.The power of the lid extension that moves down can contact a camming surface, and with each the outside promotion in these two breech lock framves, till the lug extension of lid enters in the recess in the breech lock frame, thereby under the effect of spring force, the breech lock frame is released into its initial position.When the lid extension was in this kind position, it just alignd with track, and late spring remains in a locking and a closed position with bolt lock mechanism.Another of breech lock slope shape hypotenuse down then can be used for by actuator upward movement and automatically open bolt lock mechanism below it.

A feature of the present invention and advantage are that this bolt lock mechanism can or be used Robot actions with hand, and use and to extend upward from below or to operate with manipulator from the simple vertical shifting actuator arm that extends that faces down.

A feature of the present invention and advantage are that number of components is minimum.For example, each bolt lock mechanism only is made up of an extra assembly except the part of utilization overhead guard and pedestal.This makes, and it is simple, be easy to cleaning, and manufacturing cost such as assembly cost is minimized.

A feature of the present invention and advantage are not have friction component in hinge.

One feature and the advantage of preferred embodiment of the present invention are, these two breech lock framves all inwardly bias to its position latching, help activating by an actuator with camming surface being inserted between these two breech lock framves and with manipulator and open, wherein these camming surfaces can and outwards promote these two breech lock framves simultaneously by face or the simple vertical motion that begins below from container.

One feature and the advantage of preferred embodiment of the present invention are that the breech lock frame has camming surface, and these camming surfaces can be activated by the actuator cam part on the top cover, and also robotic arm activates.And these breech locks are easy to use manual manipulation.

Read hereinafter explanation in conjunction with the accompanying drawings, these and other purpose of the present invention, feature and advantage will become very clear.

Description of drawings

Fig. 1 is the block diagram of an embodiment when being in closed position of the container according to the present invention;

Fig. 2 is container shown in Figure 1 its in-to-in block diagram when being shown in an open position;

Fig. 3 is container shown in Figure 1 its exterior planar view when being shown in an open position;

Fig. 4 is the side cutaway view of container shown in Figure 1 when being shown in an open position;

Fig. 5 is a block diagram, and it is illustrated in that the container part is opened and the function of breech lock frame bolt lock mechanism when being in its normal position;

Fig. 6 is a block diagram, and it is illustrated in, and overhead guard begins engages base, the function of bolt lock mechanism when bolt lock mechanism outwards is offset the breech lock frame;

Fig. 7 is a block diagram, and it is illustrated in, and overhead guard is combined on the pedestal, the function of bolt lock mechanism when the breech lock frame of bolt lock mechanism is back to its normal position;

Fig. 8 is the view before hinge is in incorporating container into;

Fig. 9 is the view before hinge is in incorporating container into;

Figure 10 is the block diagram at hinge top before hinge is incorporated in the container;

Figure 11 is the block diagram of hinged base before hinge is incorporated in the container;

Figure 12 is the end elevation when being in complete extended position before hinge is in incorporating container into;

Figure 13 is the end elevation of the hinges portion of hinge;

Figure 14 is the end elevation when being in complete folding position before hinge is in incorporating container into;

Figure 15 is the end elevation when being in complete folding position before hinge is in incorporating container into;

Figure 16 is the sectional side view of the present invention and lid and the Unitarily molded linkage that forms of pedestal;

The block diagram that Figure 17 looks from the back side for container, its illustration is in the hinge on the complete folding position;

Figure 18 is the front elevation view of breech lock frame;

Figure 19 is the plan view from above of breech lock frame;

Figure 20 is the backsight side elevation view of breech lock frame;

Figure 21 is the end elevation of breech lock frame;

Figure 22 is the block diagram of pedestal corner, and its illustration is from the breech lock frame of normal position withdrawal;

Figure 23 is mechanism's engagement block diagram that covers extension of bolt lock mechanism of the present invention;

Figure 24 is the lateral plan as the pedestal track of a bolt lock mechanism part; And

Figure 25 is an illustration figure, and its illustration is how by simple cam actuator face or operate this two bolt lock mechanisms below container simultaneously from container.

Should be appreciated that above-mentioned accompanying drawing is illustration the present invention, but not plan to limit scope of the present invention.

The specific embodiment

Fig. 1-Fig. 4 shows an embodiment of mask of the present invention (light shield) container.This container is shown with 100 generally, and is comprised a upper-part (for example cover or lid) 102, one lower member or pedestal 104, a hinge 106 and a pair of bolt lock mechanism 108.

