CN101024333A - Method for forming pattern, droplet ejection apparatus, method and device for forming alignment film - Google Patents

Abstract

Disclosed a liquid droplet spurt out from ejection joint toward cardinal plate which has material can come into being pattern, and the method for forming pattern on the cardinal plate come into being pattern. The ejection joint is provided with a plurality of nozzles porch cardinal plate. When the cardinal plate moving relative to the ejection joint simultaneity, spurt out liquid droplet which has patterning material relative to the normal line of the cardinal plate sloping spurt out way. The liquid droplet spurt out while the dispose way of ejection joint is the relative to the remotion way of cardinal plate and it is sloping.

Description

Pattern formation method, droplet ejection apparatus, alignment films formation method and device

Technical field

The present invention relates to pattern formation method, droplet ejection apparatus, electro-optical device, alignment films formation method, orientation membrane formation device and liquid crystal indicator.

Background technology

Contain a large amount of patterns in the manufacturing process of display unit or semiconductor device and form operation, thereby the film patterning that this pattern formation operation will be piled up on substrate is that desirable shape forms film figure.In recent years, to form in the operation at this pattern, to utilize ink-jet method in order boosting productivity, this ink-jet method is solidified to form film figure by make the drop that sprays on substrate.Ink-jet method is owing to forming the film figure corresponding with droplet profile, so do not need to be formed for the mask of patterning on substrate.Consequently, can cut down the process number that pattern forms operation.

But, utilizing ink-jet method to form under the situation of film figure, if land are in the nonwetting diffusion on this substrate surface of the drop on the substrate, then because the concaveconvex shape that formed by these a plurality of drops is reflected on the pattern form of film figure, thereby existence diminishes the trouble of the uniformity of the flatness of film figure or thickness.

Therefore, in such ink-jet method, the method that has proposed to make the wetting diffusivity of the drop of land on substrate to improve.In TOHKEMY 2005-131498 communique, emission direction by making drop is disclosed with respect to the normal slope of substrate, come the drop of ejection is given along the method for the velocity component of the direction of substrate surface.Thus, can make the drop of land along the normal direction of the wetting diffusion substrate of the tangential direction of substrate and the angle that emission direction was (inclination angle) amount of drop.

In above-mentioned ink-jet method, under the situation of the film figure that forms different thickness, change the spray volume of the per unit area of drop.At this moment, as shown in figure 11, be maintained under certain state, make the interval of ejection drop Fb, promptly spray spacing W increase and decrease at capacity with each drop Fb.For example, under the situation of film forming film figure FP, each drop capacity is maintained necessarily, under this state, increase by the relative velocity that makes drop jetting nozzle and substrate Sb, or prolong the action cycle of ejection action, the ejection spacing W of drop Fb is increased.Thus, can realize the stabilisation of drop ejection action, can guarantee spray volume repeatability, be the thickness repeatability of Thinfilm pattern.

But, under the situation of the emission direction A of drop Fb with respect to normal direction (Z direction) inclination of substrate Sb, the shape of each drop Fb of land becomes the sub-elliptical shape, and this sub-elliptical shape has along the major diameter that extends with the direction (directions X) of this normal direction quadrature with along the minor axis of the orientation (Y direction) of nozzle N.Consequently, produce following problem.

Each drop Fb of oval in shape is because its thickness is little, so mobile decline.Consequently, go up the less thick of the drop Fb bonding part each other of adjacency in the minor axis direction (Y direction) of drop Fb, and the nozzle N of adjacency between zone on the opposing substrates Sb, form the part (recess B) that does not have drop Fb.Consequently, on film figure FP, because the thickness in the zone corresponding with recess B is minimum, so its film thickness uniformity is significantly destroyed.

Summary of the invention

The objective of the invention is to, the pattern that provides a kind of film thickness uniformity that can make the pattern that is made of drop to improve forms method, droplet ejection apparatus, electro-optical device, alignment films and forms method, is orientated membrane formation device and liquid crystal indicator.

In order to reach above-mentioned purpose, in first mode of the present invention, provide a kind of and contain the drop that pattern forms material to the substrate ejection, and on this substrate, form the pattern formation method of pattern from ejecting head.This pattern formation method comprises: the step that at least one side in described ejecting head and the described substrate is moved with respect to the opposing party, and wherein, described ejecting head has a plurality of ejiction openings of arranging along the one side of described substrate; Make the step of the orientation of described ejiction opening with respect to the described direction inclination that relatively moves; When carrying out described relatively moving, contain the step that described pattern forms the drop of material from described ejiction opening ejection along emission direction with respect to the normal slope of described substrate.

In second mode of the present invention, provide a kind of and contain the drop that pattern forms material, and on this substrate, form the droplet ejection apparatus of pattern to the substrate ejection.This droplet ejection apparatus has ejecting head, travel mechanism, tilting equipment, rotating mechanism.Ejecting head has a plurality of ejiction openings of arranging and spray to described substrate described drop along a direction.Travel mechanism makes at least one side in described ejecting head and the described substrate move with respect to the opposing party.Tilting equipment is that the center is fascinated described ejecting head with the axle that fascinates that extends along the orientation of ejiction opening, makes from the emission direction of the drop of the described ejiction opening normal slope with respect to described substrate.The turning cylinder that rotating mechanism extends with the normal along described substrate is that center of rotation is rotated described ejecting head, makes the orientation of described ejiction opening tilt with respect to the described direction that relatively moves.

In Third Way of the present invention, provide a kind of electro-optical device that possesses substrate with pattern that the droplet ejection apparatus by second mode forms.

