CN101108464A - Near dry machining liquid supplying device in machine work field - Google Patents

Near dry machining liquid supplying device in machine work field Download PDF

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Publication number
CN101108464A
CN101108464A CNA2006100888352A CN200610088835A CN101108464A CN 101108464 A CN101108464 A CN 101108464A CN A2006100888352 A CNA2006100888352 A CN A2006100888352A CN 200610088835 A CN200610088835 A CN 200610088835A CN 101108464 A CN101108464 A CN 101108464A
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inboard
piezoelectric ceramic
micro
spray
lubricant
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CNA2006100888352A
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CN100503156C (en
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袁松梅
严鲁涛
刘强
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Beihang University
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Beihang University
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Abstract

The invention relates to a fluid feeding device for near dry machining in the field of machining, wherein, a micro spraying device is arranged in a nozzle and is composed of an inner side micro spraying device and an outer size micro spraying device, and a lubricant inlet is arranged on the micro spraying device; the outer side micro spraying device is composed of an outer side vibrating base plate, an outer side piezoelectric ceramic plate lead wire, an outer side piezoelectric ceramic plate, an outer cavity, an air inlet, an air micro spraying hole and a spraying hole film; the outer side piezoelectric ceramic plate is adhered on the outer side vibrating base plate, the outer side ceramic plate lead wire is adhered on the upper side and the lower side of the outer side piezoelectric ceramic plate; the outer side vibrating base plate is adhered on the spraying hole film, the air inlet is arranged on the side wall of the spraying hole film, and the air micro spraying hole is arranged on the spraying hole film; the inner side micro spraying device is composed of an inner side vibrating base plate, an inner piezoelectric ceramic plate lead wire, an inner piezoelectric ceramic plate, an inner cavity, a lubricate inlet, a lubricate micro spraying hole and a spraying hole film; the inner side piezoelectric ceramic plate is adhered on the inner side vibrating base plate, the inner ceramic plate lead wire is adhered on the upper side and the lower side of the inner side piezoelectric ceramic plate, the inner vibrating base plate is adhered on the spraying hole film, and the lubricate micro spraying hole is arranged on the spraying hole film.

Description

The near dry cutting liquid supply apparatus that a kind of field of machining is used
(1) technical field:
The near dry cutting liquid supply apparatus that a kind of field of machining of the present invention is used, the liquid feed device that relates to field of machining, belong to and lubricant also is injected into cutting region at a relatively high speed by the micron order micropore atomization, the near dry cutting liquid supply apparatus of realization atomizing cooling.
(2) background technology:
One, the problem of traditional cutting fluid feed system existence is as follows:
(1) manufacturing cost is higher; Statistics shows, use the expense of cutting fluid to account for 7%~17% of total manufacturing cost, and the cost of liquid-supplying system (cleaning of system, maintenance reach the expense that prevents equipment that contaminated with oil mist increases for the protection environment) has accounted for very big ratio.
(2) cutting fluid consumption control difficulty; Traditional cutting fluid feed liquid method uses the cutting fluid of big pressure and flow to cover cutting region, when changing (as changing situations such as workpiece, replacing cutter) at processing conditions, is difficult to adjust the cutting fluid consumption.
(3) resource consumption is big; The coolant pump and the liquid valve accuracy that adopt in traditional feed system device are relatively poor, be difficult to control accurately the supply of cutting fluid, and nozzle does not reach certain precision and lubricated even, the accurate requirement of oiling, especially can not supply with accurate shape continuously or drip the shape lubricant lubricated surface complicated and that concentrate, thereby consume a large amount of resources.
(4) big for environment pollution; What traditional cutting fluid feed system adopted in lathe is interior circulation, makes the quality of product be subjected to certain influence.And the degree of purification of its purifier in process is lower, and in cutting process, the environmental pollution degree that waste liquid and smear metal cause is very big, and corresponding control expense is also very high.
(5) the cleaning difficulty is big; Pipeline in the tradition feed system is various material such as stainless steel, copper, rubber, and trench is smeared by cement, is unsuitable for Chemical cleaning.The time has been grown and can form black dirt layer in the pipe that cutting fluid is flowed through, and the dirt layer has certain mechanical strength, but very not hard, these all cause great difficulty to cleaning.
