CN101149424A - Giant magnetoresistance sensor characteristic detection device and method - Google Patents

Giant magnetoresistance sensor characteristic detection device and method Download PDF

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Publication number
CN101149424A
CN101149424A CNA2007101764915A CN200710176491A CN101149424A CN 101149424 A CN101149424 A CN 101149424A CN A2007101764915 A CNA2007101764915 A CN A2007101764915A CN 200710176491 A CN200710176491 A CN 200710176491A CN 101149424 A CN101149424 A CN 101149424A
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giant magnetoresistance
magnetic field
signal
sensor
temperature
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CN100561249C (en
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钱政
陈从强
任雪蕊
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Beihang University
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Beihang University
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Abstract

The invention relates to a characteristic detecting facility through gigantic magnetic resistance (GMR) feeler search. This invention is consist of magnetic field arisesing device, which include magnet position modulating parts and a revolution flat roof, and gigantic magnetic resistance (GMR) feeler search depositing device which located in the central of the magnetic field arisesing device. The invention disclosed a characteristic gigantic magnetic resistance (GMR) feeler search detecting method. In broad-band magnetic field, it can work well under the temperature and libration interferes. Due to this reason, the capability changing of a feeler search under such interfere is overall evaluated, then, an input-output characteristic curve will be built in nature. This facility is simple and convinence, especially proper for quick gigantic magnetic resistance (GMR) feeler search characteristic detecting in large quantities.

Description

A kind of giant magnetoresistance sensor characteristic detection device and method
Technical field
The present invention relates to giant magnetoresistance (GMR) sensor detecting, relate in particular to giant magnetoresistance sensor characteristic detection device and method under a kind of broad frequency band the action of a magnetic field.
Background technology
Present existing giant magnetoresistance sensor test macro is formed by field generator for magnetic and sensor Auto-Test System.Field generator for magnetic is made up of permanent magnet or solenoid etc., and Auto-Test System is many to be constituted based on LabVIEW software.The magnetic field that permanent magnet produces belongs to static magnetic field, and the solenoid magnet field frequencies range depends on the solenoid link excess current, and the equal continually varying current source of frequency and amplitude is with high costs.Like this, though the frequency band of giant magnetoresistance sensor is very wide, existing test macro all is the test on certain Frequency point basically, lacks the means of full test giant magnetoresistance sensor performance in the broad frequency band, and it is extremely urgent to develop new field generator for magnetic.
In addition, existing giant magnetoresistance sensor test macro lacks the means of simple and feasible to the test of performance under temperature and the vibration interference, temperature test needs the cooperation of temperature control box usually, vibration test then needs the intervention of shaking table, when improving cost of testing system, also increased the complexity of system design, realization and adjustment.Giant magnetoresistance sensor can run into the influence of factors such as temperature, vibration when using, present test macro lacks the full test assessment of multifactor combined action lower sensor performance.
In addition, existing test macro ubiquity complex structure, and operation is simple inadequately, convenient, is difficult to satisfy the test fast comprehensively of giant magnetoresistance sensor characteristic under the situation in enormous quantities.
Summary of the invention
In view of this, the technical problem to be solved in the present invention is to provide a kind of giant magnetoresistance sensor characteristic detection device and method, can measure broad frequency band scope internal magnetic field situation of change lower sensor input-output characteristic comprehensively.
For achieving the above object, technical scheme of the present invention is achieved in that
A kind of giant magnetoresistance GMR sensor characteristic detection device, it is characterized in that: this device comprises: field generator for magnetic (1) and giant magnetoresistance sensor apparatus for placing (2), described giant magnetoresistance sensor apparatus for placing (2) is positioned at the center of described field generator for magnetic (1), and described field generator for magnetic (1) is used for producing the continually varying alternating magnetic field by changing magnet positions and motor speed; Described giant magnetoresistance sensor apparatus for placing (2) is used for output voltage signal, and described alternating magnetic field is measured.
Described field generator for magnetic (1) is made of magnet positions adjusting mechanism (3) and rotation platform (4), and wherein, described magnet positions adjusting mechanism (3) is used for producing big or small continually varying magnetic field by changing magnet positions; Described rotation platform (4) is used for producing alternating magnetic field by changing motor speed; Described magnet positions adjusting mechanism (3) is fixed on the rotation platform (4), magnet positions adjusting mechanism (3) is made of magnet fixing device (8) and slide rail (9), permanent magnet (10) is fixed in the magnet fixing device (8), and rotation platform (4) links to each other with the rotating shaft (12) of motor (11).
