KR101252239B1 - Manufacturing method of thin film type PZT glide head for hard disk - Google Patents

Abstract

The present invention relates to a method of manufacturing a thin film PZT glide head for a hard disk, and more particularly, a glide head for detecting a surface defect of a hard disk drive media is made of a thin film PZT, thereby miniaturizing a slider compared to a conventional bulk type. It can be made as well as its size can be applied from ultra-small femto size to pico size, and by replacing the existing bulk piezoelectric element with a thin film piezoelectric element using a semiconductor process, it has a low lift height, sensitivity and weight or volume Specific gravity can be minimized, and by manufacturing the thin film type PZT sensor formed on the upper part and the air bearing surface (ABS) formed on the lower part of the thin film type PZT sensor as an integrated type, it is possible to design a smaller size than the conventional detachable type, so that the glide head of the Femto Size Of course, it can be preemptively technically in favor of the production of Integrating through the sieve process creates economic added value, and by manufacturing the glide head in a thin film type, it is possible to miniaturize and lighten the weight, thereby reducing the height of injury than the glide head using a bulk piezoelectric element. .

Description

Manufacturing method of thin film type PZT glide head for hard disk}

According to the present invention, since the glide head for detecting the surface defects of the hard disk drive media is made of thin film PZT, the slider can be miniaturized as compared to the conventional bulk type, and the size of the glide head can be applied from the smallest femto size to the pico size. By replacing the existing bulk piezoelectric element with a thin film type piezoelectric element using a semiconductor process, it is possible to minimize the low floating height, the sensitivity, and the specific gravity or the weight or volume of the thin film type PZT sensor and the thin film type PZT sensor. By manufacturing the air bearing surface (ABS) formed in the lower part as an integrated type, it is possible to design a smaller size than the existing detachable type, which is advantageous for the manufacture of the glide head of the femto size, and can be preemptively technically and is integrated through the semiconductor process. Economical value-added, glide head By producing the type, enabling a reduction in the size and weight by a description of the manufacturing method of the conventional bulk type piezoelectric elements the glide heads for more capable of reducing the height of the thin-film PZT injury hard disk with glide head.

Hard disks can be said to be a comprehensive collection of sciences that play a role in recording information on magnetic recording media or reading magnetic signals as electrical signals in an information storage device using magnetic recording technology.

At the beginning of the 1 terabyte storage era, an increase in the recording density and track density of a hard disk is an important factor, and the increase of the recording density is increasing about 50% per year.

The magnetic head floats on the disc at a constant height by air bearing. Since the height of the injury must be lowered to increase the storage density, many research institutes are currently researching to realize a lower and stable height of injury. In addition, there is a trend toward miniaturization to achieve an increase in storage density.

A magnetic disk used in a hard disk device uses a nonmagnetic substrate such as disk-shaped glass or aluminum. A magnetic film and a protective film mainly composed of carbon are formed on the surface of the nonmagnetic substrate, and a fluorocarbon-based lubricant is formed thereon. Is applied. The magnetic disk thus produced is used as a recording apparatus for recording or reproducing information in combination with a magnetic head.

The glide head for magnetic disks is a sensor for detecting minute projections or foreign substances generated on the surface of the magnetic disk, and is used in the inspection process of the magnetic disk. Although some types of glide heads have been put to practical use, the piezoelectric element is mounted and the AE sensor is mounted outside the head. The piezoelectric element method and the AE method differ only in the method of converting the vibration generated by the slider of the glide head into a voltage to a minute defect occurring on the surface of the magnetic disk. Among the piezoelectric elements that are currently commercialized, there is a disadvantage in that the height of the slider is limited due to volume or weight in a bulk form.

Therefore, in order to improve these disadvantages, the development of a method of manufacturing a thin film type PZT glide head for a hard disk capable of minimizing the weight or volume specific gravity while having better sensitivity than a bulk piezoelectric element is required.

