CN101079468A - Voltage-electric part and its making method and magnetic header folding slice combination and disk driving device - Google Patents
Voltage-electric part and its making method and magnetic header folding slice combination and disk driving device Download PDFInfo
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- CN101079468A CN101079468A CN200610084107.4A CN200610084107A CN101079468A CN 101079468 A CN101079468 A CN 101079468A CN 200610084107 A CN200610084107 A CN 200610084107A CN 101079468 A CN101079468 A CN 101079468A
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Abstract
The invention discloses a piezo-electric element, which contains laminated piece, wherein the laminated piece is composed of alternative electrode layer and piezo-electric layer to form the laminated structure limited along certain thickness direction; each piezo-electric layer is sandwiched between two adjacent electrode layers; the piezo-electric element also contains at least one support piece which is set at one side of laminated piece to extend along longitudinal direction of the laminated piece; when the voltage is exerted on the piezo-electric element through the electrode layer, the piezo-electric element bends at least along transverse direction, which controls the position the connected magnetic head precisely. The invention also discloses a making method of the piezo-electric element, which discloses a magnetic head folding piece unit and disc driving device with the piezo-electric element.
Description
Affiliated technical field
The present invention relates to a kind of disk drive, relate in particular to a kind of manufacture method of piezoelectric element and this piezoelectric element of disk drive.
Background technology
A kind of general information storage device is a disk drive, a kind of disk drive is a disk drive, utilize magnetizing mediums storage data, and have one movably magnetic read/write head be positioned on the magnetizing mediums, optionally to read or to write data in magnetic disk from disk.
The consumer is expecting that always the memory capacity of this class disk drive is bigger, and its read or write speed and accuracy are higher.Therefore, disk drive manufacturer is being devoted to develop the disk drive of high storage capacity always, for example by using narrow gauge track width and/or the less relatively disk of track space to increase the channel density of disk.Yet, along with the increase of disk track density, to the also corresponding increase of Position Control requirement of read/write head in the disk drive, so that when using compact disk, can realize rapid and precise read/write operation.Along with the increase of disk track density, by traditional technology read/write head is positioned at quickly and accurately on the particular channel of storage medium and becomes more and more difficult.Therefore, constantly increase the benefit of being brought in order to utilize track density, the method that can improve read/write head position control is being sought always by disk drive manufacturer.
A kind of that often used by disk drive manufacturer, can improve the method for the read/write head position control of on compact disk, using for adopting a secondary driver (secondary actuator), i.e. microdrive known to the industry.This microdrive and a master driver use jointly so that control the position of read/write head quickly and accurately.The disk drive that comprises this microdrive is called as double drive device system.
The past industry has been developed various double drive device system, is used to improve access speed and the fine position of read/write head on the certain tracks of high-density storage media.This class double drive device system generally includes a keynote coil motor driver (VCM) and a microdrive, such as piezo-electric micro driver.This voice coil motor driver is controlled by a servo-control system, and this servo-control system can make the actuating arm rotation of carrying read/write head, so that read/write head is positioned on the customizing messages track of storage medium.This piezo-electric micro driver and voice coil motor driver are used jointly, so that improve access speed and the fine position of W head on certain tracks.Like this, the position of voice coil motor driver coarse adjustment read/write head, and piezo-electric micro driver accurate adjustment read/write head is with respect to the position of storage medium.This piezo-electric micro driver and voice coil motor driver acting in conjunction make data message to be written in the high-density storage media or in high-density storage media accurately and effectively and read.
The microdrive that read/write head position is finely tuned in a kind of known being used to contains piezoelectric element.Have interlock circuit on this microdrive and be used to excite piezoelectric element on the microdrive, make optionally contraction or expansion of this piezoelectric element.This microdrive has suitable configuration makes the contraction or expansion of piezoelectric element that this microdrive is moved, and then read/write head is moved.With respect to the disk drive that only uses voice coil motor driver, the mobile position that can adjust read/write head more fast and accurately of this read/write head.Name is called Japanese patent application JP2002-133803 number of " microdrive and magnetic head fold piece combination ", and name be called " have the microdrive of fine position magnetic head fold piece combination, have the disc driver of this magnetic head fold piece combination and the manufacture method of magnetic head fold piece combination " Japanese patent application JP2002-074871 number, all disclosed the structure of piezo-electric micro driver.
