CN101042341A - Method for measuring solution concentration based on guided mode excitation Goos-Hanchen displacement enhancement effect - Google Patents
Method for measuring solution concentration based on guided mode excitation Goos-Hanchen displacement enhancement effect Download PDFInfo
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- CN101042341A CN101042341A CN 200710039620 CN200710039620A CN101042341A CN 101042341 A CN101042341 A CN 101042341A CN 200710039620 CN200710039620 CN 200710039620 CN 200710039620 A CN200710039620 A CN 200710039620A CN 101042341 A CN101042341 A CN 101042341A
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Abstract
This invention relates to one liquid concentration measurement method based on mode guide laser ancient karst displacement intensity effect, which comprises the following steps: using laser beam to focus into deposition on top layer glass slice metal film one top optical glass slice and one sample chamber and one down optical glass slice and one metal film on the down optical glass, when satisfying the match conditions, reflection light generates one absorptive peak and the reflection light changes relative to incidence light to generation one side karst displacement.
Description
Technical field
What the present invention relates to is a kind of method of field of measuring techniques.Particularly a kind of solution concentration measuring method that excites Gu Sihanxin displacement enhancement effect based on guided mode.
Background technology
Optical waveguide sensor appears at the eighties in the application aspect the solution concentration measurement.By methods such as surface plasma (SPR) Detection Techniques, optical waveguide oscillating field Detection Techniques, subtle change that can refractive index is carried out highly sensitive detection.This just makes detection to characteristics such as strength of fluids can be converted into the monitoring to its refractive index, and and then the subtle change of refractive index can be converted into the variation of the light intensity signal that photodetector detects, thereby obtain the variation of testing liquid concentration.But in actual applications, ubiquity detection sensitivity not high enough, require problem such as height for the polarization characteristic of surveying light signal, become the obstacle that limits its development.
Recently, theoretical and experiment finds that all in the SPR structure, the variation of the reflective phase that the variation of the environmental parameter of metal film lower layer sample (temperature, concentration etc.) causes is more responsive than the variation of reflective light intensity.Around this principle, can improve the performance of traditional optical waveguide sensor based on luminous intensity measurement greatly.
Find through literature search prior art, in " Goos-H nchen shift surfaceplasmon resonance sensor " (Gu Sihanxin displacement surface plasma wave sensing device) literary composition that people such as Xb.Yin deliver on " Applied physics letters " " applied physics wall bulletin " Vol.89 261108 (2006), propose first to utilize the Gu Sihanxin effect to improve the sensitivity of surface plasma wave sensing device.This method is converted into change of refractive with the variation of strength of fluid, and then reflective phase changes, and being converted into the variation of the Gu Sihanxin displacement that strengthens in the SPR structure, the sample change of refractive is determined in the variation that changes caused lateral shift by detectable concentration.This novel sensor can reach very high sensitivity (4 * 10
-7), but, it can not break away from the intrinsic shortcoming of SPR evanescent field, that is, in this structure, sample is placed in the evanescent field of light wave, cause the energy of light wave to be decayed rapidly, the interaction of light wave and sample to be tested is very limited, has directly influenced the enhancement effect of Gu Sihanxin displacement, thereby has restricted the further lifting of this class transducer sensitivity.
Summary of the invention
The present invention is directed to the deficiencies in the prior art, a kind of solution concentration measuring method that excites Gu Sihanxin displacement enhancement effect based on guided mode is proposed, employing is deposited on the double-sided metal that metal film-upper strata optical glass sheet-sample cavity-lower floor's optical glass sheet on the optical glass sheet of upper strata-be deposited on metal film on lower floor's optical glass forms and coats waveguiding structure, in this structure, upper strata optical glass sheet, sample cavity and lower floor's optical glass sheet are as ducting layer; Like this, just sample to be tested is placed the ducting layer of waveguiding structure, light wave is propagated in ducting layer with the oscillating field form, and the concentration of energy of light wave here, and is also the strongest with the interaction of ducting layer medium.Strengthen the Gu Sihanxin displacement by the number percent that increases incident optical energy in the sensitive zones like this, improved the sensitivity of surveying.
