CN100529970C - Projection exposing device - Google Patents
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- CN100529970C CN100529970C CNB2007100922409A CN200710092240A CN100529970C CN 100529970 C CN100529970 C CN 100529970C CN B2007100922409 A CNB2007100922409 A CN B2007100922409A CN 200710092240 A CN200710092240 A CN 200710092240A CN 100529970 C CN100529970 C CN 100529970C
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Abstract
The invention provides a projection exposing device, restraining the size of device in horizontal and vertical direction so as to make smaller set cubage than existing device's. The projection exposing device(20) uses the exposure platform(24) arranged in the vertical direction, exposing the filmy workpiece(F) by projecting the mask(M)'s pattern on it. The projection exposing device comprises: carrying mechanism(25), moving the workpiece to the exposure platform(24) in vertical direction; projection optical mechanism, having Dyson optical system(23) arranged at the positon adjacent to the carrying mechanism with the exposure platform as a border between them. The Dyson optical system makes the optical axes of incidence light and emergent light of the system orthogonally intersect with the workpiece on the exposure platform.
Description
Technical field
The present invention about a kind of with high-resolution graphic pattern projection on the film belt-shaped workpieces and the exposure projection aligner, especially in regard to a kind of projection aligner that area is set that can effectively utilize in dust free room.
Background technology
Adopt the film belt-shaped workpieces more and more many in recent years as the commodity of substrate for exposure.For example, film circuit board is used in the installation of the electronic component of SIC (semiconductor integrated circuit) and TAB (Tape Automated Bonding) mode.In the manufacturing of this film circuit board, use photoetching technique, the exposure manufacture process that the transcription that a processing procedure in this photoetching is a circuit pattern is used.Its processed film circuit board is the film band shape, and very thin thickness is below the 0.05mm, and length is about 200m.The pattern that is formed on this film belt-shaped workpieces is the quite strict technology of operation task for for example resolution below 10 μ m.Therefore, in exposure manufacture process, the carrying technology of aligned position and to have high-resolution optical system be necessary correctly is so be necessary to carry out exposure manufacture process under the environment of dust free room etc.
In the employed film exposure device of this exposure manufacture process, the contact exposure mode that mask contacted with the film belt-shaped workpieces and expose is arranged, make mask and film belt-shaped workpieces very near and expose act on behalf of Exposure mode and guarantee these three kinds of high-resolution contactless projection exposure modes.
Fig. 4 is an example of the exposure device of expression contact exposure mode.This exposure device 1 has exposure portion 2 in device central authorities, and at the central authorities of this exposure portion 2 belt base plate 3 by there being a frame to carry from bottom to top vertically, photomask 4,4 carries out the position alignment of X, Y, θ and overlapping, carries out double-sided exposure with the light of light source 5.Belt base plate 3 is extracted out from being installed on right-hand extraction usefulness spool 7 of device by grasping roller 6, and is wound on the coiling usefulness spool 8 that is arranged at the device left.(with reference to patent documentation 1)
Again, projection aligner carries out the device of projection exposure for using the projection exposure optical system.This projection aligner is arranged to, and the film that expose is positioned on the exposure position high-accuracyly, and the distance of mask and film is high-precision thickly to be held in set interval.And, a kind of method is proposed, use telecentric projection optical system (telecentric projecting optical system), film is carried on above-below direction, from its right angle orientation (horizontal direction) mask that is formed with wiring pattern by telecentric projection optical system in the image planes side is carried out projection and expose.(with reference to patent documentation 2)
Again, if use telecentric projection optical system, then Zhuan Zhi price can be very high, therefore proposes a kind of projection aligner that uses non-telecentric projection optical system.Fig. 5 uses the synoptic diagram (with reference to patent documentation 3) of the projection aligner of non-telecentric projection optical system for expression.As shown in Figure 5, projection aligner 10 comprises light source 11, be right against the mask 12 on the optical axis of light source 11, the picture of this mask 12 is projected to the non-telecentric projection optical system 13 on vertical projecting plane, film belt-shaped workpieces 14 is made the carrying mechanism 15 of 1 framing bit on vertical projecting plane of workpiece 14 in frame by frame conveying on the vertical direction, 1 frame that detects the workpiece 14 that is transferred is in the horizontal direction from the pick-up unit 16 of projecting plane displacement, and make the control device 17 of the lens of mask 12 and/or projection optical system 13 for the variation of proofreading and correct the projection multiplying power that causes because of detected displacement at the optical axis direction superior displacement.
