CN100577854C - Method (variant) for cleaning shade in display production and apparatus for implementing the method - Google Patents
Method (variant) for cleaning shade in display production and apparatus for implementing the method Download PDFInfo
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- CN100577854C CN100577854C CN200610081012A CN200610081012A CN100577854C CN 100577854 C CN100577854 C CN 100577854C CN 200610081012 A CN200610081012 A CN 200610081012A CN 200610081012 A CN200610081012 A CN 200610081012A CN 100577854 C CN100577854 C CN 100577854C
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Abstract
The invention provides a method for cleaning shielding cover and a device for realizing the same. In the first embodiment, a cooling bracket with shielding cover is installed in a vacuum chamber, scanning on the shielding cover to be dealt via focusing belt ion beam to the emitting surface facing to the ion source. The selected tangential velocity makes the received power on the shielding cover unit do not exceed the maximum allowed heat power during the single ion beam going through the shielding cover, oxygen or other compound is used for forming ion gas. In the second embodiment, the shielding cover is pressed on bracket by clamping unit to ensure the heat contact between the cooling bracket and the shielding cover surface not to be dealt. The device for realizing any one of the embodiments comprises a vacuum chamber, at least one ion source installed in the vacuum chamber and a shielding cover cooling bracket. The ion source is designed to be able to change intersection coordinate location between the ion beam and the shielding surface to be dealt.
Description
Technical field
Method of cleaning shade of the present invention (variant) and the device of implementing described method are used for the vacuum cleaning field of shade, wherein said cleaning is by the use reactive ion beam contaminated surface to be carried out etching in the production of OLED (Organic Light Emitting Diode) indicating meter, removes organic and inorganic material layer.
Background technology
A kind of known surface is cleaned removing the method for mechanical pollutent arranged, and this method is by the carbonic acid gas CO of jet compression
2To wanting clean Surface to handle, wherein said compressed carbon dioxide changes dry ice particle into and cleans described surface effectively to remove mechanical contamination organic mixture (1) by these particles.
The shortcoming of this method is such fact, that is: owing to its chemical property, carbonic acid gas self is a kind of pollutent, in addition, carbonic acid gas also dissolves many organic compound, comprises hydrocarbon polymer, thereby increases the weight of its distinctive pollution by this way widely.Therefore, to the surface, for example the ultra-large type unicircuit is short of efficient when cleaning by carbonic acid gas.
The method for cleaning surface that also has a kind of known use low temperature aerosol is according to this invention, in the method, plate body is placed in the vacuum chamber of high cleanliness, by the liquefied gas of sharp spray temperature near the fusing point of argon, argon and nitrogen are handled the surface of plate body.
In this example, by agent of liquid nitrogen aerosol and solid argon particulate treat surface, after carrying out the reactive ion beam etching, described processing is the surface of cleaning requirement processing effectively, to remove mechanical pollutent, comprise submicron particle and polymer resistates (2).
Other also has a kind of known method for cleaning surface, this method comprises that the plate body with the needs cleaning is placed in the vacuum chamber, by sharp spray cryogenic nitrogen argon aerosol to handling on the surface of plate body, according to this invention, in the method, the oxygen mixture is incorporated in the cryogenic nitrogen argon aerosol, and the UV radiation that is lower than 200 nanometers by wavelength is handled accepting clean Surface, simultaneously, handle (3) by the low temperature aerosol spray.
In addition, in this known method, the device (3) that comprises vacuum chamber, source of radiation and the plate body by the UV radiotreatment has been described.
Yet described known method (2 and 3) and device (3) have following shortcoming:
Inefficiency when object being cleaned with the removal organic pollutant;
When being cleaned, can not eliminate ultra-thin object the distortion of object;
Can not guarantee the high quality cleaning;
Can not solve the problem relevant with removing inorganic mixture;
Productivity is low.
According to technical spirit, with proposed invention the most approaching be the method and apparatus of object being handled by ion source.
Known method comprises: form ionic fluid by ion source in vacuum chamber; Be placed in object in the vacuum chamber and be positioned at the front of the emitting surface in described source, according to this invention, in this case, the distance from object to the ion source emitting surface should surpass the ionic free stroke relevant with the process that recharges.
The device that is used to implement this method comprises vacuum chamber, ion source and is placed in the vacuum chamber and is positioned at the object of the front of ion source emitting surface.In this case, the distance from object to the ion source emitting surface surpasses the ionic free length (4) relevant with the process that recharges.
Yet described known method and device does can be guaranteed the cleaning quality and the high productivity of the contaminated surface of object (for example shade), when ultra-thin object is handled, can not guarantee that the geometrical dimension of object departs from its initial geometrical dimension.
The object that is used in the claimed invention is considered as shade, and wherein said shade will be used for the production of OLED (Organic Light Emitting Diode) indicating meter.
This type of shade is that a slice is welded to the feed thin foil strips on the big metal frame that is in stretched condition.The thickness of this type of shade is 15 to 60 microns.In its field, conventional pattern has through hole, and wherein gasification materials is and passes described through hole and hit matrix.Work vacuum chamber in, by above-mentioned shade with applying coating to matrix.After shade has used some circulations, need clean to remove organic and inorganic sediments its surface.In order to carry out described removing, shade should be transferred to the conveying vacuum chamber from the working vacuum chamber, from the latter it is transferred to the vacuum cleaning chamber again, in its described vacuum cleaning chamber, the shade surface is cleaned, thereby can in the working vacuum chamber, further use described shade, with applying coating to matrix.
