CN100999776A - Vacuum dual-chamber high temp, quenching furnace - Google Patents
Vacuum dual-chamber high temp, quenching furnace Download PDFInfo
- Publication number
- CN100999776A CN100999776A CN 200610045628 CN200610045628A CN100999776A CN 100999776 A CN100999776 A CN 100999776A CN 200610045628 CN200610045628 CN 200610045628 CN 200610045628 A CN200610045628 A CN 200610045628A CN 100999776 A CN100999776 A CN 100999776A
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- chamber
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- water
- vacuum
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- 238000010791 quenching Methods 0.000 title claims abstract description 64
- 230000000171 quenching effect Effects 0.000 title claims abstract description 30
- 238000010438 heat treatment Methods 0.000 claims abstract description 78
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 39
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 37
- 239000010439 graphite Substances 0.000 claims abstract description 37
- 239000002826 coolant Substances 0.000 claims abstract description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 10
- 238000001816 cooling Methods 0.000 claims abstract description 6
- 239000011819 refractory material Substances 0.000 claims abstract description 5
- 239000011149 active material Substances 0.000 claims description 14
- 239000003507 refrigerant Substances 0.000 claims description 11
- 238000005507 spraying Methods 0.000 claims description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 5
- 229910052802 copper Inorganic materials 0.000 claims description 5
- 239000010949 copper Substances 0.000 claims description 5
- 238000009413 insulation Methods 0.000 claims description 4
- 241000233855 Orchidaceae Species 0.000 claims description 3
- 238000011109 contamination Methods 0.000 abstract description 2
- 229910002976 CaZrO3 Inorganic materials 0.000 abstract 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 1
- 229910052593 corundum Inorganic materials 0.000 abstract 1
- 238000005086 pumping Methods 0.000 abstract 1
- 238000007711 solidification Methods 0.000 abstract 1
- 230000008023 solidification Effects 0.000 abstract 1
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract 1
- 238000002360 preparation method Methods 0.000 description 11
- 230000001681 protective effect Effects 0.000 description 7
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 5
- 229910052721 tungsten Inorganic materials 0.000 description 5
- 239000010937 tungsten Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 238000007669 thermal treatment Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 230000003245 working effect Effects 0.000 description 2
- 235000003140 Panax quinquefolius Nutrition 0.000 description 1
- 240000005373 Panax quinquefolius Species 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- 238000003913 materials processing Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- PXXKQOPKNFECSZ-UHFFFAOYSA-N platinum rhodium Chemical compound [Rh].[Pt] PXXKQOPKNFECSZ-UHFFFAOYSA-N 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000003303 reheating Methods 0.000 description 1
- 229910052702 rhenium Inorganic materials 0.000 description 1
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
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Abstract
The present invention belongs to the field of solidification and heat treatment apparatus, and is especially one kind of vacuum double chamber quenching furnace. The main structure of the vacuum double chamber quenching furnace includes a double-layer water cooled heating chamber, a quenching cooling chamber, a vacuum pumping system, a coolant chamber, a coolant collecting chamber, and a movable sample setting mechanism. There are one graphite heater coated with Al2O3 or CaZrO3 inside the double-layer water cooled heating chamber, refractory material outside the graphite heater, one temperature thermocouple in the center of the graphite heater, etc. The vacuum double chamber quenching furnace is used mainly for preparing quenched sample and has the features of high sample heating temperature, no contamination on the sample, etc.
Description
Technical field
The invention belongs to and solidify and the development of Equipment for Heating Processing specifically a kind of vacuum dual-chamber high temp, quenching furnace.
Background technology
For active material, preparation when solidifying sample and thermal treatment under normal conditions all very easily is subjected to the influence of external environment and brings impurity into, reduces the purity of alloy material, and then is difficult to obtain real solidified structure and heat-treated sturcture.Therefore, how to prepare the sample that solidifies of active material, active material is carried out accurately and effectively thermal treatment, become materials processing worker's extensive concern target.At present people have developed the equipment of vacuum heat treatment common material, also do not develop be fit to the preparation active material solidify sample and heat treated equipment.In order better to study the process of setting and the heat treating regime of active material, when solidifying sample and thermal treatment, can not be polluted the preparation active material, and be necessary very much to develop the strong preparation active material of suitability and solidify sample and heat treated equipment.
Summary of the invention
The object of the present invention is to provide a kind of vacuum dual-chamber high temp, quenching furnace, it has the dual-use function that quenches under vacuum hardening and the protective atmosphere, and can prepare the sample that solidifies of active material fully.
