CN101108464A - Near dry machining liquid supplying device in machine work field - Google Patents

Near dry machining liquid supplying device in machine work field Download PDF

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Publication number
CN101108464A
CN101108464A CNA2006100888352A CN200610088835A CN101108464A CN 101108464 A CN101108464 A CN 101108464A CN A2006100888352 A CNA2006100888352 A CN A2006100888352A CN 200610088835 A CN200610088835 A CN 200610088835A CN 101108464 A CN101108464 A CN 101108464A
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micro
piezoelectric ceramic
lubricant
spraying
jet
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CN100503156C (en
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袁松梅
严鲁涛
刘强
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Beihang University
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Beihang University
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Abstract

The invention relates to a fluid feeding device for near dry machining in the field of machining, wherein, a micro spraying device is arranged in a nozzle and is composed of an inner side micro spraying device and an outer size micro spraying device, and a lubricant inlet is arranged on the micro spraying device; the outer side micro spraying device is composed of an outer side vibrating base plate, an outer side piezoelectric ceramic plate lead wire, an outer side piezoelectric ceramic plate, an outer cavity, an air inlet, an air micro spraying hole and a spraying hole film; the outer side piezoelectric ceramic plate is adhered on the outer side vibrating base plate, the outer side ceramic plate lead wire is adhered on the upper side and the lower side of the outer side piezoelectric ceramic plate; the outer side vibrating base plate is adhered on the spraying hole film, the air inlet is arranged on the side wall of the spraying hole film, and the air micro spraying hole is arranged on the spraying hole film; the inner side micro spraying device is composed of an inner side vibrating base plate, an inner piezoelectric ceramic plate lead wire, an inner piezoelectric ceramic plate, an inner cavity, a lubricate inlet, a lubricate micro spraying hole and a spraying hole film; the inner side piezoelectric ceramic plate is adhered on the inner side vibrating base plate, the inner ceramic plate lead wire is adhered on the upper side and the lower side of the inner side piezoelectric ceramic plate, the inner vibrating base plate is adhered on the spraying hole film, and the lubricate micro spraying hole is arranged on the spraying hole film.

Description

Near-dry cutting liquid supply device applied to machining field
The technical field is as follows:
the invention discloses a near-dry cutting liquid supply device applied to the field of machining, relates to a liquid supply device in the field of machining, and belongs to a near-dry cutting liquid supply device which atomizes a lubricant through micron-sized micropores and sprays the lubricant to a cutting area at a high speed to realize spray cooling.
(II) background technology:
first, the conventional cutting fluid supply system has the following problems:
(1) the manufacturing cost is high; statistics show that the cost of using cutting fluids accounts for about 7-17% of the total manufacturing cost, while the cost of the fluid supply system (the cost of cleaning and maintenance of the system and the added equipment for protecting the environment from oil mist pollution) accounts for a significant proportion.
(2) The amount of cutting fluid is difficult to control; the traditional cutting fluid supply method uses cutting fluid with larger pressure and flow to cover a cutting area, and when the processing conditions are changed (such as the situations of replacing a workpiece, replacing a cutter and the like), the consumption of the cutting fluid is difficult to adjust.
(3) The resource consumption is large; the traditional supply system device has poor precision of a cooling pump and a liquid valve, is difficult to accurately control the supply of cutting liquid, has no nozzle meeting the requirements of certain precision, uniform lubrication and accurate oil injection, and cannot continuously supply accurate or drop-shaped lubricant to a complex and concentrated lubricating surface, thereby consuming a large amount of resources.
(4) The pollution to the environment is great; the traditional cutting fluid supply system adopts internal circulation in a machine tool, so that the quality of a product is influenced to a certain extent. And the purification degree of the purification device is lower in the machining process, the environmental pollution degree caused by waste liquid and cutting scraps is very high in the cutting machining process, and the corresponding treatment cost is also very high.
(5) The cleaning difficulty is high; the pipelines in the traditional supply system are made of various materials such as stainless steel, copper, rubber and the like, and the trench is formed by plastering cement and is not suitable for chemical cleaning. The cutting fluid flows through the pipe for a long time to form a black scale layer which has certain mechanical strength but is not hard, and the black scale layer causes great difficulty in cleaning.
