CN101123176A - Vacuum processing apparatus - Google Patents
Vacuum processing apparatus Download PDFInfo
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- CN101123176A CN101123176A CNA2007101472847A CN200710147284A CN101123176A CN 101123176 A CN101123176 A CN 101123176A CN A2007101472847 A CNA2007101472847 A CN A2007101472847A CN 200710147284 A CN200710147284 A CN 200710147284A CN 101123176 A CN101123176 A CN 101123176A
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- loam cake
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- chamber body
- support frame
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- A—HUMAN NECESSITIES
- A45—HAND OR TRAVELLING ARTICLES
- A45C—PURSES; LUGGAGE; HAND CARRIED BAGS
- A45C11/00—Receptacles for purposes not provided for in groups A45C1/00-A45C9/00
- A45C11/34—Pencil boxes; Pencil etuis or the like
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- A—HUMAN NECESSITIES
- A45—HAND OR TRAVELLING ARTICLES
- A45C—PURSES; LUGGAGE; HAND CARRIED BAGS
- A45C13/00—Details; Accessories
- A45C13/10—Arrangement of fasteners
- A45C13/1023—Arrangement of fasteners with elongated profiles fastened by sliders
- A45C13/103—Arrangement of zip-fasteners
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- Manufacture Of Motors, Generators (AREA)
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Abstract
Disclosed herein is a vacuum processing apparatus for performing a desired process for a substrate after establishing a vacuum atmosphere therein. More particularly, the vacuum processing apparatus includes a vacuum chamber, which is divided into a chamber body and an upper cover. The upper cover is configured to be easily opened away from and closed to the chamber body.
Description
The application be submitted on February 5th, 2006, name is called the dividing an application of No. 200610003345.8 Chinese invention patent applications of " vacuum processing apparatus ".
Technical field
The present invention relates to a kind of vacuum processing apparatus, it carries out required technology to substrate after can setting up vacuum environment therein.More specifically, the present invention relates to a kind of vacuum processing apparatus, wherein vacuum chamber is divided into chamber body and loam cake, makes loam cake easily to open and to close to the chamber body from the chamber body.
Background technology
Vacuum processing apparatus mainly is used in semiconductor manufacturing facility and flat-panel monitor (FPD) manufacturing equipment.Semiconductor or FPD manufacturing equipment are designed to be fed to substrate in the equipment and utilize plasma etc. that substrate is carried out required technology, as etch process.At this, the example of FPD comprises LCD, PDP, OLED etc.With reference to figure 1, the vacuum processing apparatus of prior art generally includes three kinds of vacuum chambers, i.e. load locking room R, feed chamber T and process chamber P.
Load locking room R is used for receiving the substrate that will process so that mounting substrate equipment from external station, perhaps is used for discharging in equipment the substrate through processing fully so that unload carried base board.Feed chamber T is provided with the robot that is used for presenting substrate between each chamber, makes it to be sent to the substrate that will process process chamber or the substrate through processing fully is sent to load locking room from process chamber from load locking room.Process chamber P is used for utilizing under vacuum environment plasma or heat energy that substrate is carried out required technology, as film spraying plating process or etch process.For this reason, process chamber P comprises: supporting member is used for substrate in the supported chamber; The processing gas feed system is used for processing gas is fed to wherein; And gas extraction system, be used for this chamber of emptying and in the chamber, form vacuum.
Process chamber is used for utilizing various processing gas or plasma to repeat a large amount of technologies, and therefore, the equipment in the process chamber is easy to impaired or is polluted, thereby needs periodic replacement or maintenance.With reference to figure 2, the process chamber of the prior art that reference number 1 is represented is divided into chamber body 10 and loam cake 20, makes loam cake 20 to open so that to safeguarding and keep in repair in process chamber 1 inside from chamber body 10.Being used for opening and closing in the conventional solution of loam cake 20, jacking equipment has been installed to the top of the dust free room that wherein is provided with process chamber 1, facilitate the use this jacking equipment and promote loam cake 20 and it is opened from chamber body 10.In another conventional opening/closing solution, process chamber can be equipped with an opening/closing separately to open and close loam cake.
With reference to figure 3, it illustrates the example of the conventional opening/closing that is used for loam cake 20, and reference number 50 represented loam cake opening/closings are arranged at the outer surface of process chamber 1 to open and close loam cake 20.Opening/closing 50 comprises: vertical driver element is used for vertical-lifting loam cake 20; The horizontal drive unit is used for moving horizontally loam cake 20; And rotary unit, be used for rotating loam cake 20.In addition, opening/closing 50 is provided with and moves horizontally guiding 60, is used to provide the mobile route of horizontal drive unit.
The opening/closing process of the loam cake of being implemented by the opening/closing 50 with above-mentioned configuration 20 below will be described.At first, utilize the vertical driver element be included in the opening/closing 50 with loam cake 20 vertical-lifting predetermined altitudes.Then guide 60 loam cakes 20 that move horizontally through promoting along moving horizontally.After finishing such moving horizontally, utilize rotary unit with loam cake 20 Rotate 180s °.Like this, both all are opened the chamber body 10 of process chamber 1 and loam cake 20, thereby can carry out replacing and maintenance to being arranged at the relevant device in the process chamber 1.
Recently, pass through the size increase to some extent of the substrate of FPD manufacturing equipment processing.More specifically, the size that is included in the vacuum chamber in the FPD manufacturing equipment increases sharply.For example, consider available vacuum chamber at present, the loam cake of chamber has 3 meters large scale and the big weight more than 3 to 4 tons of taking advantage of 4 meters.Therefore, for the large-sized heavy loam cake of vertical-lifting vacuum chamber, be necessary for vertical driver element the air collector with high capacity is provided.Therefore, the loam cake of heavy chamber its during by vertical-lifting the deficiency on stability increase, and therefore to safeguarding and there is adverse effect the aspect of maintenance internal vacuum chamber.
Summary of the invention
Therefore, make the present invention, and an object of the present invention is to provide a kind of large-scale vacuum process equipment that opens and closes operation simply and easily that can guarantee loam cake according to above problem.
According to a first aspect of the invention, above and other purpose can realize that this vacuum processing apparatus comprises by a kind of vacuum processing apparatus is provided: the chamber body, and it has sluice valve, is used to make the substrate can loading and unloading; And loam cake, it is arranged on separably on the body of chamber and has a predetermined gap between it, and described vacuum processing apparatus further comprises: horizontal drive apparatus is used for moving horizontally loam cake on the direction that direction is set in the face of sluice valve; Interior wall construction, it is inserted in the sidewall of loam cake and is suitable for vertically moving so that close and open gap between chamber body and the loam cake; And the interior wall construction lifting device, it is arranged on the loam cake top and is suitable for vertically moving described interior wall construction.
According to a second aspect of the invention, above and other purpose can realize that this vacuum processing apparatus comprises by a kind of vacuum processing apparatus is provided: the chamber body, and it has sluice valve, is used to make the substrate can loading and unloading; And loam cake, it is arranged on separably on the body of chamber and has a predetermined gap between it, described vacuum processing apparatus further comprises: horizontal drive apparatus, and it is coupled to the outer surface of loam cake and is suitable for moving horizontally loam cake on the direction that direction is set perpendicular to sluice valve; Interior wall construction, it is inserted in the sidewall of loam cake and is suitable for vertically moving so that close and open gap between chamber body and the loam cake; And the interior wall construction lifting device, it is arranged on the loam cake top and is coupled to interior wall construction vertically to move described interior wall construction.
According to a third aspect of the invention we, above and other purpose can realize that this vacuum processing apparatus comprises by a kind of vacuum processing apparatus is provided: the chamber body, and it has sluice valve, is used to make the substrate can loading and unloading; And loam cake, it is arranged on separably on the body of chamber and has a predetermined gap between it, described vacuum processing apparatus further comprises: horizontal drive apparatus, and it is coupled to the outer surface of loam cake and is suitable for moving horizontally loam cake on the direction that direction is set perpendicular to sluice valve; And sealing device, being used for the optionally fringe region of closed chamber body and loam cake, the sealing device can separate with loam cake from the chamber body.
According to a forth aspect of the invention, above and other purpose can realize that this process equipment comprises by a kind of process equipment is provided: the chamber body, and it has sluice valve, is used to enable the loading and unloading of substrate; And loam cake, it is arranged on the body of chamber separably, and described process equipment further comprises: chamber body lifting device, it is installed in the lower surface of chamber body and is suitable for vertically moving described chamber body; And horizontal drive apparatus, the outer surface that it is installed in loam cake is used for moving horizontally loam cake on the direction that direction is set in the face of sluice valve.
According to a fifth aspect of the invention, above and other purpose can realize that this process equipment comprises by a kind of process equipment is provided: the chamber body, and it has sluice valve, is used to make the substrate can loading and unloading; And loam cake, it is arranged on the body of chamber separably, and described process equipment further comprises: chamber body lifting device, it is installed in the lower surface of chamber body and is suitable for vertically moving described chamber body; And horizontal drive apparatus, the outer surface that it is installed in loam cake is used for moving horizontally loam cake on the direction that direction is set perpendicular to sluice valve.
According to a sixth aspect of the invention, above and other purpose can realize that this process equipment comprises by a kind of process equipment is provided: the chamber body, and it has sluice valve, is used to make the substrate can loading and unloading; And loam cake, it is arranged on the body of chamber separably, and described process equipment further comprises: one or more horizontal drive unit is used for supporting loam cake so that move horizontally loam cake on the direction that direction is set in the face of sluice valve; A pair of loam cake travelling frame, the path that moves horizontally that it is positioned at the relative both sides of loam cake and is suitable for providing described horizontal drive unit in the mode that can vertically move; And a plurality of vertical driver elements, it is coupled to the lower surface of each loam cake travelling frame, and the preset distance that is spaced apart from each other, and described vertical driver element is used for vertical mobile loam cake travelling frame and loam cake.
