CN101080608A - Visual inspection device and method - Google Patents

Visual inspection device and method Download PDF

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Publication number
CN101080608A
CN101080608A CNA2006800014370A CN200680001437A CN101080608A CN 101080608 A CN101080608 A CN 101080608A CN A2006800014370 A CNA2006800014370 A CN A2006800014370A CN 200680001437 A CN200680001437 A CN 200680001437A CN 101080608 A CN101080608 A CN 101080608A
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mentioned
focal point
rotating mirror
scanning
polygonal rotating
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CN100541115C (en
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小野裕司
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Panasonic Holdings Corp
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Matsushita Electric Industrial Co Ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G01N21/8903—Optical details; Scanning details using a multiple detector array
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces

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  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Textile Engineering (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

A rotary polygon mirror (11) is constituted such that the condensing point of a scanning light flux is deviated in a sub-scanning direction (Y) as it rotates at an isogonal speed and an angle formed between the rotation axis (11b) and a mirror plane differs from one mirror plane to another, a condensing point position forming optical system (2, 17) is constituted such that the condensing point moves within an inspection range Zr in a height direction Z, and an object of inspection (3) is moved in a sub-scanning direction so that the condensing point deviated in the sub-scanning direction and the height direction in synchronization with the isogonal-speed rotation of the rotary polygon mirror is scanned linearly in the height direction of the object of inspection to complete XYZ scanning, whereby the positional coordinates of the appearance of the object of inspection are obtained by a confocal method to perform visual inspection.

Description

Appearance inspection device and method
Technical field
The present invention relates to check the appearance inspection device and the method for object, more specifically relate to pointolite light (irradiates light) such as laser are formed with optical system by the focal position with polygon mirror (below be called polygonal rotating mirror) and scanning collector lens and shine the inspection object and then it is carried out rectilinear scanning, by checking forming with optical system reflected light by the minute surface institute deflection (deflection) of polygonal rotating mirror via the focal position (fall to penetrating reflected light: light intensity incident reflected light) being by opto-electronic conversion of object reflection, try to achieve the position coordinates of outward appearance according to confocal ratio juris, thus the device that the outward appearance of checking object is checked.
Relate in particular to a kind of when checking the visual examination of object at a high speed, because the confocal relation of variable inspection object in based on the rectilinear scanning action of the rotation of polygonal rotating mirror, therefore need not optical system or inspection object are moved on short transverse, just realize checking the high speed inspection of object with simple structure.
Background technology
In the past,, roughly be divided into two kinds of methods as the method that three-dimensional shape is measured and checked in the mode of geometrical optics: with various optical projections behind object, the method that its reflected light is measured and checked with photodetector; With under natural light or general illumination, object is measured with camera and according to the relevant method that three-dimensional shape is tried to achieve and checked between a plurality of images from a plurality of directions.
And, the kind of the former projecting method by light, photodetector and between position relation etc. be divided into a plurality of types again, just like the catoptrical spot condition that detects confocal optical system such shown in Figure 11 A, and find out focus and overlap position (focus point: focal position) obtain to check the elevation information of object and the mode checked in these classification.
Irradiates light from light source 101 ejaculations in Figure 11 A just penetrates along direction of illumination to inspection object 103 shown in dot-and-dash line like that, and sees through light splitting mirror 104, and passes through the focal point Pa of collector lens 121 on inspection object 103 by optically focused.Check in the reflected light that the focal point Pa on the surface of object 103 reflected, incide collector lens 121 once more along the reflected light that direction reflected (falling to penetrating reflected light) opposite with direction of illumination, and by light splitting mirror 104 along and the direction reflection of direction of illumination quadrature incide reflected light collector lens 105, and in the micro hole of shield 106, form behind the focal point Qa micro hole by shield 106 via reflected light collector lens 105, incide photodetector 107, light intensity is photoelectric conversion signal output Ia by photodetector 107 opto-electronic conversion.Here, the focal point Qa of the focal point Pa of irradiates light collector lens 121 and reflected light collector lens 105 (micro hole of shield 106 just) optically satisfies confocal relation.
When checking that object 103 is from irradiates light focal point Pa mobile amount of movement z and when being positioned at the position of checking object 103-1 on direction of illumination, reflected light by the surface reflection of checking object 103-1 is just shown in dotted line, and catoptrical focal point moves to the some Qa-1 that leaves along near the direction of reflected light collector lens 105 from a Qa.Therefore, it is big that the size of the catoptrical picture on the shield 106 becomes, thereby pass through the light quantity minimizing of the micro hole of shield 106 by the reflected light of reflected light collector lens 105 optically focused, and the photoelectric conversion signal output Ia of photodetector 107 is reduced.
Figure 11 B represents to check the relation between the photoelectric conversion signal output Ia of the amount of movement za of object 103 and photodetector 107.Photoelectric conversion signal output Ia becomes maximum on the reflection spot of the checking object 103 za=0 position consistent with irradiates light focal point Pa, if from za be 0 away from photoelectric conversion signal export Ia and diminish.Promptly, check that by making object 103 goes up and move in direction of illumination or the direction opposite with direction of illumination (below be called the Z direction), try to achieve photoelectric conversion signal output Ia and be maximum amount of movement za, thereby obtain checking that the elevation information of object 103 in irradiates light focal point Pa carries out visual examination.
In Figure 11 A, represented only to move the example of the mode of checking object 103, if but the focal point Pa of change irradiates light and check the position (below be called Z scanning) of the Z direction of object 103 then obtains same effect.Obviously, promptly fix object 103 and the mode that optical system is all moved checked, have equal effect with the mode that only moves inspection object 103 as this Z scan mode.Figure 12 A and Figure 12 B represent the Z scan mode beyond these modes.
Figure 12 A represents by irradiates light collector lens 121 in the optical system is moved on the Z direction, and irradiates light focal point Pa is moved to a Pa-1, realizes the mode of Z scanning.This mode approaches at the irradiates light that incides irradiates light collector lens 121 under the situation of directional light effectively, because mobile thing only is an irradiates light collector lens 121, and irradiates light collector lens 121 is very light usually, therefore can realize measuring at a high speed and mechanism simplifying (for example with reference to patent documentation 1).
Figure 12 B is illustrated in irradiates light collector lens 121 and checks that inserting thickness between the object 103 is that ta, refractive index are n n Parallel glass 110, and make irradiates light collector lens 121 and check that optical range da between the object 103 changes and makes irradiates light focal point Pa move to Pa-2, realizes the mode of Z scanning.In this mode, according to by high speed rotating, realizing the high speed (for example with reference to patent documentation 2) of Z scanning with checking disk that the mode of inserting the different a plurality of parallel glass of thickness or refractive index between the object 103 successively disposes described a plurality of parallel glass thus at irradiates light collector lens 121.
In addition, after coming the reflected light of self-check object 103 to carry out shunt by a plurality of smooth splitting mirror 104, by pressing each shunt reflected light at the different position of the distance of distance reflected light collector lens 105 set a plurality of shields 106 and photodetector 107, each along separate routes catoptrical photoelectric conversion signal output Ia is measured simultaneously, form and the equal optical system of Z scan mode, thereby (for example can save the required time of Z scanning, or the time that makes inspection object 103 move or irradiates light collector lens 121 is moved), also can realize Z scanning (for example with reference to patent documentation 3) more at a high speed.
Like this, in confocal method,, can obtain elevation information at the inspection object 103 of irradiates light focal point Pa by carrying out Z scanning.Have again, by make check object 103 with Z direction quadrature and mutually orthogonal directions X and Y direction on move, will be to the position of the irradiates light focal point Pa that checks object 103 change on the directions X (below be called X scanning), simultaneously will be to the position of the irradiates light focal point Pa that checks object 103 change on the Y direction (below be called Y scanning), the spatial coordinate (position coordinates) of object 3 can be obtained to check thus, and then its outward appearance (for example with reference to patent documentation 1) can be checked.Certainly, fixing inspection object 103 also all moves optical system on directions X and Y direction, perhaps, make and check that object 103 moves and optical system is all moved at directions X or Y direction, can obtain to check the position coordinates of object 103 too and then check outward appearance on directions X or Y direction.
As realizing that X scans and the method for the high speed of Y scanning, having the new optical system that irradiates light is scanned is set in above-mentioned optical system, realizes the mode (for example with reference to patent documentation 4) of X scanning and Y scanning.Also have in addition and in measuring optical system, arrange a plurality of confocal optical systems that constitute by light source 101～photodetector 107, carry out the mode (for example with reference to patent documentation 5) that multiple spot is measured simultaneously with the XY clathrate.
Patent documentation 1: the spy opens clear 62-245949 communique;
Patent documentation 2: the spy opens flat 9-126739 communique;
Patent documentation 3: the spy opens flat 5-40035 communique;
Patent documentation 4: the spy opens flat 3-231105 communique;
Patent documentation 5: the spy opens flat 9-257440 communique.
But, in existing structure, independently mode is adopted respectively in XY scanning and Z scanning, if will realize XY scanning and Z scanning simultaneously in order to realize high speed, then exist number of components increase and structure to become complicated, cost rises thus, reliability reduces, the problem of size maximization.
Summary of the invention
The present invention is in order to solve existing problem, and its purpose is to provide a kind of by be fit into (Group み Write む in the XY scanning mechanism) Z scanning, just with the appearance inspection device and the method for the high speed of simple mechanism realization visual examination.
The present invention is constructed as follows in order to achieve the above object.