Secondly, the composition of the cutting fluid and the influence of the cutting fluid on the environment are as follows:
the cutting fluid mainly comprises two types of water base and oil base, wherein the main components of the water base cutting fluid are water, chemically synthesized water or emulsion, wherein rust inhibitors and extreme pressure additives are added; the oil-based cutting fluid comprises various mineral oils, animal oils or complex oils composed thereof as the main component, and optionally various additives such as extreme pressure additives, oily additives, etc. The influence of the cutting fluid on the environment mainly comprises the following aspects:
(1) the influence on the ecological environment; the harm of the cutting fluid to the ecological environment is mainly the pollution of waste cutting fluid (waste oil and waste liquid) generated in the cutting process to water resources. In addition, the cutting fluid used in the cutting process is more or less retained in the chips, the cutting fluid carried by the chips accumulated in a large amount pollutes the soil, and the toxic and harmful components of the cutting fluid also pollute the environment when the chips are recycled.
(2) Impact on occupational health safety and health management; the harm of the cutting fluid to human bodies is firstly the toxicity of the additive; secondly, damage to the skin; and thirdly, the cutting fluid can damage respiratory organs.
(3) Insecurity; because the cutting fluid contains a plurality of additives, the cutting fluid can cause unsafe hidden troubles such as corrosion, rusting, fire and the like to equipment in the using process.
Disclosure of the invention
In order to solve various problems of the existing liquid supply device, the invention provides a quasi-dry cutting liquid supply device applied in the field of machining, which aims to: the mist cooling liquid sprayed by the device can be directly used in machining such as cutting and the like to realize spray cooling, the amount of the mist cooling liquid is easy to control, resources are saved, environmental pollution is reduced, and the device is safe to use and convenient to clean.
The invention relates to a quasi-dry cutting liquid supply device applied in the field of machining, which consists of a lubricant storage tank 51, a lubricant delivery pipe 52, a main shaft 53, a nozzle 54, a cutter 55, a workpiece 56, a storage tank base 58 and the nozzle 54; one end of the lubricant conveying pipe is connected with the lubricant storage tank 51, the other end of the lubricant conveying pipe is connected with the nozzle 54, when the lubricant conveying pipe works, after micro-spraying electricity is conducted, the lubricant in the storage tank 51 is sucked out, micron-sized atomized particles 57 are formed, and the atomized particles 57 are sprayed to a working area at a high speed;
the method is characterized in that: the micro-spraying device is arranged in the nozzle and consists of an inner micro-spraying and an outer micro-spraying, the inner micro-spraying is sleeved inside the outer micro-spraying, and the micro-spraying device is provided with a lubricant inlet;
the outer micro-jet consists of an outer vibration substrate, an outer piezoelectric ceramic piece lead, an outer piezoelectric ceramic piece, an outer cavity, a gas inlet, a gas micro-jet hole and a jet hole film;
the outer piezoelectric ceramic plate is bonded on the outer vibration substrate to form a piezoelectric transducer;
the outer piezoelectric ceramic leads are respectively bonded on the upper side and the lower side of the outer piezoelectric ceramic piece;
the outer side vibration substrate is bonded on the jet hole film to form an outer cavity;
the gas inlet is arranged on the side wall of the jet hole film; the gas micro-jet holes are annularly arranged and are processed on the jet hole film;
the inner micro-jet consists of an inner vibrating substrate, an inner piezoelectric ceramic piece lead, an inner piezoelectric ceramic piece, an inner cavity, a lubricant inlet, a lubricant micro-jet hole and a jet hole film;
the inner side piezoelectric ceramic plate is bonded on the inner side vibration substrate to form a piezoelectric transducer;
the inner side piezoelectric ceramic leads are respectively bonded on the upper side and the lower side of the inner side piezoelectric ceramic piece;
the inner side vibration substrate is bonded on the jet hole membrane to form an inner cavity;
the lubricant micro-jet holes are annularly arranged and are processed on the jet hole film.
The lubricant inlet 112 is formed by a through hole 112' formed in the orifice film 19 and communicating with an inlet provided in the inner vibration substrate 18.
Wherein the lubricant inlet is provided on the inner vibration substrate.
Wherein the lubricant inlet is provided on the orifice membrane.
The micro-spraying device can be manufactured by adopting a micro mechanical electronic system (MEMS) technology, can be manufactured by adopting ultra-precise machining and can be manufactured by adopting silicon micro-machining; special processing such as: electric spark machining, ultrasonic machining and laser machining. The micro-spraying device can be used for spray type cooling liquid supply in quasi-dry cutting, and optimizes the radiuses of the gas micro-spraying holes and the lubricant micro-spraying holes, so that the gas has higher speed when being sprayed, the chip removing effect is realized, the lubricant forms nano-scale particles, and the atomized lubricant realizes excellent lubricating effect.