Technical scheme of the present invention is:
A kind of vacuum dual-chamber high temp, quenching furnace has double-deck water-cooled heating chamber, quench cooled chamber, pumped vacuum systems, refrigerant placement chamber, coolant collecting chamber and removable sample placement mechanism.In the double-deck water-cooled heating chamber graphite heating body is housed, the thick Al of its surface spraying 0.2～0.3mm
2O
3Or CaZrO
3Layer is connected with the external control power supply by the water-cooled copper electrode, the external refractory materials of graphite heating for insulation usefulness, and temperature thermocouple places the graphite heating body centre, guarantees thermometric accuracy, and it is connected with double-deck water-cooled heating chamber by the galvanic couple guide pipe.
Double-deck water-cooled heating chamber of the present invention is connected with the quench cooled chamber by the fast connection orchid of water-cooled joint flange, manual push-pull valve and water-cooled.Top, quench cooled chamber is placed the chamber by the 3rd butterfly valve and refrigerant and is connected, the bottom also is connected with the coolant collecting chamber by the 4th butterfly valve, be connected with water-cooled end cap flange seal by the guiding trestle guide pipe with removable sample placement mechanism, quench cooled chamber overall fixed is on moveable carriage.
Removable sample placement mechanism of the present invention is by water cooled seal carriage release lever, surperficial through spraying the thick Al of 0.2～0.3mm
2O
3Or CaZrO
3The graphite brace table of layer and sample are placed boat and are formed jointly.
Pumped vacuum systems of the present invention is connected with the quench cooled chamber with double-deck water-cooled heating chamber respectively by vacuum-lines and first butterfly valve, second butterfly valve.
25～1650 ℃ of temperature ranges, the temperature-controlled precision of graphite heating body of the present invention heating be less than or equal to ± and 1 ℃.
Double-deck water-cooled heating chamber of the present invention flat-temperature zone scope is diameter 100mm, length 150mm.
Have first inflation inlet and second inflation inlet on the vacuum-lines of the present invention, be communicated with double-deck water-cooled heating chamber and quench cooled chamber respectively by first Vacuum ball valve and second Vacuum ball valve.
The double-deck water-cooled heating chamber of the present invention can or feed heating and fusing sample under the protective atmosphere under vacuum state, 1650 ℃ of the highest use temperatures, and what wherein heating member adopted is graphite heater, and graphite is except that electrode contact, and the surface all sprays the thick Al of 0.2～0.3mm
2O
3Or CaZrO
3, this is very useful to preventing the loss of handling the Prevent Carbon Contamination of sample and reducing graphite heater; Graphite heater is connected with the external control power supply by the water-cooled copper electrode, can lower the temperature to sample intensification one insulation one by rate of heating of setting and speed of cooling, wherein temperature is by placing this indoor platinum one platinum rhodium or tungsten one rhenium thermopair to demarcate, heating chamber and all adopt double-deck water-cooling structure with the heating chamber flange connecting.
Quench cooled of the present invention chamber is connected with double-deck water-cooled heating chamber by the fast connection of a manual push-pull valve and water-cooled is blue, and two Room are in isolation when manual push-pull valve cuts out, can semicontinuous preparation sample; Its top is placed the chamber by butterfly valve and refrigerant and is connected, and the bottom is connected with refrigerant and fast quenching sample collection room by butterfly valve.Simultaneously the quench cooled chamber is whole is connected with a moveable carriage, the quench cooled chamber can be removed separately to clear up and do not influence room temp, environment and the action of double-deck water-cooled heating chamber after quenching.
The present invention vacuumizes and inflation system, and this system can vacuumize double-deck water-cooled heating chamber and quench cooled chamber at the same time or separately by the design of pipeline, or feeds protective atmosphere (as nitrogen, argon gas etc.).
The present invention is the sample placement mechanism movably: the support guide pipe of this mechanism is connected with the water-cooled end cap flange of quench cooled chamber afterbody, realization is to the vacuum-sealing of the water cooled seal carriage release lever of conveying sample, steadily carry sample to enter double-deck water-cooled heating chamber, and shift out sample to the quench cooled chamber; Carry sample the water cooled seal carriage release lever front end with make through spraying the thick Al of 0.2～0.3mm by graphite
2O
3Or CaZrO
3The graphite brace table connect, sample is placed boat and is placed on the graphite brace table, the water cooled seal carriage release lever of the conveying sample that is connected with the graphite brace table by rotation can be placed sample boat and quench fast in the coolant collecting chamber of Sheng oil; Or under the situation of the water cooled seal carriage release lever that does not rotate the conveying sample that is connected with the graphite brace table, open refrigerant that the 4th battlements valve places the chamber with refrigerant and directly spread and carry out rapid quenching on the sample.
