CN100540745C - alkaline etching liquid and production method thereof - Google Patents
alkaline etching liquid and production method thereof Download PDFInfo
- Publication number
- CN100540745C CN100540745C CNB2007100762965A CN200710076296A CN100540745C CN 100540745 C CN100540745 C CN 100540745C CN B2007100762965 A CNB2007100762965 A CN B2007100762965A CN 200710076296 A CN200710076296 A CN 200710076296A CN 100540745 C CN100540745 C CN 100540745C
- Authority
- CN
- China
- Prior art keywords
- liquid
- etching
- sub
- alkali etching
- additive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 238000005530 etching Methods 0.000 title claims abstract description 53
- 239000007788 liquid Substances 0.000 title claims abstract description 30
- 238000004519 manufacturing process Methods 0.000 title abstract description 5
- 239000003513 alkali Substances 0.000 claims abstract description 23
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims abstract description 16
- 238000000034 method Methods 0.000 claims abstract description 13
- 239000000654 additive Substances 0.000 claims abstract description 12
- 230000000996 additive effect Effects 0.000 claims abstract description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 10
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 claims abstract description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 8
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 claims abstract description 8
- 229910021529 ammonia Inorganic materials 0.000 claims abstract description 8
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 8
- 239000000203 mixture Substances 0.000 claims abstract description 8
- 229910000147 aluminium phosphate Inorganic materials 0.000 claims abstract description 4
- 239000002131 composite material Substances 0.000 claims abstract description 4
- 230000002950 deficient Effects 0.000 claims abstract description 4
- 239000002994 raw material Substances 0.000 claims abstract description 4
- 150000003839 salts Chemical class 0.000 claims abstract description 4
- 239000007858 starting material Substances 0.000 claims abstract description 4
- PODWXQQNRWNDGD-UHFFFAOYSA-L sodium thiosulfate pentahydrate Chemical compound O.O.O.O.O.[Na+].[Na+].[O-]S([S-])(=O)=O PODWXQQNRWNDGD-UHFFFAOYSA-L 0.000 claims description 2
- 239000010949 copper Substances 0.000 abstract description 30
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract description 20
- 229910052802 copper Inorganic materials 0.000 abstract description 20
- 239000012452 mother liquor Substances 0.000 abstract description 13
- 230000003628 erosive effect Effects 0.000 abstract description 10
- 239000011734 sodium Substances 0.000 abstract description 3
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 abstract description 2
- 238000001311 chemical methods and process Methods 0.000 abstract description 2
- 239000002244 precipitate Substances 0.000 abstract description 2
- 229910052708 sodium Inorganic materials 0.000 abstract description 2
- 238000005406 washing Methods 0.000 abstract description 2
- SQGYOTSLMSWVJD-UHFFFAOYSA-N silver(1+) nitrate Chemical compound [Ag+].[O-]N(=O)=O SQGYOTSLMSWVJD-UHFFFAOYSA-N 0.000 description 7
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonia chloride Chemical compound [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 description 6
- 238000001556 precipitation Methods 0.000 description 5
- 238000004458 analytical method Methods 0.000 description 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- KCXVZYZYPLLWCC-UHFFFAOYSA-N EDTA Chemical compound OC(=O)CN(CC(O)=O)CCN(CC(O)=O)CC(O)=O KCXVZYZYPLLWCC-UHFFFAOYSA-N 0.000 description 3
- 235000019270 ammonium chloride Nutrition 0.000 description 3
- 239000003153 chemical reaction reagent Substances 0.000 description 3
- 238000004448 titration Methods 0.000 description 3
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 description 2
- 238000013016 damping Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 239000004576 sand Substances 0.000 description 2
- 229910001961 silver nitrate Inorganic materials 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- 241000370738 Chlorion Species 0.000 description 1
- 241000675108 Citrus tangerina Species 0.000 description 1
- 235000011114 ammonium hydroxide Nutrition 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910001431 copper ion Inorganic materials 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- KMUONIBRACKNSN-UHFFFAOYSA-N potassium dichromate Chemical compound [K+].[K+].[O-][Cr](=O)(=O)O[Cr]([O-])(=O)=O KMUONIBRACKNSN-UHFFFAOYSA-N 0.000 description 1
- 229940048842 sodium xylenesulfonate Drugs 0.000 description 1
- QUCDWLYKDRVKMI-UHFFFAOYSA-M sodium;3,4-dimethylbenzenesulfonate Chemical compound [Na+].CC1=CC=C(S([O-])(=O)=O)C=C1C QUCDWLYKDRVKMI-UHFFFAOYSA-M 0.000 description 1
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- ing And Chemical Polishing (AREA)
Abstract
Description
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2007100762965A CN100540745C (en) | 2007-07-04 | 2007-07-04 | alkaline etching liquid and production method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2007100762965A CN100540745C (en) | 2007-07-04 | 2007-07-04 | alkaline etching liquid and production method thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101078121A CN101078121A (en) | 2007-11-28 |
CN100540745C true CN100540745C (en) | 2009-09-16 |
Family
ID=38905775
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2007100762965A Expired - Fee Related CN100540745C (en) | 2007-07-04 | 2007-07-04 | alkaline etching liquid and production method thereof |
Country Status (1)
Country | Link |
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CN (1) | CN100540745C (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103819026A (en) * | 2014-03-10 | 2014-05-28 | 惠州Tcl环境科技有限公司 | Resource utilization method of high-concentration ammonia nitrogen waste liquid |
CN107740105A (en) * | 2017-11-09 | 2018-02-27 | 佛山市华希盛化工有限公司 | A kind of alkaline etching liquid and preparation method thereof |
CN113088974B (en) * | 2021-04-08 | 2022-05-10 | 广东连发助剂厂有限公司 | Alkaline copper etching solution and production process thereof |
-
2007
- 2007-07-04 CN CNB2007100762965A patent/CN100540745C/en not_active Expired - Fee Related
Non-Patent Citations (4)
Title |
---|
碱性蚀刻盐的研制. 叶瑾亮,李伟浩.广东化工,第4期. 2002 |
碱性蚀刻盐的研制. 叶瑾亮,李伟浩.广东化工,第4期. 2002 * |
铜表面化学蚀刻的研究. 朱绒霞.应用化工,第34卷第5期. 2005 |
铜表面化学蚀刻的研究. 朱绒霞.应用化工,第34卷第5期. 2005 * |
Also Published As
Publication number | Publication date |
---|---|
CN101078121A (en) | 2007-11-28 |
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GR01 | Patent grant | ||
DD01 | Delivery of document by public notice |
Addressee: Yang Huanjun Document name: Notification to Pay the Fees |
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CP01 | Change in the name or title of a patent holder | ||
CP01 | Change in the name or title of a patent holder |
Address after: 519085 Zhuhai Jinding Science and Technology Industrial Park, Jin Feng Road, No. 26, No. Patentee after: Zhuhai Shun Ze Polytron Technologies Inc Address before: 519085 Zhuhai Jinding Science and Technology Industrial Park, Jin Feng Road, No. 26, No. Patentee before: Zhuhai Shunze Electronic Industry Co., Ltd. |
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DD01 | Delivery of document by public notice | ||
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Addressee: Yang Huanjun Document name: Notification of Passing Examination on Formalities |
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CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090916 Termination date: 20210704 |