Wherein, the vibration substrate is made of silicon material or metal material.
Wherein, the vibration substrate is made of elastic material.
The gas micro-jet orifice and the lubricant micro-jet orifice can be respectively in a circular shape or an elliptical shape. The gas micro-jet orifice and the lubricant micro-jet orifice can be respectively of a diffusion hole structure, a straight hole structure or a contraction hole structure.
The invention relates to a quasi-dry cutting liquid supply device applied in the field of machining, which has the following advantages:
(1) the device is provided with an inner cavity and an outer cavity, the inner cavity is surrounded by a vibration substrate and a spray hole membrane which are bonded with an inner side piezoelectric ceramic piece, and lubricant in the cavity is sprayed out through a nanometer lubricant micro spray hole under the driving force of the inner side piezoelectric ceramic piece, so that the lubricant is atomized and sprayed to a processing area at a high speed; the outer cavity is formed by a vibration substrate bonded with the outer piezoelectric ceramic piece, the inner vibration substrate and a spray hole film in a surrounding mode, gas in the cavity is under the action of a coupling force field formed by the double piezoelectric ceramic pieces, the speed is high when the gas is sprayed out, and the chip removal effect can be achieved.
(2) The device has two cavities, realizes atomizing emollient and the blowout that is used for the gaseous of chip removal respectively. According to specific processing requirements, the size of the sprayed atomized particles can be changed by changing the diameters of the gas micro-spraying holes and the lubricant micro-spraying holes, the outlet speed of the atomized lubricant and the gas can be changed by changing the number of micro-holes of the micro-spraying holes and the lubricant micro-spraying holes, and the driving force can be changed by changing the diameter or the thickness of the piezoelectric ceramic, so that the outlet speed of the lubricant and the gas can be controlled.
(3) The device simple manufacture, with low costs, it is few to consume the resource, can satisfy the demand of lubricant dosage in the spray cooling well, can be suitable for batch production.
(4) The device has low manufacturing cost, easy control of the consumption of the cutting fluid (lubricant), low resource consumption and reduced environmental pollution.
(IV) description of the drawings:
FIG. 1 is a front view of a near-dry cutting liquid supply apparatus according to the present invention.
Fig. 2 is a sectional view a-a of fig. 1.
FIG. 3 is a top view of the quasi-dry cutting liquid supply device of the present invention.
Fig. 4 orifice film view.
FIG. 5 is a bottom view of the quasi-dry cutting liquid supply apparatus of the present invention.
Figure 6 is a front view of the second embodiment.
Fig. 7 is a three-dimensional front view of the embodiment.
FIG. 8 is a front view of a four-nozzle array device according to an embodiment.
Fig. 9 is a sectional view a-a of fig. 8.
FIG. 10 is a schematic view of the state of use of the present invention.
The numbers in the figures illustrate the following:
1. 2, 3 micro-spraying device
11. 21, 31 outer vibration substrate 12, 22, 32 outer piezoelectric ceramic chip lead wire
13. 23, 33 outside piezoceramic wafer 14, 24, 34 inside piezoceramic wafer lead wire
15. 25, 35 inner piezoceramic wafers 16, 26, 36: outer cavity
17. 27, 37 inner side vibration substrate of cavity 18, 28, 38
19. 29, 39 spray hole film 41 cover
42 micro-spraying 43 cover holes
44 base spray orifice 45 base
46 lead 48 liquid supply tube
51 storage tank 52 lubricant delivery pipe
53 spindle 54 nozzle
55 tool 56 workpiece
57 atomizing particles
110. 210, 310 gas micro-orifice 111, 211, 311 lubricant micro-orifice
112. 212, 312 Lubricant inlets 113, 213, 313 gas inlets
114. 214: a wire leading port. 112' through hole
(V) detailed description of the preferred embodiments
The invention relates to a quasi-dry cutting liquid supply device applied in the machining field, please refer to fig. 10, the device is composed of a lubricant storage tank 51, a lubricant delivery pipe 52, a main shaft 53, a nozzle 54, a cutter 55, a workpiece 56, a storage tank base 58 and a nozzle 54; one end of the lubricant conveying pipe is connected with the lubricant storage tank 51, the other end of the lubricant conveying pipe is connected with the nozzle 54, when the lubricant conveying pipe works, after micro-spraying electricity is conducted, the lubricant in the storage tank 51 is sucked out, micron-sized atomized particles 57 are formed, and the atomized particles 57 are sprayed to a working area at a high speed; wherein the micro-jet device 1 is placed in the nozzle 54.