The invention has the beneficial effects as follows:
1, double-deck water-cooled heating chamber is connected by the fast connection of manual push-pull valve and water-cooled is blue with the quench cooled chamber among the present invention, can not influence the use of graphite heating body in sample quenching and heat treatment process, the more effective work-ing life of protecting heating member; And connect by the fast connection of water-cooled is blue, be convenient to the quench cooled chamber and separate the easier cleaning of carrying out the quench cooled chamber after having prepared sample with double-deck water-cooled heating chamber.
2, pumped vacuum systems can realize simultaneously heating chamber and quench cooled chamber or separately one of them chamber vacuumized and feeds the operation of protective atmosphere among the present invention, uses convenient.
3, the present invention adopts graphite heating body, and it is low to more conventional heating member tungsten filament of vacuum requirements or tungsten sheet, and low price.
4, among the present invention graphite heating body by control power supply control, adopt the mode of low voltage, big electric current to heat, 25～1650 ℃ of Heating temperature scopes, temperature-controlled precision is less than or equal to ± and 1 ℃, compare with traditional heating member, low to the vacuum tightness requirement of environment, and low price, the flat-temperature zone is that diameter can be below 100mm, and length can be below 150mm.
5, present invention can be implemented under the cooling rate of 0～50 ℃/min, prepare the sample that solidifies of active material.
6, vacuum a pair of of the present invention chamber one high temp, quenching furnace mainly is applicable to the process of setting fast quenching sample of preparation active material and conventional material, be used to observe solidified structure, also can be used as conventional heat treatment furnace, the preparation sample, observe heat treatment on microstructure, be characterized in: the Heating temperature of sample is higher, avoids contaminated in the specimen preparation process, and experiment fast, succinctly.
Description of drawings
Fig. 1 is a vacuum dual-chamber high temp, quenching furnace structural representation of the present invention.
Among the figure: 1, control power supply; 2, water-cooled copper electrode; 3, double-deck water-cooled heating chamber; 4, graphite heating body; 5, refractory materials; 6, first butterfly valve; 7, vacuum-lines; 8, pumped vacuum systems; 9, second butterfly valve; 10, water-cooled joint flange; 11, manual push-pull valve; 12, refrigerant is placed the chamber; 13, the 3rd butterfly valve; 14, quench cooled chamber; 15, support guide pipe; 16, water cooled seal carriage release lever; 17, water-cooled end cap flange; 18, graphite brace table; 19, the 4th butterfly valve; 20, coolant collecting chamber; 21, moveable carriage; 22, sample is placed boat; 23, the fast connection orchid of water-cooled; 24, vehicle guide; 25, stove inner support; 26, stove integral support; 27, thermopair; 28, galvanic couple guide pipe; 29, electric connection board; 30 first inflation inlets; 31, second inflation inlet; 32, first Vacuum ball valve; 33, second Vacuum ball valve; 34, furnace shell.
Embodiment
As shown in Figure 1, the present invention develops a kind of vacuum dual-chamber high temp, quenching furnace, has double-deck water-cooled heating chamber 3 (its furnace shell 34 adopts double-deck water-cooled), quench cooled chamber 14, pumped vacuum systems 8, refrigerant placement chamber 12, coolant collecting chamber 20 and removable sample placement mechanism.In the double-deck water-cooled heating chamber 3 graphite heating body 4 is housed, the thick Al of its surface spraying 0.2～0.3mm
2O
3Or CaZrO
3Be connected with external control power supply 1 by water-cooled copper electrode 2, electric connection board 29, graphite heating body 4 outer refractory materialss 5 (as: carbon felt, magnesia ceramics pipe etc.) for insulation usefulness, support with stove inner support 25 between refractory materials 5 and the furnace shell 34, whole body of heater places on the stove integral support 26, temperature thermocouple 27 places graphite heating body 4 centres, guarantees thermometric accuracy, and it is connected with double-deck water-cooled heating chamber 3 by galvanic couple guide pipe 28.Double-deck water-cooled heating chamber 3 is by water-cooled joint flange 10, manually push-pull valve 11 and the fast connection of water-cooled blue 23 are connected with quench cooled chamber 14.14 tops, quench cooled chamber are placed chamber 12 by the 3rd butterfly valve 13 and refrigerant and are connected, the bottom is connected with coolant collecting chamber 20 by the 4th butterfly valve 19, be tightly connected by guiding trestle guide pipe 15 and water-cooled end cap flange 17 with removable sample placement mechanism, its overall fixed is on moveable carriage 21, and moveable carriage 21 places on the vehicle guide 24.Removable sample placement mechanism is placed boat 22 by water cooled seal carriage release lever 16, graphite brace table 18 and sample and is formed jointly.Pumped vacuum systems 8 is connected with quench cooled chamber 14 with double-deck water-cooled heating chamber 3 respectively with second butterfly valve 9 by the vacuum-lines 7 and first butterfly valve 6.On vacuum-lines 7, have first inflation inlet 30 and second inflation inlet 31; be communicated with double-deck water-cooled heating chamber 3 and quench cooled chamber 14 respectively by first Vacuum ball valve 32 and second Vacuum ball valve 33; thereby this vacuum dual-chamber high temp, quenching furnace can be as required in vacuum or feed the sample that solidifies of semicontinuous preparation active material under certain protective atmosphere, also can or feed under certain protective atmosphere active material is carried out quenching heat treatment in vacuum.