The present invention is achieved by the following technical solutions, the double-sided metal that the present invention utilizes laser beam to be focused into to be mapped to metal film-upper strata optical glass sheet-sample cavity-lower floor's optical glass sheet of being deposited on the optical glass sheet of upper strata-be deposited on metal film on lower floor's optical glass to form coats in the waveguiding structure, when satisfying phase-matching condition, reflected light can produce an absorption peak, this constantly the phase place of the relative incident light of reflected light change, so cause between reflected light and the incident light producing a lateral shift; And then utilize this displacement to be opposite to the highstrung characteristic of testing liquid variations in refractive index in the sample cavity, realize real-time measurement by detection, thereby obtain the variation of solution concentration for the variations in refractive index of liquid sample to the displacement size.
Concrete steps of the present invention are as follows:
The first step: select material and relevant parameters, form laser and incide metal film-sample cavity of being deposited on the optical glass sheet of upper strata-be deposited on waveguiding structure that the metal film on lower floor's optical glass constitutes; Sputter metal-coated membrane on two optical glass after the polishing, upper strata optical glass sheet and lower floor's optical glass sheet are clamped by upper strata metal film, lower metal film respectively, make upper strata metal film, upper strata optical glass sheet, sample cavity and lower floor's optical glass sheet, lower metal film constitute an optical waveguide, its at the middle and upper levels optical glass sheet, sample cavity and lower floor's optical glass sheet as ducting layer, pad in the both sides of sample cavity with equal thickness is bonded together the upper and lower glass sheet, and the thickness of sample cavity is by the thickness decision of pad; Boring two apertures on lower floor's optical glass sheet, is respectively the solution inlet and the taphole of sample cavity, and testing sample enters solution cavity by the solution inlet, and waste liquid is discharged by taphole;
The K9 glass that the upper and lower glass sheet polishes with height, thickness is 0.1mm; Be deposited on thickness of metal film on the optical glass sheet of upper strata between 33nm-50nm, the thickness of sample cavity is deposited on thickness of metal film on lower floor's optical glass sheet greater than 100nm between 0.5mm-1mm; Metal material is selected gold or silver-colored.
Second step: above-mentioned waveguiding structure is installed on the top rotary table of optics rotation platform, make the central shaft of prism bottom surface through rotation platform, photodetector is fixed on the lower rotary table of optics rotation platform, makes laser beam, prism bottom surface normal and photodetector center in one plane;
The 3rd step: select laser incident angle and polarizing method.With the laser beam of a fixed wave length successively by polaroid and diaphragm, select incident angle, laser is incided on the prism, laser is chosen in absorption peak top (reflectivity maximum) between 3 °～10 ° at the incident angle on the optical waveguide, polarization mode rotatory polarization sheet is according to actual needs selected TE mould or TM mould, usually select transverse electric wave incident, regulate slit simultaneously and make that the hot spot of incident beam is less;
The 4th step: select optical maser wavelength.The position of regulating one dimension Position-Sensitive Detector (PSD) makes reflected light impinge perpendicularly on the center of PSD, and the incident wavelength of adjusting tunable laser selects wavelength in the scope that can excite Gu Sihanxin displacement peak, and is in the negative edge at displacement peak; The output wavelength of tunable laser is adjustable between 858nm-863nm.
The 5th step: utilize PSD to measure from the side direction Gu Sihanxin displacement of the relative incident light of laser of coupled apparatus bottom reflection, calculate corresponding solution change of refractive according to the size of displacement, the apolegamy standard solution draws the numerical value of solution concentration by calibration.
