CN101039882A - Method for producing tubes of quartz glass - Google Patents

Method for producing tubes of quartz glass Download PDF

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Publication number
CN101039882A
CN101039882A CNA2005800343496A CN200580034349A CN101039882A CN 101039882 A CN101039882 A CN 101039882A CN A2005800343496 A CNA2005800343496 A CN A2005800343496A CN 200580034349 A CN200580034349 A CN 200580034349A CN 101039882 A CN101039882 A CN 101039882A
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CN
China
Prior art keywords
silk
endoporus
pipe silk
zone
pipe
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Granted
Application number
CNA2005800343496A
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Chinese (zh)
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CN101039882B (en
Inventor
N·西比斯
O·冈茨
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Heraeus Quarzglas GmbH and Co KG
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Heraeus Tenevo GmbH
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Publication of CN101039882A publication Critical patent/CN101039882A/en
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Publication of CN101039882B publication Critical patent/CN101039882B/en
Expired - Fee Related legal-status Critical Current
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B23/00Re-forming shaped glass
    • C03B23/04Re-forming tubes or rods
    • C03B23/047Re-forming tubes or rods by drawing
    • C03B23/0473Re-forming tubes or rods by drawing for forming constrictions
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B23/00Re-forming shaped glass
    • C03B23/04Re-forming tubes or rods
    • C03B23/047Re-forming tubes or rods by drawing
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00Technologies relating to the processing of minerals
    • Y02P40/50Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57Improving the yield, e-g- reduction of reject rates

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)

Abstract

In a known method for producing tubes of quartz glass, a hollow cylinder (2) of quartz glass is continuously supplied to a heating zone (1) and is softened therein in regions, and a tube strand (21) is drawn off at a drawing speed from the softened region with formation of a drawing bulb (26), and the tubes to be produced are cut to length in the form of tube strand pieces by separating the tube strand (21) at a desired separation point (T,Vu, Vo) and an internal pressure differing from the external pressure applied to the outer cladding is maintained in the inner bore (4) of the hollow cylinder (2) in that the inner bore (4) of the tube strand is provided with a flow obstacle. Starting therefrom to indicate a simple method which permits the manufacture of particularly largevolume quartz glass tubes with utmost precision, while observing narrow tolerances, it is suggested according to the invention that the flow obstacle should be configured as a constriction (28, 29) of the inner bore which is produced by softening and plastic deformation of the tube strand in the area of a deformation zone (Vu, Vo).