In cubic formula of the present invention, provide a kind of and contain the drop that is orientated film formation material to the substrate ejection, and on this substrate, form the alignment films formation method of alignment films from ejecting head.This alignment films formation method comprises: the step that at least one side in described ejecting head and the described substrate is moved with respect to the opposing party, and wherein, described ejecting head has a plurality of ejiction openings of arranging along the one side of described substrate; Make the step of the orientation of described ejiction opening with respect to the described direction inclination that relatively moves; When carrying out described relatively moving, along the step that contains the drop of described orientation film formation material with respect to the emission direction of the normal slope of described substrate from described ejiction opening ejection.

In the 5th mode of the present invention, provide a kind of and contain the drop that is orientated film formation material, and on this substrate, form the orientation membrane formation device of alignment films to the substrate ejection.This orientation membrane formation device has ejecting head, travel mechanism, tilting equipment, rotating mechanism.Ejecting head has a plurality of ejiction openings of arranging and spray to described substrate described drop along a direction.Travel mechanism makes at least one side in described ejecting head and the described substrate move with respect to the opposing party.Tilting equipment is that the center is fascinated described ejecting head with the axle that fascinates that extends along the orientation of ejiction opening, makes from the emission direction of the drop of the described ejiction opening normal slope with respect to described substrate.The turning cylinder that rotating mechanism extends with the normal along described substrate is that center of rotation is rotated described ejecting head, makes the orientation of described ejiction opening tilt with respect to the described direction that relatively moves.

In the 6th mode of the present invention, provide a kind of liquid crystal indicator that possesses substrate with alignment films that the orientation membrane formation device by the 5th mode forms.

Description of drawings

Fig. 1 is the stereogram of expression liquid crystal indicator;

Fig. 2 is the profile along the 2-2 line of Fig. 1;

Fig. 3 is the stereogram of the droplet ejection apparatus of presentation graphs 2;

Fig. 4 is the stereogram of droplet jetting head of the droplet ejection apparatus of presentation graphs 2;

Fig. 5 is the vertical view of the droplet jetting head of presentation graphs 4;

Fig. 6 is the side view of the droplet jetting head of presentation graphs 4;

Fig. 7 is the part sectioned view of the droplet jetting head of presentation graphs 4;

Fig. 8 is the key diagram of action of the droplet jetting head of key diagram 4;

Fig. 9 is the key diagram that the drop ejection of the droplet ejection apparatus of key diagram 2 is moved;

Figure 10 is the block diagram of electric structure of the droplet ejection apparatus of presentation graphs 2;

Figure 11 is the summary side elevation of the existing droplet ejection apparatus of expression.

The specific embodiment

Below, in conjunction with the embodiment that Fig. 1～the present invention is specialized in Figure 10 explanation.At first, the liquid crystal indicator 10 that is formed the electro-optical device of the alignment films 27 that method forms by pattern of the present invention as having is described.Fig. 1 is the stereogram of liquid crystal indicator 1, and Fig. 2 is the 2-2 line profile of Fig. 1.

In Fig. 1, possess the backlight 12 of edge light (edge light) type at the downside of liquid crystal indicator 10, this backlight 12 has light sources 11 such as LED, and is and is the Square consisting of two isosceles right-angled triangles shape.The liquid crystal panel 13 that possesses the Square consisting of two isosceles right-angled triangles shape above backlight 12, this liquid crystal panel 13 have the size roughly the same with this backlight 12.The light that penetrates from light source 11 shines towards liquid crystal panel 13.

Liquid crystal panel 13 have device substrate 14 and with these device substrate 14 opposed counter substrate 15.Device substrate 14 and counter substrate 15 as shown in Figure 2, fit together via the sealing material 16 of four jiaos of frame shapes that are made of light-cured resin.Gap between device substrate 14 and counter substrate 15, enclosing has liquid crystal 17.

The lower surface of device substrate 14, promptly with the face of backlight 12 opposed sides on, be fitted with optical substrates 18 such as polarized light piece or polarizer.18 pairs of light from backlight 12 of optical substrate carry out rectilinearly polarized light and penetrate to liquid crystal 17.The upper surface of device substrate 14, promptly with 15 opposed of counter substrate (element form face 14a) on, be arranged with along a direction, be a plurality of scan line Lx that directions X extends.Each scan line Lx is electrically connected with respect to the scan line drive circuit 19 of configuration on device substrate 14, is imported into each scan line Lx from the sweep signal of scan line drive circuit 19 in the moment of regulation.In addition, on element formation face 14a, be arranged with a plurality of data wire Ly that extend along the Y direction.Each data wire Ly is electrically connected with respect to the data line drive circuit 21 of configuration on device substrate 14.From data line drive circuit 21 moment of regulation to the data-signal of each data wire Ly input based on video data.

Form on the face 14a at element, each position in scan line Lx and data wire Ly intersection is formed with a pixel 22.That is, on element formation face 14a, be arranged with a plurality of pixels 22 rectangularly.Each pixel 22 possesses not shown control element such as TFT or the pixel electrode 23 of the light transmission that is made of nesa coating etc.

In Fig. 2, on all pixels 22, lamination has the alignment films 24 of having implemented orientation process by friction (rubbing) processing etc.Alignment films 24 is made of orientation macromolecules such as orientation polyimides, near pixel electrode 23, the orientation of liquid crystal 17 is set for the orientation of regulation.Alignment films 24 is formed by ink-jet method.Promptly, alignment films 24 forms material, promptly is orientated film formation material F (with reference to figure 7) and is ejected on all pixels 22 as drop Fb (with reference to figure 8) by the pattern that will dissolve the orientation macromolecule form in specified solvent, and makes drop Fb after the land dry and form.