The singularity of the assigned line production of OLED indicating meter requires shade to clean in vacuum chamber, that is, shade is not shifted out in it.In this respect, the ion beam etching under the vacuum condition is that the most gratifying removing shade surface is to remove various sedimental technological processs.
Within it the shade surface is carried out will being called vacuum chamber below the vacuum cleaning chamber of ion beam etching.
Summary of the invention
Proposed invention is intended to:
Quicken the cleaning of object;
Reduce cleaning temp;
Reduce the cleaning needed time of object;
Improve cleaning ultra-thin (15 to 60 microns) object (shade) to remove organic and quality inorganic sediments;
The initial geometry that keeps ultra-thin object;
Eliminate damage and the distortion of object in cleaning course;
Boost productivity.
The problem that is produced is solved by following claimed invention (variant of method and implement the device of described method):
According to first variant, the method that in the production of indicating meter shade is cleaned comprises by ion source form ionic fluid in vacuum chamber, be placed in shade in the described chamber and be located at the front of ionogenic emitting surface, according to the present invention, vacuum chamber is provided with a cooling support, wherein shade is placed on the described support, like this, the ribbon ion beam swept-surface that focuses on faces toward ionogenic emitting surface, the shade surface that needs processing, select the tangential velocity of scanning by this way, thereby make during the single ionic fluid is by this surface, the received energy number of shade surface cell can not surpass allows the superheated heat corresponding to maximum, and oxygen or its mixture will be used as and form ionic gas.
In addition, oxygen mixes with following gas: Ar, He, Kr, Ne, N
2, CxHy, CxFy, and the oxygen level in the mixture surpasses 10%.
According to second variant, the method that in the production of indicating meter shade is cleaned comprises by ion source form ionic fluid in vacuum chamber, be placed in shade in the described chamber and be located at the front of ionogenic emitting surface, according to the present invention, vacuum chamber is provided with a cooling support, and wherein shade is placed on the described support; By stepping up mechanism, make shade be close to support, then scan with the shade surface that the thermo-contact between the shade surface of guaranteeing to cool off support and not handling is handled facing to the needs of ionogenic emitting surface by the ribbon ion beam that focuses on, select the tangential velocity of scanning by this way, thereby make during the single ionic fluid is by this surface, the received energy number of shade surface cell can not surpass allows the superheated heat corresponding to maximum, and oxygen or its mixture will be used as and form ionic gas.
As in first variant, in second variant of implementing described method, oxygen mixes with following gas: Ar, He, Kr, Ne, N
2, CxHy, CxFy, and the oxygen level in the mixture surpasses 10%.
In addition, second variant of described method is by being clamped to shade on the surface of cooling support by the magnetic field that Magnetic Field Source produced.
The device that is used for the described method of two variants of implementation basis is intended to address this problem equally.
According to the present invention, include vacuum chamber and be installed on wherein at least one ion source and the described device of shade be provided with a top and/or inner clamp mechanism that is placed in the cooling support of internal vacuum chamber and is placed in vacuum chamber extraly, wherein, the surface of described shade through being subject to processing be facing to ionogenic emitting surface, described clamp mechanism be for make shade be close to the cooling support and guarantee to cool off support and surface (non-contaminated surface) that shade is not accepted to handle between thermo-contact; Ion source be designed to change ionic fluid and the shade surface of handling between the coordinate position of intersection.
Accelerator with linear pattern anode layer can be used as ion source, and ion source self has the gap with respect to the cooling support and is placed in the positioning element.
Positioning element is equipped with a swing pinion, and described swing pinion makes described positioning element together to rotate with ion source, and positioning element is oriented to be parallel with the longitudinal axis of ion source and cooling support.
In this case, ion source is determined by quantity that is placed in the source in the vacuum chamber and shade size (area) together with the angle of rotation of positioning element.
In addition; claimed apparatus can comprise two or more ion sources; and; if the positioning element that described ion source is placed in it for example is parallel; then described ion source is positioned at and is parallel to shade planar same level; if described positioning element not parallel (for example vertical mutually), then described ion source is positioned at different planes.
In the device that is proposed, swing pinion is designed to be able to change the velocity of rotation of positioning element.
In described Design of device, employed clamp mechanism is multipole magnetic system, and it is installed in the sidepiece of the cooling support opposite with shade.The shade closure that magnetic system is made by magneticsubstance.
In this example, multipole magnetic system is one group of permanent magnet, and it is mounted to it can be moved along the planar direction perpendicular to the shade surface that will handle.
According to first variant required for protection, the method that in the production of indicating meter shade is cleaned is as described below.
Be placed in contaminated shade in the fixing part of for example carrying box body and be installed on the support that places vacuum chamber.To cooling support supply cold water, and by this way with the object self poisoning on support, thereby make the polluted surface of shade be in cleaning position, promptly be positioned at the front of ionogenic emitting surface.
By vacuum pump, make vacuum chamber roughly reach qualification pressure, promptly 5 * 10
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In order in the middle of the whole process of shade cleaning, to prevent that shade is overheated, that is, between the process that by ionic fluid the surface is scanned at two successive, guarantee that shifting out of heat can make that each zone of shade is cooled off fully, stent cools is necessary.
