CN101013637A - Conjoined snakelike spring minimized inertial electrical switch - Google Patents
Conjoined snakelike spring minimized inertial electrical switch Download PDFInfo
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- CN101013637A CN101013637A CN 200710037039 CN200710037039A CN101013637A CN 101013637 A CN101013637 A CN 101013637A CN 200710037039 CN200710037039 CN 200710037039 CN 200710037039 A CN200710037039 A CN 200710037039A CN 101013637 A CN101013637 A CN 101013637A
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Abstract
The invention relates to one shape spring micro inertia electrical switch, which comprises mass block electrode, multi-hole beam fix electrode, connection shape spring, insulation underlay, buffer layer, spring socket and beam supportive socket, wherein, the buffer layer is on underlay and down mass block; spring supportive socket and beam supportive socket are fixed on isolation underlay and around mass block electrode; the connection shape spring and mass block are connected and hanging from spring supportive socket; the multi-hole beam is fixed with electrode above mass block with gaps.
Description
Technical field
The present invention relates to a kind of minitype inertial electrical switch, be specifically related to a kind of conjoined snakelike spring minimized inertial electrical switch.Belong to micro-electromechanical system field.
Background technology
Be that the inertia switch of basic engineering and manufacturing has because of it that volume is little, cost low and advantage such as batch process receives much concern with the micro electro mechanical system (MEMS) technology.Minitype inertial switch in the past, no matter be vertical drive or horizontal drive, because of its processing method is based on micro electro mechanical system (MEMS) technology, the preparation of switch is to be that electroplate on the basis with the silicon substrate under a lot of situations, because inevitable internal stress in the electroplating process, this has just determined that the height of entire device can not be too thick, for being arranged, enough big mass responds to extraneous acceleration effect, finally cause the entire area of device bigger, this problem is more obvious in the inertia switch of horizontal drive.
The most forms that adopt cantilever beam or spring quality of connection cube electrode to remove to contact another fixed electrode of the design of minitype inertial electrical switch.But, how to guarantee that cantilever beam or spring are connecting the quick coordination under the acceleration effect outside of this mechanism of mass, and to handle the mass electrode collide well be the direction that people make great efforts to the contact effect of another fixed electrode and the bounce-back of high speed subsequently problem always, and the result is various constantly to be suggested in order to the minitype inertial electrical switch design that improves above-mentioned deficiency.
Find through literature search prior art, Wei Ma etc. are at " Sensors and Actuators A " (" sensor and actuator A ", 2004 111 phase 63-70 pages or leaves) delivered the paper that is entitled as " Fabrication andpackaging of inertia micro-switch using low-temperature photo-resistmolded metal-electroplating technology " (" making and the miniature electrical switch of inertia that encapsulates ") with the low-temperature metal electroplating technology, proposition is based on silicon substrate, the method of plated metal realizes the preparation of minitype inertial switch thereon, this minitype inertial switch is that the mass that connects with cantilever beam is as one of electrode, another electrode is positioned on the substrate of mass below, perhaps with mass on same plane, owing on silicon base, can't electroplate too thick mass, mass need occupy bigger area and produce enough big inertia-activated power with trigger switch, and inertia switch does not have stereochemical structure clearly; In addition, the mass electrode is when being located immediately at suprabasil another electrode collide and contacting, and both rigidity is all very big, to such an extent as to the contact effect is bad and the time is of short duration, the mass of adding the high speed resilience may cause device impaired without any Border Protection.
Summary of the invention
The objective of the invention is to overcome the deficiencies in the prior art; a kind of conjoined snakelike spring minimized inertial electrical switch is provided; make whole minitype inertial electrical switch have tangible Three Dimensions Structure; and make by the unsettled mass electrode of spring and can rapidly move to and contact another fixed electrode in phase; and the two has good contact effect and long time of contact; the quick bounce-back of mass electrode is cushioned layer to be alleviated well, and the certain protection effect is played in the accidental injury of device.
The present invention is achieved by the following technical solutions, the present invention includes: mass electrode, multi-hole beam fixed electrode, conjoined snakelike spring, dielectric substrate, resilient coating, spring supporting seat and beam supporting seat; Resilient coating is positioned at dielectric substrate top, mass electrode below, spring supporting seat and beam supporting seat are fixed on the dielectric substrate, are positioned at around the mass electrode, conjoined snakelike spring links to each other with the mass electrode, and unsettled by the spring supporting seat, the multi-hole beam fixed electrode is unsettled by the beam supporting seat, above the mass electrode, and the mass electrode between the gap of 15-50 micron is arranged.When the enough big negative acceleration in the external world along dielectric substrate surface normal directive effect during in conjoined snakelike spring minimized inertial electrical switch of the present invention, when perhaps enough big positive acceleration acts on above-mentioned electrical switch along dielectric substrate lower surface normal direction, the mass electrode will touch the multi-hole beam fixed electrode, realize the connection to external circuit.
