CN100582786C - Manipulator for a test head with active compliance - Google Patents
Manipulator for a test head with active compliance Download PDFInfo
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- CN100582786C CN100582786C CN200710007714A CN200710007714A CN100582786C CN 100582786 C CN100582786 C CN 100582786C CN 200710007714 A CN200710007714 A CN 200710007714A CN 200710007714 A CN200710007714 A CN 200710007714A CN 100582786 C CN100582786 C CN 100582786C
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Abstract
A load, such as an electronic test head, is supported. A force sensor detects a force received from the load, the force resulting from the load being imbalanced such that a torque is created about a rotational axis of the load. A source of force provides a counter force relative to the load in response to the force detected by the force sensor. A method of docking an electronic test head held in a test head manipulator to an electronic device handler is also provided. The method of docking includes measuring a magnitude of an imbalance force along or about at least one of a plruality of motion axes of the test head manipulator; and providing a counter force to the imbalance force.
Description
To be Intest Corp be called the dividing an application of application for a patent for invention that " executor that is used to have the measuring head of active compliance ", application number are 01819263.7 (international application no is PCT/US01/29530) in the name of application on September 20 calendar year 2001 to the application.
Technical field
The present invention relates to make the method and apparatus of measuring head with respect to one or more maintenance balance.And the present invention also provides the method and apparatus that the submissive scope (compliant range of motion) of motion is provided for measuring head with respect to one or more.
Background technology
In the test of integrated circuit, chip and wafer, the way of custom is to use the system that comprises measuring head and handle the instrument of project to be measured.Process instrumentation can be packaged device processor, wafer prober or miscellaneous equipment.For for simplicity, we will claim such instrument for " device processor " or abbreviate " processor " as.Measuring head " docks " with processor.Then, can between measuring head and integrated circuit, set up circuit and connect, so that measuring head can carry out suitable test.
In general, two kinds of docking calculations are arranged, that is, actuator drives butt joint and manipulator driven butt joint.The technology that is known as " actuator driving " butt joint at first is disclosed in No. the 4th, 589,815, the United States Patent (USP) authorizing Smith (hereinafter referred to as ' 815), its some modification are developed later on, and are disclosed in the United States Patent (USP) the 5th, 654 of authorizing Ames, No. 631, authorize the 5th, 744, No. 974 of Bogden, authorize the 5th of people such as Chiu, 982, No. 182, authorize the 6th, 104 of people such as Slocum, No. 202, also authorize people such as Slocum the 5th, 821,764 in.They completely are herein incorporated, for your guidance.
In general sense, docking system needs " align structures " on one of two projects will docking, and " alignment receptacles " on another in this align structures and two projects engages.In ' 815 patents, include pilot pin, and include pilot pin jack and gusset as alignment receptacles as align structures.In three patents of authorizing people such as people such as Chiu and Slocum, the aligning in all six-freedom degrees provides by Dynamic Coupling, and Dynamic Coupling provides " being not conllinear more than two contact point " six contact points are provided between the surface.In these patents, " dynamic surface " on one of two projects will docking is as alignment receptacles; Play align structures with " dynamic fit surface " on another of two projects.In the preferred embodiment of describing in these patents, ball or spherical surface are dynamic fit surface or align structures, and groove is dynamic surface or alignment receptacles.Pointed as these patents, can use many other surface combinations.
The butt joint component class of describing in ' 815 patents is similar to part and is presented at (figure of Figure 13 lower left is partly cut open) in the vertical plane processor position (Vertical Plane Handler Position) among Figure 13 of the application 2 to connected components 1340.In Figure 13, only shown half assembly that is connected on the measuring head.These 2 are all used 2 pilot pins 912 and mating holes separately (not shown in Figure 13) and 2 circular cams 910 to connected components.When by being connected handle 914 on the cam 910 when making cam 910 rotations, the pilot pin 912 in the mating holes (not shown) that inserts them fully with becoming drags two and half ones of interfacing part (dock).2 cams 910 of cable 915 links are so that make their synchronous rotations.The rope layout makes the interfacing part can be by power only being applied to one or work on another in two handles 914.So in this case, handle is the butt joint actuator.
The interfacing part that Reid Ashman manufacturing company (RAM) makes [referring to website and sale printed matter] is at conceptive those interfacing parts described in ' 815 patents that are similar to.But in the RAM interfacing part, linear cam is used for replacing circular cam.In addition, the RAM interfacing part utilizes the mechanism rod of rigidity and bellcrank to replace cable, makes the synchronized movement of cam.Interfacing part by with two handles of separately bellcrank coupling in one or another actuating.
Can merge to power actuator in the interfacing part in various modes.For example, can easily add aforesaid linear actuators, butt joint be driven cable or mechanism rod in other interfacing part or the wire cam that is directly passed in ' 815 interfacing parts.Linear actuators can be several types any that comprises motor, electrical solenoid or pneumatic tyre.
At United States Patent (USP) the 5th, 654, No. 631 and the 5th, 744, the interfacing part of describing in No. 974 utilizes pilot pin and aperture to aim at two and half ones.But interfacing part advances when being evacuated the vacuum device of two and half ones to drive together.As long as keep vacuum, two and half ones just lock together always.
At United States Patent (USP) the 5th, 821, No. 764, the 5th, 982, No. 182 and the 6th, 104, disclosed interfacing part utilizes the Dynamic Coupling technology in No. 202, to provide final alignment between two and half ones.Can also utilize pilot pin that preliminary aligning is provided.Pilot pin can be furnished with click-on mechanism, and click-on mechanism captures pilot pin in its aperture, prevents that it from escaping.' 764 and ' 202 patents in, click-on mechanism presents automatic startup; Yet in ' 182 patents, the motor-driven device is used for each of three pilot pins.Equally, in ' 182 patents, three motors can isolated operation, and complanation between the parts achieves a butt joint.In all these publications, linear actuators is used at last two and half ones being pulled in together.Disclosed linear actuators is a pneumatic type.
Purpose discussed above provides the overview that some suitable actuator drives docking technique.As can be seen, interfacing part can be activated by various device.
The another kind of alternative method that is called " manipulator driven " butt joint is disclosed in, and for example, authorizes in people's such as Graham the United States Patent (USP) the 5th, 600, No. 258 and the 5th, 900, No. 737.This alternative method provides one or more power of executor and controlled axle (" controlled shaft ") to come the assignment test head.For example, and as described in the patent of mentioning, in the Graham patent, vertical, pitching and roll axle all are controlled shafts.Only control single axle, for example, the system of Z-axis or roll axis also is known.Position transducer is generally used for feedback is offered the controlled shaft relevant with respect to the position of device processor/detecting device with measuring head.In docking operation, controller (or manipulater) is operated a controlled shaft or several controlled shaft, at first measuring head is brought into the ready state of docking structure, then, continues the operation controlled shaft and finishes butt joint.In [people's such as Graham patents], the butting surface that sensor is used to make measuring head by controller is suitably towards the butting surface (normally coplane) of device processor/detecting device, and stops motion when butt joint is finished and suitably carried out electrical connection between measuring head and the device processor/detecting device.Do not have the interfacing part actuator, and, usually also not with manipulator axes irrelevant separate, independent latch mechanism.If do not separate, lock bolt device independently, must be locked in manipulator axes measuring head is remained on the position on the complete docking location.
In addition, in the manipulator driven system, it is not desirable or practicable allowing measuring head all keep balance on all axles.Unbalanced measuring head causes must be by driving and control gear, is difficult to expectation and undesired power by aligning guide with by what the structure of device processor/detecting device itself overcame.
Docking system is called as " lock bolt butt joint " system, wherein when docking fully and executor separately and irrelevant mechanism the measuring head lock bolt on processor/detecting device.Only be called as " non-lock bolt butt joint " system by pinning the system that manipulator axes remains on measuring head to finish on the docking location.Usually, it is the lock bolt docking system that actuator drives docking system, and the manipulator driven docking system is non-lock bolt docking system.But another kind of situation is, these two kinds combine and also are fine.
Executor is being designed in the situation of big measuring head, is preferably allowing measuring head can reach free movement on six roots of sensation axle or the six degrees of freedom of motion basically, to promote the easy degree of controlled motion.The manual control and the safe power of the kinematic axis that this U.S. Provisional Patent Application that is called " being driven the vertical butt joint motion (COUNTER BALANCED VERTICAL DOCKING MOTION IN ADRIVEN VERTICAL AXIS TEST HEAD MANIPULATOR) that contends with in the Z-axis test head manipulator " in pct international patent application US00/00704 number and the name that are called " test head manipulator (TEST HEAD MANIPULATOR) " as name is discussed for the 60/186th, No. 196 are certain.This with the docking/break away from of device processor/detecting device in also be certain, herein, motion be by as authorize Smith No. the 4th, 589,815, United States Patent (USP), authorize people's such as Slocum United States Patent (USP) the 5th, 821,764 and 6,104, No. 222 or authorize people's such as Chiu United States Patent (USP) the 5th, 982, No. 182 described docking system provides.This freedom of motion or " submissive motion " be particular importance in making measuring head and process that processor docks.
Provide two axles (from a side to opposite side with from the inside to surface) of motion parallel to the ground to be presented at Figure 14 with the axle (from top to bottom) vertical with the floor.These three axles comprise x-axle (from a side to opposite side) 1315, y-axle (from inside to outside) 1325 and z-axle (from top to bottom) 1335.Also show three pivotal axis, comprised pitch axis (x) 1310, roll axle (y) 1320 and deflection (and yaw) axle (z) 1330.In the two piece axles (x and y) parallel,, perhaps, in as the 4th, 527, No. 942 described articulated jibs of United States Patent (USP) of also authorizing Smith, provide freedom of motion generally by low frictional torque bearing and track etc. with the floor.In the situation of vertical or upper and lower axle (z axle), typical way is except the axle person of being operated deliberately pins, to use counterweight to reach essentially no weight state, so that required freedom of motion is provided.On-lower shaft in other known technology be to use as at the United States Patent (USP) the 4th of authorizing people such as Beaucoup, 943, spring device described in No. 020 and as authorize people's such as Slocum United States Patent (USP) the 5th, 931, No. 048 and authorize the United States Patent (USP) the 5th, 149,029 and 4 of Smith, pneumatic means described in 705, No. 447.But, authorize the United States Patent (USP) of Alden and point out for the 5th, 949, No. 002, take such method to have some difficulty, and the servo control loop that comprises the load cell force transducer is used in suggestion.But, comprise the technology not only complexity but also costliness of the servo control loop of band power and position feedback, under situation about breaking down, can not provide the operator to drive the straightforward procedure of system.
Pitching, sidewinder and situation that yaw rotates in, well-known, pivotal axis be set as make them almost pass measuring head and its attached installing mechanism and the center of gravity of rope.By adding the upper holder block counterweight, this realizes in the pattern manipulator that rolls.On rope pivot manoeuvre device, described as No. the 5th, 450,766, the United States Patent (USP) of authorizing Holt, this realizes by the length that provides various pads to change to lean against the inner support on the rope pivot manoeuvre device that protrudes.
As shown in figure 13, one or more rotation axis of measuring head inside is located on the actual center gravity of measuring head and rope assembly or neighbouring perhaps be worthwhile.Note that in the measuring head structure, combine pitching and weaving.In Figure 13, these are shown as pitch axis 1310 (± 5 ° θ X) and yaw axis 1320 (± 5 ° 9Z).Roll axle 1330 (± 90-95 ° θ Y) is also shown among Figure 13.
In present system, can prove, be provided with approximately ± pitch axis of 5 ° of motions, at least+90 the roll axle of ° motion (in the measuring head outside) and in measuring head approximately ± 5 ° of weavings are desirable.This be because, by using, for example, the United States Patent (USP) the 5th of authorizing Holt respectively, 450, No. 766 and also authorize the United States Patent (USP) the 5th, 608 of Holt, " CPPJ " (being used for pitching) and the SplitRing Cable Pivot technology described in No. 333, on the center of gravity or near the scope of these required structures of realization significantly less than realizing the scope of the structure that these are required during measuring head outside when them.
Advised by realizing this notion near the center of gravity that ball bearing is located at measuring head.Can be equipped with the outside adjusting gear of the position of mobile ball bearing along inward-outward direction, be in DUT (device among testing) upwards or during the downward orientation of DUT, can make pitch axis (or rolling) spindle balance from physically locating it with convenient measuring head.The ball bearing shortcoming is that it provides all three rotational freedoms simultaneously.
Although wish like this, these inner shafts are located on the real center of gravity of authentic testing head or very approaching place is very difficult.Change the length of what and measuring head rope of the inner pin electronic wiring board of measuring head and weight and often cause the remarkable skew of centre of gravity place, therefore, cause significant out-of-balance force with the actual activity of the needs that satisfy special proving installation final user.In addition, along with the sports bag winding thread of measuring head by it moves, the power that is applied on the measuring head by rope can change; When using the system of fixed sturcture, this causes variable out-of-balance force.But these out-of-balance forces have hindered with respect to the desirable free movement state of one or more kinematic axis.
As traditionally to executor do, no matter kinematic axis is in the inside of measuring head, still in the outside of measuring head, also often wishes the position of kinematic axis is repositioned onto on the position away from center of gravity.The example of this respect is, roll axis is positioned at very DUT interface near very thick measuring head, rather than usually on the measuring head center of gravity near the physical centre of measuring head.If measuring head have one meter thick, so, the pivotal axis that rolls is located on the center of gravity, and is hinting near physical centre that thus executor will need the vertical range (stroke) of at least one rice (100cm).If might be located at 13cm place in the DUT surface to the pivotal axis that rolls, so, the vertical stroke of executor will reduce 74cm (100cm-26cm), thereby reduced the overall height of executor, perhaps, for respect to given bearing arrangement than the heavy load capacity, allow to use long principal arm.But as noted above such, the place that the center of gravity of measuring head is moved to away from the known physical center can produce out-of-balance force.And these out-of-balance forces make measuring head be in non-equilibrium state, cause it can not be along all six roots of sensation axle free movements.
Like this, along with measuring head becomes increasing and become increasingly complex, the out-of-balance force in every critical movements axle correspondingly increases.Preferably there is a kind of measure to neutralize these out-of-balance forces, so that when giving security, can handle effectively and the assignment test head for the two safety of operator and instrument.
Summary of the invention
The present invention relates to be used to make measuring head to keep balance, so that measuring head is with respect to weightless basically equipment of this root axle and method with respect to an axle.The present invention can be applicable to many axles of test head manipulator.And, the invention still further relates to equipment and method that the submissive scope of motion is provided for measuring head with respect at least one axle of measuring head.
Description of drawings
One according to the present invention one exemplary embodiment of Fig. 1 (a), with the skeleton view of the balancing unit of measuring head coupling;
Fig. 1 (b) according to the present invention another one exemplary embodiment, with the skeleton view of the balancing unit of measuring head coupling;
Fig. 1 (c) according to the present invention another one exemplary embodiment, with the skeleton view of the balancing unit of measuring head coupling;
Fig. 1 (d) according to the present invention another one exemplary embodiment, with the skeleton view of the balancing unit of measuring head coupling;
One according to the present invention one exemplary embodiment of Fig. 2 (a), with the skeleton view of the balancing unit that is installed in the measuring head coupling in the support;
Fig. 2 (b) according to the present invention another one exemplary embodiment, with the skeleton view of the balancing unit that is installed in the measuring head coupling in the support;
One according to the present invention one exemplary embodiment of Fig. 3 (a), with skeleton view with the balancing unit of the measuring head coupling of internal bearings supporting;
Fig. 3 (b) according to the present invention another one exemplary embodiment, with skeleton view with the balancing unit of the measuring head coupling of internal bearings supporting;
Fig. 4 (a) is the detailed cross sectional view of the pneumatic cylinder of an one exemplary embodiment according to the present invention;
Fig. 4 (b) is the detailed cross sectional view of the hydraulic cylinder of an one exemplary embodiment according to the present invention;
One according to the present invention one exemplary embodiment of Fig. 5 (a), comprise the skeleton view of the submissive driving mechanism of position transducer and mechanical caging device;
One according to the present invention one exemplary embodiment of Fig. 5 (b), comprise the skeleton view of the submissive driving mechanism of position transducer and hydraulic locking device;
One according to the present invention one exemplary embodiment of Fig. 5 (c), comprise the skeleton view of the submissive driving mechanism of position transducer and two submissive centering actuators;
Fig. 6 (a) is the submissive driving mechanism of the one exemplary embodiment according to the present invention and the skeleton view of air counterbalance unit;
Fig. 6 (b) is the submissive driving mechanism of another one exemplary embodiment according to the present invention and the skeleton view of air counterbalance unit;
Fig. 7 is the skeleton view of the submissive driving mechanism of another one exemplary embodiment according to the present invention;
The skeleton view of one according to the present invention one exemplary embodiment of Fig. 8 (a), the submissive driving mechanism that is coupled and air counterbalance unit;
The skeleton view of Fig. 8 (b) another one exemplary embodiment, the submissive driving mechanism that is coupled and air counterbalance unit according to the present invention;
One according to the present invention one exemplary embodiment of Fig. 9 (a), with the first submissive driving mechanism that acts on the air counterbalance unit coupling in first rotating shaft and with the skeleton view of the second submissive driving mechanism that acts on the air counterbalance unit coupling in second rotating shaft;
Fig. 9 (b) according to the present invention another one exemplary embodiment, with the first submissive driving mechanism that acts on the air counterbalance unit coupling in first rotating shaft and with the skeleton view of the second submissive driving mechanism that acts on the air counterbalance unit coupling in second rotating shaft;
The skeleton view of one according to the present invention one exemplary embodiment of Figure 10 (a), the submissive driving mechanism on Z-axis;
The skeleton view of Figure 10 (b) another one exemplary embodiment, the submissive driving mechanism on Z-axis according to the present invention;
The skeleton view of Figure 10 (c) another one exemplary embodiment, the submissive driving mechanism on Z-axis according to the present invention;
Figure 10 (d) is the skeleton view according to the submissive driving mechanism of further embodiment of this invention on Z-axis;
Figure 10 (e) is a skeleton view of going back the submissive driving mechanism of an embodiment on Z-axis according to the present invention;
The skeleton view of Figure 10 (f) another one exemplary embodiment, the submissive driving mechanism on Z-axis according to the present invention;
Figure 11 according to the present invention another one exemplary embodiment, have the skeleton view of the test head manipulator of several submissive driving mechanisms;
The skeleton view of one according to the present invention one exemplary embodiment of Figure 12 (a), the service of connection devices that measuring head is docked with processor;
One according to the present invention one exemplary embodiment of Figure 12 (b), with the skeleton view of the service of connection devices of processor coupling;
The sectional view of one according to the present invention one exemplary embodiment of Figure 12 (c), the service of connection devices that measuring head is docked with processor;
One according to the present invention one exemplary embodiment of Figure 12 (d), with another sectional view of the service of connection devices of processor coupling;
Figure 13 (a)-(c) is the wiring layout of existing measuring head;
Figure 14 is the legend of six roots of sensation kinematic axis;
Figure 15 (a)-15 (n) is the process flow diagram of the various one exemplary embodiment according to the present invention.
Embodiment
Below in the detailed description of the several embodiment of the present invention, with reference to accompanying drawing listed earlier.Should be appreciated that these figure have a mind to be drawn as out-of-proportion, but they are drawn as emphasizes key character of the present invention.
In the process of device detection, apparent, measuring head keeps butt joint fully.Processor/detecting device is furnished with the mechanism of locating each device to be tested with respect to test interface in turn automatically.This has produced low-frequency mechanical vibrations in the processor/detecting device by interfacing part and measuring head and executor coupling.Must dissipate the energy that these vibrations are associated safely.For that reason, many users like using the interfacing part of lock bolt at test period, and like allowing manipulator axes unclamp.In this case, vibration is absorbed by the motion of manipulator axes easily, and energy dissipation is in their relevant frictions.On the other hand, if in test period lock-bit manipulator axes securely, so, the part of system resilience difference will mainly absorb vibration.Measuring head and testing among device between interface in electric contact, comprise, for example, under the pin and the probe of spring (pogo) are housed, be accurate physical construction, it absorbs such vibrational energy and may damage or make reduce their serviceable life.In non-lock bolt balanced system, preferably pin some manipulator axes, keep finishing butt joint in test, to make measuring head.For one or more axle is unclamped to absorb vibration, be necessary to allow them keep balance and submissive.Therefore, in the interoperability test head, it is useful keeping an axle to be under the submissive state of balance.
Consideration in addition is, when docking with device processor or detecting device, unbalanced measuring head will be it the out-of-balance force of all or a part be applied on the equipment of butt joint with it.Usually, only such device design is become the supports vertical load.Out-of-balance force may not be vertical, in general, has uncertain size and Orientation.Unknown out-of-balance force can damage instrument potentially, and jeopardizes and be incorporated in the automechanism of wherein handling wafer and device.Therefore, if in measuring head and whole interval that device processor/detecting device docks can in and out-of-balance force, that has just left nothing to be desired.
In addition, in the situation of vertical loading on device processor/detecting device, many traditional executors are balanced types, and its measuring head remains on basic zero gravity state.This makes the normal load of measuring head on device processor/detecting device reach minimum, thereby has simplified its structural requirement.In addition, for the executor that contains the hard-drive Z-axis, can be delivered to fractional load on device processor/detecting device during docking, this has increased the structural requirement to them.Therefore, be preferably in the hard-drive Z-axis executor with vertical compliance, can in the whole time that measuring head keeps with device processor/detecting device docks, keep equilibrium state.In the situation based on pneumatic balanced controls, the final leakage of gas means the forfeiture of equilibrant.