Description

Be used to produce the method for quartz glass tube
Technical field
The present invention relates to a kind of method that is used to produce quartz glass tube, wherein the quartz glass cylinder sustainable supply of hollow also becomes regionally to soften to the heating zone within it, and from the softening zone of drawing bubble (drawing bulb) with formation with certain drawing speed extraction tube silk, and cut by length by the pipe that will produce with the form of pipe silk part at desirable separation point separator tube silk, wherein because the endoporus of pipe silk is provided with flow obstacle, so in the endoporus of hollow cylinder, kept being different from the internal pressure of the external pressure that is applied to surrounding layer.
Background technology
Quartz glass tube uses with the semifinished or finished goods form at chemical industry, semi-conductor manufacturing, optical field, and is used in particular for making the prefabrication of optical fiber.
DE 195 36 960 A1 have described a kind of method that is used for making with vertical drawing process quartz glass tube.Remaining on quartz glass cylinder on the carrier begins to supply to the annular smelting furnace with graphite heating element and softens to form with interval mode within it and draw bubble from its lower end.Extract quartz glass tube by towing mechanism straight down from drawing bubble.Be used for being incorporated in the endoporus of quartz glass cylinder at the inner pressurized air that produces required blow gas pressure of endoporus.By stress measuring device blow gas pressure is responded to, and be used to control the wall thickness of the quartz glass tube of extraction.
In order to boost productivity, attempt using volume to become big hollow cylinder day by day as the vertical starting material of drawing process with relatively thick and internal diameter.Because internal diameter increases, need set necessary blow gas pressure and guarantee efficient pressure control by bigger gas stream.Yet therefore the gas stream of these increases is considerable cost factor on the one hand, and particularly when using rare gas element, and they cause drawing the interior cooling in bubble zone on the other hand, thereby have obviously weakened pulling process.
In the EP of the method that discloses type mentioned above 0 394 640 B1, the lower open end of suggestion pipe silk should utilize gas, the sealing of liquid or solid connector.This connector reduces gas stream thus as the flow obstacle in the endoporus of pipe silk.As a result, even can under the less relatively situation of the gas stream in the pipe silk endoporus, also can observe predetermined blow gas pressure.
When pipe fitting cuts by length, employed connector will lose its effect in pipe silk end, and must introduce new connector.Even connector is more got in return very fast, also will cause unacceptable variation on pressure change and the geometrical shape.Here it is why in EP0 394640 B1 suggestion should be under water by the length cutting or within it pressure be similar to the reason of carrying out in the pressure tank of blow gas pressure.
Yet the modification of these two kinds of methods all is very complicated aspect structure.In addition, must limit the residence time in this pressure tank for the reason of health, and the feasible difficulty that becomes that enters of necessary gate.
As further embodiment, in EP 0 394 640 B1, advised the outflow obstacle, the sealing connector that will be fastened on the flexible holding tube of the mirror of can looking in the distance from the below is incorporated in the endoporus of extraction tube silk, is used for the desirable separation point that the pipe silk cuts by length is positioned at the below of the layer position of sealing connector.
This method also is complicated, and the introducing of sealing connector and holding tube prove complicated and inwall that may damage the pipe that will produce from separating removing of pipe fitting.
Summary of the invention
Thereby, the purpose of this invention is to provide a kind of permission and make the simple method that large volume quartz glass tube is particularly observed narrow tolerance simultaneously with full accuracy by drawing process.
From the drawing process of the above-mentioned type, because flow obstacle is configured to realize purpose of the present invention by managing the contraction flow region of the softening and endoporus that viscous deformation produces of silk in the scope of distorted area.
In the method for the invention, the contraction flow region of pipe silk endoporus helps to keep internal pressure.Contraction flow region has partly or completely reduced spacious stream (open flow) cross section of endoporus, that is, it can also cause the complete closed of endoporus.
Form contraction flow region by the softening and viscous deformation of pipe silk in the drawing process process.Therefore, can not have to reduce generation under the situation of high structural effect, keep and the needed gas stream of control blow gas pressure through pipe silk endoporus.
At least one such contraction flow region works in pulling process always.In pulling process, directly carry out or drawing process after, in independent method steps, carry out cutting so that obtain desirable length of tube of pipe silk by length.
The contraction flow region of the endoporus of pipe silk is by being used to heat and softening hollow cylinder, being formed on as the heating unit of the heating source that is used to produce distortion and drawing in the bubble simultaneously, perhaps when draw direction was observed, the heating source that contraction flow region separates by use and heating unit was formed on and draws after the bubble.
Preferably, the contraction flow region of endoporus is created in and draws between bubble and the desirable separation point.
At this moment, flow out the endoporus contraction flow region that obstacle is configured to be provided at desirable separation point top.For obtain pipe silk part by the length cutting process in do not weaken or the only not obvious situation that weakens contraction flow region as the effect of flowing out obstacle, desirable separation point position should be selected to make at least one such contraction flow region additionally to be provided at and be drawn between bubble and the separation point.
Many methods are suitable for producing contraction flow region.In simple method modification, produce the endoporus contraction flow region owing in the zone of distorted area, pipe thread softened and be out of shape by instrument.
Under the situation of the processing parameter that does not need to change drawing process, guaranteed the reproducible degree of distortion like this in simple especially mode.In addition, the zone of distorted area can keep very for a short time, has reduced material unaccounted-for (MUF) like this.This method modification is preferred especially under the situation of high internal pressure.In the zone of the distortion that produces by instrument, form mechanical stress easily, the pipe silk that this stress is convenient in this zone separates.The distortion that produces exists with for example extruding form.