Accordingly, the present invention was conceived to solve the above problems, and since the glide head for detecting the surface defects of the hard disk drive media is made of a thin film type PZT, the slider can be miniaturized as well as the size of the conventional bulk type. It is an object of the present invention to provide a method for manufacturing a thin film type PZT glide head for a hard disk that can be applied from a very small femto size to a pico size.

In addition, an object of the present invention is to replace the existing bulk piezoelectric element with a thin film piezoelectric element using a semiconductor process, a method of manufacturing a thin film type PZT glide head for a hard disk that can minimize the low floating height, sensitivity and weight or volume specific gravity To provide.

In addition, an object of the present invention is to manufacture a thin film PZT sensor formed on the top and the air bearing surface (ABS) formed on the lower portion of the thin film PZT sensor as a unitary, it is possible to design a smaller than the conventional detachable glide head of the Femto Size The present invention provides a method of manufacturing a thin film PZT glide head for a hard disk, which can be preemptively technically and is integrated through a semiconductor process, thereby creating economical added value.

In addition, an object of the present invention is to manufacture a glide head in a thin film type, to provide a manufacturing method of a thin film type PZT glide head for a hard disk that can be reduced in size and light weight than the glide head using a bulk piezoelectric element. There is.

In order to achieve the above object, a method of manufacturing a thin film type PZT glide head for a hard disk according to an exemplary embodiment of the present invention uses chemical vapor deposition using C ₂ H ₄ gas on an alumina-based or silicon nitride-based substrate. Depositing carbon to form a diamond like carbone (DLC) film for insulation; Forming a key for alignment on the DLC deposition and the rear surface of the deposition; Cavity is formed on the front surface forming the primary rail for implementing the floating height of several nm, and Shallow is formed on the front surface forming the secondary rail for implementing the floating height of several nm. Making a step; Grinding the back surface of the substrate for processing the back surface of the substrate to a thickness of femto, Pico, and Nano Size; Depositing or coating PZT, a piezoelectric material, on any one selected from a sol-gel, a sputter, a CVD, and a screen printing method on a rear surface of the ground substrate; Depositing CoNiFe between the PZT and the electrode formed of gold to form an electrode; Cutting a substrate having an air bearing surface (ABS) at a front surface of the substrate and a substrate having a PZT surface at a rear surface of the substrate to a femto, pico, and nano size; Assembling a head gimbal assambly (HGA) to use the cut chip on a hard disk (HD); Characterized in that it comprises a.

In the present invention, when a vapor deposition (PVD) on the substrate of the alumina series or silicon nitride series is characterized in that the Si target is used.

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In the present invention, in the step of cutting to the chip size, the Pico type is 1.25mmX1.0mmX0.43mm, Femto type is 0.85mmX0.7mmX0.3mm, Nano type is 2.5mmX1.6mmX0.43mm It is done.

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In the present invention, the air bearing surface (ABS) is characterized in that the two rail type and NPAB type.

In the present invention, the location of the PZT thin film is characterized in that the form is coated on the upper side and front side.

The method for manufacturing a thin film PZT glide head for a hard disk according to the present invention has the following effects.

First, the present invention is that the glide head for detecting the surface defects of the hard disk drive media is made of a thin film PZT, the slider can be miniaturized as compared to the conventional bulk type, and the size of the glide head from the small size Femto Size to Pico Size Application is possible.

Second, the present invention can minimize the weight of the low floating height, sensitivity and weight or volume by replacing the existing bulk piezoelectric element with a thin film piezoelectric element using a semiconductor process.

Third, the present invention by manufacturing the thin film PZT sensor formed on the top and the air bearing surface (ABS) formed on the lower portion of the thin film PZT sensor as an integral type, it is possible to design a smaller size than the conventional detachable type glide head of the femto size It is advantageous in that it can be preemptively technically and can be integrated through semiconductor process to create economic added value.

