CN101020388A - Method for forming pattern, droplet ejection apparatus, electro-optic device, and liquid crystal display - Google Patents

Abstract

A deposit forming method including ejecting droplets of a deposit forming material onto a substrate, thereby forming a deposit by the droplets on the substrate, is provided. The droplets are ejected along a direction inclined at a predetermined angle in a predetermined direction with respect to a normal line of the substrate and at a predetermined pitch in the predetermined direction. The predetermined angle is set in correspondence with the diameter of each of the droplets and the predetermined pitch in such a manner that the dimension of a dot formed by each droplet on the substrate in the predetermined direction becomes greater than or equal to the predetermined pitch. Hence, the uniformity of the deposit film thickness can be improved.

Description

Pattern formation method, droplet ejection apparatus, electro-optical device and liquid crystal indicator

Technical field

The present invention relates to pattern formation method, droplet ejection apparatus, electro-optical device and liquid crystal indicator.

Background technology

Contain a large amount of patterns and form (composition) operation in the manufacturing process of display unit or semiconductor device, the film that this pattern formation operation will be deposited on the substrate is patterned into desirable shape and forms patterned film.

In recent years, to form in the operation at this pattern, to utilize ink-jet method in order boosting productivity, this ink-jet method is to make the drop curing that sprays and form patterned film in self aligned mode on substrate.Ink-jet method is owing to can form the patterned film corresponding with droplet profile on substrate, the mask that does not need to be used for patterning forms, and can cut down the process number that pattern forms operation.

But, utilizing ink-jet method to form under the situation of patterned film, if land drop wetting in the substrate surface indiffusion, then the concaveconvex shape of drop can be reflected in the pattern form, thereby impairs the flatness and the film thickness uniformity of patterned film.

Therefore, in such ink-jet method, all the time, propose that the land of making are arranged the motion of the wetting expansion of diffusion of drop.For example, in TOHKEMY 2005-131498 communique, the normal slope of the relative substrate of emission direction by making drop, and the drop of ejection is paid along the velocity component of the tangential direction of substrate.Thus, the drop that can make land along the tangential direction of substrate with the amount of the normal direction of substrate and the formed angle of emission direction (inclination angle) and spread wetting.

But, in above-mentioned ink-jet method, under the situation of the patterned film that forms different thickness, that is, under the situation of the total spray volume that changes per unit area, in general, each drop capacity is maintained constant, the ejection that changes drop is at interval.For example, under the situation of film forming patterned film, each drop capacity is maintained constant, and substrate is increased with respect to the sweep speed of nozzle, or prolong the action cycle of ejection action, thereby the ejection of drop is enlarged at interval.Thus, can realize the stabilisation of drop ejection action, can guarantee total spray volume repeatability, be the thickness repeatability of patterned film.

But, open in the 2005-131498 communique above-mentioned spy, only considered the dispersing of drop of the crooked and land of the flight of drop of ejection, and the inclination angle of emission direction has been defined in the scope of broad.Therefore, as shown in figure 10, enlarge under the situation of coming film forming patterned film at the ejection interval W that makes drop Fb, if the tiltangle of emission direction A is little, then the land diameter R1 of drop Fb is than the ejection interval W weak point of drop Fb.And, land each drop Fb be dispersed in respectively on the substrate Sb.

As a result, exist the concaveconvex shape of each drop Fb to be reflected in the shape of patterned film, make the obvious uneven problem of thickness of patterned film.

Summary of the invention

The present invention proposes for addressing the above problem, and the pattern that purpose is to provide a kind of film thickness uniformity that makes the pattern of patterned film of being made of drop and so on to improve forms method and droplet ejection apparatus.Another object of the present invention is in addition, and a kind of electro-optical device and liquid crystal indicator that possesses the pattern that uses such droplet ejection apparatus formation is provided.

A kind of pattern formation method, by form the drop of material towards substrate ejection pattern, on substrate, to form the pattern that constitutes by drop, described drop along from the normal of substrate to the tilted direction ejection of predetermined angular of prescribed direction, and this is ejected on the described prescribed direction in accordance with regulations apart from carrying out, diameter and described predetermined distance based on described drop are set described predetermined angular, so that be described predetermined distance more than in the ink dot that each drop constituted of substrate in the size on the described prescribed direction by land.

A kind of droplet ejection apparatus is by form the drop of material towards substrate ejection pattern, to form the pattern that is made of drop on substrate.Described drop along from the normal of substrate to the tilted direction ejection of predetermined angular of prescribed direction, and this is ejected on the described prescribed direction in accordance with regulations apart from carrying out, this droplet ejection apparatus has: ejiction opening forms face, its disposes relative with described substrate, forming a line on this ejiction opening formation face is provided with a plurality of ejiction openings of the described drop of ejection; Tilting equipment, it is used to make described ejiction opening to form face to fascinate around the axle that fascinates that the direction of arranging with described ejiction opening extends in parallel; Angle initialization mechanism, it sets described predetermined angular by controlling described tilting equipment based on the diameter of described drop and described predetermined distance, so that be described predetermined distance more than in the ink dot that each drop of substrate constitutes in the size on the described prescribed direction by land.