Fig. 1 a is depicted as traditional disk drive, and wherein disk 101 is installed on the Spindle Motor 102 in order to spinning disk 101.Magnetic head fold piece combination 100 of voice coil motor arm 104 carryings, this magnetic head fold piece combination 100 comprises magnetic head 103 and the microdrive 105 with read/write head.The motion of voice coil motor 115 control voice coil motor arms 104, and then control head 103 moves to another track along the surface of disk 101 from a track, thus make read/write head read and write data from disk 101.During work, the disk 101 of rotation and comprise between the magnetic head 103 of read/write head and form aerodynamic effect, and produce lifting force.Equal and opposite in direction, the direction of the elastic force that applies on the cantilever part of this lifting force and magnetic head fold piece combination 100 are opposite, and in the overall diameter stroke of voice coil motor arm 104, this lift makes voice coil motor arm 104 keep certain flying height on disk 101 surfaces like this.。
Fig. 1 b is depicted as the magnetic head fold piece combination 100 of the traditional magnetic disk drive unit that comprises the double drive device among Fig. 1 a.Yet because the intrinsic tolerance of voice coil motor and magnetic head cantilever combination (HSA), magnetic head 103 can't be realized rapid and precise Position Control, and this will greatly influence read/write head exactly from the disk read-write data.Therefore, must use aforesaid piezo-electric micro driver 105 to improve the Position Control of magnetic head and read/write head.More particularly, with respect to voice coil motor, this piezo-electric micro driver 105 is corrected the displacement of magnetic head 103 with littler amplitude, so that compensate the resonance tolerance of voice coil motor and/or magnetic head cantilever combination.The existence of described microdrive 105 makes and uses the disk with less track pitch to become possibility, and can make the TPI value (tracks per inch) of disk drive improve 50%, can effectively shorten magnetic head simultaneously and seek rail and positioning time.Therefore, piezo-electric micro driver 105 can make the surface recording density of information storage magnetic disk increase substantially.
Please refer to Fig. 1 c and 1d, traditional piezo-electric micro driver is a U-shaped piezo-electric micro driver 105.This U-shaped piezo-electric micro driver 105 has the U-shaped ceramic frame, and the U-shaped ceramic frame has two ceramic arms 107, has a piezoelectric element on each ceramic arm 107.Two ceramic arms 107 are retained on magnetic head 103 therebetween, and produce displacement by mobile this magnetic head 103 that makes of ceramic arm 107.Shown in Fig. 1 b and Fig. 1 c, these piezo-electric micro driver 105 physical connections are to the flexible element 114 of cantilever part 113.Three are electrically connected and receive 109 (gold goal welding GBB or tin ball bonding meet SBB) are connected to this piezo-electric micro driver 105 on the cantilever cable 110 that is positioned at each ceramic arm 107 1 side.In addition, four Metal Ball 108 (GBB or SBB) are connected to magnetic head 103 on the cantilever cable 110.Fig. 1 d has showed that magnetic head 103 is assembled into the canonical process of piezo-electric micro driver 105, shown in Fig. 1 d and 2, magnetic head 103 is connected to two ceramic arms 107 by epoxy glue 112 in two precalculated positions 106, this connected mode causes magnetic head 103 mobilely depends on moving of two ceramic arms 107.A piezoelectric element 116 is installed, so that by exciting piezoelectric element 116 to come the motion of control head 103 on the ceramic arm 107 of each of piezo-electric micro driver 105.More particularly, when by 116 power supplies of 110 pairs of piezoelectric elements of cantilever cable, this piezoelectric element 116 can expand or shrink, and the result causes two ceramic arms 107 of U-shaped microdrive to produce distortion, and then cause magnetic head 103 on the track of disk, to move, thereby the position of fine setting read/write head.In this way, the controllable motion by magnetic head 103 can realize fine position.