Described giant magnetoresistance sensor apparatus for placing (2) comprises sensor mounting circuit boards (5), sensor mounting circuit boards (5) mainly is equipped with teslameter probe (6) and giant magnetoresistance sensor (7), wherein, described teslameter probe (6) the standard Magnetic Field conversion of signals that is used for measuring is a voltage signal; Described giant magnetoresistance sensor (7) is used for output voltage signal; Described giant magnetoresistance sensor apparatus for placing (2) comprising: rotating disk (13), link to each other with sensor mounting circuit boards (5), and be used for the deflection angle in the magnetic field of generation and test giant magnetoresistance sensor (7) and field generator for magnetic (1) generation.
Described device further comprises: resistance of heating (19) and platinum resistance temperature sensor (17), wherein, the thermal effect that the described resistance of heating (19) is used for changing by input current improves temperature, and the temperature signal that described platinum resistance temperature sensor (17) is used for measuring is converted to voltage signal; Perhaps, heat sink (20) and the platinum resistance temperature sensor (17) formed by wireway (21) and liquid nitrogen (22), wherein, described heat sink (20) is used for importing liquid nitrogen (22) by wireway (21) and reduces temperature, and the temperature signal that described platinum resistance temperature sensor (17) is used for measuring is converted to voltage signal.
Giant magnetoresistance sensor apparatus for placing (2) comprising: horizontal direction vibrating mechanism (15) and/or vertical direction vibrating mechanism (16) and piezoelectric acceleration transducer (18), and described horizontal direction vibrating mechanism (15) is used to produce the horizontal direction vibration signal; Described vertical direction vibrating mechanism (16) is used to produce the vertical direction vibration signal; Described piezoelectric acceleration transducer (18) output horizontal direction vibration signal or vertical direction vibration signal.
This method comprises: adjust magnetic field size and rotating speed of motor and produce the continually varying alternating magnetic field, under this action of alternating magnetic field, the giant magnetoresistance sensor output voltage signal detects behind signal condition.
This method further comprises: adjust the angle of giant magnetoresistance sensor (7) and magnetic direction, export its voltage signal; Perhaps, regulate temperature signal, this temperature signal is converted to voltage signal by heat resistance and/or heat sink; Perhaps, produce the vibration interference signal, export this vibration interference signal according to the control law of setting.
Described adjustment magnetic field size and rotating speed of motor produce the continually varying alternating magnetic field, comprise: adjust the magnetic field size by adjusting permanent magnet material and/or the magnetic field stationary installation position in slide rail, regulate the frequency of rotating magnetic field by the rotational velocity range of setting motor.
Temperature-rise period is realized by the heating effect of current of the resistance of heating, temperature-fall period is realized by heat sink, import liquid nitrogen by the wireway that is right against the giant magnetoresistance sensor apparatus for placing and realize, temperature signal is by the output of the platinum resistance temperature sensor on the sensor mounting circuit boards.
The control law of setting horizontal direction vibrating mechanism and vertical direction vibrating mechanism micromachine respectively produces horizontal direction vibration interference signal and/or vertical direction vibration interference signal, and the vibration interference signal is exported by the piezoelectric acceleration transducer on the sensor mounting circuit boards.
The invention has the beneficial effects as follows: can be under the influence of temperature disturbance signal, vibration interference signal the characteristic of testing sensor, giant magnetoresistance sensor characteristic in the time of also can having angle to giant magnetoresistance sensor and magnetic direction is tested, with many disturbing factors combined action lower sensor changes of properties such as comprehensive assessment temperature, vibrations, thereby from setting up the input-output characteristic curve of sensor in essence, device structure is simple, easy to operate, be applicable to comprehensively testing fast the giant magnetoresistance sensor performance under the situation in enormous quantities.
Description of drawings
Fig. 1 is giant magnetoresistance sensor characteristic detection device structural representation among the present invention;
Fig. 2 is giant magnetoresistance sensor apparatus for placing structural representation among the present invention;
Fig. 3 is the structural representation of sensor mounting circuit boards among the present invention;
The Sensor's Static characteristic figure that Fig. 4 records for giant magnetoresistance sensor characteristic detection device among the present invention;
Fig. 5 A is for applying the output signal synoptic diagram of giant magnetoresistance sensor after the vibration interference among the present invention 20 ℃ the time;
Fig. 5 B is for applying the output signal synoptic diagram of giant magnetoresistance sensor after the vibration interference among the present invention 70 ℃ the time.