According to first form of the present invention, a kind of appearance inspection device is provided, it is characterized in that possessing: the light source of outgoing beam; Polygonal rotating mirror, at least have 3 minute surfaces at peripheral part, by disposing in the rotatable mode of constant angular velocity around turning axle, to checking object deflection, above-mentioned light beam is scanned via above-mentioned each minute surface above-mentioned light beam that above-mentioned light source is emitted on main scanning direction with linearity by above-mentioned rotation; The focal point position forms uses optical system, when the rotation by above-mentioned polygonal rotating mirror makes above-mentioned light beam by above-mentioned each minute surface institute deflection scanning of above-mentioned polygonal rotating mirror at focal point optically focused, make above-mentioned focal point with the examination scope of the short transverse of the above-mentioned direction of scanning quadrature of above-mentioned inspection object in move; Photodetector, with catoptrical light intensity opto-electronic conversion is photoelectric conversion signal output, this catoptrical light intensity is to form with after the optical system by above-mentioned focal point position, forming the usefulness optical system and, depending on the distance between above-mentioned focal point and the above-mentioned light beam reflection spot in above-mentioned inspection object by the reflection of above-mentioned inspection object by the catoptrical light intensity of the above-mentioned deflection mirror surface of above-mentioned polygonal rotating mirror via above-mentioned focal point position; Check the object mobile device, synchronous with the rotation of the above-mentioned constant angular velocity of above-mentioned polygonal rotating mirror, make above-mentioned inspection object with the sub scanning direction of above-mentioned main scanning direction and above-mentioned short transverse quadrature on move; And operational part, based on the above-mentioned catoptrical above-mentioned photoelectric conversion signal output of being undertaken by above-mentioned photodetector after the opto-electronic conversion, try to achieve the position coordinates of the outward appearance of above-mentioned inspection object, carry out the visual examination of above-mentioned inspection object, above-mentioned polygonal rotating mirror is constituted as: the mode that departs from above-mentioned sub scanning direction according to the above-mentioned focal point of the above-mentioned light beam along with the rotation of above-mentioned constant angular velocity, making the turning axle of this polygonal rotating mirror is that mirror angle is different by each minute surface with the formed angle of above-mentioned minute surface, above-mentioned inspection object mobile device is constituted as: according to carry out with above-mentioned constant angular velocity at above-mentioned polygonal rotating mirror a rotation during, in the above-mentioned examination scope of above-mentioned short transverse, move with optical system by the formation of above-mentioned focal point position, and the above-mentioned focal point that on above-mentioned sub scanning direction, departs from by above-mentioned each minute surface, the mode that on the above-mentioned short transverse of above-mentioned inspection object, is scanned with linearity, above-mentioned inspection object is moved on above-mentioned sub scanning direction, and above-mentioned polygonal rotating mirror begins to carry out another rotation with above-mentioned constant angular velocity before, above-mentioned inspection object is moved, make the visual examination of being carried out of moving of above-mentioned focal point in the above-mentioned examination scope of the scanning of linearity of above-mentioned main scanning direction and above-mentioned short transverse, carrying out with the visual examination of above-mentioned polygonal rotating mirror in an above-mentioned rotation different part on above-mentioned inspection object.
According to second form of the present invention, provide as the described appearance inspection device of first form, it is characterized in that, above-mentioned focal point position forms possesses the scanning collector lens with optical system, its optical axis disposes according to the mode that tilts with respect to the direction with the above-mentioned rotating shaft direct cross of above-mentioned polygonal rotating mirror, and make above-mentioned light beam by above-mentioned each minute surface institute deflection scanning of above-mentioned polygonal rotating mirror at above-mentioned focal point optically focused, above-mentioned focal point moves with linearity on above-mentioned main scanning direction, and moves in the above-mentioned examination scope of above-mentioned short transverse.
According to the 3rd form of the present invention, provide as the described appearance inspection device of first form, it is characterized in that, above-mentioned focal point position forms uses optical system, possess: the scanning collector lens, its optical axis disposes according to the mode that is parallel to the direction of the above-mentioned rotating shaft direct cross of above-mentioned polygonal rotating mirror, and makes above-mentioned light beam by above-mentioned each minute surface institute deflection scanning of above-mentioned polygonal rotating mirror at above-mentioned focal point optically focused; And prism, between above-mentioned scanning collector lens and above-mentioned inspection object, the mode that is parallel to above-mentioned main scanning direction according to the plane of incidence and outgoing plane disposes, and penetrate from above-mentioned outgoing plane after making the refraction of optical beam of above-mentioned plane of incidence institute incident, light beam by above-mentioned scanning collector lens is from the above-mentioned plane of incidence incident of above-mentioned prism, be refracted the back and penetrate from above-mentioned outgoing plane, above-mentioned focal point move with linearity on the above-mentioned main scanning direction and above-mentioned examination scope in above-mentioned short transverse in move.
According to the 4th form of the present invention, provide as the described appearance inspection device of first form, it is characterized in that, also possesses data store, store above-mentioned polygonal rotating mirror carry out at least a rotation during, above-mentioned catoptrical above-mentioned photoelectric conversion signal output from above-mentioned photodetector output, above-mentioned operational part is based on the above-mentioned photoelectric conversion signal output of being stored in above-mentioned data store, try to achieve above-mentioned inspection object above-mentioned short transverse the position and try to achieve the position coordinates of the outward appearance of above-mentioned inspection object, and carry out the visual examination of above-mentioned inspection object.
According to the 5th form of the present invention, a kind of appearance inspection method is provided, it is characterized in that, at least have three minute surfaces and be that mirror angle is by the different polygonal rotating mirror that mode was constituted of each minute surface at peripheral part with turning axle and the formed angle of above-mentioned minute surface, rotate with constant angular velocity around above-mentioned turning axle, and make the light beam that penetrates to above-mentioned minute surface from light source towards checking object deflection, and on main scanning direction, scan with linearity, in above-mentioned deflection scanning, will be by the above-mentioned light beam of above-mentioned each minute surface institute deflection scanning of above-mentioned polygonal rotating mirror during when forming at focal point optically focused with optical system by the focal point position, make above-mentioned focal point with the examination scope of the short transverse of the above-mentioned main scanning direction quadrature of above-mentioned inspection object in move, and according to by different above-mentioned each minute surface of above-mentioned mirror angle with the sub scanning direction of above-mentioned main scanning direction and above-mentioned short transverse quadrature on the above-mentioned focal point that departs from, the mode that on the above-mentioned short transverse of above-mentioned inspection object, is scanned with linearity, above-mentioned inspection object is moved on above-mentioned sub scanning direction, reflected by the above-mentioned inspection object that on above-mentioned sub scanning direction, moves, via above-mentioned focal point position formation optical system, catoptrical light intensity by the above-mentioned deflection mirror surface of above-mentioned polygonal rotating mirror, promptly depend on the light intensity of the distance between the reflection spot of above-mentioned inspection object of above-mentioned focal point and above-mentioned light beam, by opto-electronic conversion is photoelectric conversion signal output, try to achieve the position coordinates of the outward appearance of above-mentioned inspection object based on above-mentioned photoelectric conversion signal output, carry out the visual examination of above-mentioned inspection object thus, then, above-mentioned polygonal rotating mirror begins to carry out another rotation with above-mentioned constant angular velocity before, above-mentioned inspection object is moved, then, above-mentioned focal point in the above-mentioned examination scope of the scanning of the linearity of above-mentioned main scanning direction and above-mentioned short transverse move the visual examination of being carried out, carrying out with the visual examination of above-mentioned polygonal rotating mirror in an above-mentioned rotation different part on above-mentioned inspection object.
According to the 6th form of the present invention, provide as the described appearance inspection method of the 5th form, it is characterized in that, in above-mentioned deflection scanning, above-mentioned focal point position forms with optical system by being used to constitute, and the scanning collector lens that optical axis disposes according to the mode that tilts with respect to the direction with the above-mentioned rotating shaft direct cross of above-mentioned polygonal rotating mirror, make above-mentioned light beam by above-mentioned each minute surface institute deflection scanning of above-mentioned polygonal rotating mirror at above-mentioned focal point optically focused, and according to above-mentioned focal point move with linearity on the above-mentioned direction of scanning and above-mentioned examination scope in above-mentioned short transverse in the mode that moves carry out optically focused.
According to the 7th form of the present invention, provide as the described appearance inspection method of the 5th form, it is characterized in that, in above-mentioned deflection scanning, above-mentioned focal point position forms with optical system by being used to constitute, and the scanning collector lens that optical axis disposes according to the mode that is parallel to the direction of the above-mentioned rotating shaft direct cross of above-mentioned polygonal rotating mirror, make above-mentioned light beam optically focused on above-mentioned focal point by above-mentioned each minute surface institute deflection scanning of above-mentioned polygonal rotating mirror, above-mentioned focal point position forms with optical system by being used to constitute, and the prism that the plane of incidence and outgoing plane dispose in the mode that is parallel to above-mentioned main scanning direction between above-mentioned scanning collector lens and above-mentioned inspection object, by the above-mentioned light beam behind the above-mentioned scanning collector lens, above-mentioned plane of incidence incident from above-mentioned prism, be refracted the back and penetrate from above-mentioned outgoing plane, according to above-mentioned focal point move with linearity on the above-mentioned main scanning direction and above-mentioned examination scope in above-mentioned short transverse in the mode that moves carry out optically focused.
The invention effect
According to the of the present invention first or the 5th form, polygonal rotating mirror is constituted as the mode that the focal point according to the scanning light beam along with the rotation of constant angular velocity departs from sub scanning direction, making the turning axle of this polygonal rotating mirror is that mirror angle is different by each minute surface with the formed angle of minute surface, and constitute focal point position formation optical system according to the mode that the examination scope that makes above-mentioned focal point in short transverse moves, according to synchronous with the rotation of the constant angular velocity of above-mentioned polygonal rotating mirror, the above-mentioned focal point that on sub scanning direction, departs from when in the above-mentioned examination scope of above-mentioned short transverse, moving, the mode that on the above-mentioned short transverse of above-mentioned inspection object, is scanned with linearity, above-mentioned inspection object is moved on above-mentioned sub scanning direction, therefore at above-mentioned inspection object, can be in the spinning movement of polygonal rotating mirror, carry out the scanning (X scanning) of main scanning direction by a minute surface, in a rotation of above-mentioned polygonal rotating mirror, switch the scanning (Z scanning) of carrying out short transverse by above-mentioned each minute surface that above-mentioned mirror angle is different, while make above-mentioned polygonal rotating mirror rotation repeatedly the carrying out scanning (Y scanning) of sub scanning direction on sub scanning direction by above-mentioned inspection object is moved.That is, the Z that can pack in XY scanning mechanism scanning can utilize aforesaid simple mechanism to realize the high speed of visual examination.
In addition, when checking the visual examination of object by first form of the present invention, try to achieve the position coordinates of the outward appearance of checking object 3 by above-mentioned operational part, be that 2 points (are tried to achieve on the position coordinates of three-dimensional appearance and needed 2 points at least for example at main scanning direction, but on raising X resolving power, be preferably more than 3), at sub scanning direction is that 2 points (are tried to achieve on the position coordinates of three-dimensional appearance and needed 2 points at least, but on raising Y resolving power, be preferably more than 3), with be that 3 points (depend on the minute surface number of polygonal rotating mirror in short transverse, minimum is 3 faces) so altogether (2 * 2 * 3=) 12 points, thus can carry out stereoscopic examination to the outward appearance of checking object.
