CN101025376A - Method for making amber cavity and apparatus by optical fiber method - Google Patents
Method for making amber cavity and apparatus by optical fiber method Download PDFInfo
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- CN101025376A CN101025376A CN 200710010715 CN200710010715A CN101025376A CN 101025376 A CN101025376 A CN 101025376A CN 200710010715 CN200710010715 CN 200710010715 CN 200710010715 A CN200710010715 A CN 200710010715A CN 101025376 A CN101025376 A CN 101025376A
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- optical fiber
- quartz capillary
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Abstract
The invention relates to a non-intrinsic fiber - Perot cavity production methods and devices, it belongs to fiber sensing technology .Its feature is that using the divide amplitude method to produce three equal intensity of CO2 laser beam, using reflecting mirror group to form the inter-120 degree intersecting beams in the plane, the intersection angle of three light beam can do fine adjustment to ensure that three beam intensity is balance. Each of the three light beams use cylindrical lens focus , made quartz capillary and fiber produce about 120 microns uniform circular welding in the fusion location. The use of laser pulse frequency is 20-24 KHz, through adjusting laser pulse parameters to control laser energy that exposure to quartz capillary. The effectiveness and benefits of the invention is the whole quartz structure of the non- Intrinsic fiber-Perot cavity fusion width and stress is uniform in the angle, bending small, reliable sealing. As the temperature / pressure sensor applications, it found minimal hysteretic error, it can achieve high measurement precision, and it has important value in the temperature, pressure and strain measurement of the harsh environment.
Description
Technical field
The invention belongs to technical field of optical fiber sensing.Relate to the manufacturing technology of optical Fiber Method-Po cavity sensor, specially refer to the method for making and the device of a kind of extrinsic type optical Fiber Method-Po cavity sensor.
Background technology
Fabry-Perot interferometer (Fabry-Perot Interferometer) is called for short the Fabry-perot interferometer instrument, is called Fabry-Perot cavity again, and its basic structure is the optical reflection plane parallel to each other of two precisions.Two planes of reflection of optical Fiber Method-Po cavity sensor refer to the interface of two refractive index sudden changes that form in optical fiber.Two planes of reflection of extrinsic type optical Fiber Method-Po cavity sensor are perpendicular to two optical fiber planar end surfaces of shaft axis of optic fibre, the quartz capillary that two optical fiber planar end surfaces penetrate one section internal diameter and optical fiber external diameter coupling in opposite directions just can guarantee that two optical fiber planar end surfaces are parallel to each other, has just constituted extrinsic type optical fiber Fabry-Perot cavity by the air-gap between optical fiber planar end surface and the planar end surface.This optical Fiber Method-Po cavity sensor simple in structure becomes one of Fibre Optical Sensor of superior performance and tool application prospect in recent ten years gradually.Utilize the long physical quantity sensitivity to external world in chamber of optical Fiber Method-Po cavity sensor, and can access the characteristics of its chamber long value by its reflectance spectrum signal exact solution, optical Fiber Method-Po cavity sensor can be used for measuring multiple physical quantitys such as temperature, pressure, strain, and be widely used in temperature/pressure measurement under the oil well, described in document " Fiber Optic Pressure and TemperatureSensors for Oil Down Hole Application "; The heavy construction monitoring structural health conditions is described in document " New generation of F abry-Perot fiber optic sensors for monitoring of structures "; The health monitoring of large-scale power facility described in document " Fiber Fabry-Perot sensors for detectionof partial discharges in power transformers ", waits the field.
The method for making of extrinsic type optical Fiber Method-Po cavity sensor is meant that mainly two optical fiber that penetrate quartz capillary are with the fixing means between the quartz capillary.That generally adopts at present mainly contains two kinds of methods: a kind of is to be adhesively fixed with epoxide-resin glue, and another kind is to adopt high frequency CO
2The pulse laser fusion is fixed.What use in the document " Extrinsic Fabry-Perot Interferometer System Using Wavelength ModulatedSource " is extrinsic type optical Fiber Method-Po cavity sensor that epoxide-resin glue is adhesively fixed, and the performance of this optical Fiber Method-Po cavity sensor depends primarily on the performance of employed epoxide-resin glue.Therefore, there is non-refractory in the optical Fiber Method-Po cavity sensor that is adhesively fixed with epoxide-resin glue, has creep under the high pressure, and problems such as the temperature, pressure cross-sensitivity is poor, physical strength and poor heat stability are not suitable under abominable measurement environment and are using.High frequency CO
2The fixing method of pulse laser fusion is divided into two kinds again--one-sided CO
2Method that the laser radiation thermal welding is fixing and employing 120 degree catoptrons compensation CO
2The method that the LASER HEAT welding is fixing.The one-sided high frequency CO of mentioning in the document " research of fiber F-P interferometer sensor method for packing " of employing
2The fixing method of pulsed laser irradiation thermal welding can not guarantee that quartz capillary and optical fiber seal fully, and has welding solder joint place angle stress, and the solder joint width angle is to skewness, and sensor easily produces little problem such as bend at the solder joint place; The employing 120 degree catoptron compensation high frequency CO of mentioning in document " Self-Calibrated Interferometric/Intensity Based Fiber Optic Pressure Sensors " and the patent " a kind of method for making of long period fiber grating "
2The method that the LASER HEAT welding is fixing, the three-beam illuminating method that belongs to a kind of minute wave front, exist welding point of fixity angle stress distribution, solder joint width angle to skewness, occur bigger problems such as lag error when the optical fiber Fabry-Perot cavity of making is used as the temperature/pressure sensing easily.The invention provides a kind of light path can meticulously be adjusted, the quartz capillary-fiber fuse of three beams equal strength high frequency CO 2 pulse laser line focuss is fixing method and device, improved the sensing capabilities of extrinsic type optical Fiber Method-Po cavity sensor, measuring accuracy, sealing reliability and make efficiency.