The first embodiment is as follows: please refer to fig. 1 to 5, first, refer to fig. 1;
the micro-spraying device 1 consists of an inner micro-spraying and an outer micro-spraying, wherein the inner micro-spraying is sleeved inside the outer micro-spraying;
the micro-spraying device 1 comprises an outer side vibration substrate 11, an outer side piezoelectric ceramic piece lead wire 12, an outer side piezoelectric ceramic piece 13, an inner side piezoelectric ceramic piece lead wire 14, an inner side piezoelectric ceramic piece 15, an outer cavity 16, an inner cavity 17, an inner side vibration substrate 18 and a spraying hole film 19, wherein a gas micro-spraying hole 110 is arranged on the spraying hole film 19, a lubricant micro-spraying hole 111, a lubricant inlet 112, a gas inlet 113 and a lead port 114 are arranged on the spraying hole film 19;
the outer micro-jet consists of an outer vibration substrate 11, an outer piezoelectric ceramic piece lead wire 12, an outer piezoelectric ceramic piece 13, an outer cavity 16, a gas inlet 113, a gas micro-jet hole 110 and a jet hole film 19; wherein, the outer piezoelectric ceramic piece 13 is bonded on the outer vibration substrate 11 to form a piezoelectric transducer; the outer piezoelectric ceramic leads 12 are respectively bonded to the upper and lower sides of the outer piezoelectric ceramic sheet 13; the outer vibration substrate 11 is bonded on the jet orifice film 19 to form an outer cavity; the gas inlet 113 is provided on the side wall of the orifice film 19; the gas micro-orifices 110 are arranged in a ring shape and are formed on the orifice film 19.
The inner micro-jet consists of an inner vibrating substrate 18, an inner piezoelectric ceramic piece 15, an inner piezoelectric ceramic piece lead 14, an inner cavity 17, a lubricant inlet 112, a lubricant micro-jet hole 111 and a jet hole film 19; wherein, the inner piezoelectric ceramic plate 15 is bonded on the inner vibration substrate 18 to form a piezoelectric transducer; the inner side piezoelectric ceramic piece leads 14 are respectively bonded on the upper side and the lower side of the inner side piezoelectric ceramic piece 15; the inner vibrating substrate 18 is adhered on the jet orifice film 19 to form an inner cavity 17; the lubricant inlet 112 is formed by communicating a through hole 112' provided on the orifice film 19 with an inlet provided on the inner vibration substrate 18; the lubricant micro-orifice 111 is arranged in a ring shape and is machined on the orifice film 19.
When the device works, the vibration directions of the two inner and outer piezoelectric ceramic plates 15 and 13 are opposite, so that a coupling action field is generated in the outer cavity 16, and gas is sprayed out from the gas micro-spray holes 110 at a high speed to achieve the chip removal effect; or only the outer piezoelectric transducer formed by bonding the outer piezoelectric ceramic plate 13 to the outer vibration substrate 11 is energized, and the inner piezoelectric transducer formed by bonding the inner piezoelectric ceramic plate 15 to the inner vibration substrate 18 is not energized, so that a single air jet can be formed;
if only the inner side piezoelectric transducer is electrified and the outer side piezoelectric transducer is not electrified, the single liquid spray can be formed; a proper working mode can be selected according to the actual working requirement;
the lubricant in the inner cavity 17 is sprayed out from the spray holes 111 under the action of the inner piezoelectric ceramic sheet 15 to form atomized particles 57, so as to achieve the purpose of atomization;
the lubricant enters the inner cavity 17 from a lubricant inlet 112 and is sprayed out from a lubricant spraying hole 111 under the action of the inner piezoelectric ceramic plate 15, so that the lubricant supply is realized;
gas enters the outer cavity 16 from the gas inlet 113 and is sprayed out from the gas micro-spray holes 110 under the combined action of the inner piezoelectric ceramics 13 and the outer piezoelectric ceramics 15, so that gas supply is realized.
