CN100545683C - The method for making of gradient type filtering sheet - Google Patents
The method for making of gradient type filtering sheet Download PDFInfo
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- CN100545683C CN100545683C CNB2006101636043A CN200610163604A CN100545683C CN 100545683 C CN100545683 C CN 100545683C CN B2006101636043 A CNB2006101636043 A CN B2006101636043A CN 200610163604 A CN200610163604 A CN 200610163604A CN 100545683 C CN100545683 C CN 100545683C
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Abstract
A kind of method for making of gradient type filtering sheet, known technology need expend the suitable time when plated film is tested and cost covers the manufacturing process that plate is proofreaied and correct in order to improve.The present invention utilizes the software simulation means to carry out plating the simulation of gradient type film earlier on transparent base, grasp each monofilm material, coating machine internal gas flow with cover plate be arranged on plated film the time physical property, just really carry out the manufacturing process of each monofilm plated film, reach with this and save time and the success ratio of cost, plated film can improve, test the number of times minimizing of manufacturing process, the effects such as improved efficiency of manufacturing process greatly.Key step comprises the gradually layer variation of decision filter plate earlier, estimates corresponding monofilm thickness with the software simulation means again, calculates the form of covering plate according to thickness of monolayer afterwards, and last just the making in coating machine has the gradually layer filter plate that changes.
Description
Technical field
The present invention relates to a kind of method for making of gradient type filtering sheet, particularly utilize the software simulation means will plate the required illiteracy template die of monofilm and draw up, carry out the multilayer film formation process of gradient type filtering sheet more in view of the above.
Background technology
As the projector that becomes known for throwing lantern slide (slide projector), LCD projector (LCD projector) is used for TV, the image frame in computer or other input sources is projected to a kind of equipment on the screen, this LCD projector contains three independently liquid-crystalline glasses panels (LCD glass panels) usually, be respectively red (R), green (G) and blue three primary colors such as (B), backlight utilizes Halogen lamp LED (halogen lamp) to produce usually better colour temperature (color temperature) and the color that contains wide frequency spectrum (spectrum), makes that the pixel on the irradiating liquid crystal face glass produces correct projection picture.
In above-mentioned LCD projector projection process, may be because the angle of projection light (backlight) produces colour cast (color-shift), can utilize two gradient type filtering sheets (gradient filter) to carry out the light angle compensation, can correctly produce the three primary colors of light.
And known gradient type filtering sheet is the color distribution that shows on a slice glass sheet from shallow to deep, known as shown in Figure 1 gradient type filtering sheet synoptic diagram, wherein filter plate plate 10 is a film 11 of making multilayer on the transparent base 12, as in deposition (Deposition) or evaporation (Evaporation Deposition) mode, form filter plate with dichromatism (dichroic) as figure, wherein each layer film can each have different reflectivity, penetrance or thickness, can irradiate the color that continuity changes.For instance, show among the figure along axis 14 to form the gradually layer pattern (density-gradientpattern) that continuous density changes, with the change color of regulating or compensation is projected.
In the known technology, when carrying out the operation of plated film, can pass through auto-control mode, estimate the relation of coating film thickness and penetrance or spectrum earlier, and in manufacturing process, measure penetrance or spectrum and estimation results comparison immediately, with the thickness of control plated film.Perhaps, in evaporated film, wherein cover the correction of plate (Mask), use the mode of error checking (try-and-error), reach the form of the evaporation gradient type filtering sheet of wanting.Being provided with of above-mentioned illiteracy plate can influence that air-flow distributes in the coating machine, and then makes on the base material material of evaporation that the variation in thickness of expection be arranged.
For instance, evaporator board synoptic diagram as shown in Figure 2, it shown in the figure vacuum chamber (vacuumchamber) 20, the substrate holder 22 that wherein mainly comprises a umbrella, can be used for being provided with the base material that needs evaporation, as the transparent base among the figure 24, the base material below is provided with one or more pieces and covers plate, this example shows two and covers plate 26 and 26 ', corresponding respectively two evaporation source 28a and 28b, by the air-flow distribution in the adjustment change vacuum chamber 20 that covers plate 26 and 26 ' shape and position, to influence the distribution of material of evaporation on one or more transparent bases 24.Vacuum chamber 20 belows more are provided with needs the material of evaporation evaporation source 28a and 28b, usually be set to the material of difference and mutual collocation respectively, and the below is provided with electron gun 27 ' and 27 again "; penetrate ion by the electron-beam excitation evaporation source 28a of generation and the material of 28b; carry out plated film through the adjustment of covering plate 26,26 '.