Two, the formation of cutting fluid and as follows to the influence of environment:
Cutting fluid mainly contains two kinds of water base and oil bases, the main component of water-base cutting fluid is water, chemical synthesis water or emulsion, wherein all adds antirust agent, also has to add EP agent again; The main component of oil base cutting fluid is various mineral oil, animal oil or the compound oil be made up of them, and can optionally insert various additives, as EP agent, oiliness additive etc.Cutting fluid mainly comprises the following aspects to the influence of environment:
(1) to the influence of ecological environment; Cutting fluid mainly is the pollution to water resource of the used cutting liquid (waste oil, waste liquid) that produces in the machining to the harm of ecological environment.In addition, the cutting fluid of using in the machining more or less can remain in the smear metal, the smear metal liquid meeting contaminated soil that the smear metal of bulk deposition has, and the cutting fluid poisonous and harmful element also pollutes the environment during the smear metal regeneration.
(2) to the influence of occupational health safety and administration of health; Cutting fluid at first is the toxicity of its additive to the harm of human body; Next is the harm to skin; The 3rd, cutting fluid is to the harm of respiratory apparatus.
(3) insecurity; Owing to contain many additives in the cutting fluid, in its use, can produce that burn into gets rusty and hidden danger such as fire to equipment.
(3) summary of the invention
In order to solve the variety of issue of existing liquid feed device, the present invention proposes the near dry cutting liquid supply apparatus that a kind of field of machining is used, its objective is: the vaporific cooling fluid of this device ejection can be directly used in the machining such as cutting, the cooling of realization atomizing, this vaporific cooling fluid is controlled consumption easily, economize on resources, reduce environmental pollution, safe in utilization and be convenient to cleaning.
The near dry cutting liquid supply apparatus that a kind of field of machining of the present invention is used, this installs by lubricant storage box 51, lubricant delivery pipe 52, main shaft 53, nozzle 54, cutter 55, workpiece 56, storage box base 58 and nozzle 54 are formed; This lubricant delivery pipe one termination lubricant storage box 51, another termination nozzle 54 during work, after the little spray energising, with the lubricant sucking-off of 51 li of storage boxes, and forms micron order atomized particles 57, with atomized particles 57 high velocity jet to the workspace;
It is characterized in that: this micro-spray device is arranged in the nozzle, and this micro-spray device is made of the little spray of the little spray in inboard and the outside, and it is inner that inboard little spray is set in the little spray in the outside, has lubricant entry on this micro-spray device;
The little spray in this outside is made of outboard vibrations substrate, outside piezoelectric ceramic piece lead-in wire, outside piezoelectric ceramic piece, outer chamber, gas access, gas micro-spraying hole and spray orifice film;
This outside piezoelectric ceramic piece is bonded on the outboard vibrations substrate and forms PZT (piezoelectric transducer);
This outside piezoelectric ceramics lead-in wire is bonded in outside piezoelectric ceramic piece both sides up and down respectively;
This outboard vibrations substrate is bonded on the spray orifice film and forms outer chamber;
This gas access is arranged on the spray orifice film sidewall; This gas micro-spraying hole is arranged ringwise and is processed on the spray orifice film;
The little spray in this inboard is vibrated substrate, inboard piezoelectric ceramic piece lead-in wire, inboard piezoelectric ceramic piece, inner chamber body, lubricant entry, lubricant micro-spraying hole, spray orifice film by the inboard and is constituted;
This inboard piezoelectric ceramic piece is bonded on the inboard vibration substrate and forms PZT (piezoelectric transducer);
This inboard piezoelectric ceramics lead-in wire is bonded in inboard piezoelectric ceramic piece both sides up and down respectively;
This inboard vibration substrate is bonded on the spray orifice film and forms inner chamber body;
This lubricant micro-spraying hole is arranged ringwise and is processed on the spray orifice film.
Wherein, this lubricant population 112 be by the through hole 112 ' of processing on the spray orifice film 19 be arranged on the inboard inlet that vibrates on the substrate 18 and communicate and form.
Wherein, this lubricant entry is arranged on the inboard vibration substrate.
Wherein, this lubricant entry is arranged on the spray orifice film.
This micro-spray device can adopt micromachine electronic system (MEMS) fabrication techniques, can adopt ultraprecise machining to form, and can adopt the silicon produced by micro processing; Also can adopt the special process to make as: spark machined, ultrasonic wave processing, Laser Processing.This micro-spray device can be used for the atomizing cooling feed flow in the near dry cutting, and optimized gas micro-spraying hole and lubrication prescription micro-spraying hole radius, and have fair speed when making the gas ejection, realize the debris removal effect, lubricant forms nano_scale particle, and the atomized lubrication agent realizes the excellent lubrication effect.