Embodiment
Be illustrated in figure 1 as a kind of giant magnetoresistance sensor characteristic detection device, this system is made up of field generator for magnetic 1 and giant magnetoresistance sensor apparatus for placing 2, and field generator for magnetic 1 is used for producing the continually varying alternating magnetic field by changing magnet positions and motor speed; Giant magnetoresistance sensor apparatus for placing 2 is used for output voltage signal, and described alternating magnetic field is measured.Wherein field generator for magnetic 1 is made up of magnet positions adjusting mechanism 3 and rotation platform 4, and magnet positions adjusting mechanism 3 is used for producing big or small continually varying static magnetic field by changing magnet positions; Rotation platform 4 is used for producing alternating magnetic field by changing motor speed.Magnet positions adjusting mechanism 3 is fixed on the rotation platform 4, rotation platform 4 links to each other with the rotating shaft 12 of motor 11, magnet positions adjusting mechanism 3 is made of magnet fixing device 8 and slide rail 9, magnet fixing device 8 can slide in slide rail 9, slide rail 9 is marked with scale, and permanent magnet 10 is fixed in the magnet fixing device 8.
Be illustrated in figure 2 as the giant magnetoresistance sensor apparatus for placing, this device places the center of field generator for magnetic 1, giant magnetoresistance sensor apparatus for placing 2 is linked to each other in turn by vibrating mechanism 14, rotating disk 13, sensor mounting circuit boards 5 and constitutes, vibrating mechanism is made up of horizontal direction vibrating mechanism 15 and vertical direction vibrating mechanism 16, horizontal direction vibrating mechanism 15, vertical direction vibrating mechanism 16 link to each other with the micromachine that links to each other separately respectively, can control the vibration interference signal by the vibration regularity of setting micromachine; Rotating disk 13 can rotate in the horizontal direction, also can swing at vertical direction simultaneously, can read the deflection angle of giant magnetoresistance sensor and magnetic direction from the registration of rotating disk 13; The one side that sensor mounting circuit boards 5 links to each other with rotating disk is equipped with the resistance 19 of heating, heating effect of current by the resistance of heating produces the temperature variation signal, another side is equipped with high precision teslameter probe 6, giant magnetoresistance sensor 7, platinum resistance temperature sensor 17 and piezoelectric acceleration transducer 18, wherein high precision teslameter probe 6 can be converted to the standard Magnetic Field high low signal that measures voltage signal and output, giant magnetoresistance sensor 7 can output voltage signal, platinum resistance temperature sensor 17 can be converted to the temperature signal that measures voltage signal and output, and piezoelectric acceleration transducer 18 can be exported reflection vibration interference voltage of signals signal.
This giant magnetoresistance sensor characteristic detection method is achieved in that static magnetic field is produced by Nd-Fe-B permanent magnet, magnet fixing device can be free to slide in indicating the slide rail of scale, and the magnetic field size of magnet positions adjusting mechanism 3 centers realizes by adjusting the position of magnet fixing device in slide rail.The motor rotation can drive the field generator for magnetic rotation, thereby produce alternating magnetic field in the device center, different rotating speeds is the dynamic magnetic field under the corresponding different frequency, motor speed reaches as high as 18000 revolutions per seconds, be equivalent to the dynamic magnetic field that produces 300Hz, realize that by setting range of motor speeds magnetic field changes in certain broad frequency band, the standard Magnetic Field high low signal is exported after being converted to voltage signal by the probe of the high precision teslameter on the sensor mounting circuit boards, giant magnetoresistance sensor output voltage signal simultaneously carries out signal condition through signal conditioning circuit and outputs in the Auto-Test System based on LabVIEW software and test.
