CN101043785A - Heater lead mechanism for plasma shower - Google Patents
Heater lead mechanism for plasma shower Download PDFInfo
- Publication number
- CN101043785A CN101043785A CNA2006100655831A CN200610065583A CN101043785A CN 101043785 A CN101043785 A CN 101043785A CN A2006100655831 A CNA2006100655831 A CN A2006100655831A CN 200610065583 A CN200610065583 A CN 200610065583A CN 101043785 A CN101043785 A CN 101043785A
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- CN
- China
- Prior art keywords
- lead terminal
- cooled
- lead
- water
- female
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
The related plasma shower filament lead wire structure applies the matched-couple fast plug type, convenient to assembly, generates much conductive current, and has well adaptation.
Description
Technical field
The present invention is a kind of heater lead structure of plasma shower, is used for the heater lead of plasma shower.Belong to field of semiconductor devices.
Technical background
In 100nm or higher levels of ion implantation technology, all use the plasma flood technology usually, eliminate the accumulation of static electricity of wafer surface, improve the injection technology performance.The electric current that the plasma flood filament that plasma flood is used passes through is big, needs the periodic replacement filament, thus the heater lead structure should to have the current flowing ability strong, the characteristics of easy accessibility.The present invention has had above characteristics, adapts to the instructions for use of plasma flood filament fully.
Summary of the invention
Plasma shower threading mechanism of the present invention adopts push-in syndeton of the public mother, and it is convenient to install and remove, and can the big electric current of conducting.Filament link design flexible connecting member, adaptive capacity is strong.
This mechanism is by constituting with lower member: 1, two copper intercell connector of filament clamping mechanism, 2, two lead bars, 3, two nuts, 4, two insulating cases 5, public water-cooled lead terminal 6, female lead riser 7, hectometre the end of a thread 8,9, four compressing tablets 10 of female water-cooled lead terminal.As shown in Figure 1.
Clamping filament on the described filament clamping mechanism 1.
Described copper intercell connector 2 is connected on the lead bar 3 with screw respectively, wherein one the joint curve circular-arc, can increase the connection elasticity, make connection more reliable.
Described lead bar 3 one ends link to each other with copper intercell connector 2, and the other end is stuck in the groove of public water-cooled lead terminal 6 and female water-cooled lead terminal 9, electric action in the middle of rising.
Described nut 4 is connected with female water-cooled lead terminal 9 ends of thread with public water-cooled lead terminal 6 and 10 1 of two compressing tablets are locked at lead bar 3 in the groove of public water-cooled lead terminal 6 and female water-cooled lead terminal 9.
Described insulating case 5 is enclosed within outside public water-cooled lead terminal 6 and the female water-cooled lead terminal 9, plays insulating effect.
Described public water-cooled lead terminal 6 cooperates with female lead riser 7 butt joints, and described female lead riser 7 endoporus clamp public water-cooled lead terminal 6;
Described hectometre the end of a thread 8 is equipped with female water-cooled lead terminal 9.
Described compressing tablet 10 is pressed in the lead bar respectively about in the of 3, contacts with nut, drives 3 rotations of lead bar when preventing nutting and makes its direction dislocation, compresses lead bar 3.
Description of drawings
Fig. 1 is the structural representation of plasma shower heater lead mechanism.
Fig. 2 is the three-dimensional modeling figure of plasma shower heater lead mechanism.
Among Fig. 1,1, two copper intercell connector of filament clamping mechanism, 2, two lead bars, 3, two nuts, 4, two insulating cases 5, public water-cooled lead terminal 6, female lead riser 7, hectometre the end of a thread 8,9, four compressing tablets 10 of female water-cooled lead terminal.
Embodiment
The invention will be described further below in conjunction with accompanying drawing, but not as the qualification to invention.
As Fig. 1 and Fig. 2, a kind of heater lead mechanism of novel plasma shower is by 1, two copper intercell connector 2 of filament clamping mechanism, two lead bars, 3, two nuts, 4, two insulating cases 5, public water-cooled lead terminal 6, female lead riser 7, hectometre the end of a thread 8,9, four compressing tablets of female water-cooled lead terminal 10 are formed.
