CN101101313A

CN101101313A - Predictive, adaptive power supply for an integrated circuit under test

Info

Publication number: CN101101313A
Application number: CNA2007101404708A
Authority: CN
Inventors: 本杰明·N·埃尔德里奇; 查尔斯·A·米勒
Original assignee: FormFactor Inc
Current assignee: FormFactor Inc
Priority date: 2002-01-30
Filing date: 2003-01-29
Publication date: 2008-01-09
Also published as: TW200302539A; TW200729377A; DE60317876D1; TWI298918B; TW200732685A; DE60317876T2; TWI298922B; TWI298923B

Abstract

A main power source supplies current through path impedance to a power terminal of an integrated circuit device under test DUT. The DUT's demand for current at the power input terminal temporarily increases following edges of a clock signal applied to the DUT during a test as transistors within the IC switch in response to the clock signal edges. To limit variation noise in voltage at the power input terminal, an auxiliary power supply supplies an additional current pulse to the power input terminal to meet the increased demand during each cycle of the clock signal. The magnitude of the current pulse is a function of a predicted increase in current demand during that clock cycle, and of the magnitude of an adaption signal controlled by a feedback circuit provided to limit variation in voltage developed at the DUT's power input terminal.

Description

The predictability adaptive power supply of tested person integrated circuit

Technical field

The present invention roughlly speaking relates to the system of testing integrated circuits of being used for, and in particular, relates to a kind of device that is used for reducing by the power supply noise in the tested person integrated circuit that state exchange caused of tested person integrated circuit actuating logic.

Background technology

One integrated circuit (IC) tester can be tested one group of IC that exists with the die form on the semiconductor transistor elements simultaneously.Fig. 1 is a block scheme, and general IC tester 10 has been illustrated in its diagram, and this tester 10 is connected on one group of similar tested person IC device (DUT) 14 by probe 12, and these tested person IC device 14 can be formed in the brilliant unit of semiconductor.Tester 10 uses spring needle 15 or other members, and different inputs and outlet terminal are connected on the winding point 16 on the probe 12.Probe 12 comprises the probe 18 of one group of lip-deep I/O (I/O) pad 19 that is used to contact each DUT14 and the conductive channel 20 that contact 16 is linked to probe 18 is provided.These passages are by probe 12, allow tester 10 to send test massage and allow its monitoring by output signal that DUT produced to DUT14 ().Because digital integrated circuit generally includes the pulse that the synchronous logic door of time control comes response cycle master clock signal (CLOCK), so probe 12 also provides a passage 22, by it, tester 10 can provide a CLOCK signal to each DUT14.This test macro also comprises and is used for when just testing DUT14 the power input pad 26 that power supply 24 and probe 12 to the DUT14 power supply are connected to power supply 24 by probe 18 each DUT14.

Each switching transistor in the DUT14 all has an intrinsic input capacitance, and for switching transistor, transistor driver must be to transistorized input capacitance charge or discharge.When driver charged to transistorized input capacitance, it drew charging current from power supply 24.In case transistorized input capacitance is full of, then its driver only need provide the charged transistor that makes of the transistorized input capacitance of maintenance of a relatively small amount to keep opening or closing required leakage current.In the DUT that carries out synchronous logic, switch transition takes place rapidly in most transistors behind the edge of each CLOCK signal pulse.Like this, behind each CLOCK signal pulse, the source current I1 that imports each DUT14 has one temporarily to increase immediately, changes the required charging current of different crystal pipe on off state in the device under test (DUT) to provide.After this in the CLOCK signal cycle, after these transistors have changed state, the demand of source current I1 is reduced to one " static " steady state (SS) rank and keeps this rank till next CLOCK signal period begins.

Probe 12 is connected to each DUT14 by signalling channel 28 with power supply 24, and these signalling channels 28 have an intrinsic resistance, is represented by resistance R 1 in Fig. 1.Because there are a voltage drop in the output of

power supply

24 and 26 of the power of DUT14 inputs, so the supply voltage of DUT14 input VB is lower than the output voltage V A of power supply 24 to a certain extent, though VA can be that adjustment is intact, VB changes with the amplitude of electric current I 1.After each CLOCK signal period begins,, increased the voltage drop that produces through R1, thereby temporarily reduced VB for giving the temporarily growth among the required I1 of switching transistor input capacitance charging.Because occurring in the reduction of the supply voltage VB behind each CLOCK signal pulse edge is a kind of form of noise, it can cause the adverse effect to the DUT14 performance, so expectation limits its amplitude and duration.Can be by reducing the reactance of the passage 28 between power supply 24 and DUT14, for example by increasing conductor size or coming limit noise by the length that reduces passage 28.But there is restriction in the amount that in fact can weaken this reactance.

Also can reduce power supply noise by near the probe 12 each DUT14 power input 26, placing a capacitor C1.Fig. 2 diagram has been illustrated when capacitor C1 is big inadequately, and the power of IC14 is imported the supply voltage VB at 26 places and the behavior that the CLOCK signal pulse of IC14 is imported in electric current I 1 response.Attention is engraved in when T1 after the CLOCK edges of signals, and I1 temporarily rising above static level IQ caused the temporarily increase of the voltage drop that produces through R1, and next it cause the temporarily decline of supply voltage VB below its static level VQ.

Fig. 3 diagram has been illustrated when capacitor C1 is enough big, the behavior of VB and I1.Between the CLOCK signal pulse, as DUT14 when being static, capacitor C1 charges to the static level VQ of VB.At T1 constantly, after rising (or decline) edge with the CLOCK signal, when DUT14 temporary needs more during multiple current, capacitor C1 is supplied to DUT14 with the electric charge of some its storages, thereby has reduced power supply 24 for satisfying the additional electrical flow that the demand that increases must provide.Just as shown in Figure 3, thus the appearance of C1 has reduced the amplitude of the temporarily voltage drop that has produced through R1 and has reduced the descent amplitude of the supply voltage VB that is input to DUT14.

For capacitor C1, for the variation among the abundant restriction VB, capacitor must be large enough to and can supply required electric charge and it is placed near the DUT14 to DUT14, so that the via resistance between C1 and DUT14 is very low.Unfortunately, usually inconvenient or can not near the probe 12 the power supply entry terminal 26 of each DUT14, lay a large capacitor.Fig. 4 is the simplification vertical view of general probe 12.The brilliant unit that IC tester 10 is positioned at probe top and comprises DUT14 hangs over the probe below.Because the I/O terminal of IC tester 10 is distributed on the big relatively zone of the surface area first than the crystalline substance of tested person, so probe 12 provides a big relatively upper surface 25 to support the contact 16 that tester is visited among Fig. 1.On the other hand, probe 18 (not shown)s of probe 12 downsides of contact DUT14 concentrate on below the relatively little central area of probe 12 in brilliant unit.

Aisle resistance between the probe 18 under contact 16 on the upper surface 25 of probe 12 and the zone 27 is a function of the distance between each contact 16 and correspondent probe thereof.For the distance between minimum capacitance device C1 and DUT, capacitor should be installed near the probe 12 of little central area 27 (or tops).Yet, when a brilliant unit comprises the IC of a large amount of desires test or comprise the IC of a terminal with a large amount of dense accumulations, do not exist enough spaces install enough numbers have sufficient size, enough near the capacitor C1 of central area 27.