Laser beam is focused into and is mapped in the above-mentioned waveguiding structure, when fixing incident angle, if the light signal of certain incident wavelength be able to satisfy the waveguide-coupled condition, will be coupled in the waveguiding structure, cause catoptrical phase change, make and produce a tangible lateral shift between reflected light and the incident light.The refractive index of ducting layer is one of principal element of decision reflective phase variation.Therefore, when in the sample cavity during as the refractive index generation subtle change of the sample to be tested of ducting layer, corresponding variation also can take place in catoptrical phase place, thereby brings the variation of lateral shift.And the concentration feature of the testing liquid in the refractive index of sample layer and the sample cavity is closely related, and the variation of the lateral shift that this just might be by detection of reflected light comes the variation of above-mentioned characteristic is measured.
Compared with prior art, the ducting layer that sample to be tested is placed optical waveguide structure of the invention, the variation of the lateral shift by the relative incident light of detection of reflected light just can be known the change of surveying the sample refractive index, thereby can draw the size of sample concentration, improve the sensitivity of surveying significantly.In addition, by regulating the working point that optical maser wavelength can be selected the different refractivity correspondence of fluid sample.Measuring accuracy at PSD reaches under the 20nm condition, and the present invention can realize that resolution is 10
-8What magnitude was above detects fast in real time.
Embodiment
Below embodiments of the invention are elaborated: present embodiment is being to implement under the prerequisite with the technical solution of the present invention, provided detailed embodiment and concrete operating process, but protection scope of the present invention is not limited to following embodiment.
Embodiment 1:
The first step: make double-sided metal and coat waveguide, form upper strata metal film-upper strata optical glass sheet-sample cavity-lower floor's optical glass sheet of being deposited on the optical glass sheet of upper strata-be deposited on waveguiding structure that the lower metal film on lower floor's optical glass constitutes.The levels optical glass sheet select for use high index of refraction polished glass sheet (K9, n=1.507), thickness is 0.1mm, the upper strata thickness of metal film is 33nm, sample cavity thickness is 1mm, lower metal film thickness 100nm.Metal adopt gold (near the 860nm refractive index be ε=-28+i1.8), sample adopts pure water, dielectric coefficient is 1.77.
Second step: waveguiding structure is installed on the top rotary table of optics rotation platform, makes the central shaft of prism bottom surface, photodetector is fixed on the lower rotary table of optics rotation platform, make that the center of laser beam and photodetector is contour through rotation platform.
The 3rd step: the wavelength of incident laser is 858.000nm, and waist width is 1000um.Computer drives optics rotation platform makes the incident angle of laser beam incident upper strata metal film be about 3.32 °.At this moment, reflectivity reaches maximum.Incident light is a transverse electric wave.
The 4th step: regulate PSD and make reflected light impinge perpendicularly on the center of PSD, the shift value that this moment, PSD showed is 0.Regulate laser wavelength of incidence to 858.017nm, at this moment can excite the resonance absorbing peak of guided mode, and this wavelength is in the linear zone of lateral shift negative edge.
The 5th step: when the sample dielectric coefficient changes, measure the variation of reflected light lateral shift.
Can reach 2.5 * 10 according to gauging surface to the detection of sample dielectric coefficient
-9(displacement resolution that PSD measures is 20nm).Different sample dielectric coefficients and change in displacement are listed in the following table in the sample cavity.
| The sample dielectric coefficient | Reflected light displacement (micron) |
| 1.77+5×10 -9 1.77+2.5×10 -9 1.77 1.77-2.5×10 -9 1.77-5×10 -9 | -302.42 -302.44 -302.46 -302.48 -302.50 |
Embodiment 2:
The first step: make double-sided metal and coat waveguide, form metal film-upper strata optical glass sheet-sample cavity-lower floor's optical glass sheet of being deposited on the optical glass sheet of upper strata-be deposited on waveguiding structure that the metal film on lower floor's optical glass constitutes.The levels optical glass sheet select for use high index of refraction polished glass sheet (K9, n=1.507), thickness is 0.1mm, the upper strata thickness of metal film is 40nm, sample cavity thickness is 0.75mm, lower metal film thickness 300nm.Metal adopt gold (near the 860nm refractive index be ε=-28+i1.8), sample adopts pure water, dielectric coefficient is 1.77.