Described dielectric substrate can be insulating material preparations such as quartz, glass.
Described resilient coating metal such as Direct Electroplating nickel or copper on dielectric substrate forms, the short column array that is distributed by a series of vertical and horizontal forms, short column can have different shape and size, the form of array also can have various forms, can make cuboid or cylinder as short column, a part is on dielectric substrate during array, the conjoined snakelike spring below is array vertically, be spaced apart the 100-120 micron, another part is on dielectric substrate, mass below horizontal array becomes 4 row * 5 row, the short column sectional area of resilient coating should not be too little, generally be at least 20 microns * 80 microns, come off when preventing that last device from discharging, highly suitable, be generally the 5-15 micron, can play certain cushioning effect to conjoined snakelike spring and the mass electrode that rebounds at a high speed.
Described conjoined snakelike spring is by a circle of metals such as electronickelling or copper formation or the structure of multiturn, its live width is the 5-50 micron, and thickness is the 4-50 micron, and the internal diameter of semicircle is the 20-100 micron, the vertical length that connects between semicircle is the 50-500 micron, and the length of disjunctor is the 10-200 micron between spring; Conjoined snakelike spring among the present invention is with respect to single spring or cantilever beam were distributed in mass design on every side in the past, its advantage is after being subjected to extraneous acceleration effect, conjoined snakelike spring is unsettled and the motion mass electrode can keep consistency, harmony, and it is reliable to help stabilized contact.
Described spring supporting seat is the square or arc column structure that forms by metals such as electronickelling or copper, and its shape and size change because of the change of shape of dielectric substrate.
Described mass electrode is the square or round structure that forms by metals such as repeatedly lamination electronickelling or copper, its size and dimension changes because of the change of shape of dielectric substrate, when being cuboid, it is of a size of long 300-1000 micron, wide 300-1000 micron, high 50-500 micron, and the mass electrode can dig out a series of hole therebetween with convenient last release in manufacturing process.
Described perforated baffle beam fixed electrode structure, the perforated baffle beam for adopting metals such as electronickelling or copper to make under the room temperature can be one or more, the shape of Liang Hekong and size can have multiple variation.The perforated baffle beam is fixed on the beam supporting seat, and beam supporting seat specific mass cube electrode exceeds the 15-50 micron, and as multi-hole beam fixed electrode and the interelectrode gap of mass, the typical height dimension of beam supporting seat is the 140-180 micron.This perforated baffle beam has reduced the rigidity of structure of unjointed beam as fixed electrode, when being subjected to the collision of mass electrode, can reduce contact stiffness between the two effectively, play certain cushioning effect, help improving the contact effect of two electrodes, and be convenient to the last release of device in the manufacturing process.
Described beam supporting seat can be made into rectangular-shaped, also can make cylindrical shape, and this shape because of dielectric substrate can be changed to different size and dimensions, also is to adopt repeatedly metal such as lamination electronickelling or copper making under the room temperature.
The present invention adopts the method for repeatedly not disturbing lamination to electroplate whole construction of switch mutually on dielectric substrate such as quartz or glass under the room temperature to make based on the MEMS (micro electro mechanical system) process technology.The present invention is under extraneous acceleration effect, rely on inertia force to drive the unsettled mass electrode movement of conjoined snakelike spring, thereby touch baffle plate electrode at regular intervals, under acting force of the spring, fast the mass electrode is retracted again subsequently, finally realize the circuit snap switch with it.
The present invention is directed to the problem of minitype inertial electrical switch existence aspect mass electrode movement harmony, the bounce-back of contact high speed and contact poor effect in the past, a kind of minitype inertial electrical switch that has conjoined snakelike spring, resilient coating and multi-hole beam fixed electrode has been proposed, promoted and had the harmony that the conjoined snakelike spring mass moves under extraneous acceleration effect, good cushioning effect has been played in high speed bounce-back to the mass electrode, has also improved mass electrode and the interelectrode effect that contacts of baffle plate simultaneously well.
