CN101114463A - Micro actuator, magnetic head cardan universal joint component with micro actuator and manufacturing method therefor - Google Patents

Abstract

The invention provides a micro-actuator used in HGA of a disk drive element component. The micro-actuator comprises a metal framework which comprises a basal and two relative arms extending from the basal, wherein, at least two films PZT are attached to the side surface of each arm by the following ways: when each arm and the film PZT are attached to the arm respond to a driving signal imposed on the film PZT and produce a displacement together, the displacement of each arm is increased owing to an additive effect. Since at least two films PTZ are attached to the side surface of each arm, the additive effect is produced, thus realizing the increase of the displacement of the arm. At least two films PZT can be positioned on the same side surface of the arm or be positioned respectively on the lateral surface and the inside surface.

Description

Micro-actuator, the Sagnetic head universal-joint assembly that has micro-actuator and manufacture method thereof

Technical field

The present invention relates to information-recording apparatus, more specifically, relate to the Sagnetic head universal-joint assembly (head gimbal assembly, micro-actuator HGA), and the method for making the Sagnetic head universal-joint assembly that has this micro-actuator that are used for disk drive unit.

Background technology

Nowadays, people utilize the whole bag of tricks to improve the recording density of information-recording apparatus.Fig. 1 shows the disc driver as an illustrative examples of information record carrier according to conventional design, wherein spindle drive motor 15 drives disks 14 rotations, and actuating arm 12 controls are positioned at magnetic head (not shown) on the Sagnetic head universal-joint assembly 18 in disk 14 lip-deep flights.Usually, voice coil motor (VCM) 16 is used for the motion of controlling and driving arm 12, and its function is that coarse adjustment is carried out in the position of actuating arm 12 on disk 14.With reference to figure 2a, it shows and is equipped with conventional PZT (Piezoelectric Lead Zirconate Titanate: the piezoelectric lead zirconate titanate) Sagnetic head universal-joint assembly of micro-actuator 181 (HGA) 18 among Fig. 1, under the situation that magnetic head is driven by VCM 16 separately, because there is intrinsic error (dynamic swing) in the displacement of magnetic head, thereby on the suspension tongue 1831 of the suspension 183 of HGA 18, micro-actuator 181 being set, it is used for magnetic head is carried out meticulous position control.Be arranged on normally PZT micro-actuator of magnetic head micro-actuator 181 on every side, it is used for " meticulous adjusting " carried out in the displacement of magnetic head.That is to say that VCM16 is used for coarse adjustment, PZT micro-actuator 181 is then regulated the displacement of magnetic head with much smaller amplitude, in order to compensate the vibration of the actuating arm that is caused by the driving of VCM16.But the HGA18 with said structure can realize very little recording track width, thereby " tracks per inch " value (TPI) of disc driver is increased up to 50%.

More specifically, in the conventional design of the shown HGA18 of Fig. 2 a,, the magnetic head (not shown) constitutes magnetic head mentioned above on the slide block 182 by being attached to.Utilize slide block 182 that the magnetic head (not shown) is remained on predetermined altitude on the disk 14 (see figure 1) surfaces.Fig. 2 b further shows the structure of conventional micro-actuator 181, wherein U-shaped micro-actuator 181 comprises ceramic frame, this ceramic frame has two ceramic arms 1811 that slide block 182 can be set therebetween, and attaching is in two ceramic PZT1813 of the outside surface of each ceramic arm 1811.Again with reference to figure 2a, PZT micro-actuator 181 physically attaching makes that in the suspension tongue 1831 of the suspension 183 of HGA18 slide block 182 can be in response to the voltage that is applied on the ceramic PZT1813, is independent of suspension 183 and moves under the drive of ceramic PZT1813.More specifically, every side at ceramic arm 1911 has three 185 (GBB or SBB that receive that are electrically connected, be that gold goal welding or tin ball bonding connect) with micro-actuator 181 attachings on the cable 184 of suspension, and similarly, have four be electrically connected receive 186 (GBB or SBB) with slide block 182 attachings in suspension electrical cable 184, the other end of cable is connected to suspension solder joint 187 so that provide power supply by suspension electrical cable 184.This PZT will stretch and shrink, and this will cause ceramic arm 1811 distortion of U-shaped micro-actuator 181, and slide block 182 is moved on disk, thereby realize meticulous adjusting is carried out in the position of the magnetic head of attaching on slide block 182.