On described counter substrate 15, dispose the light that is used for the rectilinearly polarized light that will hand over the light positive that has passed through optical substrate 18 to foreign side, be the polarized light piece 25 that the top of Fig. 2 is penetrated.The lower surface of counter substrate 15, promptly with whole of 14 opposed of device substrates (electrode forming surface 15a) on, lamination has opposite electrode 26, this opposite electrode 26 forms mutually opposed with each pixel electrode 23, and is made of the conducting film of light transmission.Opposite electrode 26 is electrically connected with described data line drive circuit 21, and is endowed the common potential from the regulation of this data line drive circuit 21.In the lower surface integral body of opposite electrode 26, lamination has the alignment films 27 of having implemented orientation process by friction treatment etc.This alignment films 27 is also the same with described alignment films 24 to be formed by ink-jet method.Alignment films 27 is set at the orientation of liquid crystal 17 orientation of regulation near described opposite electrode 26.

And, by the line sequential scanning, select each scan line Lx on the moment one rule ground of regulation, the control element that makes each pixel 22 becomes opening in respectively only during selecting.So, via the data-signal of corresponding data line Ly pair of each pixel electrode 23 inputs corresponding based on video data with each control element.If to each pixel electrode 23 input data signal, then the potential difference between each pixel electrode 23 and the opposite electrode 26 changes corresponding to described data-signal, and consequently, the state of orientation of the liquid crystal 17 of configuration changes between this pixel electrode 23 and counter substrate 26.That is, the polarisation of light light state from optical substrate 18 changes by each pixel 22 corresponding to described data-signal.By allowing by each pixel 22 and interdict light, thereby show image based on video data at the upside of liquid crystal panel 13 with respect to the passing through of polarized light piece 25.

Then, be used to form the droplet ejection apparatus 30 of above-mentioned alignment films 27 (alignment films 24) according to Fig. 3～Figure 10 explanation.

In Fig. 3, droplet ejection apparatus 30 is the orientation membrane formation device in the present embodiment, and droplet ejection apparatus 30 possesses the pedestal 31 that forms rectangular shape.At the upper surface of this pedestal 31, be formed with length direction, be a pair of guiding groove 32 that directions X extends along this pedestal 31.Above pedestal 31, possesses the substrate platform 33 that drives binding with the output shaft of the X-axis motor MX (with reference to Figure 10) that is provided with at this pedestal 31 as travel mechanism.This substrate platform 33 along described guiding groove 32, be directions X, move with the speed (transporting velocity V) of regulation.

The upper surface of substrate platform 33, as mounting surface 34 performance functions that can mounting counter substrate 15, with counter substrate 15 with respect to substrate platform 33 location and fixing.Counter substrate 15 with opposite electrode 26 be under the upside state by mounting on mounting surface 34.In addition, in the present embodiment, though on mounting surface 34 mounting counter substrate 15, be not limited to this, also can be under the state that is upside with described pixel electrode 23 on mounting surface 34 mounting device substrate 14.

Be a guide member of type shape 35 on the Y direction, to cross over the mode of pedestal 31, to dispose.On this guide member 35, be formed with the pair of guide rails up and down 36 of extending along the Y direction.

In addition, guide member 35 possesses the balladeur train 37 that drives binding on this guide member 35 with the output shaft of the Y-axis motor MY (with reference to figure 1) that is provided with, and this balladeur train 37 moves along the Y direction along guide rail 36.On balladeur train 37, dispose and accommodate the ink tank (ink tank) 38 that described alignment films forms material F (with reference to figure 7).The droplet jetting head 41 that the orientation film formation material F that this ink tank 38 is accommodated can carry to the downside at balladeur train 37 is derived.

Fig. 4 is from the below, is the approximate three-dimensional map of counter substrate 15 unilateral observation droplet jetting heads 41.Fig. 5 is a vertical view of observing droplet jetting head 41 from the top.In addition, Fig. 6 and Fig. 7 are the summary side elevations of observing droplet jetting head 41 from the Y direction.

In Fig. 4, at the downside of balladeur train 37, be that the upside of Fig. 4 disposes the turntable 39a that is rectangular shape along the Y direction.Turntable 39a constitutes rotating mechanism.At the downside of turntable 39a, be the upside of Fig. 4, possess guide table 39b with this turntable 39a approximate same size.

Turntable 39a drives with the output shaft that is built in the rotating motor MR (with reference to Figure 10) in the balladeur train 37 and links, and accept the driving force of this rotating motor MR, making guide table 39b be the center rotation with the axle (a turning cylinder C) along the normal direction (Z direction) of counter substrate 15.The lower surface of guide table 39b, be among Fig. 4 above, extend and be formed with section to be circular-arc concave curved surface be guide surface 39s along the Y direction.The center of curvature 39C of guide surface 39s (with reference to figure 6) and is positioned at along the position of the upper surface of the opposite electrode 26 under the state of mounting on the substrate platform 33 under guide table 39b.

If supply with the signal that is used to make guide table 39b rotation to rotating motor MR, then rotating motor MR is with the rotating speed forward or reverse of regulation.Consequently, guide table 39b rotates in the XY plane.

In addition, in the present embodiment, shown in the solid line of Fig. 5, with regard to the position of guide table 39b, described center of curvature 39C (the single-point line of Fig. 5) is defined as initial position with Y direction consistent location.In addition, shown in the double dot dash line of Fig. 5, with regard to the position of guide table 39b, be the turned position with respect to the location definition that the Y direction is rotated counterclockwise predetermined angular (angle of rotation θ r) with described center of curvature 39C (the single-point line of Fig. 5).

In Fig. 4, on guide table 39b, dispose the platform 40 that fascinates that extends along the Y direction.The platform 40 that fascinates constitutes tilting equipment.At the platform 40 that fascinates and the face opposed side of guide table 39b (below among Fig. 4), be formed with the sliding surface 40a that is convex surface accordingly with described guide surface 39s.In addition, at the platform 40 that fascinates and face sliding surface 40a opposition side (above among Fig. 4), be formed with the installed surface 40b that is plane.