Summary of the invention
The objective of the invention is, a kind of balanced and high frequency CO that can independent meticulous adjusting of three beam intensities of utilizing is provided
2The pulse laser beam line focus is made the method and the device of extrinsic type optical Fiber Method-Po cavity sensor.
Technical scheme of the present invention is to utilize the CO of quartz material strong absorption 10.6 μ m
2The character of laser emission is with the high frequency CO of line focus
2Pulse laser beam fixes quartz capillary and two sections permanent weldings of optical fiber of inserting in the quartz capillary from being in three direction symmetries, equicohesive irradiation quartz capillary-optical fiber at 120 degree angles, forms extrinsic type optical Fiber Method-Po cavity configuration.It is that 10.6 μ m, frequency are the high frequency CO of 20k～24kHz that the present invention adopts wavelength
2Pulse laser by two part transmission light splitting pieces, promptly adopts divide amplitude with a branch of high frequency CO
2Pulse laser is divided into the three beams high frequency CO that intensity equates
2Pulse laser, and by reflector group reflect to form intersect on quartz capillary-shaft axis of optic fibre be mutually 120 the degree angles the three beams high frequency CO
2Pulse laser, this three beams CO
2Pulse laser finally forms wire by a cylindrical lens separately again and focuses on the vertical fiber axis direction.Even at angle stress, width for the ring-type fusion point of fixity that guarantees laser radiation quartz capillary-optical fiber formation, the angle of cut of three-beam and the distribution on quartz capillary-shaft axis of optic fibre can be done meticulous adjustment by the bidimensional adjustment rack of catoptron.Device of the present invention mainly comprises computer-controlled high frequency CO
2Pulsed laser, the three beams Focused Optical system, videomicroscopy and operating system thereof, wide spectrum light source and spectroanalysis instrument, as shown in Figure 1.The CO that the present invention uses
2Laser pulse frequency is 20-24kHz, regulates CO by laser controller
2The frequency of laser pulse, dutycycle and the number of at every turn launching laser pulse can be controlled the laser energy that shines on quartz capillary-optical fiber accurately.Has only accurate control CO
2The laser radiation energy, and evenly could between quartz capillary and optical fiber, form the welding of angle uniform circular at angle, could guarantee the high pressure resistant sealing of optical fiber Fabry-Perot cavity, just can make the angle stress of welding point even, it is little curved to guarantee that the optical fiber Fabry-Perot cavity can not produce at the solder joint place, and the interference spectrum loss of signal that sensor returns is little.Optical fiber in the manufacturing process of extrinsic type optical fiber Fabry-Perot cavity and quartz capillary intert, the monitoring of the width of the definite and ring-type welding point of fixity of posetionof weld and homogeneity etc. is all observed by videomicroscopy, also to pass through the wave form varies of wide spectrum light source-real-time monitoring sensor interference signal of spectrometer demodulating system in the laser welding process, optical power loss changes, and the variation of interfering contrast.
Effect of the present invention and benefit are to adopt the method for dividing amplitude with a branch of high frequency CO
2Pulse laser is divided into three bundle of pulsed laser of three beam intensity equalizations with partially reflecting mirror, three bundle of pulsed laser are mutually the 120 degree angles of cut and can independently carry out meticulous adjustment, the symmetry, be radiated on quartz capillary-optical fiber equably, make the width and the stress of extrinsic type optical Fiber Method-Po cavity sensor fusion seal point of full quartz construction even in angular distribution, the flexural deformation at solder joint place is little, and sealing is reliable.Show minimum lag error during as the temperature and pressure sensor application, thereby can reach high measuring accuracy, have important application value.
Description of drawings
Fig. 1 is the device synoptic diagram that the divide amplitude three beams of laser is made extrinsic type optical fiber Fabry-Perot cavity.
