CN101109624A - Method for high quality measure of tiny rotation angle using digital interferometer - Google Patents
Method for high quality measure of tiny rotation angle using digital interferometer Download PDFInfo
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- CN101109624A CN101109624A CNA2006100170309A CN200610017030A CN101109624A CN 101109624 A CN101109624 A CN 101109624A CN A2006100170309 A CNA2006100170309 A CN A2006100170309A CN 200610017030 A CN200610017030 A CN 200610017030A CN 101109624 A CN101109624 A CN 101109624A
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- flat mirror
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- plane mirror
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Abstract
The invention provides a method for measuring mini rotation angle with high accuracy by using a digital interferometer, which pertains to the technical field of optic inspection. The procedures are: 1. preparing a digital interferometer and a standard plane mirror; 2. installing the standard plane mirror on an object for which the rotation angle is to be measured; 3. adjusting the test optic path, so that the light axis of the field of vision of the digital interferometer coincides with the light axis of the standard plane mirror; 4. using the digital interferometer to measure the contour accuracy PV value 1 of the standard plane mirror at initial state that is mounted on the object to be measured; adjusting the object to rotate, and measuring the contour accuracy PV value 2 of the standard plane mirror; 5. substituting the delta of two PV values Delta is multiplied by Lambada into formula Theta is approximately equal to sin Theta is approximately equal to Delta is multiplied by Lambada/D and getting the rotation angle Theta, wherein, Lambada is the work wavelength of the interferometer, and D is the diameter of the standard plane mirror. The method is simple and easy.
Description
One. technical field
The invention belongs to a kind of method of measuring micro-corner that relates in the optical detective technology field.
Two. background technology
Micro-corner usually is meant that at technos this situation often appears at high-tech area less than the corner of inferior rad magnitude, for example is used for developments such as space optics instrument, fine measuring instrument and rigorous analysis instrument.The present invention is based on the needs in space soft X-ray-extreme ultraviolet waveband helioscope (EUT) development and produces, and needs the secondary mirror rotating mechanism is carried out the measurement of inferior rad precision in the EUT development.Yet, in existing angle measurement technique,, all belonging to the bigger angle measurement of angle measurement scope such as optical electric axial angle encoder angle measurement, the angle measurement of circle raster method, parallel light tube angle measurement or the like, inapplicable micro-corner is measured." a kind of method that adopts digital interference instrument to implement the high-acruracy survey micro-corner " that the present invention proposes realized the measurement of inferior rad precision, satisfied the needs of development work.Simultaneously, simple, the easy row of this method, measurement result is reliable, can measure the inferior rad of any device and rotate, and is of universal significance.
Three. summary of the invention
Be difficult to realize measurement to micro-corner in order to overcome prior art, the inventor sets up a kind of method of measuring micro-corner on the basis of summing up many years of experience.
The technical problem to be solved in the present invention is: a kind of method that adopts digital interference instrument to implement the high-acruracy survey micro-corner is provided.The technical scheme of technical solution problem is:
The first, prepare a digital interference instrument and a standard flat mirror;
The second, the standard flat mirror is installed on the object of tested corner;
Three, adjust optical system for testing, make the visual field optical axis of digital interference instrument and the optical axis coincidence of standard flat mirror;
Four, be installed in the surface figure accuracy PV value 1 of the standard flat mirror original state on the measured object with digital interference instrument test, adjust after the measured object rotation surface figure accuracy PV value 2 of mark directrix plane mirror again;
Five, difference DELTA λ substitution formula θ ≈ sin θ ≈ Δ λ/D that the PV value that records for twice is subtracted each other obtains tested rotational angle theta, and λ is the operation wavelength of interferometer in the formula, and D is the diameter of standard flat mirror.
The principle of work explanation:
As shown in Figure 1,1 representative is installed in the initial position face of the standard flat mirror on the measured object, 2 represent the turn an angle mirror position of back standard flat mirror of measured object, 3 representatives are parallel to the mirror position of the initial position face of standard flat mirror, the linear distance that the minute surface edge of line segment 4 expression standard flat mirrors moves, θ represents the angle on two sides.Because Δ λ promptly equals the length of line segment 4, so worked as θ enough hour, we utilize the Taylor expansion formula of sine function to obtain formula θ ≈ sin θ ≈ Δ λ/D, wherein D is the diameter of standard flat mirror, λ is the operation wavelength of digital interference instrument, and θ is that the standard flat mirror also is the angle of measured object deflection.
Good effect of the present invention: method is simple for this, only need to be equipped with digital interference instrument and standard flat mirror, the standard flat mirror is installed on the object of tested corner, be installed in the surface figure accuracy value of the standard flat mirror of the virgin state on the measured object with the digital interference instrument measurement, survey the surface figure accuracy value that object under test rotates back standard flat mirror again, through calculating the micro-corner of just knowing measured object, measured object can be the variety classes object, can be used for measuring the minor rotation of any object that can the fixed standard level crossing.
Four. description of drawings
Fig. 1 is a principle of work explanation synoptic diagram of the present invention.
