CN101162239A - Detecting probe card - Google Patents
Detecting probe card Download PDFInfo
- Publication number
- CN101162239A CN101162239A CNA2006101169385A CN200610116938A CN101162239A CN 101162239 A CN101162239 A CN 101162239A CN A2006101169385 A CNA2006101169385 A CN A2006101169385A CN 200610116938 A CN200610116938 A CN 200610116938A CN 101162239 A CN101162239 A CN 101162239A
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- China
- Prior art keywords
- probe
- circuit board
- printed circuit
- probe card
- open slot
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The invention discloses a probe card, comprising a fixing element of the probe card, an open slot fixed on the fixing element of the probe card, a printed circuit board connected with the open slot through a fixing device, a decoupling capacitor arranged on the surface of the printed circuit board, a ferrite connected in series between a probe and the bottom of the printed circuit board. The invention, with the ferrite connected in series between the probe and the bottom of the printed circuit board, can not only filter high-frequency noise between a power supply and the ground, but also eliminate the signal interference caused by high frequency harmonic resonance generated by the decoupling capacitor, thereby better ensuring the measuring precision and stability, improving the measuring accuracy and the production efficiency and saving production costs.
Description
Technical field
The present invention relates to the integrated circuit technology field, the probe in especially a kind of integrated circuit testing field.
Background technology
Probe is an integrated circuit technology field important devices, and probe is applied in integrated circuit as yet before the encapsulation, does function test at wafer with probe, selects substandard product and carries out follow-up encapsulation engineering again, avoids bad product to continue processing and causes waste.The performance of probe has very big influence to the cost in the ic manufacturing process.
In test, be distributed with passage and power lead on the printed circuit board (PCB), probe is connected with printed circuit board (PCB) to be tested signal, and probe is connected with probe.As shown in Figure 1, common probe comprises printed circuit board (PCB) 3, open slot 1, probe fixture 2.Open slot 1 is fixed on the probe fixture 2, and printed circuit board (PCB) 3 is fixedlyed connected with open slot 1 by stationary installation.When utilizing probe that wafer is tested, high-frequency digital signal can produce test signal and disturb, and influences test result.And the power supply on the wafer of required test is given by probe.In order to reduce interference, increase the order of accuarcy of test result, before being added on the wafer, power supply to carry out filtering to power supply.As shown in Figure 2, existing improving one's methods is to increase decoupling capacitor C1, C2 between probe power outlet V11 and ground, and the high frequency noise short circuit is fallen.But list can cause high-frequency resonant with decoupling capacitor, causes new interference, influences test result.
Summary of the invention
Technical matters to be solved by this invention provides a kind of probe, not only can do the function test with probe at wafer, and can reduce the interference of digital signal in the test, improve accuracy rating of tests, increase the product yields, saving manufactures a finished product and enhances productivity.
For solving the problems of the technologies described above, the technical scheme that probe of the present invention adopted is, comprise the probe fixture, be fixed on the open slot on the probe fixture, the printed circuit board (PCB) of fixedlying connected with open slot by stationary installation, the decoupling capacitor of printed circuit board surface also comprises the Ferrite that is connected between probe and the printed circuit board (PCB) bottom.
The present invention not only can filter the high frequency noise between power supply and the ground by the Ferrite of connecting between probe and printed circuit board (PCB) bottom, can also eliminate the signal that high-frequency resonant that decoupling capacitor causes causes and disturb.Make the switch of relay switch the influence of test also little.Better guarantee the precision and the stability of test.
Description of drawings
The present invention is further detailed explanation below in conjunction with the drawings and specific embodiments:
Fig. 1 is existing probe card configuration synoptic diagram;
Fig. 2 is an improved probe circuit diagram in the prior art;
Fig. 3 is a probe card configuration synoptic diagram of the present invention;
Fig. 4 is a middle probe card circuit diagram of the present invention.
Embodiment
As shown in Figure 3, probe of the present invention comprises probe fixture 2, be fixed on the open slot 1 on the probe fixture 2, the printed circuit board (PCB) 3 of fixedlying connected with open slot by stationary installation, the decoupling capacitor 4 of printed circuit board surface, also comprise the Ferrite 5 that is connected between probe and the printed circuit board (PCB) bottom, this Ferrite 5 is the surface mount magnetic bead.
As shown in Figure 4, in probe circuit of the present invention, probe outlet power supply V11 is divided into two-way and receives wafer power import V21 and V22 respectively, be connected to decoupling capacitor C1 and C2 between probe outlet power supply V11 and the ground, it is the decoupling capacitor 4 among Fig. 3, this decoupling capacitor C1 and C2 filter high frequency noise between probe outlet power supply V11 and the wafer power import V21 and the high frequency noise between probe outlet power supply V11 and the wafer power import V22 respectively, surface mount exports between power supply V11 and the wafer power import V21 in probe with magnetic bead F1 series connection, surface mount between probe outlet power supply V11 and wafer power import V22, is removed the high-frequency resonant that capacitor filtering causes with magnetic bead F2 series connection.
Probe of the present invention is by the Ferrite of connecting between probe and printed circuit board (PCB) bottom, not only can filter the high frequency noise between power supply and the ground, more can eliminate the signal that high-frequency resonant that decoupling capacitor causes causes disturbs, better guarantee the precision and the stability of test, improve accuracy of test, increase production efficiency, save production cost.
Claims (3)
1. probe, comprise the probe fixture, be fixed on the open slot on the probe fixture, the printed circuit board (PCB) of fixedlying connected with open slot by stationary installation, the decoupling capacitor of printed circuit board surface, it is characterized in that, also comprise the Ferrite that is connected between probe and the printed circuit board (PCB) bottom.
2. probe as claimed in claim 1 is characterized in that, described Ferrite is a magnetic bead.
3. as claimed in claim 1, it is characterized in that described Ferrite is the surface mount magnetic bead.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2006101169385A CN101162239A (en) | 2006-10-09 | 2006-10-09 | Detecting probe card |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2006101169385A CN101162239A (en) | 2006-10-09 | 2006-10-09 | Detecting probe card |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101162239A true CN101162239A (en) | 2008-04-16 |
Family
ID=39297193
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2006101169385A Pending CN101162239A (en) | 2006-10-09 | 2006-10-09 | Detecting probe card |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101162239A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103869109A (en) * | 2012-12-12 | 2014-06-18 | 华邦电子股份有限公司 | Probe card and welding method |
-
2006
- 2006-10-09 CN CNA2006101169385A patent/CN101162239A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103869109A (en) * | 2012-12-12 | 2014-06-18 | 华邦电子股份有限公司 | Probe card and welding method |
| CN103869109B (en) * | 2012-12-12 | 2017-10-10 | 华邦电子股份有限公司 | Probe card and its welding method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C12 | Rejection of a patent application after its publication | ||
| RJ01 | Rejection of invention patent application after publication |
Open date: 20080416 |