A kind of electro-optical device possesses the substrate that uses said apparatus and form pattern.

A kind of liquid crystal indicator possesses the substrate that uses said apparatus to form alignment films.

Description of drawings

Fig. 1 is the stereogram of the liquid crystal indicator in expression an embodiment of the invention;

Fig. 2 is the profile of the liquid crystal indicator of presentation graphs 1;

Fig. 3 is the stereogram of the droplet ejection apparatus in the identical embodiment of expression;

Fig. 4 is the stereogram of droplet discharging head of the droplet ejection apparatus of presentation graphs 3;

Fig. 5, Fig. 6, Fig. 7 are the side views of the identical droplet discharging head of expression;

Fig. 8 is the key diagram that the drop ejection of the droplet ejection apparatus of key diagram 3 is moved;

Fig. 9 is the electric frame circuit diagram of electric structure of the droplet ejection apparatus of presentation graphs 3;

Figure 10 is the summary side elevation of the droplet ejection apparatus of expression conventional example.

The specific embodiment

Below, an embodiment of the present invention having been specialized according to Fig. 1～Fig. 9 explanation.At first, describe for liquid crystal indicator 10 as electro-optical device with the alignment films (pattern) that forms by pattern formation method of the present invention.Fig. 1 is the stereogram of liquid crystal indicator 10, and Fig. 2 is the A-A line profile of Fig. 1.

In Fig. 1, possess the backlight 12 of marginal ray (edge light) type at the downside of liquid crystal indicator 10, this is backlight to have light sources 11 such as LED, and it is tabular to form quadrangle.

Above backlight 12, possesses the tabular liquid crystal panel 13 of quadrangle that forms with backlight 12 roughly the same sizes.And the light that penetrates from light source 11 shines to liquid crystal panel 13.

On liquid crystal panel 13, possess the device substrate 14 and relative substrate 15 that are oppositely arranged.As shown in Figure 2, these device substrates 14 and relative substrate 15 are bonded together via the encapsulant 16 of the quadrilateral frame shape that constitutes by light-cured resin.And, enclose liquid crystal 17 in the gap between these device substrates 14 and relative substrate 15.

Lower surface (sides of 12 sides backlight) at device substrate 14 is bonded with optical substrates 18 such as Polarizer and polarizer.Optical substrate 18 makes from backlight 12 light linear polarization and directive liquid crystal 17.At the upper surface (side of relative substrate 15 sides: element forms face 14a) of device substrate 14, arrange and be formed on a plurality of scan line Lx that extend on the roughly whole zone of a direction (the X direction of arrow).Scan line Lx is electrically connected on the scan line drive circuit 19 in the side configuration of device substrate 14.Receive the input of sweep signal from scan line drive circuit 19 with the time control (timing) of regulation.In addition, on element formation face 14a, arrange a plurality of data wire Ly that extend on the roughly whole zone that is formed with in the Y direction of arrow.Data wire Ly is electrically connected on the data line drive circuit 21 in the configuration of the opposite side of device substrate 14, the input that receives based on the data-signal of video data from data line drive circuit 21 with the time control of regulation.

Form on the face 14a at element, on the position that scan line Lx and data wire Ly intersect, be formed with and be connected in corresponding scanning line Lx and data wire Ly and be arranged in rectangular a plurality of pixels 22.Possess respectively in each pixel 22 that TFT etc. does not have illustrated control element and the pixel electrode 23 of the photopermeability that is made of nesa coating etc.

In Fig. 2, be laminated with the alignment films 24 of the orientation process of having implemented utilization grinding (rubbing) processing on the whole at the upside of each pixel 22.Alignment films 24 is the thin patterned films that are made of orientation macromolecules such as orientation polyimides, near the pixel electrode 23 of correspondence, plays the effect of liquid crystal 17 being set for the state of orientation of regulation.This alignment films 24 is formed by ink-jet method.Promptly, by will in specified solvent, having dissolved the high molecular orientation film formation material F (with reference to figure 6) that forms material as pattern of orientation sprays to pixel 22 as drop Fb (with reference to figure 7) whole upside, make land drop Fb drying, pick up the ears to form alignment films 24.

On the upper surface of described relative substrate 15, dispose with Polarizer 25 from the light directive of the vertical linear polarization of the light of optical substrate 18 outside (top among Fig. 2).The relative lower surface of substrate 15 (side of device substrate 14 sides: electrode forming surface 15a) be laminated with comparative electrode 26 on the whole, this comparative electrode 26 is oppositely arranged with each pixel electrode 23, and is made of the conducting film of photopermeability.Comparative electrode 26 is electrically connected on described data line drive circuit 21, applies the common potential of regulation from 21 pairs of described comparative electrodes 26 of this data line drive circuit.Lower surface at comparative electrode 26 is laminated with the alignment films 27 of having implemented to adopt the orientation process of milled processed on the whole.This alignment films 27 is also the same with described alignment films 24 to be formed by ink-jet method, near described comparative electrode 26, is carrying out liquid crystal 17 is set at the work of the state of orientation of regulation.