Fourth, the present invention by manufacturing the glide head in a thin film form, it is possible to reduce the size and weight can reduce the height of injury than the glide head using a conventional bulk piezoelectric element.

1 is a photographic view showing a front surface of a thin film PZT glide head for a hard disk according to an embodiment of the present invention.
2 is a photographic view illustrating the operation principle of a glide head of a glide head for a hard disk according to an embodiment of the present invention.
3 is a photograph showing the structure of a thin film PZT glide head for a hard disk according to an embodiment of the present invention.
Figure 4 is a photograph showing a schematic structure of a thin film type PZT for a hard disk according to an embodiment of the present invention.
5 is a manufacturing flowchart of a thin film PZT glide head for a hard disk according to an embodiment of the present invention.

Looking at the preferred embodiment of the present invention together with the accompanying drawings as follows, when it is determined that the detailed description of the known art or configuration related to the present invention may unnecessarily obscure the subject matter of the present invention The description will be omitted, and the following terms are terms defined in consideration of functions in the present invention, which may vary according to intentions or customs of users or operators, and the definition thereof is the manufacture of a thin film PZT glide head for a hard disk of the present invention. It should be made based on the contents throughout the specification to describe the method.

Hereinafter, the structure of a thin film type PZT glide head for a hard disk according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

1 is a photograph showing a front surface of a thin film type PZT glide head for a hard disk according to an embodiment of the present invention, Figure 2 illustrates the operation principle of the glide head of the glide head for a hard disk according to an embodiment of the present invention 3 is a photographic view showing the structure of a thin film type PZT glide head for a hard disk according to an embodiment of the present invention, Figure 4 is a thin film type PZT for a hard disk according to an embodiment of the present invention It is a photographic figure which shows schematic structure.

In general, a hard disk (Hard disk) manufacturing process to form a magnetic film and a protective film mainly composed of carbon on the surface of the non-magnetic substrate, such as disk-shaped glass or aluminum, and to produce a magnetic disk by applying a lubricant thereon. Afterwards, the surface of the media is processed through the burning process to remove the surface asperity, and the surface is inspected using a glide head to determine the presence of asperity on the surface of the magnetic disk.

As shown in FIG. 1, a photograph of the front surface of a thin film PZT glide head for a hard disk shows a general glide head equipped with a PZT sensor. When the asperity of the glide head 10 comes into contact with the disk, a signal is generated in the PZT crystal, which reflects the compression and expansion of the crystal due to the acceleration of the slider or measures the plate mode by bending the slider. . This plate mode occurs at a relatively high frequency, and the PZT signal (signal) reflects the air bearing characteristics and mechanical vibration characteristics of the HGA system, allowing the measurement of asperity.

As shown in Figures 2 and 3, the photograph shown to explain the operation principle and structure of the glide head of the glide head for a hard disk, in Figure 2 (a) is a rear photograph of the glide head, (b) Is a magnified photograph of the glaid head, and (c) is a photograph of the glide head. On the rear surface 14 of the slider (air bearing surface ABS), the flexure 13 provided in the suspension arm 12 is mounted, and the vertex of the pivot 16 formed in the flexure 13 is attached to the slider back surface ( 14), the load is applied from the suspension arm 12 to the slider 11, and the slider is firmly pressed against the magnetic disk. With the pivot 16 as a point, the slider 11 may move slightly up, down, left and right, and the position at which the pivot 16 applies the load to the slider 11 becomes a load point. This slider 11 is floated by the action of the air flow accompanying the rotation of the magnetic disk, the air flows from the front end 15 of the slider to the rear end, the height of the glide head 10 has a number of factors Although mainly determined in the flow rate of air and the design of the sliding rail of the slider 11. If the glide head 10 has a certain height of injury and rises above the magnetic disk and has a collision height or a height of injury with the asperity on the magnetic disk, PZT 17 converts a physical signal into an electrical signal to determine whether the presence of the asperity exists. You will know.