Among the figure: the 1st, be used to control CO
2The microcomputer of laser instrument; 2 high-frequency impulse CO
2Laser instrument; 3He-Ne laser instrument pilot light; 4CO
2Laser beam; The adjustable quartz capillary clamper of 5 five dimensions; 6 laser beam splitters, focusing system pedestal; The 7CCD videomicroscopy; 8 optical fiber Fabry-Perot cavity quartz capillaries; 9 five dimension adjustable optic fibre clampers; 10 optical fiber; 11 wide spectrum light sources; 12 spectroanalysis instruments.
Fig. 2 is the index path of laser beam splitter, focusing system.
Among the figure: 13 gold-plated completely reflecting mirrors 1.; The 14ZnSe cylindrical lens 1.; 15 gold-plated completely reflecting mirrors 2.; 1632% reflection beam splitter; 17 incident CO
2Laser beam; The 18ZnSe cylindrical lens 2.; The 19ZnSe cylindrical lens 3.; 20 gold-plated completely reflecting mirrors 3.; 2150% reflection beam splitter; 22 gold-plated completely reflecting mirrors 4.; Wherein 3 ZnSe cylindrical lens focal lengths are 30mm, and 4 catoptrons all can the fine adjusting of bidimensional.Full reflection mirror, lens and beam splitting mirror holder all are fixed in the beam split, focusing system pedestal of Fig. 1-6.
Fig. 3 is the reflectance spectrum that utilizes the extrinsic type optical fiber Fabry-Perot cavity that present technique completes, and it is 95 microns that the chamber of Fabry-Perot cavity is about, and welding point of fixity spacing is about 4 millimeters.
Fig. 4 utilizes this optical Fiber Method-Po cavity sensor to measure the calibration curve of liquid pressure, and as seen this Fabry-Perot cavity pressure that can tolerate surpasses 30Mpa, and back and forth the maximum lag error during lifting pressure is less than 0.02%.
Embodiment
Describe most preferred embodiment of the present invention in detail below in conjunction with technical scheme and accompanying drawing.
At first regulate the five times regualting frame 5 of grip optical fiber, make quartz capillary be in the three beams high frequency CO
2On the intersection point of pulse laser.Utilize He-Ne laser instrument pilot light 3 adjustment CO among Fig. 1
2Laser optical path guarantees three beams CO
2The angle of cut of pulse laser is 120 degree, makes three beams CO
2Same point on the axis of pulse laser through intersecting at quartz capillary 8 after the cylindrical lens focus.Regulate the five times regualting frame 9 of grip optical fiber, monitor by videomicroscopy 7 optical fiber 10 is penetrated quartz capillary 8,, determine the position of welding point on quartz capillary 8 along the five times regualting frame 5 of quartz capillary axis direction adjusting clamping quartz capillary 8.Set CO by microcomputer 1 then
2The running parameter of laser instrument 2 is such as frequency of operation, dutycycle and laser pulse number etc.The CO that the present invention adopts
2Laser pulse frequency is regulated the frequency of laser pulse and the quantity of dutycycle and laser pulse between 20k-24kHz, can change the laser energy that shines on the quartz capillary 8.The laser radiation energy is to determine according to the material of the wall thickness of making the employed quartz capillary of optical fiber Fabry-Perot cavity and optical fiber.The laser radiation energy shortage can make welding put incomplete welding, can not seal and bear high pressure, laser energy is crossed conference and is caused the welding width excessive excessive with the fiber-optic signal loss, need before the welding optical fiber 10 is connected with spectrometer 12 with wide spectrum light source 11, pass through spectrometer 12 monitoring fiber reflected light or interference signal amplitude in the fusion process.Usually desirable welding width is about 120 microns.After one end of quartz capillary 8 and optical fiber 10 weldings were fixing, this section optical fiber in the optical fiber 10 that fractures from quartz capillary 8 ends, quartz capillary was as the mirror based fiber optica of extrinsic type optical fiber Fabry-Perot cavity.With the quartz capillary reverses its direction, again signal optical fibre is penetrated the other end of quartz capillary then, determine posetionof weld and carry out welding, promptly finished the making of an extrinsic type optical fiber Fabry-Perot cavity with above-mentioned same method.If the light intensity of three-beam is unbalanced, welding point is inhomogeneous, can finely tune among Fig. 2 catoptron 1.～4., the more weak position of light beam compensated or laser energy a branch of light bigger than normal is done skew make the balancing energy of three-beam, guarantee the even of welding point.