Then, the mixture of oxygen or itself and other gas is fed to vacuum chamber, makes the pressure in the vacuum chamber reach operating pressure, promptly 5 * 10
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, positive step voltage is added on the ion source anode for this reason, then, begins discharge.This arresting element has formed the needed ribbon ion beam in cleaning (etching) contaminated shade surface.
Around here, the mixture of oxygen or itself and gas is used for expedite clean-up, and then improves the process for producing rate.
In order to handle polluted surface, form the ribbon ion beam that focuses on by ion source, and selected by this way by the tangential velocity that these ionic fluids scan, thereby make that during the single ionic fluid passes through the shade surface the received energy number of shade surface cell can not surpass allows the superheated heat corresponding to maximum.In this case, carry out the calculating of heat according to thermal capacity and shade material thickness.
Use the ribbon ion beam that focuses on to make it possible to carry out clean to having large-area article surface.
In the time of on moving to the article surface of accepting cleaning at a certain angle, with respect to the upright zone of shade, ionic fluid is in the enterprising row major etching of its travel direction and guarantee optionally to remove pollutent from the horizontal zone of shade.
Thus, prevent the damage of shade, that is prevented to etch fenestra.
By banded focused ion beam article surface is handled, made it possible to reduce considerably thermal load, prevent the overheated and distortion of shade and depart from initial geometric parameter.In this case, the tangential velocity of scanning is determined by the thermal capacity of energy number that mask regions absorbed, shade and overheated permissible temperature that should the zone:
V＝Pi/Li*Cv*h*ΔT
Wherein:
Pi is the energy of ionic fluid;
Li is the length of ionic fluid;
Cv is the volumetric heat capacity amount;
H is a shade thickness;
Δ T for the shade surface is carried out during the single sweep operation allow overheated.
Because the quickening of cleaning speed, use the mixture of oxygen or itself and gas can improve the productivity of clean considerably.
Thereby when using method required for protection, the organic matrix of pollutent is extracted out by vacuum pump in oxygen internal combustion and products of combustion.In this case, pound out all non-volatile substances by the ionic fluid that comprises inert gas ion, described these materials are able to remove from the surface of accepting to handle.
Finishing by spectrophotometric control that cleaning (etching) is handled determined.If the shade surface of cleaning meets all essential requirements, then turn off ionogenic electric power supply apparatus and scanning system, and cut off cold water that is fed in the stent cools system and the working gas that is fed in the vacuum chamber.To described chamber blanketing gas, make pressure reach atmospheric value, and the shade that will clean transfer to the working vacuum chamber from vacuum chamber, be eliminated sedimental shade in the production of OLED indicating meter, further to use
According to first variant, during implementing the present invention's method that shade is cleaned required for protection, vacuum chamber can comprise the ion source more than, and in this case, polluted surface is scanned simultaneously by several ionic fluids.
This makes the surface with difference (little and big) area cleaned on the one hand becomes possibility, and, also improved the speed and the productivity of clean.
Description of drawings
Fig. 1 is the diagrammatic cross-section of an embodiment of the present invention;
Fig. 2 is the diagrammatic cross-section of another embodiment of the present invention;
Fig. 3 is the schematic perspective view of another embodiment of the present invention.
Embodiment
The specific embodiment of the method for foundation first variant:
To be of a size of 540 * 430 millimeters contaminated object (shade), together with carrying box body, working spaces from the line production system that is used to produce the OLED indicating meter transfers in the vacuum conveying chamber, transfers in the vacuum cleaning chamber (hereinafter referred to as vacuum chamber) from this again.
By this way shade is positioned in the cooling support by guide, the polluted surface of shade is positioned on the cleaning position, promptly the front of ion source emitting surface and interval are 100 millimeters.
Make vacuum chamber roughly reach qualification pressure by vacuum pump, promptly 5 * 10
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-3Handkerchief, and cold water is fed to the cooling support from the outside of vacuum chamber.
Then, be that 65%: 35% oxygen argon mixture is fed to vacuum chamber with ratio, and 4.0 kilovolts positive voltage is added on the ion source anode.When lighting arresting element, formed total current and be 250 milliamperes ribbon ion beam.
By the angle of rotation ion source to 140 degree, the polluted surface of object is able to scan by ionic fluid, and wherein said rotation is undertaken by the swing pinion that is placed on the positioning element, and wherein ionic fluid is positioned on the described positioning element.
Sweep velocity is set to the rank of 80 cels, and this speed step guarantees that allowing of shade is overheated, and its value is for being no more than 30K.
After finishing dealing with, turn off ion source, and cut off and to be fed to the cold water on the article carrier and to be fed to working gas on the vacuum chamber.The object that cleaned (shade) at first enters in the vacuum conveying chamber of line production system together with carrying box body to be transferred once more, then enters the working vacuum chamber again, with by the shade that cleaned with applying coating further use in the operation to the matrix.
Thereby, before the cleaning, during and afterwards, shade had not left the vacuum system of the apparatus for production line that is used to produce the OLED indicating meter together with box body.
Second variant of described method is implemented in the mode identical with first variant definitely, only when the method for implementation basis second variant, used and guaranteed that shade is close to the clamp mechanism of cooling off support, to form thermo-contact closely between shade and the cooling support.
