CN101071112B - 硅单晶锭x射线定向仪 - Google Patents
硅单晶锭x射线定向仪 Download PDFInfo
- Publication number
- CN101071112B CN101071112B CN2006100465428A CN200610046542A CN101071112B CN 101071112 B CN101071112 B CN 101071112B CN 2006100465428 A CN2006100465428 A CN 2006100465428A CN 200610046542 A CN200610046542 A CN 200610046542A CN 101071112 B CN101071112 B CN 101071112B
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- Prior art keywords
- silicon ingot
- scrambler
- sample measurement
- measurement platform
- silicon
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 95
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 95
- 239000010703 silicon Substances 0.000 title claims abstract description 95
- 239000013078 crystal Substances 0.000 title claims abstract description 31
- 238000005259 measurement Methods 0.000 claims abstract description 56
- 238000005096 rolling process Methods 0.000 claims abstract description 17
- 230000008878 coupling Effects 0.000 claims description 24
- 238000010168 coupling process Methods 0.000 claims description 24
- 238000005859 coupling reaction Methods 0.000 claims description 24
- 230000003287 optical effect Effects 0.000 claims description 5
- 230000005540 biological transmission Effects 0.000 claims description 3
- 230000035945 sensitivity Effects 0.000 claims description 3
- 238000012545 processing Methods 0.000 abstract description 3
- 229910021421 monocrystalline silicon Inorganic materials 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 5
- 230000010355 oscillation Effects 0.000 description 3
- 238000013461 design Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000011218 segmentation Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
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- Analysing Materials By The Use Of Radiation (AREA)
Abstract
Description
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN2006100465428A CN101071112B (zh) | 2006-05-11 | 2006-05-11 | 硅单晶锭x射线定向仪 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN2006100465428A CN101071112B (zh) | 2006-05-11 | 2006-05-11 | 硅单晶锭x射线定向仪 |
Publications (2)
Publication Number | Publication Date |
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CN101071112A CN101071112A (zh) | 2007-11-14 |
CN101071112B true CN101071112B (zh) | 2010-07-21 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN2006100465428A Expired - Fee Related CN101071112B (zh) | 2006-05-11 | 2006-05-11 | 硅单晶锭x射线定向仪 |
Country Status (1)
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CN (1) | CN101071112B (zh) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102706905A (zh) * | 2012-06-28 | 2012-10-03 | 丹东奥龙射线仪器有限公司 | X射线晶体定向仪数据记录仪 |
CN103171059B (zh) * | 2013-03-07 | 2015-02-25 | 贵阳嘉瑜光电科技咨询中心 | 一种用于蓝宝石加工晶向实时测量的夹具及其测量方法 |
CN103552166A (zh) * | 2013-09-30 | 2014-02-05 | 洛阳鸿泰半导体有限公司 | 一种调整硅棒晶向偏离度的装置 |
JP6270215B2 (ja) * | 2013-11-25 | 2018-01-31 | 株式会社リガク | X線分析装置の光軸調整装置 |
CN106124538B (zh) * | 2016-08-31 | 2019-02-12 | 天津三英精密仪器股份有限公司 | 一种双工位多任务x射线三维成像检测系统 |
CN107282465A (zh) * | 2017-06-06 | 2017-10-24 | 安徽铜峰电子股份有限公司 | 一种晶片角度分选仪 |
CN111300192B (zh) * | 2020-03-24 | 2021-12-24 | 广州南砂晶圆半导体技术有限公司 | 一种应用于单晶的定向加工方法 |
CN113787636B (zh) * | 2021-07-09 | 2022-05-27 | 麦斯克电子材料股份有限公司 | 一种用于12寸半导体晶圆的手动粘棒方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2293069Y (zh) * | 1997-06-05 | 1998-09-30 | 赵久 | 高精度x射线单晶定向仪 |
CN2409516Y (zh) * | 2000-03-02 | 2000-12-06 | 赵久 | X射线定向仪 |
CN2826421Y (zh) * | 2005-09-29 | 2006-10-11 | 赵久 | 硅单晶锭x射线定向仪 |
-
2006
- 2006-05-11 CN CN2006100465428A patent/CN101071112B/zh not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2293069Y (zh) * | 1997-06-05 | 1998-09-30 | 赵久 | 高精度x射线单晶定向仪 |
CN2409516Y (zh) * | 2000-03-02 | 2000-12-06 | 赵久 | X射线定向仪 |
CN2826421Y (zh) * | 2005-09-29 | 2006-10-11 | 赵久 | 硅单晶锭x射线定向仪 |
Non-Patent Citations (1)
Title |
---|
JP平4-42045A 1992.02.12 |
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Publication number | Publication date |
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CN101071112A (zh) | 2007-11-14 |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Free format text: FORMER OWNER: GUAN SHOUPING ZHEN WEI Effective date: 20120705 Owner name: DANDONG NEW DONGFANG CRYSTAL INSTRUMENT CO., LTD. Free format text: FORMER OWNER: ZHAO JIU Effective date: 20120705 |
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C41 | Transfer of patent application or patent right or utility model | ||
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 118002 NO.141, RENMIN STREET, DANDONG CITY, LIAONING PROVINCE TO: 118002 NO.42, TAOYUAN STREET, ZHENXING DISTRICT, DANDONG CITY, LIAONING PROVINCE |
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TR01 | Transfer of patent right |
Effective date of registration: 20120705 Address after: 118002 No. 42, Taoyuan street, Zhenxing District, Liaoning, Dandong Patentee after: Dandong New Dongfang Crystal Instrument Co.,Ltd. Address before: 118002 No. 141 Renmin Street, Liaoning, Dandong Co-patentee before: Guan Shouping Patentee before: Zhao Jiu Co-patentee before: Zhen Wei |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100721 Termination date: 20150511 |
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EXPY | Termination of patent right or utility model |