The present invention's vacuum dual-chamber high temp, quenching furnace as shown in Figure 1 possesses following function:
1. semi-continuous preparation material solidify sample
Double-deck water-cooled heating chamber is connected by the fast connection of manual push-pull valve and water-cooled is blue with the quench cooled chamber among the present invention, can not influence the use of graphite heating body in sample quenching and heat treatment process, the more effective work-ing life of protecting heating member; And connect by the fast connection of water-cooled is blue, be convenient to the quench cooled chamber and separate with double-deck water-cooled heating chamber, the easier cleaning of carrying out the quench cooled chamber after having prepared sample, sample is solidified in conveniently semicontinuous preparation.
2. reliable pumped vacuum systems
Pumped vacuum systems can realize simultaneously double-deck water-cooled heating chamber and quench cooled chamber or separately one of them chamber vacuumized and feeds the operation of protective atmosphere among the present invention, uses conveniently, and vacuum tightness generally is controlled at 1 * 10
-1Get final product about Pa, and normal reheating furnace generally adopts heating such as tungsten sheet or tungsten filament, its vacuum tightness requires 1 * 10
-2More than the pa.
3. Heating temperature height, temperature-controlled precision standard
Graphite heating body is by the control of control power supply among the present invention, adopt the mode of low voltage, big electric current to heat, 25～1650 ℃ of Heating temperature scopes, temperature-controlled precision be less than or equal to ± and 1 ℃, compare with traditional heating member, vacuum tightness to environment requires low, low price, flat-temperature zone are that diameter can be below 100mm, and length can be below 150mm, can be implemented under the cooling rate of 1～50 ℃/min, prepare the sample that solidifies of active material.
Claims (9)
1, a kind of vacuum dual-chamber high temp, quenching furnace, it is characterized in that: have double-deck water-cooled heating chamber (3), quench cooled chamber (14), pumped vacuum systems (8), refrigerant placement chamber (12), coolant collecting chamber (20) and removable sample placement mechanism, in the double-deck water-cooled heating chamber (3) graphite heating body (4) is housed, its surface spraying Al
2O
3Or CaZrO
3Layer, be connected with external control power supply (1) by water-cooled copper electrode (2), the outer refractory materials (5) of graphite heating body (4) for insulation usefulness, temperature thermocouple (27) places graphite heating body (4) centre, and it is connected with double-deck water-cooled heating chamber (3) by galvanic couple guide pipe (28).
2, according to the described vacuum dual-chamber high temp, quenching furnace of claim 1, it is characterized in that: double-deck water-cooled heating chamber (3) is by water-cooled joint flange (10), manually push-pull valve (11) is connected with quench cooled chamber (14) with the fast connection orchid of water-cooled (23), top, quench cooled chamber (14) is placed chamber (12) by the 3rd butterfly valve (13) and refrigerant and is connected, the bottom is connected with coolant collecting chamber (20) by the 4th butterfly valve (19), be tightly connected by guiding trestle guide pipe (15) and water-cooled end cap flange (17) with removable sample placement mechanism, quench cooled chamber (14) overall fixed is on moveable carriage (21).
3, according to the described vacuum dual-chamber high temp, quenching furnace of claim 1, it is characterized in that: removable sample placement mechanism is placed boat (22) by water cooled seal carriage release lever (16), graphite brace table (18) and sample and is connected to form jointly, graphite brace table (18) surface spraying Al
2O
3Or CaZrO
3Layer, sample is placed boat (22) and is placed on the graphite brace table (18).