Fig. 2 is an installation drawing of measuring the precise rotating platform corner.
Five. embodiment:
The present invention implements by five steps that propose in the technical scheme.At first, prepare a ZYGO digital interference instrument 5 and a standard flat mirror 6, wherein the measuring accuracy PV value of ZYGO digital interference instrument 5 is λ/100, and the bore of standard flat mirror 6 is 45mm, and surface figure accuracy PV value is 0.246 λ; Secondly, the accurate rotatable platform 7 of the Piezoelectric Ceramic that German PI company is produced is connected with standard flat mirror 6, and the accurate rotatable platform 7 of Piezoelectric Ceramic is fixed on the five dimension adjustment racks 8 of ZYGO digital interference instrument 5 special uses, ZGYO digital interference instrument 5 and five is tieed up adjustment racks 8 and is placed on the general optical table 9; The 3rd, adjust optical system for testing, make the visual field optical axis of ZYGO digital interference instrument 5 and the optical axis coincidence of standard flat mirror 6; The 4th, utilize ZGYO digital interference instrument 5 to measure the surface figure accuracy PV value 1 of standard flat mirror 6 original states on the accurate rotatable platform 7 that is installed in Piezoelectric Ceramic; Send the supporting control device 10 that the accurate rotatable platform 7 of Piezoelectric Ceramic is given in instruction with computing machine 11 by the RS232 interface then, the accurate rotatable platform 7 of control device 10 control Piezoelectric Ceramic drives angle of standard flat mirror 6 deflections, utilizes the surface figure accuracy PV value 2 of ZGYO digital interference instrument 5 measurement standard level crossings 6; Obtain the difference Δ λ of the PV value of twice measurement, Δ λ represents the linear distance that the minute surface edge of standard flat mirror 6 moves; The 5th, utilize formula θ ≈ sin θ ≈ Δ λ/D, just can obtain the angle of accurate rotatable platform 7 deflections of Piezoelectric Ceramic.Wherein D is the diameter of standard flat mirror 6, and λ is the operation wavelength of ZYGO digital interference instrument 5.
Claims (1)
1. a method that adopts digital interference instrument to implement the high-acruracy survey micro-corner is characterized in that: the first, prepare a digital interference instrument and a standard flat mirror; The second, the standard flat mirror is installed on the object of tested corner; Three, adjust optical system for testing, make the visual field optical axis of digital interference instrument and the optical axis coincidence of standard flat mirror; Four, be installed in the surface figure accuracy PV value 1 of the standard flat mirror original state on the measured object with digital interference instrument test, adjust after the measured object rotation surface figure accuracy PV value 2 of mark directrix plane mirror again; Five, difference DELTA λ substitution formula θ ≈ sin θ ≈ Δ λ/D that the PV value that records for twice is subtracted each other obtains tested rotational angle theta, and λ is the operation wavelength of interferometer in the formula, and D is the diameter of standard flat mirror.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100170309A CN100451539C (en) | 2006-07-20 | 2006-07-20 | Method for high quality measure of tiny rotation angle using digital interferometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100170309A CN100451539C (en) | 2006-07-20 | 2006-07-20 | Method for high quality measure of tiny rotation angle using digital interferometer |
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| Publication Number | Publication Date |
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| CN101109624A true CN101109624A (en) | 2008-01-23 |
| CN100451539C CN100451539C (en) | 2009-01-14 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB2006100170309A Expired - Fee Related CN100451539C (en) | 2006-07-20 | 2006-07-20 | Method for high quality measure of tiny rotation angle using digital interferometer |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111238422A (en) * | 2020-03-13 | 2020-06-05 | 上海大学 | Three-plane reference mirror flatness absolute measurement method based on small deflection |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1005648B (en) * | 1986-08-08 | 1989-11-01 | 中国科学技术大学 | Lengthening-shortening measurement and instrument of oblique ray interferometer |
| US5724130A (en) * | 1995-09-08 | 1998-03-03 | Wang; Charles | Technique for the measurement and calibration of angular position |
| DE10244552B3 (en) * | 2002-09-25 | 2004-02-12 | Robert Bosch Gmbh | Interferometric measuring device for determining the shape, roughness or distance of the surface of a measurement object comprises a measurement probe coupled to an interferometer via an optical fiber arrangement |
| CN2616888Y (en) * | 2003-04-11 | 2004-05-19 | 中国科学院上海光学精密机械研究所 | Nano radiar resolution ratio angular displacement measuring device |
| JP2006090950A (en) * | 2004-09-27 | 2006-04-06 | Fujinon Corp | Measuring system of inclination of surface to be tested |
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2006
- 2006-07-20 CN CNB2006100170309A patent/CN100451539C/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111238422A (en) * | 2020-03-13 | 2020-06-05 | 上海大学 | Three-plane reference mirror flatness absolute measurement method based on small deflection |
| CN111238422B (en) * | 2020-03-13 | 2022-06-14 | 上海大学 | Three-plane reference mirror flatness absolute measurement method based on small deflection |
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| CN100451539C (en) | 2009-01-14 |
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