As alternatives or replenish, verified since in the zone in the distorted area pipe silk soften and pipe silk part in the both sides, distorted area between the effect that relatively moves under be useful when pipe thread is out of shape generation endoporus contraction flow region.
In the modification of the method according to this invention, because when on draw direction, observing, pipe silk part relative deformation district to softening regional downstream extension moves, and produces the reactive force that is used to form contraction flow region, the described mobile pipe deformation of filament that causes the endoporus contraction flow region that produced.The advantage of this method is to be out of shape the instrument of appearing at hottest point very difficult to get access usually, for example because it is surrounded by heating unit.
To the pipe silk part of softening regional downstream extension corresponding for example move with distortion, upset (upsetting), the short period of time is elongated fast and/or the bending operation form exists.
Thereby, relatively moving under simple scenario comprises the rotation of downstream tube silk part around pipe silk longitudinal center line, on the direction of pipe silk longitudinal center line with less than or extract downstream tube silk part greater than the speed short period of time of draw rate, and/or the downstream tube silk part bending (folding) of the longitudinal center line of pipe silk relatively.
The fully softening of quartz-glass tube strand needs some times, and this depends on the possible residual heat by the energy of heating source input and pipe silk.In this respect, verified when owing to keep the heat effect on the zone of heating source in the distorted area when just predetermined mobile route is transmitting in the draw direction upper edge and be favourable when the pipe silk softened at heating source.
At this moment, the heat effect of heating source is gone up in prospective region (just managing the distorted area that silk moves with draw rate) and is assembled particular time interval.Make heating source or its heat effect follow the distorted area, follow and move and to move with the speed of heating source with the distorted area, perhaps make mobile distorted area add thermal-flame or heating bundle (laser) is followed, perhaps the single heating of heating source activates continuously, and each mode when anterior layer position (position) that is in the distorted area respectively exists.
Also realization small deformation district under the situation of thick-walled quartz glass tubes is moved in following of this heating source or heat effect.
Verified particularly useful when making heating source on draw direction and with draw rate, follow the distorted area.
It is simple especially that the modification of this method proves, and wherein upward realizes following mobile by heating source being fixed to the pipe silk.
The heating source that is fixed on the pipe silk is mobile and synchronous with the distorted area under the situation that does not need independent transport unit automatically with draw rate.For example, heating source is fixed by being clamped on the pipe silk.To any effect of drawing process and avoid additional load, advantageously carry out balance for fear of heating source to acting on the weight that draws the heating source on the bubble to towing mechanism.
Advantageously, the formation of endoporus contraction flow region is attended by so that desirable separation point arrives the interior mode in the zone of distorted area and cuts by length managing silk.
Because the viscous deformation by pipe silk produces contraction flow region and because the viscous deformation zone means the waste of material usually, desirable separation point is preferably placed in the described zone.At this moment, pressure-controlling and pipe fitting are preferably realized single job from the formation that the pipe silk separates required endoporus contraction flow region.Thereby cutting by the fusing pipe fitting by length of pipe silk finished.
In this technology, desirable separation point in the zone of distorted area, make its can easy removal the end of separator tube produce distortion.On the other hand, the free end of remaining pipe silk also comprises the contraction flow region endoporus that produces owing to the separation in the distorted area in pulling process, and it is also as the outflow obstacle in the meaning of the present invention.
If the upstream of corresponding separation point still provides the endoporus contraction flow region that is suitable for as flowing out obstacle, present method is not got rid of cutting by length of additional pipe silk by the pure mechanical means that for example fractures or cut so.On the contrary, because each distorted area means material unaccounted-for (MUF), it is as far as possible little that its quantity keeps, make when on draw direction, observing, after the endoporus contraction flow region, provide preferred at least one, especially preferably several desirable separation points are carried out cutting by length of pipe silk by mechanical means at described separation point.
Description of drawings
The present invention is explained in detail that accompanying drawing is an indicative icon as unique accompanying drawing now with reference to embodiment and accompanying drawing.
Fig. 1 is the synoptic diagram that is used to carry out the equipment of method of the present invention.
Embodiment
Comprise the smelting furnace of vertical configuration according to the drawing device of Fig. 1, this smelting furnace can be heated to the temperature more than 2300 ℃, and comprises ring resistance heating unit 1, gas supply system and towing mechanism 22.
In pulling process, the hollow cylinder 2 of synthetic quartz glass (shade demonstration) with vertically-oriented longitudinal center line 3 is from the top sustainable supply to heating unit 1, and heat with interval mode betwixt, and steep 26 softening regional extraction tube silk from drawing with formation.
Hollow cylinder 2 and pipe silk 21 have joint inner bore 4.Described hole is opened downwards and is upwards sealed by connector 5.Purge gas circuit 6 is charged into endoporus 4 through connector 5, and purge gas is supplied with by the processing vessel 7 with mixed gas of being made up of oxygen and nitrogen.Processing vessel 7 is through being connected to mixing vessel 10 by the mixed gas line 8 that trip valve 15 cuts out.Nitrogen line 11 and oxygen line 12 terminate in the mixing vessel 10.Nitrogen line 11 and oxygen line 12 are respectively equipped with under meter and control device 15.Direction arrow 23 mark nitrogen gas stream, and direction arrow 24 mark Oxygen Flow.
The processing vessel 7 that is connected to vacuum pump 14 through by-pass valve control 13 is used to cushion pressure change possible in the mixed gas line.For compensatory pressure changes, processing vessel 7 also is provided with the bypass valve 25 that can open and close.Under open mode, the portion gas continuous flow goes out processing vessel 7 so that intervened or the flip-flop of the flow state that other reason causes only produces some effects to the pressure changes in the processing vessel 7 by control.
