CN100585407C - Optical fibre grating accelerometer based on cantilever beam deflection - Google Patents

Optical fibre grating accelerometer based on cantilever beam deflection Download PDF

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CN100585407C
CN100585407C CN200710065322A CN200710065322A CN100585407C CN 100585407 C CN100585407 C CN 100585407C CN 200710065322 A CN200710065322 A CN 200710065322A CN 200710065322 A CN200710065322 A CN 200710065322A CN 100585407 C CN100585407 C CN 100585407C
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fiber grating
accelerometer
sidewall
girder
semi
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CN101285846A (en
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张文涛
李芳�
刘育梁
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Institute of Semiconductors of CAS
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Abstract

The invention relates to the optical fiber sensor technical field, disclosing an optical fiber grating accelerometer based on cantilever beam deflection. The accelerometer comprises an outer casing 1 used as a support structure of the accelerometer, an optical fiber grating 2 used to measure acceleration, a cantilever beam 3 with one end horizontally fixed on the third sidewall p of the accelerometer and a mass block 5 fixed at the other end of the cantilever beam 3, wherein the outer casing 1 has a first sidewall m, a second sidewall n, a third sidewall p and a fourth sidewall q; one end of the optical fiber grating 2 is fixed with the mass block 5, while the other end is parallel to the first sidewall m and passes through the hole 6 on the second sidewall n of the accelerometer to extend outside the accelerometer; the cantilever beam 3 is used to send vibration signal to the optical fiber grating 2; and the mass block 5 is used to adjust the sensitivity and the natural vibration frequency of the accelerometer. The optical fiber grating accelerometer increases sensitivity and improves packaging technology.