Summary of the invention
Yet the instant mode of proofreading and correct or manually testing of the automatic control of known technology utilization is carried out the plated film test, especially needs to plate in the manufacturing process of 20 to 40 layer films, all needs to expend suitable time and cost in the correction of covering plate.In view of this, the present invention proposes a kind of method for making of gradient type filtering sheet, a kind of simulation that plates the gradient type film earlier with the software simulation means is proposed, grasp earlier each monofilm material, the coating machine internal gas flow distributes with cover plate be arranged on plated film the time the flow-disturbing characteristic, after simulation, just really carry out the manufacturing process of each monofilm plated film, reach with this and save time and the success ratio of cost, plated film can improve, test the number of times minimizing of manufacturing process, the effects such as improved efficiency of manufacturing process greatly.
The method for making key step of gradient type filtering sheet disclosed in this invention comprises that the gradually layer of decision filter plate changes earlier, estimate corresponding monofilm thickness with the software simulation means again, calculate to cover the form of plate afterwards according to thickness of monolayer, and finish in coating machine, to make and have the filter plate that layer gradually changes.
And wherein preferred embodiment prepares film coating environment earlier, comprises coating machine, with the substrate holder of wherein carrying transparent base and one or more coating source, with the excitation apparatus that excites this coating source.Determine the required gradually layer form that is produced on the transparent base again, estimating to reach gradually by simulation means afterwards, layer changes required amounts of thickness variation, extrapolate corresponding monofilm thickness indirectly, the instrument that this simulation means utilized comprises a plurality of high-index material modules and low-index material module, utilizes wherein parameter adjustment, extrapolates the form of covering plate, and according to this monofilm thickness making illiteracy plate, at last, this illiteracy plate is set in this coating machine, and making formation has this gradually filter plate of layer form.And the step that repeats said method is finished the gradient type filtering sheet of multilayer.
Description of drawings
Fig. 1 is for using the gradient type filtering sheet synoptic diagram of technology;
Figure 2 shows that the evaporator board synoptic diagram of known technology;
Fig. 3 A is depicted as the light transmittance of filter plate and the curve map of optical wavelength relation;
Fig. 3 B is depicted as gradually other curve maps of layer needs reckoning of basis;
Fig. 3 C is depicted as the synoptic diagram of the corresponding transparent base of curve wavelength coverage position;
Fig. 4 A and Fig. 4 B are depicted as the adjustment synoptic diagram that covers plate;
Fig. 5 is shown as the coating machine synoptic diagram that utilizes the electron beam evaporation plating method;
Fig. 6 is the main manufacturing process of the present invention;
Fig. 7 is the process flow diagram of the preferred embodiments of the present invention.
Wherein, description of reference numerals is as follows:
Axis 14
Substrate holder 22
Electron gun 27 ', 27 "
1: 301
1: 302
Thirdly 303
Point 401,402,403,404,405,406
Substrate holder 51
Coating source 56a, 56b
Embodiment
The invention discloses a kind of method for making of gradient type filtering sheet, utilize first material and the thickness that determines to be plated on the filter plate of software simulation means (as optical thin film simulation softward Macleod), to estimate that can obtain needed gradually layer under how many monofilm thickness changes, and extrapolate its corresponding illiteracy plate shape in coating machine (coater), each required other monofilm desired thickness and corresponding illiteracy plate shape of double counting is again reached the multilayer film formation process of gradient type filtering sheet.
Above-mentioned software simulation means utilization is made the optical thin film simulation softward (as Macleod) of filter plate and is reached with mechanical drawing software (as AutoCAD), wherein mainly contain a plurality of modules (module) of simulation plating mould material requested, for including a plurality of modules of high-index material and low-index material, instrument as the plated film simulation, adjust wherein sequence of modules and adjust wherein coating film thickness again, the parameter of penetrance or spectrum, utilize software simulation means simulation Coating Materials, the structure of coating machine etc., the penetrance of estimate sheet tunic plated film and the isoparametric variable quantity of thickness, making can be fast in manufacturing process, finish the operation of plated film exactly.Principal character is to replace known manufacturing process with estimated monofilm thickness, after cooperating rationale to make to cover plate to adjust to plate out estimated monofilm thickness with the software simulation means, be that available identical illiteracy plate is produced needed gradually metafiltration wave plate, so that shorten the manufacturing process time, and can reduce cost, promote efficient.