Example two:
please refer to fig. 6; the difference from the first embodiment is that the lubricant inlet 212 is opened on the inner vibrating substrate 28, the micro-spraying device 2 comprises an outer vibrating substrate 21, an outer piezoelectric ceramic sheet lead 22, an outer piezoelectric ceramic sheet 23, an inner piezoelectric ceramic sheet lead 24, an inner piezoelectric ceramic sheet 25, an outer cavity 26, an inner cavity 27, an inner vibrating substrate 28, a spraying hole film 29, a gas micro-spraying hole 210 arranged on the spraying hole film 29, a lubricant micro-spraying hole 211 arranged on the spraying hole film 29, a lubricant inlet 212, a gas inlet 213 and a lead port 214.
The second embodiment is also composed of an inner micro-jet and an outer micro-jet, wherein the inner micro-jet is sleeved inside the outer micro-jet;
the outer micro-jet consists of an outer vibration substrate 21, an outer piezoelectric ceramic piece lead 22, an outer piezoelectric ceramic piece 23, an outer cavity 26, a gas inlet 213, a gas micro-jet hole 210 and a jet hole film 29; wherein, the outside piezoelectric ceramic piece 23 is bonded on the outside vibration substrate 21 to form a piezoelectric transducer; the outer piezoelectric ceramic leads 22 are respectively bonded on the upper and lower sides of the outer piezoelectric ceramic sheet 23; the outer vibration substrate 21 is bonded on the jet orifice film 29 to form an outer cavity 26; the gas inlet 213 is formed in the orifice film 29; the gas micro-injection holes 210 are arranged in a ring shape and are formed on the injection hole film 29.
The inner micro-jet consists of an inner vibrating substrate 28, an inner piezoelectric ceramic piece 25, an inner piezoelectric ceramic piece lead 24, an inner cavity 27, a lubricant inlet 212, a lubricant micro-jet hole 211 and a jet hole film 29; wherein,
the inner piezoelectric ceramic plate 25 is bonded to the inner vibration substrate 28 to form a piezoelectric transducer; the inner side piezoelectric ceramic lead wires 24 are respectively bonded to the upper and lower sides of the inner side piezoelectric ceramic sheet 25; the inner vibrating substrate 28 is bonded to the orifice film 29 to form an inner cavity 27; the lubricant inlet 212 is machined in the inner vibrating substrate 28; the lubricant micro-orifice 211 is annularly arranged and machined on the orifice film 29.
When the device works, the vibration directions of the two inner and outer piezoelectric ceramic plates 25 and 23 are opposite, so that a coupling action field is generated in the outer cavity 26, and gas is ejected from the gas micro-jet holes 210 at a high speed to achieve the chip removal effect;
of course, the outer piezoelectric ceramic sheet 23 may be electrified to form air jet; the inner piezoelectric ceramic plate 25 is energized alone to form a liquid jet. The lubricant enters the inner cavity 27 from the lubricant inlet 212 and is sprayed out from the lubricant micro-spray holes 211 under the action of the inner piezoelectric ceramic plate 25, so that the lubricant supply is realized.
The gas enters the outer cavity 26 from the gas inlet 213 and is sprayed out from the gas micro-spraying holes 210 under the combined action of the inner and outer piezoceramics plates 25 and 23, so that the gas supply is realized.
Example three:
please refer to fig. 7; it differs from the first embodiment in that the lubricant inlet 312 on the inner cavity 37 is opened on the orifice membrane 39, thus avoiding a nested structure and being relatively simple to assemble.
The micro-spraying device 3 comprises an outer vibrating substrate 31, an outer piezoelectric ceramic piece lead 32, an outer piezoelectric ceramic piece 33, an inner piezoelectric ceramic piece lead 34, an inner piezoelectric ceramic piece 35, an outer cavity 36, an inner cavity 37, an inner vibrating substrate 38 and a spraying hole film 39, wherein a gas micro-spraying hole 310 is formed in the spraying hole film 39, and a lubricant micro-spraying hole 311, a lubricant inlet 312 and a gas inlet 313 are formed in the spraying hole film 39.