Summary of the invention

Using synchronous logic to tested person integrated circuit (IC)-components (DUT) test period, after each continuous rising edge or negative edge of the clock signal that is input to DUT, DUT its to the demand of source current on experience one temporarily increase.DUT needs extra current, when forming the state exchange at transistor experience response clock signal edge of logical device with box lunch, to transistorized input capacitance charging.The present invention has limited the change of the supply voltage at DUT power input terminal place, this voltage change be increase by transient state with the source current behind each clock signal pulse due to.The present invention reduces the power supply noise at the power input terminal place of DUT thus.

According to the present invention, after each clock edges, to the pulse of the power input terminal of DUT supply charging current, with during the compensating test continuously by the electric current of primary power supply.Provide the charging current pulse of suitable power by an accessory power supply, having reduced increases the needs that its output current satisfies the demand that DUT increases to primary power.Although DUT increases to the demand of electric current, the output current of primary power keeps being substantially constant, and the voltage drop that produces through aisle resistance between primary power and DUT keeps being substantially constant.The supply voltage at the power input terminal place of DUT also keeps being substantially constant like this.

After each clock edges, the recharge magnitude of current that a DUT is required, the quantity of the state transformation that is experienced according to its this clock edges of internal logic response device is different and different with essence.Since needing IC to carry out a predetermined state, IC test changes order, test period so, and the behavior of IC comprises its demand to electric current during each clock edges, is foreseeable.Thereby after each clock edges, regulate the amplitude of current impulse, to be fit to behind each clock signal pulse the premeasuring of the recharge electric current that DUT is required.By a DUT with the prediction of the current increases of drawing after each clock edges can based on, for example, the measurement of the electric current of under similar test condition, drawing by a similar DUT, or based on the emulation of a simulation test of this DUT experience.

Though during any test period, can predict the charging current amount that the IC of a special type may draw with very high degree of accuracy, but by the actual recharge magnitude of current that any given DUT of the type draws, may be high or low than premeasuring to a certain extent.At random technique change during IC makes, behavior is different to a certain extent to make all IC, and the required charging current amount of its transistor was different during the state of particularly considering changed.In order to compensate these differences between DUT, provide a feedback circuit to monitor the voltage at DUT power input terminal place and the predicted magnitude of suitably amplifying or dwindling these current impulses by a certain percentage, so that variation in voltage minimizes.

Like this, after each clock signal period, the current pulse amplitude that is fed to the DUT power input terminal is during this clock signal period, a function by the predicted magnitude of the extra current that DUT drew of the type, but this prediction pulse amplitude is amplified in proportion by feedback or dwindles, thereby makes the variation of the charge-current demands of predicting the special DUT that adapts to each positive tested person.

The conclusion part of instructions of the present invention particularly points out and explicit state subject matter of the present invention.But the those skilled in the art by represent the appended graphic remainder of reading this instructions of similar elements referring to same-sign, will understand formation of the present invention and its method of operating and further advantage of the present invention and target best.

Description of drawings

Fig. 1 is the block scheme that a typical prior art test macro is illustrated in a diagram, and this test macro comprises that one is connected to the integrated circuit tester of one group of tested person integrated circuit (IC)-components (DUT) by a probe;

Fig. 2 and Fig. 3 are the sequential charts of the interior signal behavior of prior art test macro among Fig. 1;

Fig. 4 is the vertical view of the simplification of prior art probe among a Fig. 1;

Fig. 5 be one according to the first embodiment of the present invention diagram illustrated a block scheme of carrying out the test macro of the system that is used to reduce by one group of DUT power supply input noise;

Fig. 6 is the sequential chart that the signal behavior in the test macro among Fig. 5 is illustrated in a diagram;

Fig. 7 is that a diagram is illustrated in the calibration process, the block scheme of the operation of test macro among Fig. 5;

Fig. 8 is the vertical view of the simplification of Fig. 5 middle probe card;

Fig. 9 and Figure 10 are the block schemes that the test macro of execution of the present invention second and the 3rd specific embodiment is illustrated in diagram;

Figure 11 is the sequential chart that the signal behavior in the test macro among Figure 10 is illustrated in a diagram;

Figure 12 is that a block scheme of carrying out the test macro of the 4th specific embodiment of the present invention is illustrated in a diagram;

Figure 13 is the sequential chart that the interior signal behavior of test macro among Figure 12 is illustrated in a diagram;

Figure 14 is the block scheme that the 5th specific embodiment of the present invention is illustrated in a diagram;

Figure 15 is the block scheme that the 6th specific embodiment of the present invention is illustrated in a diagram;

Figure 16 is the block scheme that the 7th specific embodiment of the present invention is illustrated in a diagram; With

Figure 17 is the sequential chart that the interior signal behavior of circuit among Figure 16 is illustrated in a diagram;

Figure 18 is the block scheme that the 8th specific embodiment of the present invention is illustrated in a diagram;

Figure 19 is the block scheme that the 9th specific embodiment of the present invention is illustrated in a diagram;

An exemplary probe card is illustrated in Figure 20 A diagram;

Another exemplary probe card is illustrated in Figure 20 B diagram;

Figure 21 is the block scheme that the 9th specific embodiment of the present invention is illustrated in a diagram;

Figure 22 is the block scheme that an exemplary specific embodiment of feedback control circuit among Figure 21 is illustrated in a diagram;

Figure 23-the 25th, the block scheme of another exemplary specific embodiment of current pulser among Figure 21 is illustrated in diagram; With

Figure 26 is the block scheme that 1 the tenth specific embodiment of the present invention is illustrated in a diagram.

Embodiment

System architecture

Fig. 5 illustrates with the diagram of block scheme form, and one is linked to one group of integrated circuit (IC) tester 30 on the similar IC device under test (DUT) 34 that exists with die form on the semiconductor transistor elements by a probe 32.Probe 32 comprises that one group is used to visit the probe 37 of DUT 34 lip-deep I/O terminal pad 39 and comprises that signalling channel 46 that tester 30 is linked to probe 37 sends to DUT14 to allow IC tester 30 with a clock signal (CLOCK) and other test signal, and the DUT output signal sent back tester 30, so that tester can be monitored the behavior of DUT.

Probe 34 also by passing probe card to probe 37 and extend to the lead of terminal 41, is linked to a primary power power input terminal 41 of each DUT34.Power supply 36 produces one and adjusts intact output voltage V A and supply an electric current I 2 to DUT34 continuously.For the purpose of diagram was illustrated, Fig. 5 will be by probe 32, and the interior ohmmeter of the passage 43 between primary power 36 and each DUT34 is shown R1.Owing to the voltage drop that produces through each resistance R 1, so the input supply voltage VB of each DUT34 is low than VA to a certain extent usually.

According to the present invention, be installed in the first transistor switch SW 1 on the probe 32, an accessory power supply 38 is linked on one group of capacitor C2 that is installed in the probe 32.Be installed in the power input terminal that one group of transistor seconds switch SW 2 on the probe 32 is linked to each capacitor C 2 a corresponding D UT34 equally.Resistor R 2 shown in Fig. 5 is represented when switch SW 2 is closed, each capacitor C2 and 41 intrinsic signalling channel resistance of DUT 34 power input terminal in the probe 32.IC tester 30 provides an output control signal CNT1 to SW1, provides a control signal CNT2 to come gauge tap SW2, provides control data CNT3 to control the amplitude of the output voltage V C of accessory power supply 38.As hereinafter describing in detail, the DUT that satisfies any expection when needs is during to the growth of source current, and accessory power supply 38, switch SW 1 and SW2, capacitor C2 have served as the power input terminals 41 that an auxiliary current source is injected a current impulse each controlled DUT of IC tester 30.