According to a seventh aspect of the invention, above and other purpose can realize that this process equipment comprises by a kind of process equipment is provided: the chamber body, and it has sluice valve, is used to make the substrate can loading and unloading; And loam cake, it is arranged on the body of chamber separably, and described process equipment further comprises: the loam cake lifting device, it is arranged on separably and covers with vertical mobile loam cake on described; And horizontal drive apparatus, it is arranged on the opposite side of loam cake and is suitable for moving horizontally loam cake after loam cake is promoted by described loam cake lifting device.
According to an eighth aspect of the invention, above and other purpose can realize that this process equipment comprises by a kind of process equipment is provided: the chamber body, and it has sluice valve, is used to make the substrate can loading and unloading; And loam cake, it is arranged on the body of chamber separably, described process equipment further comprises: the conveying hoister chucking appliance system, and this conveying hoister chucking appliance system comprises: have the polygon columnar body of suitable thickness, this main body is provided with connecting ring in the center; And a plurality of connecting rings that are arranged on each corner of described main body lower surface and on diagonal, move to the center of main body, described connecting ring moves in or out simultaneously and changes the position.
Description of drawings
According to the detailed description that provides below in conjunction with accompanying drawing, above and other purpose of the present invention, characteristics and other advantage will obtain more clearly understanding, in the accompanying drawings:
Fig. 1 is the view of layout that each chamber of prior art vacuum processing apparatus is shown;
Fig. 2 is the schematic sectional view of the inside of the described prior art vacuum processing apparatus of explanation;
Fig. 3 is the stereogram that prior art loam cake opening/closing is shown;
Fig. 4 is the sectional view that illustrates according to the vacuum processing apparatus of first embodiment of the invention;
Fig. 5 illustrates according to the interior wall construction of first embodiment of the invention and the end view of interior wall construction lifting device;
Fig. 6 is the stereogram according to the vacuum processing apparatus of first embodiment of the invention;
Fig. 7 is the end view that illustrates according to the support frame of first embodiment of the invention;
Fig. 8 A is that the view that is included in according to the opening procedure of the loam cake in the vacuum processing apparatus of first embodiment of the invention is shown to 8C;
Fig. 9 is the sectional view that illustrates according to the vacuum processing apparatus of second embodiment of the invention;
Figure 10 illustrates according to the interior wall construction of second embodiment of the invention and the end view of interior wall construction lifting device;
Figure 11 is the stereogram that illustrates according to the loam cake travelling frame of second embodiment of the invention;
Figure 12 is the sectional view that illustrates according to the horizontal drive apparatus of second embodiment of the invention;
Figure 13 is the end view that illustrates according to the support frame of second embodiment of the invention;
Figure 14 A is that the view that is included in according to the opening procedure of the loam cake in the vacuum processing apparatus of second embodiment of the invention is shown to 14C;
Figure 15 is the sectional view that illustrates according to the vacuum processing apparatus of third embodiment of the invention;
Figure 16 illustrates according to the sealing device of third embodiment of the invention and the end view of sealing device driver element;
Figure 17 is the plane graph that illustrates according to the setting of the sealing device driver element of third embodiment of the invention and horizontal drive apparatus;
Figure 18 is the sectional view that illustrates according to the sealing device of third embodiment of the invention;
Figure 19 is the end view that illustrates according to the support frame of third embodiment of the invention;
Figure 20 A is that the view that is included in according to the opening procedure of the loam cake in the vacuum processing apparatus of third embodiment of the invention is shown to 20C;
Figure 21 is the sectional view that illustrates according to the vacuum processing apparatus of fourth embodiment of the invention;
Figure 22 is the end view that illustrates according to the chamber body lifting device of fourth embodiment of the invention;
Figure 23 is the stereogram according to the vacuum processing apparatus of fourth embodiment of the invention;
Figure 24 is the end view that illustrates according to the support frame of fourth embodiment of the invention;
Figure 25 A is that the view that is included in according to the opening procedure of the loam cake in the vacuum processing apparatus of fourth embodiment of the invention is shown to 25C;
Figure 26 is the sectional view that illustrates according to the vacuum processing apparatus of fifth embodiment of the invention;
Figure 27 is the end view that illustrates according to the chamber body lifting device of fifth embodiment of the invention;
Figure 28 is the stereogram that illustrates according to the loam cake travelling frame of fifth embodiment of the invention;
Figure 29 is the sectional view that illustrates according to the horizontal drive apparatus of fifth embodiment of the invention;
Figure 30 is the end view that illustrates according to the support frame of fifth embodiment of the invention;
Figure 31 A is that the view that is included in according to the opening procedure of the loam cake in the vacuum processing apparatus of fifth embodiment of the invention is shown to 31C;
Figure 32 is the sectional view that illustrates according to the vacuum processing apparatus of sixth embodiment of the invention;
Figure 33 is the stereogram according to the vacuum processing apparatus of sixth embodiment of the invention;
Figure 34 is the end view that illustrates according to the support frame of sixth embodiment of the invention;
Figure 35 A is that the view that is included in according to the opening procedure of the loam cake in the vacuum processing apparatus of sixth embodiment of the invention is shown to 35C;
Figure 36 is the sectional view that illustrates according to the vacuum processing apparatus of seventh embodiment of the invention;
Figure 37 is the plane graph that illustrates according to the loam cake lifting device of seventh embodiment of the invention;
Figure 38 is the sectional view that illustrates according to the vibrationproof member of seventh embodiment of the invention;
Figure 39 is the end view that illustrates according to the support frame of seventh embodiment of the invention;
Figure 40 A is that the view that is included in according to the opening procedure of the loam cake in the vacuum processing apparatus of seventh embodiment of the invention is shown to 40C;
Figure 41 is the plane graph that illustrates according to the conveying hoister chucking appliance system of eighth embodiment of the invention;
Figure 42 is the side cross-sectional, view of Figure 41; And
Figure 43 is the sectional view of being got along the A-A of line shown in Figure 42.
Embodiment
Describe preferred embodiment in detail now with reference to accompanying drawing according to vacuum processing apparatus of the present invention.
First embodiment
Vacuum processing apparatus according to present embodiment comprises: load locking room; Feed chamber; With one or more process chambers, but for convenience of description, below describe only at a process chamber.With reference to figure 4, comprise according to the vacuum processing apparatus 100 of present embodiment: chamber body 110; Loam cake 120; Horizontal drive apparatus 140; Interior wall construction 150; With interior wall construction lifting device 160.
In the vacuum processing apparatus 100 according to present embodiment, chamber body 110 has rectangular box shape generally, and loam cake 120 is arranged on the chamber body 110 separably, thereby constitutes vacuum chamber.Vacuum chamber is used for processing the large-area flat display substrate with rectangular shape wherein, and therefore has the rectangular box shape corresponding to described rectangular substrate generally.Vacuum chamber portion within it is provided with the gas extraction system (not shown) to form vacuum in the chamber.After setting up vacuum in the chamber, the substrate that is placed in the chamber is carried out required technology according to operating in of gas extraction system.
Interior wall construction 150 be inserted in the sidewall of loam cake 120 and be suitable for its vertical set up when mobile and release room in vacuum.With reference to figure 5, the interior wall construction 150 of present embodiment comprises: containment member 152; A plurality of connecting rods 154; With auxiliary seal member 156.Containment member 152 is inserted into along in the insertion groove 122 of the lower surface depression of loam cake 120 sidewalls, and is suitable for sealing the gap between loam cake 120 and the chamber body 110.Particularly, when loam cake 120 being supported for the spaced apart preset distance of chamber body 110, containment member 152 is inserted in the sidewall of loam cake 120.Containment member 152 be used for its vertical set up when mobile and release room in vacuum.In the present embodiment, containment member 152 has the rectangular loop shape generally, and is coupled to loam cake 120 when it is moved upwards up to the lower end of loam cake 120.Described a plurality of connecting rod 154 vertically passes some position of sidewall of loam cake 120 so that containment member 152 is connected to interior wall construction lifting device 160.Connecting rod 154 is coupled to a plurality of positions of the upper surface of containment member 152 in its lower end, and it is vertically mobile that containment member 152 can be stablized.Simultaneously, the containment member 152 of present embodiment has stairstepping, make surface of resulting step shape part closely contact, and another of this step shape part is surperficial closely contacts with auxiliary seal member 156, thereby in the chamber, sets up vacuum with the surface of chamber body 110.
Therefore, auxiliary seal member 156 is basic elements of character of present embodiment.Auxiliary seal member 156 contacts with containment member 152 in the position higher than the upper surface of chamber body 110, thus with the inner sustain of chamber at airtight conditions.More specifically, as shown in Figure 5, containment member 152 has the stairstepping bottom that defines two horizontal contact surfaces, i.e. first contact surface and second contact surface.First contact surface contacts with the upper surface of the sidewall of chamber body 110, and second contact surface contacts with auxiliary seal member 156.
Interior wall construction lifting device 160 is positioned at loam cake 120 tops, and is coupled to the interior wall construction 150 that passes loam cake 120 sidewalls, with vertical-lifting interior wall construction 150.In the present embodiment, as shown in Figure 5, interior wall construction lifting device 160 preferably includes: guide plate 162, and the upper end that it is positioned at loam cake 120 tops and is coupled to described a plurality of connecting rod 154, this guide plate 162 moves when being used for guiding connecting rod 154; And CD-ROM drive motor 164, it is fixedly mounted on the guide plate 162 with vertical removable guide 162.Because described a plurality of connecting rods 154 must move simultaneously, guide plate 162 is used for making the lifter motion of all connecting rods 154 synchronous.
In the present embodiment, horizontal drive apparatus 140 comprises pair of guide rails 142, and described guide rail is arranged in parallel so that loam cake 120 is therebetween.Guide rail 142 is used for guiding in the horizontal direction loam cake 120, and therefore the path that moves horizontally of loam cake 120 is provided.With reference to figure 6, each guide rail 142 all is divided into the 142a of first and the second portion 142b that extends horizontally to outside the loam cake 120 in the face of loam cake 120.Preferably, second portion 142b can be folding towards the sidewall perpendicular to the loam cake 120 of the 142a of first, makes it collapsible when not using, so that the shared area minimum of vacuum processing apparatus.