Correspondence therewith, in patent documentation 1, scan in order to carry out Z, need be different with the driving mechanism that is used to carry out XY scanning, make the irradiates light collector lens go up the driving mechanism that moves in short transverse (Z direction), in addition, if the irradiates light collector lens is moved on short transverse, vibration etc. then takes place when it stops, and might make and check that precision reduces.According to the of the present invention first or the 5th form, because therefore the driving mechanism that does not need to make irradiates light collector lens etc. to move on short transverse can prevent to check that precision reduces.
In addition, in patent documentation 3,, a plurality of smooth splitting mirror, shield and photodetector need be set respectively in order to carry out Z scanning.According to the of the present invention first or the 5th form,, therefore suppress the increase that parts are counted, and then prevent the rising of cost, the maximization of size because light splitting mirror, shield and photodetector need only each one respectively.
Description of drawings
Figure 1A is the schematic isometric of the structure of the optical system of the appearance inspection device of expression in first embodiment of the present invention and train of mechanism;
Figure 1B is the local amplification stereogram of Figure 1A;
Fig. 2 is the synoptic diagram of structure of the optical system of appearance inspection device from observed first embodiment of the present invention of sub scanning direction and method;
Fig. 3 A is the appearance inspection device of explanation in first embodiment of the present invention and the figure of the effect of the mirror angle of the polygonal rotating mirror of method;
Fig. 3 B is the appearance inspection device of explanation in first embodiment of the present invention and the figure of the effect that angle is set of the scanning collector lens of method;
Fig. 4 A is the side view of variation of mirror angle of the polygonal rotating mirror of the appearance inspection device of expression in first embodiment of the present invention;
Fig. 4 B is the cut-open view of variation of mirror angle of the polygonal rotating mirror of the appearance inspection device of expression in first embodiment of the present invention;
Fig. 4 C is the stereographic map of shape example of the polygonal rotating mirror of the appearance inspection device of expression in first embodiment of the present invention;
Fig. 5 A is appearance inspection device and the irradiates light focal point of the method side view that with minute surface change of expression in first embodiment of the present invention;
Fig. 5 B is appearance inspection device and the irradiates light focal point of the method stereographic map that with minute surface change of expression in first embodiment of the present invention;
Fig. 6 A be the appearance inspection device of expression in first embodiment of the present invention, be used for conveying action and data processing schematic isometric that describe, structure to sub scanning direction;
Fig. 6 B is the partial enlarged drawing of Fig. 6 A;
Fig. 7 A be expression in first embodiment of the present invention appearance inspection device and method pass through the figure of control of operational throughput that the worktable conveying device is transported to the inspection object of sub scanning direction position;
Fig. 7 B is the appearance inspection device of expression in first embodiment of the present invention and the figure to the principle of the YZ scanning of checking object of method;
Fig. 8 A is the synoptic diagram of memory contents of the data store of appearance inspection device in first embodiment of the present invention and method;
Fig. 8 B is the appearance inspection device of expression in first embodiment of the present invention and the figure of the principle of the operational method of the outward appearance position coordinates operational part of method;
Fig. 8 C is the appearance inspection device of expression in first embodiment of the present invention and the figure to an example of the YZ scanning of checking object of method;
Fig. 8 D is the appearance inspection device of expression in first embodiment of the present invention and the synoptic diagram of an example of the memory contents of the data store of method;
Fig. 8 E is the appearance inspection device of expression in first embodiment of the present invention and the figure of an example of the operational method of the outward appearance position coordinates operational part of method;
Fig. 9 A is the synoptic diagram of structure of the optical system of appearance inspection device from observed second embodiment of the present invention of sub scanning direction and method;
Fig. 9 B is the synoptic diagram of structure of the optical system of appearance inspection device from observed second embodiment of the present invention of main scanning direction and method;
Figure 10 A is the appearance inspection device of explanation in second embodiment of the present invention and the figure of the effect of the rectangular prism of method;
Figure 10 B is the appearance inspection device of explanation in second embodiment of the present invention and the figure that moves of the caused irradiates light focal point of rectangular prism of method;
Figure 11 A is the structural drawing of optical system of the appearance inspection device of existing confocal method;
Figure 11 B is the photoelectric conversion signal output I of the photodetector 7 in the appearance inspection device of the existing confocal method of expression and the figure of the position relation of checking object;
Figure 12 A is the figure of the example 1 (moving of collector lens) of the Z scanning in the appearance inspection device of the existing confocal method of expression;
Figure 12 B is the figure of the example 2 (insertion of parallel glass) of the Z scanning in the appearance inspection device of the existing confocal method of expression.
Embodiment
Before proceeding description of the invention, in the accompanying drawings same parts is marked identical reference marks.
Below, be described with reference to the accompanying drawings the appearance inspection device and the method for embodiments of the present invention.
" first embodiment "
Figure 1A is the schematic isometric of the optical system of the appearance inspection device in the expression first embodiment of the present invention structure relevant with train of mechanism, and Figure 1B is the local amplification stereogram that Figure 1A of object 3 is checked in expression.In addition, Fig. 2 is the synoptic diagram from the observed identical optical of sub scanning direction system.
At first adopt Figure 1A and Figure 1B that the basic structure of the appearance inspection device in first embodiment of the present invention is described.
Appearance inspection device in first embodiment of the present invention possesses: light source 1, polygonal rotating mirror 11, motor 11a, to constitute a example that the focal point position forms scanning collector lens 2 with an example of optical system, light splitting mirror 4, reflected light collector lens 5, shield 6, photodetector 7, inspection object mobile device be that an example of worktable conveying device 12, storage part is data store 13, operational part 14, efferent 15 and control part 16.
Light source 1 for example penetrates as irradiates light light beams such as laser to polygonal rotating mirror 11.
Polygonal rotating mirror 11 is constituted as: have mirror angle different a plurality of minute surface 11c (reflecting surface) mutually at the formed peripheral part of shape with polygonal cylinder (for example hexagonal cylinder), and rotatable with constant angular velocity by motor 11a along a direction.Polygonal rotating mirror 11 is constituted as: the irradiates light that can make light source 1 by each minute surface 11c is partial to towards (short transverse Z (direction that makes progress of the above-below direction of Fig. 1) check object 3 (electronic unit of for example, installing or be used for bonded substrate and the grease scolder of electronic unit (cream solder)) on substrate and along (downward direction of the above-below direction of Fig. 1) in the other direction).
Scanning collector lens 2 is configured in polygonal rotating mirror 11 and checks between the object 3, make the irradiates light of being partial to by polygonal rotating mirror 11 check on the object 3 near some P optically focused (the following irradiates light that polygonal rotating mirror 11 is partial to is called the irradiates light focal point by the focal point that scans collector lens 2 optically focused).
Light splitting mirror 4 has rectangular plate shape, and be configured between light source 1 and the polygonal rotating mirror 11, will by scanning collector lens 2 check on the object 3 near optically focused, again by check object 3 along short transverse Z reflection against advancing and turn back to the reflected light of light source 1 in above-mentioned irradiates light path, from the irradiates light of light source 1, separate just from the exposure pathways of the irradiates light of light source 1 and break away from, and incide discoid reflected light collector lens 5.
Reflected light after reflected light collector lens 5 makes and separated by light splitting mirror 4 is concentrated near the shield 6 formed micro hole of rectangular plate shape.
Photodetector 7 will the catoptrical light intensity opto-electronic conversion of incident be photoelectric conversion signal output I by the micro hole of shield 6.
Worktable conveying device 12 possesses: according to the driving shaft 12a that disposes along the mode of extending with the sub scanning direction Y of short transverse Z and main scanning direction X quadrature; What engage with driving shaft 12a screw passes through the positive and negative nut member 12b that can advance and retreat mobile on the driving shaft 12a that is rotated in; Be fixed in nut member 12b and check the worktable 12c of the rectangular plate shape that the substrate 3A of object 3 can keep being used for mounting; With the drive motor 12d that makes the positive and negative rotation of driving shaft 12a.Worktable conveying device 12 constitutes: driven by 16 couples of drive motor 12d of control part and make the positive and negative rotation of driving shaft 12a, and nut member 12b and the worktable 12c that is fixed in nut member 12b retire movingly in that the Y direction is enterprising, make thus and check that object 3 can advance and retreat mobile on the Y direction.
Control part 16 is connected with light source 1, photodetector 7, motor 11a, drive motor 12d and data store 13, based on the operation program of in data store 13, storing in advance, the driving of light source 1, photodetector 7, motor 11a and drive motor 12d is controlled.
The operation program of data store 13 each device of storage is also stored the catoptrical photoelectric conversion signal output I of 7 opto-electronic conversion of photodetector and output simultaneously.
Operational part 14 possesses the extraction unit 14a that is connected with data store 13, the outward appearance position coordinates operational part 14b that is connected with extraction unit 14a, and constitute:, try to achieve the position coordinates of the outward appearance of checking object 3 based on the catoptrical photoelectric conversion signal output I that in data store 13, is stored.
Efferent 15 for example is made of display, and is connected with outward appearance position coordinates operational part 14b, and output shows the position coordinates of the outward appearance of the inspection object 3 that is calculated by outward appearance position coordinates operational part 14b.
Appearance inspection device in first embodiment of the present invention adopts such as mentioned above basic structure.
Below, the detailed structure of the appearance inspection device in first embodiment of the present invention is described with action.
In Figure 1A, Figure 1B and Fig. 2, at first by control part 16 controlling and driving from light source 1 outgoing beam.,, incide scanning collector lens 2 and penetrate after the minute surface 11c deflection by polygonal rotating mirror (polygon mirror) 11 as the emitted light beam of irradiates light from light source 1 as the optically focused light beam, become check on the object 3 near the scanning light beam of some P optically focused.Here, light beam from light source 1 ejaculation, by rotation by the polygonal rotating mirror 11 of control part 16 controlling and driving, and the angle of the scanning light beam that incides scanning collector lens 2 is changed, and irradiates light focal point P moves continuously with an an a P1～P2～P3, thereby to checking that object 3 is scanning (below be called X scanning) with linearity on the main scanning direction X.Shine check object 3 by reflected light (falling to penetrating reflected light) in the reflected light of checking object 3 reflections, short transverse Z (also can be called the scanning light beam direction), advance with the rightabout path of scanning light beam towards polygonal rotating mirror 11 edges by scanning collector lens 2, with after scanning light beam separates, arrive photodetector 7 by light splitting mirror 4 via the confocal optical system same (reflected light lens 5 and shield 6) with conventional example.Like this, by making polygonal rotating mirror 11 rotation, can obtain according to falling to penetrating the photoelectric conversion signal output I that catoptrical light intensity is tried to achieve by photodetector 7 on the scanning straight line of checking object 3.