In this projection aligner 10, it is level that non-telecentric projection optical system 13 is arranged to optical axis.In the projection aligner 10 of so constructing, even projection optical system 13 is because the influence of the precision of processing and outer gas takes place unusual on the relation of position, the projecting lens and the mask 12 of projection optical system are shifted towards optical axis direction, proofreading and correct this displacement, result from offset ill-exposed of projection optical system 13 so do not have.
In addition, to be arranged to vertical projection aligner also be known to the optical axis of non-telecentric projection optical system.
[patent documentation 1] TOHKEMY 2005-326550 communique
[patent documentation 2] Japanese kokai publication sho 62-293248 communique
No. 2798158 communique of [patent documentation 3] Japan special permission
But, in existing projection aligner, exist following problem.
The exposure device 1 of patent documentation 1 shown in Figure 4, belt base plate 3 is extracted out with spool 7 from being located at right-hand extraction of device, use on the spool 8 and be wound in the coiling that is located at the device left, so in the structure of carrying mechanism, the distance of horizontal direction is obtained greatly, and device is whole must the big area that is provided with.
In the projection aligner of patent documentation 3 shown in Figure 5,, and need the big area that is provided with because non-telecentric projection optical system 13 its optical axises are arranged to level again.In Fig. 5, projection optical system 13 is schematically represented with a blockage, though so on figure, seem to need only the little area that is provided with, but 20 combination of lenses nearly in fact in order to guarantee high resolving power, constitute the very long projection optical system of total length more than 2.5m, the big area that is provided with must be arranged in dust free room.And in the projection aligner shown in the patent documentation 2, it is difficult making device size diminish for employed optical system.
Again, in the non-telecentric projection optical system, under the situation of the film exposure device that for example optical axis vertically is provided with, the carrying mechanism of film belt-shaped workpieces occupies the big area that is provided with in the horizontal direction, simultaneously owing to towering in the projecting lens highland of non-telecentric projection optical system, so big ladder is high and area is set is necessary, the film exposure device becomes the obstruction that atmosphere is detained, and cover the visual field etc., make the ecological deterioration that is provided with in the dust free room.
Summary of the invention
The present invention proposes a kind of projection aligner in order to address the above problem, this projection aligner has suppressed the horizontal direction of device and the size of vertical direction, and that the volumetric ratio conventional device is set is little and make.
In order to address the above problem, projection aligner of the present invention uses the exposure desk that is disposed on the vertical direction, utilize irradiates light with the graphic pattern projection of mask on the film belt-shaped workpieces and expose, this projection aligner comprises: carrying mechanism, and it moves described workpiece on vertical direction towards described exposure desk; And projection optics mechanism, it has Dai Sen (Dyson) optical system, this wear gloomy optical system configurations with this carrying mechanism be on the adjacent position on border with described exposure desk.Wherein wear gloomy optical system described, incide this irradiates light of wearing gloomy optical system optical axis and from this optical axis of wearing the irradiates light that gloomy optical system penetrates be configured to described exposure desk on workpiece be orthogonal.
So the projection aligner of structure makes the vertical plane of film belt-shaped workpieces near exposure desk with carrying mechanism, on vertical direction, carry off and on frame by frame, when workpiece and mask carry out position alignment, from the irradiates light of the ultraviolet light that comprises set wavelength of light source irradiation by wearing gloomy irradiation optical system to workpiece and form the exposing patterns of mask.At this moment, the carrying mechanism of conveying workpieces on the vertical direction and have the projection optics mechanism that wears gloomy optical system be disposed at via exposure desk on one side with another side on, thereby but become the configuration of the size of restraint device Width and device short transverse.
And exposure desk can move from the optical axis direction of wearing the irradiates light that gloomy optical system penetrates.
Corresponding to the thickness of workpiece, the focal position of wearing gloomy optical system changes.In order to proofread and correct this focus deviation,, can under the state of focal position aligning, carry out the exposure of workpiece by exposure desk is moved in optical axis direction.