The micro-spraying device 3 is also composed of an inner micro-spraying device and an outer micro-spraying device, and the inner micro-spraying device is sleeved inside the outer micro-spraying device;
the outer micro-jet consists of an outer vibration substrate 31, an outer piezoelectric ceramic piece lead 32, an outer piezoelectric ceramic piece 33, an outer cavity 36, a gas inlet 313, a gas micro-jet hole 310 and a jet hole film 39; wherein, the outer piezoelectric ceramic plate 33 is bonded on the outer vibration substrate 31 to form a piezoelectric transducer; the outer piezoelectric ceramic leads 32 are respectively bonded to the upper and lower sides of the outer piezoelectric ceramic sheet 33; the outer vibration substrate 31 is bonded on the orifice film 39 to form an outer cavity 36; the gas inlet 313 is provided on the orifice film 39; the gas micro-orifices 310 are arranged in a ring shape and are machined on the orifice film 39.
The inner micro-jet consists of an inner vibration substrate 38, an inner piezoelectric ceramic piece 35, an inner piezoelectric ceramic piece lead 34, an inner cavity 37, a lubricant inlet 312, a lubricant micro-jet hole 311 and a jet hole film 39; wherein, the inner piezoelectric ceramic plate 35 is bonded on the inner vibrating substrate 38 to form a piezoelectric transducer; the inner side piezoelectric ceramic leads 34 are respectively bonded to the upper and lower sides of the inner side piezoelectric ceramic sheet 35; the inner vibrating substrate 38 is bonded to the orifice film 39 to form an inner cavity 37; the lubricant inlet 312 is provided on the orifice film 39; the lubricant micro-jet holes 311 are arranged in a ring shape and are machined on the jet hole film 39, and two lead ports (not shown) are formed on the jet hole film 39 for leading out the inner piezoelectric ceramic sheet lead wires 34.
When the device works, the vibration directions of the two inner and outer piezoelectric ceramic plates 35 and 33 are opposite, so that a coupling action field is generated in the outer cavity 36, and gas is ejected from the gas micro-jet holes 310 at a high speed to achieve the chip removal effect; or only the outer piezoelectric ceramic piece 33 can be electrified to form air injection; the inner piezoelectric ceramic sheet 35 is energized alone to form a liquid jet. The lubricant enters the inner cavity 37 from the lubricant inlet 312 and is sprayed out from the lubricant micro-spray holes 311 under the action of the inner piezoelectric ceramic plate 35, so that the lubricant supply is realized. Gas enters the outer cavity 36 from the gas inlet 313 and is sprayed out from the gas micro-spray holes 310 under the combined action of the inner piezoelectric ceramics 33 and the outer piezoelectric ceramics 35, so that gas supply is realized.
Example four:
in order to solve the problem of large lubricant demand in atomization cooling, the present embodiment provides a micro-spray array device, please refer to fig. 8 and 9; a plurality of micro-spray devices 1 are arranged in a circular array (as shown in fig. 9) and are simultaneously placed in a substrate 45, the substrate 45 is provided with a plurality of spray holes 44, the micro-spray devices 1 are connected by a lead 46, a groove 47 for placing a liquid supply pipe is formed in the substrate 45, the liquid supply pipe 48 is connected with the micro-spray devices 1, the substrate 45 is covered with a cover 41, and the cover 41 is provided with a cover hole 43.
The micro-spray array device can be driven by piezoelectric ceramics or other modes, so that the lubricant is sucked from the lubricant storage box, micron-sized micro-atomized particles are sprayed out through the spray holes, the atomized particles are sprayed to a working area, spray cooling is realized, and the sprayed lubricant is large in amount.
The micro-spray array device can also be arranged in a rectangular shape.

Claims (7)

1. A quasi-dry cutting liquid supply device applied in the machining field comprises a lubricant storage box, a lubricant conveying pipe, a main shaft, a nozzle, a cutter, a workpiece, a storage box base and a nozzle; the method is characterized in that: the micro-spraying device arranged in the nozzle consists of an inner micro-spraying and an outer micro-spraying, the inner micro-spraying is sleeved inside the outer micro-spraying, and the micro-spraying device is provided with a lubricant inlet;
the outer micro-jet consists of an outer vibration substrate, an outer piezoelectric ceramic piece lead, an outer piezoelectric ceramic piece, an outer cavity, a gas inlet, a gas micro-jet hole and a jet hole film;
the outer piezoelectric ceramic plate is bonded on the outer vibration substrate to form a piezoelectric transducer;
the outer piezoelectric ceramic leads are respectively bonded on the upper side and the lower side of the outer piezoelectric ceramic sheet;
the outer side vibration substrate is bonded on the jet hole film to form an outer cavity;
the gas inlet is arranged on the side wall of the jet hole film;
the gas micro-jet holes are annularly arranged and are processed on the jet hole film;
the inner micro-jet consists of an inner vibrating substrate, an inner piezoelectric ceramic piece lead, an inner piezoelectric ceramic piece, an inner cavity, a lubricant inlet, a lubricant micro-jet hole and a jet hole film;
the inner side piezoelectric ceramic plate is bonded on the inner side vibration substrate to form a piezoelectric transducer;
the inner side piezoelectric ceramic leads are respectively bonded on the upper side and the lower side of the inner side piezoelectric ceramic piece;
the inner side vibration substrate is bonded on the jet hole membrane to form an inner cavity;
the lubricant micro-jet holes are annularly arranged and are processed on the jet hole film.