Also have a kind of consideration to be, in containing the test head manipulator systems of pneumatic compliant mechanism,, be necessary usually before butt joint, to make system reach balance at once when measuring head during very near docking mechanism.In some at present known systems, in order to accomplish this point, measuring head must free movement in its whole submissive scope.Rule of thumb, in such equilibrium process, measuring head may be suddenly and is unexpectedly moved significant distance, produces very big impulse force.Moving like this causes and the collision of the service of connection devices potentially, causes accurate electric contact to suffer damage.In addition, operating personnel also may be among the danger.
Because measuring head becomes increasing and becomes increasingly complex, the imbalance in the critical movements axle also correspondingly increases.Importantly, there is a kind of measure to neutralize these imbalances, so that measuring head can be handled and locate effectively and under operator and the two security situation of instrument.
A kind of technology that has proposed is to use one or more cylinders, and for example, the double acting pneumatic cylinder is offset out-of-balance force.Such cylinder has two gas feeds and is assemblied in piston between them.First gas feed is called as stretches out import, and second gas feed is called as the withdrawal import.Piston moves according to the draught head on its both sides.Be attached to connecting rod and the cylinder coaxial on the piston and pass an end, so that linear force and motion are applied in the load.If stretching out pressure in the input greater than the pressure in withdrawal input, so, connecting rod is stretched from cylinder.Otherwise, if the pressure in withdrawal input greater than the pressure that is stretching out in the input, so, connecting rod is withdrawn into cylinder.Can comprise position transducer, with the position of indicator piston.Therefore, be understandable that such piston and suitable control system can with specific axis, for example, pitch axis uses explicitly.Along with measuring head obtains handling and butt joint, control system will pump into gas on demand stretches out in import or the withdrawal import, to eliminate any out-of-balance force and submissive motion is provided.Can imagine that the double acting pneumatic cylinder will provide the class spring action; That is, when pressure reduction had been adjusted to the out-of-balance force of offsetting axle, to reach balance mobile with very little power really as it can to make measuring head.
Owing to several respects reason, this method is very difficult to realize.At first, unique feedback mechanism is a position of piston.Secondly, sealing is used in the pneumatic cylinder, that the gas that passes the cylinder end to opposite side with from connecting rod from a side of piston is leaked reach minimum.These sealings in motion path provide static friction and kinetic friction.Usually, pneumatic cylinder presents the characteristic that is called " shaking off power (break away force) ".The power of shaking off of pneumatic cylinder is to overcome static friction and allow the piston required power of moving in cylinder.Static friction (stiction) can be quite big, and in time, use and temperature change.Stiction is often than moving or friction of motion is much bigger.So in order to cause change, control system is adjusted draught head on demand, till detecting position change (that is, motion) at least, then, motion is analyzed, be adjusted to required result.Because stiction (static friction), the draught head of setting in motion may and often significantly greater than with the combined laod unbalance of the kinetic friction of pneumatic cylinder.This can cause non-linear very big and unsettled control problem.Especially aspect the dynamic property of stiction component, firm solution is difficult to realize and keep.
The double acting pneumatic cylinder provides the possibility of the unbalanced useful measure in the compensating test head axle; But, need new method to realize useful solution.Second purpose of the present invention provides the measure with the advantage of firmly utilizing it of the shortcoming that overcomes the double acting pneumatic cylinder.
In exemplary embodiment, the out-of-balance force at least one measuring head axle of main invention compensation is so that can handle, dock and break away from measuring head effectively and safely.The present invention comprises and other parts and new basic control scheme power source that combine, as aforesaid at least one double acting pneumatic cylinder (for example).The assembly of cylinder and these parts is called as " balancing unit ".In a word, for single axle, at first measuring head with respect to it the supporting structure setting and be locked on the desired position.Therefore, decide measuring head with respect to that shaft lock among considering.Be included in force transducer (that is, two-way load cell) in the balancing unit and measure out-of-balance force, to determine whether to exist significant amount of unbalance and unbalanced direction with respect to lock shaft.Then, adjust the air pressure of double acting pneumatic cylinder both sides,, depend on the weight of measuring head and the characteristic of cylinder, it has been generally acknowledged that 5 to 25 pounds is rational so that the detected power of force transducer is reduced to certain below the predetermined minimum value.Then, discharge lock, the pressure reduction in the pneumatic cylinder is passed to measuring head by connecting rod with power, to offset out-of-balance force.Can want how multifrequency is numerous just repeats this process continually, but make selected measuring head axle remain on balance free movement state.
One according to the present invention one exemplary embodiment of Fig. 1 (a), be used for the skeleton view of the measuring head balanced system of test head manipulator.The balancing unit 110 that contains two ends is provided here.As mentioned above, balancing unit is to be used to make measuring head to keep power source (that is double acting pneumatic cylinder) balance, that combine with other parts and new controlling schemes with respect to an axle.The first end of balancing unit 1101 is connected with measuring head 100.The second end of balancing unit 110 is connected with the supporting structure (not shown) that is used for pivotal axis 102.The purposes of balancing unit 110 is when the center of gravity of measuring head 100 does not overlap with pivotal axis 102, helps measuring head 100 to rotate around pivotal axis 102.In the one exemplary embodiment shown in Fig. 1 (a), balancing unit 110 comprises double acting pneumatic cylinder and associated components thereof, and is as described below.Balancing unit 110 comprises force transducer 120 and power bar 112.Force transducer 110 and 112 couplings of power bar are so that it measures the power along the power bar.Power bar 112 is connected with measuring head 100 by bearing 116a.If the center of gravity of measuring head 100 does not overlap with pivotal axis 102, so, apply a power around pivotal axis 102 by measuring head 100.By it and being connected of power bar 112, force transducer 120 is measured at least one component of this power.
When work, force transducer 120 is used to detect the out-of-balance force from measuring head 100; Then, gas is offered withdrawal import 132 and stretches out import 134, to offset the power that force transducer 120 detects.Therefore, form pressure reduction at piston 130 two ends.The pressure reduction that has enough size and Orientations hereto its objective is the power in the power bar 112 is reduced to less than predetermined maximum size of permitting out-of-balance force.
Still with reference to Fig. 1 (a), pneumatic cylinder 128 also comprises two piston position sensor 136a and 136b, their indicator pistons 130 in pneumatic cylinder 128 with respect to the position of for example controller.For example, limit switch can be used for indicator piston 130 in known manner and whether be in the center, or is on which end of pneumatic cylinder 128.If necessary, can be equipped with complicated more position sensing device.For example, pot, absolute encoder and incremental encoder of containing suitable electron device etc. can be used to provide with respect to pneumatic cylinder 128, with the relevant precise position information in position of piston 130 and connecting rod 114.Best, position sensing mechanism be can demarcate with adjustable, so that system construction, setting and safeguard.
The controller (not shown) be can be equipped with and admission valve 132 and 134 and lock 118 handled, and the feedback signal of receiving position sensor 136a and 136b and force transducer 120.For example, when just starting, for the measuring head 100 that does not dock, usually not to pneumatic cylinder 128 pressurizations with processor.Before any control action, should be noted that to guarantee that measuring head 100 and equipment do not lean against on any foreign body or structure that may disturb balancing run on the horizon.Measuring head 100 has been in relative balance state now, and perhaps, more possibility is in non-equilibrium state.Then, just do not activate lock 118, measuring head 100 is locked on a certain position if also activate lock 118.In some cases, perhaps be necessary earlier measuring head 100 to be moved to a certain desired location.This moving can realize that perhaps, alternatively, controller may be furnished with suitable algorithm by hand gear, utilizes pneumatic cylinder 128 so that it can combine with the position of feedback.It should be noted that for the aforementioned static resistance such control algolithm may be difficult to realize.If before using lock 118, attempt to allow measuring head 100 stop at that this also is so on the desired location.But suitable lock 118 can also be used as detent, along with measuring head 100 moves to desired location, can stop to move by using lock 118.
Now, for being locked in a certain locational measuring head 100, controller responds to the signal that is derived from force transducer 120.Force transducer 120 detects the remarkable out-of-balance force around pivotal axis 102 that whether exists from measuring head 100.Force transducer 120 can detect the size and Orientation of power.If detect significant out-of-balance force, so, adjust withdrawal import 132 and the air pressure that stretches out in the import 134, to reach the purpose of the pressure reduction that produces piston 130 two ends.This pressure reduction at piston 130 two ends has enough sizes, is reduced to less than predetermined maximum permission out-of-balance force with the power that force transducer 120 is measured.When having finished this work, throw off lock 118, measuring head 100 is weightless with respect to pivotal axis 102 basically.Now, can allow measuring head 100 rotate around pivotal axis 102.Can repeat this process on demand, measuring head 100 is remained under the equilibrium state with respect to pivotal axis 102.
Along with measuring head 100 rotates, piston 130 also will move.Similar with mechanical spring, pressure reduction increases with piston displacement is dull.The aerodynamic force and the volume that are applied on the given side of piston 130 increase inversely.But for the relatively little displacement of the change of gas volume, Equivalent Elasticity power is along with displacement approximately linear ground changes, and equivalence " spring constant " is K.That is to say, F=Kx, herein, F is the variable quantity of power and the variable quantity that x is piston position.Best, manage to make K a little bit smaller, so that power can not change on whole range of movement considerably.K part is determined with respect to the pressure change of each piston displacement increment by total gas volume, that is to say, by V and dP/dx decision, herein, V is a volume, and P is a pressure.Along with the end of piston 130 near stroke, it is very little that V becomes, and dP/dx becomes index and increases, and therefore, K increases as F.As mentioned above, can add accumulator (not shown in Fig. 1 (a)).Accumulator is used for significantly increasing available gas volume V, simultaneously dV/dx and dP/dx is limited on the acceptable value.So just reached so-called " soft spring " effect, obviously this is needed.
Ideal situation is, above-mentioned circulation is only carried out once, do not repeat before changing system being done certain.But gas easily takes place in the system of pneumatic cylinder 128 leaks, and therefore, in needs, periodically repeats above-mentioned circulation.Empirical evidence, before the needs repetitive cycling, it is about more than 10 minutes that system will keep enough gas to reach.In typical operation, this circulation repeats automatically every a few minutes (for example, 5 to 8 minutes).In addition, in typical operation, there is no need the step that repetition moves to measuring head 100 desired location.Unless measuring head 100 has run into unexpected hard barrier or some other mishaies, it should remain within its permitted motion scope, really, if being in now, carries out on the ideal functionality desired position measuring head 100, do not wish so, very much to allow measuring head 100 move back on the predetermined desired position.
So shown in Figure 15 (a), in order, sequence of operation in an exemplary embodiment is as follows:
1. shown in step 1501, pin lock 118.
2. shown in step 1502 and 1503, adjust the air pressure intake pressure, the power in power bar 112 less than predetermined value till.
3. shown in step 1504, free lock 118.
4. shown in step 1505, after the time shorter, forward step 1501 to than the time that will from cylinder 128, lose remarkable gas flow.
This sequence makes measuring head 100 turn round as axle 102 centers of gravity of directly passing it; We will claim this to be " normal sequence ".
In exemplary system, step 1501,1502,1503 and 1504 required times were less than 4 seconds.This sequence of steps will be called as " power elimination sequence ".
Still with reference to Fig. 1 (a), two stop collars 122 and 124 or " motion limiter " be attached on the power bar 112, lock 130 is between them. Place stop collar 122 and 124 like this, make that stop collar 122 and 124 is equidistant from the center of lock 118 when the piston in the pneumatic cylinder 128 130 between two parties the time.Distance A between two stop collars 122 and 124 is certain reasonable value littler than the combined stroke of piston 130 in the pneumatic cylinder 128.Therefore, stop collar 122 and 124 prevents that piston 130 from running to the end of cylinder 128, and prevents that piston 130 from removing the load of power bar 112 and force transducer 120, thereby makes the process distortion.They are used as the forward retainer (positive motion stop) of measuring head 100 simultaneously.It should be noted that if system is in non-equilibrium state and lock 118 throws off so, two stop collars 122 or 124 must have one to lean against on the lock 118, and power bar 112 and force transducer bear and measure out-of-balance force.
Can add unshowned other control function in Fig. 1 (a) and go up in the plane system.For example, can be equipped with button, the control sequence of step 1501 that the operator can be started list or step 1502 beginning from above.Can add pilot lamp, remind the operator during with convenient pinning force bar 112; This will help the operator to be avoided attempting moving executor and/or just attempting to dock in execution in step 1502 along axle 102.Such trial will produce additional out-of-balance force on measuring head 100, and system will manage to compensate them mistakenly.Can also the sensor in system and the docking mechanism be combined, for example so that the butt joint in, system become pinning and/or the forbidding.In addition, preferably whether probing test head 100 is on the position of preparing butt joint, and allows sequence just in time be carried out before butt joint.This will guarantee not carry out this sequence when butt joint takes place reality, and guarantee to compensate out-of-balance force best before the butt joint beginning.
The another kind of Control Circulation that will be called as " lock sequence " is possible with useful in selected application.In lock sequence,, keep measuring head 100 with respect to approximate centre position, axle 102 place when measuring head 100 during away from the equipment that will dock with it (not shown in Fig. 1 (a)).This is " a required latched position ".When manipulation measuring head 112 entered in the position of preparing butt joint, the power of calling was eliminated sequence; That is to say, adjust the air pressure in the pneumatic cylinder 128, till the power in having eliminated power bar 112 effectively.Then, free lock 118, just can dock.By manually or utilize the automatic control of pneumatic cylinder 128 and position transducer 136a and 136b, can be placed on measuring head 100 on the required latched position.That is to say that when starting, for the measuring head 100 that does not have butt joint, controller will at first make lock 118 inoperative.Then, measuring head 100 is moved to respect to just on the required latched position of in check axle 102, for example, on the approximate centre position as position transducer 136a and 136b indication.In the situation of control automatically, preferably lock 118 is used as detent, force measuring head 100 to be parked on the required latched position, rather than only it is stopped by pneumatic action.
When preparing to utilize normal sequence to dock, handle measuring head 100 and enter the preparation docking location, lock 118 unclamps simultaneously, and pneumatic cylinder 128 makes measuring head 100 keep balance.Depend on system, when arriving the preparation docking location, operator or sensor will provide prepares the butt joint signal.According to this signal, the power of calling is eliminated sequence, guarantees to make measuring head 100 balance as much as possible.When using the lock sequence method, handle measuring head 100 and enter the preparation docking location, lock 118 engages simultaneously; And, when receiving preparation butt joint signal, only carry out the step 1502 and 1503 of the power elimination sequence of listing above in turn.Now, in each case, for prepare butt joint, just balance and all can free-moving measuring head 100 on all axles, activate and engage docking mechanism, measuring head 100 is pulled in the position of butt joint fully.In some purposes, when the signal (by the operator or by sensor) that has docked fully is provided, use lock 118 once more.When utilizing the measuring head testing integrated circuits, still use lock 118.In both cases, during not docking, still use lock 118, till " clear-of-dock (removing butt joint) " signal is provided by operator or sensor.In both of these case, can implementation capacity eliminate sequence now.In the situation of lock sequence, carry out that at last measuring head 100 is placed on process on the required center and connection locking device 118.In the situation of normal sequence, allow lock 118 unclamp.
As described later, in some applications, in butt joint, preferably allow lock 118 untie.The back also will provide the further information of relevant butt joint.
Fig. 1 (b) has shown and identical system of the described system of reference Fig. 1 (a) that except in Fig. 1 (b), bearing 116a and 116b are coupled, and at the single-point place with outside measuring head 100 is connected.In contrast, in Fig. 1 (a), bearing 116a is connected with measuring head 100 respectively with 116b.
So the balanced controls of describing are applicable to Fig. 6 (a), 6 (b) and 8 (a) etc.The discussion relevant with these figure provides the more information and the details of relevant controlling gas and other item.
Fig. 1 (c) show with reference to the identical system of system shown in Fig. 1 (a), except in Fig. 1 (c), different with the lock 118 shown in Fig. 1 (a) with force transducer 120, used outside the hydraulic locking device 140 that comprises pressure transducer 146a and 146b, the same with the system shown in the figure (1a), the system among Fig. 1 (c) can realize aforesaid normal sequence or aforesaid lock sequence.Fig. 4 (b) provides the more detailed cross sectional view of hydraulic locking unit 140.Here, power bar 112 is attached on the piston 144 of double acting hydraulic cylinder 140.
Shown in Fig. 1 (c), hydraulic cylinder 140 is attached on the pneumatic cylinder 128 rigidly.Be full of suitable incompressible fluid (not shown) in the hydraulic cylinder 140.In hydraulic cylinder 140 inside, piston 144 moves according to the pressure reduction on piston 144 both sides.Each side of piston 144 comprises the conduit 152 interconnective fluid inlets 154 through passing operation valve 142.On operation valve 142 1 sides is pressure transducer 146a and 146b, and each is connected with one of two fluid inlets 154.
Because hydraulic fluid is incompressible basically, therefore, when closed control valve 142, has pinned power bar 112.When opening operation valve 142, power bar 112 can move freely.Motion is only flowed by the fluid that flows through system and is hindered.This flowing can be controlled by the aperture and the valve operation of flexible pipe, conduit, aperture.Can form the system damping that has benefit to the suitable control of flowing.Although the pressure on piston 144 both sides is identical at operation valve 142 turn-off transients,, the out-of-balance force that measuring head 100 is applied on the power bar 112 increases the pressure on piston 144 1 sides, and the pressure on piston 144 opposite sides is reduced.Draw the size and Orientation of the power of pressure differential indicative function on power bar 112 of determining by two pressure transducer 146a and 146b thus.
The operation of the system shown in Fig. 1 (c) is just as described at the system of Fig. 1 (a), except activating hydraulic valve 142, rather than mechanical caging device 118, and by controller read with the output of processing pressure sensor with outside the power in the indication power bar 112.
In operating process, pressure transducer 146a and 146b are used to indicate the out-of-balance force from measuring head 100; Air is offered the withdrawal import 132 of pneumatic linear actuator 128 and stretches out import 134, with the power of offset pressure sensor 146a and 146b detection.Fig. 4 (a) provides the more detailed sectional view of hydraulic cylinder 128.By having entered withdrawal import 132 and having stretched out the air pressure of import 134, form pressure differential at piston 130 two ends.The pressure differential that has enough size and Orientations hereto its objective is the power in the power bar 112 is reduced to less than predetermined maximum size of permitting out-of-balance force.
In Fig. 1 (c), make measuring head 100 keep the process of balance as follows with respect to pivotal axis 102.Along with operation valve 142 is opened, measuring head 100 is in the desired position with respect to its supporting structure (not shown), then, and closed control valve 142.At this moment, because operation valve 142 has been closed, measuring head 100 is lockable with respect to pivotal axis 102.Pressure transducer 146a and 146b detect the remarkable out-of-balance force around pivotal axis 102 that whether exists from measuring head 100, and pressure transducer 146a and 146b can survey the size and Orientation of power.If detect significant out-of-balance force, so, adjust withdrawal import 132 and the air pressure that stretches out in the import 134, to reach the purpose of the pressure differential that enlarges piston 130 two ends.For the pressure differential at piston 130 two ends, its objective is that pressure reduction is enough greatly to be reduced to the power of pressure transducer 146a and 146b measurement the size less than predetermined maximum permission out-of-balance force.At this moment, operation valve 142 is opened, and measuring head 100 is weightless along the direction of pivotal axis 102 basically.Now, measuring head 100 can move along the direction of pivotal axis 102.Can repeat this process on demand, so that measuring head 100 is remained on equilibrium state with respect to pivotal axis 102.
Fig. 1 (d) shows and the identical system of system shown in Fig. 1 (c), and except in Fig. 1 (d), bearing 116a and 116b are coupled, and at the single-point place with outside measuring head 100 is connected.In contrast, in Fig. 1 (c), bearing 116a is connected with measuring head 100 respectively with 116b.
Fig. 2 (a) shows other one exemplary embodiment of the present invention.Fig. 2 (a) illustrates balancing unit 110 is applied to be installed in skeleton view on the roll axis (pivotal axis) 102 of the measuring head 100 on the conventional stent 200.Measuring head 100 is connected with support 200 on two end points of roll axis 102.Balancing unit 110 with two ends is provided here.The first end of balancing unit 110 is connected with measuring head 100.The second end of balancing unit 110 is connected with support 200.Support 200 is the supporting structures around the measuring head of roll axis 102.
If the center of gravity of measuring head 100 does not overlap with roll axis 102, so, measuring head 100 will be around roll axis 102 rotations, away from the position shown in Fig. 2 (a).Balancing unit 110 will provide counter-force, make the center of gravity of measuring head 100 keep balance with respect to roll axis 102, to keep the position of measuring head 100 among Fig. 2 (a).Therefore, because measuring head 100 is weightless with respect to roll axis 102 now basically, be convenient to by manually making the rotation of measuring head 100 around axle 102.
Fig. 2 (b) shows and the identical system of system shown in Fig. 2 (a), and except in Fig. 2 (b), bearing 116a and 116b are coupled, and at the single-point place with outside measuring head 100 is connected.In contrast, in Fig. 2 (a), bearing 116a is connected with measuring head 100 respectively with 116b.
Fig. 3 (a) has shown another one exemplary embodiment of the present invention.Fig. 3 (a) illustrates balancing unit 110 is applied to skeleton view on the pivotal axis 102 of measuring head 100.Measuring head 100 supports by supporting arm 302 and clamped flanges 300.Bearing 305 is contained in the inside of measuring head 100.In the outside of measuring head 100, supporting arm 302 is connected with clamped flanges 300.Balancing unit 110 with two ends is provided here.The first end of balancing unit 110 is connected with measuring head 100.The second end of balancing unit 110 is connected with clamped flanges 300.Clamped flanges 300 is supporting structures of pivotal axis 102.