Fig. 1 e has showed the situation after magnetic head 103 shown in Fig. 1 d and piezo-electric micro driver 105 fit together.Fig. 1 e and Fig. 2 have also showed two possible translational motions, and shown in arrow 117a and 117b, this translational motion is that be stimulated time institute of piezo-electric micro driver 105 produces, and the base portion at piezo-electric micro driver 105 produces synthetic reaction force 118a, 118b simultaneously.
Yet, as shown in Figure 2, when piezoelectric element 116 was applied voltage, 116 of piezoelectric elements were producing bending displacement on the thickness direction perpendicular to electrode layer 171 and piezoelectric layer 172, and do not produce bending displacement at the Width (or laterally) of parallel pole layer 171 and piezoelectric layer 172.This has limited the range of application of piezoelectric element 116 greatly.
Therefore need a kind of piezoelectric element and manufacture method thereof of improvement to overcome above-mentioned shortcoming.
Summary of the invention
Based on the deficiencies in the prior art, one of the present invention purpose is to provide a kind of piezoelectric element, and when it was applied voltage, this piezoelectric element can laterally produce bending displacement along it.
Another object of the present invention is to provide a kind of magnetic head fold piece combination with piezoelectric element, and this piezoelectric element can laterally produce bending displacement along it.
The present invention's another purpose is to provide a kind of manufacture method of piezoelectric element, makes this piezoelectric element laterally produce bending displacement along it.
The present invention's a purpose again is to provide a kind of disk drive with piezoelectric element, and this piezoelectric element can laterally produce bending displacement along it.
In order to realize above-mentioned first purpose, piezoelectric element provided by the invention comprises laminated piece (laminatedstructure) and at least one strutting piece.Described laminated piece is the laminated construction that is formed and defined a thickness direction by electrode layer and piezoelectric layer alternatively laminated, and wherein each piezoelectric layer is clipped between the two adjacent electrode layers.Described strutting piece is located at a side of described laminated piece, and along the longitudinal extension of described laminated piece, when by described electrode layer piezoelectric element being applied voltage, piezoelectric element is at least along its transverse curvature.
In one embodiment of the invention, described strutting piece is located at a side of described laminated piece, and this parallel sided is in the thickness direction of described piezoelectric element.
In another embodiment of the present invention, described strutting piece comprises insulating barrier and supporting layer provided thereon, and described insulating barrier is clipped between described supporting layer and the described laminated piece.
In yet another embodiment of the present invention, offer notch (notch) or slit (slot) in the described laminated piece, make the easier bending of piezoelectric element.
In order to realize above-mentioned another purpose, magnetic head fold piece combination provided by the invention comprises magnetic head, piezoelectric element and supports the cantilever part of described magnetic head and described piezoelectric element, described piezoelectric element is clipped between described magnetic head and the described cantilever part, described piezoelectric element comprises laminated piece and at least one strutting piece, described laminated piece is the laminated construction that is formed and defined a thickness direction by electrode layer and piezoelectric layer alternatively laminated, and wherein each piezoelectric layer is clipped between the two adjacent electrode layers.Described strutting piece is located at a side of described laminated piece, and along the longitudinal extension of described laminated piece, when by described electrode layer piezoelectric element being applied voltage, piezoelectric element is at least along its transverse curvature.
In order to realize above-mentioned another purpose, the manufacture method of piezoelectric element provided by the invention may further comprise the steps: (1) along thickness direction alternatively laminated electrode layer and piezoelectric layer so that each piezoelectric layer be clipped between the two adjacent electrode layers, thereby form laminated piece; (2) assemble at least one strutting piece in a side of laminated piece, so that strutting piece is along the longitudinal extension of laminated piece.