Due to the trend of high capacity and miniaturization of hard disk devices, a floating height of 12 nm or less is required for the magnetic head slider, and accompanied by this, a high sensitivity glide head for detecting magnetic disk defects of 9 nm or less is required. At the same time, a long life glide head is required to make magnetic disk inspection more efficient.

As shown in FIG. 3, in the photograph showing the structure of a thin film PZT glide head for a hard disk, in the case of a thin film glide head, a PMST of MEMS type using a semiconductor process is substituted for the conventional bulk type PZT (17). 17) is formed by applying to the rear of the slider 11, for this purpose, the thinning technology of the PZT sensor should be preceded, and the design of the process and the signal processing technology should be performed in parallel.

As shown in FIG. 4, in the photograph showing a schematic view of the thin-film PZT, a high sensitivity PZT can be implemented compared to the bulk PZT, and the air bearing characteristics of the HGA system can be more efficiently due to the simplified structure of the integrated PZT. Since mechanical vibration characteristics can be reflected, it will contribute to lower flying which requires improvement. The lower electrode 18 is formed on the Si wafer, the PZT 17 is formed on the lower electrode, and the upper electrode 18 is formed.

5 is a manufacturing flowchart of a thin film PZT glide head for a hard disk according to an embodiment of the present invention.

As shown in Figure 5, looking at the manufacturing flow of the thin-film PZT glide head for the hard disk is as follows.

First, step S1 is to form a DLC (diamond like carbone) film for insulation, and deposits carbon by chemical vapor deposition (CVD) using C ₂ H ₄ gas on an alumina-based or silicon nitride-based substrate. To form a DLC (diamond like carbone) film for insulation. Here, in the case of depositing on the substrate of the alumina series or silicon nitride series by physical vapor deposition (PVD), Si target is used.

The next step S2 is to form a key for alignment, and to form a key for alignment on the DLC deposition and the rear surface of the deposition.

Next step S3 is to form a cavity and a shallow in the front surface, to form a cavity on the front surface to form a primary rail for implementing a height of several nm in the film-forming film formed, the height of several nm Shallow is formed in the front part forming the secondary rail to implement the.

The next step S4 is to grind the back surface of the substrate, and to grind the back surface of the substrate to process the back surface of the substrate to a thickness selected from femto, pico, and nano size.

Next step S5 is a step of depositing or coating PZT, and depositing or coating PZT, which is a piezoelectric material, on any one selected from a sol-gel, a sputter, a CVD, and a screen printing method on the rear surface of the ground substrate. Here, the piezoelectric element material is PZT (Lead zirconium titanate: Pb (Zr _x Ti _1-x ) O ₃ , 0 <x <1), PLZT (lanthanum-doped lead zirconate titanate: Pb _y La _1-y (Zr _x Ti _1-x ) O ₃ ), SBT (Strontium bismuth tantalite: SrBi ₂ Ta ₂ O ₉ ), BIT (bismuth titanate Bi ₄ Ti ₃ O ₁₂ ), BLT (bismuth lanthanum titanate: Bi _4-x LaxTi ₃ O ₁₂ ), Permante piezoelectric materials of lead magnesium niobate-lead titanate (PMN-PT) and lead zinc niobate-lead titanate (PZN-PT), binary piezoelectric materials of zinc oxide (ZnO) and aluminum nitride (AIN), polyvinylidene PVDF fluoride) containing a polymeric piezoelectric material. In addition, the position of the PZT thin film is a form that is coated on the upper side and the front side. Among the PZT coating methods, the sol-gel method is a PZT thin film by spin coating (4000 rpm, 40 sec), soft baking (150 ° C., 10 min), hard baking (350 ° C., 10 min), annealing (RTA, 650 ° C., 10 min). To form.

The next step S6 is to form an electrode, in which the electrode is formed of gold through plating on the PZT. Here, it will be possible to deposit CoNiFe between the PZT and the electrode.