Because the conventional design of HGA has adopted U-shaped pottery micro-actuator, the PZT element is also made by stupalith; The big quality of stupalith can influence the dynamic property of HGA.In addition, because stupalith is a friable material, the shock resistance of ceramic micro-actuator is limited, and can produce the particle of not expecting in the course of the work.

For weight that reduces micro-actuator and the dynamic property of improving HGA, people's such as Yao Ming's height U.S. Patent No. 6,950,288 discloses the micro-actuator that uses metal framework.More specifically, this framework is made by stainless steel.By using metal framework, the dynamic property of micro-actuator is greatly improved.

On the other hand, proposing a kind of film PZT in recent years, to solve impact property low and produce the problem of particle.Yet film PZT can not produce enough displacements because its number of plies is limited.Although can be by film PZT being formed the displacement that multilayer increases film PZT, because the limitation of film PZT manufacturing process, two-layer if the number of plies of film PZT surpasses, then cost will become high.

Therefore, need a kind of cost-effective mode to increase the displacement of the film PZT of micro-actuator.

Summary of the invention

Above-mentioned shortcoming in view of prior art, fundamental purpose of the present invention provides the micro-actuator among a kind of HGA that is used on the disk drive unit, it can make HGA have splendid dynamic property and shock resistance, simultaneously can increase the displacement of micro-actuator and the cost benefit is splendid.

To achieve these goals, the invention provides a kind of micro-actuator, it comprises metal framework, this metal framework has a base portion and two relative arms that extend from this base portion, wherein in described two arms on the side surface of each arm respectively as follows attaching at least two film PZT are arranged: when drive signal is applied to the film PZT of attaching on each arm, it will produce displacement, and the displacement of each arm is owing to synergistic effect is increased.

Particularly, the invention provides the micro-actuator that forms on a kind of side surface of each arm by film PZT being attached to metal framework, static state and dynamic property that it can reduce the gross mass of HGA and improve HGA.On the other hand, by will at least two film PZT be attached to the side surface of each arm of metal framework, make the displacement of this arm, i.e. the displacement meeting of magnetic head produces synergistic effect, has realized increasing the purpose of magnetic head displacement thus.

In addition, film PZT has the quality more much smaller than ceramic PZT, and this will have very big contribution to HGA performance and HGA manufacturing process, and for example, owing to quality has reduced, thereby shock resistance is better.On the other hand, owing in the process of preparation film PZT, can realize accurate control, thereby can reduce foozle to the film PZT size.

Except that above-mentioned advantage, film PZT can also be operated with low voltage among the present invention, and like this, the power of particle of Chan Shenging and consumption is also less during operation, and can obtain high shock resistance and very safe operating conditions.

Preferably, two film PZT difference attachings are in the outer and inner side surface of each described arm.Utilize this two-sided mounting structure, the displacement of micro-actuator can increase greatly, because attaching has doubled in the equivalence work number of plies of the film PZT of each arm, does not still increase the actual layer number of every film PZT.Therefore can increase the displacement of micro-actuator and the cost benefit is splendid.

Preferably, attaching mechanically and electrically links together by substrate in two film PZT of the outer and inner side surface of each arm, and this helps film PZT attaching and the side surface that navigates to arm.

Preferably, described two film PZT are connected like this by substrate, and this substrate is the public substrate of described at least two film PZT, and this substrate bends and stride across the front end or the rear end of arm simultaneously, makes described at least two film PZT place the both sides of this arm respectively.

Preferably, described two film PZT are connected like this by substrate, and this substrate is the public substrate of described at least two film PZT, and this substrate bends and stride across the upper limb of arm simultaneously, makes described at least two film PZT place the both sides of this arm respectively.

Preferably, described substrate is that flexible polymeric material is made, and is formed with cable on it, is used for two film PZT are electrically connected.

These two film PZT otherwise attaching in each arm of metal framework.More specifically, but described two film PZT attachings in the surface, the same side of each described arm.That is to say that described two film PZT all can be contacted the ground attaching in the outer or inside surface of each arm.In the case, also can obtain described synergistic effect.Yet for realizing maximum displacement, the length of every film PZT should be about 1mm.

Preferably, be formed with the support portion, be used to support slide block at the other end of each arm relative with described base portion, described support zone in base portion parallel plane inequality in, make between the bottom of the bottom of support portion and base portion, to have the gap.