In order to realize an above-mentioned purpose again, disk drive provided by the invention comprises magnetic head fold piece combination, the actuating arm that connects described magnetic head fold piece combination, video disc and the Spindle Motor that makes described video disc rotation, wherein said magnetic head fold piece combination comprises magnetic head, piezoelectric element and support the cantilever part of described magnetic head and described piezoelectric element, described piezoelectric element is clipped between described magnetic head and the described cantilever part, described piezoelectric element comprises laminated piece and at least one strutting piece, described laminated piece is the laminated construction that is formed and defined a thickness direction by electrode layer and piezoelectric layer alternatively laminated, and wherein each piezoelectric layer is clipped between the two adjacent electrode layers.Described strutting piece is located at a side of described laminated piece, and along the longitudinal extension of described laminated piece, when by described electrode layer piezoelectric element being applied voltage, piezoelectric element is at least along its transverse curvature.
Compared with prior art, piezoelectric element not only can produce bending displacement on thickness direction, can also produce bending displacement along horizontal, thereby accurately control the position of connected magnetic head.
For making the present invention easier to understand, the present invention is described in further detail below in conjunction with drawings and Examples.
Description of drawings
Fig. 1 a is the part stereogram of traditional magnetic disk drive unit.
Fig. 1 b is the stereogram of traditional magnetic head fold piece combination.
Fig. 1 c is the partial enlarged drawing of magnetic head fold piece combination shown in Fig. 1 b.
Fig. 1 d has showed that magnetic head is assembled into the process of the microdrive of magnetic head fold piece combination shown in Fig. 1 b.
Fig. 1 e is the magnetic head of prior art and the stereogram after the microdrive assembling.
Fig. 2 is the vertical view of Fig. 1 e, to show the bending direction of piezoelectric element.
Fig. 3 a is the stereogram of the piezoelectric element of first embodiment of the invention.
Fig. 3 b is the stereogram at another visual angle of piezoelectric element shown in Fig. 3 a.
Fig. 3 c is the three-dimensional exploded view of piezoelectric element shown in Fig. 3 a.
Fig. 4 is the stereogram of the piezoelectric element of second embodiment of the invention.
Fig. 5 is the stereogram of the piezoelectric element of third embodiment of the invention.
Fig. 6 is the stereogram of the piezoelectric element of fourth embodiment of the invention.
Fig. 7 is the stereogram of the piezoelectric element of fifth embodiment of the invention.
Fig. 8 is the stereogram of the piezoelectric element of sixth embodiment of the invention.
Fig. 9 is the stereogram of the piezoelectric element of seventh embodiment of the invention.
Figure 10 a is the schematic diagram of the electrical connection of piezoelectric element shown in Fig. 3 a.
Figure 10 b is the schematic diagram of another electrical connection of piezoelectric element shown in Fig. 3 a.
Figure 10 c has showed the syndeton between the electrode layer of piezoelectric element of the present invention.
Figure 11 has showed the operating state of piezoelectric element shown in Fig. 3 a.
Figure 12 is the three-dimensional exploded view of magnetic head fold piece combination of the present invention.
Figure 13 is the three-dimensional exploded view of disk drive of the present invention.
The description of reference numerals of each element is as follows among the figure:
Laminated piece 91,911,912,913 strutting pieces 94,944,945
Terminal 92 free terminals 93
Conductive contact 203,204 insulating barriers 205
Supporting layer 206 notches 501
Fixed part 507 vertical 701
Horizontal 901
Magnetic head fold piece combination 70 magnetic heads 71
Cantilever part 30 substrates 321
Hinge 324 flexible elements 325
Embodiment
In conjunction with Figure of description 3-13 several optimum examples of the present invention is described now, components identical marks with identical Reference numeral in each accompanying drawing.As indicated above, the present invention aims to provide a kind of piezoelectric element, and this piezoelectric element comprises: a laminated piece, this laminated piece are the laminated construction that is formed by electrode layer and piezoelectric layer alternatively laminated, have a thickness direction, wherein each piezoelectric layer is clipped between the two adjacent electrode layers; Reach at least one strutting piece, be located at a side of laminated piece, and extend along the longitudinal direction of laminated piece.When by electrode layer piezoelectric element being applied voltage, piezoelectric element is at least along its transverse curvature.By the side at laminated piece at least one strutting piece is set, the present invention's piezoelectric element obtains the specific curvature direction of a parallel pole layer and piezoelectric layer.In other words, the present invention's piezoelectric element can be used to make object, for example makes magnetic head along the bending direction displacement that is parallel to electrode layer and piezoelectric layer.