Power supply noise

DUT34 carries out synchronous logic, and wherein switching transistor forms logic gate, and it main CLOCK signal pulse of periodicity that is provided by tester 30 is provided and opens and close.Each switching transistor has an intrinsic input capacitance and in order to open or close transistor, its driver must both be transistorized input capacitance charging, makes its discharge again.When the driver in the DUT34 was the charging of transistorized input capacitance, its increase must be supplied to electric current I 1 amount of the power input terminal 41 of each DUT.When transistorized input capacitance was full of, its driver only need be supplied relatively little magnitude of leakage current, to keep transistorized input capacitance charged, made that this transistor keeps opening or closing.Like this, after each CLOCK signal pulse, the source current I1 that is input to each DUT34 exists one temporarily to increase immediately, changes the necessary charging current of different crystal pipe on off state to provide.In signal period, these transistors have changed after the state, reduce to one " static " steady state (SS) rank and keep this rank till next CLOCK signal period begins for the demand of source current at subsequently a CLOCK.Because DUT34 begins required extra current I1 amount in each CLOCK signal period, be that the quantity of transistorized Push And Release decide with essence according to during this specific CLOCK signal period, so for the demand of charging current, can be with the cycle difference difference.

If tester 30 must make switch SW 1 and SW2 be held open always, primary power 36 will provide all electric current input I1 to each DUT34 always so.In the case, because after each CLOCK signal pulse, the switch behavior that has increased in each DUT34 and the temporarily increase of the source current I1 that causes will cause the temporary increase of voltage drop on the interior resistance R 1 of the signalling channel 43 between primary power 36 and the DUT34.Next this will cause the temporarily decline of the power input terminal 41 voltage VB of place of DUT.Fig. 2 represents when SW2 opens always, the behavior of VB and I1.Because occurring in the decline of the supply voltage VB behind each CLOCK signal pulse edge is a kind of form of noise that can influence the performance of DUT34 conversely, so the amplitude that the expectation deboost falls.

Predictive current compensation

According to a specific embodiment of the present invention, the state of IC tester 30 control accessory power supplys 38 and switch SW 1 and SW2 is so that capacitor C2 is when each test period begins, to DUT34 supply recharge electric current I 3.Only,, provide electric current input I1 to DUT34 together with the output current I2 of primary power at the mobile charging current I3 of the initial part of each CLOCK signal period.When charging current I3 provide with DUT34 in the electric capacity of switching transistor during with the electric charge of about equivalent required after the CLOCK signal pulse, so with behind this CLOCK signal pulse, variation in the electric current I 2 that is produced by primary power 36 is relatively little, and therefore the variation in supply voltage VB is very little.

Like this, before each CLOCK signal edge, so tester 30 provides the data CNT3 and the off switch SW1 of the expectation amplitude of an indication auxiliary power supply voltage VC to accessory power supply 38.So power supply 38 is given all capacitor C2 chargings.The amplitude of capacitor C2 charge stored amount and VC is proportional.When capacitor C2 filled the time that can be full of, tester 30 was opened switch SW 1.After this, along with the beginning of next CLOCK signal period, tester 30 cuts out all switch SW 2, and the feasible electric charge that is stored among the capacitor C2 can be used as electric current I 3 and flows into DUT34.After this, when not needing the transient state charging current, tester 30 is opened switch SW 2, makes that during the remainder of this CLOCK signal period, only primary power 36 is to the DUT34 supply of current.This process repeated during each CLOCK signal period, along with tester 30 is each clock period adjusting VC amplitude via control input CNT3, satisfied the current impulse I3 of the prediction charge-current demands during this specific clock signal cycle so that a size to be provided.The amplitude of I3 current impulse can be different and different with the cycle like this.

Supply voltage VB and electric current I 1, I2 and the I3 behavior at a CLOCK signal period initial part is illustrated in Fig. 6 diagram.Electric current I 1 is expressed its T1 after the CLOCK porch constantly, and a temporarily big growth above its stationary level IQ1 comes the electric capacity charging in DUT34.Electric current I 3 fast rise provide all recharge electric currents basically.The output current I2 of primary power 36 only expresses the perturbation relatively little than its quiescent value one, this perturbation by the transient state inter-module of I3 and I2 little do not match due to.Because the variation among the I2 is little, so the variation among the VB is little.Like this, the present invention has limited basically by the caused power supply noise of switching transient among the DUT34.

The tester programming

As mentioned above, each DUT34 recharge magnitude of current of beginning to draw in the CLOCK signal period be according to transistorized switch number of times during this CLOCK signal period decide and also charging current with the difference in cycle difference.For the appropriate voltage adjustment at DUT terminal 41 places is provided, tester 30 must be predicted along with each CLOCK signal edge, DUT34 plans to store how many electric charges, just can make capacitor C2 store an amount of electric charge before the signal period at each CLOCK because must regulate the amplitude of accessory power supply output VC.

Fig. 7 has described a test macro, and its foundation is for allowing tester 30 to judge experimentally which rank each test period should be based upon VC.A known operation is similar to the IC of desire test with reference to DUT40 and its normally, and it is connected to tester 30 via probe 32 usually, and this is identical with the DUT34 connected mode that will test, so that tester 30 can be carried out identical test on reference IC40.But but probe 32 also will be linked to an entry terminal of tester 30 with reference to the power terminal of IC40 so that tester 30 monitoring power voltage VB.Then, when the minimum value of using VC was observed VB, tester 30 was only carried out first CLOCK cycle of test.If during the CLOCK signal period, VB reduces under the lower limit of an expectation, and tester 30 uses a higher VC value to come a CLOCK signal period of repeated test so.Repeat this process repeatedly, up to being to have set up a suitable VC value CLOCK signal period.Then, tester is carried out preceding two CLOCK signal periods of this test repeatedly, monitors VB simultaneously and correspondingly regulate VC during second CLOCK signal period.Use identical program to come to set up suitable VC value, when test DUT34, can use these VC values then for each continuous CLOCK signal period of this test.

The deviser uses circuit simulator analog IC before making IC usually.When circuit simulator is being carried out the test identical with test performed on the IC tester will the true copy at analog IC on the analog IC, can use circuit simulator with the mode of an analogy, to judge to true IC test period the sequence of the VC value that will use.

Probe

A general prior art probes card 12 is illustrated in Fig. 4 diagram, and it adjusts the power input terminal that capacitor C1 is connected to DUT with voltage, with the restriction power supply noise.This probe must make the distance minimization between voltage adjustment capacitor and DUT, so that the resistance between capacitor and DUT minimizes.Like this, preferably, capacitor arrangement on the probe visit DUT probe above zonule 27 within or near.Because near the space on the probe probe is little, so size and the number of configurable adjustment capacitor C1 on probe are limited.The restriction of this capacitor installing space can limit the number of the DUT that can test simultaneously.