Description of drawings
Fig. 1 is the conjoined snakelike spring minimized inertial electrical switch structural representation that embodiment 1 has a pair of multi-hole beam fixed electrode
Fig. 2 is the mass electrode structure schematic diagram of embodiment 1
Fig. 3 is the band square hole baffle plate girder construction schematic diagram of embodiment 1
Fig. 4 is the buffer layer structure schematic diagram of embodiment 1
Fig. 5 is the conjoined snakelike spring minimized inertial electrical switch structural representation that embodiment 2 has a multi-hole beam fixed electrode
Fig. 6 is the conjoined snakelike spring minimized inertial electrical switch structural representation that embodiment 3 has the multiturn conjoined snakelike spring
Fig. 7 is the conjoined snakelike spring minimized inertial electrical switch structural representation that embodiment 4 adopts circular substrate and mass
Embodiment
Below in conjunction with accompanying drawing embodiments of the invention are elaborated: present embodiment is being to implement under the prerequisite with the technical solution of the present invention, provided detailed execution mode and concrete operating process, but protection scope of the present invention is not limited to following embodiment.
As shown in Figure 1, the present embodiment conjoined snakelike spring minimized inertial electrical switch comprises: mass electrode 1, multi-hole beam fixed electrode 2, conjoined snakelike spring 3, resilient coating 4 dielectric substrate 5, spring supporting seat 6 and beam supporting seat 8; Resilient coating 4 is positioned at dielectric substrate 5 tops, mass electrode 1 below, spring supporting seat 6 is fixed on the dielectric substrate 5, be positioned at mass electrode 1 both sides, beam supporting seat 8 also is fixed on the dielectric substrate 5, be positioned at mass electrode 1 all the other both sides, conjoined snakelike spring 3 links to each other with mass electrode 1, and it is unsettled by spring supporting seat 6 together, multi-hole beam fixed electrode 2 is unsettled by beam supporting seat 8, and be positioned at mass electrode 1 top, and the gap that the 15-50 micron is arranged between the mass electrode 1 is connected with disjunctor 7 between spring between the circle structure of conjoined snakelike spring 3.Mass electrode 1 is rectangular-shaped, and size is: long 900 microns, wide 900 microns, high 100 microns, adopt repeatedly metal such as lamination electronickelling or copper to make; The serpentine spring 3 of quality of connection cube electrode 1,10 microns of its live widths, 20 microns of thickness, 20 microns of the interior diameters at semicircle place, 40 microns of overall diameters, disjunctor 7 long 20-50 microns between spring; 300 microns of spring supporting seat 6 length, wide 100 microns, high 30 microns; 1300 microns of multi-hole beam fixed electrode 2 length, wide 160 microns, thick 20 microns, the size in the hole 9 on the multi-hole beam baffle plate is 50 microns * 50 microns, with the multi-hole beam baffle plate with thick, the beam supporting seat 8 that supports it for long 100 microns * wide 360 microns * high 140 microns, beam supporting seat specific mass cube electrode exceeds the 15-50 micron; Resilient coating 4 short-and-medium column length 100-200 microns, wide 30-60 micron, high 4-8 micron, these short columns can be by different modes at array on the dielectric substrate 5: a part is at vertical array on the substrate, below the conjoined snakelike spring, be spaced apart the 100-120 micron, another part laterally is listed as into 4 row * 5 row in square formation on the substrate, under the mass; Dielectric substrate 5 is of a size of long 1700-2000 micron, wide 1600-2000 micron, high 50-100 micron.
Fig. 2 is for present embodiment has the perspective view of the mass electrode 1 of conjoined snakelike spring 3, and the spring supporting seat 6 that is positioned at mass electrode 1 both sides is electroplated on dielectric substrate 5, and conjoined snakelike spring 3 and the mass electrode 1 that is attached thereto is unsettled.
Fig. 3 is the structural representation of present embodiment as the perforated baffle beam of multi-hole beam fixed electrode 2, beam supporting seat 8 is electroplated on dielectric substrate 5, the multi-hole beam baffle plate is fixed on the beam supporting seat 8, and a series of square opening 9 is arranged on the multi-hole beam baffle plate, the consistency of thickness of the thickness in hole 9 and multi-hole beam baffle plate.
Fig. 4 is the structural representation of present embodiment resilient coating 4, and resilient coating 4 is formed by the short column array that a series of vertical and horizontal distribute as seen from the figure, and vertically array is on the dielectric substrate, below the conjoined snakelike spring, and horizontal array is on the dielectric substrate, below the mass.