With reference to figure 7, in the present embodiment, support frame 170 comprises: rectangular horizontal frame unit 172; Vertical frame unit 174; And gap filling member 176.Horizontal frame member 172 has the height identical with guide rail 142 and extend moving horizontally with guiding loam cake 120 on the direction identical with guide rail 142.Vertically frame unit 174 is used for horizontal frame member 172 is supported in the height identical with guide rail 142.Preferably, vertically frame unit 174 is suitable for regulating the height of horizontal frame member 172 with the difference in height between elimination of level frame unit 172 and the guide rail 142.
Preferably, each gap filling member 176 can be provided with vertical driver element and vertically moves to guarantee it.
Preferably, support frame 170 further comprises one or more fixed cells 179, so that support frame 170 is fixed to chamber body 110.Fixed cell 179 be used for preventing support frame 170 loam cake 120 move horizontally and rotate during move apart chamber body 110.In the present embodiment, each fixed cell 179 all comprises a pair of fixed block 179a and steady pin 179b.Therefore, if described a pair of fixed block 179a accurately aims at each other, then steady pin 179b is inserted through fixed block 179a and support frame 170 is maintained the fixed position.
Opening/closing process according to the loam cake 120 of the vacuum processing apparatus 100 of present embodiment below will be described.
In vacuum processing apparatus 100, loam cake 120 is supported for makes it upwards and the distance of body 110 spaced apart 1mm in chamber, and therefore, do not need to promote loam cake 120 to 10mm according to present embodiment.In brief, as shown in Fig. 8 A, only interior wall construction 150 is raised according to the operation of relevant lifting device 160.Because interior wall construction 150 is raised, and has destroyed the airtight conditions of this chamber, and therefore discharged the vacuum in the chamber.Afterwards, shown in Fig. 8 B, loam cake 120 moves horizontally according to the operation of horizontal drive apparatus 140.In the case, when using support frame 170, support frame 170 must be positioned to closely contact with guide rail 142.When only using guide rail 142, the second portion 142b that opens guide rail 142 is to reach the stable radius of turn of loam cake 120.Guarantee moving horizontally loam cake 120 after its stable rotation that shown in Fig. 8 C, operation rotating member 177 is with loam cake 120 Rotate 180s °.By this way, loam cake 120 is upwards opened and is made it possible to keep in repair wherein equipment.After finishing maintenance of equipment, carry out the opening procedure of above-described loam cake 120 with opposite order, thereby close loam cake 120.
Second embodiment
Vacuum processing apparatus according to present embodiment comprises: load locking room; Feed chamber; With one or more process chambers, and for convenience of description, below describe only at a process chamber.With reference to figure 9, comprise according to the vacuum processing apparatus 200 of present embodiment: chamber body 210; Loam cake 220; Horizontal drive apparatus 240; Interior wall construction 250; With interior wall construction lifting device 260.
In the vacuum processing apparatus 200 according to present embodiment, chamber body 210 has rectangular box shape generally, and loam cake 220 is arranged on the chamber body 210 separably, thereby constitutes vacuum chamber.Vacuum chamber is used for processing the large-area flat display substrate with rectangular shape wherein, and therefore has the rectangular box shape corresponding to described rectangular substrate generally.Vacuum chamber portion within it is provided with the gas extraction system (not shown) to set up vacuum in the chamber.Utilizing after operating in of gas extraction system set up vacuum in the chamber, the substrate that is placed in the chamber is carried out required processing.
Described a plurality of connecting rod 254 vertically passes some position of sidewall of loam cake 220 so that containment member 252 is connected to interior wall construction lifting device 260.Connecting rod 254 is coupled to a plurality of positions of the upper surface of containment member 252 in its lower end, vertically move to realize the stable of containment member 252.The containment member 252 of present embodiment has stairstepping, make a surface of resulting step shape part closely contact with the surface of chamber body 210, and another surface of this step shape part closely contacts with auxiliary seal member 256, thereby sets up vacuum in the chamber.Therefore, auxiliary seal member 256 is basic elements of character of present embodiment.Auxiliary seal member 256 contacts with containment member 252 in the position higher than the upper surface of chamber body 210, and is suitable for inner sustain with the chamber at airtight conditions.More specifically, as shown in Figure 10, containment member 252 has the stairstepping bottom that defines two horizontal contact surfaces, i.e. first contact surface and second contact surface.First contact surface contacts with the upper surface of the sidewall of chamber body 210, and second contact surface contacts with auxiliary seal member 256.
Interior wall construction lifting device 260 is positioned at loam cake 220 tops, and is coupled to the interior wall construction 250 that passes loam cake 220 sidewalls, with vertical-lifting interior wall construction 250.In the present embodiment, interior wall construction lifting device 260 preferably includes: guide plate 262, and the upper end that it is positioned at loam cake 220 tops and is coupled to described a plurality of connecting rod 254, this guide plate 262 moves when being used for guiding connecting rod 254; And CD-ROM drive motor 264, it is fixedly mounted on the guide plate 262 with vertical removable guide 262.Because described a plurality of connecting rods 254 must move simultaneously, guide plate 262 is used for making all connecting rods 254 synchronous.
Therefore, in the present embodiment, horizontal drive apparatus 240 comprises: loam cake travelling frame 242; With a pair of device 244 that moves horizontally.In the position highly higher than the driving of sluice valve G, loam cake travelling frame 242 partly is arranged on the opposite side place of loam cake 220.Loam cake travelling frame 242 provides the path that moves horizontally of loam cake 220.
With reference to Figure 11, loam cake travelling frame 242 comprises: the first horizontal frame member 242a, each thereon surface support move horizontally first end of one of device 244; And the first vertical frame unit 242b, its lower surface that is coupled to the first horizontal frame member 242a is to be supported on predetermined altitude with the first horizontal frame member 242a.In the present embodiment, for the loam cake travelling frame 242 that makes assembling fully can be installed to vacuum chamber, the first horizontal frame member 242a is arranged on the position higher than the upper end of loam cake 220.And the first vertical frame unit 242b is arranged to make the wherein adjacent frame unit distance wideer than vacuum processing apparatus width that be spaced apart from each other.
Each moves horizontally second end that device 244 has first end that is fixedly installed on the loam cake travelling frame 242 and is coupled to loam cake 220.Moving horizontally device 244 is used for moving horizontally loam cake 220 along loam cake travelling frame 242.With reference to Figure 12, the device 244 that moves horizontally of present embodiment comprises: roller 244a, and it is coupled to loam cake travelling frame 242 and rotatablely moves to carry out thereon; Vertical connector 244b, it locates to be connected to roller 244a and loam cake 220 centers at various height; And motor 244c, be used to provide the required power of rotation roller 244a.With this configuration, even when roller 244a is arranged on the height different with loam cake 220 centers, roller 244a also can stably be coupled to loam cake 220 by means of vertical connector 244b, thereby can realize the rotation smoothly and the horizontal movement of loam cake 220.
With reference to Figure 13, in the present embodiment, support frame 270 comprises: second horizontal frame member 272; The second vertical frame unit 274; And gap filling member 276.Second horizontal frame member 272 has the height identical with the first horizontal frame member 242a and extend moving horizontally with guiding loam cake 220 on the direction identical with the first horizontal frame member 242a.The second vertical frame unit 274 is used for second horizontal frame member 272 is supported in the identical height with the first horizontal frame member 242a.Preferably, the second vertical frame unit 274 is suitable for regulating the height of second horizontal frame member 272, to eliminate the difference in height between the first and second horizontal frame member 242a and 272.
Preferably, each gap filling member 276 can be provided with vertical driver element and vertically moves to guarantee it.
Opening/closing process according to the loam cake 220 of the vacuum processing apparatus 200 of present embodiment below will be described.
In vacuum processing apparatus 200, loam cake 220 is supported for makes it upwards and the distance of body 210 spaced apart 1mm in chamber, and therefore, do not need to promote loam cake 220 to 10mm according to present embodiment.In brief, as shown in Figure 14 A, only interior wall construction 250 is raised according to the operation of relevant lifting device 260.Because interior wall construction 250 is raised, and has destroyed the airtight conditions of this chamber, and therefore discharged the vacuum in the chamber.Afterwards, as shown in Figure 14B, loam cake 220 moves horizontally according to the operation of horizontal drive apparatus 240.In the case, if use support frame 270, then support frame 270 must be arranged to closely contact with the first horizontal frame member 242a.Guarantee moving horizontally loam cake 220 after its stable rotation, shown in Figure 14 C, operation rotating member 277 and with loam cake 220 Rotate 180s °.By this way, loam cake 220 is upwards opened so that can keep in repair wherein equipment.After finishing maintenance of equipment, carry out the opening procedure of above-described loam cake 220 with opposite order, thereby close loam cake 220.
The 3rd embodiment
Vacuum processing apparatus according to present embodiment comprises: load locking room; Feed chamber; With one or more process chambers, but for convenience of description, below describe only at a process chamber.With reference to Figure 15, comprise according to the vacuum processing apparatus 300 of present embodiment: chamber body 310; Loam cake 320; Horizontal drive apparatus 340; With sealing device 350.
In the vacuum processing apparatus 300 according to present embodiment, chamber body 310 has rectangular box shape generally, and loam cake 320 is arranged on the chamber body 310 separably, thereby constitutes vacuum chamber.Vacuum chamber is used for processing the large-area flat display substrate with rectangular shape wherein, and therefore has the rectangular box shape corresponding to described rectangular substrate generally.Vacuum chamber is provided with the gas extraction system (not shown) to set up vacuum in the chamber in inside.Utilizing after operating in of gas extraction system set up vacuum in the chamber, the substrate that is placed in the chamber is carried out required technology.
As shown in figure 15, chamber body 310 is formed with substrate inlet E, its as receiving substrate from external station so that mounting substrate and discharge substrate so that unload the path of carried base board.Usually, substrate carries out loading and unloading when it moves with the lying status level, therefore, and one of sidewall of substrate inlet E break-through chamber body 310.For opening and closing the substrate inlet, chamber body 310 is provided with sluice valve G.Substrate inlet E continues to open in the process of loading and unloading substrate, but must close after the mounting substrate fully, thereby carries out required substrate processing under the closed condition of chamber.Therefore, sluice valve G vertically moves and opening and closing substrate inlet E.