Fig. 8 is a simplification vertical view according to Fig. 5 middle probe card 32 of the present invention.The contact 45 that IC tester 30 is visited among Fig. 7 is distributed in the big relatively zone of upper surface 43 of probe 32, and the probe 37 (not shown) of contact DUT34 concentrate on probe a relatively little central area 47 below.Because the charging voltage VC of capacitor C2 is adjusted to adapt to the sizable aisle resistance R2 (Fig. 5) between the terminal 41 of any switch SW 2 and DUT34, capacitor C2 can be to be installed on the probe 32 from the central area 47 farther distances above the DUT probe than capacitor C1 among Fig. 4.Same owing to making capacitor C2 be charged to the voltage higher, so it can be littler than capacitor C1 than capacitor C1.Because the capacitor C2 of Fig. 8 middle probe card 32 can be littler and far away from the probe center than the capacitor C1 of prior art probe 12 among Fig. 4, so more capacitor 32 can be installed on probe 32.Like this,, use the test macro of prior art probe 12 among Fig. 4, can test more DUT simultaneously according to the test macro that uses probe 32 of the present invention.

The probe that has mode generator on the plate

Another specific embodiment of the present invention is illustrated in Fig. 9 diagram, and it comprises common and Fig. 7 middle probe card 32 similar probe 50, just on the probe 50 " power control IC " 52 has been installed also.Come gauge tap SW1 and SW2 and accessory power supply 38 in order to produce control signal and data CNT1, CNT2 and CNT3, power control IC 52 comprises the mode generator 54 of the mode producing function of IC tester 30 in the execution graph 7.Power control IC 52 comprises one by before test beginning, the programming data that the outside that provides via a traditional computer bus 56 produces and the traditional mode generator 54 of programming.Mode generator 54 begins to produce its output data pattern, to respond from START signal IC tester 58, that indicate the test beginning, and produce its output CNT1, CNT2, CNT3 data pattern, in response to the identical systems clock (SYSCLK) of the function timing of tester 58.

When required capacitor C 2 abundant hours, can be in power control IC 52 construction switch SW 1 and SW2 and capacitor C2 (as shown in Figure 9).Should be positioned as close to the DUT probe places IC52 on the probe.The switch SW 1 and the pattern generation function of SW2 and capacitor C2 and tester 30 are merged into a single IC52, reduced the cost and the complicacy of probe 32, and reduced the number of required tester 30 output channels.But ought be in case of necessity, capacitor C2 can come construction by the discrete assembly of power control IC 52 outsides.

The charging current of width modulation

Specific embodiments of the invention that are similar to specific embodiment among Fig. 5 have usually been illustrated in Figure 10 diagram.But in Figure 10, from probe 60, omitted switch SW 1 and made the output VC of accessory power supply 38 be directly connected to capacitor C2.Output voltage V C is fixed and not regulated by IC tester 30, make C2 bulk charge before each CLOCK signal pulse reach identical value.In this configuration, IC tester 30 comes control capacitor C2 to begin in each CLOCK pulse via control signal CNT2 by pwm switch SW2, is sent to the quantity of electric charge of DUT34.Tester 30 is along with the length of the time of the rising edge off switch SW2 of CLOCK signal pulse, determined capacitor C2 to be delivered to what of the quantity of electric charge of DUT34.In addition, be as what the diagram of Figure 11 institute was illustrated, when tester 30 increases fast and reduces the duty cycle of CNT2 signal subsequently, the shape of the I3 electric current that it can be more illustrated near diagram among Fig. 6.

The charging current of analog-modulated

A specific embodiment that is substantially similar to specific embodiment among Figure 10 of the present invention has been illustrated in Figure 12 diagram.But in Figure 12, when DUT34 the experience state change and when needing extra current I3, transistor switch SW2 substituted with the transistor Q2 that is operated in its active region.In this configuration, the CNT2 output of IC tester 30 is data sequences that are applied to modulus (A/D) converter 63 that places on the probe 61 as output.Data sequence CNT2 representative is during each CLOCK signal period, to the demand of the prediction of charging current I3.A/D converter 63, the simulating signal CNT4 (illustrating as diagram among Figure 13) of the base stage by producing an input transistors Q2 responds the CNT2 data sequence, and this signal is all different during each CLOCK signal period.Simulating signal CNT4 controls each transistor Q2 and allows the amount of the electric current I 3 of outflow capacitor C2 to make it mate the prediction transient state assembly of the required electric current I 1 of DUT34 substantially.A/D converter 63 can be built in the IC tester 30, rather than it is installed on the probe 61.

Use is with reference to the charging prediction of DUT

A specific embodiment of the present invention is illustrated in Figure 14 diagram, one of them reference DUT60 that is similar to DUT34 accepts test in a similar mode, and just tester 30 is by being applied to CLOCK and its other input signal with reference to DUT60 in advance slightly prior to other DUT test reference DUT60.Primary power 62 is to all DUT34 power supplies, and an accessory power supply 64 is powered to reference DUT60.Place on the probe 66, be positioned at reference near the capacitor C4 the DUT60, adjust voltage VREF, make it be in it and allow within the working range with a traditional approach at reference DUT60 power input terminal 68 places.Capacitor C5 is linked to VREF on one group of amplifier A1 and capacitor C6 receives the discharging chain of each amplifier A1 on the power input terminal 70 of each DUT34.

Though adjust intactly, because with reference to the transient state charge-current demands of DUT,, be reduced to its stationary level below in a small amount with reference to the supply voltage VREF at DUT60 entry terminal 68 places beginning along with each CLOCK signal period.The slippage of voltage is proportional with the transient state charging current of being drawn by reference DUT60 among the VREF.Owing to be similar to DUT34, and slightly prior to the DUT34 tested person with reference to DUT60, thus the decline of VREF predicted the short time after the transient state charging current amount of each DUT34.

By the amplifier A1 that capacitor C5 and C6 work, amplify the AC assembly of VREF, to produce the output current I3 of the electric current output I2 that increases primary power 62, so that electric current input I1 to be provided to each DUT34.Make tester 30 in advance with reference to the length of test duration of DUT60 be set to equal reference voltage VREF changes and the corresponding variation of electric current I 3 between time-delay.Along with (bearing) gain of each amplifier A1 is suitably regulated by an outside signal (GAIN) that generates, electric current I 3 will be mated the required transient state charging current of DUT34 substantially.

Charging prediction in the non-test environment

Specific embodiments of the invention except being used for reducing the power supply noise when the testing integrated circuits, also are used in integrated circuit through in the application of a succession of predictable state, reduce power supply noise.