Before carrying out gradient type filtering sheet manufacturing process, the present invention utilizes the software simulation means to carry out environmental simulation earlier, and the color wavelength of monofilm can be divided into the monofilm of a plurality of basic colors as used herein.Beginning goes out required spectral composition with the monofilm thickness module simulation of a plurality of different refractivities earlier, as the module of utilizing high and low refractive index to intert is simulated, the module of high and low refractive index is wants the variable that changes, after the demand adjustment according to gradient type filtering sheet, draw each monofilm coating film thickness, and go out to cover the plate form in prediction on such basis, as shape.
The present invention has following advantage:
Once just success for layer gradually changes little filter plate;
Also only need to do some minor modifications according to the manufacturing process spectral results again for changing bigger filter plate;
Be to substitute original complicated manufacturing process during test manufacturing process with the plating monofilm;
Save many times and cost;
Success ratio can improve greatly;
The number of times of test manufacturing process also can reduce many; And
The shape that can only change an illiteracy plate in the coating machine promptly can be reached required gradually layer variation.
For reaching the plated film manufacturing process of carrying out each monofilm in the mode of simulation monofilm characteristic, the physical characteristics that needs to be plated on the transparent base at monofilm is earlier analyzed, and sees also the light transmittance (transmittance) of filter plate designed shown in Fig. 3 A and the curve map of optical wavelength relation.
Wherein transverse axis is optical wavelength (λ), the longitudinal axis is light transmittance (T), the spectral characteristic of this curve display filter plate, promptly in the special spectrum scope, be graphic wavelength coverage, this filter plate has different penetrances at each wave band, and the embodiment among the figure has less penetrance in the long part of wavelength, and the short part of wavelength has penetrance preferably, and can represent a reference point of this filter plate variation in thickness and spectrum relation with the wavelength of its intermediate point A correspondence.
After above-mentioned physical analysis, Fig. 3 B shows can extrapolate variation in thickness required on its filter plate by the wavelength coverage of curve representation and the relation of penetrance according to need, as by the represented wavelength coverage of the intermediate point of curve 31 and the resulting filter plate structure of relation and the thickness of penetrance, according to required gradually layer condition, under the change of a certain thickness, determine curve 32 to the left side, to the right decision curve 33, curve 31,32,33 have the characteristic of the saturating rate of the pairing filter plate of different wavelength coverages respectively, the ratio of this variation in thickness calculates to that the monofilm thickness that is corresponded to changes, the shape of covering plate is extrapolated in the variation of monofilm thickness thus again, and the present invention can be applied to more than two, the embodiment of a plurality of curves.For instance, if the monofilm of corresponding three kinds of colors when being plated on the transparent base, can produce the gradually layer effect between different colours; The different depths in also can corresponding same tone (hue) can produce the gradually layer effect between the depth, as the effect of GTG when plated film.Go out the required monofilm thickness that plates according to above-mentioned a plurality of curve calculatings more afterwards.
See also the synoptic diagram of the corresponding transparent base of curve wavelength coverage shown in Fig. 3 C 30 positions again.The present invention arrives corresponding monofilm coating film thickness according to the wavelength coverage of the different monofilm materials of representative shown in the figure with the curve calculating of penetrance, as the characteristic of curve 31 can corresponding evaporation 1: 301 filter plate structural thickness in transparent base 30, again according to layer demand decision curve 32 gradually, and correspond to the filter plate structural thickness that 1: 302 of transparent base 30 will plate, extrapolate the form of required illiteracy plate by above-mentioned 2 monofilm thickness that simulated.When plated film, can change the air-flow distribution of Coating Materials in coating machine by covering plate, 1: 301 to second: 302 gradually layer pattern that forms different-thickness on transparent base 30.In like manner, by the represented simulated behavior filter plate structural thickness of the intermediate point of curve 33, promptly correspond to the thirdly 303 required thickness that plate of transparent base 30, again when plated film, the air-flow that changes the Coating Materials that becomes gaseous state by the illiteracy plate distributes, and can form 1: 301 and arrive the thirdly gradually layer pattern of 303 different-thickness on transparent base 30.