At this moment, control part 16, synchronous with the rotation of polygonal rotating mirror 11, driving to the drive motor 12d of worktable conveying device 12 is controlled, and makes the inspection object 3 that kept by worktable 12c go up and move with the direction of the two direction quadratures of main scanning direction X and short transverse Z (below be called sub scanning direction Y).
In addition, the rotational speed of polygonal rotating mirror 11 is generally constant, for the translational speed (sweep velocity) of the scanning light beam that makes main scanning direction X becomes at the uniform velocity, change x as the scanning collector lens 2 general angle changing θ (twice of the angle changing δ of the angle of deviation that polygonal rotating mirror 11 is produced) of incident angle as shown in Figure 2 and the scanning positions of adopting dBetween relation to satisfy with the focal distance f be the straight line proportionate relationship (x of scale-up factor d=f * θ: be called " f θ characteristic ") f θ lens.To scan collector lens 2 below in this first embodiment and be made as f θ lens.In Fig. 2, put down in writing some P2 near the central authorities between a P1 and the P3, but putting P2 is positioned on the optional position of the sweep limit from P1 to a P3 as an example.
Fig. 3 A and Fig. 3 B are the figure of the optical system from observed first embodiment example of main scanning direction X, and the effect that optical system produced is described.
In Fig. 3 A as the minute surface 11c of polygonal rotating mirror 11 and the formed angle λ of turning axle 11b of polygonal rotating mirror 11 (below be called mirror angle λ) during for λ=α/2, the light beam of the light source 1 of being partial to by the reflecting surface of polygonal rotating mirror 11, with the perpendicular formed angle, plane of the turning axle 11b of polygonal rotating mirror 11 be α, its result, check the f θ characteristic of the spot position of the scanning light beam in the object 3 by scanning collector lens 2, the irradiates light focal point P that becomes with respect to α=0 o'clock has departed from y along sub scanning direction Y like that shown in the dot-and-dash line of Fig. 3 A dThe point P-2 of=f * α.Have again, shown in Fig. 3 B, when the optical axis of scanning collector lens 2 is β with the formed angle, plane that is orthogonal to the turning axle 11b of polygonal rotating mirror 11, because the scanning optically focused plane of collector lens 2 and the formed angle of turning axle 11b of polygonal rotating mirror 11 become β, so irradiates light focal point P Y on sub scanning direction that the irradiates light focal point of scanning light beam becomes with respect to α=β=0 o'clock has departed from y d=f * α, on short transverse Z, departed from z dThe point P-1 of=f * α * tan (β).Even the rotation angle of the mirror angle λ of polygonal rotating mirror 11 polygonal rotating mirror 11 in scanning with identical minute surface 11c changes also constant, therefore at any main scanning direction position x DJThe deviation z of short transverse Z dBe constant.That is,, utilize the mirror angle λ of polygonal rotating mirror 11, can make relative inspection object 3 and the formed scanning straight line of track of the irradiates light focal point P of scanning light beam all departs from short transverse Z by the structure of this optical system.
Effect when Fig. 4 A～Fig. 4 C represents that each mirror angle λ to polygonal rotating mirror 11 changes.Shown in Fig. 4 A, if the mirror angle λ of the polygonal rotating mirror 11 with n minute surface 11c is changed in advance by each minute surface 11c, then can be in a rotation of polygonal rotating mirror 11 with the short transverse position z of irradiates light focal point P DiChange n time.That is, based on mirror angle λ i(=α i/ 2) the first minute surface 11c iThe sub scanning direction position y of the sweep trace of (i is the numbering of minute surface arbitrarily among n, the integer among 1～n) DiWith short transverse position z DiBecome y respectively Di=f * α iAnd z Di=f * α i* tan (β) is by a rotation of polygonal rotating mirror 11, sub scanning direction position y DiWith short transverse position z DiChange n time, wherein i=1～n.That is,, can implement X scanning and YZ scanning simultaneously to checking object 3 by the rotation of polygonal rotating mirror 11.
Fig. 4 C represents that shape example, the minute surface number as such polygonal rotating mirror 11 is 6 faces (in other words, minute surface numbering i is), each mirror angle λ at 1～6 o'clock i(=α i/ 2) stereographic map under the situation about increasing pro rata with minute surface numbering i.Simultaneously, as a comparative example the mirror angle λ of polygonal rotating mirror 11z be 0 (promptly because and rotating shaft parallel, therefore become the hexagonal cylinder) situation represent with two dot-and-dash lines.Polygonal rotating mirror 11 is such shown in Fig. 4 C, from the first minute surface 11c 1To the 6th minute surface 11c 6The angle of its minute surface 11c gradually changes, the first minute surface 11c in Fig. 4 C 1～the three minute surface 11c 3Be downward, the 4th minute surface 11c 4～the six minute surface 11c 6For making progress.Because each minute surface 11c is the plane, therefore the cross section of triangle having been made up two is arranged, especially the first minute surface 11c on the border with adjacent mirror facets 1With the 6th minute surface 11c 6The differential seat angle maximum, therefore, it is maximum that the cross section on border also becomes.That is, if will be except that the first minute surface 11c 1With the 6th minute surface 11c 6Between differential seat angle between outer adjacent mirror facets be made as d λ, each mirror angle λ then iFor being shown below.
λ i＝(i-3.5)×dλ
Here, i is 1～6 a integer as minute surface numbering, the first minute surface 11c 1Mirror angle λ 1Become-2.5 * d λ the 6th minute surface 11c 6Mirror angle λ 6Become+2.5 * d λ the first minute surface 11c 1With the 6th minute surface 11c 6Differential seat angle be-5 * d λ.
Below, if there is not special usage, polygonal rotating mirror 11 is described as the shape shown in Fig. 4 C (the minute surface number is 6, angle is changed to d λ and constant between adjacent surface).
In addition, as long as the minute surface number of polygonal rotating mirror 11 is minimum 3, but the minute surface number is many more, can increase the sampling that is used for making irradiates light focal point P depart from the position coordinates of the visual examination of checking object 3 on main scanning direction X more counts, and then can improve the visual examination precision, therefore preferred.
In addition, in above-mentioned according to the angle of minute surface 11c from the first minute surface 11c 1To the 6th minute surface 11c 6The mode that gradually changes, for example according to the angle of minute surface 11c with+1 ° ,+0.5 °, 0 ° ,-0.5 ° ,-1 ° mode that changes has constituted polygonal rotating mirror 11, but the present invention is not limited thereto.For example, according to mirror angle with+1 ° ,-0.5 °, 0 ° ,-1 ° ,+mode of 0.5 ° of random variation constitutes, and also can obtain the effect identical with said structure.
Below, adopt Fig. 5 A and Fig. 5 B, expression is based on the state of YZ scanning rotation, sweep trace of polygonal rotating mirror 11 in detail.Fig. 5 A be with Fig. 3 B similarly from the observed figure of main scanning direction X.In addition, move from the first minute surface 11c according to the deflection of the light beam that makes light source 1 here 1The mode that begins to carry out is controlled by the rotation driving of 16 pairs of polygonal rotating mirrors 11 of control part.Polygonal rotating mirror 11 is pressed from the first minute surface 11c by carrying out a rotation 1To the 6th minute surface 11c 6Order, make from the light beam of light source 1 deflection.
If make minute surface 11c from the light beam deflection of the light source 1 of polygonal rotating mirror 11 by the spinning movement of polygonal rotating mirror 11 by the first minute surface 11c 1～the six minute surface 11c 6Change, then the position of irradiates light focal point is with a Px 1～Px 6Change five times (in addition, the some P shown in Fig. 5 A is that mirror angle λ is 0 irradiates light focal point when just the minute surface 11c of polygonal rotating mirror 11 is parallel to turning axle 11b).Point Px 1～Px 6And some P is positioned on the face of the plane vertical with scanning light beam 31 angulation β, and some P is the intersection point with plane 31.Here, plane 31 is planes (virtual inspection reference field) of passing the centre (for example central authorities) with respect to the examination scope Zr that checks 3 predefined short transverse Z of object.For to checking all checking of object 3, the examination scope Zr of short transverse Z is preferably set to from the position that is higher than the topmost of checking object 3 identical or lower than the foot position of foot with inspection object 3.
Because the mirror angle λ of rotating mirror 11 iShown in Fig. 4 C, increase pro rata like that with minute surface numbering i, so the sub scanning direction position y from a P to each irradiates light focal point DiWith short transverse position z DiBe respectively following formula.
y di＝f×α i＝(i-3.5)×f×dα
z di＝f×α i×tan(β)＝(i-3.5)×f×dα×tan(β)
In addition, because d α=2 * d λ is a steady state value, so the sub scanning direction position y of each irradiates light focal point DiWith short transverse position z DiI changes pro rata with the minute surface numbering, and its change interval is constant and sub scanning direction Y is that f * d α, short transverse Z is f * d α * tan (β).
Fig. 5 B represents the stereographic map with the same state of Fig. 5 A.Wherein, in order to represent the rectilinear scanning action based on the spinning movement of polygonal rotating mirror 11, the irradiates light focal point during with the scanning beginning is made as P1 i, the irradiates light focal point during with the end of scan is made as P3 i(i is face numbering and i=1～6).That is the some Px among Fig. 5 A, 1Some P1 among the presentation graphs 5B 1～P3 1Between rectilinear scanning in the track of irradiates light focal point all, some Px 2～Px 6(still, some P represents the track of irradiates light focal point of the rectilinear scanning of an a P1～P3 as mentioned above like that) too.
Below, then the position of explanation by the irradiates light focal point that rotation took place of polygonal rotating mirror 11 through the time change.
At first, if pass through the rotation of polygonal rotating mirror 11, the light beam of light source 1 begins by the first minute surface 11c 1Reflection is then at a P1 1Begin scanning, to some P3 1Till carry out rectilinear scanning.Then, by the rotation of polygonal rotating mirror 11, the face that will be used for the light beam of reflection source 1 switches to the second minute surface 11c 2, then at a P1 2Begin scanning and arrive a some P3 2Till carry out rectilinear scanning.Below, if the reflecting surface of the light beam of light source 1 is changed to the 3rd minute surface 11c by the rotation of polygonal rotating mirror 11 3～the four minute surface 11c 6, then the irradiates light focal point also is changed to from a P1 3To a P3 3, from a P1 4To a P3 4, from a P1 5To a P3 5, from a P1 6To a P3 6Here, in Fig. 5 B with solid arrow represent from a P1 3To a P3 3, from a P1 4To P3 4, the some P1 5To a P3 5Expression is by the rectilinear scanning of being carried out of moving of irradiates light focal point.The point P3 that in Fig. 5 B, represents with dash-dot arrows 3With a P1 4Between, the some P3 4With a P1 5Between, the some P3 5With a P1 6Between the expression irradiates light focal point non-existent state state that just do not carry out rectilinear scanning.