Please refer to Fig. 3 a-3c, be first embodiment of the present invention's piezoelectric element, this piezoelectric element 90a comprises a laminated piece 91 and a strutting piece 94.This laminated piece 91 forms by alternatively laminated electrode layer and piezoelectric layer, for example, and four layers of electrode layer 202 of alternatively laminated and three layers of piezoelectric layer 201.Like this, each piezoelectric layer 201 all is sandwiched between the two adjacent electrode layers 202, just can apply excitation voltage to piezoelectric layer 201 by electrode layer 202.In one embodiment of the invention, use the film forming method, as plating technic or photo-marsk process, successively make the piezoelectric layer 201 of laminated piece 91, this method is simple relatively, and cost is low.In addition, also have some conductive contacts, for example two conductive contacts 203,204 are located at an end of outermost electrode layer 202, so that apply voltage by 203,204 couples of piezoelectric element 90a of conductive contact.
Please refer to Fig. 3 a, piezoelectric element 90a defines vertical 701, one thickness direction 802 and one horizontal 901, these three directions are vertical each other, wherein vertical 701 parallel piezoelectric layer 201 with horizontal 901 and electrode layers 202, thickness direction 802 vertical piezoelectric layer 201 and electrode layers 202.In one embodiment of the invention, all piezoelectric layers 201 all have identical thickness and identical structure.Please refer to Figure 10 a, each piezoelectric layer 201 also has a polarised direction 801, and this polarised direction 801 is to handle and form through magnetization, and this magnetization was both handled and can also can be carried out after forming before laminated piece 91 forms.In one embodiment of the invention, the polarised direction of adjacent piezoelectric layer 201 is opposite.
Please refer to Fig. 3 a again, electrode layer 202 is to be made by copper, gold or other electric conducting materials with excellent electrical conductivity.The size of electrode layer 202 and piezoelectric layer 201 are roughly the same, so that electrode layer 202 can cover the surface of piezoelectric layer 201 fully.In one embodiment of the invention, all electrode layers 202 have identical thickness and identical structure.
Continuous please refer to Fig. 3 a, be not electrically connected between two conductive contacts 203,204, but be electrically connected on adjacent electrode layer 202 respectively, folder one deck piezoelectric layer 201 between the wherein adjacent two-layer electrode layer 202.Like this, when being connected, voltage just is applied on each piezoelectric layer 201 with external power source (figure does not show) respectively when two conductive contacts 203,204, thereby piezoelectric layer 201 is elongated or shortened.
Still please refer to Fig. 3 a, strutting piece 94 is located at a side of laminated piece 91, and extends along vertical 701 of laminated piece 91.In one embodiment of the invention, strutting piece 94 comprises an insulating barrier 205 and a supporting layer 206, and supporting layer 206 is positioned at the outside of insulating barrier 205.In one embodiment of the invention, supporting layer 206 can have conductivity, is made by stainless steel, silicon, copper alloy or other suitable electric conducting materials.When strutting piece 94 was assembled on the laminated piece 91, insulating barrier 205 was sandwiched between supporting layer 206 and the laminated piece 91, electrically contacted to stop supporting layer 206 and laminated piece 91, thereby prevented short circuit.
In another one embodiment of the present invention, supporting layer 206 also can be made of suitable non-conducting material, in this case, and just can be in the strutting piece 94 without insulating barrier 205.
Fig. 4-5 has shown selectable second, third embodiment of piezoelectric element of the present invention respectively.Please refer to Fig. 4, the structure of the piezoelectric element 90b of second embodiment is similar to the piezoelectric element 90a shown in Fig. 3 a, but is provided with a notch 501 in the laminated piece 911 of piezoelectric element 90b, and the design of this notch 501 can make piezoelectric element 90b crooked easily.In the present embodiment, notch 501 is rectangular, but the shape of notch 501 is not limited to rectangle, and any other suitable shape also all is suitable for.Please refer to Fig. 5, be provided with three notches 501 in the laminated piece 912 of piezoelectric element 90c, can make the easier bending of piezoelectric element 90c like this.Be understandable that, the notch 501 of any suitable number can be set on the laminated piece of piezoelectric element of the present invention.And suitable structure such as notch (notch) 501 also available slits (slot) replaces, as long as can make piezoelectric element crooked easily.