This has increased heat shifting out from the article surface of handling (cleaning), and in the process that the polluted surface of shade is scanned by ionic fluid, makes the distortion of described shade be reduced to zero.
Because object (shade) made by magneticsubstance usually, thereby the non-contaminated surface of using one group of permanent magnet and guaranteeing object (shade) and the system that contacts between the support cooled off are as clamp mechanism.In this case, the magnetic flux of object (shade) closed in itself magnetic system.
In addition, be placed in by this way in the vacuum chamber, make described clamp mechanism to move with planar direction perpendicular to the shade surface of needs cleaning as the clamp mechanism of one group of permanent magnet.
The moving process of clamp mechanism is essential to following situation: the magnetic pole of closed magnetic system; Do not need to guarantee the shade surface of handling and cool off the thermo-contact between the support and separate them; Guarantee object (shade) from indoor accessible of vacuum cleaning shift out and described object (shade) be moved into working vacuum in line production system inside indoor, so that applying coating to matrix the time, is being done further to use.
Thereby, in second variant of implementation method, be positioned at shade on the support and making after it enters in the vacuum chamber, make free of contamination shade surface be close to the cooling support by magnetic system (for example permanent magnet systems), to guarantee thermo-contact closely between this surface and the cooling support, when this surface that is subject to processing by the ionic fluid butt joint in cleaning course is scanned, shift out from described surface of handling increasing heat considerably.
With the same in implementing first variant, in second variant, when the polluted surface of scanned object, can use ionic fluid, the several ion sources acquisitions of these ionic fluids from be placed in vacuum chamber more than one.
This makes it possible to:
The shade big to area cleans;
Guarantee the shade with different area is carried out rapid cleaning;
Reduced the heating of carrying out clean Surface considerably;
Reduce and depart from the initial geometrical dimension of shade;
Guarantee the high productivity and the high quality that clean.
Proposition is different widely with the well known device with similar function as the described device of an invention, and will be used to implement method required for protection (two variants that described method is implemented).
Structure unit by claimed apparatus solves each the problems referred to above.
Use the cooling support, make solution become possibility from the lip-deep problem of handling that shifts out about heat.
Under the situation of not cooling off support, when the article surface that is subject to processing by ionic fluid butt joint scanned, object local heating not only can cause the variation of object geometric parameter but also being badly deformed of object can be taken place.
Under the situation of using the cooling support, for current object zone and those zones of not handling of handling, hot shifting out from object is equivalent, reason is, the faced joint of the ultra-thin shade of not handling to the cooling support and also the thermal capacitance of this type of shade little of ignoring.In fact, this means that the real of temperature equates on the whole surface of object, therefore, eliminated the distortion of article surface.
Use guarantees that the shade surface of not carrying out handling is to solve identical problem with the purpose of cooling off the clamp mechanism of thermo-contact reliably between the support.
In this device, the function of gripping unit is by one group of permanent magnet and for example be installed in the top multipole magnetic system of the cooling support of internal vacuum chamber and carry out.
This type systematic guarantee to cool off support and the article surface do not handled between thermo-contact closely, reason is, shade is made by magneticsubstance and the multipole magnetic system of closed clamp mechanism.
Thereby clamp mechanism has further increased hot shifting out from article surface, thereby has improved the processing quality of described article surface.
Ion source design is become to make its coordinate position that can change ionic fluid and shade surface (polluted surface) intersection of handling, make it possible to by ionic fluid having large-area surface, promptly big shade scans (processing) uniformly.
According to the present invention, ion source is positioned in the positioning element, and described positioning element is provided with and guarantees that positioning element and ion source together rotate to the rotating mechanism of a certain angle.In addition, Design of device also can provide the possibility of the speed of rotation that changes positioning element.
In this case, ion source is determined by the size (area) of quantity that is placed in the source in the vacuum chamber and object together with the angle of rotation of positioning element.
The possibility of adjusting the ion source angle of rotation makes that changing ionic fluid becomes possibility to the speed that article surface scans, and then when object is handled, make the temperature of the object of heating controlled and become possibility, promptly additionally reduced the temperature that the surface of handling is heated, this point prevented shade overheated, damage and distortion.
The longitudinal axis that is parallel to ion source and cooling support is provided with positioning element, makes to be treated as possibility uniformly to having large-area object.
Exist the purpose in gap also to be to address this problem between ion source and the cooling support.
Be used in the vacuum chamber and determine by the size (area) of object and the gap between cooling support and the ion source with the ionogenic quantity that object is handled.The productivity requirement of the volume and the device of vacuum chamber is directly depended in this gap.
All above-mentioned structural attitudes of device help expedite clean-up, prevent to carry out the damage and the distortion of clean Surface, and then improve the cleaning quality on pollution shade surface and the productivity of device.
In the design that is proposed, use two or more ionogenic possibilities, make and the surface is carried out even processing, expedite clean-up and scanning and is treated as possibility to having large-area object with different directions.
Be positioned at be arrangeding in parallel of two or more ionogenic positioning elements of being parallel on the same plane of object planar, together with the non-parallel setting that is positioned at the two or more ionogenic positioning elements on the different planes, make when the cleaning shade wall, improved the processing quality of all these walls considerably, wherein said wall level and upright orientation and have with shade in the suitable thickness of size in hole.
