CN101040061B

CN101040061B - An elongated gas ditribution system

Info

Publication number: CN101040061B
Application number: CN2005800346371A
Authority: CN
Inventors: A·布隆迪尔; W·德博斯谢尔; P·戈德里斯; I·范德皮特
Original assignee: Bekaert Advanced Coatings NV
Current assignee: Soleras Advanced Coatings BV
Priority date: 2004-10-11
Filing date: 2005-10-04
Publication date: 2011-07-06
Anticipated expiration: 2025-10-04
Also published as: EP1807547A1; JP5046334B2; WO2006040275A1; JP2008516084A; CN101040061A

Abstract

An elongated gas distribution system is described for use in a plasma deposition or plasma cleaning apparatus. The system is provided in the form of a stack of elongated strips. The strips have grooves milled in them that form channels once the strips are stacked upon each other. Such an arrangement is particularly design flexible and allows for a finely branched gas distribution tree. The incorporation of gas flow controlling means such as valves or vanes inside or on the gas distribution system becomes also possible. By actuating these gas flow controlling means based on the input of a plasma, deposited layer or cleaned substrate feedback parameter, a fast responding gas distribution system is realised. In addition, some of the strips can be used to incorporate a cooling circuit for cooling the elongated gas distribution system.

Description

Elongated gas distribution system

Technical field

The present invention relates to a kind of elongated gas distribution system that is used for being installed in plasma apparatus.

Background technology

The technology of utilizing the relevant spraying coating process of vacuum that large area substrates is handled seems very important.For example, on line processing big area pane is just becoming more and more important in large-scale vacuum equipment, becomes to have for example low-E or antifouling coating because it can fit up building glass.In these spraying equipments, substrate is transferred process perpendicular to the localized elongated spraying of throughput direction source.This spraying source is the rotary spraying target utmost point (target) preferably, maintains by the plasma track of magnetically confined (racetrack) on its surface.Plasma body is that the ionizing event by rare gas element, especially argon produces.Because negative bias is applied in the target utmost point, so the ar atmo after the ionization extremely clashes on the surface target, thereby launches target atom from the target utmost point.Along with the surface of the atomic collision substrate of launching, coating begins to form.When being applied in during handling such as oxygen or this class reactive gas of nitrogen (except that rare gas element and even alternative rare gas element), as long as the target atom of these gases and collision reacts, composite bed just will form.

Except deposited coatings, plasma body can also be used for the clean surface.When using like this, substrate is retained as negative bias, and lip-deep pollutent is disposed in the impact effect of argon ion.This plasma cleans mode constantly makes progress from the field that steel plate is disposed organic pollutant in the preprocessing technical field that is difficult to coat polymers (PTFE, PVDF etc.) and before further handling.

In above-mentioned two kinds of application, handling gas must be transported in the vacuum apparatus.Because equipment is designed to be varied day by day, so the distribution of gas is becoming important problem.In fact, when plasma gas only when the target utmost point one side is carried, an other side will lack gas.This problem more salient point is the gas that reacts away in the treating processes is carried out the reactive gas supply.Can cause composite membrane on stoichiometry, to change to some extent at the target utmost point one side delivering gas, because gas is consumed when diffusing to an other side along substrate width.

Gas distributing system in the prior art equipment is made out of tubes.One of device of Miao Shuing is a kind of pipe the earliest, and this pipe has the aperture (referring to US5,096,562) that fixed spacing extends along the target utmost point.US4,849,087 have described the system that a kind of pre-mixed gas distributes by gas manifold, and there are a plurality of pipes this gas manifold back and finish with nozzle near elongated planar target.The air-flow of each pipe of process is subjected to the control of external valve, and the feedback signal of this external valve origin auto-deposition film drives.German patent application DE4412541 has described a kind of gas inlet device, it is characterized in that, equates with flow resistance value between each outlet opening along gas inlet that planar target is provided with.But the constitutional features that must implement the above-mentioned gas device is not described.The advantage of this device is calculated at " effect lacquer device association " the 44th Annual Technical Conference collection of thesis (ISSN0737-5921, the 204th page) " the gas inlet system that is used for big area linear magnetron spraying source " literary composition by people such as Milde.

The problem that the gas distributing system of prior art exists has following four aspects:

When needing air-flow to change in the chamber, before flowing to the chamber outlet opening, the control valve change to spend for some time, cause the time lag between signal and the response thus.