2. The quasi-dry cutting liquid supply device applied to the machining field according to claim 1, wherein: the lubricant inlet is formed by communicating a through hole provided in the orifice film with an inlet provided in the inner vibration substrate.
3. The quasi-dry cutting liquid supply device applied to the machining field according to claim 1, wherein: the lubricant inlet is provided on the inner vibrating substrate.
4. The quasi-dry cutting liquid supply device applied to the machining field according to claim 1, wherein: the lubricant inlet is provided on the orifice membrane.
5. The quasi-dry cutting liquid supply device applied to the machining field according to claim 1, wherein: the vibrating substrate is made of silicon material.
6. The quasi-dry cutting liquid supply device applied to the machining field according to claim 1, wherein: the vibrating substrate is made of a metal material.
7. The quasi-dry cutting liquid supply device applied to the machining field according to claim 1, wherein: the vibrating substrate is made of an elastic material.
CNB2006100888352A 2006-07-19 2006-07-19 Near dry machining liquid supplying device in machine work field Expired - Fee Related CN100503156C (en)

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CN100503156C CN100503156C (en) 2009-06-24

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101352813B (en) * 2008-08-26 2010-06-02 北京航空航天大学 Lubricating system with trace amount
CN106402620A (en) * 2016-11-25 2017-02-15 哈尔滨工业大学 Patting-type piezoelectric driving micro-jet lubrication device
CN106826391A (en) * 2017-03-14 2017-06-13 江苏科技大学 A kind of nano-fluid oil film water droplet electrostatic controllable jet cutting process and device
CN109202195A (en) * 2018-10-12 2019-01-15 苏州宝时格数控设备制造有限公司 Electric spark wire cutting machine cutting fluid liquid feeding device
CN109365204A (en) * 2018-12-21 2019-02-22 泉州市小新智能科技有限公司 A kind of micropore spraying device
CN113478393A (en) * 2021-07-26 2021-10-08 云南北方光学科技有限公司 Nano-fluid micro-lubricating and atomized cooling ultra-precise cutting medium supply system
CN114738648A (en) * 2022-03-02 2022-07-12 上海工程技术大学 Trace lubricating system

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Publication number Priority date Publication date Assignee Title
GB1544141A (en) * 1977-03-09 1979-04-11 Plessey Co Ltd Liquid metering system

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101352813B (en) * 2008-08-26 2010-06-02 北京航空航天大学 Lubricating system with trace amount
CN106402620A (en) * 2016-11-25 2017-02-15 哈尔滨工业大学 Patting-type piezoelectric driving micro-jet lubrication device
CN106826391A (en) * 2017-03-14 2017-06-13 江苏科技大学 A kind of nano-fluid oil film water droplet electrostatic controllable jet cutting process and device
CN106826391B (en) * 2017-03-14 2019-06-21 江苏科技大学 A kind of nano-fluid oil film water droplet electrostatic controllable jet cutting process and device
CN109202195A (en) * 2018-10-12 2019-01-15 苏州宝时格数控设备制造有限公司 Electric spark wire cutting machine cutting fluid liquid feeding device
CN109365204A (en) * 2018-12-21 2019-02-22 泉州市小新智能科技有限公司 A kind of micropore spraying device
CN113478393A (en) * 2021-07-26 2021-10-08 云南北方光学科技有限公司 Nano-fluid micro-lubricating and atomized cooling ultra-precise cutting medium supply system
CN113478393B (en) * 2021-07-26 2022-07-15 云南北方光学科技有限公司 Nano-fluid micro-lubricating and atomizing cooling ultra-precise cutting medium supply system
CN114738648A (en) * 2022-03-02 2022-07-12 上海工程技术大学 Trace lubricating system

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