Adorn filament on the filament clamping mechanism 1, two copper intercell connectors are made circular arc type for 2 one sections, increase to connect flexibility, lead bar 3 adopts snap-in nut check to connect, and makes connection more reliable, insulating case 5 polymethyl methacrylate material, existing good insulating properties can be observed adjusting position again.Female lead riser 7 and public water-cooled lead terminal 6 and hectometre the end of a thread 8 and female water-cooled lead terminal 9 all are designed to a public Female Push and go into formula, make mounting or dismounting convenient, and material therefor is a tin bronze, not only wear-resistant conductive ability but also strong.
Claims (1)
1. the heater lead mechanism of a plasma shower, it is characterized in that this mechanism is made of following parts: filament clamping mechanism (1), two copper intercell connectors (2), two lead bars (3), two nuts (4), two insulating cases (5), public water-cooled lead terminal (6), female lead riser (7), hectometre the end of a thread (8), female water-cooled lead terminal (9), four compressing tablets (10);
Described filament clamping mechanism (1) is gone up the clamping filament; Described copper intercell connector (2) is connected on the lead bar (3) with screw respectively, and wherein a joint curves circular-arc; Described lead bar (3) one ends link to each other with copper intercell connector (2), and the other end is stuck in the groove of public water-cooled lead terminal (6) and female water-cooled lead terminal (9), electric action in the middle of rising; Described nut (4) is connected with female water-cooled lead terminal (9) end of thread with public water-cooled lead terminal (6), and (10) one of compressing tablets are locked at lead bar (3) in the groove of public water-cooled lead terminal (6) and female water-cooled lead terminal (9); Described insulating case (5) is enclosed within outside public water-cooled lead terminal (6) and the female water-cooled lead terminal (9), plays insulating effect; Described public water-cooled lead terminal (6) cooperates with female lead riser (7) butt joint, and described hectometre the end of a thread (8) is equipped with female water-cooled lead terminal (9); Described compressing tablet (10) is pressed in lead bar (3) respectively up and down.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100655831A CN100569042C (en) | 2006-03-22 | 2006-03-22 | A kind of heater lead mechanism of plasma shower |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100655831A CN100569042C (en) | 2006-03-22 | 2006-03-22 | A kind of heater lead mechanism of plasma shower |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101043785A true CN101043785A (en) | 2007-09-26 |
| CN100569042C CN100569042C (en) | 2009-12-09 |
Family
ID=38808898
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2006100655831A Expired - Fee Related CN100569042C (en) | 2006-03-22 | 2006-03-22 | A kind of heater lead mechanism of plasma shower |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100569042C (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102446689A (en) * | 2010-10-13 | 2012-05-09 | 北京中科信电子装备有限公司 | In-vacuum electrode inlet device |
| CN102867718A (en) * | 2011-07-05 | 2013-01-09 | 北京中科信电子装备有限公司 | Filament clamping and power supply structure for ion shower |
| CN103794453A (en) * | 2013-07-18 | 2014-05-14 | 北京中科信电子装备有限公司 | Dual-filament plasma shower device |
-
2006
- 2006-03-22 CN CNB2006100655831A patent/CN100569042C/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102446689A (en) * | 2010-10-13 | 2012-05-09 | 北京中科信电子装备有限公司 | In-vacuum electrode inlet device |
| CN102867718A (en) * | 2011-07-05 | 2013-01-09 | 北京中科信电子装备有限公司 | Filament clamping and power supply structure for ion shower |
| CN102867718B (en) * | 2011-07-05 | 2016-03-16 | 北京中科信电子装备有限公司 | Filament clamping and power supply structure for ion shower |
| CN103794453A (en) * | 2013-07-18 | 2014-05-14 | 北京中科信电子装备有限公司 | Dual-filament plasma shower device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100569042C (en) | 2009-12-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20091209 Termination date: 20200322 |