Wherein, this vibration substrate is made by silicon materials or metal material.
Wherein, this vibration substrate is made by elastomeric material.
This gas micro-spraying hole and lubrication prescription micro-spraying hole can be respectively round-shaped or elliptical shape.This gas micro-spraying hole and lubrication prescription micro-spraying hole can be respectively diffusion hole structure, straight hole structure or shrinkage hole structure.
The near dry cutting liquid supply apparatus that a kind of field of machining of the present invention is used, its advantage is as follows:
(1) this device has inside and outside two cavitys, this inner chamber body is surrounded by vibration substrate and the spray orifice film with inboard piezoelectric ceramic piece bonding, lubricant in the chamber is under the driving force of inboard piezoelectric ceramic piece, through the ejection of nanoscale lubricant micro-spraying hole, realize the atomizing of lubricant and be injected into machining area with higher speed; Outboard chambers is by surrounding with the vibration substrate of outside piezoelectric ceramic piece bonding and inboard vibration substrate and spray orifice film, and intracavity gas is subjected to the effect in the coupling field of force that the double piezoelectric ceramic sheet forms, and speed is higher during the gas ejection, can realize the effect of chip removal.
(2) two cavitys having of this device are realized the atomized lubrication agent respectively and are used for the ejection of the gas of chip removal.According to concrete processing needs, can change the size of the atomized particles of ejection by the size that changes gas micro-spraying hole and lubricant micro-spraying hole diameter, can be by changing the size how many micro-spraying hole and lubricant micro-spraying hole number cells purposes change the muzzle velocity of atomized lubrication agent and gas, can be by diameter that changes piezoelectric ceramics or the size that thickness changes driving force, and then the size of control lubricant and gas muzzle velocity.
(3) this device is made simply, and cost is low, and consumption of natural resource is few, can satisfy the demand of amounts of lubrication in the atomizing cooling well, can be suitable for producing in batches.
(4) this device low cost of manufacture, size, the resource consumption of controlling cutting fluid (lubricant) consumption have easily reduced environmental pollution less simultaneously.
(4) description of drawings:
The front view of Fig. 1 near dry cutting liquid supply apparatus of the present invention.
Fig. 2 is the A-A cutaway view of Fig. 1.
The vertical view of Fig. 3 near dry cutting liquid supply apparatus of the present invention.
Fig. 4 spray orifice film view.
The bottom view of Fig. 5 near dry cutting liquid supply apparatus of the present invention.
Fig. 6 embodiment two front views.
Fig. 7 embodiment three front views.
Fig. 8 embodiment four little spray array apparatus front views.
Fig. 9 is the A-A cutaway view of Fig. 8.
Figure 10 user mode schematic diagram of the present invention.
Number in the figure is described as follows:
1,2,3 micro-spray devices
11,21,31 outboard vibrations substrates, 12,22,32 outside piezoelectric ceramic piece lead-in wires
13,23,33 outside piezoelectric ceramic pieces, 14,24,34 inboard piezoelectric ceramic piece lead-in wires
15,25,35 inboard piezoelectric ceramic pieces 16,26,36: outer chamber
17,27,37 inner chamber body, 18,28,38 inboard vibration substrates
19,29,39 spray orifice films, 41 lids
42 little sprays, 43 lid holes
44 matrix spray orifices, 45 matrixes
46 lead-in wires, 48 feed pipes
51 storage boxes, 52 lubricant delivery pipes
53 main shafts, 54 nozzles
55 cutters, 56 workpiece
57 atomized particles
110,210,310 gas micro-spraying holes, 111,211,311 lubricant micro-spraying holes
112,212,312 lubricant entries, 113,213,313 gas accesses
114,214: lead wire outlet.112 ' through hole
(5) specific embodiment
The near dry cutting liquid supply apparatus that a kind of field of machining of the present invention is used sees also shown in Figure 10ly, and this install by lubricant storage box 51, lubricant delivery pipe 52, main shaft 53, nozzle 54, cutter 55, workpiece 56, storage box base 58 and nozzle 54 compositions; This lubricant delivery pipe one termination lubricant storage box 51, another termination nozzle 54 during work, after little spray energising, with the lubricant sucking-off of 51 li of storage boxes, and forms micron order atomized particles 57, and these atomized particles 57 high velocity jet are to the workspace; Wherein, this micro-spray device 1 is seated in the nozzle 54.