In the giant magnetoresistance sensor apparatus for placing, comprise that sensor mounting circuit boards and both sides thereof link to each other with bearing pin in order to fixing mechanical hook-up, rotating disk is marked with scale, and rotating disk can rotate freely in the horizontal and vertical directions by the rotation of horizontal direction and the swing of vertical direction.Because rotating disk and sensor mounting circuit boards are fixedly linked, giant magnetoresistance sensor is installed on the sensor mounting circuit boards, the deflection angle of rotating disk and magnetic direction is the angle of giant magnetoresistance sensor and magnetic direction, this angle can be read from rotating disk, the variation of horizontal direction and magnetic field angle realizes by the horizontal direction rotating disk, is carved with the angle sign on the horizontal direction rotating disk; The variation of vertical direction and magnetic field angle is rotated along bearing pin by sensor assembling module and is realized, the angle sign fixedly is carved with on the end face in the bearing pin two ends, angle information can be input to Auto-Test System based on LabVIEW software by keyboard, the characteristic of giant magnetoresistance sensor in the time of can testing giant magnetoresistance sensor and magnetic direction this moment certain responsive angle is arranged.
The output signal of giant magnetoresistance sensor is sent in the data collecting card behind gain and filtering adjustment circuit and is gathered in signal conditioning circuit, can carry out follow-up signal analysis and processing to the digital signal that collects.The platinum resistance temperature sensor output signal can directly enter and gather in the data collecting card and analyzing and processing.The piezoelectric acceleration transducer output signal is sent into behind charge amplifier and is gathered in the data collecting card and analyzing and processing.The standard Magnetic Field signal that teslameter records then carries out data read by the communication interface of teslameter and computing machine.
In alternating magnetic field, the temperature adjustment is divided into the intensification and the two kinds of situations of lowering the temperature, temperature-rise period is realized by the resistance of heating on the sensor mounting circuit boards in the giant magnetoresistance sensor apparatus for placing, the resistance of heating is regulated temperature by the thermal effect that electric current changes, and temperature-fall period then imports liquid nitrogen by the wireway that is right against the sensor apparatus for placing and realizes.In the temperature adjustment process, need after temperature change, to stablize certain hour and measure again, be evenly distributed as far as possible to guarantee temperature.Temperature signal outputs to analyzing and processing in the Auto-Test System by the platinum resistance temperature sensor on the sensor mounting circuit boards, thereby can the probe temperature signal to the influence of sensor characteristic, in the time of can measuring magnetic direction and giant magnetoresistance sensor direction equally certain angle is arranged, temperature signal is to the influence of sensor characteristic.
In the alternating magnetic field, applying by the vibrating mechanism on the giant magnetoresistance sensor apparatus for placing of vibration realizes, vibrational structure is divided into two groups in horizontal direction vibrating mechanism and vertical vibration mechanism, if the micromachine that the horizontal direction vibrating mechanism links to each other is A, the micromachine that links to each other with the vertical direction vibrating mechanism is B, respectively to motor A, the setting that motor B carries out the vibration interference signal makes micromachine drive to produce the vibration interference signal according to the control law of setting, the vibration interference signal is by being fixed in piezoelectric acceleration transducer output on the sensor mounting circuit boards with the characteristic variations situation of giant magnetoresistance sensor under the test vibration undesired signal, also can measure giant magnetoresistance sensor and magnetic direction has under the situation of certain responsive angle, and the vibration interference signal is to the influence of its characteristic.
The present invention can be used for analyzing simultaneously multifactor and relation sensor output signal, such as temperature, under the common situation about existing of vibration signal, to the influence of sensor characteristic, and provide the comprehensive performance index of sensor from factor such as analysis temperature, vibration in essence.
Based on experiment porch certain model giant magnetoresistance sensor is carried out performance test, obtained static state, dynamic performance testing result shown in Fig. 4, Fig. 5 A and Fig. 5 B.
The variation of Fig. 4 provides when being temperature variation giant magnetoresistance sensor static properties, horizontal ordinate is a changes of magnetic field, and ordinate is the output of giant magnetoresistance sensor, and this test result can be used for the influence of analysis temperature to sensor performance.
Fig. 5 A and Fig. 5 B are the giant magnetoresistance sensor output signal comparison diagram under temperature and the vibration interference acting in conjunction, as can be seen, under identical vibration interference effect, temperature variation also can cause the giant magnetoresistance sensor variation of output signals, therefore this simple and easy giant magnetoresistance sensor test platform help probe temperature, the characteristic variations rule of giant magnetoresistance sensor when vibrating multifactor combined action.
The above is preferred embodiment of the present invention only, is not to be used to limit protection scope of the present invention.