Again, in projection aligner, also comprise: the surface of the work position measuring device, it is configured to be inserted in the exposure area of wearing between gloomy optical system and the exposure desk and keeps out of the way out from this exposure area, measures the position of the surface of the work on the optical axis direction; And mark acquisition device, it is configured to be inserted in the exposure area of wearing between gloomy optical system and the exposure desk and keeps out of the way out from this exposure area, obtain the position offset of image with the workpiece on the direction that is used to confirm to be orthogonal to optical axis direction, the surface position information that records according to the surface of the work position measuring device wherein, exposure desk is moved on optical axis direction, and the information according to the measured position offset of mark acquisition device moves mask simultaneously.
So in the projection aligner of structure, for the workpiece that is transferred being focused and making workpiece aim at mask position, surface of the work position measuring device and mark acquisition device are inserted into the exposure area of wearing between gloomy optical system and the exposure desk.At this moment, the position that can confirm on the optical axis direction and be orthogonal to the workpiece on the direction of optical axis direction.Because exposure desk moves on optical axis direction corresponding to this, mask moves simultaneously, so can carry out correct exposure.
Again, in projection aligner, carrying mechanism comprises: the supply spool of sending workpiece; Supply side first guide rolls and supply side second guide rolls of the workpiece that guiding is sent from this supply spool; The workpiece that is directed is applied first tension adjusting device of tension force between this supply side first guide rolls and supply side second guide rolls; To carry roller along the top that is disposed at this exposure desk of exposure desk conveying and the first carrying roller and second of below from the workpiece of supply side second guide rolls; Guiding is from winding side first guide rolls and winding side second guide rolls of the workpiece of this second carrying roller; For second tension adjusting device that applies tension force by the workpiece that is directed between this winding side first guide rolls and winding side second guide rolls; And coiling is from the winding reel of the workpiece of winding side second guide rolls.
And, in the carrying mechanism, supply spool, supply side first guide rolls, supply side second guide rolls, first tension adjusting device and the first carrying roller are disposed at the top of the second carrying roller, winding side first guide rolls, winding side second guide rolls, second tension adjusting device and winding reel.
By so constructing, when clamping exposure desk and projection aligner is disposed at the opposition side of projection optics mechanism, can make from the distance and the distance of supply spool to the first carrying roller and diminish from the second carrying roller to winding reel, and, the distance of supply spool and winding reel is diminished.
According to projection aligner of the present invention, has following excellent results.
(1) in projection exposure mechanism, because the quantity of employing lens, prism and catoptron etc. is few and the carrying mechanism of wearing gloomy optical system and the film belt-shaped workpieces being carried on vertical direction in the exposure desk side of minimal type, so the size of height of devices and Width is littler than existing projection aligner, can suppress the space that is provided with in the dust free room to such an extent that diminish.
(2) projection aligner makes and area is set diminishes owing to suppressing height, be reduced to Min. so projection aligner is become the situation of the obstruction of the atmosphere delay in the dust free room, the situation that to cover the visual field in the working space in the dust free room again is reduced to Min., can make environment is set improves.
Description of drawings
Fig. 1 is for schematically representing the stereographic map of the integral body of projection aligner of the present invention.
Fig. 2 is the side view of the configuration of the carrying mechanism of schematically representing projection aligner of the present invention.
Fig. 3 a is the cut-open view of the carrying of first in the Handling device of projection aligner of the present invention roller.
Fig. 3 b is the stereographic map that has omitted the first carrying roller of a part.
Fig. 4 is for schematically representing all front elevations of existing exposure device.
Fig. 5 is for schematically representing all front elevations of existing projection aligner.
Label declaration
20～projection aligner; 21～light source mechanism (projection optics mechanism); 22～mask keeps frame; 23～wear gloomy optical system (projection optics mechanism); 24～exposure desk; F～film belt-shaped workpieces; M～mask; 25～carrying mechanism; 25a～supply spool; 25b～first guide rolls (supply side first guide rolls); 25c～second guide rolls (supply side second guide rolls); 25D～first aeration vessel (first tension adjusting device); 25d～box (first aeration vessel); 25f～first carrying the roller; 25g～second carrying the roller; 25h～the 3rd guide rolls (winding side first guide rolls); 25i～the 4th guide rolls (winding side second guide rolls); 25J～second aeration vessel (second tension adjusting device); 25j～box (second aeration vessel); 25m～winding reel; 26～control device; 26a, 26b～mark acquisition device; 26c～image processing apparatus; 26d～device control device; 26e～surface of the work position measuring device.