In pulling process, the mixed gas flow of forming by the oxygen of pure nitrogen gas and purity level 2.6 (99.96%) (23; 24) be incorporated into endoporus 4 from the top through purge gas circuit 6.Owing to, in mixing vessel 10, produced mixed gas flow (23 by this container 10 being carried out feed through the nitrogen of the purity level 4.0 (99.99%) of nitrogen line 11 and through the oxygen of oxygen line 12; 25).The delivery rate of nitrogen and oxygen is set at and makes and form the mixed gas flow of being made up of the oxygen of 80% nitrogen and 20% (23 in the whole drawing stage; 24).
The typical process of method of the present invention is described in more detail now with reference to Fig. 1:
Hollow cylinder 2 has the outside diameter of 150mm and the wall thickness of 50mm.Heating unit 1 be heated to about 2300 ℃ temperature required after, hollow cylinder 2 is descended with the lowering speed of 18mm/min by lower end 19, and with the speed of 1800mm/min remollescent end 19 in heating unit 1 to be extracted so that obtain internal diameter by towing mechanism 22 be 6mm and outside diameter is the pipe silk 21 of 8mm.
The mixed gas of above composition with oxygen of 80% nitrogen and 20% supplies to endoporus 4 through purge gas circuit 6.By under meter and control device 15 with the flow rate regulation of nitrogen gas stream 23 to about 100m 3/ l, and Oxygen Flow 24 is adjusted to about 24m 3/ h.In endoporus 4, obtain the substantially invariable overvoltage (blow gas pressure) of 1.5mbar.Blow gas pressure is carried out test constantly, and the flow velocity of nitrogen gas stream 23 is adjusted accordingly (pressure controlled manipulated variable).Mixed gas flow (23; 24) be used for size (outside diameter, internal diameter, wall thickness) simultaneously,, regulate mixed gas flow (23 with the mixing rate of approximately constant by control unit so that under the situation that size changes with manipulated variable form control extraction tube silk 21; 24) amount.
In pulling process, bypass valve 25 is opened, and makes partially mixed gas stream (23; 24) flow to the endoporus 4 that the outside does not enter Glass tubing 21 through valve.Cushion the pressure change in the endoporus 4 in this way.This situation can also be by method support of the present invention in greater detail now.
In order to reduce mixed gas flow (23; 24) through the flow velocity of endoporus 4 and thereby prevent to draw the undercooling of bubble 26, the endoporus 4 of extraction tube silk 21 is provided with contraction flow region 28,29.Contraction flow region 28,29 produces below the plane of towing mechanism by the viscous deformation of pipe silk 21.
In the present embodiment, the contraction flow region 29 of endoporus 4 is present in the deformation plane V of the end of pipe silk 21 uIn.For at deformation plane V uThe top produces other contraction flow region 28, the water-cooled heating carrier ring 30 that is equipped with eight oxy-hydrogen burners 31 that distribute on its periphery is clamped on the pipe silk 21, the flame 32 of oxy-hydrogen burner 31 directs on the outer covering layer joint circumferential line on every side of pipe silk 21, and this line is positioned at the clamping point below of heating carrier ring 30 and is appointed as " V in Fig. 1 o".By dotted line " V o" maximum value of the viscous deformation that shows is positioned at the zone of this circumferential line.Distortion produces the contraction flow region of the endoporus 4 of several cm lengths.Because by 31 couples of circumferential line " V of oxy-hydrogen burner o" on every side zone heating is long has produced distortion to making time that it can be plastically deformed.Thereby required time depends on the energy by oxy-hydrogen burner 31 inputs at interval, also depends on the wall thickness of pipe silk 21, and is about 30 seconds in the present embodiment.In this timed interval, deliver heating carrier ring 30 together with the pipe silk 21 that moves down.In case obtained enough viscous deformation,, caused forming the contraction flow region 28 of endoporus 4 by rotating half-turns and the lower end 19 of twisted tube silk 21 around longitudinal center line 3.
The weight of heating carrier ring 30 and the oxy-hydrogen burner 31 that is mounted thereon is carried out balance by supplementary unit (not shown).
Pipe silk 21 is cut by length, make contraction flow region 28,29 work in the mode that reduces flow all the time.For this reason, there are some preferred operation mode, hereinafter will be described in more detail.
Since lower end 19 extract downwards simultaneously add softening and distortion and thereby from 21 fusing of pipe silk, in single job, pipe silk 21 is cut by length, form contraction flow region 28 simultaneously.As what schematically show by the Reference numeral among Fig. 1 29, this melting process is to manage the contraction flow region that silk 21 lower end produces similar endoporus 4 freely at this moment.Repeat to form the process of contraction flow region and fusing to carrying out isolating each pipe fitting.Even guarantee just to cut off pipe fitting thus, endoporus 4 also comprises contraction flow region 28,29.Avoided pressure change thus.
As alternatives, as described above, produce the contraction flow region 28 of endoporus 4, but do not fuse corresponding pipe fitting 19 by viscous deformation.Under this situation, some pipe fittings are below contraction flow region 28 and at deformation plane " V o" and " V u" between regional inherent desirable separation point " T " separate from following pipe fitting 29.For this reason, at first in the zone of desirable separation point " T ", produce predetermined breaking point, and knock out pipe fitting at predetermined breaking point by hammer by delineation.The previous contraction flow region 28 that produces prevents that purge gas from flowing out endoporus 4 and having avoided pressure gap locating at desirable separation point " T " to separate in the process of pipe fitting.In further pulling process, desirable separation point " T " is formed on deformation plane V sooner or later oThe zone in, make the needs shown in Figure 1 operation stage of generation contraction flow region in the zone on pipe silk 21 again that arrives soon after.
Deformation plane " V o" and " V u" between the zone of separation point " T " in pipe silk 21 can also be at pipe silk 21 at deformation plane " V o" the zone in after separating in independent method steps, separate.
The pipe fitting that cuts by length is used for the intermediates as the prefabrication that is used to make optical fiber.These are for example to be used for SiO in MCVD or PCVD technology 2The so-called substrate tube of the inside deposition of layer.Substrate tube be typically provided with the outside diameter of about 50mm and from 2mm to the 4mm scope in wall thickness.Yet the method according to this invention is specially adapted to produce the quartz glass tube that internal diameter increases, as for example being used as covering or being used for prefabrication or the intervalve of fiber products.When wall thickness was 10mm, typical outer diameters was of a size of 80mm.