Particularly, chamber body 310 is provided with outward extending lower process 312 along its upper end face, and loam cake 320 is provided with outward extending upper process 322 along its rear surface.At this, the upper end face of chamber body 310 comprises the upper surface of chamber body 310 sidewalls, and the rear surface of loam cake 320 comprises the lower surface of loam cake 320 sidewalls.
In passing because the sidewall of chamber made by the material (as metal) of relative stiffness, even described upper and lower projection 322 and 312 and upper and lower contact surface 354 and 352 processed subtly, still have fine clearance therebetween inevitably.This makes and to be difficult to realize complete airtight conditions in the chamber.In order to address this problem, preferably form auxiliary seal O at lower and upper contact surface 352 and 354.In the case, auxiliary seal O makes by omiting the flexible material of tool.Therefore, when sealing device and lower and upper projection 312 with 322 both when closely contacting, auxiliary seal O be inserted in lower and upper contact surface 352 and 354 and lower and upper projection 312 and 322 between in by slight compression, thereby prevent between it, to produce the gap.Under specific circumstances, the leakage efficiency that increases for realizing, two or more auxiliary seal O are can the mode on another stacked.More preferably, for preventing auxiliary seal O from its accurate offset, preferred lower and upper contact surface 352 and 354 is formed with and is used to locate and the fixing fixed groove of auxiliary seal O.
Perhaps, as shown in Figure 18, sealing device 350a can have the lower and upper contact surface 352a and the 354a of inclination, and the lower and upper projection 312 of corresponding chamber and 322 both can have inclined surface.Compare with above-described horizontal contact surface, use the effect that the inclination contact surface has increases contact area, thereby make the increase of leakage efficiency.And when providing auxiliary seal O for inclined surface, contact area can enlarge more, and a plurality of auxiliary seal can be easily positioned on this place.
In the present embodiment, can further provide a plurality of sealing device driver elements 360 with can be on diagonal moving sealing device 350 automatically.Described a plurality of sealing device driver element 360 is coupled to the turning of the lower end of sealing device 350.At this, diagonal is with respect to vertical direction angle at 45 and thus with respect to the direction of floor tilt.With reference to Figure 16, each in the sealing device driver element 360 of present embodiment all comprises: roller 362; With cam 364.Roller 362 rotatably is positioned at one of lower comer of sealing device 350 and locates.Cam 364 be configured to rotation when roller 362 contacts and on diagonal moving sealing device 350.Therefore, rotation when roller 362 contacts with roller 362 simultaneously in cam 364 rotations, thus sealing device 350 is moved on diagonal.
Preferably, sealing device driver element 360 further comprises cam rotation stopper 366, also therefore limits the diagonal moving range of sealing device 350 with the radius of turn of restriction cam 364.With regard to operating efficiency, preferably sealing device 350 has the minimum that is enough to set up and discharges the vacuum in this chamber and moves, and therefore uses cam rotation stopper 366 to realize the minimum moving range of sealing device 350.
In the present embodiment, as shown in Figure 17, preferably, sealing device driver element 360 is arranged on the relative two cross side places of the chamber body 310 except the opposite side of the chamber body 310 that moves horizontally device 344 that is provided with horizontal drive apparatus 340.If both are arranged on same side each other sealing device driver element 360 and horizontal drive apparatus 340, then their can be interfered in the operation of sealing device driver element 360 and horizontal drive apparatus 340 and difficulty is installed.Therefore, sealing device driver element 360 must be arranged on the side-walls of the chamber body 310 except being provided with the sidewall that moves horizontally device 344.
Horizontal drive apparatus 340 is used for moving horizontally loam cake 320 on the direction that direction is set perpendicular to sluice valve G.For making the shared floor space minimum of vacuum processing apparatus 300, present embodiment proposes, maintenance loam cake 320 in the vacant space between each process chamber.For this reason, loam cake 320 must move horizontally on the direction that direction is set perpendicular to sluice valve G, and therefore, horizontal drive apparatus 340 is arranged in the plane identical with sluice valve G.In the case, for preventing to be arranged on conplane sluice valve G and horizontal drive apparatus 340 interferences, horizontal drive apparatus 340 is placed than sluice valve G height.
Therefore, in the present embodiment, horizontal drive apparatus 340 comprises: loam cake travelling frame 342; With a pair of device 344 that moves horizontally.In the position highly higher than the driving of sluice valve G, loam cake travelling frame 342 partly is arranged on the relative both sides of loam cake 320.Loam cake travelling frame 342 provides the path that moves horizontally of loam cake 320.
Loam cake travelling frame 342 comprises: first horizontal frame member, each thereon surface support move horizontally first end of one of device 344; And the first vertical frame unit, its lower surface that is coupled to first horizontal frame member is to be supported on predetermined altitude with first horizontal frame member.In the present embodiment, for the loam cake travelling frame 342 that makes assembling fully can be installed to vacuum chamber, first horizontal frame member is arranged on the position higher than the upper end of loam cake 320.And the first vertical frame unit is arranged to make the wherein adjacent frame unit distance wideer than vacuum processing apparatus width that be spaced apart from each other.
Each moves horizontally second end that device 344 has first end that is fixedly installed on the loam cake travelling frame 342 and is coupled to loam cake 320.Moving horizontally device 344 is used for moving horizontally loam cake 320 along loam cake travelling frame 342.The device 344 that moves horizontally of present embodiment comprises: roller 344a, and it is coupled to loam cake travelling frame 342 and rotatablely moves to carry out thereon; Vertical connector 344b, it locates to be connected to roller 344a and loam cake 320 centers at various height; And motor 344c, be used to provide the required power of rotation roller 344a.With this configuration, even when roller 344a is arranged on the height different with loam cake 320 centers, roller 344a also can stably be coupled to loam cake 320 by means of vertical connector 344b, thereby can realize the smooth rotation and the horizontal movement of loam cake 320.
Vacuum processing apparatus 300 according to present embodiment can further comprise support frame 370, and it is other and be suitable for receiving loam cake 320 at loam cake 320 when first horizontal frame member of loam cake travelling frame 342 moves horizontally that it is arranged on chamber body 310.Provide the advantage of independent support frame 370 to be that single support frame can be used for being included in a plurality of vacuum chambers in the vacuum processing apparatus.In other words, be substituted by the situation that a plurality of vacuum chambers provide support framework respectively, single removable support frame can be used for described a plurality of vacuum chamber jointly.
With reference to Figure 19, in the present embodiment, support frame 370 comprises: second horizontal frame member 372; The second vertical frame unit 374; And gap filling member 376.Second horizontal frame member 372 has the height identical with first horizontal frame member of loam cake travelling frame 342 and extend moving horizontally with guiding loam cake 320 on the direction identical with first horizontal frame member.The second vertical frame unit 374 is used for horizontal frame member 372 is supported in the height identical with first horizontal frame member.Preferably, the second vertical frame unit 374 is suitable for regulating the height of second horizontal frame member 372, to eliminate the difference in height between first and second horizontal frame member.
Preferably, each gap filling member 376 can be provided with vertical driver element, vertically moves to guarantee it.
Preferably, support frame 370 comprises that further one or more fixed cells 379 are to be fixed to chamber body 310 with support frame 370.Fixed cell 379 be used for preventing support frame 370 loam cake 320 move horizontally and rotate during move apart chamber body 310.In the present embodiment, each fixed cell 379 all comprises an a pair of fixed block 379a and a steady pin 379b.Therefore, if described a pair of fixed block 379a accurately aims at each other, then steady pin 379b inserts so that support frame 370 is maintained the fixed position by fixed block 379a.
Opening/closing process according to the loam cake 320 of the vacuum processing apparatus 300 of present embodiment below will be described.
In vacuum processing apparatus 300, loam cake 320 is supported for makes it upwards and the distance of body 310 spaced apart 10mm in chamber, and therefore, do not need to promote loam cake 320 to 15mm according to present embodiment.In brief, as shown in Figure 20 A, drive sealing device driver element 360, make loam cake 320 and chamber body 310 spaced apart thus with moving sealing device on diagonal 350.Because loam cake 320 is moved, and has destroyed the airtight conditions of this chamber, and therefore discharged the vacuum in the chamber.Afterwards, shown in Figure 20 B, loam cake 320 moves horizontally according to the operation of horizontal drive apparatus 340.In the case, when using support frame 370, support frame 370 must be arranged to closely contact with first horizontal frame member.Guarantee moving horizontally loam cake 320 after its stable rotation that shown in Figure 20 C, operation rotating member 377 is with loam cake 320 Rotate 180s °.By this way, loam cake 320 is upwards opened so that can keep in repair wherein equipment.After finishing maintenance of equipment, carry out the opening procedure of above-described loam cake 320 with opposite order, thereby close loam cake 320.
The 4th embodiment
Vacuum processing apparatus according to present embodiment comprises: load locking room; Feed chamber; With one or more process chambers, but for convenience of description, below describe only at a process chamber.With reference to Figure 21, comprise according to the vacuum processing apparatus 400 of present embodiment: chamber body 410; Loam cake 420; Horizontal drive apparatus 440; With chamber body lifting device 450.
In the vacuum processing apparatus 400 according to present embodiment, chamber body 410 has rectangular box shape generally, and loam cake 420 is arranged on the chamber body 410 separably, thereby constitutes vacuum chamber.Vacuum chamber is used for processing the large-area flat display substrate with rectangular shape wherein, and therefore has the rectangular box shape corresponding to described rectangular substrate generally.Vacuum chamber is provided with the gas extraction system (not shown) to set up vacuum in the chamber in inside.Utilizing after operating in of gas extraction system set up vacuum in the chamber, the substrate that is placed in the chamber is carried out required technology.
Chamber body lifting device 450 is used for vertical mobile chamber body 410.In the present embodiment, chamber body lifting device 450 comprises: a plurality of lifting drive member 452; With guiding elements 454.