Handle gas for each different gas distributing systems must be installed, cause the cost of equipment to increase like this.

When target utmost point width need be carried differentiated gas, more than one separate gas distribution system (for example three: left side, centre, right side) must be installed, cause the cost of gas distributing system to increase like this.

Especially under the situation of plasma cleansing apparatus that eliminates, owing to use as anode, it is very hot that gas distributing system can become.So this gas distributing system must be cooled off independently, to prevent the distribution system distortion.In addition, in spraying equipment, in the time of near gas distributing system for example is positioned at plasma body, the cooling of this gas distributing system just becomes and meets the requirements.

Because the discontented used gas distributing system of prior art that is intended to, inventor's research that finds a new way is implemented a kind of elongated, rapid reaction and is easy to control and can carries out the refrigerative gas distributing system, and this system is convenient to carry differentiated gas along plant width.

Summary of the invention

The objective of the invention is to solve the problem of elongated gas distribution system in the plasma deposition of prior art or the plasma cleansing apparatus that eliminates.Another object of the present invention provides a kind of elongated gas distribution system, and processing gases different in this system can distribute by single assembly.Another purpose of the present invention is to provide differentiated gas supply at the whole width of equipment.A further object of the present invention provides a kind of rapid reaction gas distributing system aspect gas supply and the differentiated gas delivery of change.The present invention also has a purpose to provide a kind of gas distributing system that wherein has the monoblock type cooling system.

A first aspect of the present invention relates to the assemblage characteristic of claim 1.Here, to a kind of elongated gas distribution system proposition claim that is used for being installed in plasma deposition or plasma cleansing apparatus that eliminates, this system comprises the outlet of at least one inlet and at least one series, and each in the described series outlet is all corresponding with one of described inlet.A series of outlets mean to have two outlets at least, but preferably more.Most preferably be about 100 outlets.Described outlet is the hole that gas flows into the equipment vacuum chamber.Can predict, these holes have the replaceable exhaust nozzle that is assemblied in the hole.When the gas of single outlet is followed return path from series in the back, will always arrive the identical inlet that belongs to this each outlet of series.Along being basically perpendicular to substrate travel direction and the direction that is basically parallel to the elongated target utmost point, this series outlet is arranged to elongated ranks.Serial outlet can line balance converter whole width, for example be used to carry rare gas element.Perhaps the outlet of different series can be arranged to single ranks, for example carries on left side, centre and the right side of equipment.This is preferred setting for carrying reactive gas, because it is convenient to carry differentiated gas at the entire equipment width, therefore is convenient to control the membrane component of whole substrate width.Certainly, the outlet of the series more than three can be arranged in delegation, its limit also must be determined by the inlet quantity that is contained on the gas distributing system.

The invention is characterized in the mode of structure gas distributing system.This system comprises a series of lath, and its length equates substantially with plant width.This length Anywhere all can be at 0.30m between the 10m.The thickness of lath depends on space that gas distributing system is used and the total gas flow rate that will obtain.In fact, this thickness usually will be at 1mm between the 70mm.The width of lath is determined by the span that must overcome and total gas flow pattern that must obtain.Usually, this width will be at 1cm between the 30cm.The quantity of lath depends on inlet quantity and/or must be delivered to the quantity of the processing gas of vacuum chamber.Implement the present invention and need at least two laths.

Because described gas distributing system is elongated basically, therefore, this series outlet opening is arranged with length dimension.Pneumatic outlet series preferred arrangements is on the side that is formed by stave lengths and gauge.Another possibility is, pneumatic outlet series becomes number row ejection gas, and these outlets are arranged in the outside (long * wide) of one of two most external laths piling up part.

Lath is made by the suitable material of the correct combination with resistance to air loss, strength-to-weight ratio, wearing quality and heat impedance.For some situation, good specific conductivity may be important, for example may serve as in the operation of anodic plasma cleans in gas distributing system.In other cases, having isolated gas distributing system, may be useful for preventing to form electric arc for example.Equally, if plasma body forms near gas distributing system, magnetic also may be important.According to its magnetic, can make gas distributing system is neutral (magnetic permeability is approaching with it) or be ferromegnetism (so this material is to magnetic line of force channeling conduct of the magnet that may be connected to gas distributing system).

The lath that has been found that aluminium and stainless steel is practical material.High performance polymer resembles Flametec ^TMKytec

PVDF (poly(vinylidene fluoride)) or ECTFE (multipolymer of ethene and trifluorochloroethylene), solid relatively, electrical isolation of consume and the inactive material of chemical property are not operable yet.Matrix material it is contemplated that employing equally.