Lid 102 has a housing 110 in regular turn, and housing 110 has a smooth substantially end face 112, relative

vertical limit

114 and 116 and relative

widthwise edge

118 and 120, thereby defines a lid cavity 121.Be arranged at that to cover in the cavity 121 be groove

opposite structure

122 and 124 and horizontal relative light shield limited part or liner 126 and 128.The exemplary liner that is applicable to certain embodiments of the invention is disclosed in the 6th, 216, and in No. 873 US Patent, this US Patent is incorporated herein with way of reference.

Pedestal 104 has a housing section 129, and housing section 129 has a substantially smooth bottom surface 130, relative

vertical limit

132 and 134 and relative substantially widthwise

edge

136 and 138, thereby defines a pedestal cavity 140.Pillar 142,144,146 and 148 is attached on the bottom surface 130, near four angles of pedestal cavity 140.Laterally relative

concave configuration

150 and 152 lays respectively at

widthwise edge

136 and 138 places.An edge 154 is defined in periphery at lid 102, and defines a flange 156 in the periphery of pedestal 104.When container closure, edge 154 contacts flange 156 hermetically.

In use, a mask is positioned in the cavity 140 and by pillar 142-148 is supported and retrain.When covering 102 when closing,

liner

126 and 128 is just in vertical direction and transversely with elastic type constraint mask.

Referring to Fig. 2 to Fig. 4, and Fig. 8 to Figure 17, hinge 106 has one first hinge member 170 and one second hinge member 172 with monomeric form (perhaps with the all-in-one-piece form), and it separates by the hinge 174 as Fig. 6 to Figure 16 as shown in.As being described in more detail hereinafter, hinge 174 is zones that a thickness reduces, so that hinge can deflection pivotally on function on being attached to described lid and pedestal the time, and constitutes one " movable hinge ".First hinge member 170 can be regarded as comprising an evener 180 that ends in the antelabium 182.One second hinge member 172 have other first, second, and the 3rd evener 186,188 and 190 and one antelabium 192.As can be seen from Figure, first, second, and the 3rd evener 186,188 and 190 adjacency obliquely, and the 3rd evener 190 ends in the antelabium 192.Show best that as institute in Figure 13 hinge 174 is to be defined by a cardinal principle arcuate slots 194 recess 196 relative with a cardinal principle to form.

Referring to Fig. 1, Fig. 2, Fig. 4 to Fig. 7 and Figure 18 to Figure 24, each bolt lock mechanism 108 all has a breech lock frame 200, a track 202, reaches an overhead guard projection or extension 204.As institute's demonstration best in the drawings, breech lock frame 200 comprises C shape (on a vertical cross-section) body 208, is used to hold a spring 210.This spring is preferably serpentine shaped and can compresses in this body.Breech lock frame 200 has inboard

widthwise edge

214 and 216 inclination (band oblique angle), that assemble substantially, to be used as camming surface.Breech lock frame 208 also has the front parts 218 and a back part 222 of a general curve shape, and front parts 218 have a plurality of clamping extensions 220.The

extension

228 and 230 and from

antelabium

232 and 234 that

extension

226 and 228 extend internally define upper recess 224 and lower notch 226 of back part 222 by separately.

Show best that as institute in Fig. 5 to Fig. 7, Figure 22 and Figure 24 track 202 has vertical limit 132 extended first extensions 240 from pedestal 104.Second extension 242 and the 3rd extension 244 extend from first extension 240 respectively, and its size is suitable for holding slidably the

recess

226 and 228 of breech lock 200.Track 202 also can comprise a spring perch 246, is positioned at the outside by first, second and third extension 240,242 and 244 formed structures.

Extension 250 extends from covering vertical limit 114 of 102, and presents a bevelled surface 252 substantially, as shown in Figure 23 and Figure 25.One antelabium 254 extends from a main part 256 of extension 250.When container closed fully, antelabium 254 alignd with the 3rd extension 244 of pedestal breech lock assembly substantially.

Breech lock 200 is arranged on the track 202 slidably, makes spring 210 recline breech lock 200 and the breech lock 200 of setovering with away from spring perch 246.When container closes, the horizontal hypotenuse 214 of the inclined-plane 252 contact breech locks 200 of lid extension 204, thus force breech lock 200 to slip away and against adjacent spring perch 246 compression springs 210 from this place.When lid closed fully, spring 210 pressure reduced, so that breech lock 200 can move apart spring perch 246, thereby make track 254 hold the recess 224 of breech lock 200 partly.On this position, breech lock 200 is crossed over extension 215 and track 202, thereby lid is anchored on the position of closing.Hypotenuse 216 help from above or below automatically open breech lock, for example open by automatic operating equipment 257 as shown in figure 26.This operating equipment forces breech lock 200 to be opened by hypotenuse 216 being applied a power that makes progress, thereby breech lock is outwards promoted and make to cover with the pedestal orbit portion and can break away from.Similarly, referring to Fig. 5, Fig. 6 and Fig. 7, the camming surface of inclined-plane 252 or top cover jut is by automatically make the withdrawal of breech lock frame with the engagement on the inclined-plane 214 of breech lock frame, shown in the arrow among Fig. 6 251.This jut this inclined-plane of jumping over then, thus make breech lock frame its normal position that can snap back, shown in the arrow among Fig. 7 253.