Embodiment
Below, implement optimal way of the present invention with reference to description of drawings.
The structure of＜projection aligner 20 〉
Fig. 1 is for schematically representing the overall perspective view of projection aligner.
When this projection aligner 20 has been carried the workpiece F of a frame off and on when carrying mechanism 25, utilize position alignment device (not shown) to carry out position alignment.Then, the irradiation between the light that will be comprised the ultraviolet light of set wavelength by light source mechanism 21 carries out in case of necessity, with the pattern of mask M along exposure desk 24 and projection exposure forms to the workpiece F of vertical plane.
The masked maintenance frame 22 of mask M remains on the vertical direction, except the circuit pattern of describing to project to the frame on the workpiece F, also is provided with on set position and carries out with the integration mark of the location of workpiece F, be used to discern the identification marking of mask itself etc.Again, workpiece F forms for example thick film band shape of 12.5 μ m.
Wear gloomy optical system 23 and be arranged in incident and outgoing on the optical axis that the face that is provided with respect to device is parallel irradiates light.This is worn gloomy optical system 23 and comprises: light incident side convex lens 23a and exiting side convex lens 23c, and its lens center is consistent on the optical axis of the irradiates light of incident and outgoing; Be disposed at the prismatic reflection body 23b between this light incident side convex lens 23a and the exiting side convex lens 23c; And the reflection side convex lens 23d and the concave mirror 23e that are disposed at this prismatic reflection body 23b top.
Therefore, wear gloomy optical system 23 when irradiates light incident, at first penetrated light incident side convex lens 23a,, penetrated reflection side convex lens 23d and reflect by concave mirror 23e by prismatic reflection body 23b reflection.Irradiates light penetrated reflection side convex lens 23d, by prismatic reflection body 23b reflection, penetrated irradiates light from exiting side convex lens 23c, then irradiates light was exposed on the workpiece F.This wear gloomy optical system 23 since its that space is set is little than other optical systems, all can dwindle so install.
In the exposure desk 24, table top (vertical plane) 24a is disposed at vertical direction, with respect to orthogonal thereto and become vertical setting from the optical axis of the irradiates light of wearing gloomy optical system 23.Exposure desk 24 can move on optical axis direction for focusing shown in Fig. 2 arrow 24b.And, the center that is positioned to and wears gloomy optical system 23 both set a distances of being separated by.
Again, exposure desk 24 constitutes with the pipe arrangement of vacuum pump and is connected, absorption fixation workpiece F.When the frame as exposure range of workpiece F is carried on this exposure desk 24, obtain the specifically labelled position relation of telltale mark and the mask M of workpiece F by mark acquisition device 26a described later, 26b.Then, the position of mobile mask M makes the telltale mark of workpiece F and the specifically labelled position offset of mask M become zero.When finishing, the position alignment of workpiece F and mask M exposes.
Fig. 2 is the side view of configuration of schematically representing the carrying mechanism 25 of projection aligner 20.
Carrying mechanism 25 uses the first aeration vessel 25D and the second aeration vessel 25J as first and second tension adjusting device of adjusting the tension force of workpiece F in the carrying path, approaches the table top 24a of exposure desk 24 simultaneously and film belt-shaped workpieces F frame by frame on vertical direction is carried off and on.The supply side of this carrying mechanism 25 has supply spool 25a, the first guide rolls 25b and the second guide rolls 25c that guide the workpiece F that sends from this supply spool 25a that sends workpiece F, the first aeration vessel 25D (box 25d) that adjusts the tension force of the workpiece F that is guided between this first guide rolls 25b and the second guide rolls 25c in this.The winding side of this carrying mechanism 25 have guiding workpiece F the 3rd guide rolls 25h and the 4th guide rolls 25i, adjust the tension force of the workpiece F between the 3rd guide rolls 25h and the 4th guide rolls 25i the second aeration vessel 25J (box 25j), reel from the winding reel 25m of the workpiece F of the 4th guide rolls 25i.
