CN107058700A - A kind of Metal Materials At High Temperature vacuum annealing furnace - Google Patents
A kind of Metal Materials At High Temperature vacuum annealing furnace Download PDFInfo
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- CN107058700A CN107058700A CN201710084464.9A CN201710084464A CN107058700A CN 107058700 A CN107058700 A CN 107058700A CN 201710084464 A CN201710084464 A CN 201710084464A CN 107058700 A CN107058700 A CN 107058700A
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- Prior art keywords
- vacuum
- vacuum chamber
- metal materials
- high temperature
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- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
- C21D1/74—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material
- C21D1/773—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material under reduced pressure or vacuum
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
- C21D1/26—Methods of annealing
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
- C21D9/0062—Heat-treating apparatus with a cooling or quenching zone
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Furnace Details (AREA)
Abstract
The present invention relates to a kind of Metal Materials At High Temperature vacuum annealing furnace, applied to Metal Materials At High Temperature it is long when institutional framework develop and feature evaluation, the Metal Materials At High Temperature vacuum annealing furnace includes：Main vacuum chamber component, vacuum pre-vacuum chamber component, vacuumizing assembly and the first push-pull valve, first push-pull valve is set between the main vacuum chamber component and the vacuum pre-vacuum chamber component, and the vacuumizing assembly is connected with the main vacuum chamber component and the vacuum pre-vacuum chamber component respectively.Its feature is annealing furnace using molybdenum plate mode of heating and is designed with two vacuum chambers of main vacuum chamber and vacuum pre-vacuum chamber, achievable metal material is not higher than the sub-sampling in batches under 1400 DEG C of different annealing times, simultaneously, cryogenic gas nozzle is designed with above vacuum pre-vacuum chamber specimen holder, can be to injection cryogenic gas at specimen holder, to realize the quick cooling of annealing specimen.The device is simple and easy to do, is easily realized in Metal Materials At High Temperature annealing furnace, it is possible to achieve industrialized production.
Description
Technical field
The present invention relates to a kind of Metal Materials At High Temperature vacuum annealing furnace, category Metal Materials At High Temperature vacuum annealing institutional framework is drilled
Become research and signature analysis field.
Background technology
The performance damage that materials microstructure is degenerated and caused is the crucial high-temperature component in the fields such as Aero-Space, thermoelectricity, nuclear power
Main failure forms during being on active service when long, therefore when carrying out long under the field high-temperature component metal material service temperature
Microstructural evolution is studied to important in inhibiting such as material development, component capabilities evaluation and life appraisals.
The metal materials such as the field such as Aero-Space, thermoelectricity, nuclear power thermal structure high temperature alloy are in high temperature air environment
It can aoxidize, high-temperature oxydation can influence the institutional framework state of material internal, shorten the service life of component, it is therefore, such
Structure is typically all band coating work.During investigation of materials, to reflect that the real structure under such material military service environment is believed
Breath, institutional framework develops research and needs to carry out under vacuum conditions when high temperature is long；In addition, being organized during long at a temperature of material military service
Need to carry out a large amount of high annealings experiment under the conditions of different temperatures different time in development law research process, and require annealing
After the completion of cooling procedure in as far as possible keep material at high temperature annealed condition under original structure architectural feature.Therefore, high annealing
Stove must is fulfilled for following condition：（1）Annealing furnace furnace chamber is vacuum state；（2）The sample of same temperature different time batch is together
Carry out, it is necessary to consider the midway problem of sampling in annealing process；（3）Need to use quick cooling treatment after the completion of sample annealing,
To retain the characteristics of organizational structure of annealed state.
The content of the invention
To solve the above problems, the present invention proposes a kind of Metal Materials At High Temperature vacuum annealing furnace, can be achieved vacuum annealing, in
Way sampling, quick cooling.
To achieve the above object, the present invention uses following technical scheme：
A kind of Metal Materials At High Temperature vacuum annealing furnace, the Metal Materials At High Temperature vacuum annealing furnace includes：It is main vacuum chamber component, true
Empty pre-vacuum chamber component, vacuumizing assembly and the first push-pull valve, between the main vacuum chamber component and the vacuum pre-vacuum chamber component
First push-pull valve is set, and the vacuumizing assembly connects with the main vacuum chamber component and the vacuum pre-vacuum chamber component respectively
Connect.