Above-mentioned each curve 31,32,33 represent respectively the one-tenth-value thickness 1/10 that will on the transparent base of correspondence, plate, for forming specific gradually layer pattern, extrapolate curve 32 and curve 33 according to required gradually layer form by curve 31, extrapolate the corresponding required material thickness that plates again separately.For instance, if the optical texture that the high low refractive index film after the design stacks can obtain curve 31,32 of curves are the resulting result of variation in thickness of all high index of refraction numbers of plies of 0.95 times, curve 33 is the resulting result of variation in thickness of all high index of refraction numbers of plies of 1.05 times, comparatively speaking, changing the thickness of all low-refraction numbers of plies or both thickness all changes also and can obtain identical result.
Afterwards, again by each curve 31,32,33 extrapolate the corresponding required monofilm thickness that plates, assumed curve 31 corresponds to suitable high index of refraction monofilm thickness, 32 of curves correspond to this monofilm thickness of 0.95 times, curve 33 corresponds to 1.05 times monofilm thickness, then, via above-mentioned utilize the monofilm thickness that the software simulation means estimate (such as the thickness of reckoning 0.95 to 1.05), extrapolate the form of relative illiteracy plate again, main form is the change of shape, when plated film, can regulate wherein air-flow distribution because cover plate, and then change the ionic forms of plated film on transparent base, finish the filter plate of gradient type.Illiteracy plate synoptic diagram shown in Fig. 4 A and Fig. 4 B can meet the plated film condition (shown in Figure 2 as known technology) of one or more transparent bases simultaneously by an adjustment of covering each position shape of plate
Inhomogeneity illiteracy plate 42 forms before Fig. 4 A is shown as and does not adjust, olive shape that can be as shown in FIG., or the form of other shapes, cover the vacuum chamber that plate 42 is arranged in coating machine, carry out the adjustment of vacuum indoor location with support bar 40 or other devices that supports illiteracy plate 42.The present invention utilizes the software simulation means to carry out the estimation of coating film thickness variable quantity earlier, extrapolates the monofilm thickness of correspondence indirectly, calculates the form of covering plate 42 again, promptly can reach required gradually layer variation so can only change the shape of an illiteracy plate in the coating machine.And the form of covering plate is except shape, more has to utilize wherein support bar to adjust the position that is arranged in vacuum chamber, with the angle of mask edge and support bar.After covering the reckoning of plate form, be depicted as through adjusted illiteracy plate 42 ' as Fig. 4 B, utilize the angular setting of mask edge and support bar to produce a plurality of concavo-convex radians as can be seen,, produce gradually layer pattern of difference with different radian designs for the position of the transparent base of correspondence.Such as, the position of the thinner thickness that plate, just more with covering the place that plate 42 ' hides, thick position, then need the place that hides just less.
As having 3: 401 in the radian scope of covering plate 42 ' among the figure, 402,403, express the parameter that three needs are adjusted, comprise that these 3 angles to 40 of the relative position of substrate holder and support bars change (actual operation is not exceeded with 3), to produce different coating film thicknesses, be positioned at 1: 301, second: 302 on the transparent base 30 on the substrate holder and thirdly 303 in the correspondence pattern, can be when making plated film in 1: 301 to the second: 302 gradually layer effect that produces in various degree, make 1: 301 to the layer effect gradually of 303 generations thirdly.Another embodiment is shown in the transparent base 30 ' among the figure, cover 3: 404 on another radian in the plate 42 ', 405,406 after adjusting, to correspond to the 4th: 304 on the transparent base 30 ', the the 5th: 305 and the 6th: 306, to produce a gradually layer effect in transparent base 30 ' the last the 4th 304 to the 5th: 305, and also produce another gradually layer effect in the the 4th: 304 and the 0 6th: 306.
Above-mentionedly produce with respect to gradually layer effects different on a plurality of transparent bases with spatial variations between substrate holder by covering plate, several basic information must be arranged earlier, utilize these basic information then can extrapolate pairing monofilm thickness under changing at different gradually layers, and then extrapolate the shape of covering plate, correspond to the position that homogeneity is covered plate and support bar such as each circle of the substrate holder that the coating machine umbrella will be arranged, with convenient position and the angle of estimating the illiteracy plate corresponding to each circle of substrate holder, to plate suitable monofilm thickness.For instance, one gradually the specification of metafiltration wave plate be central point T (50)=500nm, when two positions are respectively 510nm and 490nm in addition, suppose that the 500nm central point corresponds to certain suitable monofilm thickness, can learn that via the optical thin film software simulation 510nm corresponds to 1.05 times of monofilm thickness, and 490nm corresponds to 0.95 times monofilm thickness, therefore can estimate by different monofilm thickness and cover required angular dimension on the plate diverse location, the illiteracy plate shape of corresponding this specification of so just can drawing.