Each described lath has first side and second side.Side is represented the surface that formed by length and width dimensions.Has groove above at least one of these sides.This groove is configured to form passage when lath self piles up.Each described passage is connected one of described inlet with corresponding series outlet.Described groove can be made by following any suitable operation:

The milling and boring heads of making the highly preferred mode of groove and being with semicircle or U-shaped carries out milling.The milling machine that is to use numerical control to handle of most convenient, this milling machine can mill out the very complicated groove of figure, thereby form the passage that must not finish by traditional tubulation method.

With above-mentioned similar method is to adopt the selective etch method, and but, this method is not too preferred owing to the size of lath.

Also can utilize hydropress that suitable shaped bar is pressed into lath continuously and make groove.Described bar must be much harder than the material of lath.Required figure also can be by the disposable acquisition of figure negative film to be impressed.Certainly, this negative film also must be stiffer than strip material.

Groove also can be cast in mould by strip material and obtain, and described mould has the negative shape of distributing passage.Because its cost and ineffective activity, this is a preferable methods least.

It is fully airtight under low pressure reduction that lath should be stacked into its passage.This can be by forcing together lath or utilize bonding with bolting or with clamping system with it, or make formation pile up part fully other any ways of gastight realize.

Another mode (dependent claims 2) that obtains airtight passage is that other any cutting unit cutting channels that for example utilize laser cutting machine, flame burner or be suitable for cutting material run through lath.Then will lose its adhesivity and must before lath is stacked, be positioned between adjacent two laths (being very similar to the jigsaw puzzle that has the gap between the sheet spare).

By in the boring of the appropriate location of lath, can obtain more complicated passage, so that passage can change aspect (dependent claims 3) to another lath from a lath.

Air flow controller can be installed in and describedly pile up among the lath or (dependent claims 4) on it.Air flow controller represents to be that this area is used to block, partial blocking air-flow or make any known devices of airflow diversion.Air flow controller can be installed on the lath that piles up, and for example is installed in the length * wide outside of most external lath.For example, passage can be by being formed on the outside of the first hole directed outwards lath on this outer strip.On this outer strip, gas control equipment continues its path at passage and is mounted before through second hole on the same lath.Gas control equipment also can be embodied in the inside of piling up lath, for example throttle plate or splitter is implemented in the lath.

Air flow controller can off line be regulated, and just no matter when equipment shuts down, and control device all can work.Yet when spraying equipment moved, air flow controller can remote adjustment more preferably.This can finish (dependent claims 5) by following several method:

With the method for machinery, at this moment, power resembles bar, lever, gear, hawser or other analogue and passes to gas control equipment by the solid-state intermediate from the vacuum external drive.

With electronic method, at this moment, power is applied in to very aerial gas control equipment by electromagnetism or piezoelectric transducer, and described transmodulator is by the lead power supply that is connected with the outside.

Use the air operated method, at this moment, power is applied in to gas control equipment by gas intermediate.This gas intermediate is used rare gas element in the treating processes preferably, because this gas for example can enter in the chamber after using.In addition, if minute leakage takes place, rare gas element can too not change treating processes yet.

The combination of aforesaid method also it is contemplated that employing certainly.

Air flow controller can be divided into two main series: valve and blade (dependent claims 6).Valve can make the air-flow that flows through passage can be progressively or continuously from no Flow-rate adjustment to peak flow.This class valve must be mounted to consistent with passage.Blade redirect to two or more passages of accepting with air-flow from a single transfer passage.Therefore, blade always will be installed in the crotch of passage.

According to the present invention's channel architecture especially easy to implement is tree structure (dependent claims 7).Any tree structure all can be easy to finish, as long as satisfy the tree structure requirement, promptly this structure has and is divided into two or more branched roots, and each branch can be divided into other branch again at its turning, and all branches finally finish with the leaf lobe.So the inlet of gas distributing system is corresponding to root, passage is corresponding to branch, and outlet series is corresponding to the leaf lobe.In described passage, variable valve can the adjustments of gas total flux; And at the separately place of two bifurcateds, blade can be regulated flowing into the branched air balance of arbitrary connection.

When only use one it is long * when all having the middle lath of groove and two side plate bars on wide two sides, just can implement gas distributing system, so that distribute two kinds of gases (dependent claims 8).