Further, the main vacuum chamber component includes：Furnace shell, main vacuum chamber's hatch door, quartz observing window, heat screen,
Combustion chamber and annealing specimen platform, the furnace shell are cylindrical structural, and furnace shell one end sets main vacuum chamber's hatch door, the main vacuum
Room hatch door is used to seal furnace shell, and the furnace shell other end is connected with described first push-pull valve one end, in the furnace shell
Core is combustion chamber, and combustion chamber is wrapped multiple heat screen on the outside of the cylindrical empty core structure that molybdenum plate bar calandria is surrounded, combustion chamber,
Annealing specimen platform is set in the combustion chamber.
Further, the vacuum pre-vacuum chamber component includes：Pre-vacuum chamber, pre-vacuum chamber hatch door, cryogenic gas nozzle, pre-vacuum chamber
Specimen holder and manipulator, the pre-vacuum chamber hatch door are arranged on the side wall of the pre-vacuum chamber, described pre-vacuum chamber one end and described the
The one push-pull valve other end is connected, and the pre-vacuum chamber other end, which is used, is provided with through hole, the manipulator one in the middle part of flange seal, flange
End coordinates with through hole to be ensured to seal and be placed in inside pre-vacuum chamber through through hole, and pre-vacuum chamber specimen holder, institute are set in the pre-vacuum chamber
State cryogenic gas nozzle one end to be arranged in pre-vacuum chamber, the other end is arranged on the outside of pre-vacuum chamber, is tightly connected with low temperature source of the gas.
Further, the vacuumizing assembly includes：First vacuum gauge, the second push-pull valve, molecular pump, the first magnetic valve,
Second vacuum gauge, mechanical pump, bellows and the second magnetic valve, described second push-pull valve one end are connected by pipeline and the furnace shell
Connect, the first vacuum gauge, the second push-pull valve other end are set on the pipeline that second push-pull valve is connected with the furnace shell
It is connected with molecular pump one end, the molecular pump other end is connected with described first magnetic valve one end；Described second magnetic valve one end
Be connected with the pre-vacuum chamber, the second magnetic valve other end by bellows and a triple valve connect respectively the mechanical pump and
The second vacuum gauge is set on the first magnetic valve other end, the triple valve.
Further, first vacuum gauge is advised for high vacuum.
Further, second vacuum gauge is forevacuum ga(u)ge.
The beneficial effects of the present invention are, annealing furnace is using molybdenum plate mode of heating and is designed with main vacuum chamber and vacuum is taken out in advance
Room, achievable metal material is not higher than the sampling requirement in batches of 1400 DEG C of different annealing times, in addition, vacuum pre-vacuum chamber sample
Seat top be designed with after cryogenic gas nozzle, annealing of metal materials be moved to after pre-vacuum chamber can from gas nozzle to sample on spray
Cryogenic gas, accelerates the cooling of annealing specimen, the original annealed structure architectural feature of metal material of guaranteeing the quality.
Brief description of the drawings
Fig. 1 Metal Materials At High Temperature vacuum annealing furnace structural representations.
Embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, it is right below in conjunction with drawings and Examples
The present invention is explained in further detail.It should be appreciated that specific embodiment described herein is used only for explaining the present invention, and
It is not used in the restriction present invention.
On the contrary, the present invention covers any replacement done in the spirit and scope of the present invention being defined by the claims, repaiied
Change, equivalent method and scheme.Further, in order that the public has a better understanding to the present invention, below to the thin of the present invention
It is detailed to describe some specific detail sections in section description.Part without these details for a person skilled in the art
Description can also understand the present invention completely.
As shown in figure 1, a kind of Metal Materials At High Temperature vacuum annealing furnace, the Metal Materials At High Temperature vacuum annealing furnace includes：
Main vacuum chamber component 1, vacuum pre-vacuum chamber component 2, the push-pull valve 4 of vacuumizing assembly 3 and first, the main vacuum chamber component 1 and institute
State and first push-pull valve 4 be set between vacuum pre-vacuum chamber component 2, the vacuumizing assembly 3 respectively with the main vacuum chamber group
Part 1 and the vacuum pre-vacuum chamber group 2 are connected.
The main vacuum chamber component 1 includes：Furnace shell 11, main vacuum chamber's hatch door 12, quartz observing window 13, heat screen 14,
Combustion chamber 15 and annealing specimen platform 16, the furnace shell 11 are cylindrical structural, and one end sets main vacuum chamber's hatch door 12, and the master is true
Empty room hatch door 12 is used to seal furnace shell 11, and the other end of furnace shell 11 is connected with described one end of first push-pull valve 4, the stove
Core in housing 11 is combustion chamber 15, and combustion chamber 15 is outside the cylindrical empty core structure that molybdenum plate bar calandria is surrounded, combustion chamber 15
Annealing specimen platform 16 is set in side wrapped multiple heat screen 14, the combustion chamber 15, and the furnace shell 11 is provided with interlayer, and provided with cold
But water inlet and coolant outlet, annealing furnace use molybdenum plate mode of heating, and achievable metal material is not higher than 1400 DEG C of annealing
Temperature.
The vacuum pre-vacuum chamber component 2 includes：Pre-vacuum chamber 21, pre-vacuum chamber hatch door 22, cryogenic gas nozzle 23, pre-vacuum chamber sample
Product seat 24 and manipulator 25, the pre-vacuum chamber hatch door 22 are arranged on the side wall of the pre-vacuum chamber 21, described one end of pre-vacuum chamber 21
It is connected with the other end of the first push-pull valve 4, the other end of pre-vacuum chamber 21, which is used, is provided with through hole in the middle part of flange seal, flange,
Described one end of manipulator 25 coordinates with through hole to be ensured to seal and be placed in inside pre-vacuum chamber 21 through through hole, is set in the pre-vacuum chamber 21
Pre-vacuum chamber specimen holder 24 is put, described one end of cryogenic gas nozzle 23 is arranged in pre-vacuum chamber 21, and the other end is arranged at pre-vacuum chamber 21
Outside, is tightly connected with low temperature source of the gas.
The vacuumizing assembly 3 includes：First vacuum gauge 31, the second push-pull valve 32, molecular pump 33, the first magnetic valve 34,
Second vacuum gauge 35, mechanical pump 36, the magnetic valve 38 of bellows 37 and second.Described one end of second push-pull valve 32 passes through pipeline and institute
State furnace shell 11 to connect, the first vacuum gauge 31 is set on the pipeline that furnace shell 11 described in second push-pull valve 32 is connected, it is described
The other end of second push-pull valve 32 is connected with the one end of molecular pump 33, the other end of molecular pump 33 and described one end of first magnetic valve 34
Connection；Described one end of second magnetic valve 38 is connected with the pre-vacuum chamber 21, and the other end of the second magnetic valve 38 passes through bellows
37 and one triple valve connect respectively the second vacuum be set on the other end of 36 and first magnetic valve of mechanical pump 34, the triple valve
Rule 35, first vacuum gauge 31 is advised for high vacuum, and second vacuum gauge 35 is forevacuum ga(u)ge, the cryogenic gas nozzle 23
Cryogenic gas can be sprayed to the specimen holder in pre-vacuum chamber 21, the metal material sample after quick cooling annealing keeps its original
Annealed microstructure architectural feature.
Main vacuum chamber is Metal Materials At High Temperature annealing test area, and the high vacuum system constituted with molecular pump is connected, it is ensured that gold
Belong to the vacuum level requirements during anneal of material.Vacuum pre-vacuum chamber is the cooling zone after annealing of metal materials, is constituted with mechanical pump
Low vacuum system connection, it is ensured that after the completion of annealing of metal materials between main vacuum chamber and vacuum pre-vacuum chamber push-pull valve unlatching,
Batch is sampled between realizing the timesharing of annealing of metal materials sample.
The operation principle and the course of work of Metal Materials At High Temperature vacuum drying oven are as follows：
1. after the completion of annealing of metal materials preparation of samples, the main vacuum cabin door of high-temperature vacuum annealing furnace side is opened, by sample of annealing
Product are positioned on the sample stage in combustion chamber soaking zone, open main vacuum chamber high vacuum system.
2. after main vacuum chamber reaches the vacuum that annealing is required, molybdenum plate heating system, main vacuum chamber Nei Wenduda are started
Start timing after to target annealing temperature and stabilization, while opening vacuum pre-vacuum chamber low vacuum system.
3. opened after the very first time, batch annealing specimen reached annealing time between main vacuum chamber and vacuum pre-vacuum chamber
Very first time batch sample, is moved in pre-vacuum chamber by the first push-pull valve using manipulator from the specimen holder at main vacuum chamber combustion chamber
Specimen holder on, the push-pull valve of quick closedown first, while using the cryogenic gas nozzle above the specimen holder in pre-vacuum chamber to sample
Product seat sprays into cryogenic gas, the sample after quick cooling annealing, to retain characteristics of organizational structure after its original annealing.
4. by that analogy, until the annealing specimen of final time batch is completed to anneal and quickly cooled down.
Embodiment 1：It will need to carry out 1000 DEG C, 50 hours, 100 hours, 500 hours, 10000 hours annealing as cast condition
Cobalt base superalloy ingot cuts out 4 20 × 20 × 20mm square coupons, grinds off surface cutting cut and cleans up standby.Beat
The main vacuum cabin door on the left of high-temperature vacuum annealing furnace is opened, 4 cobalt-base alloys annealing specimens are sequentially placed into the sample in main vacuum chamber
On product seat, close main vacuum cabin door and start main vacuum chamber high vacuum system.Treat that the vacuum in main vacuum chamber reaches 1 × 10- 3During Pa, start main vacuum chamber molybdenum plate heating system, and sets target annealing temperature is 1000 DEG C.Temperature in main vacuum chamber
Reach 1000 DEG C and start timing after stable, while opening vacuum pre-vacuum chamber low vacuum system.When annealing time is reached 50 hours,
The first push-pull valve between main vacuum chamber and vacuum pre-vacuum chamber is opened, while using manipulator by very first time batch sample from master
Specimen holder at vacuum chamber combustion chamber is moved on the specimen holder in pre-vacuum chamber, the push-pull valve of quick closedown first, using in pre-vacuum chamber
Specimen holder above cryogenic gas nozzle spray into cryogenic gas, the sample after quick cooling annealing to specimen holder.By that analogy,
It is sequentially completed 100 hours, 500 hours, the sampling and cooling of 10000 hours three times annealing specimens.
From embodiment as can be seen that high-temperature vacuum annealing furnace can complete the same annealing temperature different time batch of metal material
Lower annealing, and the quick cooling of sample can be realized after the completion of annealing of metal materials, keep its original annealing group
Knit architectural feature.
Claims (6)
1. a kind of Metal Materials At High Temperature vacuum annealing furnace, it is characterised in that the Metal Materials At High Temperature vacuum annealing furnace includes：It is main
Vacuum chamber component, vacuum pre-vacuum chamber component, vacuumizing assembly and the first push-pull valve, the main vacuum chamber component and the vacuum are pre-
Take out and first push-pull valve be set between chamber component, the vacuumizing assembly respectively with the main vacuum chamber component and the vacuum
Pre-vacuum chamber component is connected.
2. Metal Materials At High Temperature vacuum annealing furnace according to claim 1, it is characterised in that the main vacuum chamber component bag
Include：Furnace shell, main vacuum chamber's hatch door, quartz observing window, heat screen, combustion chamber and annealing specimen platform, described furnace shell one end are set
Main vacuum chamber's hatch door, main vacuum chamber's hatch door is used to seal furnace shell, the furnace shell other end and first push-pull valve
One end is connected, and the core in the furnace shell is combustion chamber, and combustion chamber is the cylindrical empty core structure that molybdenum plate bar calandria is surrounded,
Annealing specimen platform is set in wrapped multiple heat screen on the outside of combustion chamber, the combustion chamber.
3. Metal Materials At High Temperature vacuum annealing furnace according to claim 2, it is characterised in that the vacuum pre-vacuum chamber component
Including：Pre-vacuum chamber, pre-vacuum chamber hatch door, cryogenic gas nozzle, pre-vacuum chamber specimen holder and manipulator, the pre-vacuum chamber hatch door are arranged at
On the side wall of the pre-vacuum chamber, described pre-vacuum chamber one end is connected with the first push-pull valve other end, the pre-vacuum chamber other end
Using flange seal, through hole is provided with the middle part of flange, described manipulator one end coordinates with through hole to be ensured to seal and be placed in through through hole
Inside pre-vacuum chamber, pre-vacuum chamber specimen holder is set, described cryogenic gas nozzle one end is arranged in pre-vacuum chamber, separately in the pre-vacuum chamber
One end is arranged on the outside of pre-vacuum chamber, is connected with low temperature source of the gas.
4. Metal Materials At High Temperature vacuum annealing furnace according to claim 3, it is characterised in that the vacuumizing assembly bag
Include：First vacuum gauge, the second push-pull valve, molecular pump, the first magnetic valve, the second vacuum gauge, mechanical pump, bellows and the second electromagnetism
Valve, described second push-pull valve one end is connected by pipeline with the furnace shell, and second push-pull valve is connected with the furnace shell
Pipeline on the first vacuum gauge is set, the second push-pull valve other end is connected with molecular pump one end, the molecular pump other end
It is connected with described first magnetic valve one end；Described second magnetic valve one end is connected with the pre-vacuum chamber, and second magnetic valve is another
One end is connected and set on the mechanical pump and the first magnetic valve other end, the triple valve respectively by bellows and a triple valve
Second vacuum gauge.
5. Metal Materials At High Temperature vacuum annealing furnace according to claim 4, it is characterised in that first vacuum gauge is height
Vacuum gauge.
6. Metal Materials At High Temperature vacuum annealing furnace according to claim 4, it is characterised in that second vacuum gauge is low
Vacuum gauge.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710084464.9A CN107058700A (en) | 2017-02-16 | 2017-02-16 | A kind of Metal Materials At High Temperature vacuum annealing furnace |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710084464.9A CN107058700A (en) | 2017-02-16 | 2017-02-16 | A kind of Metal Materials At High Temperature vacuum annealing furnace |
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| Publication Number | Publication Date |
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| CN107058700A true CN107058700A (en) | 2017-08-18 |
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| CN201710084464.9A Pending CN107058700A (en) | 2017-02-16 | 2017-02-16 | A kind of Metal Materials At High Temperature vacuum annealing furnace |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108342706A (en) * | 2018-04-02 | 2018-07-31 | 杭州赛威斯真空技术有限公司 | A kind of bunch type magnetron sputtering production line |
| CN108411083A (en) * | 2018-04-04 | 2018-08-17 | 芜湖德海机器人科技有限公司 | External-heat vacuum heat tank and heat treatment method |
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| JPS59159927A (en) * | 1983-02-28 | 1984-09-10 | Shimadzu Corp | Heat treating device |
| JP2005232548A (en) * | 2004-02-20 | 2005-09-02 | Daido Steel Co Ltd | Oil-quenching apparatus |
| CN1948518A (en) * | 2006-11-10 | 2007-04-18 | 李积回 | Heat treatment device of scissors products and its method |
| CN100999776A (en) * | 2006-01-10 | 2007-07-18 | 中国科学院金属研究所 | Vacuum dual-chamber high temp, quenching furnace |
| CN102943250A (en) * | 2012-11-09 | 2013-02-27 | 北京力量激光元件有限责任公司 | Independent control five-temperature zone ZnSe synthetic sedimentation furnace |
| CN203653625U (en) * | 2013-12-25 | 2014-06-18 | 苏州市万泰真空炉研究所有限公司 | Automatically-opened/closed corrosion-prevented drench-type-purification observed-and-monitored three-chamber vacuum furnace |
| CN206570370U (en) * | 2017-02-16 | 2017-10-20 | 北京科技大学 | A kind of Metal Materials At High Temperature vacuum annealing furnace |
-
2017
- 2017-02-16 CN CN201710084464.9A patent/CN107058700A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59159927A (en) * | 1983-02-28 | 1984-09-10 | Shimadzu Corp | Heat treating device |
| JP2005232548A (en) * | 2004-02-20 | 2005-09-02 | Daido Steel Co Ltd | Oil-quenching apparatus |
| CN100999776A (en) * | 2006-01-10 | 2007-07-18 | 中国科学院金属研究所 | Vacuum dual-chamber high temp, quenching furnace |
| CN1948518A (en) * | 2006-11-10 | 2007-04-18 | 李积回 | Heat treatment device of scissors products and its method |
| CN102943250A (en) * | 2012-11-09 | 2013-02-27 | 北京力量激光元件有限责任公司 | Independent control five-temperature zone ZnSe synthetic sedimentation furnace |
| CN203653625U (en) * | 2013-12-25 | 2014-06-18 | 苏州市万泰真空炉研究所有限公司 | Automatically-opened/closed corrosion-prevented drench-type-purification observed-and-monitored three-chamber vacuum furnace |
| CN206570370U (en) * | 2017-02-16 | 2017-10-20 | 北京科技大学 | A kind of Metal Materials At High Temperature vacuum annealing furnace |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108342706A (en) * | 2018-04-02 | 2018-07-31 | 杭州赛威斯真空技术有限公司 | A kind of bunch type magnetron sputtering production line |
| CN108411083A (en) * | 2018-04-04 | 2018-08-17 | 芜湖德海机器人科技有限公司 | External-heat vacuum heat tank and heat treatment method |
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Application publication date: 20170818 |
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