An example of the present invention specific embodiment is illustrated in Figure 15 diagram, and wherein an integrated circuit 80 passes through a succession of predictable state for response as importing an outside CLOCK signal edge that generates of supplying.IC80 receives the power supply of automatic power supply 82.When switch SW 1 is closed, give capacitor C2 charging via switch SW 1 by an accessory power supply 84.When switch SW 2 was closed, capacitor C2 imported its electric charge among the IC80 as extra current.One " charge predictor " circuit 86 during IC80 does not change the partial periodicity of state in the signal period at each CLOCK, concludes that a signal CNT1 comes off switch SW1 and change a control signal CNT2 to open switch SW 2, response CLOCK signal.This just allows accessory power supply 84 between state transformation, gives capacitor C2 charging.Charge predictor circuit 86 is during the partial periodicity of each CLOCK IC80 direct transform state in the signal period, conclude that control signal CNT2 comes off switch SW2 and change this control signal CNT1 to open switch SW 1, thereby allow the power input transmission current of capacitor C2, so that its transient current needs to be provided to IC80.Charge predictor 86 also provides control data CNT3 to accessory power supply 84, to regulate the output voltage V C of accessory power supply 84, makes it that capacitor C2 is charged to one according to during the NextState conversion, the desired magnitude of current of drawing of IC80 and definite rank.Charge predictor 86 is fit to come construction by traditional mode generator or other any device that can produce output data sequence C NT1, CNT2 and CNT3, and these output data sequence C NT1, CNT2 and CNT3 are suitable for IC80 because expectation state sequence and for the demand of transient current.Switch SW 1 and SW2 and/or capacitor C2, can be as shown in Figure 15 in the outside construction of IC80, perhaps can be at the IC80 interior construction.

Charge balancing

A simple form of the present invention has been illustrated in Figure 16 diagram, and it is applicable to IC80 in each CLOCK signal period, and the charging current amount that expectation is drawn is in the application relatively limited, that predictable scope is interior.As shown in Figure 16, converter 90 conversion CLOCK signals are to provide CNT1 control input to the switch SW 1 that an accessory power supply is coupled to a capacitor C2.This CLOCK signal directly offers CNT2 control signal input the switch SW 2 that capacitor C2 is connected to usually the power input of the IC80 that is driven by primary power 82.As shown in Figure 17, the CLOCK signal is driven into high level with the CNT2 signal during the first half of each CLOCK signal period, with off switch SW2; And during each CLOCK signal period latter half, CNT1 is driven into high level, with off switch SW1.

The output voltage V C of accessory power supply 84 is set to normal value makes it all capacitor C2 is charged to an identical rank before signal period at each CLOCK.The rank of VC is set to begin in each CLOCK signal period, the suitable position of the hunting range of power input voltage VB when IC80 is just drawing the recharge electric current.For example, when we wanted to allow the static value of VB be in its scope middle, our scalable VC made capacitor C2 supply charging current amount be in the middle of the scope of the charging current that the IC80 expectation draws.On the other hand, too many if we want to prevent that VB from dropping under its static value, but be ready to allow VB to be elevated on its static value, we can regulate VC, make capacitor C2 supply IC80 the maximum of the charging current that expectation is drawn.Though capacitor C2 is during the number of C LOCK signal period, charging current very little may be provided, and during other CLOCK signal period, provide too many charging current, but in many application, when VC was made suitable adjusting, the system that illustrates among Figure 16 still can make the swing of VB remain in the tolerance interval.Note, by to each CLOCK signal period all control data CNT3 be set to identical value, can the systems programming among Fig. 5, Fig. 9, Figure 14 and Figure 15 be made it to work in a kind of similar mode.

The self-adaptive current compensation

Another specific embodiment of the present invention is illustrated in Figure 18 diagram, and as shown in Figure 18, power supply 36 is by probe 50, and the power input terminal 1806 on tested person semiconductor devices (DUT) 34 is powered.Among Figure 18, represent interior resistance by the power transmission line on the probe 50 1812 with R1.Equally as shown in Figure 18, IC tester 58 provides clock and other signal by probe 50 to DUT34.With the clock entry terminal graphic representation on the exemplary DUT34 is terminal 1808.IC tester 58 also receives the signal that comes from DUT34 by probe 50.Shown an I/O (I/O) terminal 1810 among Figure 18 on the DUT34.But DUT34 can have combination and other terminal that had both also worked as outlet terminal as entry terminal that additional I/O terminal 1810 maybe can have the terminal that only is used to terminal and other terminal of importing that is used to export or only is used to import and only is used to export.Should be clear and definite, probe 50 can be connected (as shown in figure 18) or be connected (for example, as shown in figure 14) with a plurality of DUT with a DUT.

As shown in figure 18, an electric grippe detecting device 1804 (for example, a current sense coupling mechanism or a current transformer) sensing is by the electric current of pass capacitor C1.Amplifier 1802, its preferred sign-changing amplifier (for example, having the amplifier of a negative gain), it provides electric current to transmission line 1812 by capacitor C7.Accessory power supply 38 is to amplifier 1802 power supplies.Certainly, available other method gives amplifier 1802 power supplies, comprises by power supply 36, IC tester 58, is positioned at the power supply power supply on the probe 50, or by except being positioned at power supply 36, and the power supply beyond on IC tester 58 or the probe 50 is powered.

In operation, power terminal 1806 is drawn small amount of current usually, (supposes that DUT34 comprises the home court effect transistor) as mentioned above.Only in some cases, power terminal 1806 just can be drawn a large amount of electric currents really.As above discuss, these situations occur in the most at large when at least one transistor among the DUT34 changes state, and this change state takes place corresponding to the rising edge of the clock at clock terminal 1808 places or negative edge usually.

When DUT34 did not change state, the small amount of current that draw at power terminal 1806 places caused only having little leading static direct current (DC) to flow through usually or does not have electric current to flow through pass capacitor C1.This can cause electric grippe detecting device 1804 to sense seldom electric current, or sensing is less than electric current, and therefore seldom or do not have electric current to flow out sign-changing amplifier 1802.

But when DUT34 just in state transformation, power terminal 1806 is temporarily drawn a large amount of electric currents (as mentioned above).This can cause electric current temporarily sizable and that change to flow through pass capacitor C1 (as mentioned above).This electric current oppositely also amplifies by electric grippe detecting device 1804 sensings and by sign-changing amplifier 1802, finally by blocking capacitor C7, supplies with power transmission line 1812.As mentioned above, the extra current that is provided on power transmission line 1812 by amplifier 1802 has reduced change in voltage at power terminal 1806 places.

A variation of the exemplary specific embodiment that Figure 19 diagram illustrates among Figure 18 to be showed.As figure, Figure 19 is similar with Figure 18 substantially, and comprises that also a current sensing element 1804 and disposes the sign-changing amplifier 1802 that the power transmission line 1812 that is used on probe 50 provides electric current.But in Figure 19, current sensing element 1804 senses flow are crossed the electric current of power transmission line 1812, rather than senses flow is crossed the electric current of pass capacitor C1.

Similar among Figure 19 among the work of specific embodiment and Figure 18.When DUT34 does not change state, the small amount of current in the normally little leading static direct current (DC) that to be power terminal 1806 places drawn via power transmission line 1812 that senses by electric grippe detecting device 1804.Thereby sign-changing amplifier 1802 provides on a small quantity or does not provide charging current.But when DUT34 just changed state, electric grippe detecting device 1804 was by the great change of power transmission line 1812 sense power terminals 1806 place's electric currents.Sign-changing amplifier 1802 amplifies also the oppositely electric current of institute's sensing, with by blocking capacitor C7, provides the recharge electric current to power transmission line 1812.As mentioned above, the recharge electric current has reduced the change in voltage at power terminal 1806 places.