The platform 40 of fascinating drives with the output shaft that is built in the motor MD (with reference to Figure 10) that fascinates in the balladeur train 37 and links, and accepts the driving force of this motor MD that fascinates, and sliding surface 40a is along described guide surface 39s slide (rotation) thus.That is, the platform 40 that fascinates is a central shaft with the axle that fascinates by being positioned at center of curvature 39C on the opposite electrode 26, fascinates with respect to counter substrate 15, makes sliding surface 40a and described guide surface 39s be present in the same plane.Therefore, installed surface 40b is a central shaft with the axle that fascinates by center of curvature 39C, fascinates with respect to counter substrate 15.

As if the signal that is used to the motor MD supply of fascinating installed surface 40b is fascinated, the motor MD that then fascinates is just changeing the driving that drives or reverse with the rotating speed of stipulating, the installed surface 40b of the platform 40 that fascinates is to fascinate in the center with center of curvature 39C.

In addition, in the present embodiment, shown in the solid line of Fig. 6, with regard to the position of the platform 40 that fascinates, be that the normal direction of emission direction A and counter substrate 15 is that the parallel location definition of Z direction is an initial position with the normal direction of installed surface 40b.In addition, shown in the double dot dash line of Fig. 6, with regard to the position of the platform 40 that fascinates, be obliquity with respect to tilt the clockwise location definition of state of tiltangle d of Z direction with emission direction A.

In Fig. 4, has the droplet jetting head that is rectangular shape (being designated hereinafter simply as ejecting head) 41 that extends along the Y direction at installed surface 40b.Downside (upside in Fig. 4) at ejecting head 41 possesses nozzle plate 42, and this nozzle plate 42 with counter substrate 15 opposed sides (upside among Fig. 4), be formed with the nozzle parallel and form face 42a (ejiction opening formation face) with installed surface 40b.Form on the face 42a at nozzle, along the Y direction uniformly-spaced to arrange a plurality of nozzle N that are formed with as ejiction opening.In the ejecting head 41 of present embodiment, be arranged with a plurality of nozzle N of row.

In Fig. 6, nozzle N forms the normal direction of face 42a (installed surface 40b), promptly extends and perforation nozzle plate 42 along described emission direction A along nozzle.When the platform 40 that fascinates was positioned at initial position, nozzle N was configured to be positioned at respect to the described center of curvature 39C position of close Z direction (direction opposite with emission direction A).In the present embodiment, described center of curvature 39C is gone up and be landing positions PF to the location definition that emission direction A advances from each nozzle N.

If the motor MD that fascinates just changes, the platform 40 of then fascinating moves to obliquity from initial position.Consequently, as shown in Figure 6, all nozzle N are that center of rotation clockwise rotates with center of curvature 39C (corresponding landing positions PF) respectively.Consequently, each nozzle N direction of being extended is with respect to normal (the Z direction of arrow) the inclination tiltangle d of counter substrate 15.

Consequently, the distance between each nozzle N and the landing positions PF corresponding with it is maintained the flying distance L of regulation.That is, droplet ejection apparatus 30 constitutes, even change emission direction A, also can keep from the precision of the landing positions of the drop Fb of each nozzle N ejection.

In Fig. 7, ejecting head 41 is communicated with nozzle N, and has the chamber 43 that is communicated with described ink tank 38.Ejecting head 41 passes through this chamber 43 to the orientation film formation material F of the nozzle N of correspondence supply from ink tank 38.Ejecting head 41 has the vibrating membrane 44 corresponding with each chamber 43, and this vibrating membrane 44 can vibrate on emission direction A and rightabout thereof.Vibration by vibrating membrane 44 enlarges the volumes in the corresponding chamber 43 and dwindles.At the upside of vibrating membrane 44, dispose the piezoelectric element PZ corresponding with each nozzle N.Each piezoelectric element PZ makes corresponding vibrating membrane 44 vibrate on emission direction A and rightabout thereof if receiving piezoelectric element driving signal COM (with reference to Figure 10) then shrinks and stretch thus.

In addition, the piezoelectric element of present embodiment drives signal COM and is set at, based on based on the Wave data WD (with reference to Figure 10) of settings such as test in advance and generate, making the interface of the orientation film formation material F in each nozzle N is that meniscus vibrates sleekly, and the weight of drop Fb is stabilized to predetermined weight.

Drive and control the motor MD that fascinates, make the platform 40 that fascinates move to the obliquity of regulation, the piezoelectric element PZ that stipulates is supplied with piezoelectric element drive signal COM.So the volume in the chamber 43 corresponding with piezoelectric element PZ enlarges and dwindles, the meniscus vibration in each nozzle N.If the meniscus vibration in each nozzle N, then as shown in Figure 8, the orientation film formation material F that drives the corresponding predetermined weight of signal COM with piezoelectric element sprays as drop Fb from nozzle N.Each the drop Fb that is ejected respectively along the direction of nozzle N, be emission direction A, with regulation spouting velocity Vf flight.

At this, as shown in Figure 9, the needs on opposite electrode 26 form the zone of described alignment films 27, set a plurality of grid point (target location P) that are used to make drop Fb land.

If describe in detail, then based on the weight of the target film thickness and the drop Fb of alignment films 27, set the drop Fb that is sprayed quantity, be the quantity of target location P.For the target location P of the described quantity of area configurations on opposite electrode 26, and the interval along directions X between the target location P of setting adjacency promptly carries the interval along the Y direction between the target location P that sprays spacing Wx, reaches adjacency promptly to arrange ejection spacing Wy.At this moment, arranging ejection spacing Wy is configured to shorter than the formation spacing of nozzle N.