Promoting drive member 452 is inserted in chamber body 410 and chamber body 410 is supported between the chamber base framework 460 apart from floor one predetermined altitude.Promote drive member 452 and be suitable for vertical mobile chamber body 410.Vertical mobile chamber body 410 has following effect, promptly prevents that it from disturbing moving horizontally of loam cake 420 when the following end in contact of chamber body 410 and loam cake 420, and also prevents the interference between loam cake 420 and the O shape circle.Be fixed at loam cake 420 under the state of a predetermined altitude, chamber body 410 is lowered into and loam cake 420 spaced apart preset distances.
Present embodiment adopts a plurality of lifting drive member 452, its each all have low capacity.With regard to price, compare with using single big capacity lifting drive member, it is favourable using a plurality of low capacities to promote drive member 452.And a plurality of lifting drive member 452 can be at the chamber body of a plurality of positions supporting heavy, and is favourable on the balance of keeping the chamber body therefore.Each promotes the form that drive member 452 preferably adopts the ripple socket.In the case, as shown in Figure 22, the ripple socket preferably is respectively arranged with eccentricity compensation device 456.Particularly, each hemispheric eccentricity compensation device 456 is respectively formed at the upper end of ripple socket 452.In the case, chamber body 410 is formed with eccentricity compensation device insertion depression 412 in its position corresponding to the lower surface at corresponding ripple socket 452 centers.With this configuration, when ripple socket 452 contacts with the lower surface of chamber body 410 and during the body 410 of vertical mobile chamber, eccentricity compensation device 456 slips into when being raised in the described insertion depression 412, successfully to seek accurate contact position.
Guiding elements 454 is coupled to chamber body 410 and is suitable for guiding vertically moving of chamber body 410.With reference to Figure 21, in the present embodiment, guiding elements 454 preferably adopts the form of bootstrap block unit, and be coupled at its lower surface place the upper surface of chamber base framework 460 and thereon the surface be inserted in the guide recess that is formed at chamber body 410 lower surfaces.Provide bootstrap block unit to have following effect at chamber body lower surface, the accurately vertically moving direction of promptly bootable chamber body and need not to be used for the independent installing space of guiding elements as guiding elements.
Perhaps, guiding elements can adopt the form of guide post, and it is positioned at chamber body 410 sides and is coupled to the vertical moving direction of the sidewall of chamber body 410 with guiding chamber body 410.
Horizontal drive apparatus 440 is used for moving horizontally loam cake 420 on the direction that direction is set in the face of sluice valve.In other words, horizontal drive apparatus 440 is coupled to loam cake 420, so that support loam cake 420 in the mode that can move horizontally.When chamber body 410 moved down preset distance according to the operation of chamber body lifting device 450 and therefore separates with loam cake 420, horizontal drive apparatus 440 moved horizontally loam cake 420, reaches required radius of turn up to loam cake 420.
In the present embodiment, horizontal drive apparatus 440 comprises pair of guide rails 442, and it is arranged in parallel and makes loam cake 420 therebetween.Guide rail 442 is used for guiding in the horizontal direction loam cake 420, and therefore the path that moves horizontally of loam cake 420 is provided.With reference to Figure 23, each guide rail 442 all is divided in the face of the 442a of first of loam cake 420 and extends horizontally to loam cake 420 second portion 442b in addition.Preferably, second portion 442b can be folding to loam cake 420 sidewalls perpendicular to the 442a of first, makes it fold up when not using, so that the shared area minimum of vacuum processing apparatus.
Vacuum processing apparatus 400 according to present embodiment can further comprise support frame 470, and it is arranged on chamber body 410 sides and is suitable for receiving loam cake 420 at loam cake 420 when guide rail 442 moves horizontally.Provide the advantage of independent support frame 470 to be that single support frame can be used for being included in a plurality of vacuum chambers in the vacuum processing apparatus.In other words, be substituted by the situation that a plurality of vacuum chambers provide support framework respectively, single removable support frame can be used for described a plurality of vacuum chamber jointly.
With reference to Figure 24, in the present embodiment, support frame 470 comprises: horizontal frame member 472; Vertical frame unit 474; And gap filling member 476.Horizontal frame member 472 has the height identical with guide rail 442 and extend moving horizontally with guiding loam cake 420 on the direction identical with guide rail 442.Vertically frame unit 474 is used for horizontal frame member 472 is supported in the height identical with guide rail 442.Preferably, vertically frame unit 474 is suitable for regulating the height of horizontal frame member 472 with the difference in height between elimination of level frame unit 472 and the guide rail 442.
Preferably, each gap filling member 476 can be provided with vertical driver element and vertically moves to guarantee it.Although not shown, vertically driver element preferably adopts the form of ball screw to realize accurately vertically moving of gap filling member 476.
Preferably, support frame 470 further comprises one or more fixed cells 479, so that support frame 470 is fixed to chamber body 410.Fixed cell 479 be used for preventing support frame 470 loam cake 420 move horizontally and rotate during move apart chamber body 410.In the present embodiment, each fixed cell 479 all comprises an a pair of fixed block 479a and a steady pin 479b.Therefore, if described a pair of fixed block 479a accurately aims at each other, then steady pin 479b inserts by fixed block 479a and support frame 470 is maintained the fixed position.
Opening/closing process according to the loam cake 420 of the vacuum processing apparatus 400 of present embodiment below will be described.
At first, shown in Figure 25 A, utilize chamber body lifting device 450 with chamber body 410 reduce 10mm to the distance of 15mm to prevent the interference between loam cake 420 and the chamber body 410.Then, shown in Figure 25 B, loam cake 420 moves horizontally according to the operation of horizontal drive apparatus 440.In the case, when using support frame 470, support frame 470 must be arranged to closely contact with guide rail 442.And when only using guide rail 442, the second portion 442b that opens guide rail 442 is to reach the stable radius of turn of loam cake 420.Guarantee moving horizontally loam cake 420 after its stable rotation that shown in Figure 25 C, operation rotating member 477 is with loam cake 420 Rotate 180s °.By this way, loam cake 420 is upwards opened and is made it possible to keep in repair wherein equipment.After finishing maintenance of equipment, carry out the opening procedure of above-described loam cake 420 with opposite order, thereby close loam cake 420.
The 5th embodiment
Vacuum processing apparatus according to present embodiment comprises: load locking room; Feed chamber; With one or more process chambers, but for convenience of description, below describe only at a process chamber.With reference to Figure 26, comprise according to the vacuum processing apparatus 500 of present embodiment: chamber body 510; Loam cake 520; Horizontal drive apparatus 540; Substrate inlet E; Sluice valve G; With chamber body lifting device 550.
In the vacuum processing apparatus 500 according to present embodiment, chamber body 510 has rectangular box shape generally, and loam cake 520 is arranged on the chamber body 510 separably, thereby constitutes vacuum chamber.Vacuum chamber is used for processing the large-area flat display substrate with rectangular shape wherein, and therefore has the rectangular box shape corresponding to described rectangular substrate generally.Vacuum chamber portion within it is provided with the gas extraction system (not shown) to set up vacuum in the chamber.After in the chamber, setting up vacuum, the substrate that is placed in the chamber is carried out required technology in the operation that utilizes gas extraction system.
With reference to Figure 29, the horizontal drive apparatus 540 of present embodiment comprises: loam cake travelling frame 542; With a pair of device 544 that moves horizontally.In the position highly higher than the driving of sluice valve G, loam cake travelling frame 542 partly is arranged on the opposite side of loam cake 520.Loam cake travelling frame 542 provides the path that moves horizontally of loam cake 520.
With reference to Figure 28, loam cake travelling frame 542 comprises: the first horizontal frame member 542a, and each is first end of one of surface support level shifter 544 thereon; And the first vertical frame unit 542b, its lower surface that is coupled to the first horizontal frame member 542a is to be supported on predetermined altitude with the first horizontal frame member 542a.In the present embodiment, for the loam cake travelling frame 542 that makes assembling fully can be installed to vacuum chamber, the first horizontal frame member 542a is arranged on the height higher than the upper end of loam cake 520.And the first vertical frame unit 542b is arranged to make the adjacent frame unit distance wideer than vacuum processing apparatus width that be spaced apart from each other.Preferably, form the gear of level, make described gear engage accurately moving horizontally with roller 544a with guiding loam cake 520 at the upper surface of each first horizontal frame member 542a.
Each moves horizontally second end that device 544 has first end that is fixedly installed on the loam cake travelling frame 542 and is coupled to loam cake 520.Moving horizontally device 544 is used for moving horizontally loam cake 520 along loam cake travelling frame 542.The device 544 that moves horizontally of present embodiment comprises: roller 544a, and it is coupled to loam cake travelling frame 542 and rotatablely moves to carry out thereon; Vertical connector 544b, it locates to be connected to roller 544a and loam cake 520 centers at various height; And motor 544c, be used to provide the required power of rotation roller 544a.With this configuration, even when roller 544a is arranged on the height different with loam cake 520 centers, roller 544a also can stably be coupled to loam cake 520 by means of vertical connector 544b, thereby can realize the smooth rotation and the horizontal movement of loam cake 520.And roller 544d is inserted between each first horizontal frame member 542a and the related connector 544b with load and frictional force during reducing loam cake and moving.
With reference to Figure 30, in the present embodiment, support frame 570 comprises: second horizontal frame member 572; The second vertical frame unit 574; And gap filling member 576.Second horizontal frame member 572 has the height identical with the first horizontal frame member 542a and extend moving horizontally with guiding loam cake 520 on the direction identical with the first horizontal frame member 542a.The second vertical frame unit 574 is used for second horizontal frame member 572 is supported in the identical height with the first horizontal frame member 542a.Preferably, vertically frame unit 574 is suitable for regulating the height of second horizontal frame member 572 to eliminate the difference in height between the first and second horizontal frame member 542a and 572.Although not shown, can provide vertical driver element to realize accurate adjusting to the height of second horizontal frame member 572 with ball screw shape.
Preferably, each gap filling member 576 can be provided with vertical driver element and vertically moves to guarantee it.