Interconnect system

In the above-mentioned specific embodiment, being used to the probe of signalling channel between integrated circuit tester, power supply and DUT is provided is exemplary.Can implement the present invention together with interconnective system with multiple other design.For example, a simple relatively probe has been illustrated in Figure 20 A diagram, this probe comprises a substrate 2002, and it has the probe member 2008 that is used for being connected to the terminal 2004 of an IC tester (Figure 20 A is not shown) and is used for being electrically connected with a DUT (Figure 20 A is not shown) foundation.As shown in the figure, terminal 2004 is electrically connected with probe member 2008 by interconnect component 2006.

Substrate 2002 can be, for example, and the printed circuit board (PCB) of a single or multiple lift, pottery or other material.Should be clear and definite, the present invention is the material composition of overcritical substrate not.Probe member 2008 can be the probe that can be electrically connected with DUT foundation of any kind, and without stint comprises: needle probes, cobra (COBRA) style probes, piece shape, bolt shape, cylindricality, spring contact etc.The unrestriction example of suitable spring contact is at United States Patent (USP) the 5th, 476, the U.S. patent application case the 08/802nd of application on February 18th, No. 211 1, No. 054 (it is corresponding to the open case WO97/44676 of PCT), United States Patent (USP) the 6th, 268,051B1 number, and No. the 09/364th, 855, the U.S. patent application case of on July 30th, 1999 application (its corresponding to PCT open case WO01/09952 number) in come out with, these patent/patent application cases are incorporated herein by reference.Can be considered as being described in United States Patent (USP) the 6th, 150 to these spring contacts, the spring contact in No. the 10/027th, 476, the U.S. patent application case of No. 186 or Dec 21 calendar year 2001 application, these patent/patent application cases also are incorporated herein by reference.In addition, " probe " can be to be used for going up weld pad or the terminal that protruding element contacts with DUT, for example, and the spring contact that on DUT, forms.The unrestriction example that interconnects passage 2006 comprises, path and path and be positioned at that substrate 2002 surfaces are gone up or substrate 2002 within the combination of electric conductivity track.

Another non-limiting instance of the probe that can use together with the present invention has been illustrated in Figure 20 B diagram.As shown, the exemplary probe card of showing among Figure 20 B comprises substrate 2018, interpolation mechanism 2012 and pops one's head in 2032.Terminal 2022 contacts with an IC tester (not shown among Figure 20 B) and contacts with a DUT (not shown among Figure 20 B) with the top probe member of discussing 2008 similar probe members 2034.Interconnect passage 2020, elastic coupling element 2016, interconnect passage 2014, elastic coupling element 2010 and interconnect passage 2,036 2034 conductive channel is provided from terminal 2022 to probe member.

Substrate 2018, interpolation mechanism 2012 and pop one's head in and 2032 can make by being similar to above relevant 2002 those similar materials of describing.In fact, the overcritical substrate 2018 of the present invention, interpolation mechanism 2012 and 2032 the material composition and can use any composition of popping one's head in.Interconnecting passage 2020,2014,2036 can be similar with the above-mentioned passage 2006 that interconnects.Elastic coupling element 2016 and 2010 preferably stretches, flexible member.The limiting examples of these elements is at United States Patent (USP) the 5th, 476, the U.S. patent application case the 08/802nd of application on February 18th, No. 211 1, illustrate (it discloses No. the 97/44676th, case WO corresponding to PCT), United States Patent (USP) the 6th in No. 054,268, explanation in No. the 09/364th, 855, the U.S. patent application case of 015B1 number and on July 30th, 1999 application No. the 01/09952nd, the open case WO of PCT (its corresponding to), all these patent/patent application cases all are incorporated herein by reference.Comprise the more detailed argumentation of the exemplary probe card of a plurality of substrates shown in Figure 20 B, be found in United States Patent (USP) the 5th, 974, in No. 662, it is incorporated herein by reference.Exemplary design shown in Figure 20 B can be done a lot of variations.Only lift an example, interconnect passage 2014 can with a hole and one or more be fixed in the hole and from the hole, extend out with 2018 and 2032 flexible members that connect 2016 and 2010 of popping one's head in replace.

But, should be apparent, the present invention does not make excessive demands the construction or design of interconnect system and can use any structure or design.Shown in the specific embodiment as described herein-in, preferably, be used to reduce the circuit that DUT goes up power terminal place change in voltage and be installed in probe.If use substrate probe more than, the exemplary probe shown in Figure 20 B for example, circuit can be positioned on arbitrary substrate so, maybe can be distributed between two or more substrates.Like this, for example circuit can be arranged on probe 2032, interpolation mechanism 2012 or substrate 2018 one of Figure 20 B, and perhaps circuit can be positioned on the composition of two or more probes, interpolation mechanism and substrate.It should be obvious that this circuit can be fully formed, can be fully formed on the integrated circuit or can be that buffer circuit element, a part are formed at an element on the integrated circuit and form by a part by interconnective buffer circuit element.

The compensation of prediction/self-adaptive current

As mentioned above, be used to control the prognoses system that the power input terminal place supply voltage of DUT changes, predict that DUT is with the charging current amount of needs during each clock signal period, and then according to this prediction, measurement is applied to the size of offset current pulse of the power input terminal of DUT during this clock signal period.On the other hand, adaptive system monitoring is applied to the power signal of DUT terminal, and the amplitude of using feedback to regulate the offset current pulse, is constant with the voltage that keeps power signal.

A specific embodiment of the present invention is illustrated in Figure 21 diagram, and wherein, the recharge magnitude of current that power input terminal 26 places of DUT34 need is determined by prediction and self-adaptation combination.Accessory power supply 38 is to a current pulser 2102 supply power VC, when this current pulser amplifies the normal power supply electric current that comes automatic power supply 36 at needs, to DUT power input terminal 26 supplies one current impulse I3.Begin in each test period, IC tester 58 is to current pulser 2102 supplies one signal CNT5, predicted magnitude with current pulse, and during each test period, IC tester 58 is concluded a control signal CNT6, when produces current impulse to tell current pulser 2102.

Be 58 programmings of IC tester, with the DUT34 that tests a special type with and done about required size of current impulse I3 and the prediction of duration during each test period, as discussed, this kind prediction can be based on the measurement to this type DUT institute projected current, or based on the emulation to the DUT behavior.But because DUT manufacturing process variations and other factor, each DUT of the type is during each test period, and the amplitude of the recharge electric current that may need may be different with the charging current of prediction.To any given DUT, actual charging current of drawing can be tending towards relative consistent on the periodic basis with the ratio of prediction charging current again based on the cycle.For example, a DUT may draw 5% charging current than the prediction charging current consistently during each test period, and another DUT of same time, during each test period, may draw consistently than the prediction charging current and lack 5% charging current.

Feedback controller 2104 is by coming the variation between compensating charge current requirement and predicted value to current pulser 2102 supply one adaptive gain (or " self-adaptation ") signal G, this current pulser 2102 suitably increases or reduces the amplitude of current impulse I3, makes current impulse adapt to the needs of the specific DUT34 of current tested person.Like this, prediction signal CNT5 just represents the predicted magnitude in the charging current of the DUT demand of the type of tested person, and (" the self-adaptation ") signal amplitude that gains is just represented the predicated error in the DUT of tested person special case.