For the interval that makes the nozzle N that observes from directions X corresponding to described arrangement ejection spacing Wy, and, make guide table 39b turn to the turned position of regulation by driving control rotating motor MR.

In addition, control the motor MD that fascinates by driving, the obliquity that makes the platform 40 that fascinates fascinate to and stipulate.

Then, by driving control X-axis motor MX, with transporting velocity V to directions X conveying substrate platform 33.At this moment, in the moment that each landing positions PF is positioned at corresponding respectively target location P, each piezoelectric element PZ is supplied with piezoelectric element drive signal COM.

So, fly along emission direction A from the drop Fb of each nozzle N by angle of rotation θ r and tiltangle d regulation, land are in target location P (landing positions PF) in turn.

At this moment, as shown in Figure 9,, along the direction of the face of counter substrate 15, promptly on the direction on XY plane, give the velocity component corresponding (below, be called ejection tangential velocity Vxy) with described spouting velocity Vf to drop Fb with spouting velocity Vf flight.And, because substrate platform 33 moves to directions X with the transporting velocity V of regulation, so become the result identical: to the drop Fb of 15 flights of the counter substrate on this substrate platform 33 with following situation, give the velocity component corresponding (below, be called and carry tangential velocity Va) with transporting velocity V as to the rightabout velocity component of directions X.

Therefore, drop Fb is according to by the vector of ejection tangential velocity Vxy and the direction D1 and the speed of the resultant vector that is synthesized into of carrying the vector of tangential velocity Va, wetting diffusion on opposite electrode 26.

That is, the drop Fb ovalize of land on opposite electrode 26, this ellipse are that the direction D1 that directions X tilts is the major diameter direction with the throughput direction with respect to counter substrate 15.The drop Fb of land on opposite electrode 26 has along the length RL of major diameter direction D1, and the end of this major diameter direction D1 is configured among the drop Fb (drop Fb0 in advance) on opposite electrode 26 of land formerly along between the adjacent drop Fb of Y direction.For example in the enlarged drawing of Fig. 9, if drop Fb shown in dotted line is made as drop Fb0 in advance, then the end of the major diameter direction D1 of the drop Fb (shown in the solid line) of next land is configured in the zone between the drop Fb0 in advance of adjacency.

Consequently, can be enough other drop Fb fill along the zone between the adjacent drop Fb of Y direction.Consequently, can improve the film thickness uniformity of alignment films 27.

The electric structure of the droplet ejection apparatus 30 that constitutes as mentioned above then, is described according to Figure 10.

In Figure 10, the control device 51 that constitutes fascinate information generating unit and rotation information generating unit possesses CPU, the RAM of formation control part, ROM etc.Control device 51 is according to the various data and the various program of storage in RAM or ROM etc., and conveying substrate platform 33 also moves balladeur train 37, and drives each piezoelectric element PZ of control ejecting head 41.

On control device 51, be connected with input unit 52, X-axis motor drive circuit 53, Y-axis motor drive circuit 54, ejecting head drive circuit 55, tilting equipment drive circuit 56 and rotating mechanism drive circuit 57.

Input unit 52 has console switch such as firing switch, shutdown switch, and various operation signals are outputed to control device 51, and information that will be relevant with the target film thickness of alignment films 27 outputs to control device 51 as both thickness information It of definite form.

If from input unit 52 input thickness information It, the gross weight of the orientation film formation material F that on opposite electrode 26, sprays of control device 51 computings then.In addition, control device 51 is based on the weight of the gross weight of the described orientation film formation material F of institute's computing and the drop Fb corresponding with Wave data WD, the quantity of the drop Fb that computing sprayed, promptly stipulate each target location P position coordinates conveying ejection spacing Wx and arrange ejection spacing Wy.At this moment, arranging ejection spacing Wy sets shortlyer than the formation spacing of nozzle N.

Control device 51 is as if the position coordinates of each target location P of computing, and then generation is used to spray data bitmap BMD, the data of fascinating DD and the rotation data RD of drop Fb and stores.The data of fascinating DD and rotation data RD be based on the position coordinates of target location P, in other words be based on drop Fb generates with respect to the interval between the target landing positions of counter substrate 15.

Data bitmap BMD be the value (0 or 1) that makes everybody with opposite electrode 26 on the corresponding data of each target location P, and be to come the unlatching of regulation piezoelectric element PZ or the data of closing corresponding to every value.In other words, data bitmap BMD is specified to, and when each landing positions PF is positioned at corresponding target location P, makes drop Fb ejection.

The data of fascinating DD is the corresponding data of rotating speed that make described tiltangle d and the motor MD that fascinates, and rotation data RD is the data that make angle of rotation θ r corresponding with the revolution of rotating motor MR.If describe in detail, then rotation data RD is based on the data of arranging ejection spacing Wy and generating, make the interval of the nozzle N that observes from directions X, promptly along the interval of the nozzle N of Y direction with to arrange ejection spacing Wy corresponding.

In addition, the data DD that fascinates is based on and carries ejection spacing Wx, arranges ejection spacing Wy and rotation data RD and the data that generate.The data of fascinating DD be make land in the major diameter RL of the drop Fb on the opposite electrode 26 greater than the data of carrying ejection spacing Wx and be to make a end on the major diameter direction of drop Fb in the data between the drop Fb0 in advance along Y direction adjacency.

In addition, the data DD that fascinates is used to make the minor axis of drop Fb of land greater than the data of arranging ejection spacing Wy.

