CN100561678C - 硅片表面的处理方法 - Google Patents
硅片表面的处理方法 Download PDFInfo
- Publication number
- CN100561678C CN100561678C CNB2006100287844A CN200610028784A CN100561678C CN 100561678 C CN100561678 C CN 100561678C CN B2006100287844 A CNB2006100287844 A CN B2006100287844A CN 200610028784 A CN200610028784 A CN 200610028784A CN 100561678 C CN100561678 C CN 100561678C
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- silicon chip
- mixed liquor
- processing method
- silicon
- chip surface
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
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Claims (9)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2006100287844A CN100561678C (zh) | 2006-07-10 | 2006-07-10 | 硅片表面的处理方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CNB2006100287844A CN100561678C (zh) | 2006-07-10 | 2006-07-10 | 硅片表面的处理方法 |
Publications (2)
Publication Number | Publication Date |
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CN101106083A CN101106083A (zh) | 2008-01-16 |
CN100561678C true CN100561678C (zh) | 2009-11-18 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CNB2006100287844A Expired - Fee Related CN100561678C (zh) | 2006-07-10 | 2006-07-10 | 硅片表面的处理方法 |
Country Status (1)
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CN (1) | CN100561678C (zh) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102656250B (zh) * | 2009-09-21 | 2015-02-25 | 巴斯夫欧洲公司 | 含水酸性蚀刻溶液和使单晶和多晶硅衬底的表面纹理化的方法 |
US9018520B2 (en) * | 2010-09-14 | 2015-04-28 | Shin-Etsu Chemical Co., Ltd. | Solar cell and manufacturing method thereof |
CN102181941B (zh) * | 2011-04-08 | 2013-01-30 | 光为绿色新能源股份有限公司 | 一种制备多晶硅绒面的方法 |
CN102779770B (zh) * | 2012-07-25 | 2014-08-20 | 中国科学院长春光学精密机械与物理研究所 | 太阳能电池表面绒面结构的检测方法 |
CN103398939A (zh) * | 2013-08-12 | 2013-11-20 | 韩华新能源(启东)有限公司 | 一种快速、简便识别多晶硅片质量的方法 |
CN107968134B (zh) * | 2017-11-09 | 2020-08-11 | 常州捷佳创精密机械有限公司 | 一种药液添加系统及方法 |
CN109346398A (zh) * | 2018-09-26 | 2019-02-15 | 广西桂芯半导体科技有限公司 | 一种超薄芯片生产方法 |
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2006
- 2006-07-10 CN CNB2006100287844A patent/CN100561678C/zh not_active Expired - Fee Related
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Publication number | Publication date |
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CN101106083A (zh) | 2008-01-16 |
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C06 | Publication | ||
PB01 | Publication | ||
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING Effective date: 20120201 |
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C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20120201 Address after: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Co-patentee after: Semiconductor Manufacturing International (Beijing) Corporation Patentee after: Semiconductor Manufacturing International (Shanghai) Corporation Address before: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20091118 Termination date: 20180710 |
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CF01 | Termination of patent right due to non-payment of annual fee |