Have again, if polygonal rotating mirror 11 carries out a rotation with the reflecting surface of the light beam of light source 1 by the 6th minute surface 11c 6Switch to the first minute surface 11c 1, the light beam of light source 1 is once more by the first minute surface 11c 1Reflect and begin and scan, then from a P3 6, the some P1 1Rise to a P3 1, the some P1 2Change, from a P1 1The beginning to have scanned and repeat to carry out and above-mentioned same action of beginning.Like this, by a rotation of polygonal rotating mirror 11, the irradiates light focal point is from P1 1～P3 6Till move, rotate continuously by polygonal rotating mirror 11, to a P1 1～P3 6Same paths carry out multiple scanning.
In addition, from irradiates light focal point P1 as the scanning starting point 1The state of polygonal rotating mirror 11 rise polygonal rotating mirror 11 be further rotated, the angle changing δ of the angle of deviation of the minute surface 11c of polygonal rotating mirror 11 changes, the change in location that the light beam of the light source 1 of the polygonal rotating mirror 11 on the same minute surface 11c is reflected just is when the irradiates light focal point becomes P2 1The time, the change interval of main scanning direction X is (for example, from a P1 1To a P1 2Till distance) x d, become x according to the f θ characteristic that scans collector lens 2 like that as mentioned above d=f * 2 * δ=f * θ.θ represents the angle changing of incident angle in addition, θ=2 * δ.
As mentioned above, the angle λ of each minute surface 11c by the polygonal rotating mirror shown in Fig. 4 C 11 constitutes different, can be by the light beam of a minute surface 11c reflection source 1, and make the main scanning direction position x of irradiates light focal point DiChange, and then implement rectilinear scanning (X scanning), and by making polygonal rotating mirror 11 rotate the minute surface 11c that switches the light beam that is used for reflection source 1, make sub scanning direction position y DiWith short transverse position z DiChange and just can implement two kinds of scannings (YZ scanning) simultaneously.
Then, adopt Fig. 6 A and Fig. 6 B, conveying action and the data processing of the sub scanning direction Y of the inspection object 3 of the appearance inspection device in first embodiment of the present invention described.Fig. 6 A is conveying action and schematic isometric data processing, structure appearance inspection device, that be used to illustrate the sub scanning direction Y that checks object 3 in expression first embodiment of the present invention.Fig. 6 B is that part amplification stereogram object 3, Fig. 6 A is checked in expression.
Control part 16, driving to the drive motor 12a of worktable conveying device 12 is controlled, begin synchronously with the scanning of each minute surface 11c of polygonal rotating mirror 11, make driving shaft 12a rotation and nut member 12b and the worktable 12c that is fixed in nut member 12b are moved on sub scanning direction Y, the inspection object 3 on the substrate 3A that is kept by worktable 12c is moved on sub scanning direction Y.In addition, control part 16 scanning light beam to check object 3 carry out rectilinear scanning during, with the main scanning direction position x of scanning light beam DiBecome the time interval of constant interval, with the photoelectric conversion signal of photodetector 7 output I of polygonal rotating mirror 11 more than the rotation amount during (that is some P1, 1～P3 6Scan period), store data store 13 into.In addition, control part 16 is extracted the photoelectric conversion signal output I of the photodetector of being stored 7 in data store 13 by extraction unit 14a, based on the photoelectric conversion signal of the photodetector 7 that is extracted by extraction unit 12a output I, by 14 computings of outward appearance position coordinates operational part and try to achieve the position coordinates of the outward appearance of checking object 3.
Then, use Fig. 7 A and Fig. 7 B, to describing to the control of the operational throughput of sub scanning direction Y conveying inspection object 3 and the principle that scans at the YZ that checks object 3 by worktable conveying device 12.In Fig. 7 A, in once (one) rotation of the polygonal rotating mirror 11c with six minute surface 11c, the sub scanning direction position y of sweep trace DiAs mentioned above like that with y D1, y D2... y D6Change 5 times.At this moment, synchronous if make the operational throughput Yt of worktable conveying device 12 with scanning motion based on each minute surface 11c of polygonal rotating mirror 11, change sub scanning direction position y with sweep trace DiThe identical value of variable quantity, then at checking object 3, sweep trace is always about sub scanning direction position y Di, always scan identical position.Promptly, the irradiates light focal point is under the state that worktable conveying device 12 stops, shown in Fig. 7 A, (on the downward direction that is tilted to the right of Fig. 7 A) scans on the direction of close inspection object 3 along with trend sub scanning direction Y, if but will check that by worktable conveying device 12 object 3 carries on sub scanning direction Y, then shown in Fig. 7 B, (downward direction of Fig. 7 B) enterprising line scanning on the direction opposite with short transverse Z.The such sub scanning direction position y when the minute surface 11c of the light beam deflection of the light source 1 that is used to make polygonal rotating mirror 11 switches as mentioned above DiIncrement be f * d α and constant, if therefore operational throughput Yt also by constant delta f * d α with Yt 1～Yt 6Change five times, then check object 3 also from the position of checking object 3-1 to the change in location of checking object 3-6.On the other hand, the short transverse position z of the irradiates light focal point of sweep trace DiAs mentioned above like that with z D1, z D2... z D6Change five times by constant interval f * d α * tan (β).
As mentioned above, control by operational throughput Yt to worktable conveying device 12, make polygonal rotating mirror 11 rotation once during, at checking that object 3 changes the irradiates light focal point according to the mode parallel with short transverse Z, realizes Z scanning.
In addition, if the drive motor 12a of worktable conveying device 12 and the motor 11a of rotation driving mirror 11 are further driven synchronously, then polygonal rotating mirror 11 enters rotation for the second time.That is, polygonal rotating mirror 11 presses the light beam of light source 1 from the first minute surface 11c 1To the 6th minute surface 11c 6Order reflect successively, once more by the first minute surface 11c 1Reflection time, worktable conveying device 12 with constant delivery at interval f * d α will check that object 3 carries on sub scanning direction Y.Thus, check that object 3 is positioned at the position of checking object 3-7, the irradiates light focal point is positioned at short transverse position z on short transverse Z D1That is, the irradiates light focal point is from short transverse position z D1To height direction position z D6Till change, changing to short transverse position z once more D1Till during, worktable conveying device 12 makes checks that object 3 moves with sweep spacing Yp (=Y definition)=6 * f * d α on sub scanning direction Y, thereby moves to the position of checking object 3-7 from the position of checking object 3-1.
Fig. 7 B represent by this polygonal rotating mirror 11 and worktable conveying device 12 control action took place, to the short transverse Z of the irradiates light focal point of the sweep trace of checking object 3 and the variation of sub scanning direction Y.
In addition, in Fig. 7 B, the substrate that a plurality of electronic units (rake of Fig. 7 B) will be installed is expressed as checks object 3.To the examination scope Zr of the short transverse Z that checks object 3, be preferably set to the uppermost position that is higher than the highest electronic unit from a plurality of electronic units as mentioned above like that to being same as the foot of checking object 3 or the position lower than foot.Thereby, in Fig. 7 B, will put Px 11, the some Px 12Point Px 15Be set in the position higher, and will put Px than electronic unit 61, the some Px 62Point Px 65Be set in the position lower than substrate.
In addition, black circle is represented the focal point by the scanning light beam of scanning collector lens 2 actual optically focused in Fig. 7 B, dashdotted white circle represent by scanning light beam before scanning collector lens 2 optically focused by the surface reflection of checking object 3 the virtual focal point of optically focused not in fact.
The first minute surface 11c from polygonal rotating mirror 11 1Rise in the rotation first time of beginning, the irradiates light focal point on sub scanning direction Y with identical position from a Px 11～Px 61Till, short transverse position z DiWith z D1～z D6Change five times and carry out Z scanning.Have again, begin the first minute surface 11c if polygonal rotating mirror 11 is rotated once more 1Scanning, sub scanning direction position y then DiOn the direction opposite, change Yp, thereby the irradiates light focal point is with Px with sub scanning direction Y 12～Px 62Change, carry out Z scanning.Below, similarly, when polygonal rotating mirror 11 every rotations one time, sub scanning direction position y DiYp changes at certain intervals.That is, at checking object 3, Yp realizes Y scanning at certain intervals when polygonal rotating mirror 11 every rotations one time.
That is, in the appearance inspection device and method of this first embodiment, can in the spinning movement of polygonal rotating mirror 11, scan checking object 3 with minute surface scanning a carrying out X; The a plurality of minute surface 11cs different by mirror angle λ switch in the once rotation of polygonal rotating mirror 11, carry out Z scanning; By checking that while making object 3 mobile polygonal rotating mirror 11 that makes on sub scanning direction Y rotates repeatedly, carries out Y scanning.
In addition, the light beam that penetrates from light source 1 changes with the examination scope Zr of the short transverse Z that checks object 3 at the hot spot footpath d that shines the moment of checking object 3.The light intensity of the light beam that penetrates from light source 1 is Gaussian distribution (normal distribution), and when wavelength was λ a, examination scope Zr and spot radius d roughly satisfied the relation of following formula.
Zr＝π/4÷λa×d 2
For example, when wavelength X a is 600nm, can enumerate hot spot footpath d and examination scope Zr such as (d, Zr)=(30 μ m, 1.2mm), (10 μ m, 131 μ m), (5 μ m, 32.7 μ m), (1 μ m, 1.31 μ m).For example, when checking object 3 when being coated on a plurality of grease scolder of substrate, the examination scope Zr of short transverse Z is preferably set to from the uppermost position that is higher than the maximum oil fat scolder among a plurality of grease scolders to identical with substrate or lower than substrate position.In this case, because the thickness of grease scolder mostly is about 0.2mm most, therefore as long as hot spot footpath d is set at 15 μ m, examination scope Zr is set at about 0.3mm.
But above-mentioned is is theoretical value all the time, as long as set best setting value according to the intensity distributions of light beam or the reflective condition of inspection object 3.
Next, by Fig. 8 A and Fig. 8 B the principle of the operational method of trying to achieve the elevation information of checking object 3 is described, this elevation information is the same sub scanning direction position y according to the inspection object 3 in the once rotation of polygonal rotating mirror 11 DiIn, incide by X scanning and Z scanning and via the reflected light of confocal optical system (reflected light lens 5 and shield 6) that luminous point switching signal output I that photodetector 7 obtained tries to achieve.