Figure 6 shows that the piezoelectric element 90d of fourth embodiment of the invention.The structure of this piezoelectric element 90d is similar to the piezoelectric element 90a shown in Fig. 3 a.Different is that piezoelectric element 90d has two strutting pieces 944, replaces a strutting piece 94 among the piezoelectric element 9a.Two strutting pieces 944 are contained in the upper surface and the lower surface of laminated piece 91 1 sides respectively, and parallel with the electrode layer 202 and the piezoelectric layer 201 of laminated piece 91.
Figure 7 shows that the piezoelectric element 90e of fifth embodiment of the invention.The structure of this piezoelectric element 90e is similar to piezoelectric element 90d shown in Figure 6.Different is, forms a fixed part 507 on an end of the laminated piece 91 of piezoelectric element 90e, and the setting of this fixed part 507 is for piezoelectric element 90e is installed on support component such as the cantilever part 30 (as shown in figure 12).
Figure 8 shows that the piezoelectric element 90f of sixth embodiment of the invention.The laminated piece 913 of this piezoelectric element 90f is by forming two-layer electrode layer 202 and one deck piezoelectric layer 201 alternatively laminateds, and the strutting piece of being made up of insulating barrier 205 and supporting layer 206 94 is assembled in a side of laminated piece 913.
Figure 9 shows that the piezoelectric element 90g of seventh embodiment of the invention.The structure of this piezoelectric element 90g is similar to piezoelectric element 90f shown in Figure 8.Different is, the strutting piece 945 of piezoelectric element 90g is one, and strutting piece 945 is fixed on the upper surface of laminated piece 913 1 sides, and parallel with piezoelectric layer 201 with the electrode layer 202 of laminated piece 913.
Figure 10 a is the electrical connection schematic diagram of the piezoelectric element 90a shown in Fig. 3 a, and has shown that the polarised direction 801 of wherein adjacent piezoelectric layer 201 is opposite.Be understandable that, be electrically connected also applicable to the piezoelectric element 90b-90g shown in Fig. 4-9 shown in Figure 10 a.
Please refer to Figure 10 a again, one of per two adjacent electrode layers 202 are applied in voltage V by conductive contact 203, and another electrode layer 202 is by conductive contact 204 ground connection.Like this, the voltage that is added on each piezoelectric layer 201 is opposite with the polarised direction 801 of this piezoelectric layer 201, thereby all piezoelectric layers 201 is shortened simultaneously or elongation simultaneously.
Figure 10 b is the schematic diagram of another electrical connection of the piezoelectric element 90a shown in Fig. 3 a, conductive contact 203 ground connection wherein, and conductive contact 204 is applied in voltage V.The voltage that is added in like this on each piezoelectric layer 201 is just consistent with the polarised direction 801 of this piezoelectric layer 201, thereby all piezoelectric layers 201 is extended simultaneously or shortening simultaneously.
Figure 10 c is that the typical case between the electrode layer 202 shown in Fig. 3 a connects.As shown in the figure, be not electrically connected between the adjacent electrode layer 202, but the conductive layer by wherein between the electrode layer 202 of one deck is electrically connected mutually.