The possibility that clamp mechanism moves on perpendicular to object planar direction, the back object of having guaranteed to dispose are freely separated from the cooling support and shade shifting out from the cleaning area without barrier.
The design of contrive equipment required for protection makes it possible to implement two variants of described method.
Unique difference is such fact, and promptly when implementing the method for foundation first variant, the clamp mechanism that is adopted in the device design will not worked, and object will be very not tight also with contacting of rack surface of cooling.
Fig. 1, Fig. 2 and Fig. 3 show the accompanying drawing of the device that is used to implement described method, and wherein said method is according to as two claimed variants of invention.
Fig. 1 shows total synoptic diagram of the device with single ionic source; Fig. 2 shows the total synoptic diagram with three ionogenic devices; Fig. 3 then is mutual vertically disposed schematic representation of apparatus for one of them source with respect to other two sources.
The method of the object of shade is for example cleaned in the production that is used for being implemented in the OLED indicating meter and the device of variant comprises: have the vacuum chamber 1 that is used for object is put into the hole 1 ' in the vacuum chamber; Ion source 2 with emitting surface 3; Object (shade) 4, wherein said object 4 have surface 5 of handling and the surface 6 of not handling; Cooling support 7; Be designed to the clamp mechanism 8 of magnetic system 9; Positioning element 10; And swing pinion 11.
In this example, the output of positioning element 10 is placed in the outside of vacuum chamber 1, and swing pinion 11 is placed in the outside of vacuum chamber, and is presented among Fig. 1 by convention.Every other structure unit then is placed in the inside of vacuum chamber.
Being designed to the clamp mechanism 8 of multipole magnetic system 9 of one group of permanent magnet is arranged on from the cooling support when initial and has on the position of some distances.
Yet the possibility that clamp mechanism moves on perpendicular to the direction on shade 4 surfaces makes it possible to the magnetic flux of closed multipole magnetic system, and wherein said shade 4 is made by the magneticsubstance that is provided in Design of device.Therefore, along with clamp mechanism 8 approaching cooling supports, object 4 is in the magnetic field of closed magnetic system 9, and the surface 6 that described object 4 is not handled is pressed (drawing) to the front surface of cooling support 7.Thermo-contact closely reliably between shade 4 and the cooling support 7 is guaranteed in this extrusion.
In claimed apparatus, the surface 5 that shade 4 is handled is towards the emitting surface 3 of ion source 2, and the surface 6 that shade 4 is not handled then joins on the cooling support 7.
The positioning element 10 that ion source 2 is placed in wherein is provided with the swing pinion 11 of guaranteeing that ion source 2 rotates with positioning element 10.
The operation of device that is used for implementation method (variant) is as follows:
The object that is placed in the intravital for example shade of delivery cartridge is entered in the hole 1 ' on the vacuum chamber 1.
Shade 4 enters into the cooling support 7 that is placed in vacuum chamber 1, thereby the surface of handling 5 of object 4 will be towards the emitting surface 3 of ion source 2, and wherein said ion source 2 is placed on the positioning element 10 that is provided with swing pinion 11.
At this moment, positioning element 10 is positioned to the longitudinal axis that is parallel to ion source 2 and cooling support 7.Ion source 2 be placed in the positioning element 10 and and cooling support 7 between have the gap.
After on shade 4 being placed in cooling support 7, as needs, clamp mechanism 8 will uprightly move down, and promptly move towards the surface of cooling support 7.
Because shade 4 is made by magneticsubstance, the magnetic flux of its closed magnetic system 9, and also clamp mechanism 8 makes object 4 closely press cooling support 7, to guarantee thermo-contact reliably between object 4 and the cooling support 7.
Be placed in shade 4 in the vacuum chamber 1 and making after it is close to cooling support 7, the hole 1 ' of stopping property ground closing vacuum chamber, and make pressure in the chamber reach the working value (for example 5 * 10 of regulation
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Then, the mixture of working gas is fed in the ion source, opens ion source, the surface 5 (polluted surface) that the ribbon ion beam that begins to pass through to be obtained is accepted to handle to shade 4 is scanned.
Synchronously, refrigerant (for example cold water) is fed to cooling support 7 from the outside of vacuum chamber 1, to guarantee heat shifting out from the surface 5 that object 4 is handled.
Overheated for fear of surface 5 that object 4 is handled rotated the ion source 2 that is placed in the positioning element 10 by this way by swing pinion 11, makes it possible to change the coordinate position of surface 5 intersections that ionic fluid and object 4 handle.
So do at first is that larger area surface 5 in order to ensure object 4 is accepted to handle obtains even processing, secondly in order to ensure under the effect of ionic fluid, can change cooling stages into to the stage that heat the designated area, therefore, ultra-thin object will can be not overheated during cleaning.
Ionic fluid has mobilely been eliminated overheated generally and on indivedual positions of described surperficial 5 of the surface 5 of handling with what such pattern carried out, and reason is, cooling support 7 is guaranteed heat evenly shifting out from the surface 5 that object 4 is handled.
In addition, the clamp mechanism 8 of making the multipole magnetic system 9 of one group of permanent magnet is expressed to cooling support 7 with object 4, and this has further increased heat shift out (Fig. 1) from surface 5 that object is handled.