Fig. 8 A is the figure that schematically shows the memory contents of photoelectric conversion signal output I in the data store 13, photodetector 7.
Data store 13 is constituted as: the rotation of a minute surface 11c by polygonal rotating mirror 11 carry out to the X scanning of checking object 3 in, with main scanning direction position x DjBecome certain intervals (=X resolving power) such sampling interval, the photoelectric conversion signal of photodetector 7 is exported I (i, j) store m by the control of control part 16.Here, if j is made as sampling numbering (j=1～m, m are integer), then the main scanning direction position x of directions X DjBe x D1, x D2..., x Dm
In addition, data store 13, the once rotation of the polygonal rotating mirror 11 by having six minute surface 11c will be checked the same sub scanning direction position y of object 3 Di, the short transverse position z of irradiates light focal point DiAfter changing five times, that photoelectric conversion signal output I (i, the j) storage 6 * m of photodetector 7 is individual.In other words, because minute surface numbering i is 1～6, if therefore at sub scanning direction position Y D1～Y D6Till scan, then the photoelectric conversion signal of photodetector 7 output I (i, j) is stored 6 * m * 6 in data store 13.
In addition, in Fig. 8 A, by the broken line chart that short dot-and-dash line connects, expression is based on the first minute surface 11c for the photoelectric conversion signal of photodetector 7 output I (1,1)～I (1, m) 1The light intensity of scanning light beam.In addition, by the broken line chart that long dot-and-dash line connects, expression is based on the second minute surface 11c for the photoelectric conversion signal of photodetector 7 output I (2,1)～I (2, m) 2Scanning light beam at main scanning direction position x DjLight intensity.By the broken line chart that solid line connects, expression is based on the 6th minute surface 11c for the photoelectric conversion signal of photodetector 7 output I (6,1)～I (6, m) 6Scanning light beam at main scanning direction position x DjLight intensity.
Fig. 8 B be schematically show in the operational part 14, try to achieve at each main scanning direction position x according to data store 13 corresponding a 6 * m of rotation amount the photoelectric conversion signals output I (i, j) with polygonal rotating mirror 11 that stored DjMensuration height z MjDisposal route.
Main scanning direction position x D1The distribution of six photoelectric conversion signals output I (1,1)～I (6,1) of photodetector 7 owing to check the main scanning direction position x of object 3 DjWith sub scanning direction position y DiBecome the photoelectric conversion signal output I that is produced by Z scanning at identical point, thus according to confocal method principle, shown in the dot-and-dash line of the length of Fig. 8 B like that, become with main scanning direction position x D1The short transverse position z of the immediate irradiates light focal point of height Z1 of inspection object 3 D2Photoelectric conversion signal output I be the curve of maximum.The extraction unit 14a of operational part 14 extracts this becomes maximum short transverse position z D2As measuring height z M1
Main scanning direction position x D2The distribution of photoelectric conversion signal output I (1,2)～I (4,2) of photodetector 7 owing to check the main scanning direction position x of object 3 DjWith sub scanning direction position y DiBecome the photoelectric conversion signal output I that is produced by Z scanning at identical point, therefore according to confocal method principle, shown in the dot-and-dash line of the weak point of Fig. 8 B like that, become with main scanning direction position x D2The short transverse position z of the immediate irradiates light focal point of height Z2 of inspection object 3 D1Photoelectric conversion signal output I be the curve of maximum.The extraction unit 14a of operational part 14 extracts this becomes maximum short transverse position z D1As measuring height z M2
Main scanning direction position x D3The distribution of photoelectric conversion signal output I (2,3)～I (6,3) of photodetector 7 owing to check the main scanning direction position x of object 3 DjWith sub scanning direction position y DiBecome the photoelectric conversion signal output I that is produced by Z scanning at identical point, therefore according to confocal method principle, shown in the dot-and-dash line of the length of Fig. 8 B like that, become with main scanning direction position x D3The short transverse position z of the immediate irradiates light focal point of height Z3 of inspection object 3 D4Photoelectric conversion signal output I be the curve of maximum.The extraction unit 14a of operational part 14 extracts this becomes maximum short transverse position z D4As measuring height z M3
Below, similarly by being extracted in each main scanning direction position x DjEach measure height z Mj, can obtain to check the elevation information on the sweep trace of object 3.
Next, adopt Fig. 2, Fig. 8 C～Fig. 8 E, the operational method of trying to achieve the elevation information of checking object 3 is described in detail.Here.The electronic unit of installing at substrate 3A is as shown in Figure 2 described as inspection object 3.Fig. 8 C is expression to the figure of an example of the XZ scanning of checking object 3, and Fig. 8 D is the synoptic diagram of an example of the memory contents of expression data store 13, and Fig. 8 E is the figure of an example of the budget method of expression outward appearance position coordinates operational part 14b.
In addition, black circle is represented the focal point by the scanning light beam of scanning collector lens 2 actual optically focused in Fig. 8 C, dashdotted white circle be illustrated in by scanning light beam before scanning collector lens 2 optically focused by the surface reflection of checking object 3 the virtual focal point of optically focused not in fact.That is, scanning light beam is z in the short transverse position in Fig. 8 C D4, the main scanning direction position is x D2And x D3The time, be z in the short transverse position D2, the main scanning direction position is x D2And x D3The time, be z in the short transverse position D6, the main scanning direction position is x D1～x DmThe time, before by scanning collector lens 2 optically focused by the surface reflection of checking object 3.
In addition, in Fig. 8 C at short transverse position z D1X scanning utilize the first minute surface 11c of polygonal rotating mirror 2 1Carry out, at short transverse position z D2X scanning utilize the second minute surface 11c 2Carry out, at short transverse position z D3～z D6X scanning utilize the second minute surface 11c 2～the six minute surface 11c 6Carry out.
What photodetector 7 was subjected to light (reception) falls to penetrating catoptrical light intensity, if by the scanning light beam of scanning collector lens 2 optically focused more near focal point by checking object 3 reflections, then strong more.Promptly, in Fig. 8 C when being subjected to light intensity 1, photodetector 7 be subjected to light to fall to penetrating catoptrical light intensity the strongest, and more away from being subjected to light intensity 1, just become more and be subjected to light intensity 2, be subjected to light intensity 3 ..., photodetector 7 suffered light to fall to penetrating catoptrical light intensity just weak more.
Thereby, for example at main scanning direction position x D3On, at short transverse position z D1To be subjected to light intensity 3 optically focused, at short transverse position z D2Be subjected to light intensity 2 optically focused, at short transverse z D3Being subjected to light intensity 1 optically focused, thereby form the focal point of scanning light beam.Yet, normally at short transverse position z D4Be subjected to light intensity 1 optically focused, at short transverse position z D5Be subjected to light intensity 2 optically focused, at short transverse position z D6To be subjected to light intensity 3 optically focused, still actually,, therefore become the focal point of virtual scanning light beam because scanning light beam is reflected respectively by the surface of checking object 3.
Fig. 8 D is the photoelectric conversion signal output I and the main scanning direction position x that are subjected to light intensity 1～obtained by photodetector 7 opto-electronic conversion shown in the presentation graphs 8C DjBetween the figure of relation.In Fig. 8 D, the long dot-and-dash line that connects photoelectric conversion signal output I (1, the 1)～I (1, m) of photodetector 7 is represented based on the first minute surface 11c 1Scanning light beam at main scanning direction position x DjLight intensity.In addition, the short dot-and-dash line that connects photoelectric conversion signal output I (2, the 1)～I (2, m) of photodetector 7 is represented based on the second minute surface 11c 2Scanning light beam at main scanning direction position x DjLight intensity.In addition, a dot-and-dash line that connects photoelectric conversion signal output I (3, the 1)～I (3, m) of photodetector 7 is represented based on the 3rd minute surface 11c 3Scanning light beam at main scanning direction position x DjLight intensity.In addition, two dot-and-dash lines that connect photoelectric conversion signal output I (4, the 1)～I (4, m) of photodetector 7 are represented based on the 4th minute surface 11c 4Scanning light beam at main scanning direction position x DjLight intensity.In addition, the straight line that connects photoelectric conversion signal output I (5, the 1)～I (5, m) of photodetector 7 is represented based on the 5th minute surface 11c 5Scanning light beam at main scanning direction position x DjLight intensity.In addition, the thick straight line that connects photoelectric conversion signal output I (6, the 1)～I (6, m) of photodetector 7 is represented based on the 6th minute surface 11c 6Scanning light beam at main scanning direction position x DjLight intensity.
Fig. 8 E is by each main scanning direction position x DjTo at each short transverse position z DiPhotoelectric conversion signal output I carry out mark, and the figure that this mark is connected by level and smooth curve.In Fig. 8 E, represent main scanning direction position x with leg-of-mutton mark D1The time each short transverse position z Di(from the first minute surface 11c 1Begin the 6th minute surface 11c 6Scanning) photoelectric conversion signal output I (1,1)～I (6,1).Similarly in Fig. 8 E, represent main scanning direction position x with dimetric mark D2The time each short transverse position z DiPhotoelectric conversion signal output I (2,1)～I (2,6), in Fig. 8 E, represent main scanning direction position x with the mark of circle D3The time each short transverse position z DiPhotoelectric conversion signal output I (3,1)～I (3,6).
Shown in Fig. 8 E, at main scanning direction position x D1When (triangle), I is at short transverse position z in photoelectric conversion signal output D5With short transverse position z D6Between become maximal value.The extraction unit 14a of operational part 14 is extracted in short transverse position z D5With short transverse position z D6Between height as checking the main scanning direction position x of object 3 D1Mensuration height z M1In addition, at main scanning direction position x D2(quadrangle) or main scanning direction position x D3When (circle), I is at short transverse position z in photoelectric conversion signal output D3With short transverse position z D4Between become maximal value.The extraction unit 14a of operational part 14 is extracted in short transverse position z D3With short transverse position z D4Between height as checking the main scanning direction position x of object 3 D2Or x D3Mensuration height z M2Or z M13Below, similarly progressively be extracted in each main scanning direction position x by extraction unit 14a DjMensuration height and position z MjThereby, can obtain to check the elevation information on the sweep trace of object 3.
In addition, because short transverse position z DiWith interval f * d α * tan (β) Discrete Change taking place, becomes peaked short transverse position z if therefore extract like that as mentioned above with extraction unit 14a as mentioned above like that Di, then measure height z MiThe interval also become the discrete value (that is, measure height resolving power become f * d α * tan (β)) of f * d α * tan (β).But,, can try to achieve each short transverse position z by carry out the calculation process of polynomial interpolation (many Entries Shi Fill Inter) etc. by outward appearance position coordinates operational part 14a DiBetween intermediate point as measuring height z Mi, can reduce the height resolving power.