Preferably, support frame 570 further comprises one or more fixed cells 579, so that support frame 570 is fixed to chamber body 510.Fixed cell 579 be used for preventing support frame 570 loam cake 520 move horizontally and rotate during move apart chamber body 510.In the present embodiment, each fixed cell 579 all comprises an a pair of fixed block 579a and a steady pin 579b.Therefore, if described a pair of fixed block 579a accurately aims at each other, then steady pin 579b inserts by fixed block 579a and support frame 570 is maintained the fixed position.
Chamber body lifting device 550 is used for vertical mobile chamber body 510.In the present embodiment, chamber body lifting device 550 comprises: a plurality of lifting drive member 552; With guiding elements 554.
Promoting drive member 552 is inserted in chamber body 510 and chamber body 510 is supported between the chamber base framework 560 apart from floor one predetermined height.Promote drive member 552 and be suitable for vertical mobile chamber body 510.Vertical mobile chamber body 510 has following effect, promptly prevents that it from disturbing moving horizontally of loam cake 520 when the following end in contact of chamber body 510 and loam cake 520, and also prevents the interference between loam cake 520 and the O shape circle.Be fixed at loam cake 520 under the state of a predetermined altitude, chamber body 510 is reduced to and loam cake 520 spaced apart preset distances.
Present embodiment adopts a plurality of lifting drive member 552, and each lifting drive member all has low capacity.With regard to price, compare with using single big capacity lifting drive member, it is favourable using a plurality of low capacities to promote drive member 552.And a plurality of lifting drive member 552 can be at the chamber body of a plurality of positions supporting heavy, and is favourable on the balance of keeping the chamber body therefore.Each promotes the form that drive member 552 preferably adopts the ripple socket.In the case, as shown in Figure 27, the ripple socket preferably is respectively arranged with eccentricity compensation device 556.Particularly, each hemispheric eccentricity compensation device 556 is formed on the upper end of ripple socket 552.Chamber body 510 position corresponding to corresponding ripple socket 552 centers on its lower surface is formed with eccentricity compensation device insertion depression 512.With this configuration, when ripple socket 552 contacts with the lower surface of chamber body 510 and during the body 510 of vertical-lifting chamber, eccentricity compensation device 556 slips into when being raised in the described insertion depression 512, successfully to seek accurate contact position.
Guiding elements 554 is coupled to chamber body 510 and is suitable for guiding vertically moving of chamber body 510.With reference to Figure 26, in the present embodiment, guiding elements 554 preferably adopts the form of bootstrap block unit, this bootstrap block unit be coupled at its lower surface place the upper surface of chamber base framework 560 and thereon the surface be inserted in the guide recesses that is formed at chamber body 510 lower surfaces.Provide the bootstrap block unit to have following effect at chamber body lower surface, the accurately vertically moving direction of promptly bootable chamber body and need not to be used for the independent installing space of guiding elements.
Perhaps, guiding elements can adopt the form of guide post, and it is positioned at chamber body 510 sides and is coupled to the vertical moving direction of the sidewall of chamber body 510 with guiding chamber body 510.
Opening/closing process according to the loam cake 520 of the vacuum processing apparatus 500 of present embodiment below will be described.
At first, shown in Figure 31 A, utilize chamber body lifting device 550 with chamber body 510 reduce 10mm to the distance of 15mm to prevent the interference between loam cake 520 and the chamber body 510.Then, shown in Figure 31 B, loam cake 520 moves horizontally according to the operation of horizontal drive apparatus 540.In the case, when using support frame 570, support frame 570 must be arranged to 542a is closely contacted with first horizontal frame member.Guarantee moving horizontally loam cake 520 after its stable rotation that shown in Figure 31 C, operation rotating member 577 is with loam cake 520 Rotate 180s °.By this way, loam cake 520 is upwards opened so that can keep in repair wherein equipment.After finishing maintenance of equipment, carry out the opening procedure of above-described loam cake 520 with opposite order, thereby close loam cake 520.
The 6th embodiment
Vacuum processing apparatus according to present embodiment comprises: load locking room; Feed chamber; With one or more process chambers, but for convenience of description, below describe only at a process chamber.With reference to Figure 32, comprise according to the vacuum processing apparatus 600 of present embodiment: chamber body 610; Loam cake 620; One or more horizontal drive unit 630; A pair of loam cake travelling frame 640; With a plurality of vertical mobile units 650.
In the vacuum processing apparatus 600 according to present embodiment, chamber body 610 has rectangular box shape generally, and loam cake 620 is arranged on the chamber body 610 separably, thereby constitutes vacuum chamber.Vacuum chamber is used for processing the large-area flat display substrate with rectangular shape wherein, and therefore has the rectangular box shape corresponding to described rectangular substrate generally.Vacuum chamber portion within it is provided with the gas extraction system (not shown) to set up vacuum in the chamber.After in the chamber, setting up vacuum, the substrate that is placed in the chamber is carried out required technology in the operation that utilizes gas extraction system.
Described a pair of loam cake travelling frame 640 is positioned at the opposite side of loam cake 620 in the mode that can vertically move.Loam cake travelling frame 640 is used to provide the path that moves horizontally of horizontal drive unit 630, makes loam cake 620 move horizontally to reach and opens required enough radiuss of turn.
Described a plurality of vertical driver element 650 is coupled to the lower surface of each loam cake travelling frame 640, makes their preset distances that is spaced apart from each other.Vertically driver element 650 is used for vertical mobile loam cake travelling frame 640 and loam cake 620.In the present embodiment, not directly to promote loam cake 620, but promote the loam cake travelling frame 640 that loam cake 620 supports thereon.And a plurality of low capacity tubes rather than single big capacity socket are used as vertical driver element 650, thereby have improved processing stability.Therefore, in the present embodiment, described a plurality of vertical driver elements 650 are provided with along each loam cake travelling frame 640.Underframe 652 is arranged under each loam cake travelling frame 640 and is parallel to each other, makes described a plurality of vertical driver element 650 be arranged on the underframe 652 with preset distance.Preferably, described a plurality of vertical driver elements 650 are driven on underframe 652 simultaneously with vertical mobile loam cake travelling frame 640, thereby make loam cake travelling frame 640 be parallel to the floor and move.
With reference to Figure 33, each loam cake travelling frame 640 all is divided into the 640a of first and the second portion 640b that extends horizontally to outside the loam cake 620 in the face of loam cake 620.Preferably, second portion 640b can be folding towards the sidewall of loam cake 620 perpendicular to the 640a of first, makes it fold up when not using, so that the shared area minimum of vacuum processing apparatus.
With reference to Figure 34, in the present embodiment, support frame 670 comprises: horizontal frame member 672; Vertical frame unit 674; And gap filling member 676.Horizontal frame member 672 has the height identical with loam cake travelling frame 640 and extend moving horizontally with guiding loam cake 620 on the direction identical with loam cake travelling frame 640.Vertically frame unit 674 is used for horizontal frame member 672 is supported in the height identical with loam cake travelling frame 640.Preferably, vertically frame unit 674 is suitable for regulating the height of horizontal frame member 672 with the difference in height between elimination of level frame unit 672 and the loam cake travelling frame 640.
Preferably, each gap filling member 676 can be provided with vertical driver element and vertically moves to guarantee it.
Preferably, support frame 670 further comprises one or more fixed cells 679, so that support frame 670 is fixed to chamber body 610.Fixed cell 679 be used for preventing support frame 670 loam cake 620 move horizontally and rotate during move apart chamber body 610.In the present embodiment, each fixed cell 679 all comprises an a pair of fixed block 679a and a steady pin 679b.Therefore, if described a pair of fixed block 679a accurately aims at each other, then steady pin 679b inserts by fixed block 679a and support frame 670 is maintained the fixed position.
Opening/closing process according to the loam cake 620 of the vacuum processing apparatus 600 of present embodiment below will be described.
At first, shown in Figure 35 A, when driving a plurality of vertical driver element 650 at the same time loam cake travelling frame 640 is promoted the distance of 1mm to 10mm.The horizontal drive unit 630, rotating member 677 and the loam cake 620 that are supported on the loam cake travelling frame 640 are got a promotion.If therefore the vacuum in this chamber is released, shown in Figure 35 B, loam cake 620 moves horizontally according to the operation of horizontal drive unit 630.In the case, when using support frame 670, support frame 670 must be arranged to closely contact with loam cake travelling frame 640.Reach moving horizontally loam cake 620 after the enough radius of turn, shown in Figure 35 C, operation rotating member 677 is with loam cake 620 Rotate 180s °.By this way, loam cake 620 is upwards opened and is made it possible to keep in repair wherein equipment.After finishing maintenance of equipment, carry out the opening procedure of above-described loam cake 620 with opposite order, thereby close loam cake 620.
The 7th embodiment
Vacuum processing apparatus according to present embodiment comprises: load locking room; Feed chamber; With one or more process chambers, but for convenience of description, below describe only at a process chamber.With reference to Figure 36, comprise according to the vacuum processing apparatus 700 of present embodiment: chamber body 710; Loam cake 720; Loam cake lifting device 730; With horizontal drive apparatus 740.
In the vacuum processing apparatus 700 according to present embodiment, chamber body 710 has rectangular box shape generally, and loam cake 720 is arranged on the chamber body 710 separably, thereby constitutes vacuum chamber.Vacuum chamber is used for processing the large-area flat display substrate with rectangular shape wherein, and therefore has the rectangular box shape corresponding to described rectangular substrate generally.Vacuum chamber is provided with the gas extraction system (not shown) to set up vacuum in the chamber in inside.After in the chamber, setting up vacuum, the substrate that is placed in the chamber is carried out required technology in the operation that utilizes gas extraction system.
With reference to Figure 36, loam cake lifting device 730 is arranged on the loam cake 720 separably with vertical mobile loam cake 720.In the present embodiment, before moving horizontally for its opening operation, loam cake 720 utilizes loam cake lifting device 730 and promotes preset distance.