Description

Fiber grating accelerometer based on cantilever beam deflection
Technical field
The present invention relates to the fiber optic sensor technology field, relate in particular to a kind of fiber grating accelerometer based on cantilever beam deflection.
Background technology
Fibre Optical Sensor is compared with corresponding conventional sensors, also has remarkable advantages at aspects such as sensitivity, dynamic range, reliabilities, seems particularly outstanding in national defence, Military Application field, is classified as the defense technology of giving priority to by many countries.
Fibre optic accelerometer is all mudulation effects of utilizing the biography light characteristic of optical fiber and it and surrounding environment to interact and produce, surveys in ground, the air or the instrument of the signals such as vibration in seabed.It is compared with traditional piezoelectric type accelerometer, and following main advantage is arranged: bandwidth, sound pressure sensitivity height, be not subjected to electromagnetic interference (EMI), in light weight, can be designed to arbitrary shape, and have information sensing concurrently and optical information is transmitted in advantages such as the whole body.
In view of the as above technical advantage of fibre optic accelerometer, can satisfy of the requirement of each developed country in fields such as oil, military affairs, actively launched research at present in this regard.
In common intensity modulation type, digital, fiber Bragg grating type fibre optic accelerometer, the fiber Bragg grating type accelerometer since its volume little, be easy to multiplexing characteristics and obtained paying close attention to widely.
People such as Yu Youlong have reported a kind of fiber grating accelerometer, are to adopt in the method that fiber grating is bonded in the semi-girder surface.When vibration took place semi-girder, its surface had periodic pressure stretching strain, and fiber grating is realized the measurement vibrated by the strain that detects the semi-girder surface.This kind technical scheme grid region of fiber grating is on the one hand directly encapsulated by glue, fiber grating is produced warbles, in order to make the output retention wire sexual intercourse of acceleration and sensor, the amount of deflection of semi-girder can not be excessive, thereby limited the sensitivity of sensor on the other hand.
Therefore, how improving the packing forms of fiber grating accelerometer and the sensitivity that improves fiber grating accelerometer, is the essential important technological problems that solves of fiber grating accelerometer large-scale application.
Summary of the invention
(1) technical matters that will solve
In view of this, fundamental purpose of the present invention is to provide a kind of fiber grating accelerometer based on cantilever beam deflection, with sensitivity that improves fiber grating accelerometer and the packaging technology of improving fiber grating accelerometer.
(2) technical scheme
For achieving the above object, technical scheme of the present invention is achieved in that
A kind of fiber grating accelerometer based on cantilever beam deflection, this fiber grating accelerometer comprises:
As the shell 1 of this fiber grating accelerometer supporting construction, have the first side wall m, the second sidewall n, the 3rd sidewall p and the 4th sidewall q;
Be used to measure the fiber grating 2 of acceleration, an end of this fiber grating 2 and fixed connection of mass 5 nets, the other end is parallel to the outside that the first side wall m passes the hole 6 on the described fiber grating accelerometer second sidewall n and extends to described fiber grating accelerometer;
The semi-girder 3 of one end horizontal fixed on described fiber grating accelerometer the 3rd sidewall p is used for vibration signal is passed to fiber grating 2;
Be fixed in the mass 5 of described semi-girder 3 other ends, be used to adjust the sensitivity and the natural frequency of vibration of fiber grating accelerometer.
In the such scheme, described hole 6 is positioned on the second sidewall n of fiber grating accelerometer, is used to draw the tail optical fiber with fixed fiber grating 2.
In the such scheme, described fiber grating 2 has certain primary stress perpendicular to semi-girder 3.
In the such scheme, the quality of described mass 5 is used to reduce the nonlinear effect of fiber grating accelerometer much larger than the quality of semi-girder 3.
In the such scheme, when described optical fiber raster vibration sensor is subjected to vibrational excitation, described semi-girder 3 and mass 5 constitute a spring-quality system, mass 5 is in the direction starting of oscillation perpendicular to semi-girder 3, drive semi-girder 3 and produce certain amount of deflection, the vibration of cantilever amount 3 makes and produces the periodically variable axial stress consistent with vibration frequency in the fiber grating 2.
In the such scheme, described semi-girder 3 passes through bearing 4 horizontal fixed on the 3rd sidewall p of fiber grating accelerometer.
In the such scheme, described fiber grating accelerometer is by quality or the material of change semi-girder 3 and the sensitivity and the natural frequency of vibration that structural parameters change fiber grating accelerometer of quality of regulation piece 5.
(3) beneficial effect
From technique scheme as can be seen, the present invention has following beneficial effect:
1, the fiber grating accelerometer based on cantilever beam deflection provided by the invention, be converted into the axial displacement of fiber grating by amount of deflection with semi-girder, the mode of pasting than the surface, for onesize vibration signal, to produce bigger strain in the fiber grating, and make fiber grating accelerometer have higher sensitivity.
2, the fiber grating accelerometer based on cantilever beam deflection provided by the invention by the mode of fixing at the two ends of fiber grating, has been simplified the technology of encapsulation when avoiding the fiber grating generation to warble, manufacture craft is simple.
3, the fiber grating accelerometer based on cantilever beam deflection provided by the invention, since can be easily by quality or the material of change semi-girder 3 and the sensitivity and the natural frequency of vibration that structural parameters change sensor of quality of regulation piece 5, the sensitivity and the natural frequency of vibration are easy to regulate.
Description of drawings
Fig. 1 is the vertical view of the fiber grating accelerometer structure based on cantilever beam deflection provided by the invention.
Embodiment
For making the purpose, technical solutions and advantages of the present invention clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in more detail.
As shown in Figure 1, Fig. 1 is the vertical view of the fiber grating accelerometer structure based on cantilever beam deflection provided by the invention.This fiber grating accelerometer comprises: as the shell 1 of this fiber grating accelerometer supporting construction, have the first side wall m, the second sidewall n, the 3rd sidewall p and the 4th sidewall q; Be used to measure the fiber grating 2 of acceleration, an end of this fiber grating 2 is fixedlyed connected with mass 5, and the other end is parallel to the outside that the first side wall m passes the hole 6 on the described fiber grating accelerometer second sidewall n and extends to described fiber grating accelerometer; The semi-girder 3 of one end horizontal fixed on described fiber grating accelerometer the 3rd sidewall p is used for vibration signal is passed to fiber grating 2; Be fixed in the mass 5 of described semi-girder 3 other ends, be used to adjust the sensitivity and the natural frequency of vibration of fiber grating accelerometer.
Above-mentioned hole 6 is positioned on the second sidewall n of fiber grating accelerometer, is used to draw the tail optical fiber with fixed fiber grating 2.
Above-mentioned fiber grating 2 has certain primary stress perpendicular to semi-girder 3.
The quality of above-mentioned mass 5 is much larger than the quality of semi-girder 3, and the quality of semi-girder 3 is very little with respect to mass 5, can ignore, and is used to reduce the nonlinear effect of fiber grating accelerometer.
When this fiber grating accelerometer was subjected to the vibrational excitation of direction as shown in Figure 1, semi-girder 3 and mass 5 constituted a spring-quality system, and mass 5 drives semi-girder 3 and produces certain amount of deflection in the direction starting of oscillation perpendicular to semi-girder 3.Because an end of fiber grating 2 is fixed on the mass 5, thereby the vibration of cantilever amount 3 makes and produces the periodically variable axial stress consistent with vibration frequency in the fiber grating.For fiber grating, the variable quantity of its reflection wavelength is directly proportional with suffered axial stress, so by detecting the size that the wavelength change amount can obtain the extraneous vibration acceleration.
Above-mentioned semi-girder 3 passes through bearing 4 horizontal fixed on the 3rd sidewall p of fiber grating accelerometer.
In addition, because the quality of mass 5 will produce remarkable influence to the sensitivity and the natural frequency of vibration of accelerometer, so can change the sensitivity and the natural frequency of vibration of accelerometer by the quality of quality of regulation piece 5.The rigidity of semi-girder 3 can determine the sensitivity and the natural frequency of vibration of accelerometer equally, so change the material of semi-girder 3 and the sensitivity and the natural frequency of vibration that structural parameters can also change accelerometer.
Above-described specific embodiment; purpose of the present invention, technical scheme and beneficial effect are further described; institute is understood that; the above only is specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any modification of being made, be equal to replacement, improvement etc., all should be included within protection scope of the present invention.