Embodiment one: see also Fig. 1 to shown in Figure 5, at first see also shown in Figure 1;
This micro-spray device 1 is made of the little spray of the little spray in inboard and the outside, and it is inner that inboard little spray is set in the little spray in the outside;
This micro-spray device 1 includes outboard vibrations substrate 11, outside piezoelectric ceramic piece lead-in wire 12, outside piezoelectric ceramic piece 13, inboard piezoelectric ceramic piece lead-in wire 14, inboard piezoelectric ceramic piece 15, outer chamber 16, inner chamber body 17, inboard vibration substrate 18, spray orifice film 19, spray orifice film 19 is provided with gas micro-spraying hole 110, spray orifice film 19 is provided with lubricant micro-spraying hole 111, lubricant entry 112, gas access 113, lead wire outlet 114;
The little spray in this outside is made of outboard vibrations substrate 11, outside piezoelectric ceramic piece lead-in wire 12, outside piezoelectric ceramic piece 13, outer chamber 16, gas access 113, gas micro-spraying hole 110, spray orifice film 19; Wherein, this outside piezoelectric ceramic piece 13 is bonded on the outboard vibrations substrate 11 and forms PZT (piezoelectric transducer); This outside piezoelectric ceramics lead-in wire 12 is bonded in piezoelectric ceramic piece 13 upper and lower both sides, the outside respectively; This outboard vibrations substrate 11 is bonded on the spray orifice film 19 and forms outer chamber; This gas access 113 is arranged on spray orifice film 19 sidewalls; This gas micro-spraying hole 110 is arranged ringwise and is processed on spray orifice film 19.
The little spray in this inboard is made of inboard vibration substrate 18, inboard piezoelectric ceramic piece 15, inboard piezoelectric ceramic piece lead-in wire 14, inner chamber body 17, lubricant entry 112, lubricant micro-spraying hole 111, spray orifice film 19; Wherein, this inboard piezoelectric ceramic piece 15 is bonded on the inboard vibration substrate 18 and forms PZT (piezoelectric transducer); This inboard piezoelectric ceramic piece lead-in wire 14 is bonded in inboard piezoelectric ceramic piece 15 upper and lower both sides respectively; This inboard vibration substrate 18 is bonded in and forms inner chamber body 17 on the spray orifice film 19; This lubricant entry 112 is to communicate with inlet on being arranged on inboard vibration substrate 18 and form by being arranged on through hole 112 ' on the spray orifice film 19; This lubricant micro-spraying hole 111 is arranged ringwise and is processed on spray orifice film 19.
During work, two inside and outside piezoelectric ceramic piece 15,13 direction of vibration are opposite, make to produce the coupling fields in the outer chamber 16, and gas from 110 ejections of gas micro-spraying hole, reaches the chip removal effect at a relatively high speed; Perhaps only power up be bonded in the outside PZT (piezoelectric transducer) that forms on the outboard vibrations substrate 11 by outside piezoelectric ceramic piece 13, and formed inboard PZT (piezoelectric transducer) does not power up on the inboard vibration substrate 18 to being bonded in by inboard piezoelectric ceramic piece 15, can form independent gas blowout;
If only internally the side pressure electric transducer powers up, outside PZT (piezoelectric transducer) does not power up, and can form independent liquid spray; Can require to select suitable working method according to real work;
Lubricant in this inner chamber body 17 forms atomized particles 57 by spray orifice 111 ejection backs, thereby reaches the purpose of atomizing under the active force of inboard piezoelectric ceramic piece 15;
This lubricant enters inner chamber body 17 by lubricant entry 112, by noticing 111 ejections of lubrication prescription spray orifice, realizes the lubricant supply under the effect of inboard piezoelectric ceramic piece 15;
Gas enters outer chamber 16 by gas access 113, by 110 ejections of gas micro-spraying hole, realizes the gas supply under the acting in conjunction of inside and outside piezoelectric ceramics 13 and 15.