Claims (10)

1. giant magnetoresistance GMR sensor characteristic detection device, it is characterized in that: this device comprises: field generator for magnetic (1) and giant magnetoresistance sensor apparatus for placing (2), described giant magnetoresistance sensor apparatus for placing (2) is positioned at the center of described field generator for magnetic (1)
Described field generator for magnetic (1) is used for producing the continually varying alternating magnetic field by changing magnet positions and motor speed;
Described giant magnetoresistance sensor apparatus for placing (2) is used for output voltage signal, and described alternating magnetic field is measured.
2. device according to claim 1 is characterized in that, described field generator for magnetic (1) is made of magnet positions adjusting mechanism (3) and rotation platform (4), wherein,
Described magnet positions adjusting mechanism (3) is used for producing big or small continually varying magnetic field by changing magnet positions;
Described rotation platform (4) is used for producing alternating magnetic field by changing motor speed;
Described magnet positions adjusting mechanism (3) is fixed on the rotation platform (4), magnet positions adjusting mechanism (3) is made of magnet fixing device (8) and slide rail (9), permanent magnet (10) is fixed in the magnet fixing device (8), and rotation platform (4) links to each other with the rotating shaft (12) of motor (11).
3. device according to claim 1, it is characterized in that described giant magnetoresistance sensor apparatus for placing (2) comprises sensor mounting circuit boards (5), sensor mounting circuit boards (5) mainly is equipped with teslameter probe (6) and giant magnetoresistance sensor (7), wherein
The standard Magnetic Field conversion of signals that described teslameter probe (6) is used for measuring is a voltage signal;
Described giant magnetoresistance sensor (7) is used for output voltage signal;
Described giant magnetoresistance sensor apparatus for placing (2) comprising: rotating disk (13), link to each other with sensor mounting circuit boards (5), and be used for the deflection angle in the magnetic field of generation and test giant magnetoresistance sensor (7) and field generator for magnetic (1) generation.
4. device according to claim 3 is characterized in that, described device further comprises:
Heat resistance (19) and platinum resistance temperature sensor (17), wherein, the thermal effect that the described resistance of heating (19) is used for changing by input current improves temperature, and the temperature signal that described platinum resistance temperature sensor (17) is used for measuring is converted to voltage signal; Perhaps,
Heat sink (20) and the platinum resistance temperature sensor (17) formed by wireway (21) and liquid nitrogen (22), wherein, described heat sink (20) is used for importing liquid nitrogen (22) by wireway (21) and reduces temperature, and the temperature signal that described platinum resistance temperature sensor (17) is used for measuring is converted to voltage signal.
5. device according to claim 1 is characterized in that, giant magnetoresistance sensor apparatus for placing (2) comprising: horizontal direction vibrating mechanism (15) and/or vertical direction vibrating mechanism (16) and piezoelectric acceleration transducer (18),
Described horizontal direction vibrating mechanism (15) is used to produce the horizontal direction vibration signal;
Described vertical direction vibrating mechanism (16) is used to produce the vertical direction vibration signal;
Described piezoelectric acceleration transducer (18) output horizontal direction vibration signal or vertical direction vibration signal.
6. giant magnetoresistance sensor characteristic detection method, it is characterized in that: this method comprises: adjust magnetic field size and rotating speed of motor and produce the continually varying alternating magnetic field, under this action of alternating magnetic field, the giant magnetoresistance sensor output voltage signal detects behind signal condition.
7. method according to claim 6 is characterized in that: this method further comprises:
Adjust the angle of giant magnetoresistance sensor (7) and magnetic direction, export its voltage signal; Perhaps,
Regulate temperature signal by heat resistance and/or heat sink, this temperature signal is converted to voltage signal; Perhaps,
Produce the vibration interference signal according to the control law of setting, export this vibration interference signal.
8. method according to claim 7, it is characterized in that: described adjustment magnetic field size and rotating speed of motor produce the continually varying alternating magnetic field, comprise: adjust the magnetic field size by adjusting permanent magnet material and/or the magnetic field stationary installation position in slide rail, regulate the frequency of rotating magnetic field by the rotational velocity range of setting motor.
9. method according to claim 7, it is characterized in that: temperature-rise period is realized by the heating effect of current of the resistance of heating, temperature-fall period is realized by heat sink, import liquid nitrogen by the wireway that is right against the giant magnetoresistance sensor apparatus for placing and realize, temperature signal is by the output of the platinum resistance temperature sensor on the sensor mounting circuit boards.