If the center of gravity of measuring head 100 does not overlap with pivotal axis 102, so, measuring head 100 will be around pivotal axis 102 rotations of passing bearing 305, away from the position shown in Fig. 3 (a).Balancing unit 110 will provide counter-force, so that the center of gravity of measuring head 100, is kept the position of measuring head 100 among Fig. 3 (a) with respect to pivotal axis 102 balances.Therefore, because measuring head 100 is weightless with respect to pivotal axis 102 now basically, be convenient to by manually making measuring head 100 motions.
Fig. 3 (b) shows and the identical system of system shown in Fig. 3 (a), and except in Fig. 2 (b), bearing 116a and 116b are coupled, at the single-point place with outside measuring head 100 is connected.In contrast, in Fig. 3 (a), bearing 116a is connected with measuring head 100 respectively with 116b.
Although just be described with 110 couples of the present invention of single balancing unit of single axle 102 coupling,, two or more unit can be applied on single axle or the many axles.When using more than one unit, they can interact.The The whole control scheme is preferably considered this potential interaction.For example, if two unit are used to control two independently pivotal axis, so, should handle one at every turn.It is contemplated that three or more unit can be successfully used to control the measuring head of installing with as the ball bearing of describing in background of invention.
Fig. 5 (a) show according to a present invention one exemplary embodiment, be applicable to that out-of-balance force is very little or do not have out-of-balance force, and the submissive substantially driving mechanism 512 of the transverse axis that mainly causes by friction of Compliant Force.In Fig. 5 (a), dull and stereotyped 504 and dull and stereotyped 500 representatives be used in as, for example authorize that PCT international application that people, name such as Holt be called " test head manipulator (TEST HEAD MANIPULATOR) " US00/00704 number is described, the flat board in the structure of executor pedestal with one or more built-in tangential movement axle.As shown in the figure, two linear guides 503a and the 503b layout that is parallel to each other, and be attached to rigidly on dull and stereotyped 504 the upper surface.Two pairs of ball slide blocks, first pair comprises ball slide block 502a and 502b, and second pair comprise ball slide block 502c and 502d, is attached on dull and stereotyped 500 the bottom surface.The first couple of ball slide block 502a and 502b are arranged to make they and linear guides 503a to be coupled slidably, and the second couple of ball slide block 502c and 502d are arranged to be coupled slidably with linear guides 503b similarly.So dull and stereotyped 500 is parallel with dull and stereotyped 504, and on dull and stereotyped 504, and flat board 500 can move linearly with respect to dull and stereotyped 504 along the axle that is limited by linear guides 503a and 503b.Such layout can realize inside and outside motion or side-to-side movement in the test head manipulator pedestal.It should further be appreciated that, such layout also be applicable to as, for example, authorize PCT international application that people such as Holt, name be called " test head manipulator (TEST HEADMANIPULATOR) " US00/00704 number described, by the oscillating motion that with respect to the horizontal plane causes around Z-axis rotation horizontal plate.Shown in Fig. 5 (a), the resistance of motion is to be caused by the friction force relevant with 503b with linear guides 503a with ball slide block 502a, 502b, 502c and 502d.For convenience's sake, shown in Fig. 5 (a), dull and stereotyped 50 along linear guides 503a and 503b, to the motion of being used as towards the motion of the direction of linear actuators 508 to " interior " direction, and rightabout motion be used as to " outside " motion of direction.
Comprise that stationary element 506 actuator motor 510, linear actuators 508 is attached on dull and stereotyped 504.Usually, linear actuators 508 comprises by electric motor driven ball screw framework, and driver part is a ball-screw.But,, also can use other mechanism and/or thread type as long as be suitable for given application.In Fig. 5 (a), the driver part of linear actuators 508 is actuator shafts 514, and when to actuator motor 510 energy supplies, it stretches out and/or be withdrawn into the stationary element 506 from stationary element 506.The direction of motion of actuator shaft 514 is by the sense of rotation decision of actuator motor 510.As shown, linear actuators 508 be arranged to make actuator shaft 514 with the linear guides 503a plane parallel with 503b in move.
There is the axial aperture that becomes nominal right angle of its direction and actuator shaft 514 on the top of actuator shaft 514.The U-shaped folder latch 518 of U-shaped folder 516 and the aperture that passes actuator shaft 514 is coupled actuator shaft 514 and compliant shaft 520.The axle of compliant shaft 520 is preferably coaxial basically with the axle of actuator shaft 514; But those of ordinary skill in the art should be understood that other layout also is fine.
The submissive retainer 522 that stretches out and the submissive retainer 524 of withdrawal all are attached on the compliant shaft 520 rigidly, have one on every side of lock 118.Shown in Fig. 5 (a), the submissive retainer 522 that stretches out is between lock 118 and U-shaped folder 516; And the submissive retainer 524 of withdrawal is between the far-end and lock 118 of compliant shaft 520a.These submissive retainers 522 and 524 act as restriction compliant shaft 520 with respect to dull and stereotyped 500 move about, perhaps, equivalently, dull and stereotyped 500 the moving about of restriction with respect to compliant shaft 520.If connection locking device 118, dull and stereotyped 500 can be under the driving of external force, deduct on the scope of moving about that the width " W " of lock 118 limited in the distance " D " between two submissive retainers 522 and 524 and to move, and this also defines the submissive scope of motion.That is to say that along with lock 118 frees (and preferably cutting out linear actuators 508), dull and stereotyped 500 can move along linear guides 503a and 503b on the distance that is limited by D-W under the driving of the external force that is enough to overcome above-mentioned Compliant Force.
In general, with ball slide block 502a, 502b, 502c and 502d, and the linear guides 503a friction relevant with 503b greater than the friction between compliant shaft 520 and the lock 118.So if lock 118 is freed, and to 520 energy supplies of linear actuators motor, so, compliant shaft 520 is with respect to lock 118 and dull and stereotyped 500 motions.If to actuator motor 510 energy supplies, so that actuator shaft 514 stretches out from stationary element 506, so, the submissive retainer 522 that stretches out moves along the direction of lock 118.If actuator motor 510 is not closed, so, along with the end that arrives submissive scope, the submissive retainer 522 that stretches out leans against on the lock 118; Then, actuator shaft 514 further stretch out make dull and stereotyped 500 with respect to dull and stereotyped 504 to " outside " direction moves.In addition, if to actuator motor 510 energy supplies, actuator shaft 514 is withdrawn in the stationary element 506, so, the submissive retainer 524 of withdrawal moves along the direction of lock 118.If actuator motor 510 is not closed, so, along with the end that arrives submissive scope, the submissive retainer 524 of withdrawal leans against on the lock 118; Then, the further withdrawal of actuator shaft 514 makes flat board 500 move to " interior " direction with respect to dull and stereotyped 504.
In operating process, preferably compliant shaft 520 location be locked in its with respect on the position in range of movement of dull and stereotyped 500, in the small neighbourhood of certain pre-reconnaissance.Usually, this point is the mid point between two submissive retainers 522 and 524; But, exist preferred application on the some positions that make this point be positioned at more close two submissive retainers 522 or 524.This neighborhood is called " submissive neutral region ".Submissive neutral region is the sub-fraction of whole submissive scope normally; For example, 40 in the middle of the total submissive scope of 50mm ± 3 or 4mm.
When lock 118 is between submissive neutral region and the submissive retainer 522 that stretches out, generally claim it to be in " the submissive zone of stretching out ".Similarly, when between the submissive retainer 524 of lock 118 in submissive neutral region and withdrawal, generally claim it to be in " submissive withdrawal zone ".
Shown in Fig. 5 (a), position transducer 528 is merged to come in, to survey dull and stereotyped 500 relative positions with respect to compliant shaft 520.Position transducer 528 can be to wait until any of many kinds of known types in the combination range of limit switch, proximity transducer, stadimeter etc. from precision encoding device, pot.As ability at least, position transducer 528 is should indicating mechanism current to be in for which of three scopes: submissively stretch out, submissive neutrality, still submissive withdrawal.
The operation of compliant mechanism 512 is described now.At first, free lock 118.Then, linear actuators 508 and position transducer 528 are combined use compliant shaft 520 is positioned on the predetermined submissive neutral position.Now, pin lock 118, and linear actuators 508 is used for dull and stereotyped 500 desired location that are positioned at respect to dull and stereotyped 504.For example, desired location can be the position with interoperability test head or load (not shown).Now, close linear actuator motor 510, and free lock 118.Now, when being ordered about the last docking location that enters it along with measuring head or load, dull and stereotyped 500 can for example, move in submissive mode under the driving of the power that docking mechanism produces in external force.According to specific application and/or user preference, in case arrive last docking location, lock 118 can or not pin again.Equally, according to specific application and/or user preference, when untiing measuring head or load, lock 118 can or not pin.But,, before starting the motion of flat board 500, should compliant shaft 520 be placed and is locked in the submissive neutral position according to the process of front by linear actuators 508 in case break away from.
Fig. 5 (b) shows the alternate embodiments of Fig. 5 (a).In figure (b), hydraulic mechanism 513 replaces lock 118 and submissive retainer 522 and 524 of Fig. 5 (a).Especially, the main body of double acting hydraulic cylinder 140 be attached on dull and stereotyped 500 and the actuator shaft 514 of the axis of its cylinder barrel and linear actuators 508 spool in a plane.And as shown in Fig. 5 (b), dull and stereotyped 50 towards moving of the direction of linear actuators 508 are being motion to " interior " direction along linear guides 503a and 503b, and rightabout motion be to " outside " motion of direction.Cylinder 140 off-line actuators 508 end farthest is " external part " 532, and cylinder 140 is " withdrawal ends " 533 near an end of linear actuators 508.Piston 144 is positioned at the inside of hydraulic cylinder 140; And piston 144 is connected with axle 520b, and 520b is coaxial with the cylinder barrel of hydraulic cylinder 140 for axle, and stretches out by the withdrawal end 533 of hydraulic cylinder 140.Axle 520b is as the part of compliant shaft 520, and it is by being connected with actuator shaft 514 with U type folder latch 518 with reference to the described U-shaped folder 516 of Fig. 5 (a).In Fig. 5 (b), second 520c that is attached to the opposite side of piston 144 passes through external part 532 extensions of hydraulic cylinder 140.This second 520c is as the extension of compliant shaft 520, and the position transducer among Fig. 5 (b) is surveyed the position of this 520c with respect to flat board 500.But it can also be feasible to save the possible extra cost that is equipped with second 520c with first 520b operation that combines that system layout is become to make position transducer 528.
Each of hydraulic cylinder 140 two ends all is furnished with the port one 54 that makes suitable hydraulic fluid flow into or flow out cylinder 140.Two port ones 54 interconnect from the outside via valve 142 by conduit 152.Valve 142 is arranged to: when opening it, fluid can freely flow out from a port, flows into another port; And when closing it, fluid can not flow between two ports.That entire mechanism is full of is suitable, incompressible fluid basically.The selection of fluid should be considered if produce the possible deleterious effects that leakage can take place in system.In addition, because system often will be placed on temperature than loading and transporting in the much lower aircraft hold of the freezing point of water, fluid should have low solidifying point.Because fluid is incompressible, obviously, when valve-off 142, piston can not move along either direction.But, along with valve 142 is opened and since the path that fluid can be provided by port one 54, conduit 152 and the valve of opening 142 freely from a side flow of piston 144 to opposite side, therefore, piston 144 can move.When valve-off 142, pinned compliant shaft 520 basically with respect to the hydraulic cylinder 140 and the motion of adhering to the flat board 500 of cylinder 140 on it.Therefore, along with valve 142 is closed, the operation of linear actuators 508 makes dull and stereotyped 500 axles along linear guides 503a and 503b qualification move with respect to dull and stereotyped 504.But, along with valve 142 is opened, dull and stereotyped 500 can be under the driving of external force, and in the defined scope of moving about of the effective stroke of piston 144 (being substantially equal to the thickness that interior distance between the end walls of cylinder 140 deducts piston 144), the axle that limits along linear guides 503a and 503b moves; And this defines the submissive scope of motion.That is to say that along with valve 142 is opened (and preferably closing linear actuator motor 510), dull and stereotyped 500 can on the distance that the effective stroke by piston 144 limits, move along linear guides 503a and 503b under the driving of external force.
In general, along with valve 142 is opened, with piston 144 in hydraulic cylinder 140, move relevant friction and other power less than with linear guides 503a and 503b and ball slide block 502a, 502b, the 502c friction force relevant with 502d.So, if valve 142 is opened and to 510 energy supplies of linear actuators motor, so, compliant shaft 520 is with respect to hydraulic cylinder 140 and dull and stereotyped 500 motions.If so that actuator shaft 514 is stretched from stationary element 506, so, piston 144 is towards external part 532 motions of cylinder to actuator motor 510 energy supplies.Now, if do not close actuator motor 510, so, along with the end that arrives submissive scope, piston 144 leans against on the end wall of external part 532 of cylinder 140.Then, actuator shaft 514 further stretch out make dull and stereotyped 500 with respect to dull and stereotyped 504 to " outside " direction moves.If to actuator motor 510 energy supplies, actuator shaft 514 is withdrawn in the stationary element 506, so, piston 144 moves towards the withdrawal end 533 of cylinder 140.Now, if actuator motor 510 is not closed, so, along with the end that arrives submissive scope, piston 144 leans against on the end wall of withdrawal end 533 of cylinder 140.In addition, the further withdrawal of actuator shaft 514 makes flat board 500 move to " interior " direction with respect to dull and stereotyped 504.
In operating process, preferably piston 144 (and link to each other compliant shaft 520) with it locate and be locked in its range of movement with respect to flat board 500, on the position in the small neighbourhood of certain pre-reconnaissance.Usually, this point is the mid point between 140 two end points of cylinder; But, have preferred application on the some positions that make this point be positioned at more close two end points.We will call this neighborhood " submissive neutral region " once more.Submissive neutral region is the sub-fraction of whole submissive scope normally; For example, 40 in the middle of the total submissive scope of 50mm ± 3 or 4mm.
When piston 144 is between the external part 532 of submissive neutral region and cylinder 140, it is generally acknowledged that it is in " the submissive zone of stretching out ".Similarly, when piston 144 is between the withdrawal end 533 of submissive neutral region and cylinder 140, it is generally acknowledged that it is in " submissive withdrawal zone ".
As Fig. 5 (a), be associated with position transducer 528, to survey dull and stereotyped 500 relative positions with respect to compliant shaft 520.Position transducer 528 can be many kinds of known types any in the scope of the combination of waiting until limit switch, proximity transducer, stadimeter etc. from precision encoding device, pot.As ability at least, position transducer 528 is should indicating mechanism current to be in for which of three scopes: submissively stretch out, submissive neutrality, still submissive withdrawal.
The operation of mechanism 513 is described now.At first, open valve 142.Then, linear actuators 508 is used in combination with position transducer 528, piston 144 is positioned on the predetermined submissive neutral position.Now, valve-off 142 is locked in piston 144 and compliant shaft 520 in the submissive neutral position, and linear actuators 508 is used for dull and stereotyped 500 desired location that are positioned at respect to dull and stereotyped 504.For example, desired location can be the position with interoperability test head or load (not shown).Now, close linear actuators 508 and open valve 142.Now, when ordering about measuring head or load and enter its last docking location, dull and stereotyped 500 can for example, move in submissive mode under the driving of the power that docking mechanism produces in external force.According to specific application and/or user preference, in case arrive last docking location, valve 142 can be closed or not close.In addition, also according to specific application and/or user preference, when untiing measuring head or load, valve 142 can be closed or not close.But,, before starting the motion of flat board 500, should compliant shaft 520 be placed and is locked in the submissive neutral position according to the process of front by linear actuators 508 in case break away from.
Fig. 5 (c) shows that to be used for out-of-balance force very little or do not have and the another kind of exemplary submissive driving mechanism 550 of the transverse axis that Compliant Force is mainly caused by friction.The layout of two flat boards 500 and 504, linear guides 503a and 503b, ball slide block 502a, 502b, 502c and 502d and linear actuators 508 is described identical with reference Fig. 5 (a) basically with purpose.In addition, compliant shaft 520 with the similar manner shown in Fig. 5 (a), be connected with actuator shaft 514 by U-shaped folder 516 and U-shaped folder latch 518.Shown in Fig. 5 (c), dull and stereotyped 50 along linear guides 503a and 503b, is motion to " interior " direction to the motion towards the direction of linear actuators 508, and rightabout motion be to " outside " motion of direction.
Mounting bracket 554 and outer mounting bracket 552 in compliant shaft 520 is passed, these two supports are attached to the downside of flat board 500 rigidly, interior mounting bracket 554 than outer mounting bracket 552 more near linear actuators 508.Best, compliant shaft 520 can be with respect to mounting bracket 552 and 544, and along the axle free movement of inward-outward direction, and ball slide block 502a, 502b, 502c and 502d can be used to finish this task.Submissive retainer 556 is being attached on the compliant shaft 520 on the position between two mounting brackets 552 and 554 rigidly.
The stationary element of outer centering actuator 558 is attached on the outer mounting bracket 552, and the stationary element of interior centering actuator 560 is attached on the interior mounting bracket 554.In case these two centering actuators 558 and 560 each driver parts are suitably to actuator 558 or 560 energy supplies, just from stationary element stretch or be withdrawn into plunger the stationary element or ball screw framework (for convenience's sake, we with term " plunger " refer to each all be suitable for, the ins and outs each type driver part clearly).Two actuators 558 and 560 are installed in the opposite direction, made plunger or ball-screw coaxial basically and parallel, and make that plunger or ball screw framework are to stretching out towards the direction of submissive retainer 556 when energy supply suitably with the axle of compliant shaft 520.
As can be seen, if fully withdrawal of actuator plunger 564 and external actuator plunger 562 one or both of in making, so that between the far-end of submissive retainer 556 and actuator plunger 562 and 564 one or both of, have the space, so, just form the scope of submissive motion.If this state is met, so, dull and stereotyped 500 can by be enough to overcome except mounting bracket 552 and 554 and the friction force of compliant shaft 520 also have the external force of the friction force of ball slide block 502a, 502b, 502c and 502d and linear guides 503a and 503b to drive down, move along linear guides 503a and 503b.Available submissive motion total size equals the thickness that distance between the far-end of two actuator plunger 562 and 564 deducts submissive retainer 556.So, in the system of Fig. 5 (c), if necessary, can be by the scope of centering actuator 558 and the submissive motion of 560 controls; Yet in the system of Fig. 5 (a) and 5 (b), submissive zone is fixed.
It can also be seen that, if inside and outside actuator plunger 564 and 562 both stretch out respectively, make both lean against simultaneously on the submissive retainer 556, so, on the dull and stereotyped 500 a certain positions that are fixed on respect to compliant shaft 520.Then, linear actuators 508 can be used for moving and locate flat board 500 with respect to dull and stereotyped 504.
In general, relevant with 503b with linear guides 503a with ball slide block 502a, 502b, 502c and 502d friction is greater than the friction between compliant shaft 520 and inside and outside mounting bracket 554 and 552 respectively.So, if centering actuator plunger 562 or 564 one or both of are withdrawal fully, make submissive motion become possibility, then to 520 energy supplies of linear actuators motor, so, compliant shaft 520 and submissive retainer 556 are done the motion with respect to inside and outside mounting bracket 554 and 552 respectively.If to actuator motor 510 energy supplies, actuator shaft 514 is stretched out from stationary element 506, so, submissive retainer 526 moves along the direction of external actuator plunger 562.If actuator motor 510 is not closed, so, along with the end that arrives submissive scope, submissive retainer 556 leans against on the external actuator plunger 562.Then, further stretching out of actuator shaft 514 makes dull and stereotyped 500 to move with respect to dull and stereotyped 504 outward directions.On the contrary, if to actuator motor 510 energy supplies, actuator shaft 514 is withdrawn in the stationary element 506, so, submissive retainer 556 moves along the direction of interior actuator plunger 564.If actuator motor 510 is not closed, so, along with the end that arrives submissive scope, submissive retainer 556 leans against on the interior actuator plunger 564.Then, the further withdrawal of actuator shaft 514 makes flat board 500 move with respect to dull and stereotyped 504.
In operating process, preferably compliant shaft 520 location be fixed on its with respect on the position in range of movement of dull and stereotyped 500, in the small neighbourhood of certain pre-reconnaissance.Usually, this point is the mid point of two inside and outside centering actuators 560 and 558; But, exist this point to be positioned at preferred application on some positions of more close two centering actuators 560 and 558.We will call this neighborhood " submissive neutral region " once more.Submissive neutral region is the sub-fraction of whole submissive scope normally; For example, 40 in the middle of the total submissive scope of 50mm ± 3 or 4mm.
When submissive retainer 556 is between the far-end of submissive neutral region and external actuator plunger 562, generally claim it to be in " submissive exterior lateral area ".Similarly, when submissive retainer 556 is between the far-end of submissive neutral region and inside and outside actuator plunger 562, generally claim it to be in " submissive medial region ".
Such just as discussed below, if follow suitable centering actuator and design process, need not to survey the sensor of flat board 150 with respect to the relative position of flat board 504, also can realize the useful system of the sort of type among Fig. 5 (c).But, for this purpose can be included position transducer 528 (not shown) alternatively, with realize may be more complicated system.Position transducer 528 can be to wait until any of many kinds of known types in the combination range of limit switch, proximity transducer, stadimeter etc. from precision encoding device, pot.As ability at least, position transducer 528 is should indicating mechanism current to be in for which of three scopes: submissive inboard, submissive neutrality, the still submissive outside.
