CN101092965A - Molecular pump - Google Patents
Molecular pump Download PDFInfo
- Publication number
- CN101092965A CN101092965A CN 200710142863 CN200710142863A CN101092965A CN 101092965 A CN101092965 A CN 101092965A CN 200710142863 CN200710142863 CN 200710142863 CN 200710142863 A CN200710142863 A CN 200710142863A CN 101092965 A CN101092965 A CN 101092965A
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- moving vane
- teeth
- molecular pump
- leaf
- vane
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- Non-Positive Displacement Air Blowers (AREA)
Abstract
This invention relates to a molecular pump including a motor, a dynamic impeller, static blades, a main shaft of the motor, a pump shell, a pump chassis and a ventilation port characterizing that the dynamic impeller is directly connected to the main shaft of the motor and composed of serial dynamic blades forming dynamic blades of a suction stage and a compression stage to be staggered with the static blades, the internal and external of the teeth of which are integral rings and the inner diameter of the outer ring is smaller or equal to the outer diameter of the dynamic blades, the last stage blades of the molecular pump are static fixed on the shell and the chassis, the number of the suction stage blades is larger or equal to 1 and that of the compression stage is larger or equal to 2.
Description
Technical field
The present invention relates to a kind of mechanical device relevant with fluid, refer in particular to a kind of vacuum pump, more specifically say, the present invention is a kind of molecular pump, and in International Patent Classification (IPC), the present invention should be divided into F portion.
Background technique
At present, with regard to the kind of molecular pump blade, be divided into the system turned round substantially and mill system two classes.Compare with milled blade, under the condition of same diameter, angle and speed, turn round the system blade and lack variable how much, and the intensity of fan-shaped blade face root is relatively poor.Whole milled blade is subjected to the restriction of machining tool also to be difficult to select best geometrical shape, and processing cost is quite high.In addition, for guaranteeing the molecular pump safe operation, the moving vane of pump will have certain radial clearance with the pump inwall, and it is also gapped between the leaf-teeth of the alternate staggered stator blade of moving vane and leaf-teeth, and the axial passage that forms thus causes gas molecule to backflow easily, thereby is difficult to reach desirable ideal vacuum.
Summary of the invention
The objective of the invention is to,, provide reasonable in design, intensity height and long service life, have and improve pumping speed and compression ratio, can suppress a kind of molecular pump that gas molecule axially backflows at the deficiency of prior art.
The objective of the invention is to be achieved through the following technical solutions:
Described molecular pump comprises electric machine assembly 1, movable vane wheel assembly 2, stator blade 4, electric machine main shaft 5, pump case 6, pump chassis 7 and relief opening 8.Main feature is:
Described movable vane wheel assembly 2 direct connections are on described electric machine main shaft 5.
Described movable vane wheel assembly 2 is composed in series by moving vane 3, and constitutes bleed grade moving vane and compression stage moving vane respectively from top to bottom.
Described moving vane 3 is staggered with described stator blade 4.
The inside and outside end of the leaf-teeth of described stator blade 4 is integral ring-shaped, and its outer ring internal diameter is less than or equal to the external diameter of described moving vane 3.
The exhaust stage blade of described molecular pump is a stator blade 4.
Described stator blade 4 is fixed on described pump case 6 and the pump chassis 7.
Quantity 〉=1 of the described grade moving vane of bleeding grade; The quantity of described compression stage moving vane 〉=2 grade.
The described grade moving vane of bleeding is the moving vane of Wedging cross section leaf-teeth; Described compression stage moving vane is the moving vane of step type variable cross section leaf-teeth, and the thickness of described step type variable cross section leaf-teeth is thickening step by step from outside to inside.
The quantity of the described grade moving vane of bleeding is 3 grades; The quantity of described compression stage moving vane is 8 grades.
The step place of described step type variable cross section leaf-teeth is cambered surface or plane.
Numbers of steps 〉=2 of described step type variable cross section leaf-teeth.