And, at the supply side of carrying mechanism 25, above exposure desk 24, dispose the first carrying roller 25f on the table top 24a that the workpiece F that will send from the second guide rolls 25c is delivered to exposure desk 24.At the winding side of carrying mechanism 25, below exposure desk 24, dispose the second carrying roller 25g from table top 24a conveying workpieces F again.And the first aeration vessel 25D and the second aeration vessel 25J are accommodated among box 25d, the 25j in order to make workpiece F not be subjected to external influence.And the first aeration vessel 25D and the second aeration vessel 25J adjust the tension force of workpiece F, and the damping that produces with the weight of workpiece F itself is used for temporarily cushioning the forced conveyance of workpiece F, so that do not influence the amount of conveying frame by frame.
And as shown in Figure 2, in the carrying mechanism 25, the volume of workpiece F from supply spool 25a toward the first guide rolls 25b hung and is configured to desirable downward gradient (shaft position of supply spool 25a is than the shaft position height of the first guide rolls 25b).With respect to the first guide rolls 25b, the second guide rolls 25c is configured on identical height or the lower height again.And workpiece F hangs from the second guide rolls 25c toward the volume of the first carrying roller 25f and is configured to desirable downward gradient (shaft position of the second guide rolls 25c is than the shaft position height of the first carrying roller 25f).And in the carrying mechanism 25, workpiece F hangs from the second carrying roller 25g toward the volume of the 3rd guide rolls 25h and is configured to desirable upwards gradient (shaft position of the 3rd guide rolls 25h is than the shaft position height of the second carrying roller 25g).With respect to the 3rd guide rolls 25h, the 4th guide rolls 25i is configured on sustained height or the higher height again.And the volume of workpiece F from the 4th guide rolls 25i toward winding reel 25m hung and is configured to desirable upwards gradient (shaft position of winding reel 25m is than the shaft position height of the 4th guide rolls 25i).
Carrying mechanism 25 is by carry the roller 25f and the second carrying roller 25g from the configuration of supply spool 25a to the first carrying roller 25f, from the second carrying roller 25g to the configuration and first of winding reel 25m, holding workpiece F and carrying can carry out suitable carrying by this.Again, carrying mechanism 25 is in position alignment, the second guide rolls 25c and the 3rd guide rolls 25h move on direction of principal axis and carry out the position adjustment of the vergence direction of workpiece F, carry out the position adjustment of workpiece F on above-below direction by the first carrying roller 25f and second carries roller 25g.Then, in the carrying mechanism 25, carry workpiece F in direction (approximately being horizontal direction) along the face that is provided with of device from supply spool 25a to the first carrying roller 25f.Again, between the first carrying roller 25f and the second carrying roller 25g, carry workpiece in vertical direction, and carry workpiece from the second carrying roller 25g to winding reel 25m in direction (approximately being horizontal direction) along the face that is provided with of device.Therefore, the space is set and becomes compact.
This control device 26 has: the mark acquisition device 26a, the 26b that obtain the telltale mark of workpiece F and mask M and have semi-transparent semi-reflecting lens (not shown) and CCD camera etc.; And the image processing apparatus 26c of Flame Image Process and output image signal is carried out in input from the picture signal of this mark acquisition device 26a, 26b.Image processing apparatus 26c carries out Flame Image Process to the telltale mark of workpiece F and mask M.The result of Flame Image Process calculates specifically labelled position deviation amount, moves and this specifically labelled position deviation amount by making mask M, makes the position deviation amount of workpiece F and mask M be roughly zero by this.And the second guide rolls 25c, the first carrying roller 25f, second that control device 26 possesses at carrying mechanism 25 carry the device control device 26d of transmitting-receiving control signal between roller 25g and the 3rd guide rolls 25h.Device control device 26d is when specifically labelled position deviation amount is bigger than threshold value, for the workpiece operational throughput of proofreading and correct next frame and the inclination (posture) of a frame, the second guide rolls 25c or the 3rd guide rolls 25h are moved on the direction of principal axis of roller, or control the operational throughput of the first carrying roller 25f and the second carrying roller 25g.
And mark acquisition device 26a, 26b and surface of the work position measuring device 26e move to the exposure area before exposure, and telltale mark is photographed, and the time keep out of the way and move to position beyond the light path in exposure.Again, if be necessary, control device 26 is also implemented carrying out the adjustment control of small projection multiplying power of mask picture of mask M of projection and the open and close controlling of shield mechanism (not shown) etc. by wearing gloomy optical system 23.
Fig. 3 a is the cut-open view of the carrying of first in the Handling device of projection aligner of the present invention roller, and Fig. 3 b is the stereographic map that has omitted the first carrying roller of a part.