When gas during from nozzle spirt vacuum chamber, preferably use scatterer, make gas inject vacuum chamber equably.For this purpose, can use the perforated plate of cover outlet easily.In addition, have been found that the panel construction of making of the steel fiber of sintering or weaving or braiding also is practical (dependent claims 9) for diffusion gas atom on all directions.The fiber that constitutes this structure is made (preferred AISI 316L) by stainless steel, and its thickness is between 1 to 80 micron.The combination of perforated plate and sintered metal fiber lath also is fine and is included in the imagination of the present invention.

Gas distributing system can also become integral body to finish (dependent claims 10) with cooling system.In fact, when using at least one side of lath, can add the cooling channel easily with the identical mode of making gas distribution channel.This class passage will have fluid intake and corresponding fluid outlet, and fluid intake is used to import cooling fluid, and outlet is used to discharge the fluid of heating.It is snakelike that the shape of described passage can be, and has inlet and have outlet at the other end at an end of single passage.The transfer passage that perhaps can comprise broad, to augment one group of parallel subchannel, these subchannels finish with the collection channel that links to each other with single outlet at its turning.Perhaps can be reticulated structure.If a cooling channel is not enough, certainly the not homonymy at lath adds more cooling channel.Described fluid can be gas or liquid.

According to a second aspect of the invention, also a kind of plasma deposition or plasma cleansing apparatus that eliminates are proposed claim, this equipment comprises above-mentioned gas distributing system (independent claim 11).

Preferably, the gas distributing system according to the present invention use (dependent claims 12) that combines with feedback system.This feedback system uses the concrete parameter (ionic concn of certain material that obtains such as the gaseous fraction that obtains by online mass spectroscopy or by emission spectroscopy measurements or the target voltage that changes along with isoionic state) of plasma body to come the gas control equipment of remote control gas distributing system as input.The another kind of practice is that feedback signal can deposit to on-chip coating performance for the basis, for example resembles specific refractory power, conductivity, transparency or other any measurable parameters.If using plasma is removed material from substrate, gas distributing system also can be controlled such as the amount of residue coating according to the performance of residue coating.

Description of drawings

To the present invention be described in further detail referring now to accompanying drawing, wherein,

Fig. 1 draws prior art embodiment's " pipe-in-pipe " system.

Fig. 2 is a synoptic diagram, and wherein, gas distributing system can be used on the big area coating machine usually.

Fig. 3 illustrates the exploded view of first embodiment of the invention, and wherein, gas distributing system allows to distribute two kinds and handles gas.

Fig. 4 illustrates and implements another way of the present invention.

Fig. 5 draws air-flow can be with the system of blade control.

Fig. 6 a, 6b and 6c are that adjusting vane is described in more detail.

Fig. 7 a and 7b illustrate the diaphragm valve of electromagnetic control and how to implement according to the present invention.

Fig. 8 a and 8b illustrate the simplest pattern of valve easily again, and this valve can the off line adjustment.

Fig. 9 illustrates the additional lath that can be used for the cooling gas distribution system.

Figure 10 a illustrates when target utmost point next door does not have available space, implements the another kind of mode of elongated gas distribution system.

Figure 10 b illustrate from the top look (length * wide surface), 10c illustrate from a side look (length * thick surface), 10d looks (length * wide surface) from the bottom and 10e looks (length * thick surface) elongated gas distribution system layout drawing from opposite side.

Embodiment

Fig. 1 illustrates the gas distributing system of prior art: gas 140 enters treatment chamber 110 by first pipe 120.This first pipe is by at first being assigned to gas coaxial being fixed in first pipe 120, bigger second pipe 130 along the hole 122 of this length of tube.In this second pipe, series of nozzles 132 further is assigned to gas in the chamber 110.Cavity between two pipes plays a part the expansion buffer container, and gas can be expanded equably with the width of middle pressure through treatment chamber.Yet described cavity keeps for some time with gas, makes the gas delivery amount be delayed according to the quick change that plasma parameter changes.

Fig. 2 illustrates according to the present invention the gas distributing system that preferably can be used in the large area plasma equipment 200.Aforesaid device comes down to large-scale vacuum chamber 210, and it has essential supplementary unit, to keep the vacuum (not shown), also to supply with and transportation large-scale substrate 220 by means of this very aerial roller 230 usually.On vacuum chamber top, the top case that modularization is installed and can is easy to change is such as 240.Two pairs of end block (not shown) that these top casees 240 utilize the target utmost point to link to each other with the top case load two tubular target utmost points 250,250 '.The top case also holds all essential pipelines, electric network and mechanical drive (not shown), so that respectively it is supplied with refrigerant and electric current at the target utmost point 250,250 ' when being driven in rotation.