Figure 11 has shown the operating state of the piezoelectric element 90a shown in Fig. 3 a.When laminated piece 91, just (see Fig. 3 a), when being applied in voltage, they shorten or elongation simultaneously piezoelectric layer 201 simultaneously.Yet, because strutting piece 94 has suitable hardness, thereby the shortening or the elongation of piezoelectric layer 201 have been restricted, so the shortening of piezoelectric layer 201 or elongation will apply a reaction force to strutting piece 94, and making strutting piece 94 and laminated piece 91 together along its horizontal 901 bendings, this is horizontal 901 parallel with piezoelectric layer 201.In the present invention, the end 92 of piezoelectric element 90a is fixed on the hard support component, cantilever part 30 as shown in figure 12 for example, and another end is a free terminal 93, can produce displacement, thereby accurately control the position of object such as magnetic head.The detailed operation process of piezoelectric element 90a is believed by those skilled in the art and is familiar with, and does not therefore remake further discussion.
In the present invention, the manufacture method of piezoelectric element comprises following steps: (1) along thickness direction alternatively laminated electrode layer and piezoelectric layer so that each piezoelectric layer be clipped between the two adjacent electrode layers, thereby form laminated piece; (2) assemble at least one strutting piece in a side of laminated piece, and make the longitudinal extension of strutting piece along laminated piece.In one embodiment of the invention, strutting piece is assembled on the side of laminated piece, and this side is parallel with the thickness direction of described piezoelectric element.In another embodiment of the present invention, the step that forms strutting piece comprises: form insulating barrier, and form supporting layer in the insulating barrier outside; Insulating barrier and laminated piece are connected.In the present invention, the step that forms laminated piece also is included in and forms at least one notch or slit in the laminated piece, so that piezoelectric element is crooked easily.
Please refer to Figure 12, the present invention's magnetic head fold piece combination 70 comprises a magnetic head 71, a piezoelectric element 90a and supports the cantilever part 30 of magnetic head 71 and piezoelectric element 90a.This cantilever part 30 has substrate 321, hinge 324, flexible element 325 and load beam 326, and these component-assembled together.Flexible element 325 has a cantilever tongue piece 328, and piezoelectric element 90a is installed on the cantilever tongue piece 328, is clipped between magnetic head 71 and the cantilever tongue piece 328.Concretely, the end 92 of piezoelectric element 90a is fixed on the cantilever part 30, and free terminal 93 is used for accurately regulating the position of magnetic head 71.Will be understood that the piezoelectric element in the other embodiments of the invention is applicable to magnetic head fold piece combination too.
Please refer to Figure 13, according to one embodiment of the present invention, the present invention's disk drive 80 is made up of housing 808, video disc 801, Spindle Motor 802, voice coil motor 807 and the present invention's magnetic head fold piece combination 70.Because the packaging technology of disk drive of the present invention is known by those skilled in the art, therefore no longer describe in detail.
Can expect the disk set that the present invention's disk drive 80 not only is applicable to, disk as shown in figure 13 for example, but also be applicable to other forms of device, as regulate the optical disc apparatus of head position with driver, but be not limited to optical disc apparatus, so long as all can with the disk drive of driver adjusting head position.Therefore, disk set shown in Figure 13 only is one embodiment of the present of invention, of course not limitation of the present invention.Accordingly, also unintentionally application of the present invention is limited on the specific device, as disk set.
Above disclosed only is preferred embodiment of the present invention, can not limit the present invention's interest field certainly with this, and therefore the equivalent variations of being done according to the present patent application claim still belongs to the scope that the present invention is contained.
Claims (13)
1. piezoelectric element, comprise laminated piece, described laminated piece is the laminated construction that is formed and defined a thickness direction by electrode layer and piezoelectric layer alternatively laminated, wherein each piezoelectric layer is clipped between the two adjacent electrode layers, it is characterized in that: described piezoelectric element also comprises at least one strutting piece, and this strutting piece is located at a side of described laminated piece, and along the longitudinal extension of described laminated piece, when by described electrode layer piezoelectric element being applied voltage, piezoelectric element is at least along its transverse curvature.
2. piezoelectric element as claimed in claim 1 is characterized in that: described strutting piece is located at a side of described laminated piece, and this parallel sided is in the thickness direction of described piezoelectric element.
3. piezoelectric element as claimed in claim 1 is characterized in that: described strutting piece comprises insulating barrier and position supporting layer thereon, and described insulating barrier is clipped between described supporting layer and the described laminated piece.