Embodiment two:
See also shown in Figure 6; The difference of it and embodiment one is, lubricant entry 212 is opened on the inboard vibration substrate 28, this micro-spray device 2 includes outboard vibrations substrate 21, outside piezoelectric ceramic piece lead-in wire 22, outside piezoelectric ceramic piece 23, inboard piezoelectric ceramic piece lead-in wire 24, inboard piezoelectric ceramic piece 25, outer chamber 26, inner chamber body 27, inboard vibration substrate 28, spray orifice film 29, spray orifice film 29 is provided with gas micro-spraying hole 210, spray orifice film 29 is provided with lubricant micro-spraying hole 211, lubricant entry 212, gas population 213, lead wire outlet 214.
Present embodiment two is by also being to be made of inside and outside little spray, and it is inner that inboard little spray is set in the little spray in the outside;
The little spray in this outside is made of outboard vibrations substrate 21, outside piezoelectric ceramic piece lead-in wire 22, outside piezoelectric ceramic piece 23, outer chamber 26, gas access 213, gas micro-spraying hole 210, spray orifice film 29; Wherein, this outside piezoelectric ceramic piece 23 is bonded on the outboard vibrations substrate 21 and forms PZT (piezoelectric transducer); This outside piezoelectric ceramics lead-in wire 22 is bonded in piezoelectric ceramic piece 23 upper and lower both sides, the outside respectively; This outboard vibrations substrate 21 is bonded in and forms outer chamber 26 on the spray orifice film 29; These gas access 213 processing are on spray orifice film 29; This gas micro-spraying hole 210 is arranged ringwise and is processed on spray orifice film 29.
The little spray in this inboard is made of inboard vibration substrate 28, inboard piezoelectric ceramic piece 25, inboard piezoelectric ceramic piece lead-in wire 24, inner chamber body 27, lubricant entry 212, lubricant micro-spraying hole 211, spray orifice film 29; Wherein,
This inboard piezoelectric ceramic piece 25 is bonded in 28 formation PZT (piezoelectric transducer)s on the inboard vibration substrate; This inboard piezoelectric ceramics lead-in wire 24 is bonded in inboard piezoelectric ceramic piece 25 upper and lower both sides respectively; This inboard vibration substrate 28 is bonded in and forms inner chamber body 27 on the spray orifice film 29; These lubricant entry 212 processing are on inboard vibration substrate 28; This lubricant micro-spraying hole 211 is arranged ringwise and is processed on spray orifice film 29.
During work, two medial and lateral piezoelectric ceramic pieces, 25,23 direction of vibration are opposite, make to produce the coupling fields in the exocoel 26, and gas reaches the chip removal effect from 210 ejections of gas micro-spraying hole at a relatively high speed;
Certainly, also can add the electric forming gas blowout by only external side pressure electroceramics sheet 23; Add the spray of electric forming liquid for separately inboard piezoelectric ceramic piece 25.Lubricant enters inner chamber body 27 by lubricant entry 212, by 211 ejections of lubricant micro-spraying hole, realizes the lubricant supply under the effect of inboard piezoelectric ceramic piece 25.
Gas enters outer chamber 26 by gas access 213, by 210 ejections of gas micro-spraying hole, realizes the gas supply under the acting in conjunction of medial and lateral piezoelectric ceramic piece 25,23.
Embodiment three:
See also shown in Figure 7; The difference of it and embodiment one is that the lubricant entry 312 on the inner chamber body 37 is opened on the spray orifice film 39, has avoided sleeve structure like this, assembles simple relatively.
This micro-spray device 3 includes outboard vibrations substrate 31, outside piezoelectric ceramic piece lead-in wire 32, outside piezoelectric ceramic piece 33, inboard piezoelectric ceramic piece lead-in wire 34, inboard piezoelectric ceramic piece 35, outer chamber 36, inner chamber body 37, inboard vibration substrate 38, spray orifice film 39, spray orifice film 39 is provided with gas micro-spraying hole 310, and spray orifice film 39 is provided with lubricant micro-spraying hole 311, lubricant entry 312, gas access 313.
This micro-spray device 3 also is made of inside and outside two little sprays, and it is inner that inboard little spray is set in the little spray in the outside;
The little spray in this outside is made of outboard vibrations substrate 31, outside piezoelectric ceramic piece lead-in wire 32, outside piezoelectric ceramic piece 33, outer chamber 36, gas access 313, gas micro-spraying hole 310, spray orifice film 39; Wherein, this outside piezoelectric ceramic piece 33 is bonded on the outboard vibrations substrate 31 and forms PZT (piezoelectric transducer); This outside piezoelectric ceramics lead-in wire 32 is bonded in piezoelectric ceramic piece 33 upper and lower both sides, the outside respectively; This outboard vibrations substrate 31 is bonded in and forms outer chamber 36 on the spray orifice film 39; This gas access 313 is arranged on the spray orifice film 39; This gas micro-spraying hole 310 is arranged ringwise and is processed on spray orifice film 39.