And, based on the line style sequential scanning, select scan line Lx with time control one rule ground of regulation, the control element that makes each pixel 22 becomes opening in only during selecting separately.So, to corresponding with each control element each pixel electrode 23 output based on data-signal from the video data of corresponding data line Ly.If to each pixel electrode 23 outputting data signals, then based on the potential difference between each pixel electrode 23 and the comparative electrode 26, the state of orientation of the liquid crystal 17 that modulation is corresponding.That is, according to the polarized condition of each pixel 22 modulation from the light of optical substrate 18.Then, according to modulated only not by Polarizer 25, show image at the upside of liquid crystal panel 13 based on video data.

Then, be used to form the droplet ejection apparatus 30 of above-mentioned alignment films 27 (alignment films 24) according to Fig. 3～Fig. 9 explanation.

In Fig. 3, droplet ejection apparatus 30 is the orientation membrane formation device in the present embodiment, possess the pedestal 31 that forms rectangular shape at droplet ejection apparatus 30, and, be formed with a pair of guiding groove 32 that extends along its length direction (the X direction of arrow) at the upper surface of this pedestal 31.Above this pedestal 31, the output shaft that possesses with the X-axis motor M X that is provided with at pedestal 31 (with reference to figure 9 upper left) drives the substrate-placing platform 33 as travel mechanism that links, and this substrate-placing platform 33 moves back and forth (along X direction of arrow scanning) with the speed of stipulating (conveyance speed Vx) in the X direction of arrow and the contrary X direction of arrow along described guiding groove 32.

At the upper surface of substrate-placing platform 33, be formed with can mounting the mounting surface 34 that is the relative substrate 15 of upside with described comparative electrode 26, will be by mounting the relative substrate 15 of state with respect to substrate-placing platform 33 positioning and fixing.In addition, in the present embodiment, though form structure at the relative substrate 15 of mounting surface 34 mountings, being not limited to this, also can be that mounting is the structure of the device substrate 14 of upside with described each pixel electrode 23.

In the Y of pedestal 31 direction of arrow both sides, configuration forms the guide member 35 of a type, and is formed with a pair of guide rail 36 up and down that extends on the Y direction of arrow on this guide member 35.

In addition, on guide member 35, possess the balladeur train 37 that drives binding with the output shaft of the Y-axis electrode MY (with reference to the lower-left of figure 9) that is provided with at guide member 35, and this balladeur train 37 can move back and forth (along the scanning of the Y direction of arrow) in the Y direction of arrow and the contrary Y direction of arrow along guide rail 36.Internal configurations at balladeur train 37 has the print cartridge 38 that can accommodate described alignment films formation material F (with reference to figure 6) with deriving, and the orientation film formation material F that this print cartridge 38 is accommodated can be exported to the droplet discharging head 41 that carries below balladeur train 37.

Fig. 4 is the approximate three-dimensional map from beneath balladeur train 37 (droplet discharging head 41), and Fig. 5 and Fig. 6 are the summary side elevations from Y direction of arrow unilateral observation balladeur train 37 and droplet discharging head 41.

In Fig. 4, dispose the guiding mounting table 39 of the rectangular shape that extends in the Y direction of arrow at the downside (upside of Fig. 4) of balladeur train 37.At the lower surface (above Fig. 4) of guiding mounting table 39, be formed with the circular-arc concave curved surface of section (guide surface 39a) in the roughly whole zone of the Y direction of arrow that guides mounting table 39.Guide surface 39a forms, the position of its center of curvature 39C (with reference to the downside central authorities of figure 5) the guiding mounting table 39 under, and along be positioned in the state on the substrate-placing platform 33 comparative electrode 26 above.

In Fig. 4, dispose the platform 40 that fascinates of the formation tilting equipment that forms semicircle cone (Pu Pike shape) shape that extends in the Y direction of arrow in guiding mounting table 39.In a side of fascinating platform 40, be formed with the convex surface corresponding (sliding surface 40a) in the side of these guiding mounting table 39 sides (below among Fig. 4) with described guide surface 39a.In addition, in the another side of fascinating platform 40, be formed with the plane (installed surface 40b) parallel in the side (above among Fig. 4) relative with substrate relatively 15 with this sliding surface 40a.

This platform 40 that fascinates drives with the output shaft of the interior tilting motor MR that is located at balladeur train 37 (with reference to figure 9 upper right) and to link, and receives the driving force of this tilting motor MR, makes its sliding surface 40a along described guide surface 39a slide (reversing).That is, this platform 40 that fascinates, its sliding surface 40a and described guide surface 39a are in same plane, and its installed surface 40b is fascinated around the relative substrate 15 of center of curvature 39C that is positioned on the comparative electrode 26.In other words, installed surface 40b fascinates around the axle that fascinates that extends along the Y direction of arrow.

And, supply with to tilting motor MR and to be used to signal that installed surface 40b is fascinated.So tilting motor MR is just changeing the driving that drives or reverse with the rotating speed of regulation, making the installed surface 40b of the platform 40 that fascinates is to fascinate in the center with center of curvature 39C.

