CN100590532C - 光刻的曝光方法及曝光系统 - Google Patents
光刻的曝光方法及曝光系统 Download PDFInfo
- Publication number
- CN100590532C CN100590532C CN200710044562A CN200710044562A CN100590532C CN 100590532 C CN100590532 C CN 100590532C CN 200710044562 A CN200710044562 A CN 200710044562A CN 200710044562 A CN200710044562 A CN 200710044562A CN 100590532 C CN100590532 C CN 100590532C
- Authority
- CN
- China
- Prior art keywords
- exposure
- parasitic light
- treatment
- exposure field
- field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
Description
Claims (9)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN200710044562A CN100590532C (zh) | 2007-07-31 | 2007-07-31 | 光刻的曝光方法及曝光系统 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN200710044562A CN100590532C (zh) | 2007-07-31 | 2007-07-31 | 光刻的曝光方法及曝光系统 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101359181A CN101359181A (zh) | 2009-02-04 |
CN100590532C true CN100590532C (zh) | 2010-02-17 |
Family
ID=40331654
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN200710044562A Expired - Fee Related CN100590532C (zh) | 2007-07-31 | 2007-07-31 | 光刻的曝光方法及曝光系统 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN100590532C (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102445855B (zh) * | 2010-10-14 | 2013-09-11 | 中芯国际集成电路制造(上海)有限公司 | 双层曝光补偿方法 |
CN106773555B (zh) * | 2017-03-21 | 2019-03-26 | 上海华力微电子有限公司 | 补偿由光刻镜头散射光导致曝光误差的方法 |
CN109188867A (zh) | 2018-09-11 | 2019-01-11 | 惠科股份有限公司 | 曝光补偿表的生成方法、光阻曝光补偿的方法及曝光机台 |
-
2007
- 2007-07-31 CN CN200710044562A patent/CN100590532C/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CN101359181A (zh) | 2009-02-04 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US7243332B2 (en) | Method and apparatus for identifying a manufacturing problem area in a layout using a gradient-magnitude of a process-sensitivity model | |
Wagner et al. | EUV lithography at chipmakers has started: performance validation of ASML's NXE: 3100 | |
US20170345725A1 (en) | Method of extracting defects | |
US20170115556A1 (en) | Mask manufacturing method and semiconductor device manufacturing method using the same | |
US20030054642A1 (en) | Production method of semiconductor device and production system of semiconductor device | |
CN101726991B (zh) | 光学临近修正的测试方法及光掩模版制造方法 | |
US9305346B2 (en) | Method and apparatus for efficient defect inspection | |
US20140206111A1 (en) | Semiconductor device manufacturing method | |
US10445452B2 (en) | Simulation-assisted wafer rework determination | |
CN100590532C (zh) | 光刻的曝光方法及曝光系统 | |
US10108771B2 (en) | Method, apparatus and system for forming recolorable standard cells with triple patterned metal layer structures | |
US7005215B2 (en) | Mask repair using multiple exposures | |
US7300725B2 (en) | Method for determining and correcting reticle variations | |
CN109709761B (zh) | 一种光学邻近修正方法 | |
EP1526406B1 (en) | Photomask | |
US7875851B1 (en) | Advanced process control framework using two-dimensional image analysis | |
Chen et al. | Characterization of ArF immersion process for production | |
WO2019179782A1 (en) | Instant tuning method for accelerating resist and etch model calibration | |
US11016399B2 (en) | Method for controlling a manufacturing apparatus and associated apparatuses | |
Bouchoms et al. | Advanced imaging with 1.35 NA immersion systems for volume production | |
US10748821B2 (en) | Method and system for measuring pattern placement error on a wafer | |
CN101504510A (zh) | 进行光刻工艺的方法 | |
Yang et al. | New OPC verification method using die-to-database inspection | |
Hermans et al. | Towards manufacturing a 10nm node device with complementary EUV lithography | |
JP2008047598A (ja) | 半導体装置の製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20111117 Address after: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Co-patentee after: Semiconductor Manufacturing International (Beijing) Corporation Patentee after: Semiconductor Manufacturing International (Shanghai) Corporation Address before: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |
|
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100217 Termination date: 20190731 |