The little spray in this inboard is made of inboard vibration substrate 38, inboard piezoelectric ceramic piece 35, inboard piezoelectric ceramic piece lead-in wire 34, inner chamber body 37, lubricant entry 312, lubricant micro-spraying hole 311, spray orifice film 39; Wherein, this inboard piezoelectric ceramic piece 35 is bonded on the inboard vibration substrate on 38 and forms PZT (piezoelectric transducer); This inboard piezoelectric ceramics lead-in wire 34 is bonded in inboard piezoelectric ceramic piece 35 upper and lower both sides respectively; This inboard vibration substrate 38 is bonded in and forms inner chamber body 37 on the spray orifice film 39; This lubricant entry 312 is arranged on the spray orifice film 39; This lubricant micro-spraying hole 311 is arranged ringwise and is processed on spray orifice film 39, opens two lead wire outlet (not shown)s on spray orifice film 39, is used to draw inboard piezoelectric ceramic piece lead-in wire 34.
During work, two medial and lateral piezoelectric ceramic pieces, 35,33 direction of vibration are opposite, make to produce the coupling fields in the outer chamber 36, and gas reaches the chip removal effect from 310 ejections of gas micro-spraying hole at a relatively high speed; Also can add the electric forming gas blowout by only external side pressure electroceramics sheet 33; Add the spray of electric forming liquid for separately inboard piezoelectric ceramic piece 35.Lubricant enters inner chamber body 37 by lubricant entry 312, by 311 ejections of lubricant micro-spraying hole, realizes the lubricant supply under the effect of inboard piezoelectric ceramic piece 35.Gas enters outer chamber 36 by gas access 313, by 310 ejections of gas micro-spraying hole, realizes the gas supply under the acting in conjunction of medial and lateral piezoelectric ceramics 33 and 35.
Embodiment four:
In order to solve the problem big to the lubricant demand in the atomizing cooling, present embodiment has proposed a kind of little spray array apparatus, sees also Fig. 8, shown in Figure 9; Then a plurality of micro-spray device 1 circular array formulas being arranged back (as shown in Figure 9) inserts in the matrix 45 simultaneously, on matrix 45, offer spray orifice 44, be connected by lead-in wire 46 between each micro-spray device 1, matrix 45 inside are provided with the groove 47 that feed pipe is inserted, this feed pipe 48 connects each micro-spray device 1, be stamped lid 41 on matrix 45, lid 41 is provided with and covers hole 43.
This little spray array apparatus can be driven by piezoelectric ceramics or alternate manner, realization is sucked lubricant by the lubricant storage box, spray the little atomized particles of micron order through spray orifice, and atomized particles is injected into the workspace, the cooling of realization atomizing, Pen Chu amounts of lubrication is big simultaneously.
This little spray array apparatus also can rectangularly be arranged.

Claims (7)

1. the near dry cutting liquid supply apparatus used of a field of machining, this device is made up of lubricant storage box, lubricant delivery pipe, main shaft, nozzle, cutter, workpiece, storage box base and nozzle; It is characterized in that: the micro-spray device that this is seated in the nozzle, constitute by the little spray of the little spray in inboard and the outside, it is inner that the little spray in this inboard is sleeved on the little spray in the outside, is provided with lubricant entry on this micro-spray device;
The little spray in this outside is made of outboard vibrations substrate, outside piezoelectric ceramic piece lead-in wire, outside piezoelectric ceramic piece, outer chamber, gas access, gas micro-spraying hole and spray orifice film;
This outside piezoelectric ceramic piece is bonded on the outboard vibrations substrate and forms PZT (piezoelectric transducer);
This outside piezoelectric ceramics lead-in wire is bonded in the upper and lower both sides of piezoelectric ceramic piece, the outside respectively;
This outboard vibrations substrate is bonded on the spray orifice film and forms outer chamber;
This gas access is arranged on the spray orifice film sidewall;
This gas micro-spraying hole is arranged ringwise and is processed on the spray orifice film;
The little spray in this inboard is vibrated substrate, inboard piezoelectric ceramic piece lead-in wire, inboard piezoelectric ceramic piece, inner chamber body, lubricant entry, lubricant micro-spraying hole, spray orifice film by the inboard and is constituted;
This inboard piezoelectric ceramic piece is bonded on the inboard vibration substrate and forms PZT (piezoelectric transducer);
This inboard piezoelectric ceramics lead-in wire is bonded in inboard piezoelectric ceramic piece both sides up and down respectively;
This inboard vibration substrate is bonded on the spray orifice film and forms inner chamber body;
This lubricant micro-spraying hole is arranged ringwise and is processed on the spray orifice film.