Gas distributing system

260 and 270 is contained in target utmost point next door, and

air feeder

280 and 290 is transported to desired gas the vacuum chamber 210 via top case 240 and gas distributing system 260,270 from the source of the gas (not shown).

Now the gas distributing system of first embodiment of the invention will be described in more detail by means of Fig. 3.Here pile up three laths 310,320 and 330 and constitute gas distributing system 300.These laths are by the aluminium alloy (percentage composition that is referred to as AIMgSi1 usually, by weight: Si (0.7-1.3), Mg (0.4-0.8), Fe (maximum 0.5), Cu (maximum 0.1), Mn (0.4-0.8), Zn (maximum 0.2), Ti (maximum 0.2), all the other compositions are AI) make, and have the thickness of 7mm, the width of 100mm and the length of 900mm.Yet its length can easily increase to 3860mm, even more, at present the maximum target utmost point length of using (152 inches).In first lath 310, milled out the binary tree figure.Groove 316 takes the shape of the letter U and has the width of 8mm.Inlet 312 links to each other with outlet series, two outlets in this series with 314,314 ' represent.The degree of depth of above-mentioned U-shaped groove does not wait from 8mm to 0.5mm.This degree of depth depends on the bifurcated aspect of passage: at each crotch, separately the degree of depth of arm is half of the supply arm degree of depth.Like this, pneumatic separation is equal substantially at each crotch, and pressure reduction keeps equating between the bifurcated aspect.Therefore, when the degree of depth of going into port recess 312 is 8mm, outlet 314 the degree of depth will be 0.5mm, export 314 ' the degree of depth then will be 2mm.Yet, laterally even on the width of gas distributing system in order to ensure gas delivery, also must regulate the spacing between each outlet.From above clearly, obtaining the most preferred mode of above-mentioned horizontal homogeneity is to use and has 2 ⁿThe balanced binary tree of individual outlet, wherein ' n ' is the number (preferred n is greater than 4) of bifurcated aspect.

In lath 320, two

surge volumes

322 and 328 have been milled out.These two volumes from enter the mouth 321 towards lath middle part the horizontal direction along lath increases gradually.Groove is milled out such as 324, and is divided into two passages 326 with outlet 327, enters in the vacuum chamber so that gas can be expanded.

Lath 330 is carved into passage wherein when being formed with and linking to each other with lath 320.Lath 330 does not have special embossing.The bottom side of lath 320 is formed with the passage that is carved into lath 310 equally.These three laths are by stationary installation, for example screw bolt and nut to 340 and 350,340 ' with 350 ' and 340 " with 350 " closely be connected each other.The passage of lath 310 is used for carrying rare gas element, and the graphic structure of lath 320 is used for carrying reactive gas.This bilayer structure of lath 320 is convenient to carry differentiated gas between the left and right sides of gas distributing system.This gas distributing system is installed with horizontal vertical dimension, enable like this to save space mounting tubular target extremely near.In addition, when when above-mentioned direction is installed, the lath that piles up has enough rigidity, and is sagging to avoid gas distributing system.

Fig. 4 illustrates the second embodiment of the present invention, and this embodiment has the part that piles up of 3 laths 410,420,440 of being made by stainless steel (AISI 316).Lath 410 and 440 is barren, and does not have any embossing or needle drawing.At this moment lath 420 is cut into several piece.Because cutting is finished according to fixed width, therefore, the gas differential pressure between the different bifurcated aspects will successively decrease towards outlet.After cutting, lath 420 resolves into some, such as 422,424,426; 428 and 430,432.These plates must installed on the lath 410 in the original position amalgamation, for example by bonding.By lath 440 is bonded in other above lath, form channel architecture, and have inlet 434 and several outlets, resemble 436.The elongated gas distribution system of finishing comprises U-shaped perforated plate 452, and this perforated plate has and is used for the slit 450 of gaseous diffusion to equipment.Perforated plate 452 for example can utilize the screw (not shown) to be clamped in piling up on the part and with it of assembling and fix.Though not shown, same good imagination is that the lath with the sintered metal fiber structure replaces plate 452.Perhaps the lath of steel fiber structure can utilize the perforated plate fix in position.