In order to realize not having the system of position transducer 528, preferably use such centering actuator 558 and 560, this centering actuator 558 and 560 can be controlled to the plunger 562 and 564 that can make them and move along assigned direction, up to the degree of the whole scope of moving about that arrives it.Such actuator 558 and 560 can be simple must be as solenoid device with plunger 562 and 654, in case energy supply, it is elongated to its gamut at once, and in case outage, under the driving of spring, withdrawal fully.The actuator 558 and 560 that comprises motor and screw mechanism also is feasible.If hard retainer is included in actuator 558 and 560, to prevent that screw rod from walking far, if and it is overheated to prevent that suitably motor from occurring when stall, can be enough to make its to arrive in its time span of the limit of moving about, along the simple drive screw of known direction.In addition, the motor-driven screw actuator can comprise limit switch, to send the signal of the end points that reaches the scope of moving about.Another kind of alternative plan can comprise stepper motor, and, coming the control position by the step number of control motor, may combine with one or more limit switches.Second requirement is each actuator plunger 562 of design and 564 or the length of stroke of screw rod and inside and outside mounting bracket 552 and 554 and the layout of centering actuator 558 and 560, to reach required result.Concrete criterion comprises: stretch out state following time fully when actuator 558 and 560 boths are in, submissive retainer 556 is firmly remained on the required submissive neutral position; Be in complete retracted mode following time as actuator 558 and 560 boths, realize the submissive scope of required motion.
The operation of the mechanism of the Fig. 5 (c) that does not have position transducer is described now.At first, to centering actuator 558 and 560 energy supplies with the plunger 562 that stretches out them fully and 564 or screw rod.This makes dull and stereotyped 500 to move on the submissive neutral position with respect to compliant shaft 520.Notice, in the system of Fig. 5 (c), realize in the step of submissive neutral position that dull and stereotyped 500 move when compliant shaft 520 maintenances are static at this; Yet in the system of Fig. 5 (a) and 5 (b), dull and stereotyped 500 are maintained fixed, and compliant shaft 520 moves, to achieve this end.Now, actuator 558 and 560 be in they plunger 562 and 564 or screw rod remain in the position of stretching out fully, cause under dull and stereotyped 500 states that remain in the submissive neutral position.For turning off power supply simply and just can realize to the motor-driven actuator of rear drive.For other actuator, for example, perhaps solenoid actuator is necessary to keep applying superincumbent electric excitation.For the flat board 500 that so remains in the submissive neutral position, linear actuators 508 is used for dull and stereotyped 500 desired location that are positioned at respect to dull and stereotyped 504 then.For example, desired location can be the position with interoperability test head or load (not shown).Now, close linear actuator motor 510, and with withdraw they plunger 562 and 564 or screw rod think that the mode that submissive motion forms a zone controls centering actuator 558 and 560.Now, when ordering about measuring head or load and enter its last docking location, dull and stereotyped 500 can for example, move in submissive mode under the driving of the power that docking mechanism produces in external force.According to specific application and/or user preference, when arriving last docking location, centering actuator 558 and 560 can or be not used in respect to dull and stereotyped 504 lockings dull and stereotyped 500 effectively.In addition, also according to specific application and/or user preference, when measuring head or load are broken away from, can or not make dull and stereotyped 500 to remain in a certain position by centering actuator 558 and 560.But,, before starting the motion of flat board 500, should compliant shaft 520 be placed and is locked in the submissive neutral position according to the process of front by linear actuators 508 in case break away from.
The system of flat board 500 with respect to the position transducer 528a (not shown) of the position of compliant shaft 520 that survey described now according to also comprising of Fig. 5 (c).In such system, use motor operation centering actuator 558 and 560, be the most practicable so that utilize the effective feedback position.Actuator plunger 562 and 564 or the layout of the whole stroke of screw rod and actuator 558 and 560 so important in the system that does not have position transducer 528a as mentioned above.Actuator 558 and 560 is arranged to: when their plunger 562 and 564 boths suitable submissive scopes of realizing motion when withdrawing fully; And when they stretch out fully plunger 562 and 564 to arrive submissive neutral position at least just enough.When arrive the submissive neutral position except position transducer 528a is used to indicate submissive retainer 556, its operation is identical with the system that does not have position transducer 528a basically.In addition, if use scrambler or potentiometer-type position transducer 528a, in the system of Fig. 5 (c), and in the system of Fig. 5 (a) and Fig. 5 (b), by programming Control system suitably, need not to change physical construction, just can change the position of submissive neutral region.
The mechanism of Fig. 5 (a) (and Fig. 5 (b) and Fig. 5 (c)) also can be applied to pivotal axis, and wherein, motion is main body or the load rotation around axle, rather than along the axle translation.This technology also can be applied to rotate the combination with translation.Fig. 7 shows the compliant mechanism that is applied to around the main body 100 of Z-axis 102 rotations.This is identical with yaw motion in the test head manipulator.Compliant mechanism among Fig. 7 has also shown the embodiment of the mechanism among alternative Fig. 5 (a).Specifically, the mechanism among Fig. 5 (a) has the removable main body (dull and stereotyped 500) on actuator shaft 514 or screw rod that is attached on the arm (compliant shaft 520) and the lock 118 that is attached to the last operation of arm (compliant shaft 520).In Fig. 7, the layout of lock 118 and arm (power bar 112) has been turned around; That is to say that actuator shaft 514 or screw rod 514 are coupled with the lock 118 of operation on power bar 112, power bar 112 is coupled with removable main body 100 again.As can be seen the operation of Fig. 7 fully and the class of operation of Fig. 5 (a) seemingly.The feature that is included among Fig. 7 is discussed in more detail below.
The embodiment of Fig. 5 (a) to 5 (c) has set forth explanation to the compliance of the kinematic axis in the surface level or there is not the one exemplary embodiment of other situation of any significant out-of-balance force.Fig. 6 (a) and Fig. 8 (a) illustrate and the equilibrant of offsetting out-of-balance force is provided and can is the mechanisms of the compliance in significant, the driving shaft that change with the position and often uncertain at out-of-balance force.These mechanisms are called as " the submissive actuator of balance (BCAA) ".
In Fig. 6 (a) and 8 (a), main body 100 representatives can be around the heavy duty (that is, measuring head) of pivotal axis 102 rotations, the place that pivotal axis 102 is in a close surface and departs from the suitable distance of described main body center of gravity.The part of the fixed sturcture of the main body 600 representative supporting pivotal axis 102 among Fig. 6 (a) and 8 (a).For example, main body 100 can be represented measuring head, its pitch axis or roll axis are near the dut interface, and main body 600 can be represented the support bracket fastened part of measuring head, the equipment supporting that the measuring head fixed support is connected by the principal arm with the test head manipulator (not shown) again.In following discussion, except as otherwise noted, suppose that pitch axis 102 is in the surface level.Note,, make its center of gravity not just in time below pitch axis 102 if main body 100 rotates, so, the imbalance that the moment that is caused by the weight of main body 100 causes the position with main body 100 to change.Therefore, Compliant Force comprises and overcomes this moment and friction and such as rope force other may act on required power.
As Fig. 6 (a) and the mechanism shown in 8 (a) with describing be included in name be called " be used for test head manipulator measuring head balanced system (A Test Head Balancing System for a Test HeadManipulator), authorize the notion of explanation in No. the 60/234th, 598, people such as Ny and the U.S. Provisional Patent Application that transfers the assignee identical with the application.In particular, in No. the 60/234th, 598, provisional application, Fig. 1 (a), 1 (c), 2 (a), 3 (a), 4 (a) and 4 (b) have been explained.
Although do not illustrate,, in Fig. 6 (a) and 8 (a), hinting, there is system controller.System controller is carried out control sequence, and control signal is offered actuator and valve, and the back will be described these.In addition, system controller receives operator's input and from the feedback signal of sensor, the back also will be described these.
In a word, Fig. 6 (a) and 8 (a) both comprise around pivotal axis 102 drive main bodys 100 linear actuators 508, comprise lock 118, power bar 112 and two submissive retainers 522 and 524 so that main body 100 do submissive motion compliant mechanism, measure the force transducer 120 that is applied to the out-of-balance force in the power bar 112 and generate the double acting pneumatic cylinder 128 of equilibrant with the compensation out-of-balance force.
Fig. 6 (a) is quite similar with 8 (a).Unique difference between them is, how to support the main body of double acting pneumatic cylinder 128.So, the common trait of this two figure is described below together; And, the difference between them is described respectively in due course.
At Fig. 6 (a) and 8 (a) among both, the stationary element 506 of linear actuators 508 comprises being attached to its motor 510 on the main body 600 by means of bearing 620.The driver part of linear actuators 508 is actuator screw 514, and when to motor 510 energy supplies, actuator screw 514 is stretched out or is withdrawn into the stationary element 506 from stationary element 506; In particular, if to motor 510 energy supplies, motor is rotated along first sense of rotation, screw rod (actuator) stretches out from stationary element 506; And if to motor 510 energy supplies, motor is rotated in the opposite direction, screw rod (actuator) is withdrawn in the stationary element 506.Actuator screw 514 is ball screw normally; But,, can use screw rod or other actuator devices of other type in suitable place.
Power bar 112 is attached on the main body 100 by bearing 116a.As shown in the figure, power bar 112 engages 118 far-ends that are attached to actuator screw 514 by means of machine screw rod or other proper device rigidly of lock by lock 118.Lock 118 can be any of well-known several types in the prior art.The type that depends on selected lock can be controlled it by the input of electric signal, gas or other measure that is suitable for application-specific.When lock 118 activated, it caught power bar 112 securely, and then, the bar 112 of exerting all one's strength is attached on the actuator screw 514 effectively in the mode of rigidity.Therefore, when lock was engaged, restriction main body 100 was with respect to actuator screw 514 motions.When discharging lock 118, power bar 112 can slide along lock 118, and along parallel with the axle of actuator screw 514 basically rectilinear motion.Therefore, when moment is had no regard for pneumatic cylinder 128 and any out-of-balance force, by activating lock 118, linear actuators 508 can be used to make main body 100 around pivotal axis 102 with respect to main body 600 rotations.In addition, when not having lock-bit lock 118,100 pairs of enough external force of main body are reacted, with respect to actuator screw 514 and main body 600 free movements; Therefore, realized the submissive motion of main body 100 with respect to main body 500.That is to say, along with lock 118 is released, response external force, realization body 100 is around its pivotal axis 102 and with respect to the submissive motion of main body 600.In order to limit the scope of submissive motion, the submissive retainer 522 that stretches out and the submissive retainer 524 of withdrawal are attached on the power bar 112 rigidly.The submissive retainer 522 that stretches out is between lock 118 and main body 100.The submissive retainer 524 of withdrawal is between the far-end of the opposite of lock 118 and lock 118 and power bar 112.
Aforementioned submissive retainer 522 and 524 is used for stretching out under the situation of certain-length at linear actuators 508, and restraint bar 112 moves about with respect to main body 600.If rod lock device 118 does not engage, power bar 112 can be under the driving of the external force that acts on main body 100, in that the distance " C " between the submissive retainer 522 and 524 deducts on the scope of moving about that the width " L " of rod lock device 118 limits and moves by two, and this also defines the submissive scope of motion of main body 100.That is to say, along with rod lock device 118 released (and preferably closing linear actuator motor 510), main body 100 can turn over by the corresponding sports determined angle of power bar 112 through distance C-L around pivotal axis 102 under the driving of the external force that is enough to overcome Compliant Force.In Fig. 6 (a) or 8 (a), along with lock 118 moves with respect to power bar 112, the piston 130 in the pneumatic cylinder 128 also will move.Total effective stroke of piston 130 is designed so that it is important that piston 130 and pneumatic cylinder 128 are not interfered with submissive retainer 522 and 524.
As can be seen, if lock 118 is untied and make main body 100 rotate an angle, so that its center of gravity is just in time below pivotal axis 102, so, two submissive retainers 522 and 524 must have one will lean against on the lock 118.Whether this moment around pivotal axis 102 that is the weight of main body 100 causes be enough to overcome static friction in the system, because the situation that pneumatic cylinder 128 and piston 130 act on the power on the main body 100 and act on any power in the system.In this state, obviously, will make main body 100 around pivotal axis 102 rotations to actuator motor 510 energy supplies.This may not be the optimal operations pattern; On the contrary, it is a situation about should be careful when one exemplary embodiment of the present invention is considered the various sequence of operation.
In operating process, preferably lock 118 move and be locked in its range of movement with respect to power bar 112, on the position in the small neighbourhood of certain pre-reconnaissance.Usually, this point is the mid point of two submissive retainers 522 and 524; But, have preferred application on the some positions that make this point be positioned at more close two submissive retainers 522 or 524.We will call this neighborhood " submissive neutral region ".Submissive neutral region is the sub-fraction of whole submissive scope normally; For example, 40 in the middle of the total submissive scope of 50mm ± 3 or 4mm.
Still with reference to Fig. 6 (a) and 8 (a), when lock 118 is between submissive neutral region and the submissive retainer 522 that stretches out, generally claim it to be in " the submissive zone of stretching out ".Similarly, when between the submissive retainer 524 of lock 118 in submissive neutral region and withdrawal, generally claim it to be in " submissive withdrawal zone ".
Perhaps be necessary to make main body 100 to be in equilibrium state,, then, move to submissive neutral position so that lock is untied.This balance can comprise in many possibility modes, for example, makes center of gravity be positioned at the following of pivotal axis 102 and/or apply external force and realize.But just as explained above, the purpose of pneumatic cylinder 128 and piston 130 provides the may command source of equilibrant.
Be equipped with position transducer 612 to visit the position of dynamometer link 112 with respect to lock 118.Position transducer 612 can be to wait until any of many kinds of known types in the combination range of limit switch, proximity transducer, stadimeter etc. from precision encoding device, pot.As ability at least, position transducer 612 is should indicating mechanism current to be in for which of three scopes: submissively stretch out, submissive neutrality, still submissive withdrawal.
Be equipped with the power that double acting pneumatic cylinder 128 contends with any out-of-balance force with generation.Its objective is to make the clean power and/or the moment that act on the main body 100 minimize to acceptable level, so that make main body 100 do submissive motion with respect to main body 600.When achieving this end, can think that main body 100 is under " equilibrium state ".Note,, may have " the remaining unbalanced force " that become total submissive component of force when being under the equilibrium state.In Fig. 6 (a), double acting pneumatic cylinder 128 is attached on the main body 600 by means of suitable installation hardware 624 and bearing 622.In Fig. 8 (a), double acting pneumatic cylinder 128 utilizes support to be attached on the lock 118.In Fig. 6 (a) and 8 (a), pneumatic cylinder 128 comprises the piston 130 with connecting rod 114 couplings, and connecting rod 114 is coaxial with the axle of cylinder 128.Connecting rod 114 passes the end of pneumatic cylinder 128, stretches to main body 100, and it is by bearing 116b and main body 100 couplings.Although Fig. 6 (a) and 8 (a) illustrate by means of two release bearing 116a and 116b and are attached to connecting rod 114 and power bar 112 on the main body 100, but, as shown in others Fig. 8 (b) identical with Fig. 8 (a), other alternative structure also is fine, comprise and use support etc., so that bar 114 and 112 both and main body 100 coupled in common are in the same place by means of bearing 116a and 116b.Fig. 8 (b) shows lock 118 and the cylinder 128 that is coupled with support 800, and support 800 is coupling bar 114 and 112 effectively.
Gases at high pressure supply 602 is provided for operating the source of the gas of pneumatic cylinder 128.Usually, in the semiconductor test facility, the air pressure that per inch is 80 to 100 pounds be fit to obtainable.Pneumatic cylinder 128 contains two gas feeds 132 and 134, one sides at piston 130, every end of usually close cylinder 128.First gas feed 132 is by means of conduit and first accumulator 608a coupling, and second gas feed 134 is by means of conduit and second accumulator 608b coupling.The first and second accumulator 608a and 608b are coupled with the first and second valve 604a and 604b respectively by means of conduit, and the first and second valve 604a and 604b are by means of suitable conduit and gas supply device 602 couplings.The first and second valve 604a and 604b are controlled by unshowned controller.
In addition, two valve 604a and 604b each all have and make gas discharge the blow vent of cylinder 128 and accumulator 608a and 608b.Each of valve 604a and 604b can be in one of following three positions:
" injection phase " makes gas flow into accumulator 608a and 608b and cylinder 128 from gas supply device 602.
" ventilation position " makes gas be discharged to the atmosphere from accumulator 608a and 608b and cylinder 128 by blow vent.
" off-position " stops gas to flow into by valve 604a and 604b or flows out accumulator 608a and 608b and cylinder 128.
Many different structures of valve (604a and 604b) all can have been bought on market.For example, except single separate valve (604a and 604b) as shown in the figure, can also exist as lower unit, this unit comprises two valves, be in the injection phase if it is configured to a valve, another is in drain position, so, when from a side injecting gas of piston 130, discharge gas automatically from offside.
As noted above, the purpose of pneumatic cylinder 128 is the power that generates compensating action out-of-balance force in load, and in this example, load is a main body 100.For example, suppose that main body 100 rotates an angle around pivot, make its center of gravity depart from pivotal axis 102 in the horizontal direction.So, the weight of main body 100 be form that the direction of the point below center of gravity being moved to straight pivotal axis 102 fortunately works, around the out-of-balance force of the torque of pivotal axis 102.The size and Orientation of this torque is a weight, and the function of the size and Orientation of rotation angle, and wherein, rotation angle is a center of gravity with respect to the horizontal shift of pivotal axis 102 inverse sine divided by 102 bee-line gained ratio from the center of gravity to the pivotal axis.Out-of-balance force is found out it is a variable, and is the function of load situation.Pneumatic cylinder 128 is according to draught head on piston 130 both sides, the power of nucleus formation on its piston 130.This power is transmitted along connecting rod 114, acts on the position of being determined by the extended line of the axle of continuous bar 11 and the main body on the direction 100.Equipment is arranged to make this root line of force not intersect with pivotal axis 102 in the scope of the rotation angle of whole concern.Therefore, piston 130 can produce on the main body 100 torque around pivotal axis 102, and this torque equals the uneven torque that the weight of main body 100 causes, direction is opposite with the direction of the uneven torque that the weight of main body 100 causes, thereby, make main body 100 reach equilibrium state.The power that is generated by pneumatic equipment is called as " equilibrant " here.
In operating process, valve 604a and 604b are in off-position usually.In order to increase the pressure on the side that acts on piston 130, (604a or 604b) switches to the injection phase respective valves.The pressure change that obtains is the current pressure in the cylinder 128, the pressure of gas supply device and the function of the time span that valve (604a or 604b) is worked.For the pressure on the given side that reduces to act on piston 130, (604a or 604b) switches to drain position respective valves.Here, the pressure change of obtaining is the function of the time span of current pressure in the cylinder 128 and valve (604a or 604b) work.Therefore the shortest time length decision of valve (604a or 604b) work is depressed minimum pressure increment in the cylinder 128 that can realize at given initial cylinder.Usually, the shortest time is 8 to 10 microseconds.The minimum equilibrant increment that can act on the connecting rod 114 is determined by the Minimum Increment of pressure and the product of areas of piston 130.By suitable alternative pack and parameter, can realize equilibrant increment, and how this decision can as far as possible closely offset out-of-balance force less than 2 pounds.
If equilibrant is by pneumatic cylinder 128 and piston 130, and main body 100 is on the ad-hoc location with respect to main body 600 to be set up, if and main body 100 is mobile a little with respect to main body 600 now, so, piston 130 moves in cylinder 128, and the power of setting up of contending with will change and change along with the gas volume on piston 130 each side.In particular, with the mechanism spring-like seemingly, pressure differential increases along with the displacement of piston 130 is dull.The aerodynamic force and the volume that are applied on the piston 130 given sides change inversely.But, changing relatively little displacement for gas volume, Equivalent Elasticity power is with displacement, and equivalence " spring constant " K approximately linear ground changes.That is to say, F=Kx, wherein, F is that the change and the x of power is the change of piston 130 displacements.Best, manage to make K a little bit smaller, so that power can not change on whole range of movement considerably.K is partly determined with respect to the pressure change that every piston 130 displacement increments cause by volume of gas, that is to say, by V and dP/dx decision, herein, V is a volume, and P is a pressure.Along with the end of piston 130 near its stroke, it is very little that V becomes, and dP/dx becomes exponentially and increases, and therefore, K increases as F.Can add aforesaid accumulator come in, be used for significantly increasing V, and dV/dx and dP/dx are limited on the acceptable value.Low relatively and constant value K so just are provided in submissive scope, in other words, have reached so-called " soft spring " effect, this obviously is needed.
After each parts of briefly having described the equipment shown in Fig. 6 (a) and 8 (a), the further details and the operation of elaboration system now.
In order to realize equilibrium state, at first pin lock 118, move to prevent main body 100.Then, controller responds to the signal that is derived from force transducer 120, and operated valve 604a and 604b by rights are so that be applied on the main body 100 equilibrant.Controller is adjusted equilibrant, has enough size and Orientations up to it, and with till the size of the power in the power bar 112 being reduced to the size less than predetermined threshold, predetermined threshold represent the minimum out-of-balance force of permitting.Depend on environment, this threshold value is usually less than 5 to 10 pounds; And if the design of taking into account system, it can be low to moderate 1 to 2 pound.When this state had been met, main body 100 was considered to be in " equilibrium state ", and the difference between the equilibrant that original out-of-balance force and piston 130 generate will be called as " remaining out-of-balance force ".