Second step: waveguiding structure is installed on the top rotary table of optics rotation platform, makes the central shaft of prism bottom surface, photodetector is fixed on the lower rotary table of optics rotation platform, make that the center of laser beam and photodetector is contour through rotation platform.
The 3rd step: the wavelength of incident laser is 860.000nm, and waist width is 1000um.Computer drives optics rotation platform makes the incident angle of laser beam incident upper strata metal film be about 7.00 °.At this moment, reflectivity reaches maximum.Incident light is a transverse electric wave.
The 4th step: regulate PSD and make reflected light impinge perpendicularly on the center of PSD, the shift value that this moment, PSD showed is 0.Regulate laser wavelength of incidence to 860.026nm, at this moment can excite the resonance absorbing peak of guided mode, and this wavelength is in the linear zone of lateral shift negative edge.
The 5th step: when the sample dielectric coefficient changes, measure the variation of reflected light lateral shift.
Can reach 1.5 * 10 according to gauging surface to the detection of sample dielectric coefficient
-8(displacement resolution that PSD measures is 20nm).Different sample dielectric coefficients and change in displacement are listed in the following table in the sample cavity.
| The sample dielectric coefficient | Reflected light displacement (micron) |
| 1.77+3×10 -8 1.77+1.5×10 -8 1.77 1.77-1.5×10 -8 1.77-3×10 -8 | -133.87 -133.89 -133.91 -133.93 -133.95 |
Embodiment 3:
The first step: make double-sided metal and coat waveguide, form metal film-upper strata optical glass sheet-sample cavity-lower floor's optical glass sheet of being deposited on the optical glass sheet of upper strata-be deposited on waveguiding structure that the metal film on lower floor's optical glass constitutes.The levels optical glass sheet select for use high index of refraction polished glass sheet (K9, n=1.507), thickness is 0.1mm, the upper strata thickness of metal film is 50nm, sample cavity thickness is 0.5mm, lower metal film thickness 500nm.Metal adopt gold (near the 860nm refractive index be ε=-28+i1.8), sample adopts pure water, dielectric coefficient is 1.77.
Second step: waveguiding structure is installed on the top rotary table of optics rotation platform, makes the central shaft of prism bottom surface, photodetector is fixed on the lower rotary table of optics rotation platform, make that the center of laser beam and photodetector is contour through rotation platform.
The 3rd step: the wavelength of incident laser is 862.000nm, and waist width is 1000um.Computer drives optics rotation platform makes the incident angle of laser beam incident upper strata metal film be about 9.83 °.At this moment, reflectivity reaches maximum.Incident light is a transverse electric wave.
The 4th step: regulate PSD and make reflected light impinge perpendicularly on the center of PSD, the shift value that this moment, PSD showed is 0.Regulate laser wavelength of incidence to 862.022nm, at this moment can excite the resonance absorbing peak of guided mode, and this wavelength is in the linear zone of lateral shift negative edge.
The 5th step: when the sample dielectric coefficient changes, measure the variation of reflected light lateral shift.