The embodiment of Fig. 5 has introduced by the imagination of the hole change aspect of plate mainspring cock jewel and the use of gas control equipment.This gas distributing system comprises three laths 510,520 and 540, and they self pile up.Gas enters by the inlet 522 that is engraved on the lath 520.The hole 524 of drilled through strip 520 is transported to the part gas supplied in the tree structure 512 that is engraved in the adjacent slat 510.The gas of other parts flows to the gas control equipment 550 that is contained on the lath 540 by groove 526.Described gas control equipment is assigned to air-flow in groove 528 and 532.Gas control equipment 550 will further be illustrated in the note of Fig. 6.End in

groove

528 and 532, gas is transferred to next lath 510 by communicating aperture 530 and 534.Lath 510 has three needle drawings 516,512 and 514, a series of outlets are supplied with in each needle drawing: although the middle series outlet of being supplied with by tree structure 512 provides stable gas supply at the gas distributing system middle part, the air balance between left part tree structure 516 and the right part tree structure 514 still can change arbitrarily by gas control equipment 550.The use of above-mentioned communicating aperture has increased the design flexibility of gas distributing system greatly, because it makes the cross-over connection of gas with various passage become possibility.

Use the gas control equipment 550 that Fig. 6 describes Fig. 5 in more detail now.At gas control equipment is under the situation of blade, needs two

laths

630 and 640 to implement this gas control equipment at least.In first lath 630, mill out three grooves each other in hexagonal angle: gas is infeeded and is transported in

passage

614 and 612 610 and (illustrates from side in Fig. 6 b, illustrate from the top in Fig. 6 c).In second lath 640, be processed with step-like circular hole.In this hole, comprise that the wringing fit splitter 600 of circular lid 606 and 120 ° of sector diffuence devices 602 can be rotated.Shunting device 602 is made by the compressible again material that slides, such as being the PTFE or the Hypalon that can buy from " Du Pont-Dao resilient material " company

This shunting device is to the inlet part of

passage

612 and 614 or all stop up, but owing to be the hexagonal angle setting, so be used for the area that the total area of gaseous emission remains unchanged and equals transfer passage 610.Therefore, this set makes the air-flow of input can be divided into two independently air-flows, and can not change the total amount of discharging gas.Described splitter utilizes retaining ring 604 fix in position, and this retaining ring tightens up, maybe can be screwed in the hole of lath 640 by screw and lath 640.Sealing-ring 605 is guaranteed the resistance to air loss of entire structure.So, by rotating splitter 600, the balance that just can regulate output gas flow easily.This adjusting can be finished by manual intervention off line, or mechanical gear and online the finishing of toothed lath device by remote control electric stepper-motor or long-range driving.

Fig. 8 a and 8b illustrate two simply and very practical online valve embodiment.Fig. 8 a illustrates first lath 820 and second lath 810 that is connected with each other.Lath 820 has the passage 822 of wherein slotting with certain groove width.Bolt 802 is screwed in the lath 810 and can makes to face down and withstands hole 812.When bolt was screwed in the screw, the gas passage was partially or completely stopped up.Certainly, the diameter of bolt must be greater than width of channel.Fig. 8 b also is illustrated in the passage 852 that forms between two

laths

854 and 853, and this passage can be rotated formula bolt 856 and stop up, the hole wringing fit that described bolt and drilled through strip 853 and part enter lath 854.Bolt 856 has along the drilled through hole 858 of diameter.Bolt 856 utilizes the fix in position with lath 852 fixed U-shapeds folder 864, in the ring groove 866 of described lath 852 stud bolts 856.Sealing-ring 862 guarantees that valve keeps resistance to air loss.Regulate the orientation of bore hole 858 by inserting slit 860 rotating bolts 856, can regulate the air-flow that flows through passage 852 with respect to passage 852 with screwdriver.