Installing such design makes following situation become possibility:
Guarantee hot effectively evenly shifting out from the article surface that carries out and do not handle;
The required time is handled in accelerate process and minimizing;
Prevent that object is overheated and then prevent the object distortion;
Horizontal surface to object carries out effective and high-quality processing, and can not cause the damage of its upstanding portion.
In the device that is proposed, can use ion source, for example three (Fig. 2) and more more than one.
Use makes following situation become possibility more than one ion source:
At first, quicken to have the cleaning on shade surface of large-size and the uniformity coefficient that increases described cleaning;
Secondly, reduce cleaning time, wherein said cleaning time belongs to the part of the operation of equipment round-robin time of using shade production OLED indicating meter;
The 3rd, maintain the initial geometric parameter of shade pattern, and any damage of avoiding its material, or even small damage.
This type of device can clean ultra-thin shade (from 15 to 60 microns), and removing organic and inorganic sediments, the area of wherein said ultra-thin shade can from 1200 to 3600 square centimeters.
Install concrete examples of applications:
Be that the ultra-thin shade (from 15 to 60 microns) of 2320 square centimeters (540 * 430 millimeters) cleans to area on the device that is proposed, wherein said device is included in the combined vacuum system of the apparatus for production line that is used for producing the OLED indicating meter.
The object 4 (shade) that at first with thickness is 40 microns is placed in the conveying box body, and it is indoor to make it enter into working vacuum, in described working vacuum chamber, by shade material is deposited on the matrix.
After carrying out several deposition cycle, should clean shade, be formed at its lip-deep organic and inorganic sediments with removal, thereby further use described shade aborning.
For this purpose, the polluted surface of shade is transferred to the vacuum conveying chamber together with the conveying box body from the working vacuum chamber, transfer to the vacuum cleaning chamber from this again.
Below be the description of device operation, wherein said device is used for implementing method required for protection and variant thereof at vacuum cleaning chamber (hereinafter referred to as vacuum chamber).
The conveying box body that contaminated shade is housed is incorporated in the hole 1 ' of vacuum chamber 1, and it is placed on the cooling support 7 that places vacuum chamber 1.
As needs, clamp mechanism 8 is dropped on the surface of cooling support 7, this surface with its on to be fixed with the rack surface of shade opposite.When as above doing, cooling support 7 is close on the shade surface of not handling.
After on shade 4 being fixed on cooling support 7 by clamp mechanism 8, make chamber 1 pressure inside reach 10
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In the time of on being placed in support 7, the surface 5 that shade 4 is handled is arranged in the opposite of the emitting surface 3 of the ion source 2 that is placed in vacuum chamber 1, and the outside of cold water from vacuum chamber 1 is fed on the cooling support 7.
The mixture of oxygen or itself and rare gas element is fed on the ion source 2.
In this specific examples, what supplied is the oxygen argon mixture that ratio was respectively 65%: 35%, and the temperature of the water of supplying from the outside of vacuum chamber 1 then is 15 to 18 ℃.
Then, 4 kilovolts positive voltages are added on the anode of ion source 2, arresting element is lighted, and 2 of ion sources have formed the linear pattern ionic fluid that the surface 5 of shade 4 is handled.
By being installed in the swing pinion 11 on the parts 10, the ion source 2 that is placed in the positioning element 10 turns to ± 60 angles of spending ionic fluid (it).This angle value is determined by the area (1200 square centimeters) on the surface 5 of handling and the quantity (being two ion sources in this specific examples) that is placed in the ion source 2 in the vacuum chamber 1.
At this moment, adjust the speed that the ionic fluid surface 5 that 4 acceptance are handled to shade is scanned by swing pinion 11, wherein said swing pinion 11 is designed to change the velocity of rotation of positioning element 10.
Usually, parts 10 are spent within the scopes of 140 degree 90 together with the angle of rotation of ionic fluid 2, and for the angle of rotation of this scope, and the sweep velocity on the surface 5 that shade 4 is handled is 0.8 to 1.0 meter per second.
The time that the surface 5 that shade 4 is handled is cleaned is fully depended on to deposit on the shade 4 and what of the inorganic materials on the mask regions within 3 to 7 minutes scope.
If the size of shade mesoporosity is suitable with the thickness of shade, then when scanning with single direction, the upstanding wall of described hole evenly cleaned will become problem.
In order to address this problem, vacuum chamber is provided with three ion sources 2, each described ion source 2 is placed in the independent positioning element 10, make in described three ion sources 2 wherein two be configured to the 3rd parallel to each other and then be arranged perpendicular to described two (Fig. 3).Thereby described two ion sources 2 are placed at grade, and are parallel to each other and be parallel to the object plane, and the 3rd then is positioned to perpendicular to described two ion sources (Fig. 3).All three ion sources 2 are positioned at (distance from shade is different) on the Different Plane on the surface 5 of handling with respect to shade 4 together with positioning element 10.
When having more than one ion source 2 in the vacuum chamber 1, this is the sole mode that obtains the cleaning quality of desired article surface and guarantee the optimum value of all processing parameters (scanning angle on the surface 5 that temperature, speed, time and shade 4 are handled).
Use nonshared control unit and programmable control device, monitor and keep the processing parameter that shade is cleaned by claimed apparatus.