The loam cake lifting device 730 of present embodiment comprises: a plurality of elevator hoisting apparatus 732; And hoisting apparatus support frame 734.Elevator hoisting apparatus 732 is coupled to support frame 734 with downward extension, thereby makes its upper surface that is coupled to loam cake 720 to promote loam cake 720.Described a plurality of elevator hoisting apparatus 732 is coupled to a plurality of positions of loam cake 720 respectively, to share the load of heavy loam cake 720 jointly.Utilize a plurality of elevator hoisting apparatus 732 that are coupled to it to promote the effect that loam cake 720 has the spread loads concentration degree.And, owing to support loam cake 720, can make loam cake 720 vibrations during loam cake 720 vertically moves minimum in a plurality of positions.
Hoisting apparatus support frame 734 is placed to the upper surface of loam cake 720 spaced apart abreast above loam cake 720, and has the shape corresponding to the edge of loam cake 720.Described a plurality of elevator hoisting apparatus 732 is coupled to the appropriate location of hoisting apparatus support frame 734 to be supported by hoisting apparatus support frame 734.With reference to Figure 37, hoisting apparatus support frame 734 has the rectangular loop shape corresponding to the edge of loam cake 720 generally, but has the width bigger than loam cake 720.For making described a plurality of elevator hoisting apparatus 732 can be arranged on each position, as shown in Figure 37, auxiliary frame 733 is arranged on hoisting apparatus support frame 734 places.Auxiliary frame 733 is arranged to stride hoisting apparatus support frame 734 and is extended in hoisting apparatus support frame 734.As shown in Figure 37, elevator hoisting apparatus 732 is positioned at the intersection of auxiliary frame 733.
Loam cake lifting device 730 according to present embodiment can move to another place from a place by main hoisting apparatus (not shown), and described main hoisting apparatus is installed on the top that vacuum processing apparatus is wherein installed the dust free room that is in.Particularly, loam cake lifting device 730 is promoted by main hoisting apparatus, makes it move to another vacuum processing apparatus so that open the loam cake of equipment from a vacuum processing apparatus.Therefore, preferably hoisting apparatus support frame 734 is provided with the coupling device (not shown) to be coupled with main hoisting apparatus in the surface thereon.Use movably loam cake lifting device 730 to eliminate the needs that the loam cake lifting device is provided respectively as all process chambers of vacuum processing apparatus, thereby can realize the minimizing of manufacturing cost and the simplification of device structure.
Preferably, the loam cake lifting device 730 according to present embodiment is provided with vibrationproof member 736.Vibrationproof member 736 is inserted between hoisting apparatus support frame 734 and the loam cake 720, and is suitable for preventing when loam cake 720 promotes or reduces the vibration of loam cake 720.In the present embodiment, as shown in Figure 36, vibrationproof member 736 can comprise a plurality of elastomeric springs.In the case, preferably elastomeric spring 736 is coupled to the turning or the edge of the upper surface of loam cake 720, so that realize the increase of the vibrationproof usefulness of loam cake 720.When vibrationproof member 736 was formed by elastomeric spring, it can absorb the vibration of loam cake 720, and flexibly pushes loam cake 720, thereby realized the increase of vibration proof usefulness.
With reference to Figure 38, perhaps, vibrationproof member 736 can comprise anti-vibration clamp 736a, and it has the shape corresponding to loam cake 720 edges.The vibration stopper 722 that anti-vibration clamp 736a was configured to and was formed on loam cake 720 upper surface places is coupled.In the case, for preventing the vibration of loam cake 720 effectively, vibration stopper 722 must be configured to closely contact mutually with anti-vibration clamp 736a.In the present embodiment, as shown in Figure 38, the contact surface that preferably vibrates stopper 722 and anti-vibration clamp 736a is all outward-dipping, can successfully contact with the contact surface of anti-vibration clamp 736a with the contact surface of guaranteeing vibration stopper 722 when promoting loam cake 720, so that slide thereon.
Preferably, anti-vibration clamp 736a is provided with loam cake height sensor 738 accurately to measure the height of loam cake 720.Loam cake height sensor 738 is inserted in the height of the loam cake 720 that promotes with sensing between anti-vibration clamp 736a and the vibration stopper 722.The height of accurately measuring loam cake 720 is important, if this is because continue power is applied to elevator hoisting apparatus 732 after loam cake 720 promotes fully, then may damage loam cake 720 or hoisting apparatus.And, when loam cake 720 obtains inadequate lifting, during the moving horizontally of loam cake 720, can cause damaging O shape circle.Therefore, in the present embodiment, be arranged on the contact surface place of anti-vibration clamp 736a, make that the operation of elevator hoisting apparatus 732 stops when the loam cake 720 of lifting touches transducer 738 as the loam cake height sensor 738 of contact type sensor.
Horizontal drive apparatus 740 is configured to be positioned at the opposite side of loam cake 720, makes that loam cake 720 is therebetween.Horizontal drive apparatus 740 is used for moving horizontally loam cake 720 after loam cake 720 is promoted by loam cake lifting device 730.With reference to Figure 36, the opposite side that horizontal drive apparatus 740 supports hoisting apparatus support frames 734 to be moving horizontally hoisting apparatus support frame 734, and therefore moves horizontally the loam cake 720 of the lifting that is coupled to hoisting apparatus support frame 734.Therefore, in the present embodiment, horizontal drive apparatus 740 comprises pair of guide rails 742 and CD-ROM drive motor (not shown).As shown in Figure 36, guide rail 742 contacts with the opposite side of hoisting apparatus support frame 734 with level guiding hoisting apparatus support frame 734.CD-ROM drive motor provides and moves horizontally the required power of hoisting apparatus support frame 734.Therefore, CD-ROM drive motor is coupled to hoisting apparatus support frame 734 and guide rail 742 to move horizontally hoisting apparatus support frame 734.
With reference to Figure 39, in the present embodiment, support frame 770 comprises: horizontal frame member 772; Vertical frame unit 774; Gap filling member 776; And rotating member 777.Horizontal frame member 772 has the height identical with guide rail 742 and extend moving horizontally with guiding loam cake 720 on the direction identical with guide rail 742.Vertically frame unit 774 is used for horizontal frame member 772 is supported in the height identical with guide rail 742.Preferably, vertically frame unit 774 is suitable for regulating the height of horizontal frame member 772 with the difference in height between elimination of level frame unit 672 and the guide rail 742.
Preferably, each gap filling member 776 can be provided with vertical driver element and vertically moves to guarantee it.Although not shown, vertically driver element preferably adopts the form of ball screw to realize accurately vertically moving of gap filling member 776.
Rotating member 777 is used for rotating loam cake 720 after loam cake 720 moves to support frame 770.In the present embodiment, described a pair of rotating member 777 is positioned at the center of horizontal frame member 772, makes them be coupled to loam cake 720 separably.In other words, rotating member 777 is positioned at the opposite side of loam cake 720, and can move horizontally to be coupled with the coupling device 724 that is arranged on loam cake 720 opposing sidewalls.Therefore, when loam cake 720 arrived position of rotation, rotating member 777 and coupling device 724 were coupled with loam cake 720 Rotate 180s °.
Preferably, each gap filling member 776 can be provided with vertical driver element and vertically moves to guarantee it.
Preferably, support frame 770 comprises that further one or more fixed cells 779 are to be fixed to chamber body 710 with support frame 770.Fixed cell 779 be used for preventing support frame 770 loam cake 720 move horizontally and rotate during move apart chamber body 710.In the present embodiment, each fixed cell 779 all comprises an a pair of fixed block 779a and a steady pin 779b.Therefore, if described a pair of fixed block 779a accurately aims at each other, then steady pin 779b inserts by fixed block 779a and support frame 770 is maintained the fixed position.
Opening/closing process according to the loam cake 720 of the vacuum processing apparatus 700 of present embodiment below will be described.
At first, shown in Figure 40 A, when driving a plurality of elevator hoisting apparatus 732 at the same time loam cake 720 is promoted the distance of 1mm to 10mm.When loam cake 720 was raised, the vacuum in the chamber obtained discharging.Then, shown in Figure 40 B, loam cake 720 and hoisting apparatus support frame 734 move horizontally according to the operation of horizontal drive apparatus 740.In the case, when using support frame 770, support frame 770 must be arranged to closely contact with guide rail 742.Guarantee moving horizontally loam cake 720 after its stable rotation, shown in Figure 40 C, operation rotating member 777 and with loam cake 720 Rotate 180s °.By this way, loam cake 720 is upwards opened so that can keep in repair wherein equipment.After finishing maintenance of equipment, carry out the opening procedure of above-described loam cake 720 with opposite order, thereby close loam cake 720.
The 8th embodiment
With reference to Figure 41 and 42, the conveying hoister chucking appliance system comprises according to the preferred embodiment of the invention: main body 810; First to the 3rd connecting ring 816,818 and 826; Screw rod 820; Shifter 822; Power source 830; Lower plate 834; Bearing 836; With fixed head 838.
Guiding groove 812 is 90 ° of equal spacings each other, and respectively have the cross section of downward convergent.
In the present embodiment, for reducing material cost, main body 810 partly caves in.This sunk structure also has the function of the bulk strength of strengthening main body 810.Second connecting ring 818 is installed in four corners of main body 810 upper surfaces respectively, so that when needs transmitted certain weight, the line of hoisting apparatus C was connected in second connecting ring 818.Utilize connecting ring 818 that the turning that the line of hoisting apparatus C is connected to main body 810 is had the effect that realizes that uniform load distributes.
First connecting ring 816 is installed to the upper surface of the extension 814 that is arranged on main body 810 centers, to be connected to the hoisting apparatus C that is arranged on the dust free room top.
Each shifter 822 has corresponding to the downward convergent of guiding groove 822 cross sections block-shaped.Shifter 822 flatly worn a hole, make a pair of nut 824 be installed in the opposite side in this hole.Screw rod 820 rotatably is anchored on nut 824.The 3rd connecting ring 826 is installed on the center of shifter 822 lower surfaces.
Particularly, if power source 830 rotation, screw rod 820 rotation that then contact with power source 830.In the case, bearing 836 contacts with the lower surface of each screw rod 820, is used for making things convenient for the rotation of screw rod 820.