10. method according to claim 7, it is characterized in that: the control law of setting horizontal direction vibrating mechanism and vertical direction vibrating mechanism micromachine respectively produces horizontal direction vibration interference signal and/or vertical direction vibration interference signal, and the vibration interference signal is exported by the piezoelectric acceleration transducer on the sensor mounting circuit boards.
CNB2007101764915A 2007-10-29 2007-10-29 A kind of giant magnetoresistance sensor characteristic detection device and method Expired - Fee Related CN100561249C (en)

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Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102508176A (en) * 2011-10-17 2012-06-20 南京林业大学 Detection method of uniformity of magnetic field of small permanent magnet
CN103454596A (en) * 2012-06-04 2013-12-18 国民技术股份有限公司 Alternating magnetic field sensing device
CN104344845A (en) * 2014-10-27 2015-02-11 北京航空航天大学 Magnetic field generating method used for dynamic feature test of giant magnetoresistance sensor
CN106950518A (en) * 2017-03-07 2017-07-14 中电海康集团有限公司 The test device and method of ferromagnetic resonance
CN108680880A (en) * 2018-07-24 2018-10-19 苏州佳祺仕软件技术有限公司 A kind of magnet tensile test equipment
CN108827365A (en) * 2018-08-14 2018-11-16 苏州德利而自动化科技有限公司 A kind of sensor detector
CN109991446A (en) * 2019-04-24 2019-07-09 中广核工程有限公司 A kind of nuclear power station main pump magnetoelectric tachometric transducer experimental rig and test method
CN111505545A (en) * 2020-04-30 2020-08-07 江苏多维科技有限公司 Electromechanical modulation magnetic resistance rotation type magnetic field intensity probe
CN112162227A (en) * 2020-09-22 2021-01-01 苏州微测电子有限公司 Automatic test system and test method for magnetic induction sensor
CN114167262A (en) * 2021-12-10 2022-03-11 深圳市芯杰矽科技有限公司 Debugging-free radio frequency transmitting and receiving integrated circuit performance detection equipment

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102508176A (en) * 2011-10-17 2012-06-20 南京林业大学 Detection method of uniformity of magnetic field of small permanent magnet
CN103454596A (en) * 2012-06-04 2013-12-18 国民技术股份有限公司 Alternating magnetic field sensing device
CN103454596B (en) * 2012-06-04 2017-04-12 国民技术股份有限公司 Alternating magnetic field sensing device
CN104344845A (en) * 2014-10-27 2015-02-11 北京航空航天大学 Magnetic field generating method used for dynamic feature test of giant magnetoresistance sensor
CN104344845B (en) * 2014-10-27 2016-08-24 北京航空航天大学 A kind of magnetic field method for generation for giant magnetoresistance sensor dynamic characteristic test
CN106950518A (en) * 2017-03-07 2017-07-14 中电海康集团有限公司 The test device and method of ferromagnetic resonance
CN108680880A (en) * 2018-07-24 2018-10-19 苏州佳祺仕软件技术有限公司 A kind of magnet tensile test equipment
CN108680880B (en) * 2018-07-24 2023-12-29 苏州佳祺仕科技股份有限公司 Magnet tensile test equipment
CN108827365A (en) * 2018-08-14 2018-11-16 苏州德利而自动化科技有限公司 A kind of sensor detector
CN109991446A (en) * 2019-04-24 2019-07-09 中广核工程有限公司 A kind of nuclear power station main pump magnetoelectric tachometric transducer experimental rig and test method
CN111505545A (en) * 2020-04-30 2020-08-07 江苏多维科技有限公司 Electromechanical modulation magnetic resistance rotation type magnetic field intensity probe
WO2021218668A1 (en) * 2020-04-30 2021-11-04 江苏多维科技有限公司 Electromechanical modulation magnetoresistive rotary magnetic field probe
CN111505545B (en) * 2020-04-30 2022-02-18 江苏多维科技有限公司 Electromechanical modulation magnetic resistance rotation type magnetic field intensity probe
CN112162227A (en) * 2020-09-22 2021-01-01 苏州微测电子有限公司 Automatic test system and test method for magnetic induction sensor
CN114167262A (en) * 2021-12-10 2022-03-11 深圳市芯杰矽科技有限公司 Debugging-free radio frequency transmitting and receiving integrated circuit performance detection equipment

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