It is how can conveniently implement between two laths 710 and 720 of gas distributing system that Fig. 7 illustrates motorized valve.Fig. 7 a illustrates the transverse section of valve along plane AA ' shown in Fig. 7 b, and Fig. 7 b is that valve is taking off the top view that covers after 730.On the opposite face of lath 710,720, be milled with input channel 722 and output channel 712.Input channel 722 finishes at 723 places, hole of running through lath 720.Output channel 712 ends up being semicircle.Tighten up with lath 710 with the concentric ring 725 of this semicircle.Top at this ring 725 is fixed with sealing-ring 724.The sealing circle is made by elasticity and airtight material, such as available from " Du Pont-Dao the resilient material " " Viton of company

".The disc diaphragm 740 (preferably being made by extremely thin stainless steel) that has annular wrinkle at its outer rim is isolated in neutral condition with sealing-ring 724.In the zone of barrier film 740 with respect to sealing-ring 724, magnetic anchor 736 is connected with barrier film 740.This magnetic anchor can free movement in cavity 737, also has a small amount of gas in this cavity, is preferably rare gas element, and its controlled pressure is higher than the aero operating pressure that enters by input channel 722.By the electric current that applies through lead 734, can long-range driving as the electro-magnet 732 of lid 730 parts.Lid 730 utilizes sealing-ring 738 to keep resistance to air loss.Barrier film 740 is tightly connected with lid 730 by other any ways of welding or soldering or suitable this purpose.So when electric current was applied to lead 734, electro-magnet 732 made magnetic anchor 736 and the barrier film that links to each other with armature from 724 rises of its sealing-ring.Then, gas just can flow into output channel 712 from input channel 722.In case the elimination electric current, the gas that is in cavity 737 under the pressure will make the barrier film reposition, thereby stop up gas flow.In addition, the inventor also finds, by using the whisker (not shown) barrier film 740 shifted onto on the sealing-ring 724, also can no longer need high pressure, bubble-tight cavity 737: in the accompanying drawing that provides and not shown this alternative.Lid 730 can also form integral body with another lath on 720 tops.

Described in latter two embodiment, piling up on the lath or wherein forming the time response ability that whole gas control equipment has improved total system greatly.In fact because the control of gas at this moment is to carry out near gas uses part, so the delay between the cause and effect greatly reduce, thereby produce better process control.Certainly, have only when gas control equipment carries out remote control and this control and carries out according to plasma parameter and/or by the plasma-deposited coating performance of removing on substrate or from it from the vacuum chamber outside, above-mentioned advantage can be fully used.

Another embodiment that now provides the present invention to have " adding " cooling system, this cooling system can be installed on the up to the present described gas distributing system easily.In fact, Fig. 9 illustrates the lath 910 that has wherein milled out single passage 914 in addition.This passage is snake shape form, contacts with big area between the gas distributing system 930 so that guarantee cooling fluid.Cooling fluid is discharged by inlet 912 inputs and by outlet 916, and in the case as example, the both is installed on the wide * long side of lath 910.In addition, also accompany high temperature resistant packing ring 920 (and even two packing rings are better, parallel to each other, reach double insurance), thereby avoid fluid seepage in vacuum.It is firmly fixing with gas distributing system 930 to cool off lath 900 with a cover screw 922, and whole separately with one of its formation.

Figure 10 a illustrates another advantageous embodiments.This have elongated gas distribution system 1070 be installed in two rotatable target utmost points 1050,1050 ' the top.This elongated gas distribution system is contained on the top case 1040, and described top case can be loaded on the module 1010 of big area coating machine.Be provided for rare gas element 1060 and reactive gas 1060 ' the various inlet device.Figure 10 b, 10c, 10d and 10e illustrate the site plan of passage.All passages all mill out on the single rectangular strip of aluminium alloy (AIMgSi1).At an end of lath, be provided with the ingate 1080,1090,1100,1110 and 1120 that adds up to 5.The closed lath of any side of elongated gas distribution system is not shown.Lath long * set out oral pore on thick two sides.Shown in Figure 10 b, one (long * wide) surface (for simplicity, be referred to as " on " surface, although do not contain its concrete orientation) the distribution tree structure 1082 of rare gas element is shown.This tree structure 1082 is binary trees, and its either side in gas distributing system has two main bifurcateds.Add up to 32 outlet openings, all these outlet openings all are communicated with single gas inlet 1080 by rare gas element e Foerderanlage 1060 ' carry out air feed.On the D score surface, be milled with the distribution passage that is used for reactive gas.Reactive gas is by e Foerderanlage 1060 ' be transported to four different inlets 1090,1100,1110 and 1120, and these four inlets and each self-corresponding different binary tree 1092,1102,1112 link to each other with 1122.Each tree structure is launched gas along elongated gas distributing system at each regional either side with in different zones.Flowing to each gas that enters the mouth separately can control by the air throttle that is installed in the top case 1040.By gas being imported the looping pit of lath opposite side, make the cross-over connection of passage become possibility.For example, tree structure 1092 is supplied with by inlet 1090.Gas at first is imported into through path 10 98.Looping pit 1096 on the lath opposite side need be supplied with tree structure 1082 with rare gas element and intersect.So passage continues the path 10 94 by finally ending at tree structure 1092.