Suppose now under the equilibrium state of main body 100 sd sos, and lock 118 locks and is positioned at the place away from one of two submissive retainers 522 and 524.If present unlocked device 118, so, if any remaining out-of-balance force, comprises the effect of shaking off power relevant with pneumatic cylinder 128 and piston 130 less than the stiction in the system, main body 100 and lock 118 are just mobile.If reach this state, so, main body 100 is considered to " complete equipilibrium ".But if remaining out-of-balance force is enough to overcome all stiction, so, main body 100 is considered to " be close to balance ".If main body 100 be close to balance and lock 118 be released, lock 110 will move towards one of two submissive retainers 522 or 524.Whether lock 118 leans against depends on the submissive retainer (522 or 524) how out-of-balance force and equilibrant change as the function of position change.Should be understood that and realize the bigger precision of complete equipilibrium state requirement, so, require higher system cost, then, realize being close to equilibrium state.
Situation when introducing now term " submissive standby condition " and representing that main body 100 is in equilibrium state and power bar 112 and is in submissive neutral region.In general, preferably equilibrium state is the complete equipilibrium state, if so that lock is untied, so, main body 100 does not move.
In the ordinary course of things, can suppose that main body 100 beginning is not in equilibrium state, and be on the optional position with respect to main body 600.Also hypothesis will reach submissive standby condition.In this case, out-of-balance force is by power bar 112 and force transducer 120 supportings and measurement.If if lock 118 is in the state of untiing and out-of-balance force is quite big, so, power bar 112 most possibly is in this end or that end of its submissive scope; And out-of-balance force will be delivered to actuator screw 514 from power bar 112 by the lock 118 that leans against on the submissive retainer (122 or 124).But if lock 118 is in lock-out state, so, out-of-balance force directly is delivered to lock 118 from power bar 112, thereby is delivered to actuator screw 514.
The possible mode that has the required submissive standby condition of several realizations.But, before any control action, should be noted that to guarantee that main body 100 and miscellaneous equipment do not lean against on any foreign body or structure that may interfere balance on the horizon and submissive scope positioning action.In some cases, be necessary that perhaps a main body 100 at first moves in certain desired location.Under these circumstances,, so, at first activate lock 118, then, utilize linear actuators 508 to produce required motion if lock 118 does not also activate.If present, moving of other manipulator axes perhaps also is necessary.Described mobile can the realization by manual measure, manual measure can comprise utilizes button command to make controller handle linear actuators 508.Alternatively, controller can be furnished with suitable algorithm, makes it utilize the linear actuators 508 that combines with position feedback in the positioning sequence automatically.For the main body 100 that is in the desired location, there are several possibilities that reach submissive standby condition.The existing details of using is depended in the design of concrete grammar and selection.As described below is two kinds of institute's choosing methods, and represent each can applicable note.In both of these case, suppose that lock 118 is not on the submissive neutral position.
Method 1: shown in the process flow diagram among Figure 15 (b), this method need be designed to the balance fruit to system and always cause the complete equipilibrium state, and it comprises following series of steps:
1. shown in step 1510, if lock 118 also is not lockable, so, lock-bit it.
2. shown in step 1511,, make main body 100 reach balance according to aforementioned process.
3. shown in step 1512, unlocked device 118.
4. shown in step 1513, linear actuators 508 is used for lock 118 is positioned at submissive neutral position.
5. shown in step 1514, pin lock 118 once more.
6. shown in step 1515, make main body 100 reach balance once more, the unbalanced any change that causes with regulating step 1513.
7. shown in step 1516, main body 100 present complete equipilibriums and be in submissive standby condition, lock 118 pins simultaneously.
Notice that step 1513 requires to satisfy two conditions and could realize.At first, the balance that requires to realize in step 1513 is the complete equipilibrium state, and when being released with convenient lock 118, main body 100 is maintained fixed motionless.Secondly, require friction force between lock 118 and the power bar 112, comprise the power of shaking off of piston 130 in the pneumatic cylinder 128 less than the stiction of the remainder of system.
Method 2: shown in the process flow diagram among Figure 15 (c), this method does not need that system is designed to balance and always causes the complete equipilibrium state.It can be worked under balance is the situation of complete equipilibrium or intimate balance.It comprises following series of steps:
Shown in step 1520, unlocked device 118.
Shown in step 1521, according to the feedback from position transducer 612, controller function valve 604a and 604b to handle the gaseous tension in the double acting pneumatic cylinder 128, make piston 130 along moving with respect to lock 118 displacing force bars 112 required directions.This causes power bar 112 to do moving with respect to lock 118 along required direction.
Shown in step 1522, when arriving submissive neutral position, moving in the aborting step 1521.Lock 118 can be ended to move as detent.
Shown in step 1523, pin lock 118.
Shown in step 1524,, make main body 100 reach balance according to aforementioned process.
Shown in step 1525, main body 100 is in submissive standby condition now, but may not complete equipilibrium.
Notice that in step 1521 and 1522, piston 130 is initial thruster (mover.With regard to the system's static friction of shaking off power that especially comprises piston 130, control algolithm with respect to lock 118 detent force bars 112 may be difficult to realize (noting, in method 1, controlled initial thruster in the linear actuators 508, and it provides enough power to overcome system's stiction usually).If attempt to allow main body 100 stop on the desired location before using lock 118, this is especially true.But suitable lock 118 also can be used as detent, along with main body 100 moves on the required submissive neutral position, can use lock 118 and force Mobile Termination.
In test head manipulator systems, two one of may be moved probably after reaching submissive ready position.First kind of possibility is that measuring head 100 is prepared butt joint.In this case, can move it a little, so that butt joint actuator and butt joint guide (not shown in Fig. 6 (a) and 8 (a)) at first engage.The service of connection devices is designed to usually, and in such position, accurate electric contact does not also engage, and does not have impaired risk.This little amount of movement is not enough to interfere submissive ready position usually.If lock 118 is lockable, now just it can have been discharged.Be enough to cause mobile small remaining out-of-balance force if exist, move and only cause the contact that forms between the guide member that matches of the service of connection devices.Main body 110 can move now submissively, and the butt joint actuator can engage now, measuring head 100 is pulled in the complete docking location.
Second kind of possibility is by means of manipulator apparatus (not shown in Fig. 6 (a) and 8 (a)) measuring head 100 to be moved to reposition from current location.In this case, lock 118 preferably is lockable, and keeping submissive neutral position, and linear actuators 508 can be used for main body 100 is moved to the required second place on demand.It should be noted that the out-of-balance force that acts on above it will probably change along with main body 100 works are so mobile.So, when main body 100 arrives the described second place, should make it reach balance once more.In case reach balance, because main body 100 still is locked in the submissive neutral position, therefore, it is in submissive standby condition.If desired, can discharge lock 118, and main body 100 can move submissively around pivotal axis 102.
Ideal situation is that the process that reaches submissive standby condition is only carried out once, before system being comprised for example main body 100 certain change of position with respect to main body 600, repeats.But gas easily takes place in the pneumatic cylinder system leaks and the corresponding pressure loss, therefore, in needs, should periodically repeat to realize balance or the required process of submissive standby condition.In exemplary embodiment, before needs repeated required process, system kept enough gas to reach about more than 10 minutes.In typical operation, circulation repeats automatically every a few minutes (for example, 5 to 8 minutes).Be that when long-time interoperability test head, equilibrant will be lost by the another kind consideration that gas leaks and the gas pressure difference loss causes.For example, when test continues many hours perhaps many minutes the time, will this thing happens.In butt joint, keep measuring head securely by docking mechanism, can not rebulid equilibrant by preceding method.Therefore, for disengaging, must at first pin lock 118, so that keep main body 100 securely with respect to actuator screw 514.Then, the disengaging campaign that is driven by the butt joint actuating mechanism should be such, does not need the relative motion between main body 600 and 100.As alternative method, system can be furnished with optional pressure sensor (600a, 606b), and, along with the butt joint beginning, just can write down the pressure of cylinder 128.Then, just in time before breaking away from, the pressure of cylinder 128 can be recovered, so just suitable equilibrant can be recovered.This will make lock 118 unclamp, and make main body 100 do submissive moving when breaking away from.
So far, pivotal axis 102 has been in and has done discussion in the horizontal plane, this is enough to illustrate principle of the present invention.But pivotal axis 102 may be in other direction and also be fine.The concrete structure of considering is the situation of vertical pivot axis, and wherein main body 100 is represented the supporting structure of executor cylinder, and the executor cylinder is supporting measuring head again.In this case, pivotal axis 102 is corresponding to the yawing axis of executor.Because may there be out-of-balance force in the crooked power that generates of measuring head rope in such axle.Compare with the out-of-balance force that foregoing because gravity causes, do not have gravity in this case, the out-of-balance force that rope causes will change in uncertain mode in general.However, obviously, the mechanism of Fig. 6 (a) or Fig. 8 (a) still can be used for providing effectively the driving yawing axis of compliance with rope force and contending with property.For example, Fig. 6 (b) shows the BCAA of the type shown in the Fig. 6 (a) that is applied to pivotal axis, and in the case, pivotal axis is vertical, that is, and and yawing axis.It can also be seen that,, can ignore, so, can use the reduced form of the mechanism that does not contain double acting pneumatic cylinder 128 shown in Fig. 6 (a) and relevant device effectively if rope force is very little.Therefore, Fig. 7 shows the application without any need for the yawing axis 102 of counter-force.The difference of Fig. 7 and Fig. 6 (a) is, has removed the counter-force equipment of force transducer 120 and pneumatic cylinder 128.The compliant mechanism of Fig. 7 and Fig. 5 (a) is similar, except in Fig. 7, actuator rod 514 directly with lock 118 couplings, rather than be coupled with bar such as bar 520.
As mentioned above, the BCAA of Fig. 6 (a) and 8 (a) is quite similar.From these two kinds of structures, select any details of using usually based on the physical layout of purposes.For example, Fig. 8 (a) will be suitable for axle 102, and the required scope situation more much bigger than the required scope of submissive motion of the motion in the linear actuators 508 thus.This is because in Fig. 8 (a), the stroke of cylinder 128 inner carriers 130 only need be enough to adapt to submissive motion; Yet the stroke of piston 130 must adapt to the gamut of motion in the axle 102 among Fig. 6 (a).Therefore, in Fig. 8 (a), can use less and more cheap pneumatic cylinder 128 and piston 130 assemblies.Fig. 6 (a) is that preferred example is the situation that has space constraint, and this space constraint will stop closely puts all parts of BCAA together.Especially, in Fig. 6 (a), pneumatic cylinder 128 and piston 130 sub-components can be positioned at the place away from the subassembly that comprises actuator 508, lock 118, power bar 112 and associated components and sensor.
Fig. 9 (a) shows and is used in typical examples of applications in the typical effector system application, two the submissive actuator of balance (BCAA) mechanisms shown in Fig. 8 (a).In Fig. 9 (a), a mechanism influences the yaw axis 934 of measuring head 100, and second mechanism influences the pitch axis 936 of same measuring head 100.Also be equipped with the single control system that does not illustrate for simplicity, realized required control two BCAA and whole effector system.
In Fig. 9 (a) measuring head 100 has been shown, it has test interface on end face 901.DUT plate 900 provides the device and the measuring head pin electronic circuit that is positioned at measuring head 100 inside among will testing
(not shown) is required interface circuit and the connection device of butt joint suitably.
Also with cut-away show three of comprising in four three, four pilot pins, 912 numbers in the middle of the butt joint cams 910, rope 915, rope driver 917 and butt joint controller 914 a part to connected components 916.In a word, for with measuring head 100 and testing apparatus, for example, butt joints such as device processor (not shown), wafer prober, at first handle measuring head 100, so as pilot pin 912 parts insert the cooperation be attached on the testing apparatus in the cooperation guide hole (not shown) on the connected components (not shown).Here, the cam follower (not shown) to the cooperation on the connected components (not shown) of butt joint cam 910 engaged fit.Now, can apply external force, make 914 rotations of butt joint handle, thereby make 917 rotations of rope driver.Along with 917 rotations of rope driver, by rope 915 its motions of transmission, butt joint cam 910 is rotated synchronously, so just measuring head 100 is pulled in its final docking location.When butt joint processor 914, rope driver 910 and butt joint cam 910 are pulled in its position, wish that measuring head 100 can both move submissively to measuring head 100 in all six-freedom degrees.Figure 12 that will discuss (a) will illustrate in greater detail this butt joint in 12 (d) in the back.In addition, this butt joint is to quote improvement for your guidance, that use two pilot pins 912 and the 4th, No. 489815 described interfacing part of United States Patent (USP) cam 910, that authorize Smith hereby.Also have, such other interfacing part has used three pilot pins 912 and cam 910.Further information sees also the inTEST handbook.
Measuring head 100 be installed in as, for example, authorize the United States Patent (USP) the 5th, 030,869 and 5,450 of Holt, on the typical rope pivot cup 924 of No. 766 and the described test head manipulator (not shown) of inTEST handbook.Fig. 9 (a) shows the measuring head fixture 926 that is attached on the rope pivot cup 924, and first end of measuring head support beam 922 is attached on the described measuring head fixture 926.The axle of measuring head support beam 922 and the planar quadrature of rope pivot cup 924, and the extended line of axle passes the center of rope pivot cup 924.Aperture 920 on measuring head support beam 922 extend through measuring heads 100 rear portions is attached on the outer shroud 904 of round bearing assembly 905 rigidly.Interior ring 902 is arranged at inside, and is supported by the outer shroud 904 of round bearing assembly 905.Inner and outer rings 902 and 904 is respectively circular, coplane and concentric.Yaw axis 934 is vertical with 904 plane with two rings 902, and passes their common center.Interior ring 902 rotates around yaw axis 934 in the inside of outer shroud 904.Two attached shaft 906 are passed the slit in the outer shroud 904, and with interior ring 904 and drive tab 908 couplings, drive tab 908 is fixed on the both sides of measuring head 100, and it is shown on the vertical plane parallel with measuring head support beam 922.Drive tab 908 can be rotated measuring head 100 around the pivotal axis 936 by attached shaft 906 definition.
Six cam follower (not shown) bear interior ring 902 loads that are applied on the outer shroud 904 when doing to hang down the friction weaving as supporting device.In the middle of the cam follower (not shown) three are near 120 ° the place of being separated by the inner periphery line of outer shroud 904, bear the radial load on the direction vertical with yaw axis 934.Other three cam follower (not shown) equally spaced also are arranged in the inside of outer shroud 904 in front between three in the mode of the supporting axial load parallel with yaw axis 934.
Generally speaking, rope pivot cup 924 supporting measuring head fixtures 926.Measuring head fixture 926 is supporting the measuring head support beam 922 that limits the roll axle.Measuring head support beam 922 is supporting outer shroud 904, and ring 902 in outer shroud 904 supportings.Interior ring 902 provides yaw axis 934 and supports attached shaft 906.Attached shaft 906 supporting measuring heads 100 also provide pitch axis 936.This layout make measuring head 100 can be around pitch axis 936 (being shown as level) rotation ± 5 ° with around yaw axis 934 (being shown as vertical) rotation ± 5 °, wherein, yaw axis is vertical and vertical with measuring head support beam 922 each other mutually with pitch axis.Physical constraint in the unshowned system and mechanism's retainer are limited in respectively the scope of pitch axis and yaw axis in Fig. 9 (a) by being built in for simplicity ± 5 ° in.In addition, the position transducer (not shown) can be included in known manner, offers control system with indication measuring head 100 with respect to the relative position of pitch axis 936 and yaw axis 934 with this information.
If need not to allow all rotating shafts all centroidal just can provide balance submissive motion, that is favourable.In Fig. 9 (a), have with the submissive actuator 930 of two balances and 932 of same type shown in Fig. 8 (a) and as previously mentioned and be used to eliminate pitch axis 936 and yaw axis 934 for making the necessity of the submissive motion centroidal of balance.
Two BCAA 930 are arranged to make their power bar 112 generally parallel with the roll axle of measuring head support beam 922 definition with connecting rod 114 with 932.Yaw BCAA 930 is oriented to make along the power of power bar 112 or connecting rod 114 effects and will produces non-zero moment around yaw axis 934.Similarly, pitching BCAA932 is oriented such that along the power of power bar 112 or connecting rod 114 effects and will produces non-zero moment around pitch axis 936.The stationary element 506 of two BCAA 930 and 932 linear actuators 508 suitably is attached on the measuring head fixture 926 by means of bearing 620.
Importantly, two BCAA 930 and 932 can interact each other and operate minimumly.Therefore, preferably yaw BCAA 930 be oriented such that it power bar 112 and connecting rod 114 along the linear function that almost intersects with pitch axis 936.Similarly, preferably also pitching BCAA 932 be oriented such that it power bar 112 and connecting rod 114 along the linear function that almost intersects with yaw axis 934.But shown in Fig. 9 (a), two power bars 112 and two connecting rods 114 are attached to respectively on the measuring head 100, and each root has bearing 116a and 116b respectively.Therefore, can not allow the prolongation axle of power bar 112 of yaw BCAA 930 and the prolongation axle and the pitch axis 936 of connecting rod 114 intersect.In fact, two bars 112 and 114 lean on very closely usually, make parallel with 114 and almost crossing at the straight line and the pitch axis 936 of two bars 112 and 114 centres with two bars 112.Similarly, the prolongation axle of power bar 112 of pitching BCAA932 and the prolongation axle and the yaw axis 934 of connecting rod 114 are intersected.In fact, two bars 112 and 114 lean on very closely usually, make parallel with 114 and almost crossing at the straight line and the pitch axis 936 of two bars 112 and 114 centres with two bars 112.With reference in Fig. 8 (a) and 8 (b) the alternative structure illustrated, BCAA, measuring head 100 ends of power bar 112 and connecting rod 114 can link together with suitable support 800 in front.In addition, illustrated as the front with reference to Fig. 8 (b), can support 116a and the 116b with measuring head 100 couplings be linked together, so that have only a bearing 116b to be connected with measuring head 100.In this case, bearing 116 can be in intersect with the axle of discussing and with power bar 112 straight line parallel with connecting rod 114 boths on.Fig. 9 (b) has shown the system that is furnished with so single bearing 116b.Fig. 9 (b) is identical with Fig. 9 (a) in others.
The operation of the system shown in Fig. 9 (a) and 9 (b) can be described now.In the ordinary course of things, can suppose that measuring head 100 is in non-equilibrium state at first and is in the optional position that the lock 118 of two BCAA 930 and 932 is untied.In the scene of worst case, measuring head 100 leans against on the physical constraint and mechanical stops in the system of being built in, that is to say, exist measuring head 100 is remained in pitch axis 936 and the yaw axis 934 locational remarkable out-of-balance force at its limit of sports record, and out-of-balance force is not supported fully by any parts of two BCAA 930 and 932.First purpose is that measuring head 100 is placed in the submissive standby condition (that is, equilibrium state and submissive neutral position) with respect to pitch axis 936 and yaw axis 934.Pin two BCAA 930 and 932 each locks 118.Then, actuator 508 is used for measuring head 100 is navigated to desirable primary importance place, this position is away from physical constraint in the system of being built in and mechanical stops, and out-of-balance force is supported fully by any of two BCAA 930 and 932 or two lock 118 and linear actuators 508 herein.In addition, this desired position should be such, measuring head 100 can be on its whole submissive scope be moved fully, so that submissive standby condition is achieved under not from any one disturbed condition that may be built in physical constraint in the system and mechanical stops.
Measuring head 100 is moved to desired position can be realized by manual measure, and this manual measure can comprise that utilizing button to instruct makes controller handle linear actuators 508.Alternatively, controller can be furnished with suitable algorithm, makes it utilize the linear actuators 508 that combines with position feedback in the positioning sequence automatically.
For the measuring head 100 among the present desired position, submissive standby condition can have been realized now.In desired position, between two BCAA 930 and 932, share out-of-balance force.That is to say that out-of-balance force is broken down into two component, a component is along 112 effects of yaw BCAA power bar, and another component is along 112 effects of pitching BCAA power bar.Can operate axle successively.At first being an axle, is another root axle then.Because therefore the state of realizing in another root axle before an axle being in may upset under the submissive standby condition, can repeatedly take turns every axle is operated once more, till these two shaft balancings and position are met simultaneously.Utilize known method, can realize control algolithm, make the sequential automation of successively every axle being carried out repetitive operation, till realizing whole submissive standby condition.But in fact, twice of every axle examination is just enough usually.
Select any root axle at first to operate on it and depend on various criterions.In some applications, preferably always at first solve specific axis.In other applications, preferably select it at random.Also have, in other applications, preferably according to the comparative result that acts on the power on each BCAA, select to operate on it first.For example, preferably at first operate on the BCAA to the big component of effect out-of-balance force on it.So the output that can compare two force transducers 120 then, is selected that root axle of uneven component of force maximum as first as.Similarly, you also can select that root axle of uneven component of force minimum.Under each situation, if two components of out-of-balance force so, can be selected this root axle or that axle at random near equating.
Be chosen as that root axle that at first operates on it and be called as first now, another root axle then is called as second.According to suitable process, for example, foregoing method 1 (Figure 15 (b)) or method 2 (Figure 15 (c)) make first to enter in the submissive standby condition now.When doing like this, the lock 118 of second BCAA (930 or 932) is keyed still.When having realized submissive standby condition for first, pin the lock 118 of its BCAA (930 or 932); Then, also can make second enters in the submissive standby condition.In making second process that enters submissive standby condition, the balance of setting up in first may be subjected to a bit disturbing.So, can repeat the process that makes first to enter submissive standby condition.Similarly, also can repeat the process that makes second to enter submissive standby condition.Typical practice is to iterate the submissive standby condition that realizes enough resonable degrees for twice usually simultaneously in two axles.