In addition, in the present embodiment, shown in the solid line of Fig. 5,, the normal direction (hereinafter referred to as emission direction A) of installed surface 40b and the parallel allocation position of normal direction (the Z direction of arrow) of relative substrate 15 are called " initial position " at the allocation position of platform 40 that fascinates.In addition, shown in the double dot dash line of Fig. 5, with the allocation position of the platform 40 that fascinates, promptly emission direction A is called " obliquity " from the normal of relative substrate 15 to the allocation position of the state of the angle (tiltangle) of X direction of arrow inclination regulation.

In Fig. 4, on installed surface 40b, be fixed with the droplet discharging head that forms rectangular shape (hereinafter referred to as shower nozzle) 41 that extends along the Y direction of arrow.Downside (upside in Fig. 4) at shower nozzle 41 possesses nozzle plate 42, and is formed with the nozzle formation face 42a as ejiction opening formation face parallel with installed surface 40b in relative substrate 15 sides (upside among Fig. 4) of this nozzle plate 42.Form face 42a at this nozzle, along the Y direction of arrow to arrange a plurality of nozzle N that are formed with as ejiction opening equally spacedly.

In Fig. 5, each nozzle N along nozzle form face 42a (installed surface 40b) normal direction, promptly be formed in nozzle plate 42 along described emission direction A breakthrough form, and when the platform 40 that fascinates was positioned at " initial position ", each nozzle N was configured to be positioned at the Z direction of arrow (opposition side of emission direction A) of described center of curvature 39C.In the present embodiment, described center of curvature 39C and the position corresponding with the emission direction A of each nozzle N are called landing positions PF.

And, just changeing driving tilting motor MR, the body 40 that will fascinate moves to " obliquity " from " initial position " configuration.So as shown in Figure 5, each nozzle N is that center of rotation turns right with center of curvature 39C (corresponding landing positions PF) respectively, and its formation direction is tilted with tiltangle to the X direction of arrow with respect to the normal (the Z direction of arrow) of relative substrate 15.Thus, each nozzle N, when making it form direction and tilt, the position that can keep corresponding landing positions PF, can with and corresponding landing positions PF between distance maintain the distance (flying distance L) of regulation.That is, droplet ejection apparatus 30 constitutes, and when changing emission direction A, can keep from the land precision of the drop Fb of each nozzle N ejection.

In Fig. 6, the opposition side at the emission direction A of each nozzle N is formed with the chamber 43 that is communicated with described print cartridge 38, supplies with orientation film formation material F from print cartridge 38 to the nozzle N of correspondence.Opposition side at the emission direction A of each chamber 43 is pasted with the oscillating plate 44 that can vibrate on emission direction A and rightabout thereof, volumes in the chamber 43 are enlarged and/or dwindle.At the upside of oscillating plate 44, dispose a plurality of piezoelectric element PZs corresponding with each nozzle N.Each piezoelectric element PZ reception is respectively applied for the signal (piezoelectric element drives signal COM: with reference to the lower-left of figure 9) that drives control piezoelectric element PZ and shrinks and/or extension, and corresponding oscillating plate 44 is vibrated on emission direction A and rightabout thereof.

At this, as shown in Figure 7, on comparative electrode 26 (substrate 15 relatively),, uniformly-spaced be given for the grid point (target location P) that makes drop Fb land along the X direction of arrow in the zone that forms described alignment films 27 (ejection is W at interval).

Then, move the platform 40 that fascinates in " obliquity " configuration, and beginning is to X direction of arrow conveyance substrate-placing platform 33.Then, in the moment that each landing positions PF is positioned at the position (target location P) that is respectively applied on the comparative electrode 26 that makes drop Fb land, supply with piezoelectric element to each piezoelectric element PZ and drive signal COM.

So the volume of each chamber 43 enlarges and/or dwindles, the meniscus in each nozzle N (interface of orientation film formation material F) vibration.If the vibration of the meniscus in each nozzle, then as shown in Figure 7, drive the orientation film formation material F of the corresponding predetermined weight of signal COM with piezoelectric element,, be ejected as the drop Fb of the diameter with regulation (liquid-drop diameter R0 :) with reference to figure 8 from the nozzle N of correspondence.Each the drop Fb that has been ejected, along the formation direction of each nozzle N, i.e. the tilted emission direction A of tiltangle, with speed (spouting velocity Vf) the flying distance L that flown of regulation, the zone of the final target location P (landing positions PF) of land on comparative electrode 26.

In addition, the piezoelectric element of present embodiment drives signal COM, based on generating according to the Wave data WD (with reference to figure 9) of settings such as test in advance, meniscus is vibrated sleekly, and the weight of drop Fb is set at stable predetermined weight.That is, the droplet ejection apparatus 30 of present embodiment drives signal COM (Wave data WD) by shared piezoelectric element and sprays each drop Fb, makes the diameter of each drop Fb be stabilized in described liquid-drop diameter R0 respectively.