The two poles of the earth of external circuit are connected to the mass electrode 1 and the multi-hole beam fixed electrode 2 of above-mentioned conjoined snakelike spring minimized inertial electrical switch respectively, after being subjected to the sensitive axes direction (being dielectric substrate 5 normal to a surface directions) that extraneous enough big acceleration acts on this switch here, under the driving of mass inertia force, by unsettled mass electrodes 1 motion of conjoined snakelike spring 3 to and touch multi-hole beam fixed electrode 2, drawn back by conjoined snakelike spring 3 again subsequently, thereby realize quick break-make to external circuit, the loose structure of multi-hole beam fixed electrode 2 has reduced its rigidity, Fast Collision to mass electrode 1 under the inertia force driving has played certain mitigation, has promoted the contact effect.The high speed resilience of mass electrode 1 subsequently, resilient coating 4 have been played very big protective effect to this, have reduced the savings of energy on conjoined snakelike spring 3 to a great extent, help device work next time.
Fig. 5 is the perspective view that adopts the conjoined snakelike spring minimized inertial electrical switch of a perforated baffle beam electrode, as shown in the figure, this minitype inertial electrical switch has adopted a perforated baffle beam as multi-hole beam fixed electrode 2, conjoined snakelike spring minimized inertial electrical switch is consistent among the size of this minitype inertial electrical switch and the embodiment 1, and except the multi-hole beam fixed electrode, the shape of remaining part, size are consistent with embodiment 1.
Fig. 6 is that present embodiment has multiturn conjoined snakelike spring minimized inertial electrical switch structural representation, and as shown in the figure, the conjoined snakelike spring 3 that this minitype inertial electrical switch adopts is multiturns, and all the other features of this minitype inertial electrode switch are similar to Example 1.
Embodiment 4 adopts the conjoined snakelike spring minimized inertial electrical switch of circular substrate and mass
Fig. 7 is the conjoined snakelike spring minimized inertial electrical switch structural representation that adopts circular substrate and mass, and conjoined snakelike spring 3 is the same with the size of conjoined snakelike spring among the embodiment 1, also can be made into the multi-turn structure of conjoined snakelike spring 3 among the embodiment 3; Mass electrode 1 is a column structure, and 900 microns of its bottom surface diameters are high 100 microns; Dielectric substrate 5 is a column structure, and 1650 microns of its bottom surface diameters are high 50 microns, can design by similar thereon Fig. 1, and the short column of array certain size shape, array way is with embodiment 1 unanimity; 1650 microns of the length overalls of multi-hole beam fixed electrode 2, long 900 microns of middle rectangle transition portion, wide 450 microns, thick 20 microns of structure, distribution diameter is of a size of the circular hole of 50-100 micron in the above; Fan-shaped spring supporting seat 6 is high 20 microns, fan-shaped wide 100 microns, 1450 microns of interior diameters, 1650 microns of overall diameters, fan-shaped angle 30 degree; The fanning beam supporting seat 8 of multi-hole beam is high 160 microns, and is fan-shaped wide 100 microns, 1450 microns of interior diameters, 1650 microns of overall diameters, fan-shaped angle 60 degree.
Claims (10)
1, a kind of conjoined snakelike spring minimized inertial electrical switch, comprise: the mass electrode, the multi-hole beam fixed electrode, dielectric substrate, spring supporting seat and beam supporting seat, it is characterized in that, also comprise: conjoined snakelike spring, resilient coating, resilient coating is positioned at the dielectric substrate top, mass electrode below, spring supporting seat and beam supporting seat are fixed on the dielectric substrate, be positioned at around the mass electrode, conjoined snakelike spring links to each other with the mass electrode, and unsettled by the spring supporting seat, the multi-hole beam fixed electrode is unsettled by the beam supporting seat, be positioned at mass electrode top, and it is gapped between the mass electrode.
2, conjoined snakelike spring minimized inertial electrical switch according to claim 1 is characterized in that, described dielectric substrate is meant quartz or glass substrate.
3, conjoined snakelike spring minimized inertial electrical switch according to claim 1, it is characterized in that, described resilient coating is the short column array that the vertical and horizontal on the dielectric substrate distribute, vertically array is on the dielectric substrate, below the conjoined snakelike spring, and horizontal array is on the dielectric substrate, below the mass.
4, conjoined snakelike spring minimized inertial electrical switch according to claim 3 is characterized in that, described short column is cuboid or cylinder, and its sectional area is at least 20 microns * 80 microns, highly is the 5-15 micron.
5, conjoined snakelike spring minimized inertial electrical switch according to claim 1 is characterized in that, described spring supporting seat is square or the arc column structure.
6, conjoined snakelike spring minimized inertial electrical switch according to claim 1, it is characterized in that, described conjoined snakelike spring is the structure of a circle or multiturn, and its live width is that 5-50 micron, thickness are that the internal diameter of 4-50 micron, semicircle is the 20-100 micron, to connect vertical length between semicircle be that the length of disjunctor between 50-500 micron, spring is the 10-200 micron.