We can consider to comprise the whole operation of the test head manipulator of two BCAA 930 and 932 now shown in Fig. 9 (a).From being in the measuring head 100 that optional position neutralization dock with any testing apparatus, have BCAA 934 and 936 spool will at first enter lock 118 pinnings the time submissive standby condition.Then, utilize BCAA linear actuators 508 in due course, handle measuring head 100 and enter the butt joint ready position, that is to say, will dock with it at measuring head 100, so that the component of the service of connection devices is near near the position the testing apparatus at abutment.In the docking mechanism shown in Fig. 9 (a), this will be that pilot pin 921 is in neighbouring but also insert cooperates point in the guide hole (not shown).Because hypothesis measuring head 100 is in new direction, therefore, can suppose further that it no longer is balance and submissive standby condition.So the axle with BCAA (934 and 936) enters submissive standby condition simultaneously once more.Now, untie BCAA lock 118, transfer measuring head 100, so that the butt joint actuating mechanism becomes joint.In the measuring head 100 shown in Fig. 9 (a), this appears at pilot pin 912 and has inserted the guide hole (not shown) and cooperated the cam follower on the butt joint combination (not shown) fully to insert in the butt joint cam 910, when butt joint processor 914 can be operated.Start the butt joint actuating mechanism now, measuring head is pulled into complete docking location.In Fig. 9 (a), this realizes by rotation butt joint processor 914.Other butt joint actuating mechanism is known, comprises electronic, pneumatic and the vacuumizing type, can use equally well.In butt joint, measuring head 100 can freely be done submissive motion if necessary.Measuring head 100 can keep docking the very big time interval, and the draught head in the pneumatic cylinder 128 may lose because of leakage.So, in order breaking away from, to keep lock 118 to pin, and to recall measuring head 100, so that need not to do complete submissive motion along the straight line path vertical with test interface surface (not shown).Alternatively, system can be furnished with pressure transducer (606a, 606b), makes that piston 130 each side upward pressure can be noted by the controlled device (not shown) when just in time having realized submissive standby condition before butt joint.Then, before breaking away from, control utilizes this information to recover submissive standby condition, and, break away from no longer relevant with submissive motion.In case measuring head 100 has broken away from, can make BCAA controlled shaft 934 and 936 enter submissive standby condition once more on demand.
Figure 10 a, 10b, 10c, 10d, 10e and 10f have shown that the present invention is applied to many embodiment of Z-axis.
Figure 10 d and 10e are similar.These two all have fixed vertical post 1000, and actuator driving Z-axis is determined by post 1000.In Figure 10 d, the BCAA of the sort of type shown in Fig. 8 a is used to reach balance and submissive state; Yet in Figure 10 e, the BCAA of the sort of type is used for this purpose shown in Fig. 6 a.Following discussion is relevant with the common ground of these two figure.In the place of necessity, point out concrete difference based on the BCAA type.
Always with reference to Figure 10 d and 10e, principal arm 1030 is attached on the post 1000 slidably with the common mode that utilizes track 1058 and straight line pilot bearing (not shown) or circular shaft (not shown) and bearing (not shown).The measuring head (not shown) is by a well-known device (also not shown) and principal arm 1030 couplings arbitrarily.Therefore, principal arm 1030 is supporting load.The vertical movement of principal arm 1030 is subjected to retainer 1032 restrictions.
The stationary element 506a that comprises the linear actuators 508a of actuator motor 510a is attached on the substrate 1003.This actuator 508a is called as main line actuator 508a.The driver part 514a of main line actuator 508a is a screw rod, normally has the ball screw or the trapezoidal screw of suitable pitch and friction, so that can not be to rear drive.Whether no matter power up, main line actuator 508a must support whole load safely.Main line actuator 508a drives the whole vertical range of principal arm 1030 through it, so that the stroke of main line actuator 508a equals the vertical stroke of executor.In fact, stroke reaches 30 inches suitable actuator can be bought on market and obtain, and such executor can correspondingly be designed to have and reach 30 inches vertical stroke.For longer vertical stroke, can use the scalable post of those types shown in Figure 10 a, 10b and the 10c.
Under normal the use, principal arm 1030 will at first be in the submissive standby condition that lock is untied.That is to say that lock 118 is positioned at submissive neutral position with respect to power bar 112, and the gaseous tension in the pneumatic cylinder 128 is adjusted to and makes connecting rod 114 and piston 130 bear whole load basically.In this case, the power of being measured by force transducer 120 almost is zero.And piston 130 preferably is on the submissive neutral position with respect to cylinder 128, makes needn't arrive under the situation of end of its stroke at piston 130, and load just can be moved on its whole submissive scope.Then, main line actuator 508a is used in vertical direction location load.
In the situation of Z-axis, the direction of out-of-balance force is always downward.So, do not need double acting pneumatic cylinder (as shown in the generalized case of Fig. 6 a and 8a); Single-acting pneumatic cylinder 128 with single gas feed 132 is just enough.Therefore, as shown in the figure, have only a three-position valve 604, an accumulator 608 and an optional pressure sensor 606, they are by soft catheter 1010 and 602 couplings of gases at high pressure supply.Soft catheter 1010 allows pneumatic cylinder 128 and its relevant portion with respect to 602 motions of static usually gas supply device.The diameter of cylinder 128 and piston 130 preferably is enough to support principal arm 1030 and the load that is attached to above it.For example, if the combination weight of principal arm 1030 and appended load is 1000 pounds, and the maximum gas pressure that can enter cylinder 128 is 100 pound per square inches, so, preferably at least 10 square inches of the areas of cylinder 128 and piston 130, and respective diameters is at least near 3.57 inches.The diameter of required cylinder 128 is directly proportional with the square root of load.Therefore, load doubles to require the diameter of cylinder 128 to increase by 2 square root, perhaps, alternatively, can allow gaseous tension double (for example, by means of the air pressure dupler).If for giving fixed load, the size of required cylinder 130 is too big, so, can be arranged in parallel two or more less cylinders 128.
Usually, preferably have approximately ± 1 inch vertical submissive motion.Usually, preferably allow the stroke of piston 130 be slightly larger than, so that under lock 118 leaned against situation on the submissive retainer, piston can " not touch the end " by submissive retainer 522 and the 524 submissive scopes of determining.System is designed to, and in operating process, if lock 130 is on its submissive neutral position with respect to submissive retainer 522 that stretches out and the submissive retainer 524 of withdrawing, so, piston 130 is on the submissive neutral position with respect to cylinder 128.During docking, load can be moved on as submissive retainer 522 and the 524 whole submissive scopes that limit.
In Figure 10 (d), cylinder 128 and lock 118 are attached to together mutually rigidly by support 1052, and system can be arranged to easily no matter when lock 118 is on the submissive neutral position, and piston 130 is also on the position of sd so.For example, preferred submissive neutral position is centered positions often " and system can be arranged to when lock 118 is centered between submissive retainer 522 and 524, piston 130 is on the mid point of its stroke.Single position transducer 1046 shown in Figure 10 (d) is enough to that both are positioned on their submissive separately neutral positions lock 118 and piston 130.
In Figure 10 e, lock 118 is not attached on the cylinder 128, and lock 118 can and move with respect to cylinder 128 really.In order to realize that both are positioned at the required target on the submissive neutral position lock 118 and piston 130, need except by shown in information the information that provides of position transducer 1046.Enough with piston 130 or BCAA actuator 508b location information related.In a preferred embodiment, if system is designed to that BCAA actuator 508b fully stretches out and lock 118 is on its submissive neutral position, so, piston also will be on the submissive neutral position.Surveying the state that stretches out fully of BCAA actuator 508b can realize easily with known manner, this known manner comprises uses the limit switch (not shown in FIG.) be included in institute's BCAA actuator 508b assembly of purchasing, and perhaps the terminal point that moves about that is enough to make its arrive it by operation BCAA actuator 508b was realized with the time interval that stops.In the later case, suggestion is used for BCAA actuator motor 510b to the current limliting Voltage Supply Device, makes the possibility that superheating phenomenon occurs reach minimum level.A kind of optional method is to survey the position of piston 130 with respect to its cylinder 128.Pneumatic cylinder-piston component often is equipped with the limit switch (not shown in FIG.) by their fabricator, and this fabricator will allow this detection.
In some applications, be in when piston on any point on its scope of moving about, preferably make BCAA actuator 508b can be on submissive retainer 522 and the 524 whole submissive scopes that limit position and lock device 118.In this case, among Figure 10 e the scope of BCAA actuator 508b be at least the submissive scope stroke that adds upper piston 130 and.In addition, in Figure 10 e, in the process that realizes submissive standby condition, be necessary the position of direct detection piston 130.By contrast, the required scope of BCAA actuator 508b is the greater of the stroke of submissive scope or piston 130 at least among Figure 10 d, and the single position transducer 1046 shown in having only is just enough.
The sequence of operation that realizes submissive standby condition is as follows:
At first, we define " balance sequence ".
Balance sequence (shown in Figure 15 (d))
1. shown in step 1530, pin lock 118.
2. shown in step 1531, adjust the gaseous tension in the cylinder 128, up to force transducer 120 indications be applied to by power bar 112 power on the lock 118 less than threshold value till.
Now, in order to realize submissive standby condition (" submissive preparation sequence 1 ")
Submissive preparation sequence 1 (shown in Figure 15 (e)) (can be applicable to Figure 10 d and 10e)
1. shown in step 1540, carry out the balance sequence.
2. shown in step 1541, unlocked device 118.
3. shown in step 1542a, utilize BCAA actuator 508b that lock 118 is positioned on the submissive neutral position.
4. if system is a sort of type shown in Figure 10 e, shown in step 1542b, pin lock 118, then, shown in the alternative embodiment among the step 1542c, utilize BCAA actuator 508b that piston 130 is positioned on its submissive neutral position.
5. shown in step 1543,, so, repeat the balance sequence if force transducer 120 indication balances are interfered or degenerate (for example) if the power of measuring is greater than the power threshold value.
6. shown in step 1544, if lock 118 pins, so, unlocked device 118.
It should be noted that in submissive preparation sequence 1 the power threshold value that is preferably used for balance must be shaken off making a concerted effort of power less than stiction and pneumatic piston.Otherwise when unlocked device 118 in step 1541, lock 118 will move, and lean against on submissive retainer 522 or 524, and the operation of BCAA actuator 508b will can not make lock 118 do moving with respect to power bar 112.But stiction and pneumatic piston are shaken off making a concerted effort usually in 5 to 10 pounds or bigger scope of power, therefore, and can be 1 to 3 pound of inner equilibrium.
For reason as described later, preferably system is designed to satisfy aforementioned criteria.But, realizing that this criterion is under impossible or unpractical situation, there is the replaceable sequence of other possibility that realizes submissive standby condition.Two kinds of sequences are described now.
First kind of replaceable sequence is by means of the following sequence of operation (" submissive preparation sequence 2 "), utilizes pneumatic cylinder 128 and piston 130 positioning pistons 118:
Submissive preparation sequence 2 (shown in Figure 15 (f)) (can be applicable to Figure 10 d and 10e)
1. shown in step 1550, unlocked device 118.
2. shown in step 1551, from cylinder 130, discharge gas, so that the submissive retainer 522 that stretches out leans against on the lock 118.
3. shown in step 1552, adjust BCAA actuator 508b, (this step requires to use well-known solution, comprises driver part 514b that use location sensor 1046 the surveys actuator 508b position with respect to its stationary parts 506b so that it is near the mid point of its stroke or near its required submissive neutral position.In some cases, actuator 508b is furnished with limit switch, detects driver part 514b and when arrives the terminal point that it moves about; Can be used in combination with timer in a known way, obtain required result).
4. shown in step 1553, gas is injected cylinder 128, the cylinder gaseous tension is increased to the point that makes piston 130 shake off and move up.
5. shown in step 1554, by means of shown in position transducer 1046 monitor the positions of power bar 112 with respect to lock 118 in, continue to adjust the gaseous tension of cylinder 128, make piston 130, and thereby connecting rod 114 and power bar 112 continue to move.
6. shown in step 1555a, when power bar 112 arrives submissive neutral position with respect to lock 118, pin lock 118 and stop to adjust gaseous tension in the cylinder 128.
7. shown in the alternative embodiment among the step 1555b,, so, utilize BCAA actuator 508b that piston 130 is positioned on its submissive neutral position if system is a sort of type shown in Figure 10 e.
8. shown in step 1556, carry out the balance sequence.
Second kind of replaceable sequence is to change design a little.With aforesaid to avoid making piston 130 touch the preference at the end opposite,, so, make piston 130 lean against the lower end of cylinder 128 if system is arranged to not exist in cylinder 128 gaseous tension and lock 118 to free.In fact, the piston 130 that leans against the bottom of cylinder 128 is carried out the function of stretching out submissive retainer 522, and therefore, can dispense the submissive retainer 522 that stretches out from system (should also be noted that, if make piston 130 lean against top as the cylinder 128 of retainer, so, can omit the submissive retainer 524 of withdrawal).Then, can use following " submissive preparation sequence 3 ".
Submissive preparation sequence 3 (shown in Figure 15 (g)) (can be applicable to Figure 10 d and 10e)
1. shown in step 1560, actuator 508a is withdrawn into makes the position of the bottom of its stroke of cylinder 128 inner carriers arrival (depend on design, this can be by the limit switch that is incorporated in the actuator 508a, by along the retracted orientation driving actuator 508a long enough time reaching complete retracted mode, or other known technology is realized).
2. shown in step 1561, unlocked device 118.
3. shown in step 1562, from cylinder 128, discharge gas, so that piston 130 leans against on the bottom of cylinder 128.
4. shown in step 1563, utilize BCAA actuator 508b, lock 118 is positioned on the submissive neutral position.
5. shown in step 1564, carry out the balance sequence.
6. shown in step 1565, keep lock 118 to pin, utilize BCAA actuator 508b to be on the position of submissive neutral position (usually near mid point) with respect to cylinder 128 load is risen to piston 130.
7. shown in step 1566,, carry out the balance sequence once more because the mobile meeting of piston 130 causes appearance imbalance a little.
In submissive preparation sequence 2 and 3, suppose that the friction of rest power that the balance sequence threshold value power that is not less than and shakes off is synthesized together can not get guaranteeing.Therefore, lock 118 should rest on lock-out state, is supported (or other required state) by the service of connection devices up to realization preparation docking location and load part.But, should see that if can allow lock 118 keep freeing, and locate load by means of main actuator 508a in vertical direction, so, position transducer 1046 can be used to detect load and whether run into any barrier.If run into barrier, so, the forces associated in the load will be exerted all one's strength bar 112 with respect to lock 118 motions.This motion can detect by position transducer 1046, and signal is provided thus, to take suitable action, for example, main actuator 508a is stopped.So, be designed to use submissive preparation sequence 1 reliably optimum system choosing.
Figure 10 f also can be applicable to fixed vertical post 1000.Z-axis is that actuator 508 drives.The BCAA of the sort of type provides vertical drive shown in Fig. 8 (a) and Figure 10 d, and balance and submissive state.Also can be applicable to Figure 10 f in the many contents described in the description of Figure 10 d and 10e, therefore, in this joint, we mainly concentrate on new content and the different part.
System among Figure 10 f contains single linear actuators 508, and it is equivalent to the linear actuators 508 of BCAA among Fig. 8 a.And it is equivalent to the main line actuator 508a among Figure 10 d and the 10e aspect stroke and technical requirement.The far-end of actuator screw 514 is attached on the lock 118.Support 1094 is attached to lock 118 on the single-acting pneumatic cylinder 128.Principal arm 1030 is by the sub-component of sub-component, power bar 112, force transducer 120 and the lock 118 of connecting rod 114 and piston 130 or depend on the combination support of system state by these two sub-components.Be attached to the far-end of linear actuators 508 and be equivalent to the balanced controls of Fig. 1 (a) with the equipment of principal arm 1030 coupling.
In order to make principal arm 1030 enter submissive standby condition, can use following sequence (" submissive preparation sequence 4 "):
Submissive preparation sequence 4 (shown in Figure 15 (h))
1. shown in step 1570, unlocked device 118.
2. shown in step 1571, from cylinder 128, discharge gas, so that the submissive retainer 522 that stretches out leans against on the lock 118.
3. shown in step 1572, gas is injected cylinder 128, the cylinder gaseous tension is increased to the point that makes piston 130 shake off and move up.
4. shown in step 1573, in monitored position sensor 1046, continue to adjust the cylinder gaseous tension, make piston 130, and thereby make connecting rod 114 and power bar 112 continue to move.
5. shown in step 1574, when power bar 112 arrives submissive neutral position with respect to lock 118, pin lock 118 and stop to adjust gaseous tension in the cylinder 128.
6. shown in step 1575, carry out the balance sequence.
If balance sequence power threshold value is shaken off making a concerted effort of power less than stiction and piston 130, so, because actuator 508 is used for the load driving of principal arm 1030 and its supporting to required upright position, so can unlocked device 118, and allow it remain on the state of untiing.Such just as previously discussed, this is preferred.Otherwise, should make lock 118 remain on locking-in state, till realizing the docking location standby condition (or other suitable required state) that load is partly supported by the service of connection devices.
Figure 10 a and 10b both have executor, and with the PCT application PCT/US01/06456 that authorizes people such as Holt in the similar scalable post 1000 of scalable post described.In Figure 10 a, the BCAA of the sort of type shown in Fig. 8 a is used to provide balance and submissive state; And in Figure 10 b, the BCAA of the sort of type is used for this purpose shown in Fig. 6 a.Following discussion is relevant with the common ground of these two figure.In the place of necessity, point out concrete difference based on the BCAA type.
The first linear actuators 508a moves post with respect to fixing hypomere 1004 and pedestal 1003 along vertical direction stage casing 1002.The second linear actuators 508b is installed on first support 1034 that adheres on the stage casing 1002, and it moves epimere 1001 with respect to fixing stage casing 1002 along vertical direction.Flexible first perpendicular positioning that load is provided of scalable post 100.In docking operation, the fine motion of principal arm 1030 between last retainer 1032 and following retainer 1054 is used for submissive vertical moving.
Submissive standby condition in this system is similar to the submissive standby condition of the system that contains fixed leg 1000 among image pattern 10d and the 10e like that.But, in addition, also need principal arm 1030 is positioned at specific roughly concentric position between principal arm retainer 1032 and the following principal arm retainer 1054 (perhaps, under retainer 1054 non-existent situations down, navigating to the position with respect to last retainer 1032 specific ranges).We claim that position of principal arm 1030 is submissive neutral position.
Then, the state of relevant submissive standby condition can be presented below:
1. the gaseous tension in the pneumatic cylinder 128 must be such, makes connecting rod 114 and piston 130 bear the whole load of principal arm 1030 and load thereof basically.
2. lock 118 must be in submissive neutral position (usually, the mid point between the two) with respect to the submissive retainer 524 of submissive retainer 522 that stretches out and withdrawal,
3. piston 130 is in submissive neutral position with respect to its cylinder 128, and
4. principal arm 1030 must be in submissive neutral position (mid point between the two usually) with respect to last principal arm retainer 1032 and following principal arm retainer 1054.
In order providing, in Figure 10 a and 10b, to have illustrated and surveyed the position transducer 1056 of principal arm 1030 with respect to the position of epimere 1001 with the required general solution of the combination co principal arm 1030 of lock 118 and piston 130.It should be noted that in Figure 10 b (not being in Figure 10 a), this sensor 1056 also effectively indicator piston 130 with respect to the position of cylinder 128.Therefore, in Figure 10 a and 10b, with shown in the sensor 1056 combined of position transducer 1046 be enough to provide the location sensing that is necessary for general solution.
Alternatively, and, considering whole cost, system preferably is designed to when BCAA actuator 508c stretches out fully, and principal arm 1030 is in its submissive neutral position, and lock 118 also is in its submissive neutral position.For this constraint, can from Figure 10 a and 10b, delete principal arm position transducer 1056.But, be necessary to comprise the device that when BCAA actuator 508c stretches out fully, detects.Typical solutions to this has been done discussion with reference to Figure 10 d and 10e.
The following sequence of operation can be used for equipment is positioned at (" submissive preparation sequence 5 ") under the submissive standby condition
Submissive preparation sequence 5 (shown in Figure 15 (i))
1. shown in step 1580, carry out the balance sequence.
2. shown in step 1581a, unlocked device 118, and utilize BCAA actuator 508c that lock 118 is positioned on the submissive neutral position.
3. shown in the alternate embodiments among the step 1581b,, so, pin lock 118, and utilize BCAA actuator 508c that piston 130 is positioned on its submissive neutral position if system is a sort of type shown in Figure 10 b.
4. shown in step 1582,, so, pin lock 118, and utilize BCAA actuator 508c that principal arm 1030 is moved on its submissive neutral position if principal arm 1030 also is not on its submissive neutral position (for example, by design).
5. shown in step 1583, if the power in the force transducer 120 indication power bars 112 so, is carried out the balance sequence greater than the power threshold value.
6. shown in step 1584,, so, can untie it if pin lock 118.
It should be noted that step 1581 and 1584 requires power threshold value shaking off making a concerted effort of power less than stiction and piston 130.With the same in the situation of Figure 10 d and 10e, this is a preferred criteria for system.With regard to this situation, along with the load of principal arm 1030 and its supporting is driven to required upright position, can unlocked device 118, and make it remain on the state of untiing.In addition, as the PCT application PCT/US01/06456 that authorizes people such as Holt was described, two position transducers 1046 and one of 1056 can be used to detect the motion of principal arm 1030 with respect to epimere 1001, and its indication runs into barrier.
System be configured to exert all one's strength threshold value may not the situation of making a concerted effort of shaking off power less than stiction and piston 130 in, then can adopt submissive preparation sequence 2 or submissive preparation sequence 3 to replace three steps in front of submissive preparation sequence 5.The sequence of gained is provided below.It should be noted that in this case, in general, be necessary in the load of location, make lock 118 remain on locking-in state, and position transducer 1046 and 1056 can not be used to detect moving obstacle.But under any circumstance, force transducer 120 may be used to detect moving obstacle.