X-axis motor drive circuit 53 makes X-axis motor MX forward or reverse in response to the drive control signal corresponding with X-axis motor drive circuit 53 from control device 51.X-axis motor drive circuit 53 is connected with rotation detector MEX, and input is from the detection signal of rotation detector MEX.X-axis motor drive circuit 53 is based on the detection signal from rotation detector MEX, the moving direction and the amount of movement of computing substrate platform 33 (counter substrate 15), and the generation information relevant with the present position of substrate platform 33 is as substrate position information SPI.The substrate position information SPI that control device 51 receives from X-axis motor drive circuit 53 exports various signals.

Y-axis motor drive circuit 54 makes Y-axis motor MY forward or reverse in response to the drive control signal corresponding with Y-axis motor drive circuit 54 from control device 51.Y-axis motor drive circuit 54 is connected with rotation detector MEY, and input is from the detection signal of rotation detector MEY.Y-axis motor drive circuit 54 is based on the detection signal from rotation detector MEY, the moving direction and the amount of movement of computing balladeur train 37 (droplet jetting head 41), and the generation information relevant with the present position of balladeur train 37 is as sledge position information CPI.The sledge position information CPI that control device 51 receives from Y-axis motor drive circuit 54 exports various driving signals.

If describe in detail, then counter substrate 15 invade balladeur trains 37 under before, control device 51 is based on substrate position information SPI and sledge position information CPI, generate and the corresponding data bitmap BMD of a conveying capacity of counter substrate 15 (go or reverse), and based on this data bitmap BMD generation and the synchronous ejection control signal SI of clock signal that stipulates.In addition, control device 51 when each scanning balladeur train 37, all will spray control signal SI in turn serial transfer to ejecting head drive circuit 55.

In addition, when control device 51 is positioned at corresponding respectively target location P at each each landing positions PF, all based on substrate position information SPI, generation is used to make the piezoelectric element based on Wave data WD to drive the ejection timing signal LP that signal COM outputs to corresponding piezoelectric element PZ.Control device 51 is exported to ejecting head drive circuit 55 in turn with the ejection timing signal LP that is generated.

On ejecting head drive circuit 55, be connected with ejecting head 41, and supply with Wave data WD, ejection control signal SI and ejection timing signal LP from control device 51.The ejection control signal SI that ejecting head drive circuit 55 receives from control device 51 makes this ejection control signal SI correspond respectively to each piezoelectric element PZ and carry out the serial conversion in turn.Ejecting head drive circuit 55 all based on the ejection control signal SI after the serial conversion, will drive signal COM and supply to each piezoelectric element PZ when each ejection timing signal LP that receives from control device 51 based on the piezoelectric element of Wave data WD.That is, when ejecting head drive circuit 55 is positioned at target location P at each each landing positions PF, all supplies with piezoelectric element and drive signal COM to the piezoelectric element PZ of correspondence.

Tilting equipment drive circuit 56 makes the motor MD forward or reverse that fascinates in response to the data DD that fascinates from control device 51.Connect the motor rotation detector MED that fascinates on tilting equipment drive circuit 56, input is from the detection signal of the motor rotation detector MED that fascinates.Tilting equipment drive circuit 56 is based on the detection signal from the motor rotation detector MED that fascinates, the fascinate tiltangle d (actual tilt angles) of platform 40 of computing.In addition, tilting equipment drive circuit 56 generates information with the actual tilt angular dependence (-dance) that calculates as obliquity information D PI, and outputs to control device 51.

Rotating mechanism drive circuit 57 makes rotating motor MR forward or reverse in response to the rotation data RD from control device 51, and this rotating motor MR rotates guide table 39b.Be connected with rotating motor rotation detector MER on rotating mechanism drive circuit 57, input is from the detection signal of rotating motor rotation detector MER.Rotating mechanism drive circuit 57 is based on the detection signal from rotating motor rotation detector MER, the angle of rotation θ r (actual rotation angle) of operation guide platform 39b.In addition, rotating mechanism drive circuit 57 generates information with the actual rotation angular dependence (-dance) that calculates as rotation position information RPI, and outputs to control device 51.

Then, the method for using above-mentioned droplet ejection apparatus 30 to form alignment films 27 is described.

At first, as shown in Figure 3, mounting counter substrate 15 on substrate platform 33.At this moment, substrate platform 33 is configured in the direction side opposite with directions X with respect to balladeur train 37, and balladeur train 37 is configured in the end in the opposite direction with Y side that is positioned at of guide member 35.The guide table 39b and the platform 40 that fascinates are configured in described initial position respectively.

From this state of operation input unit 52, to control device 51 input thickness information It.So control device 51 generates and stores based on the data bitmap BMD of thickness information It, the data of fascinating DD and rotation data RD.

Control device 51 is if generate the data DD that fascinates, and then is configured in obliquity based on the data DD that fascinates via tilting equipment drive circuit 56 platform 40 that will fascinate.In addition, control device 51 is if generate rotation data RD, then via rotating mechanism drive circuit 57 guide table 39b is configured in turned position based on rotation data RD.

Platform 4 θ are configured in described obliquity if fascinate, and then control device 51 is from tilting equipment drive circuit 56 input obliquity information D PI.Control device 51 judges based on obliquity information D PI whether actual tilt angles is the tiltangle d corresponding with the data DD that fascinates.If guide table 39b is configured in described turned position, then control device 51 is from rotating mechanism drive circuit 57 input rotation position information RPI.Control device 51 judges based on rotation position information RPI whether the actual rotation angle is the angle of rotation θ r corresponding with rotation data RD.

If be judged as actual tilt angles is the tiltangle d corresponding with the data DD that fascinates, and the actual rotation angle is the angle of rotation θ r corresponding with rotation data RD, then control device 51 is along directions X conveying counter substrate 15 time, the position of configuration balladeur train 37 (each nozzle N) makes each landing positions PF be disposed at the position on the path of target location P.