In addition, when carrying out such calculation process, foundation is related between the photoelectric conversion signal output I that need make the photodetector of being stored 7 in data store 13 and the minute surface numbering i of polygonal rotating mirror 11.Therefore.The signal that will synchronously be obtained with the rotation of polygonal rotating mirror 11 by control part 16 (below be called rotary synchronous signal) is once exported to outward appearance position coordinates operational part 14b by a rotation.In addition, the scanning motion that will be carried out with each minute surface 11c by control part 16 synchronously institute's picked up signal (below be called the scan-synchronized signal) when each minute surface scans at every turn to outward appearance position coordinates operational part 14b output once.And,, the photoelectric conversion signal output I of photodetector 7 and the minute surface of polygonal rotating mirror 11 can be numbered foundation association between the i thus by by outward appearance position coordinates operational part 14b combination rotary synchronous signal and scan-synchronized signal.
More than, appearance inspection device and method according to this first embodiment, will be in data store 13 in the data storage of the photoelectric conversion signal output I of the photodetector 7 in the once rotation of polygonal rotating mirror 11, and by operational part 14 try to achieve in the data that this data store 13 stored, main scanning direction position x DjWith sub scanning direction position y DiPhotoelectric conversion signal output I in same point becomes maximum short transverse position z DiThereby, can obtain to check the elevation information (that is XZ cross sectional shape) on the scanning straight line of object 3.
Have again, appearance inspection device and method according to this first embodiment, such shown in Fig. 7 B, control according to the mode that the rotation of the constant angular velocity of operational throughput Yt that makes worktable conveying device 12 and polygonal rotating mirror 11 makes a plurality of irradiates light focal points based on each minute surface lay respectively at the short transverse Z that checks object 3 synchronously by control part 16, can obtain thus to check object 3 in the XY sweep limit, at each main scanning direction position x DjWith each sub scanning direction position y DiShort transverse position z MiInformation (position coordinates just).
In addition, outward appearance apparatus and method according to this first embodiment, by above-mentioned operational part 14 try to achieve the position coordinates of the outward appearance of checking object 3, for example in Fig. 7 B and Fig. 8 A main scanning direction be m point (sampling number of main scanning direction X), sub scanning direction be 5 points (rotation number of polygonal rotating mirror 11) and short transverse be 6 points (the minute surface number of polygonal rotating mirror) altogether (m * 5 * 6=) 30 * m point, thus can carry out stereoscopic examination to the outward appearance of checking object.
More than, in this first embodiment,, also can access same effect for the fixing mode that optical system is all moved on sub scanning direction Y even still check object 3 to will check that by worktable conveying device 12 mode that object 3 moves is illustrated on sub scanning direction Y.In addition, in this first embodiment, will scan collector lens 2 and describe, if but main scanning direction position x as f θ lens DJ(for example, x when not satisfying the straight line proportionate relationship with the relation of incident angle θ d=f * sin (θ) or x d=f * tan (θ) etc.), also can access same effect.
" second embodiment "
Fig. 9 A is the synoptic diagram of structure of the optical system of appearance inspection device from observed second embodiment of the present invention of sub scanning direction Y and method.Fig. 9 B is the synoptic diagram of structure of the optical system of the appearance inspection device from observed second embodiment of the present invention of main scanning direction X.
The appearance inspection device of second embodiment of the present invention and method, shown in Fig. 9 A and Fig. 9 B, possess according to the optical axis that does not make scanning collector lens 2 from the turning axle 11b plane orthogonal inclination angle beta of polygonal rotating mirror 11, and be parallel to the scanning collector lens 2A that mode disposed of short transverse Z, and be used to constitute the example that the focal point position forms the usefulness optical system with checking also to possess between the object 3 at scanning collector lens 2A, rectangular prism 15 with wedge shape of the plane of incidence parallel and outgoing plane with main scanning direction X, different on this point with the appearance inspection device of first embodiment of the present invention.For point in addition, because same with the appearance inspection device and the method for first embodiment of the present invention, therefore the repetitive description thereof will be omitted.
Shown in Fig. 9 A and Fig. 9 B, because the plane of incidence 17a and the outgoing plane 17b of rectangular prism 17 dispose according to the mode that is parallel to main scanning direction X, therefore scanning light beam is by behind the rectangular prism 17, in the face vertical with sub scanning direction Y not crooked and because of refraction action only in the face vertical with main scanning direction X with angle γ bending after, at irradiates light focal point Pb optically focused.Then, the scanning light beam at focal point Pb institute optically focused carries out rectilinear scanning by the rotation of polygonal rotating mirror 11 to inspection object 3 on main scanning direction X.When the mirror angle λ=α of polygonal rotating mirror 11/2, the scanning light beam that penetrates from scanning collector lens 2 and first embodiment be translation distance y on sub scanning direction Y similarly InBehind=f * α, incide rectangular prism 17.The scanning light beam that incides rectangular prism 17 because of the parallel amount of movement of the effect of rectangular prism 17 by distance y InBe changed to distance y d, the position of irradiates light focal point Pb 1 with respect to by scanning collector lens 2 optical axis center the time irradiates light focal point Pb deviation distance y on sub scanning direction Y d, on short transverse Z deviation distance z d
The difference of this second embodiment and first embodiment is, newly be provided with the point of rectangular prism 17 and eliminated this 2 point of point that scans the inclination β of collector lens 2, but first and second embodiments all adopt the mirror angle λ of polygonal rotating mirror 11 to implement X scanning and YZ scanning simultaneously to checking object 3, can play same effect.
Next, adopt Figure 10 A and Figure 10 B, the effect of rectangular prism 17 is described in detail.Figure 10 A is the figure of effect of the rectangular prism 17 of explanation, and Figure 10 B is the figure that moves of the irradiates light focal point that taken place of the rectangular prism 17 of explanation.
Shown in Figure 10 A, when the drift angle with rectangular prism 17 is made as a, refractive index is made as n nWhen the some C2 from outgoing plane 17b penetrates after the some A2 incident from the plane of incidence 17a of rectangular prism 17 of the light beam of light source 1, according to Si Nieer (Snell) law and geometric relationship, the scanning light beam that penetrates from scanning collector lens 2 by the angle of rectangular prism 17 bendings (below be called angle of bend) γ for as shown in the formula.Here, will penetrate and the scanning light beam (below be called incident light) that incide rectangular prism 17 and the formed angle of plane of incidence 17a (below be called incident angle) are made as b11 from scanning collector lens 2.In addition, scanning light beam and the formed angle of plane of incidence 17a that incides in the rectangular prism 17 is made as b12, is made as b21 with the formed angle of outgoing plane 17b.In addition, the scanning light beam that will penetrate from rectangular prism 17 (below be called penetrate light) is made as b22 with the formed angle of outgoing plane 17b.
Sin (b12)=sin (b11)/n n(at the Snell of A2 law)
Sin (b22)=sin (b21)/n n(at the Snell of C2 law)
A=b21+b12 (leg-of-mutton geometric relationship)
γ=(b11-b12)-(b21-b22) (geometric relationship)
＝b11+b22-a＝f1(a、n n、b11)
That is, angle of bend γ becomes drift angle a, refractive index n n, incident angle b11 function f 1 (a, n n, b11).Thereby, owing to passed through in sub scanning direction Y translation distance y InThe scanning light beam of a some A1～C1 also be and the same incident angle b11 of scanning light beam by a some A2～C2 that so angle of bend becomes γ.That is, the ejaculation light that penetrates from some C1 by an an A1～C1, with an ejaculation parallel light that penetrates from a C2 by a some A2～C2.
From an ejaculation light of C1 ejaculation and from the distance y between the ejaculation light of C2 ejaculation d, with incide the incident light of an A1 and incide the distance y of the incident light of an A2 InSatisfy the straight line proportionate relationship, its scale-up factor is for being shown below according to the Snell law, and its result becomes drift angle a refractive index n nFunction f 2 (a, the n of incident angle b11 n, b11).
y d/y in＝cos(b12)/cos(b11)×cos(b22)/cos(b21)＝f2(a、n n、b11)
Because of this effect such irradiates light focal point Pb displacement y on the working direction of scanning light beam shown in Fig. 9 B dAnd move to irradiates light focal point Pb-1.
Next, the mobile of short transverse Z to the irradiates light focal point Pb that takes place by rectangular prism 17 describes.Shown in Figure 10 B, to the thickness t refractive index n nRectangular prism 17 incident bunching angles (collecting angle) scanning light beam that θ is little, then according to Snell law and paraxial approximate (sin (θ)  θ), the irradiates light focal point is from a D mobile dz=t * (1-1/n on the working direction of an E at scanning light beam n).Therefore, among Figure 10 A when the incident light that incides an A1 be not the time apart from the incident light of the some B1 optically focused of some A1 partition distance L1 by rectangular prism 17, the irradiates light focal point E1 of the ejaculation light that penetrates from some C1 by an an A1～C1, along path by the scanning light beam of rectangular prism 17 bendings, some D1 (distance A 1B1)=distance A 1C1+ distance C 1D1=L1 with respect to distance point A1 partition distance L1), displacement dz on the working direction of scanning light beam 1=t 1* (1-1/n n) (t 1=distance A 1C1).
Similarly, the irradiates light focal point that incides the incident light of an A2 becomes and has moved apart from dz 2=t 2* (1-1/n n) some E2.Promptly, if not by rectangular prism 17, even then to the identical scanning light beam of distance of irradiates light focal point, when with respect to the incoming position difference (for example putting A1 and some A2) of the plane of incidence 17a of rectangular prism 17, the position of the irradiates light focal point on the working direction of scanning light beam differs z d=(t 2-t 1) * (1-1/n n).Here, by the range difference (t in the rectangular prism 17 2-t 1), according to leg-of-mutton geometric relationship and obviously with the distance c 12 of some A1 and the some A2 ratio that is in line, and its scale-up factor is the function of drift angle a and incident angle b12.Have again, satisfy c12=y InThe relation of/cos (b11), its result, z dWith distance y InThe ratio that is in line, its scale-up factor is drift angle a, refractive index n n, incident angle b11 function f 3.
z d/y in＝f3(a、n n、b11)
According to above relation, scanning light beam shown in Fig. 9 B like that because of the effect of rectangular prism 17 crooked angle γ, from the some Pb of irradiates light focal point to a Pb-1 ' (to sub scanning direction Y distance y d, to short transverse Z distance z d) move, be used for a Pb and put the straight line that Pb-1 is connected, with respect to the angle beta of the face tilt following formula vertical with the working direction of scanning light beam.
tan(β)＝z d/y d＝f3(a、n n、b11)/f2(a、n n、b11)
That is, by changing three parameters (drift angle a, refractive index ns of rectangular prism 17 n, incident angle b11), can change checking the short transverse position z of object 3 DjWith sub scanning direction position y Di, make degree of freedom high be designed to possibility.