According to another aspect of the present invention, provide a kind of Sagnetic head universal-joint assembly, it comprises: aforesaid micro-actuator; Have the slide block of a magnetic sensor at least, described slide block is contained in the described metal framework, makes described slide block to be activated by described micro-actuator; And suspension, be fixed in the suspension tongue of described suspension and described micro-actuator is disposed thereon by base portion with this metal framework, make described two arms can be independent of suspension and move with slide block.

According to another aspect of the present invention, provide a kind of information recording disk unit, it comprises: disk; The pivot center, described disk rotates around it; VCM is used to drive magnetic head and moves on the surface of disk; And the Sagnetic head universal-joint assembly that is connected to described VCM, the displacement that is used for magnetic head is regulated, and wherein said Sagnetic head universal-joint assembly comprises micro-actuator as previously discussed.

The present invention also provides a kind of method of making Sagnetic head universal-joint assembly, comprise the steps: with two film PZT respectively attachings in the interior and outer surface of each arm of metal framework with the formation micro-actuator; The slide block that will have magnetic sensor is installed in the micro-actuator; Be fixed to by base portion on the suspension tongue of suspension and micro-actuator is installed on the suspension metal framework; Micro-actuator and suspension and the slide block that has a magnetic sensor are connected with suspension electrical.

Preferably, describedly further comprise the steps: to provide two film PZT with the film PZT attaching in the step of the side surface of each arm, every film PZT is by mechanically constituting with two film PZT that electrically are connected by substrate; Middle part at described substrate bends every film PZT, makes two film PZT that constitute every film PZT be parallel to each other basically; With two film PZT after the bending respectively attachings make described each arm be clamped in two film PZT of bending and described substrate strides across this arm in the outer and inner surface of each arm.

Therefore, the another kind method that is used to make Sagnetic head universal-joint assembly comprises the steps: two film PZT polyphone ground attachings in the surface, the same side of each arm of metal framework; The slide block that will have magnetic sensor is installed in the micro-actuator; Be fixed to by base portion on the suspension tongue of suspension and micro-actuator is installed on the suspension metal framework; Micro-actuator and suspension and the slide block that has a magnetic sensor are connected with suspension electrical.

Only as example and the detailed description to the embodiment of the invention that provides with reference to the accompanying drawings, other characteristic of the present invention and advantage will become obvious based on following.

Description of drawings

Fig. 1 shows the typical disk drive of the conventional micro-actuator that is used for head position control;

Fig. 2 a is the detailed view of HGA structure among Fig. 1;

Fig. 2 b is the detailed view of conventional micro-actuator;

Fig. 3 a-3f shows according to the micro-actuator of first embodiment of the invention and parts thereof, and modification;

Fig. 4 a-4c shows according to the micro-actuator of second embodiment of the invention and parts thereof;

Fig. 5 shows the emulated data of the displacement of PZT with respect to the PZT length and the number of plies;

Fig. 6 a-6b shows according to the micro-actuator of third embodiment of the invention and parts thereof;

Fig. 7 a is the topology view that is equipped with according to the HGA of micro-actuator of the present invention;

Fig. 7 b is the detailed perspective view of the front portion of the suspension of HGA described in Fig. 7 a;

Fig. 7 c is the side view of the front portion of the suspension of HGA shown in Fig. 7 a, wherein has been equipped with according to micro-actuator of the present invention;

Fig. 8 shows the process flow diagram according to the technology of manufacturing HGA of the present invention; And

Fig. 9 shows the disk drive unit that uses micro-actuator of the present invention.

Embodiment

The present invention relates to micro-actuator, use the HGA of this micro-actuator and comprise the disk drive unit of this HGA.

In whole instructions, same or analogous parts have same or analogous drawing reference numeral.

Fig. 3 a-3e is the detailed structure view according to the micro-actuator of first embodiment of the invention and parts thereof.

Fig. 3 a is the topology view according to the micro-actuator that assembles 20 of first embodiment of the invention.Micro-actuator 20 comprises film PZT 21 and metal framework 22, and film PZT 21 is attached on the metal framework 22.Below be to the structure of film PZT 21 and metal framework 22 and the detailed description of assembling process thereof.

Fig. 3 b shows the film PZT of using in the micro-actuator 20 21.Film PZT 21 is made of the first film PZT sheet 211 and the second film PZT sheet 212, it links together by the substrate of making such as flexible polymeric material 213, make the first and second film PZT sheets 211 and 212 along the longitudinal direction (polyphone) be arranged on the substrate 213 and be spaced from each other.In other words, substrate 213 is public substrates of two film PZT 211 and 212, and the end of two film PZT 211 and 212 toward each other.On substrate 213, be formed with the cable (not shown), be used for two film PZT 211 and 212 are electrically connected.