If the position of configuration balladeur train 37, then control device 51 drives control X-axis motor MX, and beginning is to directions X conveying substrate platform 33 (counter substrate 15).

At this moment, control device 51 makes the clock signal of Wave data WD and regulation synchronous, and outputs to ejecting head drive circuit 55.In addition, control device 51 is synchronized with the clock signal of regulation by making the data bitmap BMD corresponding with a conveying capacity of substrate platform 33, generates ejection control signal SI, and should spray control signal SI in turn serial transfer to ejecting head drive circuit 55.

Control device 51 is based on substrate position information SPI and sledge position information CPI, when each each landing positions PF is positioned at corresponding target location P, all to ejecting head drive circuit 55 output ejection timing signal LP.If output ejection timing signal LP, then control device 51 is carried out based on the drop ejection action that sprays control signal SI via ejecting head drive circuit 55.That is, when control device 51 is positioned at corresponding target location P at each each landing positions PF, all supplies with the piezoelectric element corresponding and drive signal COM, from the nozzle N ejection drop Fb of correspondence with Wave data WD to the piezoelectric element PZ of correspondence.

Give ejection tangential velocity Vxy corresponding and the conveying tangential velocity Va corresponding to each drop Fb with the transporting velocity V of counter substrate 15 with emission direction A from nozzle N ejection.Then, land are configured in advance zone drop Fb0 between adjacent along the Y direction in the end on the major diameter direction D1 of the drop Fb on the opposite electrode 26.

Consequently, filled by other drop Fb, thereby can form the alignment films 27 of homogeneous film thickness along the zone between the adjacent drop Fb of Y direction.

Present embodiment has following advantage.

(1) make the emission direction A of drop Fb, with respect to the normal slope of counter substrate 15, and the throughput direction of observing with respect to counter substrate 15 from the normal direction of counter substrate 15 tilts.

Therefore, the shape of the drop Fb of land on counter substrate 15 is the elliptical shape with the major diameter that tilts with respect to the throughput direction of counter substrate 15.In other words, the major diameter RL of the drop Fb of land on counter substrate 15 carries the direction of ejection spacing Wx to tilt with respect to regulation.

Consequently, between the drop Fb adjacent, dispose the part of the drop Fb of follow-up land on opposite electrode 26 along the Y direction.Therefore, drop Fb is filled in the zone between the drop Fb adjacent along the Y direction, thereby the film thickness uniformity of alignment films 27 is improved.Therefore, can realize showing the liquid crystal indicator that taste is high.

(2) substrate platform 33 is carried and moved, so that observe from the normal direction of counter substrate 15, the throughput direction of counter substrate 15 has along the durection component of emission direction A.Therefore, drop Fb is along the amount of the conveying tangential velocity Va of the further wetting diffusion counter substrate 15 of throughput direction.Therefore, can between the drop Fb adjacent, dispose drop Fb reliably along the Y direction.

(3) to form face 42a be that rotate at the center with the turning cylinder C along the normal of counter substrate 15 to nozzle.By the rotation of nozzle formation face 42a, counter substrate 15 equally tilts with respect to the throughput direction of all nozzle N.Therefore, the major diameter direction D1 of all drop Fb of land on counter substrate 15 equates.Consequently, because the reduction of the deviation of the land shape of drop Fb, so can further improve the film thickness uniformity of alignment films 27.

(4) nozzle formation face 42a is to fascinate in the center with the axle that fascinates along center of curvature 39C.Form fascinating of face 42a by nozzle, the emission direction A of all drop Fb is configured to equate.Therefore, the size of the major diameter RL of each drop Fb becomes identical.Consequently, because the reduction of the deviation of the land shape of drop Fb, so can further improve the film thickness uniformity of alignment films 27.

(5) generate the data DD that fascinates that is used to nozzle formation face 42a is fascinated by control device 51 and make nozzle form the rotation data RD that face 42a rotates, and based on this rotation data RD and the data DD that fascinates, the guide table 39b and the platform 40 that fascinates are controlled in driving with being used to.Therefore, can control the emission direction A of drop Fb based on the rotation data RD and the data DD that fascinates.In addition, the major diameter direction D1 of each drop after the land is tilted more reliably with respect to the throughput direction of counter substrate 15.

(6) based on conveying ejection spacing Wx and the arrangement ejection spacing Wy of drop Fb, generate the rotation data RD and the data DD that fascinates.Therefore, the emission direction A of drop Fb is based on the interval of drop Fb and be prescribed.Consequently, each drop Fb is given and carries ejection spacing Wx and the corresponding wetting diffusion of arrangement ejection spacing Wy.Therefore, can improve the film thickness uniformity of alignment films 27 more reliably.

In addition, above-mentioned embodiment can also carry out following change.

In the above-described embodiment, observe from the normal direction of counter substrate 15, counter substrate 15 (substrate platform 33) moves to the rightabout of emission direction A.But, be not limited thereto, observe from the normal direction of counter substrate 15, counter substrate 15 (substrate platform 33) is moved to the direction identical with emission direction A.

In the above-described embodiment, tilting equipment is embodied as the platform 40 that fascinates, but is not limited to this.For example, also substrate platform 33 can be embodied as tilting equipment.That is, also can make substrate platform 33 form face 42a with respect to nozzle fascinates.

In the above-described embodiment, on ejecting head 41, be arranged with a row nozzle N, but be not limited thereto, also can arrange multiple row nozzle N.

Substrate platform 33 is moved along directions X, and balladeur train 37 is moved along directions X.