2. the near dry cutting liquid supply apparatus that a kind of field of machining according to claim 1 is used is characterized in that: this lubricant entry be the through hole that on the spray orifice film, is provided be arranged on inboard vibrate on-chip inlet communicate form.
3. the near dry cutting liquid supply apparatus that a kind of field of machining according to claim 1 is used is characterized in that: this lubricant entry is arranged on the inboard vibration substrate.
4. the near dry cutting liquid supply apparatus that a kind of field of machining according to claim 1 is used, it is characterized in that: this lubricant entry is arranged on the spray orifice film.
5. the near dry cutting liquid supply apparatus that a kind of field of machining according to claim 1 is used, it is characterized in that: this vibration substrate is made by silicon materials.
6. the near dry cutting liquid supply apparatus that a kind of field of machining according to claim 1 is used, it is characterized in that: this vibration substrate is made by metal material.
7. the near dry cutting liquid supply apparatus that a kind of field of machining according to claim 1 is used, it is characterized in that: this vibration substrate is made by elastomeric material.
CNB2006100888352A 2006-07-19 2006-07-19 Near dry machining liquid supplying device in machine work field Expired - Fee Related CN100503156C (en)

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CN100503156C CN100503156C (en) 2009-06-24

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101352813B (en) * 2008-08-26 2010-06-02 北京航空航天大学 Lubricating system with trace amount
CN106402620A (en) * 2016-11-25 2017-02-15 哈尔滨工业大学 Patting-type piezoelectric driving micro-jet lubrication device
CN106826391A (en) * 2017-03-14 2017-06-13 江苏科技大学 A kind of nano-fluid oil film water droplet electrostatic controllable jet cutting process and device
CN109202195A (en) * 2018-10-12 2019-01-15 苏州宝时格数控设备制造有限公司 Electric spark wire cutting machine cutting fluid liquid feeding device
CN109365204A (en) * 2018-12-21 2019-02-22 泉州市小新智能科技有限公司 A kind of micropore spraying device
CN113478393A (en) * 2021-07-26 2021-10-08 云南北方光学科技有限公司 Nano-fluid micro-lubricating and atomized cooling ultra-precise cutting medium supply system
CN114738648A (en) * 2022-03-02 2022-07-12 上海工程技术大学 Trace lubricating system

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1544141A (en) * 1977-03-09 1979-04-11 Plessey Co Ltd Liquid metering system

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101352813B (en) * 2008-08-26 2010-06-02 北京航空航天大学 Lubricating system with trace amount
CN106402620A (en) * 2016-11-25 2017-02-15 哈尔滨工业大学 Patting-type piezoelectric driving micro-jet lubrication device
CN106826391A (en) * 2017-03-14 2017-06-13 江苏科技大学 A kind of nano-fluid oil film water droplet electrostatic controllable jet cutting process and device
CN106826391B (en) * 2017-03-14 2019-06-21 江苏科技大学 A kind of nano-fluid oil film water droplet electrostatic controllable jet cutting process and device
CN109202195A (en) * 2018-10-12 2019-01-15 苏州宝时格数控设备制造有限公司 Electric spark wire cutting machine cutting fluid liquid feeding device
CN109365204A (en) * 2018-12-21 2019-02-22 泉州市小新智能科技有限公司 A kind of micropore spraying device
CN113478393A (en) * 2021-07-26 2021-10-08 云南北方光学科技有限公司 Nano-fluid micro-lubricating and atomized cooling ultra-precise cutting medium supply system
CN113478393B (en) * 2021-07-26 2022-07-15 云南北方光学科技有限公司 Nano-fluid micro-lubricating and atomizing cooling ultra-precise cutting medium supply system
CN114738648A (en) * 2022-03-02 2022-07-12 上海工程技术大学 Trace lubricating system

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