Before testing DUT34, IC tester 58 is carried out a pretest procedure, and this program can be similar to carries out following test: send test and CLOCK signal pulse to DUT34, make it general to work in the identical mode of test period with DUT.During this pretest procedure, the voltage VB at power input terminal 26 places of feedback control circuit 2104 monitoring DUT, and the amplitude of regulating gain signal G are so that occur in the VB minimize variations of I3 amplitude in too big or too little.This pretest procedure offers 2104 times of feedback controller, to regulate the amplitude of gain signal G, adapts to the demand of the specific DUT34 of tested person for charging current.After this, at test period, feedback controller 2104 continues monitoring VB and also regulates gain signal, but what done is minor adjustment.Like this, though the amplitude of the charging current pulse I3 that during each test period, is supplied, it mainly is a function of the charge-current demands of DUT prediction, but can regulate current pulse amplitude well by the gain control feedback that controller 2104 provides, be different from the demand of prediction with any consistent tendency of the actual charge current demand that adapts to DUT.

The those skilled in the art can realize, and the feedback controller 2104 among Figure 21 can be any one that can produce in the multiple design of an outputing gain control signal G that will make the VB minimize variations.The those skilled in the art also can realize, current pulser can be any one that can produce in the multiple design of current impulse I3, and wherein the time length of I3 is controlled by an input signal CNT6 and the amplitude of I3 is the function of the amplitude of a current impulse of being represented by control signal CNT5 and an adaptive gain signal G.

A limiting examples of feedback controller 2104 is illustrated in Figure 22 diagram, and its AC assembly with VB is integrated, to produce gain control signal G.One DC blocking capacitor C10 leads on the integrator 2106 the AC assembly of VB, and this integrator 2106 is by an operational amplifier A 1, form with its capacitor C8 in parallel and R5 and the resistor R 4 of connecting with one input end.

Figure 23 describes a limiting examples of current pulser 2102 among Figure 21.In this example, the data of the predicted magnitude of the required current impulse I3 of control signal CNT5 transmission representative.The predicted data that one digital to analog converter (DAC) 2108 is used with the testing current cycle converts simulating signal P to, and its amplitude and predicted data are proportional.When IC tester 58 had concluded when the CNT6 signal will produce current impulse I3 to show, switch 2110 cut out, and so that signal P to be provided an input to variable gain amplifier 2112, this amplifier 2112 is by the VC output power supply of accessory power supply among Figure 21 38.The gain of the gain control signal of feedback controller 2104 output control amplifier 2112 among Figure 21.Amplifier 2112 produces an output current pulse I3, and the product of I3 amplitude and P and G is proportional.Capacitor C7 passes to the signalling channel 2114 to the DUT34 through-put power in Figure 21 middle probe card 50 with the I3 signal pulse.

Figure 24 has described another limiting examples of current pulser 2102 among Figure 21.In this example, among Figure 21 IC tester 58 conclude the length of the time of CNT5 control signal be with next CLOCK signal period during the predicted magnitude of required current impulse I3 proportional.Current pulser 2102 produces after the pulse of each I3 signal, and IC tester 58 is concluded the CNT5 signal, to close additional feed output signal VC is coupled to switch 2116 on the capacitor C8 via a resistor R 5.IC tester 58 continues to conclude CNT5 signal a period of time, and length increases with the predicted magnitude of next I3 signal pulse during this period of time.Like this, accessory power supply 38 is charged to a proportional magnitude of voltage of the predicted magnitude with next I3 signal pulse with capacitor C8 among Figure 21.After this, when IC tester 58 is concluded the CNT6 signal, in the time of will producing next I3 signal pulse with indication, switch 2117 is connected to capacitor C8 in the input of amplifier 2118.This amplifier 2118 has a gain by the gain control signal output G control of feedback controller among Figure 21 2104.One coupling condenser C9 is transferred to probe card conductor 2114 with power delivery DUT34 in Figure 21 with the I3 signal that is produced.Control signal CNT6 opens switch 2117 after having had the time of abundant discharge at capacitor C8.Because the amplitude of I3 current impulse rises rapidly, and subsequently when C8 discharge, amplitude descends, thus the I3 pulse the time change behavior and DUT time change charge-current demands reach unanimity.

Figure 25 has described another limiting examples of current pulser 2102 among Figure 21.Wherein by the predicted magnitude of the data represented I3 signal pulse of CNT5 signal conveys.It will be the reference voltage of simulating signal P by the data conversion of CNT5 signal transmission that gain control signal G serves as DAC2120.The voltage that gain control signal G demarcates has defined the scope of DAC output signal P, so that the product of P and G and CNT5 is proportional.Switch 2122 temporarily is transferred to amplifier 2124 with the P signal, with the pulse of responsive control signal CNT6, thereby makes amplifier 2124 send an I3 signal pulse via a coupling condenser C10 to power conductors 2114.Amassing of the amplitude of this I3 signal pulse amplitude and G and P is proportional.

Figure 26 diagram has been illustrated according to prediction of the present invention/another exemplary specific embodiment of adaptive system ground, wherein accessory power supply 38 provides power and IC tester 58 when power input terminal 26 places that predict DUT 34 need the recharge electric current to variable gain amplifier 2126, just provides a control signal pulse CNT6 to amplifier 2126.Capacitor C11 is transferred to the I3 signal pulse in the power signal passage 2114 that in the probe 50 primary power 36 is linked to DUT power input terminal 26.Feedback control circuit 2104 monitoring appear at the voltage VB at terminal 26 places, and the gain of resonance-amplifier 2126, so that the VB change minimizes.IC tester 58 is supplied to accessory power supply 38 with control signal CNT5 as input during each CLOCK, the amplitude with according to the data of being transmitted by the CNT5 control signal is provided with its output voltage V C.The amplitude of I3 thereby be the function of product of the amplitude of the amplitude of gain control signal G and additional feed voltage VC.

Like this, Figure 21-26 has described according to one of the present invention and has been used for by after each CLOCK signal edge, power input terminals 26 to DUT provides the recharge electric current, and the voltage of adjusting the power signal VB that is applied to DUT34 satisfies because the multiple exemplary specific embodiment of the prediction/adaptive control system of the demand that the electric current that the switch switching that CLOCK signal edge causes is brought temporarily increases.Control system is " predictability ", is because it predicts during each test period that DUT is with the additional electrical flow of needs.This control system also is " adaptive ", is because it is with feeding back the ratio change the current impulse that its response prediction produces, with adapt to each tested person DUT of observing the variation of actual current amplitude of drawing.

Although the present invention of Chan Shuing here only reduces noise in the system with a primary power at one, should recognize that the present invention can be used on a more than primary power in the environment of DUT power supply.

Although the present invention who is set forth here operates with the DUT with a single power input, should recognize that this device can be suitable for operating with the DUT with a plurality of power inputs.

Although described the present invention, be after the rising edge of CLOCK signal pulse, to provide extra current, but it easily is applicable to the recharge electric current is provided after the negative edge of CLOCK signal pulse, with the DUT that is used for switching at decline CLOCK signal edge.