Described numbers of steps equals 3, and its thickness is respectively 0.1cm, 0.2cm, 0.3cm from outside to inside.
Described compression stage moving vane is the moving vane of rectangle leaf-teeth.
The quantity of the moving vane of described rectangle leaf-teeth is 10 grades.
Because the present invention adopted above-mentioned technological scheme, structural design of the present invention is quite reasonable, particularly about the design of bleed grade moving vane and compression stage moving vane, makes its its intensity and greatly improves working life, and improved pumping speed and compression ratio.In addition, because the inside and outside end of the leaf-teeth of stator blade 4 is integral ring-shaped, its outer ring internal diameter is less than or equal to the external diameter of moving vane 3, make the axial passage that causes backflowing have the cross section, because the effect of optics sealing has successfully stopped axially backflowing of gas molecule, degree of vacuum and pumping speed have been improved.Moreover, because the exhaust stage blade of described molecular pump is a stator blade, not only broken prejudice in the past, and its better effects if.
Description of drawings
The present invention will be described below in conjunction with accompanying drawing, wherein:
Accompanying drawing 1 for the carrying out of one embodiment of the invention the general assembly drawing of broken section.
Accompanying drawing 2 is the moving vane structural representation with Wedging cross section leaf-teeth of one embodiment of the invention.
Accompanying drawing 3 is the moving vane structural representation with step type variable cross section leaf-teeth of one embodiment of the invention.
Accompanying drawing 4 is the moving vane structural representation with rectangle leaf-teeth of one embodiment of the invention.
Accompanying drawing 5 is the stator blade structural representation of one embodiment of the invention.
Embodiment
The present invention is further described below in conjunction with drawings and Examples, wherein: accompanying drawing 1 for the carrying out of one embodiment of the invention the general assembly drawing of broken section.From accompanying drawing, can see: 1 electric machine assembly, 2 movable vane wheel assemblies, 3 moving vanes, 4 stator blades, 5 electric machine main shafts, 6 pump cases, 7 pump chassis and relief opening 8.Described movable vane wheel assembly 2 direct connections are on described electric machine main shaft 5, and described movable vane wheel assembly 2 is composed in series by moving vane 3, and constitute bleed grade moving vane and compression stage moving vane respectively from top to bottom.Described moving vane 3 is staggered with described stator blade 4.The inside and outside end of the leaf-teeth of described stator blade 4 is integral ring-shaped, and its outer ring internal diameter is less than or equal to the external diameter of described moving vane 3, because the effect of optics sealing has successfully stopped axially backflowing of gas molecule.The exhaust stage blade of described molecular pump is a stator blade 4.Described stator blade 4 is fixed on described pump case 6 and the pump chassis 7.Say quantity 〉=1 of the described grade moving vane of bleeding grade in principle; The quantity of described compression stage moving vane 〉=2 grade; In specific embodiment, decide according to actual conditions.During concrete work, opening power, motor driving movable vane wheel assembly 2 runs up, and dynamic and static blade relative movement forces gas molecule to flow to relief opening 8 step by step from the end of bleeding of pump, thereby produces the effect of bleeding.The situation of a specific embodiment of brief now narration: movable vane wheel assembly 2 direct connections are on described electric machine main shaft 5, and moving vane 3 tandem compounds are formed the level of bleeding by the moving vane (as shown in Figure 2) of Wedging cross section leaf-teeth, and present embodiment is chosen as 3 grades; Moving vane (as shown in Figure 3) by step type variable cross section leaf-teeth is composed in series compression stage, and present embodiment is chosen as 8 grades; The number of steps of the leaf-teeth of step type variable cross section moving vane is decided according to the length of leaf-teeth, generally speaking, numbers of steps 〉=2 of step type variable cross section leaf-teeth, this embodiment is chosen as 3; The thickness of described step type variable cross section leaf-teeth is thickening step by step from outside to inside, and present embodiment its thickness from outside to inside is respectively 0.1cm, 0.2cm, 0.3cm.In addition, considerablely be: the step place of described step type variable cross section leaf-teeth can be cambered surface or plane, and present embodiment is chosen as cambered surface, because its intensity greatly improves.Moreover in the present embodiment, the exhaust stage blade of described molecular pump is a stator blade, and stator blade is fixed on pump case and the pump chassis, why break the normal procedure and do so to select, and be because remarkably productive.