Claims (13)

1. method that is used to produce quartz glass tube, wherein (1) also becomes regionally to soften the hollow cylinder of silica glass (2) sustainable supply therein to the heating zone, and from the softening zone of drawing bubble (26) with formation with certain draw rate extraction tube silk (21), and pass through at desirable separation point (T, V u, V o) separate described pipe silk (21) and with the form of pipe silk part pipe to be produced is cut by length, wherein because the endoporus (4) of described pipe silk (21) is provided with flow obstacle, in the endoporus (4) of described hollow cylinder (2), keep being different from the internal pressure of the external pressure that is applied to surrounding layer, it is characterized in that: described flow obstacle is configured to the contraction flow region (28 of described endoporus (4), 29), it passes through described pipe silk (21) at distorted area (V u, V o) the zone in softening and viscous deformation and produce.
2. method according to claim 1 is characterized in that: the contraction flow region of described endoporus (28) steeps (26) and described desirable separation point (T, V in described drawing u) between produce.
3. method according to claim 1 and 2 is characterized in that: because described pipe silk (21) is at described distorted area (V u, V o) the zone in softening and by tool variations, and produce the described contraction flow region (28,29) of described endoporus (4).
4. method according to claim 1 and 2 is characterized in that: because described pipe silk (21) is at described distorted area (V u, V o) the zone in softening and at described distorted area (V u, V o) the pipe silk part of both sides between the effect that relatively moves distortion down, and produce the contraction flow region (28,29) of described endoporus (4).
5. method according to claim 4 is characterized in that: described relatively moving comprises that the longitudinal center line (3) around described pipe silk rotates downstream tube silk part (19).
6. according to claim 4 or 5 described methods, it is characterized in that: on the direction of the described longitudinal center line (3) that is included in described pipe silk of relatively moving with less than or extract described downstream tube silk part (19) greater than the speed of described draw rate.
7. according to any described method in the claim 4 to 6, it is characterized in that: the described crooked described downstream tube silk part of longitudinal center line (3) (19) that relatively moves and comprise described relatively pipe silk.
8. any described method in requiring according to aforesaid right is characterized in that: owing to just keep heating source (30,31,32) at described distorted area (V when the predetermined mobile route in draw direction upper edge transmits at heating source (30,31,32) u, V o) the zone in heat effect and described pipe silk (21) is softened.
9. method according to claim 8 is characterized in that: make described distorted area (V u, V o) described heating source (30,31,32) on described draw direction and with described draw rate, follow.
10. method according to claim 9 is characterized in that: by described heating source (30,31,32) is fixed to described pipe silk (21) go up to carry out described follow mobile.
11. method according to claim 10 is characterized in that: described heating source (30,31,32) is at described distorted area (V u, V o) upper fixed is to the described pipe silk (21).
12. any described method in requiring according to aforesaid right is characterized in that: the formation of the described contraction flow region (28,29) of described endoporus (4) be attended by described pipe silk (21) by the length cutting, make described desirable separation point (T, V u, V o) at described distorted area (V u, V c) the zone in.
13. according to any described method in the aforesaid right requirement, it is characterized in that: when observing on described draw direction, the contraction flow region (28,29) in described endoporus (4) provides at least one afterwards, preferred a plurality of desirable separation point (T, V u, V o), carry out cutting of described pipe silk (21) by mechanical means at described desirable separation point by length.
CN2005800343496A 2004-10-15 2005-09-22 Method for producing tubes of quartz glass Expired - Fee Related CN101039882B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102004050515A DE102004050515B4 (en) 2004-10-15 2004-10-15 Method for producing tubes of quartz glass
DE102004050515.2 2004-10-15
PCT/EP2005/010236 WO2006039986A1 (en) 2004-10-15 2005-09-22 Method for producing tubes of quartz glass