7, conjoined snakelike spring minimized inertial electrical switch according to claim 1 is characterized in that, described mass electrode is square or the round structure; When being square structure, long 300-1000 micron, wide 300-1000 micron, high 50-500 micron.
8, conjoined snakelike spring minimized inertial electrical switch according to claim 1 is characterized in that, described multi-hole beam fixed electrode is one or more perforated baffle beam with square hole or circular hole.
9, conjoined snakelike spring minimized inertial electrical switch according to claim 1 is characterized in that, described beam supporting seat is rectangular-shaped or cylindrical shape, and it highly is the 140-180 micron.
10, conjoined snakelike spring minimized inertial electrical switch according to claim 1 is characterized in that, described gap is the 15-50 micron.
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| CNB2007100370390A CN100477053C (en) | 2007-02-01 | 2007-02-01 | Conjoined snakelike spring minimized inertial electrical switch |
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| CNB2007100370390A CN100477053C (en) | 2007-02-01 | 2007-02-01 | Conjoined snakelike spring minimized inertial electrical switch |
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| CN101013637A true CN101013637A (en) | 2007-08-08 |
| CN100477053C CN100477053C (en) | 2009-04-08 |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101699604B (en) * | 2009-11-12 | 2011-09-28 | 上海交通大学 | Normally closed micro-mechanical inertia electrical switch |
| CN102306583A (en) * | 2011-08-31 | 2012-01-04 | 上海交通大学 | Miniature pressure switch with three-dimensional multidirectional sensitivity property |
| US20140069191A1 (en) * | 2012-09-12 | 2014-03-13 | Chinese Academy of Sciences Institute of Geology and Geophysics | Accelerometer and its fabrication technique |
| CN104016295A (en) * | 2013-03-01 | 2014-09-03 | 财团法人工业技术研究院 | Micro-electromechanical device with finger-inserting spring |
| CN105593158A (en) * | 2014-09-05 | 2016-05-18 | 卡文迪什动力有限公司 | Internally generated DFT stepped hysteresis sweep for electrostatic MEMS |
| US20220127910A1 (en) * | 2020-10-28 | 2022-04-28 | Globe (jiangsu) Co., Ltd. | Electric drill |
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2007
- 2007-02-01 CN CNB2007100370390A patent/CN100477053C/en not_active Expired - Fee Related
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101699604B (en) * | 2009-11-12 | 2011-09-28 | 上海交通大学 | Normally closed micro-mechanical inertia electrical switch |
| CN102306583A (en) * | 2011-08-31 | 2012-01-04 | 上海交通大学 | Miniature pressure switch with three-dimensional multidirectional sensitivity property |
| US20140069191A1 (en) * | 2012-09-12 | 2014-03-13 | Chinese Academy of Sciences Institute of Geology and Geophysics | Accelerometer and its fabrication technique |
| US9476903B2 (en) * | 2012-09-21 | 2016-10-25 | Chinese Academy of Sciences Institute of Geology and Geophysics | Accelerometer and its fabrication technique |
| US9828242B2 (en) | 2012-09-21 | 2017-11-28 | Chinese Academy of Sciences Institute of Geology and Geophysics | Accelerometer and its fabrication technique |
| CN104016295A (en) * | 2013-03-01 | 2014-09-03 | 财团法人工业技术研究院 | Micro-electromechanical device with finger-inserting spring |
| US9529012B2 (en) | 2013-03-01 | 2016-12-27 | Industrial Technology Research Institute | Micro-electro mechanical apparatus with interdigitated spring |
| CN104016295B (en) * | 2013-03-01 | 2016-05-18 | 财团法人工业技术研究院 | Micro-electromechanical device with finger-inserting spring |
| US10029914B2 (en) | 2013-09-06 | 2018-07-24 | Cavendish Kinetics, Inc. | Internally generated DFT stepped hysteresis sweep for electrostatic MEMS |
| CN105593158A (en) * | 2014-09-05 | 2016-05-18 | 卡文迪什动力有限公司 | Internally generated DFT stepped hysteresis sweep for electrostatic MEMS |
| CN105593158B (en) * | 2014-09-05 | 2019-02-01 | 卡文迪什动力有限公司 | The DFT staged sluggishness for electrostatic MEMS that inside generates scans |
| US20220127910A1 (en) * | 2020-10-28 | 2022-04-28 | Globe (jiangsu) Co., Ltd. | Electric drill |
| US11905761B2 (en) * | 2020-10-28 | 2024-02-20 | Globe (jiangsu) Co., Ltd. | Electric drill |
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