In addition, by any embodiment in the above-mentioned various embodiments of appropriate combination, the effect that can play separately to be had.
With reference to accompanying drawing and fully record in association with preferred embodiment, still various changes and modifications are clearly to those skilled in the art to the present invention.As long as be to be understood that this distortion or be no more than scope of the present invention, then be contained among the present invention based on the scope of the claim of being added.
To the disclosure of the scope of Japanese patent application No.2005-116869 number instructions, accompanying drawing and claim of on April 14th, 2005 application, carry out reference as a whole and be taken in this instructions.
Utilizability on the industry
Visual examination apparatus and method involved in the present invention are by at the straight line based on polygonal rotating mirror Add simple function in the scanning optics, have and at a high speed and to try to achieve accurately the inspection object The effect of outward appearance coordinate, especially the visual examination device as the object that extends in the plane is useful , particularly, installment state or the grease of the electronic unit in the solder operation of installation base plate Useful in the visual examination apparatus and method that the coating state of scolder checks.

Claims (7)

1, a kind of appearance inspection device is characterized in that,
Possess:
The light source of outgoing beam;
Polygonal rotating mirror, at least have 3 minute surfaces at peripheral part, by disposing in the rotatable mode of constant angular velocity around turning axle, to checking object deflection, above-mentioned light beam is scanned via above-mentioned each minute surface above-mentioned light beam that above-mentioned light source is emitted on main scanning direction with linearity by above-mentioned rotation;
The focal point position forms uses optical system, when the rotation by above-mentioned polygonal rotating mirror makes above-mentioned light beam by above-mentioned each minute surface institute deflection scanning of above-mentioned polygonal rotating mirror at focal point optically focused, make above-mentioned focal point with the examination scope of the short transverse of the above-mentioned direction of scanning quadrature of above-mentioned inspection object in move;
Photodetector, with catoptrical light intensity opto-electronic conversion is photoelectric conversion signal output, this catoptrical light intensity is to form with after the optical system by above-mentioned focal point position, forming the usefulness optical system and, depending on the distance between above-mentioned focal point and the above-mentioned light beam reflection spot in above-mentioned inspection object by the reflection of above-mentioned inspection object by the catoptrical light intensity of the above-mentioned deflection mirror surface of above-mentioned polygonal rotating mirror via above-mentioned focal point position;
Check the object mobile device, synchronous with the rotation of the above-mentioned constant angular velocity of above-mentioned polygonal rotating mirror, make above-mentioned inspection object with the sub scanning direction of above-mentioned main scanning direction and above-mentioned short transverse quadrature on move; With
Operational part based on the above-mentioned catoptrical above-mentioned photoelectric conversion signal output of being undertaken by above-mentioned photodetector after the opto-electronic conversion, is tried to achieve the position coordinates of the outward appearance of above-mentioned inspection object, carries out the visual examination of above-mentioned inspection object,
Above-mentioned polygonal rotating mirror is constituted as: the mode that departs from above-mentioned sub scanning direction according to the above-mentioned focal point of the above-mentioned light beam along with the rotation of above-mentioned constant angular velocity, making the turning axle of this polygonal rotating mirror is that mirror angle is different by each minute surface with the formed angle of above-mentioned minute surface
Above-mentioned inspection object mobile device is constituted as: according to carry out with above-mentioned constant angular velocity at above-mentioned polygonal rotating mirror a rotation during, in the above-mentioned examination scope of above-mentioned short transverse, move with optical system by the formation of above-mentioned focal point position, and the above-mentioned focal point that on above-mentioned sub scanning direction, departs from by above-mentioned each minute surface, the mode that on the above-mentioned short transverse of above-mentioned inspection object, is scanned with linearity, above-mentioned inspection object is moved on above-mentioned sub scanning direction, and above-mentioned polygonal rotating mirror begins to carry out another rotation with above-mentioned constant angular velocity before, above-mentioned inspection object is moved, make the visual examination of being carried out of moving of above-mentioned focal point in the above-mentioned examination scope of the scanning of linearity of above-mentioned main scanning direction and above-mentioned short transverse, carrying out with the visual examination of above-mentioned polygonal rotating mirror in an above-mentioned rotation different part on above-mentioned inspection object.
2, appearance inspection device according to claim 1 is characterized in that,
Above-mentioned focal point position forms possesses the scanning collector lens with optical system, its optical axis disposes according to the mode that tilts with respect to the direction with the above-mentioned rotating shaft direct cross of above-mentioned polygonal rotating mirror, and make above-mentioned light beam by above-mentioned each minute surface institute deflection scanning of above-mentioned polygonal rotating mirror at above-mentioned focal point optically focused
Above-mentioned focal point moves with linearity on above-mentioned main scanning direction, and moves in the above-mentioned examination scope of above-mentioned short transverse.
3, appearance inspection device according to claim 1 is characterized in that,
Above-mentioned focal point position forms and uses optical system, possesses:
The scanning collector lens, its optical axis disposes according to the mode that is parallel to the direction of the above-mentioned rotating shaft direct cross of above-mentioned polygonal rotating mirror, and makes above-mentioned light beam by above-mentioned each minute surface institute deflection scanning of above-mentioned polygonal rotating mirror at above-mentioned focal point optically focused; With
Prism, between above-mentioned scanning collector lens and above-mentioned inspection object, the mode that is parallel to above-mentioned main scanning direction according to the plane of incidence and outgoing plane disposes, and penetrates from above-mentioned outgoing plane after making the refraction of optical beam of above-mentioned plane of incidence institute incident,
Light beam by above-mentioned scanning collector lens is refracted the back and penetrates from above-mentioned outgoing plane from the above-mentioned plane of incidence incident of above-mentioned prism, above-mentioned focal point move with linearity on the above-mentioned main scanning direction and above-mentioned examination scope in above-mentioned short transverse in move.
4, appearance inspection device according to claim 1 is characterized in that,
Also possess data store, store above-mentioned polygonal rotating mirror carry out at least a rotation during, from the above-mentioned catoptrical above-mentioned photoelectric conversion signal output of above-mentioned photodetector output,
Above-mentioned operational part is based on the above-mentioned photoelectric conversion signal output of being stored in above-mentioned data store, try to achieve above-mentioned inspection object above-mentioned short transverse the position and try to achieve the position coordinates of the outward appearance of above-mentioned inspection object, and carry out the visual examination of above-mentioned inspection object.
5, a kind of appearance inspection method is characterized in that,
At least have three minute surfaces and be that mirror angle is by the different polygonal rotating mirror that mode was constituted of each minute surface at peripheral part with turning axle and the formed angle of above-mentioned minute surface, rotate with constant angular velocity around above-mentioned turning axle, and make the light beam that penetrates to above-mentioned minute surface from light source towards checking object deflection, and on main scanning direction, scan with linearity, in above-mentioned deflection scanning, will be by the above-mentioned light beam of above-mentioned each minute surface institute deflection scanning of above-mentioned polygonal rotating mirror during when forming at focal point optically focused with optical system by the focal point position, make above-mentioned focal point with the examination scope of the short transverse of the above-mentioned main scanning direction quadrature of above-mentioned inspection object in move, and according to by different above-mentioned each minute surface of above-mentioned mirror angle with the sub scanning direction of above-mentioned main scanning direction and above-mentioned short transverse quadrature on the above-mentioned focal point that departs from, the mode that on the above-mentioned short transverse of above-mentioned inspection object, is scanned with linearity, above-mentioned inspection object is moved on above-mentioned sub scanning direction, reflected by the above-mentioned inspection object that on above-mentioned sub scanning direction, moves, via above-mentioned focal point position formation optical system, catoptrical light intensity by the above-mentioned deflection mirror surface of above-mentioned polygonal rotating mirror, promptly depend on the light intensity of the distance between the reflection spot of above-mentioned inspection object of above-mentioned focal point and above-mentioned light beam, by opto-electronic conversion is photoelectric conversion signal output, try to achieve the position coordinates of the outward appearance of above-mentioned inspection object based on above-mentioned photoelectric conversion signal output, carry out the visual examination of above-mentioned inspection object thus
Then, above-mentioned polygonal rotating mirror begins to carry out another rotation with above-mentioned constant angular velocity before, above-mentioned inspection object is moved,
Then, above-mentioned focal point in the above-mentioned examination scope of the scanning of the linearity of above-mentioned main scanning direction and above-mentioned short transverse move the visual examination of being carried out, carrying out with the visual examination of above-mentioned polygonal rotating mirror in an above-mentioned rotation different part on above-mentioned inspection object.
6, appearance inspection method according to claim 5 is characterized in that,
In above-mentioned deflection scanning, form with optical system and scanning collector lens that optical axis disposes according to the mode that tilts with respect to the direction with the above-mentioned rotating shaft direct cross of above-mentioned polygonal rotating mirror by being used to constitute above-mentioned focal point position, make above-mentioned light beam by above-mentioned each minute surface institute deflection scanning of above-mentioned polygonal rotating mirror at above-mentioned focal point optically focused, and according to above-mentioned focal point move with linearity on the above-mentioned direction of scanning and above-mentioned examination scope in above-mentioned short transverse in the mode that moves carry out optically focused.
7, appearance inspection method according to claim 5 is characterized in that,
In above-mentioned deflection scanning, form with optical system and scanning collector lens that optical axis disposes according to the mode that is parallel to the direction of the above-mentioned rotating shaft direct cross of above-mentioned polygonal rotating mirror by being used to constitute above-mentioned focal point position, make above-mentioned light beam optically focused on above-mentioned focal point by above-mentioned each minute surface institute deflection scanning of above-mentioned polygonal rotating mirror
Form with optical system and prism that the plane of incidence and outgoing plane dispose in the mode that is parallel to above-mentioned main scanning direction between above-mentioned scanning collector lens and above-mentioned inspection object by being used to constitute above-mentioned focal point position, by the above-mentioned light beam behind the above-mentioned scanning collector lens, above-mentioned plane of incidence incident from above-mentioned prism, be refracted the back and penetrate from above-mentioned outgoing plane, according to above-mentioned focal point move with linearity on the above-mentioned main scanning direction and above-mentioned examination scope in above-mentioned short transverse in the mode that moves carry out optically focused.
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KR101204585B1 (en) 2012-11-23
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