Next step S7 is a step of cutting to a chip size, the substrate formed with the air bearing surface (ABS) on the front surface of the substrate, the PZT surface formed on the rear surface of the substrate to a size selected from femto, Pico, Nano size To cut to chip size. Here, the Pico type is 1.25mmX1.0mmX0.43mm, Femto type is 0.85mmX0.7mmX0.3mm, and Nano type is 2.5mmX1.6mmX0.43mm. The air bearing surface ABS is also of the 2 rail type and the NPAB type.

The next step S8 is to assemble the head gimbal assambly (HGA), and to assemble the head gimbal assambly (HGA) so that the cut chip can be used for a hard disk (HD).

As described above, the sensitivity of the glide head for detecting a defect of the magnetic disk used in the hard disk device can be improved, and the life can be extended. Due to the trend of high capacity and miniaturization of hard disk devices, a floating height of 12 nm or less is required for the magnetic head slider, and accompanied by this, a high sensitivity glide head for detecting magnetic disk defects of 9 nm or less is required. At the same time, long-life glide heads are required to improve magnetic disk inspection.

Adhesive stickers can be applied to nails, as well as can be thinly attached to mobile phones, wallpaper, glass, tiles, notes, diaries, plastic moldings, so the application is wide.

The best embodiments have been disclosed in the drawings and specification, and the terminology used herein is for the purpose of describing the invention only and is not intended to be limiting of the scope of the invention as defined in the meanings or claims. Therefore, those skilled in the art will appreciate that various modifications and equivalent embodiments may be possible without departing from the scope of the invention.

10: glide head 11: slider
12: suspension arm 13: flexure
14: Slider back (air bearing surface (ABS))
15: Slider Tip 16: Pivot
17: PZT 18: electrode (upper, lower)

Claims (7)

In the manufacturing method of a thin film type PZT glide head for a hard disk,
Depositing carbon by chemical vapor deposition (CVD) using a C ₂ H ₄ gas on an alumina-based or silicon nitride-based substrate to form a diamond like carbone (DLC) film for insulation;
Forming a key for alignment on the DLC deposition and the rear surface of the deposition;
Cavity is formed on the front surface forming the primary rail for implementing the floating height of several nm, and Shallow is formed on the front surface forming the secondary rail for implementing the floating height of several nm. Making a step;
Grinding the back surface of the substrate for processing the back surface of the substrate to a thickness of femto, Pico, and Nano Size;
Depositing or coating PZT, a piezoelectric material, on any one selected from a sol-gel, a sputter, a CVD, and a screen printing method on a rear surface of the ground substrate;
Depositing CoNiFe between the PZT and the electrode formed of gold to form an electrode;
Cutting a substrate having an air bearing surface (ABS) at a front surface of the substrate and a substrate having a PZT surface at a rear surface of the substrate to a femto, pico, and nano size;
Assembling a head gimbal assambly (HGA) to use the cut chip on a hard disk (HD); Method of manufacturing a thin film type PZT glide head for a hard disk comprising a.
The method of claim 1,
The method of manufacturing a thin film type PZT glide head for a hard disk, wherein a Si target is used when the vapor deposition (PVD) is performed on the alumina-based or silicon nitride-based substrate.
delete The method of claim 1,
In the step of cutting to the chip size, the Pico type is 1.25mmX1.0mmX0.43mm, Femto type is 0.85mmX0.7mmX0.3mm, Nano type is thin film type for hard disk, characterized in that 2.5mmX1.6mmX0.43mm Method for producing PZT glide heads.
delete The method of claim 1,
The air bearing surface (ABS) is a manufacturing method of a thin film type PZT glide head for a hard disk, characterized in that the two rail type and NPAB type.
The method of claim 1,
The location of the PZT thin film is a method of manufacturing a thin film type PZT glide head for a hard disk, characterized in that the form is coated on the upper side and the front side.

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