4, according to the described vacuum dual-chamber high temp, quenching furnace of claim 1, it is characterized in that: pumped vacuum systems (8) is connected with quench cooled chamber (14) with double-deck water-cooled heating chamber (3) respectively with second butterfly valve (9) by vacuum-lines (7) and first butterfly valve (6).
5, according to the described vacuum dual-chamber high temp, quenching furnace of claim 4, it is characterized in that: on vacuum-lines (7), have first inflation inlet (30) and second inflation inlet (31), be communicated with double-deck water-cooled heating chamber (3) and quench cooled chamber (14) respectively by first Vacuum ball valve (32) and second Vacuum ball valve (33).
6, according to the described vacuum dual-chamber high temp, quenching furnace of claim 1, it is characterized in that: 25～1650 ℃ of temperature ranges, the temperature-controlled precision of graphite heating body (4) heating be less than or equal to ± and 1 ℃.
7, according to the described vacuum dual-chamber high temp, quenching furnace of claim 1, it is characterized in that: the flat-temperature zone of double-deck water-cooled heating chamber (3) is diameter 100mm, long 150mm.
8, according to the described vacuum dual-chamber high temp, quenching furnace of claim 1, it is characterized in that: the quench cooled chamber is implemented under the cooling rate of 0～50 ℃/min, prepares the sample that solidifies of active material.
9, according to claim 1 or 3 described vacuum dual-chamber high temp, quenching furnaces, it is characterized in that: graphite heating body (4) and graphite brace table (18) spraying Al
2O
3Or CaZrO
3Bed thickness 0.2～0.3mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100456289A CN100460529C (en) | 2006-01-10 | 2006-01-10 | Vacuum dual-chamber high temp, quenching furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100456289A CN100460529C (en) | 2006-01-10 | 2006-01-10 | Vacuum dual-chamber high temp, quenching furnace |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN100999776A true CN100999776A (en) | 2007-07-18 |
| CN100460529C CN100460529C (en) | 2009-02-11 |
Family
ID=38258601
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2006100456289A Expired - Fee Related CN100460529C (en) | 2006-01-10 | 2006-01-10 | Vacuum dual-chamber high temp, quenching furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100460529C (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103898427A (en) * | 2014-04-18 | 2014-07-02 | 深圳市意大隆珠宝首饰有限公司 | Platinum hardening process |
| CN106587585A (en) * | 2016-12-20 | 2017-04-26 | 沈阳市超高真空应用技术研究所 | Double-cavity controllable pressure high temperature and cold and heat forming system and technology |
| CN107058700A (en) * | 2017-02-16 | 2017-08-18 | 北京科技大学 | A kind of Metal Materials At High Temperature vacuum annealing furnace |
| CN108342706A (en) * | 2018-04-02 | 2018-07-31 | 杭州赛威斯真空技术有限公司 | A kind of bunch type magnetron sputtering production line |
| CN114197056A (en) * | 2022-01-14 | 2022-03-18 | 浙江大学杭州国际科创中心 | Semiconductor material annealing device and annealing method |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2291418Y (en) * | 1996-07-04 | 1998-09-16 | 董玉顺 | High-pressure, high flow-rate vacuum air-cooled glowing furnace |
-
2006
- 2006-01-10 CN CNB2006100456289A patent/CN100460529C/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103898427A (en) * | 2014-04-18 | 2014-07-02 | 深圳市意大隆珠宝首饰有限公司 | Platinum hardening process |
| CN103898427B (en) * | 2014-04-18 | 2016-05-18 | 深圳市意大隆珠宝首饰有限公司 | A kind of platinum hardening process |
| CN106587585A (en) * | 2016-12-20 | 2017-04-26 | 沈阳市超高真空应用技术研究所 | Double-cavity controllable pressure high temperature and cold and heat forming system and technology |
| CN106587585B (en) * | 2016-12-20 | 2019-04-23 | 沈阳市超高真空应用技术研究所 | A kind of dual cavity controllable pressure high-temperature quenching thermoforming system and technique |
| CN107058700A (en) * | 2017-02-16 | 2017-08-18 | 北京科技大学 | A kind of Metal Materials At High Temperature vacuum annealing furnace |
| CN108342706A (en) * | 2018-04-02 | 2018-07-31 | 杭州赛威斯真空技术有限公司 | A kind of bunch type magnetron sputtering production line |
| CN114197056A (en) * | 2022-01-14 | 2022-03-18 | 浙江大学杭州国际科创中心 | Semiconductor material annealing device and annealing method |
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| Publication number | Publication date |
|---|---|
| CN100460529C (en) | 2009-02-11 |
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