Invent method and the variant thereof that proposes and be used to implement described square law device as one, when the shade that is used to make the OLED indicating meter is cleaned is general and unique, reason is, for the general shade of cleaning, and especially,, both there be not the method for similar applications at present for the ultra-thin shade of cleaning, there is not known device can provide so high output parameter yet, that is:
The time that the shade of internal vacuum chamber is cleaned is 3-7 minute;
The temperature of shade is no more than 50 ℃ in the clean;
Can not cause the damage of shade fully;
Shade can not be out of shape;
Need not from vacuum chamber, to shift out shade so that the shade surface is cleaned, with the described shade of further use.
Be intended to as all claimed method and apparatus of invention:
Reduce the heating temperature of the article surface of handling;
The productivity of clean is carried out in increase to object by ionic fluid;
Eliminate the damage of accepting the surface of processing during cleaning;
Eliminate the distortion (departing from initial geometric parameter) of object;
Can handle object with different area;
After the process that the surface of object is handled is finished, can make object from cooling off accessible separation on the support;
Improve the processing quality of ultra-thin object, the thickness of wherein said ultra-thin object is within 15 to 60 microns scope.
The device that described method (variant) and being used to is implemented the latter can be applicable under the industrial condition, and is easy to implement under industrial condition the clean of shade.Described method (variant) and device have been guaranteed the high quality of cleaning, the high duplication and the high productivity of shade.
Data source:
1.Stuart A.Hoenig, " utilizing dry ice/pressurized air clean surface magazine ", 1986 8 monthly magazines, 22-24 page or leaf;
2. No. the 0461476th, European patent, on May 29th, 1991, international classification number: H01L21/306;
3.2002 No. the 2195046th, the patent of announcing on December 20,, international classification number: H01L3/06;
4.1997 No. the 2071992nd, the patent of announcing on January 20,, international classification number: C23C14/46;
Claims (20)
1, a kind of in the production of indicating meter the method for cleaning shade, described method comprises by ion source and forms ionic fluid and be placed in shade in the described chamber and make it with respect to the ion source emitting surface in vacuum chamber, it is characterized in that, the cooling support is positioned in the vacuum chamber together with the shade of being settled, thus can be by the ribbon ion beam that focuses on to scanning facing to shade surface ionogenic emitting surface, that accept to handle; Select the tangential velocity of scanning by this way, thereby make at the single ionic fluid by during the shade surface, the received energy number of shade surface element can not surpass allows the superheated heat corresponding to maximum, and wherein oxygen or its mixture are used as formation ionic gas.
According to the described method of claim 1, it is characterized in that 2, oxygen mixes with following gas, that is: Ar, Xe, Kr, Ne, N
2, CxHy, CxFy.
According to each the described method in claim 1 and 2, it is characterized in that 3, oxygen surpasses 10% in the mixture.
4, a kind of in the production of indicating meter the method for cleaning shade, described method comprises by ion source and forms ionic fluid and be placed in shade in the described chamber and make it with respect to the ion source emitting surface in vacuum chamber, it is characterized in that, the cooling support is positioned in the vacuum chamber together with the shade of being settled, make shade be close to support by stepping up mechanism, to guarantee to cool off the thermo-contact between the surface that support and shade do not handle, and accept the surface of handling, the ribbon ion beam that then is focused scanning facing to the shade of ionogenic emitting surface; Select the tangential velocity of scanning by this way, thereby make at the single ionic fluid by during the shade surface, the received energy number of shade surface cell can not surpass allows the superheated heat corresponding to maximum, and wherein oxygen or its mixture are used as formation ionic gas.
According to the described method of claim 4, it is characterized in that 5, oxygen mixes with following gas, that is: Ar, Xe, Kr, Ne, N
2, CxHy, CxFy.
According to each the described method in claim 4 and 5, it is characterized in that 6, oxygen surpasses 10% in the mixture.
7, according to the described method of claim 4, it is characterized in that, by making shade be close to the surface of cooling off support by the magnetic field that Magnetic Field Source produced.
8, a kind of device, be used for implementation basis claim 1, the described method of in 4 each, described device comprises a vacuum chamber, described vacuum chamber has at least one and is placed in its interior ion source and shade, wherein said shade has the surface of handling facing to the acceptance of ionogenic emitting surface, it is characterized in that, described device is provided with a top and/or inner clamp mechanism that is placed in the cooling support of internal vacuum chamber and is placed in vacuum chamber extraly, wherein said clamp mechanism be used to make shade to be close to the cooling support and guarantee to cool off support and surface that shade is not accepted to handle between thermo-contact, ion source be designed to change ionic fluid and the shade surface of handling between the coordinate position of intersection.
According to the described device of claim 8, it is characterized in that 9, the accelerator that will have the linear pattern anode layer is as ion source.
10, according to the described device of claim 8, it is characterized in that, ion source in positioning element and and cooling have the gap between the support.
According to the described device of claim 10, it is characterized in that 11, positioning element is provided with a swing pinion, described swing pinion makes described positioning element together to rotate with ion source.
According to the described device of claim 11, it is characterized in that 12, positioning element is determined by ionogenic quantity that is arranged in vacuum chamber and shade area together with ionogenic angle of rotation.
According to the described device of claim 10, it is characterized in that 13, positioning element is oriented to be parallel to the longitudinal axis of ion source and cooling support.
According to the described device of claim 8, it is characterized in that 14, clamp mechanism is mounted to and can moves along the direction perpendicular to the shade surface.