Fig. 3 c shows the structure according to the metal framework 22 of first embodiment of the invention.Preferably the metal framework of being made by stainless steel 22 comprises base portion 221 and two arms 222 that extend from described base portion 221.Support portion 223 is formed at the other end of the arm 222 relative with substrate 221.In other words, two arms 222 are substantially perpendicular to base portion 221 and support portion 223 and extend from base portion 221 and support portion 223 at every end.In this embodiment, metal framework 22 is formed through after twice bending by the single piece of metal blanket, and is formed with gap 224 at the middle part of base portion 221.

Fig. 3 d is the side view of this metal framework 22.As seen from the figure, base portion 221 is formed on the plane different with support portion 223, between base portion 221 and support portion 223, vertically has a difference in height 225, when base portion 221 is installed on the suspension tongue of HGA suspension, this difference in height helps the front portion of framework 22 and moves smoothly, as will further describing afterwards.

The middle part 214 that Fig. 3 e shows the flexible base, board 213 that film PZT 21 makes with polymeric material is the configuration state after the center bends, first and second film PZT sheets 211 and 212 parallel to each other basically and have an internal interval therebetween wherein, described internal interval will be suitable for the film PZT sheet is installed to the surfaces externally and internally of the arm 222 of metal framework 22.

Be installed to metal framework 22 by the film PZT 21 after will bending, make two film PZT sheets 211 and 212 difference attachings in the interior and outer surface of arm 222, and middle part 214 strides across back (or preceding) end of arm 222, that is to say, by arm 222 is clipped between two film PZT 211 and 212, formed the micro-actuator 20 among first embodiment shown in Fig. 3 a.

Utilize the structure of this two-sided installation, the displacement of micro-actuator will increase greatly, and this is that in fact the equivalence work number of plies of the film PZT of attaching on each arm has doubled because under the situation of the actual layer number that does not increase every film PZT.Like this, the displacement of resulting micro-actuator is the two slice film PZT 211 of attaching on each arm of metal framework and the stack of 212 displacement.More specifically, for two-layer film PZT being attached to situation on the described arm by this two-sided mounting means, the equivalent number of plies of the film PZT on each arm is exactly four, so the displacement of micro-actuator will increase to twice, thereby has increased displacement in the mode of low-cost high-efficiency.

Fig. 3 f shows another example 22 ' of the metal framework that can adopt in this embodiment, and its intermediate gap 224 ' is formed on the support portion 223 ' of metal framework 22 ', rather than is formed on the base portion 221 '.

It is a kind of by film PZT being attached to the micro-actuator that forms on the metal framework structure that this embodiment of the present invention provides, static state and dynamic property that it can reduce the gross mass of HGA and can improve HGA, simultaneously, interior and the outer surface of each arm by the film PZT sheet being attached to metal framework makes magnetic head have enough displacements.

Fig. 4 a shows second embodiment according to micro-actuator of the present invention to 4c.More specifically, Fig. 4 a shows two film PZT 31 using in second embodiment of micro-actuator.Wherein every is made of the first film PZT sheet 311 and the second film PZT sheet 312, and it links together by substrate 313, makes the first and second PZT sheets 311 and 312 be arranged on the substrate 313 and the certain distance that also is spaced apart from each other along horizontal direction (and company).Second embodiment is with the difference of first embodiment: public substrate 313 so is connected two film PZT, make two film PZT side toward each other.Equally, on substrate 313, can form the cable (not shown), be used for two film PZT sheets are electrically connected.

The metal framework 22 of this micro-actuator 30 among second embodiment is identical with first embodiment, thereby has omitted further describing metal framework.Similarly, another kind of metal framework 22 ' is also in a second embodiment available.

Fig. 4 b shows the configuration state of two film PZT 31 after 314 bendings of the middle part of substrate 313.For the purpose that realizes bending, substrate 313 is preferably formed by a kind of polymeric material of flexibility.Under this bending state, the first and second film PZT sheets 311 and 312 parallel to each other basically and have an internal interval, this internal interval will be suitable for the film PZT sheet is installed to the interior and outside surface of the arm of metal framework 22.