Claims (5)

1, a kind of fiber grating accelerometer based on cantilever beam deflection is characterized in that, this fiber grating accelerometer comprises:
As the shell (1) of this fiber grating accelerometer supporting construction, have the first side wall m, the second sidewall n, the 3rd sidewall p and the 4th sidewall q, the first side wall m is parallel with the 3rd sidewall p, and the second sidewall n is perpendicular to the first side wall m and the 3rd sidewall p;
Be used to measure the fiber grating (2) of acceleration, one end of this fiber grating (2) is fixedlyed connected with mass (5), and the other end is parallel to the outside that the first side wall m passes the hole (6) on the described fiber grating accelerometer second sidewall n and extends to described fiber grating accelerometer; Hole (6) is positioned on the second sidewall n of fiber grating accelerometer, is used to draw the tail optical fiber with fixed fiber grating (2); Fiber grating (2) is parallel to the first side wall m, and perpendicular to semi-girder (3), has certain primary stress;
The semi-girder (3) of one end horizontal fixed on described fiber grating accelerometer the 3rd sidewall p is used for vibration signal is passed to fiber grating (2);
Be fixed in the mass (5) of described semi-girder (3) other end, be used to adjust the sensitivity and the natural frequency of vibration of fiber grating accelerometer.
2, the fiber grating accelerometer based on cantilever beam deflection according to claim 1 is characterized in that, the quality of described mass (5) is used to reduce the nonlinear effect of fiber grating accelerometer much larger than the quality of semi-girder (3).
3, the fiber grating accelerometer based on cantilever beam deflection according to claim 1, it is characterized in that, when described fiber grating accelerometer is subjected to vibrational excitation, described semi-girder (3) and mass (5) constitute a spring-quality system, mass (5) is in the direction starting of oscillation perpendicular to semi-girder (3), drive semi-girder (3) and produce certain amount of deflection, the vibration of semi-girder (3) makes and produces the periodically variable axial stress consistent with vibration frequency in the fiber grating (2).
4, the fiber grating accelerometer based on cantilever beam deflection according to claim 1 is characterized in that, described semi-girder (3) passes through bearing (4) horizontal fixed on the 3rd sidewall p of fiber grating accelerometer, and vertical with the 3rd sidewall p.
5, the fiber grating accelerometer based on cantilever beam deflection according to claim 1, it is characterized in that described fiber grating accelerometer is by quality or the material of change semi-girder (3) and the sensitivity and the natural frequency of vibration that structural parameters change fiber grating accelerometer of quality of regulation piece (5).
CN200710065322A 2007-04-11 2007-04-11 Optical fibre grating accelerometer based on cantilever beam deflection Expired - Fee Related CN100585407C (en)

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Publication number Priority date Publication date Assignee Title
CN102080986B (en) * 2009-11-30 2012-11-14 同方威视技术股份有限公司 Fiber bragg grating vibration sensing component, fiber bragg grating vibration sensing device, vibration measuring system and method
CN102087300B (en) * 2010-11-11 2012-05-30 西北大学 Fiber grating acceleration transducer based on metal bellows structure
CN102095892B (en) * 2010-11-19 2012-07-25 中国计量学院 Fiber bragg grating acceleration transducer based on fabrication structure
CN102707091A (en) * 2012-06-12 2012-10-03 中国科学院半导体研究所 Double-grating optical fiber vector accelerometer based on cantilever beam
CN104880243B (en) * 2014-02-27 2018-06-01 同方威视技术股份有限公司 Optical fiber raster vibration sensor
AU2015394911A1 (en) * 2015-05-08 2017-11-30 Fugro Technology B.V. Optical sensor device, sensor apparatus and cable
CN105203202B (en) * 2015-11-06 2018-07-20 山东省科学院激光研究所 Optical fiber raster vibration displacement sensor
CN106645795B (en) * 2016-12-07 2019-04-19 三峡大学 A kind of production method of cantilever beam type optical fibre grating acceleration transducer
CN108760109B (en) * 2018-03-22 2020-11-24 湖北省路桥集团有限公司 Variable-range soil pressure measuring device and method based on Bragg fiber grating
CN108593961B (en) * 2018-04-08 2020-01-14 西安交通大学 Grating type MEMS accelerometer with low g value
CN109782021A (en) * 2019-01-09 2019-05-21 蚌埠学院 A kind of selection method of fiber grating accelerometer inertance element quality
CN111239438A (en) * 2020-02-24 2020-06-05 山东省科学院激光研究所 Optical fiber grating acceleration sensor
CN111308125B (en) * 2020-02-24 2021-08-20 北京大学 Acceleration detection method based on optical fiber Sagnac interferometer and acceleration meter
CN111579817B (en) * 2020-06-03 2021-03-16 武汉理工大学 Fiber bragg grating two-dimensional acceleration sensor based on multiple hinges and manufacturing process thereof

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US20040237648A1 (en) * 2003-06-02 2004-12-02 Jones Richard Todd Optical accelerometer or displacement device using a flexure system
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