According to the described device of claim 8, it is characterized in that 15, described device includes the two or more ion sources that are arranged in the positioning element.
According to the described device of claim 15, it is characterized in that 16, described ionogenic positioning element is parallel and be positioned at and be parallel to the same plane of shade planar.
According to the described device of claim 15, it is characterized in that 17, described ionogenic positioning element is not parallel and be positioned at different planes.
According to the described device of claim 11, it is characterized in that 18, described swing pinion can change the speed of rotation of positioning element.
According to the described device of claim 8, it is characterized in that 19, described clamp mechanism is made into the form of multipole magnetic system.
According to the described device of claim 19, it is characterized in that 20, described multipole magnetic system is designed to one group of permanent magnet.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EA200501086A EA008187B1 (en) | 2005-06-07 | 2005-06-07 | Method of cleaning shadow masks in display production and device therefor |
| EA200501086 | 2005-06-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1876888A CN1876888A (en) | 2006-12-13 |
| CN100577854C true CN100577854C (en) | 2010-01-06 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200610081012A Expired - Fee Related CN100577854C (en) | 2005-06-07 | 2006-05-19 | Method (variant) for cleaning shade in display production and apparatus for implementing the method |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP2007007644A (en) |
| CN (1) | CN100577854C (en) |
| EA (1) | EA008187B1 (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1998389B1 (en) | 2007-05-31 | 2018-01-31 | Applied Materials, Inc. | Method of cleaning a patterning device, method of depositing a layer system on a substrate, system for cleaning a patterning device, and coating system for depositing a layer system on a substrate |
| JP5456879B2 (en) | 2010-02-22 | 2014-04-02 | 株式会社フジキン | Mixed gas supply device |
| JP5478324B2 (en) * | 2010-03-30 | 2014-04-23 | 株式会社アルバック | Cleaning apparatus, film forming apparatus, and film forming method |
| KR20140130963A (en) * | 2013-05-02 | 2014-11-12 | 삼성디스플레이 주식회사 | Cleaning apparatus and cleaning method of organic materials |
| CN106540928A (en) * | 2016-10-24 | 2017-03-29 | 上海华力微电子有限公司 | For ohm Buddhist nun's probe repair needle device and Xiu Oumuni probes repair needle method |
| CN116347784B (en) * | 2023-04-03 | 2024-05-31 | 上海铭控传感技术有限公司 | Electronic circuit board cleaning system and method |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU1237358A1 (en) * | 1984-04-04 | 1986-06-15 | Всесоюзный Научно-Исследовательский Институт По Монтажным И Специальным Строительным Работам | Underlay for shaping back side of weld |
| SU1461595A1 (en) * | 1987-01-08 | 1989-02-28 | Институт Электросварки Им.Е.О.Патона | Method of unilateral welding |
| JP3050579B2 (en) * | 1990-09-12 | 2000-06-12 | 株式会社日立製作所 | Cleaning method and device |
| RU2071992C1 (en) * | 1991-12-24 | 1997-01-20 | Научно-производственное предприятие "Новатех" | Method of treating objects with an ion source |
| JP3365643B2 (en) * | 1992-07-06 | 2003-01-14 | 株式会社神戸製鋼所 | Ion implanter |
| JP3309101B2 (en) * | 1992-08-31 | 2002-07-29 | 株式会社シンクロン | Method and apparatus for measuring refractive index of thin film |
| RU2089654C1 (en) * | 1993-10-26 | 1997-09-10 | Московский государственный институт электроники и математики (технический университет) | Device for cooling of substrates in vacuum |
| JPH1064471A (en) * | 1996-08-19 | 1998-03-06 | Hitachi Ltd | Ion-implanting device |
| US5922179A (en) * | 1996-12-20 | 1999-07-13 | Gatan, Inc. | Apparatus for etching and coating sample specimens for microscopic analysis |
| RU2155242C2 (en) * | 1998-01-13 | 2000-08-27 | Институт проблем машиноведения РАН | Device for applying coats under vacuum |
| US6364956B1 (en) * | 1999-01-26 | 2002-04-02 | Symyx Technologies, Inc. | Programmable flux gradient apparatus for co-deposition of materials onto a substrate |
| JP2000243598A (en) * | 1999-02-17 | 2000-09-08 | Japan Atom Energy Res Inst | Neutral atom beam photo-ionization device |
| NL1015690C2 (en) * | 2000-07-12 | 2002-01-15 | Otb Group Bv | Lock for vacuum chamber. |
| JP3839674B2 (en) * | 2001-02-21 | 2006-11-01 | 株式会社アルバック | Organic vapor deposition apparatus and organic thin film manufacturing method |
| JP2003173870A (en) * | 2001-12-04 | 2003-06-20 | Sony Corp | Manufacturing device and manufacturing method of organic electroluminescent element |
-
2005
- 2005-06-07 EA EA200501086A patent/EA008187B1/en not_active IP Right Cessation
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2006
- 2006-05-19 CN CN200610081012A patent/CN100577854C/en not_active Expired - Fee Related
- 2006-06-06 JP JP2006157099A patent/JP2007007644A/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| CN1876888A (en) | 2006-12-13 |
| EA200501086A1 (en) | 2006-12-29 |
| EA008187B1 (en) | 2007-04-27 |
| JP2007007644A (en) | 2007-01-18 |
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