In one embodiment, this container is to make by a technology that comprises the molded operation of succession.In an exemplary process, molded hinge also makes its curing.Then, from first mould, take out hinge and it is positioned in second mould.In second mould, inject second poly-mer that is applicable to lid and base component.Figure 16 shows how this hinge is embedded in this lid and the pedestal, and the machinery or chemical bond between the poly-mer that is used to form hinge, lid and pedestal, and

antelabium

182 and 192 is anchoring and fastening this hinge how.Breech lock 200 is independent molded forming, and wherein breech lock frame and spring are whole formation.Single-piece lid, pedestal and hinge are taken out from second mould after solidifying.Breech lock is installed on the track 202.At last, liner is adhered to cover on 102.Suitable succession molding process is disclosed in the 6th, 428, and No. 729, the 6th, 719, No. 381, the 6th, 402, No. 552 and the 6th, 077, in No. 124 US Patent and No. 20030025244 U.S. patent application case, it all is incorporated herein with way of reference.

Figure 16 shows the structure of this hinge when container of the present invention is opened fully.Figure 14 shows that hinge is in closed position, Figure 15 illustrate then that hinge is shown in an open position substantially and closed position between midpoint.How these figure illustrations realize during in the deflection of hinge 174 has that thickness reduces part place hinged when hinge.In certain embodiments, can be in an independent operation but not in overlapping molded operation process, the flexible hanger material is mechanically attached solid to pedestal and overhead guard.In certain embodiments, can use two kinds of materials to form movable hinge: a kind of is the flexible material that is used for movable hinge, and another kind is to be fit to by for example welding or by the attached solid material to pedestal and overhead guard of means such as the second overlapping molded operation.

The appropriate materials that is used to form this hinge comprises polypropylene and polyurethane, optionally contains a kind ofly to have the poly-mer of dissipativeness in essence with dissipation static.The material that is applicable to described lid, pedestal and hinge comprises acrylonitrile-butadiene-styrene (ABS), optionally has electrostatically dissipative, for example, StatPro 435TM is a kind of material that the owner Entegris company of the application's case is utilized when the product of molded these types.Decide on the concrete application of drafting of container, also can use other poly-mer.The poly-mer that is applicable to these and other application is disclosed in Handbook of Plastics, Elastomers, and Composites (chief editor Charles A.Harper, the third edition, 1996, McGraw-Hill) in, this handbook is incorporated herein with way of reference.

Although do not show in the drawings, yet can use an elastic sealing element, when container closes, between overhead guard and pedestal, to seal to this container.In certain embodiments, sealing member can form before molded overhead guard and pedestal, and can embed in the mould of described overhead guard and pedestal, to engage by the overlapping molding.

Owing to can under the situation that does not deviate from spirit of the present invention, make many modifications, thereby scope of the present invention is not limited only to the illustrated and described embodiment of this paper to the present invention.But scope of the present invention will be defined by enclose claims and equivalent scope thereof.

Claims

1. mark packed container, described container comprises:

One lid and a pedestal, it defines a storage area, and described lid and described pedestal respectively have a hinge face and a latch surface, and wherein said lid and pedestal link to each other by hinge on its hinge face;

The described latch surface of described pedestal comprises its bottom from the track of described base extension, and one from the extended spring perch of described track, described track have a track pedestal, be fixed to described track pedestal the track platform, and one with described spring perch rail end point separately;

The described latch surface of described lid comprises the breech lock meshing part that extend from described lid its bottom, and described breech lock meshing part has a guide part; And

One bolt lock mechanism, it is used for described pedestal is fastened to described lid, described bolt lock mechanism defines a housing and comprises a breech lock frame and a spring, the described breech lock frame described track that slidably mates, wherein said breech lock frame has a lid meshing part, it comprises the notch portion that a guide part and a size are suitable for admitting the guide part of described lid, the spring of described bolt lock mechanism is arranged in the described breech lock frame, its closed side from described breech lock frame extends to the described spring perch on the described latch surface of described pedestal, described bolt lock mechanism is slidably along described track setting, the mutual action of the guide part of its guide part by described lid and described breech lock frame is subjected to described compression of spring, and the motion of described bolt lock mechanism is subjected to the rail end point restriction in one direction, and on other direction, be subjected to the restriction of the spring force that causes towards the displacement of described spring perch because of described breech lock frame and spring.