4. piezoelectric element as claimed in claim 1 is characterized in that: offer at least one notch or slit in the described laminated piece.
5. magnetic head fold piece combination, comprise magnetic head, piezoelectric element and support the cantilever part of described magnetic head and described piezoelectric element, described piezoelectric element is clipped between described magnetic head and the described cantilever part, comprise laminated piece, described laminated piece is the laminated construction that is formed and defined a thickness direction by electrode layer and piezoelectric layer alternatively laminated, wherein each piezoelectric layer is clipped between the two adjacent electrode layers, it is characterized in that: described piezoelectric element also comprises at least one strutting piece, this strutting piece is located at a side of described laminated piece, and along the longitudinal extension of described laminated piece, when by described electrode layer piezoelectric element being applied voltage, piezoelectric element is at least along its transverse curvature.
6. magnetic head fold piece combination as claimed in claim 5 is characterized in that: described strutting piece is located at a side of described laminated piece, and this parallel sided is in the thickness direction of described piezoelectric element.
7. magnetic head fold piece combination as claimed in claim 5 is characterized in that: described strutting piece comprises insulating barrier and position supporting layer thereon, and described insulating barrier is clipped between described supporting layer and the described laminated piece.
8. magnetic head fold piece combination as claimed in claim 5 is characterized in that: offer at least one notch or slit in the described laminated piece.
9. the manufacture method of a piezoelectric element is characterized in that may further comprise the steps:
(1) along thickness direction alternatively laminated electrode layer and piezoelectric layer so that each piezoelectric layer be clipped between the two adjacent electrode layers, thereby form laminated piece; And
(2) set up at least one strutting piece in a side of laminated piece, so that described strutting piece is along the longitudinal extension of laminated piece.
10. the manufacture method of piezoelectric element as claimed in claim 9, it is characterized in that: described strutting piece is connected in a side of described laminated piece, and this parallel sided is in the thickness direction of described piezoelectric element.
11. the manufacture method of piezoelectric element as claimed in claim 9 is characterized in that: the formation step of described strutting piece comprises: form the supporting layer on insulating barrier and the described insulating barrier; Described insulating barrier and described laminated piece are linked together.
12. the manufacture method of piezoelectric element as claimed in claim 9 is characterized in that: the step that forms described laminated piece also comprises: offer at least one notch or slit in described laminated piece.
13. disk drive, comprise magnetic head fold piece combination, the actuating arm that connects described magnetic head fold piece combination, video disc and the Spindle Motor that makes described video disc rotation, wherein said magnetic head fold piece combination comprises magnetic head, piezoelectric element and support the cantilever part of described magnetic head and described piezoelectric element, described piezoelectric element is clipped between described magnetic head and the described cantilever part, described piezoelectric element comprises laminated piece, described laminated piece is the laminated construction that is formed and defined a thickness direction by electrode layer and piezoelectric layer alternatively laminated, wherein each piezoelectric layer is clipped between the two adjacent electrode layers, it is characterized in that: described piezoelectric element also comprises at least one strutting piece, this strutting piece is located at a side of described laminated piece, and along the longitudinal extension of described laminated piece, when by described electrode layer piezoelectric element being applied voltage, piezoelectric element is at least along its transverse curvature.
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| CN200610084107.4A CN101079468A (en) | 2006-05-23 | 2006-05-23 | Voltage-electric part and its making method and magnetic header folding slice combination and disk driving device |
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| CN200610084107.4A CN101079468A (en) | 2006-05-23 | 2006-05-23 | Voltage-electric part and its making method and magnetic header folding slice combination and disk driving device |
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| CN101079468A true CN101079468A (en) | 2007-11-28 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105569802A (en) * | 2016-02-19 | 2016-05-11 | 太仓钰丰机械工程有限公司 | Temperature sensor with low cost and high sensitivity |
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2006
- 2006-05-23 CN CN200610084107.4A patent/CN101079468A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105569802A (en) * | 2016-02-19 | 2016-05-11 | 太仓钰丰机械工程有限公司 | Temperature sensor with low cost and high sensitivity |
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