CN101038856A - 半导体晶片的封闭式红外线加热装置 - Google Patents
半导体晶片的封闭式红外线加热装置 Download PDFInfo
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- CN101038856A CN101038856A CNA2006100313694A CN200610031369A CN101038856A CN 101038856 A CN101038856 A CN 101038856A CN A2006100313694 A CNA2006100313694 A CN A2006100313694A CN 200610031369 A CN200610031369 A CN 200610031369A CN 101038856 A CN101038856 A CN 101038856A
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CNB2006100313694A CN100428404C (zh) | 2006-03-17 | 2006-03-17 | 半导体晶片的封闭式红外线加热装置 |
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CNB2006100313694A CN100428404C (zh) | 2006-03-17 | 2006-03-17 | 半导体晶片的封闭式红外线加热装置 |
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CN101038856A true CN101038856A (zh) | 2007-09-19 |
CN100428404C CN100428404C (zh) | 2008-10-22 |
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CNB2006100313694A Expired - Fee Related CN100428404C (zh) | 2006-03-17 | 2006-03-17 | 半导体晶片的封闭式红外线加热装置 |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103076822A (zh) * | 2012-12-27 | 2013-05-01 | 烟台睿创微纳技术有限公司 | 调节真空设备中待制器件温度的控制方法及其实现装置 |
CN105158873A (zh) * | 2015-08-31 | 2015-12-16 | 武汉宇虹环保产业发展有限公司 | 一种高温密封反射镜装置 |
CN105551922A (zh) * | 2015-12-11 | 2016-05-04 | 中国电子科技集团公司第四十八研究所 | 一种SiC高温高能铝离子注入机 |
CN107046081A (zh) * | 2017-03-07 | 2017-08-15 | 东莞市科隆威自动化设备有限公司 | 一种抗光衰炉 |
CN112738928A (zh) * | 2020-12-04 | 2021-04-30 | 上海航天精密机械研究所 | 一种通用型组合冷却式模块化辐射加热器 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN88211587U (zh) * | 1988-04-01 | 1988-12-28 | 上海市交通大学 | 半导体密封磁力传动快速退火装置 |
US5194401A (en) * | 1989-04-18 | 1993-03-16 | Applied Materials, Inc. | Thermally processing semiconductor wafers at non-ambient pressures |
US5345534A (en) * | 1993-03-29 | 1994-09-06 | Texas Instruments Incorporated | Semiconductor wafer heater with infrared lamp module with light blocking means |
JPH0786271A (ja) * | 1993-09-17 | 1995-03-31 | Fujitsu Ltd | シリコン酸化膜の作製方法 |
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2006
- 2006-03-17 CN CNB2006100313694A patent/CN100428404C/zh not_active Expired - Fee Related
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103076822A (zh) * | 2012-12-27 | 2013-05-01 | 烟台睿创微纳技术有限公司 | 调节真空设备中待制器件温度的控制方法及其实现装置 |
CN103076822B (zh) * | 2012-12-27 | 2015-09-09 | 烟台睿创微纳技术有限公司 | 调节真空设备中待制器件温度的控制方法及其实现装置 |
CN105158873A (zh) * | 2015-08-31 | 2015-12-16 | 武汉宇虹环保产业发展有限公司 | 一种高温密封反射镜装置 |
CN105551922A (zh) * | 2015-12-11 | 2016-05-04 | 中国电子科技集团公司第四十八研究所 | 一种SiC高温高能铝离子注入机 |
CN105551922B (zh) * | 2015-12-11 | 2018-07-24 | 中国电子科技集团公司第四十八研究所 | 一种SiC高温高能铝离子注入机 |
CN107046081A (zh) * | 2017-03-07 | 2017-08-15 | 东莞市科隆威自动化设备有限公司 | 一种抗光衰炉 |
CN112738928A (zh) * | 2020-12-04 | 2021-04-30 | 上海航天精密机械研究所 | 一种通用型组合冷却式模块化辐射加热器 |
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Publication number | Publication date |
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CN100428404C (zh) | 2008-10-22 |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Hunan Hongtaiyang New Energy Science and Technology Co., Ltd. Assignor: No.48 Inst. China Electronics Tech Group Contract fulfillment period: 2009.9.16 to 2019.9.15 Contract record no.: 2009430000163 Denomination of invention: Enclosed infrared heating device for semiconductor chip Granted publication date: 20081022 License type: Exclusive license Record date: 20091027 |
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LIC | Patent licence contract for exploitation submitted for record |
Free format text: EXCLUSIVE LICENSE; TIME LIMIT OF IMPLEMENTING CONTACT: 2009.9.16 TO 2019.9.15; CHANGE OF CONTRACT Name of requester: HUNAN HONGTAIYANG NEW ENERGY SCIENCE AND TECHNOLOG Effective date: 20091027 |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20081022 Termination date: 20180317 |
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CF01 | Termination of patent right due to non-payment of annual fee |