As previously discussed, each shifter 822 that is contained in the guiding groove 812 of main body 810 has the trapezoidal shape of putting upside down and therefore has the opposing inclined surface.Therefore, even shifter 822 does not utilize independent fixture to be fixed in leader 812, moving of shifter 822 also guides (seeing Figure 43) via its opposing inclined surface.
Utilize above-described configuration, shown in Figure 41 to 43, the conveying hoister chucking appliance system with preliminary dimension of the present invention can move in or out the loam cake (not shown) of transfer chamber's (not shown) to corresponding to the appropriate location of loam cake size the time at connecting ring 826.
At this, the position of connecting ring 826 for a change, at first, on a direction manually the handle 832 that is provided with along the upper end edge circumference of power source 830 of rotation with rotating power source 830.If power source 830 rotation, the then screw of the lower surface of power source 830 rotation, thus four screw rods 820 with the threads engage of power source 830 are rotated simultaneously.Because the screw thread of left screw rod 820 forms mutually on the contrary with the screw thread of right screw rod 820, the shifter 822 that is anchored on left and right screw rod 820 moves in or out simultaneously, thereby changes the position.Like this, the connecting ring 826 that is installed in shifter 822 lower surfaces also changes the position.By this way, when needs transmitted large-area loam cake or other various plate, shifter 822 outwards moved and makes it possible to easily be coupled loam cake.On the contrary, when needs transmitted the loam cake of small size or other various plate, shifter 822 moved inward and makes it possible to easily be coupled loam cake.
The operation of power source 830 is undertaken by the CD-ROM drive motor (not shown).
As conspicuous from the above description, the invention provides a kind of large-scale vacuum process equipment that is suitable for processing large-area substrates, it has following effect.
At first, according to the present invention, rotation and horizontal drive apparatus that loam cake has only needed to simplify, and the chamber body can vertically move with this structure of having simplified, and can easily realize the opening to loam cake thus.
The second, according to the present invention, loam cake is opened after it is moved horizontally to vacant space between the process chamber.This has the effect that significantly reduces of vacuum processing apparatus floor space.
Although disclose the preferred embodiments of the present invention for illustrative purposes, it will be apparent to one skilled in the art that in the spirit and scope of the present invention disclosed in the accompanying claims, various modifications, interpolation and replacement are possible.
Claims (6)
1. process equipment comprises: the chamber body, and it has and is used to make substrate can carry out the sluice valve of loading and unloading; And be arranged on loam cake on the body of described chamber separably, described process equipment further comprises:
The conveying hoister chucking appliance system, and
Wherein, described conveying hoister chucking appliance system comprises:
The main body of polygon column, it has suitable thickness, and this main body is provided with connecting ring at the center; And
A plurality of connecting rings, its be arranged on described main body lower surface the respective corners place and on diagonal the center to main body move, described connecting ring moves in or out simultaneously and changes the position.
2. equipment as claimed in claim 1, wherein, described main body comprises:
A plurality of guiding grooves, the thickness of the described main body of its break-through and extend to the turning along diagonal from main center;
A plurality of screw rods, it is contained in respectively in the guiding groove of described main body, and is fixed in main body at its place, opposite end;
A plurality of shifters, each is fastened to a circumferential position of one of described screw rod, and is suitable for moving forward or backward according to the rotation of screw rod, and each shifter is provided with connecting ring at its lower surface; And
The cartridge type power source, its lower surface is formed with screw, and the engage threads of this screw and an end that is formed on each screw rod is to allow described a plurality of screw rod according to the rotation of described power source and rotation simultaneously.
3. equipment as claimed in claim 2, wherein, each guiding groove of described main body has the cross section of downward convergent.
4. equipment as claimed in claim 3, wherein, described screw rod comprises left screw rod and right screw rod, and it is placed toward each other, and left screw flight extends on the direction opposite with right screw flight.
5. equipment as claimed in claim 4 wherein, is provided with a plurality of handles along the upper end edge circumference of described power source, so that described power source is able to manual rotation.
6. equipment as claimed in claim 5, wherein, described conveying hoister chucking appliance system further comprises: bearing, it is placed to and contacts with the lower end of the screw thread of an end of being located at each screw rod and be convenient to the rotation of described screw rod.
Applications Claiming Priority (9)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020050010481A KR100661752B1 (en) | 2005-02-04 | 2005-02-04 | Transportation hoist jig |
| KR1020050010481 | 2005-02-04 | ||
| KR1020050097667 | 2005-10-17 | ||
| KR1020050097625 | 2005-10-17 | ||
| KR1020050097642 | 2005-10-17 | ||
| KR1020050097621 | 2005-10-17 | ||
| KR1020050097664 | 2005-10-17 | ||
| KR1020050097646 | 2005-10-17 | ||
| KR1020050097652 | 2005-10-17 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2006100033458A Division CN100373542C (en) | 2005-02-04 | 2006-02-05 | Vacuum processing apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101123176A true CN101123176A (en) | 2008-02-13 |
| CN100521084C CN100521084C (en) | 2009-07-29 |
Family
ID=36907787
Family Applications (6)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2007101472847A Expired - Fee Related CN100521084C (en) | 2005-02-04 | 2006-02-05 | Vacuum processing apparatus |
| CNB2007101472936A Expired - Fee Related CN100550293C (en) | 2005-02-04 | 2006-02-05 | Vacuum processing apparatus |
| CNB2007101472917A Expired - Fee Related CN100546002C (en) | 2005-02-04 | 2006-02-05 | Vacuum processing apparatus |
| CNB2007101472921A Expired - Fee Related CN100550292C (en) | 2005-02-04 | 2006-02-05 | Vacuum processing apparatus |
| CNB2007101472940A Expired - Fee Related CN100550294C (en) | 2005-02-04 | 2006-02-05 | Vacuum processing apparatus |
| CNB2006100033458A Expired - Fee Related CN100373542C (en) | 2005-02-04 | 2006-02-05 | Vacuum processing apparatus |
Family Applications After (5)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2007101472936A Expired - Fee Related CN100550293C (en) | 2005-02-04 | 2006-02-05 | Vacuum processing apparatus |
| CNB2007101472917A Expired - Fee Related CN100546002C (en) | 2005-02-04 | 2006-02-05 | Vacuum processing apparatus |
| CNB2007101472921A Expired - Fee Related CN100550292C (en) | 2005-02-04 | 2006-02-05 | Vacuum processing apparatus |
| CNB2007101472940A Expired - Fee Related CN100550294C (en) | 2005-02-04 | 2006-02-05 | Vacuum processing apparatus |
| CNB2006100033458A Expired - Fee Related CN100373542C (en) | 2005-02-04 | 2006-02-05 | Vacuum processing apparatus |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR100661752B1 (en) |
| CN (6) | CN100521084C (en) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102009007897A1 (en) * | 2009-02-08 | 2010-08-12 | Oerlikon Trading Ag, Trübbach | Vacuum chamber for coating plants and method for producing a vacuum chamber for coating plants |
| JP5585238B2 (en) * | 2010-06-24 | 2014-09-10 | 東京エレクトロン株式会社 | Substrate processing equipment |
| CN104451581B (en) * | 2014-12-29 | 2017-02-22 | 中国科学院长春光学精密机械与物理研究所 | Magnetron sputtering coating vacuum box |
| CN106898535B (en) * | 2015-12-21 | 2018-11-20 | 中微半导体设备(上海)有限公司 | The top cover open method of semiconductor processing equipment, system and semiconductor processing equipment |
| CN108977792B (en) * | 2018-08-06 | 2021-04-20 | 四川省宜宾普拉斯包装材料有限公司 | Vacuum coating chamber of vacuum coating automatic production line |
| CN109136877B (en) * | 2018-08-06 | 2021-01-22 | 四川省宜宾普拉斯包装材料有限公司 | Vacuum coating device of vacuum coating automatic production line |
| CN108914084A (en) * | 2018-08-06 | 2018-11-30 | 四川省宜宾普拉斯包装材料有限公司 | A kind of vacuum coating automatic assembly line |
| CN110289235B (en) * | 2019-07-09 | 2021-07-09 | 北京北方华创微电子装备有限公司 | Cover opening device and semiconductor processing equipment |
| CN118571799B (en) * | 2024-07-11 | 2024-10-18 | 深圳市新凯来工业机器有限公司 | Process treatment equipment with lifting structure |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11140648A (en) * | 1997-11-07 | 1999-05-25 | Tokyo Electron Ltd | Process chamber device and treating device |
| JP3527450B2 (en) * | 1999-12-22 | 2004-05-17 | 東京エレクトロン株式会社 | Processing equipment |
| KR100426816B1 (en) * | 2002-07-31 | 2004-04-14 | 삼성전자주식회사 | Plasma processing equipment having improved vacuum pressure control apparatus |
-
2005
- 2005-02-04 KR KR1020050010481A patent/KR100661752B1/en not_active IP Right Cessation
-
2006
- 2006-02-05 CN CNB2007101472847A patent/CN100521084C/en not_active Expired - Fee Related
- 2006-02-05 CN CNB2007101472936A patent/CN100550293C/en not_active Expired - Fee Related
- 2006-02-05 CN CNB2007101472917A patent/CN100546002C/en not_active Expired - Fee Related
- 2006-02-05 CN CNB2007101472921A patent/CN100550292C/en not_active Expired - Fee Related
- 2006-02-05 CN CNB2007101472940A patent/CN100550294C/en not_active Expired - Fee Related
- 2006-02-05 CN CNB2006100033458A patent/CN100373542C/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN101123177A (en) | 2008-02-13 |
| CN101118846A (en) | 2008-02-06 |
| CN100550292C (en) | 2009-10-14 |
| KR100661752B1 (en) | 2006-12-27 |
| CN100546002C (en) | 2009-09-30 |
| CN100550294C (en) | 2009-10-14 |
| CN101118848A (en) | 2008-02-06 |
| CN100373542C (en) | 2008-03-05 |
| CN100521084C (en) | 2009-07-29 |
| CN101118847A (en) | 2008-02-06 |
| CN100550293C (en) | 2009-10-14 |
| KR20060089760A (en) | 2006-08-09 |
| CN1815690A (en) | 2006-08-09 |
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