Then, in the zone of target location P, then the shape after the land of drop Fb is expanded with the amount that emission direction A tilts along the X direction of arrow as if drop Fb land.For example,, observe from the Z direction of arrow along with tiltangle is little, the shape after the land of drop Fb, be with its tiltangle little amount form that to approach with landing positions PF be the central circular shape.On the contrary, along with tiltangle becomes big, observe from the Z direction of arrow, the shape after the land of drop Fb is to form the elliptical shape that extends in the X direction of arrow with the big amount of its tiltangle.

Therefore, the present inventor finds, by make land the shape of drop Fb approach the projection image as the drop Fb of projecting direction with emission direction A, the drop Fb that can stipulate as land the land diameter R1 of the size on the X direction of arrow, promptly by land drop constitute the lower limit of the size of ink dot on the X direction of arrow.

That is, if land the shape of the drop Fb projection image that approaches drop Fb, then as shown in Figure 8, the land diameter R1 of drop Fb can be derived by following formula by liquid-drop diameter R0 and tiltangle.

R1＝R0/cosθ

And each the drop Fb to having sprayed by the inclination of its emission direction A, applies the velocity component (tangential direction speed Vfx=Vf * sin θ: with reference to figure 7) of the X direction of arrow corresponding with tiltangle to it.In addition, to each the drop Fb that has sprayed,, can on the contrary X direction of arrow, apply corresponding relative velocity with conveyance speed Vx by the conveyance speed Vx of relative substrate 15.

Therefore, land the shape of drop Fb, its land diameter R1 has been expanded the amount of tangential direction speed Vfx and conveyance speed Vx along the X direction of arrow.That is, the land diameter R1 of drop Fb can be derived by following formula by liquid-drop diameter R0 and tiltangle.

R1≥R0/cosθ

And, in the present embodiment, in the operation of ejection drop Fb, set tiltangle, make above-mentioned land diameter R1 more than described ejection interval W.Thus, can be each other at the drop Fb that engages arrangement on the relative substrate 15 on the X direction of arrow reliably.

In addition, in the droplet ejection apparatus 30 of present embodiment, utilize liquid-drop diameter R0 and ejection W at interval, set and satisfy the tiltangle of θ=arccos (R0/W), but be not limited to this, also can set the tiltangle that satisfies arccos (R0/W)≤θ＜90.

The electrical structure of the droplet ejection apparatus 30 that constitutes as described above then, is described according to Fig. 9.

In Fig. 9,, possess the CPU, the RAM that constitute the information of fascinating and generate mechanism and controlling organization, ROM etc. at the control device 51 that constitutes angle initialization mechanism.And control device 51 according to the various data and the various program of storage in RAM or ROM etc., makes substrate-placing platform 33 and balladeur train 37 scannings, and drives each piezoelectric element PZ of control shower nozzle 41.

Be connected with input unit 52, X-axis motor-drive circuit 53, y-axis motor drive circuit 54, shower nozzle drive circuit 55 and tilting equipment drive circuit 56 at control device 51.

Input unit 52 has console switch such as starting switch, shutdown switch, and various operation signals are input to control device 51, and information that will be relevant with the target film thickness of the alignment films 27 that forms at relative substrate 15 is input to control device 51 as both thickness information It of definite form.

And It is input to control device 51 from input unit 52 with thickness information.So, the thickness information It that control device 51 receives from input unit 52, the gross weight of the orientation film formation material F that calculating sprays on comparative electrode 26, and based on the weight of gross weight that calculates and the drop Fb corresponding with Wave data WD, the ejection of calculating drop Fb is W (position coordinates of each target location P) at interval.If calculate the position coordinates of each target location P, then control device 51 generate the data bitmap BMD that is used to spray drop Fb and with the ejection corresponding data RD and storing of fascinating of W at interval.

Data bitmap BMD is the value (0 or 1) that makes each data corresponding to each the target location P on the comparative electrode 26, and is corresponding to everybody unlatching of value regulation piezoelectric element PZ or the data of closing.And data bitmap BMD is specified to, and when each landing positions PF is positioned at each corresponding target location P, makes drop Fb ejection.

The data of fascinating RD makes the data of tiltangle corresponding to the rotating speed of tilting motor MR.This tiltangle is set to, and based on ejection interval W and the liquid-drop diameter R0 corresponding with Wave data WD, satisfies θ=arccos (R0/W).

X-axis motor-drive circuit 53, in response to from the corresponding drive control signal of the X-axis motor-drive circuit 53 of control device 51, the X-axis motor M X forward or reverse that substrate-placing platform 33 is moved back and forth.This X-axis motor-drive circuit 53 connects X-axis motor rotation detector MEX, and input is from the detection signal of X-axis motor rotation detector MEX.X-axis motor-drive circuit 53 is based on the detection signal from X-axis motor rotation detector MEX, calculate the moving direction and the amount of movement of substrate-placing platform 33 (substrate 15 relatively), and the generation information relevant with the present position of substrate-placing platform 33 is as mounting table positional information SPI.Then, the mounting table positional information SPI that control device 51 receives from X-axis motor-drive circuit 53 exports various signals.