Describe in further detail as present embodiment, the air flow controller 1093,1103,1113,1123 that is Fig. 6,7 or 8 described such forms can easily be packed in the described elongated gas distributing system.Because these air flow controllers are positioned near the pneumatic outlet tree structure, therefore are convenient to air-flow required variation and make rapid reaction.In the present embodiment, air flow controller can utilize the

mechanism

1062,1062 that works by top case 1040 ', 1062 ", 1062

(1062 ", 1062

Owing to can not be seen by 1062,1062 ' coverage) the online adjusting.These devices can be taked the form of rotating dog, and this pin rotates in the vacuum-sealing bearing and is meshed with air flow controller 1093,1103,1113,1123.

According to front explanation and argumentation shown in the drawings, it will be appreciated by those skilled in the art that described embodiment is made multiple modification and replacement.For example, described embodiment can easily be designed to have different azimuth, such as being convenient to upwards spraying rather than spraying downwards; From the spraying of the vertical orientation target utmost point, rather than the spraying of the horizontal orientation target utmost point.Therefore, be appreciated that the present invention is not limited to disclosed specific embodiment, modification and alternative embodiment mean in the scope that is included in appended claims.

Claims

1. elongated gas distribution system that is used for being installed in plasma deposition or plasma cleansing apparatus that eliminates, it comprises:

At least one inlet, and

The outlet of at least one series, each in the described series outlet is corresponding with one of described inlet;

Described elongated gas distribution system comprises:

The lath that piles up,

Described lath has length dimension, width dimensions and gauge,

Described length dimension is greater than described gauge and described width dimensions,

Described lath has first side and second side that is formed by described width dimensions and length dimension,

In described first side and second side at least one has groove, makes to form passage when lath self piles up, and described passage is connected to described at least one inlet in the series outlet of described correspondence,

Described lath has a side and the opposite side that is formed by described length dimension and described gauge,

It is characterized in that,

Described series outlet is disposed on the length dimension of a described side or described opposite side.

2. elongated gas distribution system as claimed in claim 1, wherein, lath and two side plate bars in the middle of this system comprises one, lath has groove in the middle of described on described first side and described second side, be limited with passage on described groove each in described first side or second side, described two side plate bars form described passage on described first side and described second side.

3. as each described elongated gas distribution system in claim 1 or 2, wherein, at least one in the described lath has the hole, and described hole is used for the described groove on the side of described lath is connected to groove on the opposite side of lath.

4. elongated gas distribution system as claimed in claim 3, this system also comprises air flow controller, so that at least one the air-flow in the described passage of flowing through is controlled, described air flow controller is installed on the described lath that piles up or wherein.

5. elongated gas distribution system as claimed in claim 4, wherein, described air flow controller can be regulated by electric drive system, mechanical drive system or the Pneumatic drive system of remote control.

6. elongated gas distribution system as claimed in claim 5, wherein, described air flow controller is valve or blade.

7. elongated gas distribution system as claimed in claim 1 or 2, wherein, described inlet, described series outlet and described passage are constructed according to tree structure, described inlet is corresponding to the root of described tree structure, described passage is corresponding to the branch of this tree structure, and described series outlet is corresponding to the leaf lobe of described tree structure.

8. elongated gas distribution system as claimed in claim 1 or 2, wherein, described outlet is coated with the sintering of diffusion gas or the steel fiber structure of weaving or braiding.

9. elongated gas distribution system as claimed in claim 1 or 2, this system also comprises the monoblock type cooling system, wherein, in the described side at least one comprises the cooling channel, described cooling channel is formed by the groove on described at least one side, described cooling channel has fluid intake and fluid outlet, and described fluid outlet links to each other with described fluid intake by described passage.

10. equipment that is used for plasma deposition or plasma cleans, this equipment comprises as each described elongated gas distribution system among the claim 1-9.

11. equipment that is used for plasma deposition or plasma cleans, this equipment comprises elongated gas distribution system as claimed in claim 5, wherein, described air flow controller is by controlling from the feedback signal of described plasma body or coating performance, and described coating is by described plasma-deposited or removal.