Submissive preparation sequence 6 (shown in Figure 15 (j)) (can be applicable to Figure 10 a and 10b, wherein, pneumatic cylinder 128 is used in the position and lock device 118, and the balance threshold value greater than stiction and shake off power)
1. shown in step 1590, unlocked device 118.
2. shown in step 1591, from cylinder 128, discharge gas, so that the submissive retainer 522 that stretches out leans against on the lock 118.
3. shown in step 1592, adjust BCAA actuator 508b, (this step requires to use well-known solution, comprises driver part 514b that use location sensor 1046 the surveys actuator 508b position with respect to its stationary parts 506b so that it is near the mid point of its stroke or near its required submissive neutral position.In some cases, actuator 508b is furnished with limit switch, detects driver part 514b and when arrives the terminal point that it moves about; Can combine use with timer in a known way, obtain required result).
4. shown in step 1593, gas is injected cylinder 128, the cylinder gaseous tension is increased to the point that makes piston 130 shake off and move up.
5. shown in step 1594, by means of shown in position transducer 1046 monitor the positions of power bar 112 with respect to lock 118 in, continue to adjust the gaseous tension of cylinder 128, make piston 130, and thereby make connecting rod 114 and power bar 112 continue to move.
6. shown in step 1595a, when power bar 112 arrives submissive neutral position with respect to lock 118, pin lock 118 and stop to adjust gaseous tension in the cylinder 128.
7. shown in the alternative embodiment among the step 1595b,, so, utilize BCAA actuator 508b that piston 130 is positioned on its submissive neutral position if system is a sort of type shown in Figure 10 b.
8. shown in step 1596,, so, pin lock 118, and utilize BCAA actuator 508c that principal arm 1030 is moved on its submissive neutral position if principal arm 1030 also is not on its submissive neutral position (for example, by design).
9. shown in step 1596, carry out the balance sequence.
Submissive preparation sequence 7 (shown in Figure 15 (k)) (can be applicable to Figure 10 a and 10b, wherein, piston 130 can lean against the bottom of cylinder 128, and the balance threshold value greater than stiction and shake off power)
1. shown in step 1600, actuator 508c is withdrawn into makes the position of the bottom of cylinder 128 inner carriers 130 its stroke of arrival (depend on design, this can be by the limit switch that is incorporated in the actuator 508a, by reaching complete retracted mode, or realize) by other known technology along the retracted orientation driving actuator 508a long enough time.
2. shown in step 1601, unlocked device 118.
3. shown in step 1602, from cylinder 128, discharge gas, so that piston 130 leans against on the bottom of cylinder 128.
4. shown in step 1603, utilize BCAA actuator 508b, lock 118 is positioned on the submissive neutral position.
5. shown in step 1604, pin lock 118, and utilize BCAA actuator 508c that load is risen to piston 130 is in submissive neutral position (usually near mid point) with respect to cylinder 128 position.
6. shown in step 1605,, so, utilize BCAA actuator 508c that principal arm 1030 is moved on its submissive neutral position if principal arm 1030 also is not on its submissive neutral position (for example, by design).
7. shown in step 1606, carry out the balance sequence.
Figure 10 c also is the executor that comprises scalable post 1000, and the scalable post of describing among this scalable post 100 and the PCT application PCT/US01/06456 that authorizes people such as Holt is similar.With noted earlier the same, principal arm 1030 utilizes linear guides 1058 and straight line pilot bearing (not shown) to be attached to slidably on the epimere 1001.This provide principal arm 1030 with respect to epimere 1001 approximately ± 1 inch vertical fine motion.
The first linear actuators 508a moves post 1000 with respect to fixing hypomere 1004 and pedestal 1002 along vertical direction stage casing 1002.The BCAA of the sort of type shown in Fig. 8 a is suitable for making epimere 1001 with respect to stage casing 1002 motions and balance and submissive state are provided at vertical fine motion direction of principal axis.
The stationary element 506b of second linear actuators 1042 is attached on first support 1040, and first support 1040 is attached to again on the stage casing 1002.The far-end of actuator 514b is attached on the BCAA lock 118.Lock 118 is attached on second support 1076, and this second support 1076 also is attached on the epimere 1001.So linear actuators 508b drives the vertical movement of epimere 1001 with respect to stage casing 1002.The pneumatic cylinder 128 of BCAA also is attached on second support 1076.Power bar 112 and connecting rod 114 are used to support principal arm 1030.As can be seen, comprise the BCAA of the sort of type shown in the equipment pie graph 8a of the second linear actuators 508b, pneumatic cylinder 128, piston 130, connecting rod 114, power bar 112, force transducer 120, position transducer 1056, submissive retainer 522 and 524 etc., and have support 1076 and also be attached to supplementary features on the removable epimere 1001.
The condition that is in submissive standby condition about principal arm 1030 is identical with those conditions of Figure 10 a and 10b.But, because can not be as among Figure 10 a and the 10b and epimere 1001 position and lock device 118 independently, therefore, situation is more simpler.Net result is, if principal arm 1030 is in its submissive neutral position, so, lock also must be in it submissive neutral position, and vice versa.Following sequence can be used to realize submissive standby condition (" submissive preparation sequence 8 ")
Submissive preparation sequence 8 (shown in Figure 15 (1))
1. shown in step 1610, unlocked device 118.
2. shown in step 1611, from cylinder 128, discharge gas, (note so that make principal arm 1030 lean against down on the principal arm retainer 1054 and/or the submissive retainer 522 that stretches out is leaned against on second support 1076, in this case, second support 1076 and following principal arm retainer 1054 boths are fixed on the epimere 1001).
3. shown in step 1612, gas is injected cylinder 128, the point that the cylinder gaseous tension is increased to make piston 130 shake off and move up.
4. shown in step 1613, when monitoring principal arm position transducer 1056, continue to adjust the cylinder gaseous tension, make piston 130, and thereby make respectively connecting rod and power bar 114 and 112 and principal arm 1030 continue to move up.
5. shown in step 1614, when power bar 112 and principal arm 1030 arrive their submissive neutral position, pin lock 118 and stop to adjust gaseous tension in the cylinder 128.
6. shown in step 1615, carry out the balance sequence.
If balance sequence power threshold value is shaken off making a concerted effort of power less than stiction and piston 130, so, because actuator 508 is used for the load driving of principal arm 1030 and its supporting to required upright position, so can unlocked device 118, and allow it remain on the state of untiing.Otherwise, should make lock 118 remain on locking-in state, up to the preparation mated condition (or other required state) that realizes that load is partly supported by the service of connection devices.
As can be seen from the above, in this case, a position transducer 1056 is just enough.
Figure 11 shows and is used in the single test head manipulator 1101 several in the various one exemplary embodiment of the present invention.Executor 1101 among Figure 11 contains just like the U.S. Patent application 09/646 of authorizing people such as Holt, pedestal 1103, fixed leg of describing in 072 1000 and the principal arm 1030 that is bearing in the measuring head 100 of the sort of type described in the prior figures 9 (b) (are noted, measuring head 100 among Figure 11 shows with the form of sectional view, and for simplicity, in Figure 11, do not repeat the butt joint hardware shown in Fig. 9 (b)-and inner pitching and yaw rotating mechanism).Executor 1101 has seven kinematic axiss, 3 translation shaft and 4 rotation axiss.Translation shaft be interior-outer shaft 1128, L-R axle 1126 with on-(or vertical) spools 1130 down.Rotation axis is the yawing axis 1115 that rotates around pedestal, pitch axis 1113, yaw axis 1117 and around the roll axle 1111 of measuring head 100 rotations.Typical motion require be inside and outside ± 10 inch, about ± 5 inches, vertical+30 inches, deflection more than 30 degree, roll+95 degree, pitching ± 5 degree and yaw ± 5 are spent.In this embodiment, the motion of all manipulator axes all applies power by the motion driving actuator.Actuator makes measuring head 100 move to another position and direction from a position and direction in executor 1101 motion envelopes by the control of central control unit (not shown).Can use and on several axle, realize control any with many technology of controlled motion.On all, use suitable position transducer, so that feedback is offered controller.
In this executor 1101, rope pivot cup assembly 924 is installed in the end of the support 1114 that adheres on the principal arm 1030.Measuring head 100 is supported by the measuring head support beam 922 that is fixed on the measuring head fixture 926.Measuring head fixture 926 is coupled with the rotatable ring 1102 of rope pivot cup 924, so that the center line of support beam 922 passes the center of rotatable ring 1102, and vertical with the plane of rotatable ring 1102.Equipment is configured to make measuring head 100 can wind the axle that the center line by support beam 922 limits, that is, and and roll axle 111 rotations+95 degree of motion.
In Figure 11, roll axle 1111 passes the center of gravity of measuring head 100, makes that roll is balance and no effective weight basically.Therefore, measuring head 100 can be by means of coming supplying power as U.S. Patent application 09/646, the 072 described motor motor-wheel box-clutch coupling layout of authorizing people such as Holt around the motion of roll axle.When the motor (not shown) was not activated, clutch coupling broke away from, and allowed to do the submissive motion of balance around roll axle 1111.
The center of gravity that the pitch axis 1113 of measuring head 100 and yaw axis 1117 do not pass measuring head 100.Shown in Fig. 9 (a) and front the pitching BCAA 932 and the yaw BCAA 930 that discuss be coupling between measuring head 100 and the measuring head fixture 926.In Figure 11, these are schematically shown into mechanism 1106 and mechanism 1112 respectively.Identical among its details and Fig. 9 (a).These two BCAA 1106 and 1112 are used for respectively pitch axis and the yaw axis assignment test head 100 with respect to it, and provide balance, submissive motion for butt joint or/or manual operations.In these two pitch axis and yaw axis 1113 and 1117, provide respectively ± 5 movings range of spending.
The vertical moving of measuring head 100 can provide by the layout that comprises the BCAA that discusses at the replaceable unit shown in Figure 10 (d), 10 (e) and 10 (f) as the front.In Figure 11, the layout of Figure 10 (e) is shown as mechanism 1118 (note that and not show soft gas conduit and gases at high pressure supply in Figure 11) clearly.As can be seen, if scalable post is used to replace fixed leg 1000, so, can use the layout of one of those types shown in Figure 10 (a), 10 (b) or 10 (c).System among Figure 11 is designed to make that stiction adds pneumatic cylinder 128 shakes off power greater than the equilibrant threshold value, so that measuring head 100 can be untied under the state vertically location at lock 118.
Yaw motion in the substrate 1103 and is realized by the submissive driving mechanism that schematically shows into mechanism 1120 among Figure 11 in surface level.In general, be balance basically along moving of this, and do not bear external force.In this case, can use the submissive driving mechanism of the sort of type shown in any one of Fig. 5 (a), 5 (b), 5 (c) or 7 in principle.Because the yaw motion of about more than 30 degree requires the fully long actuator of stroke, therefore, Fig. 5 (a) and Fig. 7 are preferred.But in some applications, thick, resilient a little measuring head rope (not shown) that measuring head 100 is connected on the test cabinet (not shown) can apply the power with position change that exerts an influence to moving along this root axle.In this case, BCAA can be used as mechanism 1120, and driving is provided, and the submissive state of balance.Can adopt BCAA configuration such shown in Fig. 6 (b).In addition, the BCAA of the sort of type can be applicable to this application similarly shown in Fig. 8 (a) or 8 (b).
Similarly, substrate 1103 is interior-and outer and L-R moves also in surface level.The submissive driving mechanism relevant with these also schematically shows into mechanism 1122 and mechanism 1124 respectively in Figure 11.The same with yaw motion, be balance basically along moving of these, do not bear external force.Range of movement required in these is usually from ± 5 inches to ± 10 inches.Therefore, preferably select the mechanism of Fig. 5 (a) or Fig. 7 that required stroke is provided.Under the situation among significant variable rope force is present in system, can adopt and utilize the BCAA mechanism of those types shown in Fig. 6 (a), 6 (b), 8 (a) or 8 (b), this is favourable to transverse axis.
Should be noted that BCAA shown in Figure 11 and submissive driving mechanism are displayed in the visible position, this makes description and discusses clearer.In actual device, some mechanism or their part see that from given visual angle the past is invisible.For example, mechanism 1120,1122 and 1124 parts are between the various flat boards that comprise executor substrate 1103 with other parts usually.In addition, also for example, mechanism 1118 can be on side of executor post 1105 or the opposite side or on the back side.
The information of relevant butt joint
Explain that with reference to Figure 11 actuator drives the one exemplary embodiment of butt joint.In Figure 11, executor 1101 is used to make measuring head to enter the standby condition of docking location, then, separation, independently dock the actuator (not shown) measuring head 100 pulled in the last or complete docking location.Various types of guides, for example, pilot pin and aperture, motion etc. are known, to guarantee that measuring head 100 suitably and is accurately aimed at device processor/detecting device (not shown).When operate actuator, measuring head 100 must move with respect to executor 1101 submissively.When finishing when butt joint, can be actuator mechanism mechanism measuring head safely lock bolt in a certain position.
Along with measuring head 100 is increasing, the basic thought of ' 815 interfacing parts has developed into and has contained three to four groups of interfacing parts by pilot pin 912, pilot pin jack 912a and the circular cam 910 of rope 915 interconnection.Figure 12 of the application (a), 12 (b), 12 (c) and 12 (d) have shown the interfacing part that contains 4 pilot pins 912 and aperture (jack) 912a combination and four circular cams 910.4 butt joints of even now are configured to contain and are attached to four cams 910 actuator handle on each, and still, shown interfacing part also comprises the single actuator handle 914 that is attached on the rope driver 917.When making rope driver 917 rotation by butt joint handle 914, this layout makes single actuator handle be in the operator and uses easily in the position.In addition, the ratio of the diameter by suitably adjusting cam 910 and the diameter of rope driver can obtain bigger mechanical advantage.
Consider in more detail that now Figure 12 (a) is to 12 (d).Figure 12 (a) has shown the measuring head 100 that is fixed in the support 200 with perspective fashion, and support 200 is being supported by the executor (not shown) again.The shown fragment of cutting open that also has device processor 1208 that measuring head 100 can dock with it.Figure 12 (b) is with bigger a little ratio and illustrate in greater detail device processor 1208 (remind the reader again, use term " processor " to refer to comprise various testing apparatuss any of plug-in type device processor, wafer prober etc. with being without loss of generality) here.Have a look earlier the sectional view among Figure 12 (c) briefly, as can be seen, measuring head 100 contains electric interfaces 1226, and device processor 1208 contains corresponding electric interfaces 1228.Electric interfaces 1226 and 1228 contains hundreds of or thousands of small, accurate electric contacts usually, and these electric contacts must be with when measuring head finally docks, so that the mode delicate joint of corresponding independent electrical connection reliably to be provided.As shown in this exemplary case, the lower surface of device processor 1208 comprises processor electric interfaces 1228, and measuring head 100 in general by from down and on the motion butt joint.Other direction also is fine, and is known, comprising: dock by means of moving downward with upper surface, dock with vertical plane and dock with level and vertical plane plane at an angle by means of tangential movement.
Turn back to Figure 12 (a) and 12 (b), shown in these figure is complete 4 the service of connection devices; Its some parts is attached on the device processor 1208 or is attached on the measuring head 100.Be attached on the measuring head 100 is panel 1206.Four pilot pins 912 are attached on four angles of panel 1206, and are near four angles of panel 1206.Panel 1206 has center pit, and is attached on the measuring head 100, stretch so that test head electrical interface 1226 passes aperture, and pilot pin 912 has defined the approximate rectangle almost concentric with electrical interface 1226.
Four butt joint cams 910 rotatably are attached on the panel 1206.Cam 910 is circular, and similar with described in ' 815 patents those.Especially, the side helicla flute that each cam 910 exists around its circumference, and the upper cut on upper surface.Each butt joint cam 910 be in pilot pin 912 separately near, making it generally be centered in about center from measuring head electrical interface 1226 extends out, pass on the straight line of pilot pin 912 separately, thereby make pilot pin 912 between cam 910 and measuring head electrical interface 1226.The angle of gusset plate 1216 and gusset 1214 has circular otch, make when pilot pin 912 inserts among the pilot pin aperture 912a in the gusset plate fully, the circumference of each cam 910 and it is the circular incision adjacency in the gusset plate 1216 separately, and the circular incision in the gusset plate 1216 is concentric separately with it.This layout has guaranteed and ought operate measuring head 100 first that when making it to enter in the position that device processor 1208 is docked, the initial guiding between the joint unit is aimed at.
The circular rope driver 917 that has attached butt joint handle 914 also rotatably is attached on the panel 1206.Butt joint rope 917 is attached on each of cam 910, and is attached on the rope driver 917.Pulley 1224 suitably is directed to rope driver 917 and from the path of the rope of rope driver 914.By power being applied on the handle 914, can make 917 rotations of rope driver.Along with 917 rotations of rope driver are got up, it passes to power and make cam 910 rope 915 of rotation synchronously.
What extend out from the circular incision of each gusset plate 1216 is cam follower 1210.Cam follower 1210 is coupled in the upper cut on the upper surface of its respective cams 910.Figure 12 (c) shows stage in measuring head 100 and the process that processor 910 docks with the form of sectional view.Here, among the pilot pin aperture 912a in the pilot pin 912 parts insertion gusset plate 1216.It should be noted that in this exemplary case pilot pin 912 is being tapered near its far-end, and, have constant diameter in the place that is attached to the point on the panel 1206 near them.In Figure 12 (c), pilot pin 912 is inserted among the pilot pin aperture 912a, just in time enter the point among the pilot pin aperture 912a up to the zone of constant diameter.And in Figure 12 (c),, be in the cam spiral fluted degree of depth topmost up to it in the upper cut on the upper surface of each cam follower 1210 its respective cams 910 of insertion.In this configuration, interfacing part performs by power being applied on the handle and making the cam rotation and driven preparation.So this configuration can be called as " preparing to drive " position.
Figure 12 (d) shows the result that cam 910 full speed rotations cause with the form of sectional view.Measuring head 100 docks with processor 1208 now fully.As can be seen, cam 910 has rotated, and has made cam follower 1210 go to more point near panel 1206 along helicla flute.In addition, pilot pin 912 inserts among their corresponding pilot pin aperture 912a fully.As can be seen, tightness degree decision processor electrical interface 1228 that cooperates between the constant diameter region of pilot pin 912 and the corresponding pilot pin aperture 912a and the last aligning between the test head electrical interface 1226.
According to aforementioned discussion, it is suitable docking operation more fully being discussed now and being defined some term.The purpose of butt joint is accurately test head electrical interface 1226 to be cooperated with processor electric interfaces 1228.Each electric interfaces 1226 and 1228 limits a plane, and this plane is common, nominally but nonessential top with electric interfaces is parallel.When butt joint, these two planes must be parallel to each other.In order to prevent from infringement, to be preferably in to make before electric contact and the mutual Mechanical Contact of mechanism contacts, at first in five degree of freedom, aim at two interfaces 1226 and 1228 to electric contact.If in docking location, the plane that interface limits is parallel with the X-Y plane of Figure 14, so, must aim at X, Y and θ Z direction, so that each contact is come into line mutually.In addition, the rotation by along θ X and θ Y direction makes two plane parallel.The process that two electric interfaces are parallel to each other is called as the complanation of " interface "; And, when realizing complanation, can think that interface is " complanation " or " coplane ".In case at X, Y with θ Z direction is flattened and aim at,, proceed to aim at by impelling motion in the Z direction vertical with the plane of processor electrical interface 1228.In docking operation, at first measuring head 100 is moved near the processor 1208.Further moving at first aims at the circular incision of gusset plate 1216 with cam 910.This position, perhaps that position before this position just in time can be considered to " preparing butt joint " position.More particularly, " prepare butt joint " position refers to certain first guiding alignment device and has just just engaged or near the position the position that will engage.In this stage, depend on design details, the far-end of pilot pin is prepared to enter in their corresponding guide holes.Continue again to move and to bring measuring head into " preparation activation point " that the front is discussed at Figure 12 (a) to (d).More particularly, " preparation activation point " refers to measuring head and arrived the position that can drive the service of connection devices.Preparing to have realized almost planeization and aligning on the docking location in X, Y and θ Z direction.Along with interfacing part is activated and pilot pin 912 inserts among their pilot pin aperture 912a separately more completely, butt joint and complanation become more accurate.
In general, prepare activation point and be in two and half ones of interfacing part aligning guide at least part engage and realized some, but may not all realize the position aimed at.For example, at the interfacing part of the sort of type as described in ' 815 patents with as Fig. 9 (a) with (b) and in those interfacing parts of 12 (a) the sort of type as described in (d), this is as mentioned above, tapered pilot pin 912 has further inserted among the pilot pin aperture 912a, causes the cam follower 1210 on the processor 1208 to insert the position of docking in the cam 910.Like this, measuring head 100 is aimed at target device in the ppt inch and in about 1 degree coplanarity usually.As another example, as United States Patent (USP) 5,982,182 (quote hereby, for your guidance) in the described interfacing part, this is that the motion contact has engaged and system is ready for the final straight-line position vertical with target.
Solution to the problems referred to above is applicable to this paper in the balanced system of Fig. 1 (a) to (described in people's such as Ny the U.S. Provisional Application 60/234,598) described in 4 (b), and also be applicable to this paper at Fig. 6 (a) to the BCAA described in 9 (b).These have several common aspect; An aspect is that balanced system is the ingredient of BCAA.So, can be on request BCAA and/or balanced system be added in executor and the measuring head 100, so that reach balance and submissive state at needs or the place wanted.