Can reach 4.5 * 10 according to gauging surface to the detection of sample dielectric coefficient
-8(displacement resolution that PSD measures is 20nm).Different sample dielectric coefficients and change in displacement are listed in the following table in the sample cavity.
| The sample dielectric coefficient | Reflected light displacement (micron) |
| 1.77+9×10 -8 | -59.43 |
| 1.77+4.5×10 -8 | -59.45 |
| 1.77 | -59.47 |
| 1.77-4.5×10 -8 | -59.49 |
| 1.77-9×10 -8 | -59.51 |
Claims (9)
1, a kind of solution concentration measuring method that excites Gu Sihanxin displacement enhancement effect based on guided mode, it is characterized in that, the double-sided metal that utilizes laser beam to be focused into to be mapped to metal film-upper strata optical glass sheet-sample cavity-lower floor's optical glass sheet of being deposited on the optical glass sheet of upper strata-be deposited on metal film on lower floor's optical glass to form coats in the waveguiding structure, when satisfying phase-matching condition, reflected light can produce an absorption peak, this constantly the phase place of the relative incident light of reflected light change, so cause between reflected light and the incident light producing a lateral shift; And then utilize this displacement to be opposite to the highstrung characteristic of testing liquid variations in refractive index in the sample cavity, realize real-time measurement by detection, thereby obtain the variation of solution concentration for the variations in refractive index of liquid sample to the displacement size.
2, according to claim 1ly excite the solution concentration measuring method of Gu Sihanxin displacement enhancement effect, it is characterized in that concrete steps are as follows based on guided mode:
The first step: select material and relevant parameters, form laser and incide metal film-sample cavity of being deposited on the optical glass sheet of upper strata-be deposited on waveguiding structure that the metal film on lower floor's optical glass constitutes; Sputter metal-coated membrane on two optical glass after the polishing, upper strata optical glass sheet and lower floor's optical glass sheet are clamped by upper strata metal film, lower metal film respectively, make upper strata metal film, upper strata optical glass sheet, sample cavity and lower floor's optical glass sheet, lower metal film constitute an optical waveguide, its at the middle and upper levels optical glass sheet, sample cavity and lower floor's optical glass sheet as ducting layer, pad in the both sides of sample cavity with equal thickness is bonded together the upper and lower glass sheet, and the thickness of sample cavity is by the thickness decision of pad; Boring two apertures on lower floor's optical glass sheet, is respectively the solution inlet and the taphole of sample cavity, and testing sample enters solution cavity by the solution inlet, and waste liquid is discharged by taphole;
Second step: waveguiding structure is installed on the top rotary table of optics rotation platform, make the central shaft of prism bottom surface through rotation platform, photodetector is fixed on the lower rotary table of optics rotation platform, makes laser beam, prism bottom surface normal and photodetector center in one plane;
The 3rd step: with the laser beam of a fixed wave length successively by polaroid and diaphragm, select incident angle that laser is incided on the prism, incident angle is chosen in the top of a resonance absorbing peak, polarization mode rotatory polarization sheet is according to actual needs selected TE mould or TM mould, regulates slit simultaneously and makes that the hot spot of incident beam is less;
The 4th step: the position of regulating the one dimension Position-Sensitive Detector makes reflected light impinge perpendicularly on the center of one dimension Position-Sensitive Detector, regulate the incident wavelength of tunable laser, select wavelength in the scope that can excite Gu Sihanxin displacement peak, and be in the negative edge at displacement peak;
The 5th step: utilize the one dimension position sensitive detector to measure from the side direction Gu Sihanxin displacement of the relative incident light of laser of coupled apparatus bottom reflection, size according to displacement calculates corresponding solution change of refractive, and the apolegamy standard solution draws the numerical value of solution concentration by calibration.
3, according to claim 1 and 2ly excite the solution concentration measuring method of Gu Sihanxin displacement enhancement effect based on guided mode, it is characterized in that, described the upper and lower glass sheet is with the K9 glass of high polishing, and thickness is 0.1mm.
4, according to claim 1 and 2ly excite the solution concentration measuring method of Gu Sihanxin displacement enhancement effect, it is characterized in that, be deposited on thickness of metal film on the optical glass sheet of upper strata between 33nm-50nm based on guided mode.
5, according to claim 1 and 2ly excite the solution concentration measuring method of Gu Sihanxin displacement enhancement effect, it is characterized in that the thickness of described sample cavity is between 0.5mm-1mm based on guided mode.