In the above-described embodiment, mark is embodied as the alignment films 27 of liquid crystal indicator 10.But be not limited thereto, mark for example also can be embodied as various films, metal wiring, the colour filter of liquid crystal indicator 10 or the electro-optical device beyond it.As the electro-optical device beyond the liquid crystal indicator 10, possess the field effect type device display unit of (FED or SED etc.) is for example arranged.The field effect type device from the electronics that electron-emitting device discharges, makes this fluorescent material luminous to the fluorescent material irradiation.That is, described mark so long as the mark that forms by the drop after the land get final product.

In the above-described embodiment, on the counter substrate 15 of liquid crystal indicator 10, formed the alignment films 24 that serves as a mark.But, be not limited thereto, also can on silicon substrate or flexible substrate or metal substrate etc., form various marks by the ejection drop.

In the above-described embodiment, electro-optical device is embodied as liquid crystal indicator 10.But be not limited thereto, for example, also electro-optical device can be embodied as el light emitting device.

Claims (13)

1. pattern formation method, it contains the drop that pattern forms material from ejecting head to the substrate ejection, and forms pattern on this substrate, wherein, comprising:

The step that at least one side in described ejecting head and the described substrate is moved with respect to the opposing party, wherein, described ejecting head has a plurality of ejiction openings of arranging along the one side of described substrate;

Make the step of the orientation of described ejiction opening with respect to the described direction inclination that relatively moves;

When carrying out described relatively moving, contain the step that described pattern forms the drop of material from described ejiction opening ejection along emission direction with respect to the normal slope of described substrate.

2. pattern formation method as claimed in claim 1, wherein,

Also comprise: set the described direction that relatively moves, make and observe that the described direction that relatively moves has along the step of the durection component of described emission direction from the normal direction of described substrate.

3. pattern formation method as claimed in claim 1 or 2, wherein,

Also comprise:, and be the step that the center is rotated described ejecting head with the turning cylinder that the normal along described substrate extends for the orientation that makes described ejiction opening is tilted with respect to the described direction that relatively moves.

4. pattern formation method as claimed in claim 1 or 2, wherein,

Also comprise: in order to set described emission direction, and be the step that the center is fascinated described ejecting head with the axle that fascinates that extends along the one side of described substrate.

5. droplet ejection apparatus, it contains the drop that pattern forms material to the substrate ejection, and forms pattern on this substrate, wherein, has:

Ejecting head, it has a plurality of ejiction openings of arranging and spray to described substrate described drop along a direction;

Travel mechanism, it makes at least one side in described ejecting head and the described substrate move with respect to the opposing party;

Tilting equipment, it is that the center is fascinated described ejecting head with the axle that fascinates that extends along the orientation of ejiction opening, makes from the emission direction of the drop of the described ejiction opening normal slope with respect to described substrate;

Rotating mechanism, its turning cylinder that extends with the normal along described substrate are that center of rotation is rotated described ejecting head, make the orientation of described ejiction opening tilt with respect to the described direction that relatively moves.

6. droplet ejection apparatus as claimed in claim 5, wherein,

Described tilting equipment fascinates described ejecting head, makes to observe from the normal direction of described substrate, and described emission direction has along the durection component of the described direction that relatively moves.

7. droplet ejection apparatus as claimed in claim 5, wherein,

Described travel mechanism comprises the substrate platform, and this substrate platform has in mounting under the state of described substrate makes this substrate move along the described direction that relatively moves.

8. droplet ejection apparatus as claimed in claim 5 wherein, also has:

The information of fascinating generating unit, its generation information of fascinating, this information of fascinating is used to make described ejecting head to fascinate, and makes the normal slope of described emission direction with respect to described substrate;

The rotation information generating unit, it generates rotation information, and this rotation information is used to make described ejecting head to rotate, and makes the orientation of the described ejiction opening observed from the normal direction of described substrate tilt with respect to the described direction that relatively moves;

Control part, it controls described rotating mechanism and described tilting equipment based on described rotation information and the described information of fascinating.

9. droplet ejection apparatus as claimed in claim 8, wherein,

Described rotation information generating unit and the described information generating unit of fascinating based on respect to the interval between the target landing positions of the drop on the described substrate, generate described rotation information and the described information of fascinating.

10. electro-optical device, it possesses the substrate with the pattern that is formed by each described droplet ejection apparatus in the claim 5～9.

11. an alignment films formation method, it contains the drop that is orientated film formation material from ejecting head to the substrate ejection, and forms alignment films on this substrate, wherein, comprising:

The step that at least one side in described ejecting head and the described substrate is moved with respect to the opposing party, wherein, described ejecting head has a plurality of ejiction openings of arranging along the one side of described substrate;

Make the step of the orientation of described ejiction opening with respect to the described direction inclination that relatively moves;

When carrying out described relatively moving, along the step that contains the drop of described orientation film formation material with respect to the emission direction of the normal slope of described substrate from described ejiction opening ejection.

12. an orientation membrane formation device, it contains the drop that is orientated film formation material to the substrate ejection, and forms alignment films on this substrate, wherein, has:

Ejecting head, it has a plurality of ejiction openings of arranging and spray to described substrate described drop along a direction;

Travel mechanism, it makes at least one side in described ejecting head and the described substrate move with respect to the opposing party;

Tilting equipment, it is that the center is fascinated described ejecting head with the axle that fascinates that extends along the orientation of ejiction opening, makes from the emission direction of the drop of the described ejiction opening normal slope with respect to described substrate;

Rotating mechanism, its turning cylinder that extends with the normal along described substrate are that center of rotation is rotated described ejecting head, make the orientation of described ejiction opening tilt with respect to the described direction that relatively moves.

13. a liquid crystal indicator, it possesses the substrate with the alignment films that is formed by the described orientation membrane formation device of claim 12.

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