Claims (4)
1. the method for making of an optical fiber Fabry-Perot cavity and device, the method are to adopt the method for dividing amplitude with a branch of high frequency CO
2Pulse laser is divided into the method for making of the fixing extrinsic optical Fiber Method of the laser symmetry fusion-Po cavity sensor of three beam intensity equalizations, and the step that realizes this method is at first with high frequency CO
2Pulse laser beam (4) is divided into the laser beam of three beam intensity equalizations through two partial reflection light splitting pieces (16), (21), constitute the intersection light path that three beams is mutually 120 degree angles via completely reflecting mirror (13), (15), (20) turnover then, the quartz capillary (8) that is used to make the optical fiber Fabry-Perot cavity is positioned at the joint of light path, three-beam is in that to shine quartz capillary (8) preceding, each is respectively through a cylindrical lens (14), (18), (19), make light beam form line style focal beam spot, line style hot spot and quartz capillary (8) axis normal at the focus place; The sheet beam that three beams focuses on makes quartz capillary (8) and optical fiber (10) form even welding from being mutually 120 three direction symmetrical illumination spending angles to quartz capillary (8); Adopt said method, on the optical fiber Fabry-Perot cavity that quartz capillary-mirror based fiber optica-incident optical constitutes,, promptly finish the making of an extrinsic optical fiber Fabry-Perot cavity through twice welding; It is characterized in that adopting divide amplitude to produce the laser beam of three beam intensity equalizations, and adopt cylindrical lens focus, to be mutually the 120 direction symmetrical illumination of spending, fusion fixedly quartz capillary (8) and optical fiber (10).
2. the method for making of a kind of optical fiber Fabry-Perot cavity according to claim 1 and device is characterized in that (promptly dividing amplitude) beam of laser being divided into by two partial reflection light splitting pieces (16), (21) laser beam of three beam intensity equalizations.
3. the method for making of a kind of optical fiber Fabry-Perot cavity according to claim 1 and device, it is characterized in that three-beam is respectively via completely reflecting mirror (13), (15), (20) turnover, constitute the symmetrical illumination light path that is mutually 120 degree and intersects at quartz capillary (8), and the angle of cut of three-beam can be finely tuned by reflector mount, and the angle uniformity coefficient of irradiation energy is done fine adjustment.
4. the method for making of a kind of optical fiber Fabry-Perot cavity according to claim 1 and device is characterized in that adopting cylindrical lens (14), (18), (19) to carry out line focus respectively to three beams of laser.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200710010715 CN101025376A (en) | 2007-03-22 | 2007-03-22 | Method for making amber cavity and apparatus by optical fiber method |
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| CN 200710010715 CN101025376A (en) | 2007-03-22 | 2007-03-22 | Method for making amber cavity and apparatus by optical fiber method |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101900576A (en) * | 2010-07-08 | 2010-12-01 | 北京交通大学 | Method for manufacturing fiber bragg grating Fabry-Perot sensor |
| CN103644925A (en) * | 2013-12-07 | 2014-03-19 | 山东省科学院激光研究所 | Manufacturing method of optical fiber F-P cavity sensor and manufacturing device thereof |
| CN103954387A (en) * | 2014-04-25 | 2014-07-30 | 深圳大学 | Pressure sensor based on optical fiber FP interferometer and manufacturing method of pressure sensor |
| CN108413995A (en) * | 2018-02-11 | 2018-08-17 | 华北电力大学 | Micro-nano optical fiber EFPI sensors F-P cavity system makees device and method |
-
2007
- 2007-03-22 CN CN 200710010715 patent/CN101025376A/en active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101900576A (en) * | 2010-07-08 | 2010-12-01 | 北京交通大学 | Method for manufacturing fiber bragg grating Fabry-Perot sensor |
| CN101900576B (en) * | 2010-07-08 | 2011-07-20 | 北京交通大学 | Method for manufacturing fiber bragg grating Fabry-Perot sensor |
| CN103644925A (en) * | 2013-12-07 | 2014-03-19 | 山东省科学院激光研究所 | Manufacturing method of optical fiber F-P cavity sensor and manufacturing device thereof |
| CN105043424A (en) * | 2013-12-07 | 2015-11-11 | 山东省科学院激光研究所 | Production method of optical fiber F-P cavity sensor |
| CN103644925B (en) * | 2013-12-07 | 2015-11-18 | 山东省科学院激光研究所 | The producing device of fiber F-P cavity sensor |
| CN105043424B (en) * | 2013-12-07 | 2017-04-12 | 山东省科学院激光研究所 | Production method of optical fiber F-P cavity sensor |
| CN103954387A (en) * | 2014-04-25 | 2014-07-30 | 深圳大学 | Pressure sensor based on optical fiber FP interferometer and manufacturing method of pressure sensor |
| CN103954387B (en) * | 2014-04-25 | 2016-03-02 | 深圳大学 | Based on the method for making of the pressure transducer of optical fiber FP interferometer |
| CN108413995A (en) * | 2018-02-11 | 2018-08-17 | 华北电力大学 | Micro-nano optical fiber EFPI sensors F-P cavity system makees device and method |
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