In another embodiment, be on the basis of the foregoing description, the moving vane with step type variable cross section leaf-teeth with the compression stage series connection changes the moving vane with rectangle leaf-teeth into, and present embodiment is chosen as 10 grades.
In specific design with in making, design parameters such as the progression of molecular pump sound blade, the length of blade leaf-teeth, angle and leaf-teeth number are decided according to needed degree of vacuum.
Reasonable in design of the present invention, intensity height and long service life have big pumping speed and compression ratio, can suppress gas molecule and axially backflow.
Claims (9)
1. molecular pump, described molecular pump comprises electric machine assembly (1), movable vane wheel assembly (2), stator blade (4), electric machine main shaft (5), pump case (6), pump chassis (7) and relief opening (8); It is characterized in that:
Described movable vane wheel assembly (2) direct connection is on described electric machine main shaft (5);
Described movable vane wheel assembly (2) is composed in series by moving vane (3), and constitutes bleed grade moving vane and compression stage moving vane respectively from top to bottom;
Described moving vane (3) is staggered with described stator blade (4);
The inside and outside end of the leaf-teeth of described stator blade (4) is integral ring-shaped, and its outer ring internal diameter is less than or equal to the external diameter of described moving vane (3);
The exhaust stage blade of described molecular pump is stator blade (4);
Described stator blade (4) is fixed on described pump case (6) and the pump chassis (7).
2. molecular pump according to claim 1 is characterized in that:
Quantity 〉=1 of the described grade moving vane of bleeding grade; The quantity of described compression stage moving vane 〉=2 grade.
3. molecular pump according to claim 1 is characterized in that:
The described grade moving vane of bleeding is the moving vane of Wedging cross section leaf-teeth; Described compression stage moving vane is the moving vane of step type variable cross section leaf-teeth, and the thickness of described step type variable cross section leaf-teeth is thickening step by step from outside to inside.
4. according to claim 2 or 3 described molecular pumps, it is characterized in that:
The quantity of the described grade moving vane of bleeding is 3 grades; The quantity of described compression stage moving vane is 8 grades.
5. molecular pump according to claim 3 is characterized in that:
The step place of described step type variable cross section leaf-teeth is cambered surface or plane.
6. molecular pump according to claim 3 is characterized in that:
Numbers of steps 〉=2 of described step type variable cross section leaf-teeth.
7. molecular pump according to claim 6 is characterized in that:
Described numbers of steps equals 3, and its thickness is respectively 0.1cm, 0.2cm, 0.3cm from outside to inside.
8. molecular pump according to claim 1 is characterized in that:
Described compression stage moving vane is the moving vane of rectangle leaf-teeth.
9. molecular pump according to claim 8 is characterized in that:
The quantity of the moving vane of described rectangle leaf-teeth is 10 grades.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200710142863 CN101092965A (en) | 2007-08-01 | 2007-08-01 | Molecular pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200710142863 CN101092965A (en) | 2007-08-01 | 2007-08-01 | Molecular pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101092965A true CN101092965A (en) | 2007-12-26 |
Family
ID=38991362
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200710142863 Pending CN101092965A (en) | 2007-08-01 | 2007-08-01 | Molecular pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101092965A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106151067A (en) * | 2015-05-15 | 2016-11-23 | 普发真空有限公司 | The rotor of vacuum pump |
-
2007
- 2007-08-01 CN CN 200710142863 patent/CN101092965A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106151067A (en) * | 2015-05-15 | 2016-11-23 | 普发真空有限公司 | The rotor of vacuum pump |
| CN106151067B (en) * | 2015-05-15 | 2018-10-30 | 普发真空有限公司 | The rotor of vacuum pump |
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| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |