CN100593122C - 一种平面集成的三维磁场传感器及其制备方法和用途 - Google Patents

一种平面集成的三维磁场传感器及其制备方法和用途 Download PDF

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CN100593122C
CN100593122C CN200510126428A CN200510126428A CN100593122C CN 100593122 C CN100593122 C CN 100593122C CN 200510126428 A CN200510126428 A CN 200510126428A CN 200510126428 A CN200510126428 A CN 200510126428A CN 100593122 C CN100593122 C CN 100593122C
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layer
magnetic field
sensor units
magnetic
pinning
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CN1979210A (zh
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覃启航
韩秀峰
王磊
马明
魏红祥
詹文山
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Institute of Physics of CAS
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/0206—Three-component magnetometers
CN200510126428A 2005-12-09 2005-12-09 一种平面集成的三维磁场传感器及其制备方法和用途 Active CN100593122C (zh)

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CN200510126428A CN100593122C (zh) 2005-12-09 2005-12-09 一种平面集成的三维磁场传感器及其制备方法和用途
PCT/CN2006/003349 WO2007065377A1 (fr) 2005-12-09 2006-12-08 Detecteur plan integre pour la detection de champs magnetiques faibles dans 3d, et son procede de fabrication

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CN200510126428A CN100593122C (zh) 2005-12-09 2005-12-09 一种平面集成的三维磁场传感器及其制备方法和用途

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CN1979210A CN1979210A (zh) 2007-06-13
CN100593122C true CN100593122C (zh) 2010-03-03

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI463160B (zh) * 2013-01-28 2014-12-01 meng huang Lai 平面化之三維磁感測晶片

Families Citing this family (12)

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Publication number Priority date Publication date Assignee Title
CN102280574B (zh) * 2011-01-07 2014-04-16 江苏多维科技有限公司 薄膜磁电阻传感元件、多个传感元件的组合及与该组合耦合的电子装置
CN202149936U (zh) * 2011-02-14 2012-02-22 美新半导体（无锡）有限公司 单芯片三轴amr传感器
CN102810630B (zh) * 2011-05-30 2015-11-25 中国科学院物理研究所 各向异性可调制的磁性薄膜结构、磁敏传感器及制备方法
CN102426344B (zh) 2011-08-30 2013-08-21 江苏多维科技有限公司 三轴磁场传感器
CN103543414A (zh) * 2012-07-13 2014-01-29 爱盛科技股份有限公司 三维平面磁传感器
CN104007401B (zh) * 2013-02-21 2017-04-12 赖孟煌 平面化的三维磁感测芯片
CN104515957B (zh) * 2013-09-27 2017-05-31 上海矽睿科技有限公司 磁传感装置及其制备方法
CN103675094A (zh) * 2013-12-16 2014-03-26 无锡乐尔科技有限公司 一种无损探伤装置
CN103913709B (zh) * 2014-03-28 2017-05-17 江苏多维科技有限公司 一种单芯片三轴磁场传感器及其制备方法
IT201600132408A1 (it) 2016-12-29 2018-06-29 Milano Politecnico Sensore magnetico triassiale mems con configurazione perfezionata
CN107275073A (zh) * 2017-06-09 2017-10-20 华侨大学 一种垂直磁特性可调纳米厚度GdFeCo合金薄膜的制备方法
DE102019126320B4 (de) * 2019-09-30 2024-03-28 Infineon Technologies Ag Magnetoresistiver Sensor und Fertigungsverfahren für einen magnetoresistiven Sensor

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GB2276727A (en) * 1993-04-01 1994-10-05 Rolls Royce & Ass Magnetoresistive magnetometer
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CN1687802A (zh) * 2005-05-27 2005-10-26 中国科学院物理研究所 线性磁场传感器及其制作方法

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JP4085859B2 (ja) * 2002-03-27 2008-05-14 ヤマハ株式会社 磁気センサおよびその製造方法
JP4177032B2 (ja) * 2002-06-04 2008-11-05 株式会社ワコー 三次元磁気センサおよびその製造方法

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GB2276727A (en) * 1993-04-01 1994-10-05 Rolls Royce & Ass Magnetoresistive magnetometer
CN1458702A (zh) * 2002-05-16 2003-11-26 中国科学院物理研究所 隧道效应磁电阻器件及制备方法
CN1687802A (zh) * 2005-05-27 2005-10-26 中国科学院物理研究所 线性磁场传感器及其制作方法

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双势垒磁性隧道结的磁电阻效应及其在自旋晶体管中的应用. 曾中明，韩秀峰等.物理学报，第54卷第7期. 2005
双势垒磁性隧道结的磁电阻效应及其在自旋晶体管中的应用. 曾中明，韩秀峰等.物理学报，第54卷第7期. 2005 *
软磁金属合金多层磁性薄膜研究进展. 叶超群，严彪，徐政.上海钢研，第3期. 2004
软磁金属合金多层磁性薄膜研究进展. 叶超群，严彪，徐政.上海钢研，第3期. 2004 *
高磁电阻磁性隧道结的几种微制备方法研究. 李飞飞，张谢群等.物理学报，第54卷第8期. 2005
高磁电阻磁性隧道结的几种微制备方法研究. 李飞飞，张谢群等.物理学报，第54卷第8期. 2005 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI463160B (zh) * 2013-01-28 2014-12-01 meng huang Lai 平面化之三維磁感測晶片

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CN1979210A (zh) 2007-06-13

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