Be used for the different schemes of the present invention used together with the IC tester although described, the IC terminal that the tester of the type uses probe visit to form on semiconductor transistor elements, but the those skilled in the art should recognize, the present invention can be used for making the IC tester to the interface equipment of the DUT terminal access of IC of providing of other type, terminal can still form in the first rank of crystalline substance, or its brilliant unit separation from forming, in test, it can encapsulate, and can not encapsulate.These interface equipment are drawn together and are not limited to load board, burn attached plate and last test plate.The present invention its most wide aspect on be not the application of tester-DUT interconnect system or any specific type IC DUT that expectation is limited to the IC tester that comprises any specific type, any specific type.The those skilled in the art should also be clear that, although the present invention recited above is the test that is used for about integrated circuit, but it also can be at the electron device of test any kind of, for example test trigger assembly, circuit boards etc. use when the power input terminal voltage expectation of test period device is accurately adjusted at any time.

Therefore, although preferred embodiment of the present invention has been described in the explanation of front, the those skilled in the art can do many modifications to preferred embodiment not deviating under the prerequisite of the present invention aspect wide.Thereby claims are that expectation covers all these modifications that belong to true scope of the present invention and spirit.

Claims

1, a kind of use test device to test process for semiconductor devices, it may further comprise the steps:

Create the demand history of expectation input demand at the power terminal place of semiconductor equipment, described demand history is associated with the cycle tests of described semiconductor equipment in time;

Test described semiconductor equipment according to described cycle tests; And

According to described test record power supply is provided to described semiconductor equipment at described test period, the wherein said power supply that provides comprises:

Generation is provided to first power supply of the described power terminal of described semiconductor equipment; And

Optionally produce the second source of the described power terminal that is provided to described semiconductor equipment according to described demand history, provide simultaneously so that described second source increases with the expectation of described power terminal place electric current demand in fact.

2, method according to claim 1, the wherein said power supply that provides comprises that the described demand history of use is to adjust the action of described proving installation.

3, method according to claim 1, the wherein said power supply that provides comprises that further the generation time signal offers the amount of described second source of the described power terminal of described semiconductor equipment with adjusting.

4, method according to claim 1 wherein produces described demand history and comprises signal application to reference to semiconductor equipment, and according to the described power supply requirement with reference to semiconductor equipment of time measurement.

5, method according to claim 1 wherein produces described demand history and comprises power supply requirement according to the described semiconductor equipment of time simulation.

6, method according to claim 1, wherein said generation second source comprise being associated on the time with the test loop of described cycle tests provides described second source to described semiconductor equipment.

7, method according to claim 1, the wherein said voltage that is input as.

8, method according to claim 1, the wherein said power supply that is input as.

9, method according to claim 1, the wherein said electric current that is input as.

10, method according to claim 1, wherein said test comprises the use probe.

11, a kind of proving installation that is used for semiconductor equipment, it comprises:

The demand history device, it is used to be recorded in the demand history of expectation input demand at the power terminal place of semiconductor equipment, and described demand history is associated with the cycle tests of described semiconductor equipment in time;

Probe, it is configured according to described cycle tests and carries out the described semiconductor equipment of test; And

Power source means, it is used for according to described test record power supply being provided to described semiconductor equipment, and wherein said power source means comprises:

Primary power, it is used for power supply is provided to the described power terminal of described semiconductor equipment; And

Auxilliary power supply, it is used for according to described demand history accessory power supply being provided to described power terminal, provides simultaneously so that described accessory power supply increases with the expectation of described power terminal place electric current demand in fact.

12, device according to claim 11, wherein said auxilliary power supply is arranged on the described probe.

Provide power supply to comprise and use described demand history to adjust the action of described proving installation.

13, a kind of being used for provides electric current to the device of test component (DUT), and described device comprises:

The primary power entry terminal, it is used to receive first electric current;

The power supply outlet terminal, it is used to be connected to described DUT;

Trace, it is used for described primary power entry terminal is connected to described power supply outlet terminal;

Auxilliary power supply entry terminal, it is used to receive second electric current;

Be connected to the blocking capacitor of described trace;

Induction pick-up, it is connected to described power supply outlet terminal to detect electric current; And

Amplifier, it is used for providing electric current to described power supply outlet terminal, and described amplifier is connected to described auxilliary power supply by the input control that receives from described induction pick-up power supply is provided to described power supply outlet terminal.

14, device according to claim 13, wherein said auxilliary power supply replenish described first electric current through controlling after at least one edge of the clock signal that drives described DUT.

15, device according to claim 13, wherein

Described blocking capacitor is connected to ground from described trace; And

Described induction pick-up comprises that the coupling mechanism of connection is to measure the electric current by described blocking capacitor.

16, device according to claim 13, wherein

Described blocking capacitor is connected to ground from described trace; And

Described induction pick-up comprises that the coupling mechanism of connection is to measure the electric current by described trace.

17, device according to claim 16, it further comprises a probe, described probe supports described power supply entry terminal, described power supply outlet terminal, described trace, described auxilliary power supply entry terminal, described blocking capacitor, described induction pick-up and described amplifier.

18, device according to claim 17, wherein said power supply outlet terminal comprises the spring probe contact on the described probe, it is used to be connected to the liner on the described DUT.

19, pass through the DUT of the described device to test of claim 18.

20, a kind of being used for provides electric current to the device of test component (DUT), and described device comprises:

The primary power entry terminal, it is used to receive first electric current;

The power supply outlet terminal, it is used to be connected to described DUT;

Resistor, it has first terminal that is connected to described power supply entry terminal and second terminal that is connected to described power supply outlet terminal;

Current impulse generation circuit, it has the output that is connected to described power supply outlet terminal, and power supply and the control entry terminal that provides from described auxilliary power supply entry terminal is provided described current impulse generation circuit; And

Feedback circuit, it has the amplitude of the electric current that the input that is connected to described current impulse generation circuit provides with described output place of controlling described current impulse generation circuit, and described feedback circuit has the input that is connected to described power supply outlet terminal.

21, device according to claim 20, wherein said control entry terminal is connected to the test opertaing device, and the pulse that provides from described current impulse generation circuit is provided after at least one edge of the clock signal that drives described DUT.

22, device according to claim 20, wherein said feedback circuit comprises integrator.

23, device according to claim 20, wherein said feedback circuit comprises:

Switch, it has switch control terminal, the common terminal that forms described control entry terminal, the second switch terminal that is connected to first switch terminal on ground and is connected to the power supply control terminal;

Amplifier, the input of the described common terminal that it has the output that is connected to the power supply outlet terminal, be connected to described switch and be connected to the power supply input of described auxilliary power terminal.

24, device according to claim 23, the described power supply control terminal of wherein said switch is connected to digital-analog convertor.

25, device according to claim 20, it further comprises probe, described probe supports described power supply entry terminal, described power supply outlet terminal, described resistor, described auxilliary power supply entry terminal, described current impulse generation circuit and described feedback circuit.

26, device according to claim 25, wherein said power supply entry terminal comprises the spring probe contact on the described probe, it is used to be connected to the liner on the described DUT.

27, a kind of being used for provides electric current to the device of semiconductor test device (DUT), and described device comprises:

The power supply entry terminal, it is used to receive power supply signal; And

Adjust member, it is used to be adjusted at the voltage of amplitude to show in response to power supply outlet terminal place of the signal that power supply entry terminal place receives, provide to described power supply outlet terminal with signal, provide described power supply outlet terminal to be used for the connection of described DUT with described adjustment;

Wherein said amplitude is set to premeasuring proportional, will increase the demand of the electric current at its power supply outlet terminal place after the clock edge of the signal that described DUT receives by described like this semiconductor equipment.