Fig. 5 shows that the preferred embodiments of the present invention use a kind of electron beam evaporation plating method (Electron BeamEvaporation) synoptic diagram, by the heating tungsten filament outer-shell electron kinetic energy is overflowed greater than binding energy, and utilize high potential difference accelerated electron and magnetic field controlling electron beam track, make it strike vapor deposition source and produce high heat and allow the vapor deposition source partial ionization, and under the environment of high vacuum attached on by transparent base.It shown in the figure vacuum chamber 50, wherein primary structure comprises the substrate holder 51 of a umbrella, in order to carry a plurality of transparent bases 52, vacuum chamber 50 belows are provided with material film plating source (film-plating source) 56a and the 56b that need plate, usually be set to the material of difference and mutual collocation respectively, as one is the material of high index of refraction, another is the material of low-refraction, the below is provided with excitation apparatus 58 ' and 58 "; penetrate ion by the electron-beam excitation coating source 56a of its generation and the material of 56b; adjust the air-flow that 50 ions scatter in the vacuum chamber through one or more illiteracy plates 54 and 54 ' again and distribute; this example is two and covers plate 54 and 54;; corresponding respectively two coating source 56a and 56b, to carry out plated film, this covers plate 54 and 54 ' and carries out the position adjustment by support bar 53 and 53 ' respectively.
According to the foregoing description, the present invention utilizes method for making key step that suitable monofilm thickness makes gradient type filtering sheet as shown in Figure 6, the gradually layer that comprises the filter plate that decision earlier is required changes (step S601), analyze spectrum again, relation according to penetrance wherein and each wave band wavelength coverage, estimating to reach gradually with the software simulation means, layer changes required amounts of thickness variation, calculate the monofilm thickness (step S603) of corresponding required gradually layer pattern again, the monofilm thickness of Tui Suaning thus, calculate again and cover the plate form, be mainly shape (step S605), covering plate with this is arranged in the coating machine, carry out the plated film manufacturing process of monofilm,, repeat the making that above-mentioned steps is progressively finished the gradient type filtering sheet of multilayer as carrying out (step S607) with the electron beam evaporation plating method.
Based on above-mentioned key step, the preferred embodiments of the present invention flow process as shown in Figure 7.
Prepare film coating environment earlier, comprise coating machine, wherein be provided with the umbrella substrate holder of carrying transparent base, the every circle of the substrate holder of umbrella has the correspondence position relation with respect to covering plate and its support bar, and be provided with one or more coating sources, and excite the Ionized excitation apparatus of coating source (step S701); Afterwards, environment according to above-mentioned preparation, the required gradually layer form (filter plate) that is produced on the transparent base of decision earlier, comprise gradually the depth variation, change color of layer etc., estimate to reach the gradually required amounts of thickness variation of layer variation by the software simulation means according to required gradually layer form, calculate one or more monofilm thickness (step S703) more indirectly; Monofilm thickness by gained changes the variation of reckoning illiteracy plate in pairing position, promptly extrapolates the form of this illiteracy plate, comprises that mainly shape, illiteracy plate utilize the position of support bar adjustment and the angle (step S705) of mask edge and support bar; Result in prediction on such basis makes the illiteracy plate, utilize monofilm to test plated film (step S707) again, whether test variable quantity with this has and meets the demand of being calculated (step S709), if then do not cover plate form (step S711) when meeting according to test plated film results modification, and resumes step S707, if meet, promptly can carry out actual plated film manufacturing process, whether the gradient type filtering sheet (step S713) that system plating is required after the plated film, also need be checked (step S715) up to specification, if and do not meet demand, then still need revise and cover plate (step S717),, then finish this plated film manufacturing process (step S719) if meet demand.At last, utilize and repeat above-mentioned steps, can on transparent base, produce the single-layer membrane structure of multilayer, form the gradient type filtering sheet of required making, and its main embodiment is used for carrying out in the LCD projector (LCD projector) the light angle compensation.
Revise the corresponding illiteracy plate of the Coating Materials shape that the step of covering plate can be utilized high index of refraction in the coating machine among the embodiment of the invention described above method, as corresponding Coating Materials Ta
2O
5, TiO
2, Nb
2O
5, M
3Deng the illiteracy plate; Or only need revise low-index material illiteracy plate shape in the coating machine, as SiO
2, MgF
2Illiteracy plate etc. usefulness; Or the illiteracy plate of interior low-refraction of coating machine and high-index material all needs to revise.