In this application, as previously mentioned, can before butt joint, make measuring head 100 enter and be locked in the submissive neutral position.Just in time before docking at last very much near docking system, can make an axle or several keep balances, make it or they be in submissive standby condition.Because this is by lock 118 is pinned realizations, therefore, do not exist measuring head 100 to make the risk of the motion of unexpected, uncertain and potentially dangerous.Then,, untie measuring head 118, make it do submissive motion, proceed butt joint by means of the system that is in submissive standby condition.
Pointed in early time as this paper, (606a 606b) can integrate with interior and is arranged to measure gaseous tension in each import of pneumatic cylinder 128 pressure transducer.The controller (not shown) receives from signal pressure transducer, indication measurement pressure.This paper has described pressure transducer in front and be used to the state of restoring balance before breaking away from.Need not this method, normal running just can make measuring head 100 break away under the situation that the balanced system lock pins, and this has abandoned doing the chance of submissive motion when breaking away from.
(606a 606b) also can be used in the whole time of interoperability test head 100 and keeps when proceeding to test in the system of equilibrium state pressure transducer.In order to finish this task, make measuring head 100 enter the position of preparing butt joint.All axles with balanced system or BCAA enter submissive standby condition.That is to say, make them keep balance, and make them be in submissive neutral region.Then, by the pressure in controller measurement and the record pneumatic cylinder 128.Then, discharge lock 118 and interoperability test head 100.According to the type and the application of docking system, when last interoperability test head 100, can, also can not pin lock 118 again.In interoperability test head 100, controller constantly monitors the pressure in the pneumatic cylinder 128, they is compared with record value, and handle valve 604, so that keep cylinder pressure constant substantially.So just kept and acted on the basic constant force on piston 130 and the connecting rod 114 and make system remain on the required balance state.Obviously, in the available submissive motion of equilibrium state, measuring head 100 is broken away from.
More particularly, docking system be the lock bolt type also be non-lock bolt type will determine available operator scheme.The lock bolt interfacing part provides following selection between these two kinds of operator schemes:
1. in interoperability test head 100, keep balance (as mentioned above) by freeing lock 118.When breaking away from,, keep balance and the chance of doing submissive motion by unlocked device 118.
2. in interoperability test head 100,, do not keep balance by pinning lock 118.For disengaging, there are two kinds of component selections:
A. before breaking away from, restore balance, and breaking away from the chance of doing submissive motion simultaneously by 118 reservations of unlocked device.
B. breaking away from simultaneously, do not restore balance, and lock 118 must keep pinning.This method does not need pressure transducer.
In non-lock bolt docking system, in general, in interoperability test head 100, need to pin lock 118.According to the needs of submissive motion, before breaking away from, can, can not restore balance yet.
Operation in the system that considers now to use lock bolt, actuator to drive butt joint.This be use at present the system of extensive the sort of type.Can be picture United States Patent (USP) the 4th, 589, No. 815 described such basic 2 the service of connection devices be generalized to comprise as previously described, arrive three groups or four groups of pilot pins 912, pilot pin aperture 912a and rope drivers shown in (d) as Fig. 9 (a), 9 (b) and 12 (a).Like this two groups, three groups and four groups of interfacing parts extensively are used in the industry of this purpose.The equipment of even now can still, comprise that electricity other type butt joint actuator mechanical, electrical or gas linear actuators and/or vacuumizing device also is known by the operator by power being applied to hand drive on the butt joint handle 914.In general, measuring head 100 will may equipment interconnection with plug-in type device processor, wafer prober or other, and these equipment are referred to as " target device " by term processor 1208.For butt joint, can abide by following sequence:
Shown in Figure 15 (m), system has performed measuring head or load 100 have been moved to the preparation of preparing docking location from the starting point of separating with target device.
A. shown in step 1620, submissive driver and/or BCAA on level (inside and outside, about and the roll) axle enter submissive standby condition, and pin their lock 118.
B. shown in step 1621, make pitching and yaw BCAA enter submissive standby condition, and pin their lock 118.
C. shown in step 1622, the in-house BCAA of vertical drive enters submissive standby condition (utilizing submissive preparation sequence), and unties its lock 118.
D. shown in step 1623, now measuring head or load 100 are moved to the position that preparation is docked with target device.For this reason, controller control actuator makes it enter the preparation docking location with along motion path mobile test 100.In general, this is that aligning guide in two and half ones of interfacing part has entered very approaching local or initial contact, but the position that does not also engage fully.For example, in having many kinds of interfacing parts of pilot pin 912, this be the butt joint pilot pin aperture 912a that cooperated near in the target device their of butt joint pilot pin 912 or just in time with target device in the position of their butt joint pilot pin aperture 912a joints of cooperating.Controller can utilize some algorithms to realize it, and perhaps, the operator guides this process by button, operating rod and/or other suitable entering apparatus are used for controller.
From the standby condition to the mated condition, arrive complete mated condition again
E. prepare: all axles with executor of BCAA all reach balance again.Shown in step 1624, make each BCAA reach balance successively.Make specific BCAA reach the balance that balance may upset some other BCAA.So, repeat this process, all indicate equilibrium state (typically, this purpose normally iterates 2 times and reaches by iterating 3 times or number of times still less) up to the force transducer 120 of each BCAA.
F. shown in step 1625,, so, read current pressure, it is stored in the controller storage, be provided with the back and use by controller if pressure transducer is included in any one of BCAA.
G. shown in step 1626, all locks 118 are all untied, permission is done that balance is submissive and moves (to note along all axles, as the U.S. Patent application 09/646 of authorizing people such as Holt, 072 is described such, by design, whenever motor does not activate and roll axle when not being activated, the clutch coupling of roll spindle motor is thrown off automatically).Now, measuring head 100 or load are in the submissive state of balance, can move it less than 25 to 30 pounds power usually by the external device (ED) utilization.
I. shown in step 1628, start the butt joint actuator now, measuring head 100 is pulled into complete aligned position with target device 1201.In the such hand drive interfacing part of the service of connection devices shown in Fig. 9 (a), this realizes by power being applied on the butt joint handle 914, power is applied to butt joint cam 910 or the rotation of the rope driver (part of unit 914) among Figure 12 (a) that makes on the butt joint handle 914 among Fig. 9 (a).In having the interfacing part of power actuator, this is by realizing to the suitable energy supply of actuator.Along with measuring head 100 is pulled in the last docking location, it freely does submissive motion in all six spatial degrees of freedom.If desired, although always this is not preferred, but selected axle can make their lock 118 engage, to limit the submissive motion in the corresponding degree of freedom.
Usually, docking mechanism is designed to such, measuring head 100 is by the place when the butt joint actuator has arrived it and docks the limit fully of lock bolt effectively.So measuring head 100 is butt joint fully now, on the position, and performed the preparation of test component in mechanical aspects by lock bolt.
Operation in the manipulator driven system of the non-lock bolt butt joint of consideration use now.In such system, executor must overcome the power relevant with butt joint.These power result from the needs of hundreds of or the thousands of pogo pins that spring is housed of compression and/or the mateable electrical connector needs of hundreds of or thousands of co-operating contacts usually.For each pogo pin or contact that needs so several grams or several ounces of power, usually can run into several centals always to relay.For manipulator driven butt joint, the manipulator driven mechanism that is used in the butt joint must be able to overcome relay, and in free space the required power of mobile test head or load 100.If make driving shaft keep balance, so, just can reduce driving force.
Use in axle that the BCAA mechanism as driving shaft is favourable in the manipulator driven docking operation.At first, usually can be easily the adjusted size of the actuator of driving shaft be become have enough driving forces and overcome relay, and the required power of mobile mobile test head or load 100.In addition, if the axle of being considered is designed to and can moves it under the equilibrium state that lock 118 is untied, so, relative position sensor can be used for detection and whether suffer from barrier or hamper (for example, consult Figure 10 (a) to 10 (f) discussion).In addition, under the situation of lock 118 locking-in state mobile tests 100, force transducer 120 can be used for detecting whether suffer from hamper and barrier.
Recall, drive in the butt joint at actuator, usually, the service of connection devices is furnished with pilot pin 912 in a side, is furnished with the guide hole of cooperation 912a at opposite side, so that guiding measuring head 100 is aimed at the device processor (1208 among Figure 12 (a)) or the test point of detecting device.If pilot pin 912 has enough length and guide hole 912a that enough degree of depth are arranged, be coupled to two close two pilot pins 912 of joining among the guide hole 912a and will in five spatial degrees of freedom, provide aligning.If butting surface is the plane, these degree of freedom comprise X, Y in the plane and θ and with respect to the pitching and the roll on plane.All the other degree of freedom are the vertical ranges of being docked between two planes of actuator mechanism control.This technology also can be used in the manipulator driven butt joint; But other technology also is known, for example, and disclosed the sort of technology among people such as [] Graham that discusses in front.
Summarize the process of relevant manipulator driven butt joint below, this process is presented in the process flow diagram shown in Figure 15 (n).This process is followed the general type that the front actuator drives docking operation.
1) system has performed measuring head or load 100 have been moved to the preparation of preparing docking location from the starting point of separating with target device.
A) shown in step 1630, make submissive driver and/or BCAA on level (inside and outside, about and the roll) axle enter submissive standby condition, and pin their lock 118.
B) shown in step 1631, make pitching and yaw BCAA enter submissive standby condition, and pin their lock 118.
C) shown in step 1632, make the BCAA in the vertical drive mechanism enter submissive standby condition (utilizing submissive preparation sequence), and untie its lock 118.
2) shown in step 1633, now measuring head or load 100 are moved to the position that preparation is docked with target device.For this reason, controller control actuator makes it enter the preparation docking location along motion path mobile test 100, and wherein, the service of connection devices of two and half ones is near their complex or just engage with their complex.Controller can utilize some algorithms to realize it, and perhaps, the operator guides this process by button, operating rod and/or other suitable entering apparatus are applied to controller.
3) from the standby condition to the mated condition, arrive complete mated condition again
A) prepare: make all axles of the executor with BCAA all reach balance again.Shown in step 1634, make each BCAA reach balance successively.Make specific BCAA reach the balance that balance may upset some other BCAA.So, repeat this process, all indicate equilibrium state (typically, this purpose normally iterates 2 times and reaches by iterating 3 times or number of times still less) up to the force transducer 120 of each BCAA.
B) shown in step 1635, if pressure transducer is included in any one of BCAA, so, read current pressure by controller, it is stored in the controller storage, be provided with the back and use.
C) shown in step 1636, determine the axle that will be activated and control.These can pre-determine by design in Special Equipment, and still, in the ordinary course of things, the equipment that measuring head 100 is docked with it will be determined them.Usually, selected axle realize at least along with processor or detecting device dock moving of vertical path, plane, the butt joint plane of processor or detecting device can be level, vertical or with surface level inclination at an angle.In some applications, it is desirable can driving and control the axle that the complanation that is brought to two surfaces together is achieved.
D) shown in step 1637, will completely untie at the lock 118 in non-driving and the non-Control Shaft, so that when moving to complete docking location, allow to do that balance is submissive moves along these axles.The lock 118 of the axle that is activated and controls is remained on lock-out state and (please notes, described like that as the U.S. Patent application 09/646,072 of authorizing people such as Holt, by design, when drive motor and roll axle are not activated, the clutch coupling of roll spindle motor is thrown off automatically.Also note that if the roll axle will be activated as a part of docking motion so, need be furnished with the device of realizing non-torque limit operation as mentioned above).Now, measuring head or load 100 are in the submissive state of balance.
E) shown in step 1638, measuring head 100 further moves to preliminary aligned position that sensor determines and/or among the tapered pilot pin 912 parts insertion pilot pin jack 912a.Like this, measuring head 100 is aimed at target device in the ppt inch and in about 1 degree coplanarity.This is usually less than 1 inch overall movement, and, in the manipulator driven system, utilize controller to move usually, force measuring head 100 to enter this preliminary aligned position.For this reason, controller force measuring head 100 along with target device in the perpendicular straight line path in the plane of docking area move.If in this step, used except top in step 2) c) in axle the axle selected, so, must before moving, pin them, and after moving, untie them once more (making other axle remain on the state of untiing) to allow the compliance of necessity.
F) shown in step 1639, measuring head 100 is driven into complete docking location with target device.The axle of selecting in step 1636 is above driven by system controller and control, makes measuring head 100 along the complete docking location of suitable path movement to it.Along with measuring head 100 is driven to last docking location, it can freely do submissive motion in all non-choosing axles.But if desired, some non-choosing axle can make their lock 118 engage to be limited in the submissive motion in the corresponding degree of freedom; But in general, this is not preferred operator scheme.When this motion takes place, monitor suitable position transducer.When measuring head has arrived its complete docking location, need one or more position transducers to send signal at least.If suitable axle is activated and controls in this process, along with measuring head 100 is moved to docking location, when being necessary, can use other sensor to keep and improve measuring head 100 to the near peace faceization.
4) shown in step 1640, when measuring head 100 docks fully, driving shaft (top in step 1636 select) is stopped and remaining on complete mated condition.Remain on its docking location unless be equipped with latch mechanism in the hardware in butt joint with measuring head 100, then in the test subsequently of measuring head 100 with between the operating period, they must remain on this state.Such lock bolt device can be controlled and be activated when expression has arrived the signal of docking location by controller.
Measuring head the replaceable technology with the docking location of measuring head equipment of remaining on comprised pin or do not pin some or all executor kinematic axiss.Other technology is the equilibrium state that keeps measuring head 100 by the pressure in the cylinder 128 of supervision and maintenance BCAA.
In docking calculation, all to discern two centre positions of measuring head 100 in each case: the preparation docking location in two kinds of situations and preparation activation point in actuator driving butt joint and the corresponding preliminary aligned position in the manipulator driven butt joint.In some cases, two centre positions can be same.In addition, in some butt joint, mechanism's grabber can be used for catching measuring head 100 and make measuring head remain on one of these centre positions or both.When these grabbers were activated, they prevented that measuring head 100 from leaving the docking location that obtains for docking location, but it is moved near the docking location.Use these methods to enlarge said method, rather than created new method.
Though the preferred embodiments of the present invention are illustrated and describe,, should be understood that what such embodiment just provided by way of example.For the person of ordinary skill of the art, can make various modification, change and replacement, and not depart from spirit of the present invention.Therefore, we think that appended claims is contained all such modification that drop within the spirit and scope of the present invention.
Claims (24)
1. the equipment of a support load, described equipment comprises:
Supporting structure is used to support described load;
Driver element is used for driving described supporting structure along a certain direction;
Submissive unit is used for providing range of movement to described supporting structure, because the described supporting structure of described drive unit drives, described driver element changes the residing position of described range of movement; And
Lock is used for when described lock is in lock-out state, the position of described load remain in the described range of movement certain a bit on.
2. equipment as claimed in claim 1, wherein, described submissive unit is included in the retainer on each end of described range of movement.
3. equipment as claimed in claim 1 also comprises the device to described driver element energy supply.
4. equipment as claimed in claim 1, wherein, when described lock is in when untiing state, the position of described load can change in described range of movement by the sliding friction that overcomes described load.
5. equipment as claimed in claim 1, wherein, described direction is on the surface level.
6. equipment as claimed in claim 1, wherein, described range of movement is with respect to described driver element.
7. equipment as claimed in claim 1, wherein, described submissive unit is a hydraulic cylinder, and described range of movement is decided by the stroke that is included in the piston in the described hydraulic cylinder.
8. equipment as claimed in claim 7, wherein, described hydraulic cylinder is included in first port, second port on second side of described piston and the conduit that is connected described first port and second port on first side of described piston, described cylinder is included in the incompressible fluid that flows in the described conduit between described first port and second port, and the motion of described supporting structure causes fluid to flow between described first port and second port.
9. equipment as claimed in claim 8, wherein, described conduit comprises a valve, when described valve is in closed condition, it stops fluid to flow between described first port and second port, and described prevention fluid flows and keeps the position of described supporting structure with respect to the position of described submissive unit.
10. the equipment of a support load, described equipment comprises:
Supporting structure is used to support described load;
Driver element is used for driving described supporting structure along a certain direction; And
Submissive unit, be used for providing range of movement to described supporting structure, described submissive unit comprises and first actuator of described supporting structure coupling and second actuator that is coupled with described supporting structure, wherein, at least one work changes at least one boundary of described range of movement in described first actuator and described second actuator.
11. equipment as claimed in claim 10, wherein, described submissive unit also comprises and the compliant shaft of described driver element coupling and the submissive retainer that is coupled with described compliant shaft, thus, the described driver element that drives described compliant shaft changes the position of described submissive retainer in described range of movement, and described range of movement is limited by the position of described first actuator and described second actuator.
12. equipment as claimed in claim 11, wherein, described driver element drives described submissive retainer along the first direction towards described first actuator, described driver element drives described submissive retainer along the second direction towards described second actuator, when described submissive retainer contacts with described first actuator, described driver element drives described supporting structure along described first direction, and when described submissive retainer contacted with described second actuator, described driver element drove described supporting structure along described second direction.
13. equipment as claimed in claim 10, wherein, the coupling of described driver element and described lock makes to be in when untiing state when described lock that described driver element drives described lock in described range of movement.
14. the equipment of a support load comprises:
Supporting structure is used to support described load;
Submissive unit with described supporting structure coupling, be used for providing range of movement to described supporting structure, described submissive unit comprises lock, is used for when described lock is in described lock-out state, and described supporting structure is remained on the interior a certain position of described range of movement; And
Driver element with described submissive unit coupling, be used for driving described supporting structure along a certain direction, when described lock was in described lock-out state, described driver element was owing to the described supporting structure of described drive unit drives changes the residing position of described range of movement.
15. equipment as claimed in claim 14, wherein, when described lock is in when untiing state, the position of described lock in described range of movement can change owing to the described lock of described drive unit drives.
16. equipment as claimed in claim 14, wherein, described submissive unit is included in the retainer on each end of described range of movement, and described lock is between the described retainer.
17. equipment as claimed in claim 16, wherein, when described lock contacted with one of described retainer, described driver element drove described load in the described direction in situation lower edge that described lock is untied.
18. equipment as claimed in claim 14 also comprises the device to described driver element energy supply.
19. the equipment of a support load, described equipment comprises:
Supporting structure is used to support described load;
Compliant shaft with described supporting structure coupling is used for providing range of movement to described supporting structure, and described compliant shaft comprises lock, is used for when described lock is in lock-out state, keeps the position of described supporting structure with respect to the position of described compliant shaft; And
Actuator with described lock coupling is used for driving described supporting structure along a certain direction, and when described lock was in lock-out state, described actuator changed the residing position of described range of movement owing to described actuator drives described supporting structure.
20. equipment as claimed in claim 19, wherein, when described lock is in when untiing state, the position of described lock in described range of movement can change owing to described actuator drives described lock.
21. equipment as claimed in claim 19, wherein, described submissive unit is included in the retainer on each end of described range of movement.
22. the equipment of a support load, described equipment comprises:
Supporting structure is used to support described load;
Compliant shaft by lock and the coupling of described supporting structure is used for providing range of movement to described supporting structure, and when described lock was in lock-out state, described lock kept the position of described supporting structure with respect to the position of described compliant shaft; And
Actuator with described compliant shaft coupling is used for driving described supporting structure along a certain direction, and when described lock was in described lock-out state, described actuator changed the residing position of described range of movement owing to described actuator drives described supporting structure.
23. equipment as claimed in claim 22, wherein, described submissive unit is included in the retainer on each end of described range of movement.
24. equipment as claimed in claim 22 also comprises the device to described actuator energy supply.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US23459800P | 2000-09-22 | 2000-09-22 | |
| US60/234,598 | 2000-09-22 | ||
| US60/301,228 | 2001-06-27 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB018192637A Division CN1306277C (en) | 2000-09-22 | 2001-09-20 | Manipulator for a test head with active compliance |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101038301A CN101038301A (en) | 2007-09-19 |
| CN100582786C true CN100582786C (en) | 2010-01-20 |
Family
ID=38889338
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200710007714A Expired - Fee Related CN100582786C (en) | 2000-09-22 | 2001-09-20 | Manipulator for a test head with active compliance |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100582786C (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108139431A (en) * | 2015-10-23 | 2018-06-08 | 泰拉丁公司 | Executor in automatic test equipment |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111347391A (en) * | 2018-12-24 | 2020-06-30 | 沈阳新松机器人自动化股份有限公司 | Formula piping lane robot track butt joint system under skew |
| CN114223098B (en) * | 2019-10-04 | 2024-04-12 | 株式会社村田制作所 | Probe head |
| KR102638649B1 (en) * | 2020-07-07 | 2024-02-19 | 세메스 주식회사 | Semiconductor device pressing apparatus and test handler comprising the same |
| CN112032531B (en) * | 2020-09-10 | 2021-11-12 | 中国船舶科学研究中心 | Automatic resetting holder device utilizing deep water pressure |
| CN112719977A (en) * | 2020-12-22 | 2021-04-30 | 湖州三兴信息技术有限公司 | Hardware processing auxiliary device for solving problems of difficulty in processing and cooling water waste |
| CN114325325B (en) * | 2021-12-29 | 2023-12-01 | 日月新半导体(昆山)有限公司 | Apparatus for testing integrated circuit products |
| CN117718948A (en) * | 2023-04-18 | 2024-03-19 | 南京艾若博特信息技术有限公司 | Precise side-pose rotary manipulator convenient to maintain |
-
2001
- 2001-09-20 CN CN200710007714A patent/CN100582786C/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108139431A (en) * | 2015-10-23 | 2018-06-08 | 泰拉丁公司 | Executor in automatic test equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101038301A (en) | 2007-09-19 |
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