Publications (2)

Publication Number Publication Date
CN101039882A true CN101039882A (en) 2007-09-19
CN101039882B CN101039882B (en) 2012-03-21

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US (1) US7797965B2 (en)
JP (1) JP4918492B2 (en)
CN (1) CN101039882B (en)
DE (1) DE102004050515B4 (en)
WO (1) WO2006039986A1 (en)

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WO2002098808A1 (en) 2001-05-31 2002-12-12 Corning Incorporated Method of low pmd optical fiber manufacture

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102583999A (en) * 2012-02-17 2012-07-18 武汉鑫友泰光电科技有限公司 Method for preparing hollow quartz fibers
CN102583999B (en) * 2012-02-17 2015-09-09 武汉鑫友泰光电科技有限公司 The preparation method of hollow quartz fibers
CN104203522A (en) * 2012-03-30 2014-12-10 赫罗伊斯石英玻璃股份有限两合公司 Method for producing a fused-quartz hollow cylinder
CN104203522B (en) * 2012-03-30 2015-12-09 赫罗伊斯石英玻璃股份有限两合公司 For the manufacture of the method for quartz-glass hollow cylinder
CN111995231A (en) * 2020-09-03 2020-11-27 江苏亨通光纤科技有限公司 Drawing equipment and method for deep fluorine-doped capillary tube for beam combiner

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US7797965B2 (en) 2010-09-21
CN101039882B (en) 2012-03-21
DE102004050515B4 (en) 2007-08-02
JP4918492B2 (en) 2012-04-18
JP2008516875A (en) 2008-05-22
WO2006039986A1 (en) 2006-04-20
DE102004050515A1 (en) 2006-04-20

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