2. mark packed container as claimed in claim 1 is characterized in that described breech lock frame and spring are Unitarily molded forming.

3. mark packed container as claimed in claim 1 is characterized in that described breech lock frame comprises second meshing part that is positioned at below the described lid meshing part, to allow from the described breech lock of following actuating.

4. mark packed container as claimed in claim 1 it is characterized in that the breech lock meshing part of described lid has a ramp shaped, and the lid meshing part of described breech lock frame has a relative ramp shaped.

5. mark packed with a bolt lock mechanism, described mark packed container has a lid and a pedestal, described lid and described pedestal have latch surface respectively, described latch surface together form a track with first and second end points, and one between described end points isolated spring perch, described bolt lock mechanism comprises:

One breech lock frame, its described track and seal described spring perch of slidably mating;

One spring, its in described breech lock frame towards described spring perch setting;

Wherein said breech lock frame has one makes described lid and pedestal latch surface keep the primary importance of closing up or separating, the position of described breech lock frame on described track limited by described first rail end point, and kept by the power that acts on the described spring on the described spring perch;

Wherein said breech lock frame has the second place that makes described lid and pedestal latch surface join or to separate, when on the retracted orientation when the described second rail end point application of force is revolted described spring force to promote described breech lock frame, arrive the described second place.

6. mark packed container as claimed in claim 5 is characterized in that described breech lock frame and spring are Unitarily molded forming.

7. mark packed container as claimed in claim 5 is characterized in that described container has two described bolt lock mechanisms, and described two bolt lock mechanisms are arranged to have the retracted orientation of relative orientation, is beneficial to carry out self actuating.

8. mark packed container as claimed in claim 5 it is characterized in that the breech lock meshing part of described lid has a ramp shaped, and the lid meshing part of described breech lock frame has a relative ramp shaped.

9. mark packed container, it comprises a pedestal, a lid and one described pedestal is connected to the hinge of described lid, and described mark packed container is made by following process:

One first mould and one first poly-mer are provided, are used for the described hinge of a mark packed container;

One second mould and one second poly-mer are provided, are used for the described pedestal and the lid of a mark packed container;

In described first mould, use the described hinge of described first polymer molding;

From described first mould, take out described hinge;

Described hinge is positioned in described second mould;

Use described second poly-mer around molded described lid of described hinge and pedestal.

10. mark packed container as claimed in claim 9 is characterized in that it is to make by the process that further comprises following steps:

One the 3rd mould and a terpolymer are provided;

In described the 3rd mould,, be used for described lid is fastened to described pedestal from the molded breech lock of described terpolymer;

Described breech lock is mounted on the side of described lid or pedestal and does not use described hinge.

11. the mark packed container as process as described in the claim 9 is made is characterized in that described second mould provides described pedestal and lid, described pedestal and lid respectively have the each several part of the track that latch surface and its bottom extends from described latch surface.

12. the mark packed container of making as process as described in the claim 10, it is characterized in that described second mould provides described pedestal and lid, described pedestal and lid respectively have the each several part of the track that latch surface and its bottom extends from described latch surface, and the described step that described breech lock wherein is installed comprises described breech lock is mounted to step on the part of described track.

13. the mark packed container as process as described in the claim 9 is made is characterized in that described first and second poly-mer is identical.

14. the mark packed container as process as described in the claim 9 is made is characterized in that described first and second poly-mer is different.

15. as the mark packed container that process as described in the claim 10 is made, it is characterized in that the described terpolymer and described first or second polymer phase with.

16. the mark packed container as process as described in the claim 10 is made is characterized in that described terpolymer is different from described first and second poly-mer.

17., it is characterized in that the described step of molded described breech lock comprises module one and described breech lock all-in-one-piece spring as the mark packed container that process as described in the claim 10 is made.

18. the mark packed container as process as described in the claim 9 is made is characterized in that described first poly-mer comprises multiple polymers.

19. the mark packed container as process as described in the claim 10 is made is characterized in that described first poly-mer comprises multiple polymers.

20. open one as claimed in claim 7ly for one kind, it is characterized in that comprising following steps: force in the mechanical actuator between described two breech lock framves, to force described two breech lock framves separately by the method for breech lock light shield container.