Fig. 4 c is the topology view according to the micro-actuator of second embodiment that is assembled by above-mentioned two film PZT 31 and metal framework 22.It forms in the following way: the film PZT 31 after will bending is attached to metal framework 22, make two film PZT sheets 311 and 312 difference attachings in the interior and outer surface of each arm, and middle part 314 strides across the coboundary of arm.That is to say that each arm of metal framework 22 is clipped between two film PZT sheets 311 and 312.

Similarly, the micro-actuator 30 of second embodiment also has the equivalent film PZT number of plies of increase, and therefore also can produce the synergistic effect of arm displacement.

It will be apparent for a person skilled in the art that, attaching also can be completely separate from each other and be not connected by substrate in two film PZT sheets of the interior and outer surface of each arm of metal framework, although in first and second embodiment of the present invention, these two film PZT all link together by substrate.In the case, the first film PZT sheet and the second film PZT sheet can be electrically connected to the suspension solder joint by cable separately.

Fig. 5 shows the emulated data of the displacement of film PZT with respect to the PZT length and the PZT number of plies.Can learn that the displacement of PZT will increase along with the increase of the PZT number of plies.Therefore, by increasing attaching in the equivalent number of plies of the film PZT of each arm, first and second embodiment of the present invention can increase the displacement of PZT effectively.

On the other hand, we can also learn from Fig. 5, and the displacement of PZT will at first increase along with the increase of PZT length, but it will reduce along with the further increase of PZT length.The maximum displacement of PZT occurs in certain length points (according to Fig. 5, this certain length points is about 1mm) of PZT.Based on this specific character of PZT, we also can increase the displacement of PZT by the suitable length of selecting each film PZT sheet.

Fig. 6 a shows based on the micro-actuator of the third embodiment of the invention of above-mentioned principle and the topology view of film PZT thereof to Fig. 6 b.

Fig. 6 a shows the topology view of the micro-actuator that assembles 40 of the 3rd embodiment, and this micro-actuator comprises metal framework 22 and film PZT bar 41.More specifically, Fig. 6 b illustrates two film PZT 41, every is made of the first film PZT sheet 411 and the second film PZT sheet 412, and it also links together by substrate 413, make the first and second PZT sheets 411 and 412 along the longitudinal direction (polyphone) be arranged on the substrate 413.As shown in the figure, the topology layout of 41 of film PZT among the 3rd embodiment is similar to first embodiment.The difference of the 3rd embodiment and first embodiment is: two film PZT 41 with direct attaching in the outer surface of each arm of metal framework 22 and do not bend.Equally, also can on substrate 413, form the cable (not shown), be used for two film PZT sheets 411 and 412 are electrically connected.

The metal framework 22 of the 3rd embodiment 40 of micro-actuator is identical with first and second embodiment, thereby has omitted further describing metal framework.Similarly, another kind of metal framework 22 ' also can be used among the 3rd embodiment.

In Fig. 6 a, only show two film PZT, 41 difference attachings in the situation of the outer surface of two arms of metal framework 22.Yet, be appreciated that two film PZT 41 can distinguish the inner surface of attaching in two arms of metal framework 22.In addition, film PZT 41 attaching all can as long as synergistic effect can take place in the inner surface of an arm and another attaching also is feasible in the outer surface of another arm.

Even because the restriction of the total length of micro-actuator arms, the optimum length that each film PZT sheet 411,412 of this embodiment can not adopt according to the 1mm of Fig. 5, every film PZT 411,412 can be designed to optimization length, make every PZT can produce maximum displacement.Because attaching is in the arm of metal framework 22 regularly for film PZT sheet 411 and 412, thereby the displacement of each arm is the stack of the displacement of these two film PZT sheets 411 and 412.Also realized the increase of micro-actuator 40 displacements according to the structure of the 3rd embodiment.

Fig. 7 a shows the one-piece construction that is equipped with according to the HGA50 of micro-actuator 20 of the present invention (or 30,40).This HGA is equipped with the micro-actuator 20 that is used for accurate positioning head at suspension tongue 1831 places of suspension 183.Fig. 7 b is the zoomed-in view of the front portion of suspension 183.