Y-axis motor drive circuit 54, the drive control signal corresponding with y-axis motor drive circuit 54 in response to from control device 51 makes the y-axis motor MY forward or reverse that moves back and forth balladeur train 37.Connect y-axis motor rotation detector MEY at this y-axis motor drive circuit 54, input is from the detection signal of y-axis motor rotation detector MEY.Y-axis motor drive circuit 54 is based on the detection signal from y-axis motor rotation detector MEY, calculates the moving direction and the amount of movement of balladeur train 37 (head unit 30), and the generation information relevant with the present position of balladeur train 37 is as sledge position information CPI.Then, the sledge position information CPI that control device 51 receives from y-axis motor drive circuit 54 exports various driving signals.

If describe in detail, then control device 51, based on mounting table positional information SPI and sledge position information CPI, before under the relative substrate 15 intrusion balladeur trains 37, based on the corresponding data bitmap BMD of scanning amount (going or rollback) of relative substrate 15, synchronous with the square frame signal of regulation, generate ejection control signal SI.Then, control device 51 when each scanning balladeur train 37, with the ejection control signal SI that generates in turn serial transfer give shower nozzle drive circuit 55.

In addition, control device 51 is created on when each landing positions PF is positioned at corresponding respectively target location P at every turn, is used to make the piezoelectric element based on Wave data WD to drive the signal (ejection time control signal LP) of signal COM output to piezoelectric element PZ based on mounting table positional information SPI.Then, the control device 51 ejection time control signal LP that will generate exports to shower nozzle drive circuit 55 in turn.

Be connected with shower nozzle 41 at shower nozzle drive circuit 55, and supply with Wave data WD, ejection control signal SI and ejection time control signal LP from control device 51.Shower nozzle drive circuit 55 receives the ejection control signal SI from control device 51, makes this ejection control signal SI correspond respectively to each piezoelectric element PZ and carries out serial conversion in turn.Then, shower nozzle drive circuit 55, when each ejection time control signal LP that receives from control device 51, based on the serial conversion ejection control signal SI, will drive signal COM based on the piezoelectric element of Wave data WD and supply with to each piezoelectric element PZ.That is, shower nozzle drive circuit 55 when each each landing positions PF is positioned at target location P, is supplied with piezoelectric element to the piezoelectric element PZ of correspondence and is driven signal COM.

Tilting equipment drive circuit 56 is in response to the data RD that fascinates from control device 51, the tilting motor MR forward or reverse that the platform 40 that fascinates is fascinated.Connect tilting motor rotation detector MER on this tilting equipment drive circuit 56, input is from the detection signal of tilting motor rotation detector MER.Tilting equipment drive circuit 56 calculates the tiltangle (actual tilt angles) of the platform 40 that fascinates based on the detection signal from tilting motor rotation detector MER.In addition, tilting equipment drive circuit 56 generate with the information of the actual tilt angular dependence (-dance) that calculates as fascinating station information RPI, and with its output to control device 51.

Then, describe for the method for using above-mentioned droplet ejection apparatus 30 on relative substrate 15, to form alignment films 27.

At first, as shown in Figure 3, the relative substrate 15 of mounting on substrate-placing platform 33.At this moment, substrate-placing platform 33 is configured in the contrary X direction of arrow side of balladeur train 37, and balladeur train 37 is configured in the portion of keeping to the side most of the contrary Y direction of arrow on the guide member 35.In addition, the platform 40 that fascinates is configured in described " initial position ".

From this state, input device 52 is to control device 51 input thickness information It.So control device 51 generates and stores based on the data bitmap BMD of thickness information It and the data RD that fascinates.

If generate the data bitmap BMD and the data RD that fascinates, then control device 51 will fascinate data RD output to tilting equipment drive circuit 56, and platform 40 configurations of will fascinating move to " obliquity ".If the platform 40 that fascinates is moved in configuration, the station information RPI that fascinates that receives from tilting equipment drive circuit 56 of control device 51 then judges that whether actual tilt angles is and the corresponding tiltangle of data RD that fascinates.Be that control device 51 judges whether actual tilt angles is the tiltangle that satisfies θ=arccos (R0/W).

Then, if be judged as actual tilt angles be and the corresponding tiltangle of data RD that fascinates (setting fascinate platform 40), then control device 51 drives control y-axis motor MY, disposes mobile balladeur train 37.Then, with relative substrate 15 during in the conveyance of the X direction of arrow, balladeur train 37 (each nozzle N) is set, make each landing positions PF be positioned on the scanning pattern of corresponding target location P (the X direction of arrow), if balladeur train 37 is set, then control device 51 drives control X-axis motor M X, and beginning is to X direction of arrow conveyance substrate-placing platform 33 (substrate 15 relatively).

At this moment, control device 51 makes the square frame signal of Wave data WD and regulation synchronous, and Wave data WD is exported to shower nozzle drive circuit 55.In addition, control device 51 generates ejection control signal SI, this ejection control signal SI makes the square frame signal of data bitmap BMD corresponding with the scanning amount once of substrate-placing platform 33 and regulation synchronous, and the control device 51 ejection control signal SI that will generate in turn serial transfer give shower nozzle drive circuit 55.

Finally, control device 51 is based on mounting table positional information SPI and sledge position information CPI, when each each landing positions PF is positioned at each grid point on the relative motor 26, output ejection time control signal LP carries out the drop ejection action based on ejection control signal SI.