In sum, the present invention is the method for making of gradient type filtering sheet, utilizes the means of software simulation to carry out each monofilm thickness and the simulation of covering the plate shape earlier, can save Production Time and cost when carrying out actual plated film manufacturing process, the success ratio of plated film is improved greatly, and promote efficient.
The above is the preferred embodiments of the present invention only, is not used in restriction claim of the present invention, therefore as long as the structural change of the equivalence that utilization instructions of the present invention and accompanying drawing are made all in like manner is contained in the scope of the present invention.
Claims (10)
1. the method for making of a gradient type filtering sheet is characterized in that described method comprises:
Determine the gradually layer of one or more filter plates to change;
With the relation of the penetrance of simulation means analysis list tunic with each wave band wavelength coverage in spectrum, the gradually layer by this filter plate changes the variable quantity that estimates described monofilm thickness again, to calculate corresponding described thickness of monolayer;
Calculate the form of one or more illiteracy plates, calculate the form of described illiteracy plate according to described thickness of monolayer; And
In the coating machine that described illiteracy plate is set, make the described gradually described filter plate of layer variation that has in the electron beam evaporation plating mode.
2. the method for making of gradient type filtering sheet as claimed in claim 1 is characterized in that finishing by the step that repeats described method the described gradient type filtering sheet of multilayer.
3. the method for making of gradient type filtering sheet as claimed in claim 1 is characterized in that described electron beam evaporation plating mode utilizes one or more excitation apparatus to excite one or more coating sources to penetrate ions and carry out plated film.
4. the method for making of gradient type filtering sheet as claimed in claim 3 is characterized in that described coating source comprises the material of high index of refraction and the material of low-refraction, and the material of described high index of refraction is Ta
2O
5, TiO
2, Nb
2O
5, M
3One of or its combination, and the material of low-refraction is SiO
2, MgF
2One of or its combination.
5. the method for making of gradient type filtering sheet as claimed in claim 1, the form that it is characterized in that described illiteracy plate comprise described illiteracy plate shape, utilize the angle of position, described mask edge and one or more support bars that one or more support bars adjust.
6. the method for making of a gradient type filtering sheet is characterized in that described method comprises:
The preparation film coating environment comprises coating machine, wherein is provided with substrate holder and one or more coating source of the one or more transparent bases of carrying, with one or more excitation apparatus that excite described coating source;
Determine the required gradually layer form that is produced on the described transparent base;
After analyzing the penetrance of one or more monofilms and the relation of each wave band wavelength coverage in spectrum by simulation means, gradually layer by one or more filter plates changes the variable quantity of estimating these one or more monofilm thickness, to estimate described monofilm thickness, described simulation means mainly utilizes wherein a plurality of high-index material modules of adjustment and low-index material module simulation to go out required spectral composition, to estimate described monofilm thickness;
Make one or more illiteracy plates according to described monofilm thickness;
Described illiteracy plate is set in described coating machine, and makes these one or more filter plates that formation has described gradually layer form in the electron beam evaporation plating mode.
7. the method for making of gradient type filtering sheet as claimed in claim 6 is characterized in that finishing by the step that repeats described method the described filter plate of multilayer.
8. the method for making of gradient type filtering sheet as claimed in claim 6 is characterized in that described electron beam evaporation plating mode utilizes described excitation apparatus to excite described coating source to penetrate ion and carry out plated film.
9. the method for making of gradient type filtering sheet as claimed in claim 6 is characterized in that described coating source comprises the material of high index of refraction and the material of low-refraction, and the material of described high index of refraction is Ta
2O
5, TiO
2, Nb
2O
5, M
3One of or its combination, and the material of described low-refraction is SiO
2, MgF
2One of or its combination.
10. the method for making of gradient type filtering sheet as claimed in claim 6, the form that it is characterized in that described illiteracy plate comprise described illiteracy plate shape, utilize the angle of position, described mask edge and one or more support bars that one or more support bars adjust.
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| CNB2006101636043A CN100545683C (en) | 2006-11-30 | 2006-11-30 | The method for making of gradient type filtering sheet |
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| CN102542107B (en) * | 2011-12-28 | 2013-09-04 | 浙江大学 | Method for controlling surface color of fluorine-doped tin oxide coated glass |
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