6, according to claim 1 and 2ly excite the solution concentration measuring method of Gu Sihanxin displacement enhancement effect, it is characterized in that, be deposited on thickness of metal film on lower floor's optical glass sheet greater than 100nm based on guided mode.
7, according to claim 1 and 2ly excite the solution concentration measuring method of Gu Sihanxin displacement enhancement effect, it is characterized in that based on guided mode, described metal film, its metal material is selected gold or silver-colored.
8, according to claim 2ly excite the solution concentration measuring method of Gu Sihanxin displacement enhancement effect based on guided mode, it is characterized in that, laser is chosen in absorption peak top between 3 °～10 ° at the incident angle on the optical waveguide.
9, according to claim 2ly excite the solution concentration measuring method of Gu Sihanxin displacement enhancement effect, it is characterized in that the output wavelength of described tunable laser is between 858nm-863nm based on guided mode.
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102692392A (en) * | 2011-03-25 | 2012-09-26 | 上海光刻电子科技有限公司 | Device for measuring gas and liquid refractive indexes |
| CN105158208A (en) * | 2015-06-23 | 2015-12-16 | 中北大学 | Detection method for refractive index of SPR high-sensitivity medium of Goos-Haenchen shift |
| US9250128B2 (en) | 2012-03-02 | 2016-02-02 | Beihang University | Method and apparatus for optical asynchronous sampling signal measurements |
| CN105372179A (en) * | 2015-12-09 | 2016-03-02 | 江西师范大学 | Chiral liquid enantiomeric excess measuring system, preparation method thereof and measuring method |
| CN105628651A (en) * | 2016-03-18 | 2016-06-01 | 复旦大学 | Trace liquid or gas refractive index measuring device based on surface wave evanescent field |
| CN110702659A (en) * | 2019-09-26 | 2020-01-17 | 南通大学 | Method for enhancing etching SERS chip based on double-sided metal light wave heat conduction |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102692392A (en) * | 2011-03-25 | 2012-09-26 | 上海光刻电子科技有限公司 | Device for measuring gas and liquid refractive indexes |
| US9250128B2 (en) | 2012-03-02 | 2016-02-02 | Beihang University | Method and apparatus for optical asynchronous sampling signal measurements |
| US9863815B2 (en) | 2012-03-02 | 2018-01-09 | Beihang University | Method and apparatus for multifrequency optical comb generation |
| CN105158208A (en) * | 2015-06-23 | 2015-12-16 | 中北大学 | Detection method for refractive index of SPR high-sensitivity medium of Goos-Haenchen shift |
| CN105158208B (en) * | 2015-06-23 | 2018-03-02 | 中北大学 | A kind of Gu Sihanxin displacements SPR high sensitivity medium refraction index detection methods |
| CN105372179A (en) * | 2015-12-09 | 2016-03-02 | 江西师范大学 | Chiral liquid enantiomeric excess measuring system, preparation method thereof and measuring method |
| CN105628651A (en) * | 2016-03-18 | 2016-06-01 | 复旦大学 | Trace liquid or gas refractive index measuring device based on surface wave evanescent field |
| CN112567228A (en) * | 2018-10-18 | 2021-03-26 | 聚合物表征股份有限公司 | Deflection-type refractometer with extended measuring range |
| CN110702659A (en) * | 2019-09-26 | 2020-01-17 | 南通大学 | Method for enhancing etching SERS chip based on double-sided metal light wave heat conduction |
| CN112033931A (en) * | 2020-09-07 | 2020-12-04 | 科竟达生物科技有限公司 | Optical waveguide, manufacturing method thereof, biosensing system comprising optical waveguide and application of biosensing system |
| CN112033931B (en) * | 2020-09-07 | 2024-04-12 | 科竟达生物科技有限公司 | Optical waveguide, manufacturing method thereof, biosensing system comprising optical waveguide and application of biosensing system |
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