Shown in Fig. 7 a and Fig. 7 b, be fixed in the suspension tongue 1831 of suspension 183 by base portion, have the slide block 182 of at least one magnetic sensor (not shown) and the assembly of micro-actuator 20 and be arranged on the suspension tongue 1831 of suspension 183 metal framework of micro-actuator 20.Slide block 182 is installed between two arms of micro-actuator 20, and can be subjected to displacement in response to the drive signal that is applied to film PZT.Slide block 182 is by gold goal welding (GBB) or the tin ball bonding meets (SBB) 186 and suspension electrical cable 184 is electrically connected on suspension solder joint 187.Film PZT also is electrically connected on suspension solder joint 187 via suspension electrical cable 184.Omitted the detailed description of electrical connection well known in the art at this.Although in the above-described embodiments, all film PZT sheets on each arm of metal framework all have been applied in drive signal, possiblely be, when the arm displacement that is caused by the part film PZT can be satisfied related request, can only apply drive signal, and another arm not applied drive signal two film PZT on the arm of metal framework.

Fig. 7 c is arranged on the side view of the micro-actuator 20 on the suspension tongue 1831 of suspension 183.Metal framework 22 comes support slipper 182 by support portion 223, and base portion 221 partly is installed on the suspension tongue 1831 via the insulation course made from for example polymeric material.Projection 501 in the suspension load beam 502 supports suspension tongue 1831.As indicated above, when voltage is applied to film PZT, the gap 225 of about 30-50 μ m will guarantee that slide block 182 moves smoothly between the basal surface of the support portion 223 of suspension tongue 1831 and metal framework 22.

HGA according to the present invention is not limited to said structure.In addition, although not shown, can the magnetic head driving IC chip is installed in the middle part of suspension 183.

Fig. 8 is the process flow diagram that illustrates according to the technology of manufacturing HGA of the present invention.

This manufacture process starts from step 601.In step 602, respectively with two film PZT attachings in the inboard of each arm of metal framework and outer surface so as to form as first or second embodiment described in micro-actuator, proceed to step 603 then, in this step, the slide block that will have magnetic sensor is installed on the micro-actuator.At next step 604, be fixed to the suspension tongue of Sagnetic head universal-joint assembly and the subassembly of slide block and micro-actuator is mounted thereto by base portion with micro-actuator.In step 605, via the suspension electrical cable micro-actuator is electrically connected to the suspension solder joint, and slider electrical is connected to the suspension solder joint.This manufacture process ends at step 606, has made thus according to HGA of the present invention.

In addition, can after finishing manufacturing HGA, test the slide block after installing and the performance of film PZT.

Perhaps, can make by another kind of process according to HGA of the present invention.In this process, with the pzt thin film attaching before being installed to micro-actuator on the arm of metal framework and with slide block at first with the metal framework attaching of micro-actuator on suspension.

In addition, in the manufacture process that illustrates, the film PZT attaching can be comprised following further step in the step of the side surface of two arms of metal framework: two film PZT are provided, and every film PZT is by mechanically constituting with two pzt thin films that electrically are connected by substrate; In every film PZT of the middle part of substrate bending, make that two film PZT that constitute every film PZT are parallel to each other basically; To bend two good film PZT respectively and be attached to the outside and the inner surface of one of them arm, and make described arm be clipped between described two film PZT.

On the other hand, it is as follows to be used to form the another kind of manufacture process of HGA of the micro-actuator 40 that is equipped with the 3rd embodiment: with two film PZT polyphone attachings in the surface, the same side of each arm of metal framework to form the micro-actuator of the 3rd embodiment; The slide block that will have magnetic sensor is installed in the micro-actuator; Be fixed to the suspension tongue of suspension and micro-actuator is installed on the suspension by base portion metal framework; Micro-actuator and suspension and the slide block that has a magnetic sensor are connected with suspension electrical.This process is similar to the process shown in Fig. 8, does not therefore illustrate with other process flow diagram.Similarly, in this process, also can with the pzt thin film attaching before being installed on micro-actuator on the arm of metal framework and with slide block, at first with the metal framework attaching of micro-actuator on suspension.

Fig. 9 shows the HDD80 that uses film PZT micro-actuator 20,30 of the present invention or 40.It comprises housing 801; Be contained in the disk 802 in the described housing 801; Pivot center 803, described disk rotate around described pivot center in described housing; VCM804 is used to drive the HGA50 that is connected to described VCM804 and moves on the surface of disk 802.Described Sagnetic head universal-joint assembly 50 can comprise micro-actuator 20,30 or 40 of the present invention.