That is, control device 51 in the moment in that each landing positions PF is positioned at target location P, to each piezoelectric element PZ supply piezoelectric element driving signal COM corresponding with Wave data WD, sprays the drop Fb of orientation film formation material F simultaneously from each nozzle N.

At this moment, each drop Fb of ejection, along the emission direction A of the tiltangle that tilted respectively with spouting velocity Vf flight, in turn land in along the X direction of arrow with the ejection zone of the target location P that separates of W at interval.The emission direction A of each drop Fb of land tilts with the tiltangle that approaches the land approximate shapes, and its land diameter R1 is more than the W of ejection interval.And, each drop Fb of land, by with its tangential direction speed Vfx and the corresponding relative velocity of conveyance speed Vx, make its land diameter R1 expansion further.Therefore, each the drop Fb that is ejected on the comparative electrode 26 engages reliably along the X direction of arrow respectively.

Thus, the joint by drop Fb can form the aqueous film that is made of uniform thickness, can form the alignment films 27 of uniform thickness by this aqueous film of drying.If form alignment films 27, then this alignment films 27 is implemented known milled processed at relative substrate 15.

On the other hand,, on device substrate 14, also form alignment films 24, this alignment films 24 is implemented same milled processed by droplet ejection apparatus 30 with same method.Then, form encapsulant 16 on device substrate 14, configuration liquid crystal 17 is pasted together with relative substrate 15 by making device substrate 14 in the zone that is surrounded by encapsulant 16, forms liquid crystal panel 13.

The effect of the present embodiment that constitutes so then, below is described.

(1) according to above-mentioned embodiment, based on the liquid-drop diameter R0 of the drop Fb that sprays and the ejection interval W of drop Fb, set the normal of relative substrate 15 and the tiltangle that emission direction A is, make the land diameter R1 of drop Fb in the ejection of drop Fb at interval more than the W.

Therefore, can along the direction corresponding with emission direction A engage land reliably drop Fb.Consequently, can with ejection at interval W change, be alignment films 27 target film thickness change irrespectively, reciprocally make at the drop Fb that is arranged on the X direction of arrow on the relative substrate 15 to be engaged with each other.Therefore, can improve the film thickness uniformity of the alignment films 27 that constitutes by drop Fb.

(2) according to above-mentioned embodiment, by with emission direction A being the land diameter R1 that the projection image of the drop Fb of projecting direction is similar to drop Fb.And, only set the tiltangle that emission direction A and normal are based on the liquid-drop diameter R0 of drop Fb and the ejection interval W of drop Fb.

Therefore, can make more simply at the drop Fb that is arranged on the X direction of arrow on the relative substrate 15 and engage each other.

(3) according to above-mentioned embodiment, emission direction A on the direction consistent with the scanning direction (the X direction of arrow) of relative substrate 15 from the normal slope of relative substrate 15.Therefore, can make the further amount that enlarges the conveyance speed Vx of relative substrate 15 of land diameter R1 of drop Fb.Consequently, can improve the film thickness uniformity of alignment films 27 more reliably.

(4), according to above-mentioned embodiment, control device 51, liquid-drop diameter R0 and ejection interval W based on drop Fb generate the fascinate data RD relevant with tiltangle.Then,, drive control tilting motor MR, make tiltangle satisfy θ=arccos (R0/W) based on the data RD that fascinates.Therefore, can further make reliably and be engaged with each other at the drop Fb that is arranged on the X direction of arrow on the relative substrate 15.

In addition, above-mentioned embodiment can also change as following.

● in the above-described embodiment, only constitute based on the liquid-drop diameter R0 of drop Fb and ejection at interval W set tiltangle.But be not limited to this, for example, liquid-drop diameter R0 that also can constitute at drop Fb and ejection be at interval on the basis of W, also waits based on the spouting velocity Vf of the viscosity of the surface tension of drop Fb or drop Fb, drop Fb and set tiltangle.That is, constitute at least based on the ejection of the liquid-drop diameter R0 of drop Fb and drop Fb at interval W set tiltangle.

● in the above-described embodiment, observe, substrate-placing platform 33 is scanned along the opposition side of emission direction A from the normal direction of relative substrate 15.That is be on the X direction of arrow substrate-placing platform 33 to be scanned from the direction of the normal slope of relative substrate 15, at emission direction A.But be not limited to this, also can observe, come substrate-placing platform 33 is scanned along emission direction A from the normal of relative substrate 15.That is, also can on the promptly contrary X direction of arrow of the rightabout of the direction of the normal slope of relative substrate 15, scan at emission direction A to substrate-placing platform 33.And at this moment, on the basis of liquid-drop diameter R0 that can also constitute at drop Fb and ejection interval W, also the conveyance speed Vx based on substrate-placing platform 33 sets tiltangle.That is, can constitute, set tiltangle based on the liquid-drop diameter R0 of drop Fb and the ejection interval W of drop Fb at least, make the land diameter R1 of drop Fb spray at interval more than the W.