Although in the above-described embodiments, described micro-actuator is used among the HGA of disk drive unit, and as apparent to those skilled in the art, it also can be used in other device that need regulate displacement.Can construct many different embodiment within the spirit and scope of the present invention.For example, with any alternate manner, as passing through combination first and second embodiment, can be with the film PZT attaching more than two in the side surface of each arm of metal framework, the inboard and the outer surface that are each arm all can be provided with the above film PZT of a slice, to obtain bigger displacement by synergistic effect.Should be understood that the present invention is not limited to the specific embodiment of describing in the instructions, but should limit by claims.

Claims (13)

1. micro-actuator, comprise metal framework, this metal framework comprises two relative arms that a base portion and this base portion certainly extend, it is characterized in that, on the side surface of each arm respectively as follows attaching at least two film PZT are arranged: when each arm is subjected to displacement in response to being applied to the drive signal on the film PZT with attaching film PZT thereon, the displacement of each arm since synergistic effect be increased.

2. micro-actuator as claimed in claim 1, wherein said at least two film PZT difference attaching is in the outside and the inner surface of each described arm.

3. micro-actuator as claimed in claim 2, wherein attaching mechanically and electrically links together by substrate in the outside of each arm and described two film PZT of inner surface at least.

4. micro-actuator as claimed in claim 3, wherein said at least two film PZT are connected by this way by described substrate: this substrate is the public substrate of described at least two film PZT, this substrate bends and strides across the front end or the rear end of arm simultaneously, makes described at least two film PZT place the both sides of this arm respectively.

5. micro-actuator as claimed in claim 3, wherein said at least two film PZT are connected by this way by substrate: this substrate is the public substrate of described at least two film PZT, this substrate bends and strides across the upper limb of arm simultaneously, makes described at least two film PZT place the both sides of this arm respectively.

6. micro-actuator as claimed in claim 1, wherein said at least two book film PZT with the polyphone the mode attaching in the surface, the same side of each described arm.

7. micro-actuator as claimed in claim 6, wherein attaching mechanically and electrically links together by substrate in described two film PZT on the surface, the same side of each arm at least.

8. as claim 3 or 7 described micro-actuators, wherein said substrate is made by flexible polymeric material, is formed with cable on it, is used to be electrically connected described at least two film PZT.

9. Sagnetic head universal-joint assembly comprises:

Each described micro-actuator as claim 1 to 8;

The slide block that has at least one magnetic sensor, described slide block is contained in the described metal framework, makes described slide block to be activated by described micro-actuator;

Suspension is fixed on the suspension tongue of described suspension and described micro-actuator is disposed thereon by the base portion with metal framework, makes described two arms can be independent of suspension with slide block and moves.

10. information recording disk unit comprises:

Disk;

The pivot center, described disk is around this pivot center rotation;

VCM is used to drive magnetic head and moves on the surface of dish; And

Be connected to the Sagnetic head universal-joint assembly of described VCM, be used for that magnetic head is carried out displacement and regulate,

It is characterized in that described Sagnetic head universal-joint assembly comprises as each described micro-actuator among the claim 1-8.

11. a method of making Sagnetic head universal-joint assembly comprises the steps:

With two film PZT respectively attaching in the inboard of each arm of metal framework and outer surface to form micro-actuator as claimed in claim 2;

The slide block that will have magnetic sensor is installed in the micro-actuator;

Be fixed to by base portion on the suspension tongue of suspension and micro-actuator is installed on the suspension metal framework;

Be electrically connected micro-actuator and suspension and magnetic sensor slide block and suspension.

12. the method for manufacturing Sagnetic head universal-joint assembly as claimed in claim 11 wherein saidly further comprises the steps: the step of film PZT attaching in the side surface of each arm

Two film PZT are provided, and every film PZT is by mechanically constituting with two film PZT that electrically are connected by substrate;

Middle part at described substrate bends every film PZT, makes two film PZT that constitute every film PZT be parallel to each other basically;

With two film PZT after the bending respectively attachings make described each arm be clipped between two film PZT after the bending, and described substrate strides across this arm in the outer and inner side surface of each arm.

13. a method that is used to make Sagnetic head universal-joint assembly comprises the steps:

With two film PZT polyphone ground attachings in the surface, the same side of each arm of metal framework to form micro-actuator as claimed in claim 6;

The slide block that will have magnetic sensor is installed in the micro-actuator;

Be fixed to by base portion on the suspension tongue of suspension and micro-actuator is installed on the suspension metal framework;

The slide block and the suspension that are electrically connected micro-actuator and suspension and have magnetic sensor.

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