● in the above-described embodiment, tilting equipment is specialized as fascinating platform 40.But be not limited to this, for example, also can constitute substrate-placing platform 33 is specialized as tilting equipment, the relative substrate 15 in substrate-placing platform 33 mountings is fascinated with respect to nozzle formation face 42a.

● in the above-described embodiment, formed the structure of the nozzle N that only possesses row.But be not limited thereto, also can constitute the structure of the nozzle N that possesses multiple row.

● in the above-described embodiment, pattern is embodied as the alignment films 27 of liquid crystal indicator 10.But be not limited thereto, for example, also can be embodied as liquid crystal indicator 10, utilizing the various films that make the luminous field effect type device of fluorescent material (FED or SED etc.) setting by emit the electronics that element emits from electronics, metal wiring, colour filter etc.That is, so long as by land the pattern that forms of drop Fb get final product.

● in the above-described embodiment, substrate is embodied as the relative substrate 15 of liquid crystal indicator 10.

But be not limited thereto, also substrate can be embodied as silicon substrate or flexible substrate or metal substrate etc.

● in the above-described embodiment, electro-optical device is embodied as liquid crystal indicator 10.

But be not limited thereto, for example, also electro-optical device can be embodied as el light emitting device.

Claims (13)

1. a pattern formation method by form the drop of material towards substrate ejection pattern, forms the pattern that is made of drop on substrate, it is characterized in that,

Described drop along from the normal of substrate to the tilted direction ejection of predetermined angular of prescribed direction, and this is ejected on the described prescribed direction and is undertaken by every predetermined distance,

Diameter and described predetermined distance based on described drop are set described predetermined angular, and making by land is more than the described predetermined distance in the ink dot that each drop constituted of substrate in the size on the described prescribed direction.

2. pattern formation method as claimed in claim 1 is characterized in that,

Diameter at described drop is that R, described predetermined distance are W, when described predetermined angular is θ, set described predetermined angular to satisfy: arccos (R/W)≤θ＜90.

3. pattern formation method as claimed in claim 1 or 2 is characterized in that,

Described drop is from being formed on a plurality of ejiction openings ejection on the ejiction opening formation face, and described predetermined angular is that benchmark fascinates described ejiction opening formation face to set by the normal with described substrate.

4. pattern formation method as claimed in claim 3 is characterized in that,

Towards substrate ejection drop the time, described substrate relatively moves along the described relatively ejiction opening formation face of described prescribed direction.

5. pattern formation method as claimed in claim 1 or 2 is characterized in that,

The described pattern that is formed on the substrate is an alignment films.

6. a droplet ejection apparatus by form the drop of material towards substrate ejection pattern, forms the pattern that is made of drop on substrate, it is characterized in that,

Described drop along from the normal of substrate to the tilted direction ejection of predetermined angular of prescribed direction, and this is ejected on the described prescribed direction and is undertaken by every predetermined distance,

This droplet ejection apparatus has:

Ejiction opening forms face, its disposes relative with described substrate, and forming a line on this ejiction opening formation face is provided with a plurality of ejiction openings of the described drop of ejection;

Tilting equipment, it is used to make described ejiction opening to form face to fascinate around the axle that fascinates that the direction of arranging with described ejiction opening extends in parallel;

Angle initialization mechanism, it sets described predetermined angular by controlling described tilting equipment based on the diameter of described drop and described predetermined distance, and making by land is more than the described predetermined distance in the ink dot that each drop of substrate constitutes in the size on the described prescribed direction.

7. droplet ejection apparatus as claimed in claim 6 is characterized in that,

Described angle initialization mechanism possesses:

The information of fascinating generates mechanism, and its diameter and described predetermined distance based on described drop generates the information of fascinating that is used to control described tilting equipment, so that the appearance and size of the described ink dot on the described prescribed direction is more than the described predetermined distance;

Controlling organization, it controls described tilting equipment based on the information of fascinating that generates mechanism's generation by the described information of fascinating.

8. droplet ejection apparatus as claimed in claim 7 is characterized in that,

The diameter of described drop be R, described predetermined distance be W, when described predetermined angular is θ, the described information of fascinating generates mechanism and generates the described information of fascinating to satisfy: arccos (R/W)≤θ＜90.

9. droplet ejection apparatus as claimed in claim 6 is characterized in that,

Possess travel mechanism, towards substrate ejection drop the time, this travel mechanism relatively moves described substrate and described ejiction opening formation face,

The described tilting equipment of described angle initialization mechanism controls is so that described substrate is consistent with described prescribed direction with respect to the moving direction that described ejiction opening forms face.

10. droplet ejection apparatus as claimed in claim 9 is characterized in that,

But described travel mechanism is the mounting table of the described substrate of mounting, this mounting table with the substrate of its mounting to described moving direction conveyance.

11. each the described droplet ejection apparatus as claim 6～10 is characterized in that,

The described pattern that forms on substrate is an alignment films.

12. an electro-optical device is characterized in that, possesses each the described device that utilizes claim 6～10 and forms the substrate of pattern.

13. a liquid crystal indicator is characterized in that, possesses the substrate that utilizes the described device of claim 11 and form alignment films.

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