As shown in Figure 3, the first carrying roller 25f has offered aperture 25f respectively the permutation shape on whole peripheral surface
1And, an end of the axial region of the first carrying roller 25f and control motor 25f
2Connect, the other end is via rotating joint 25f
4Vacuum tube 25f with vacuum pump (not shown)
3Connect.Therefore, the first carrying roller 25f is when using motor 25f to control
2When carrying out the intermittence rotation, can workpiece F be attracted slidably, simultaneously a frame be delivered to set position in position corresponding to workpiece volume angle.And the second carrying roller 25g also has identical structure with the first carrying roller 25f.And preferably, the rollers whole from the first guide rolls 25b to the, four guide rolls 25i have identical structure with the first carrying roller 25f.
The action of＜projection aligner 20 〉
Then, the action at projection aligner 20 describes.
In the projection aligner 20, when workpiece F as a frame of langley when exposure desk 24 is sent, the drive controlling first carrying roller 25f, the second carrying roller 25g, the second guide rolls 25c, the 3rd guide rolls 25h carry out.At this moment, the workpiece F that is guided by the first guide rolls 25b and the second guide rolls 25c becomes the state of being kept tension force by the first aeration vessel 25D, and becomes the state that is rolled out between the first guide rolls 25b and the second guide rolls 25c.Therefore, the amount that rolls out becomes and is sent to exposure desk 24 sides one frame, under the state that the tension force that is maintained at workpiece F all the time has been adjusted.Similarly, the workpiece F that is guided by the 3rd guide rolls 25h and the 4th guide rolls 25i becomes the state of being kept tension force by the second aeration vessel 25J, and becomes the state that is rolled out between the 3rd guide rolls 25h and the 4th guide rolls 25i.Therefore, the amount that rolls out becomes is sent a frame from exposure desk 24 sides, under the state that the tension force that maintains workpiece F all the time has been adjusted.
Carrying mechanism 25 drives supply spool 25a and the first guide rolls 25b and the amount of the workpiece F of (between the first guide rolls 25b and the second guide rolls 25c) in the first aeration vessel 25D is become necessarily.Drive the 4th guide rolls 25i and winding reel 25m and the amount of the workpiece F of (between the 3rd guide rolls 25h and the 4th guide rolls 25i) in the second aeration vessel 25J is become necessarily again.So in the carrying mechanism 25, the workpiece F that supplies with from supply spool 25a, to be carried to the workpiece F of exposure desk and to be wound in workpiece F on the winding reel 25m be interlock not.That is, can action respectively on the position of the first aeration vessel 25D and the second aeration vessel 25J.
In projection aligner 20, the workpiece F that is carried on the exposure desk 24 by carrying mechanism 25 is fixed by vacuum suction on exposure desk 24.Then, mark acquisition device 26a, 26b and surface of the work position measuring device 26e are inserted into and wear between gloomy optical system 23 and the exposure desk 24. Mark acquisition device 26a, 26b are attracted the position that is fixed on the workpiece on the exposure desk 24 in order to grasp, and the telltale mark of workpiece F is photographed.Then, image processing apparatus 26c calculates the position offset of workpiece F and mask M.Device control device 26d is according to this position offset, mask M is moved and makes the position offset of workpiece F and mask M be roughly zero.Again, surface of the work position measuring device 26e measures the surface location of workpiece F.Then, for focus deviation, exposure desk 24 moves in optical axis direction under the state that still attracts fixation workpiece F, makes focus deviation be roughly zero by this.
And carrying mechanism 25 can suitably carry out the carrying of workpiece F, and can make and the space is set diminishes.Again, by using as gloomy optical system 23 of wearing of projection optics mechanism and light source mechanism 21, can suppress the size of short transverse, therefore when projection aligner 20 was arranged in the dust free room, it is littler than existing that the space is set.
More than though the embodiment of exposure device of the present invention and exposure method has been described in detail in detail with reference to accompanying drawing, the present invention is not limited to embodiment, can be included in the mode of the various changes designs of being carried out in the scope that does not break away from main idea of the present invention.For example, though first and second tension adjusting device is that example illustrates in order to adjust tension force with the weight of workpiece F own, blow air and the structure of adjusting the tension force of workpiece F also is fine to workpiece F.
In the above-described embodiment, though be the explanation that the workpiece F with not perforate carries out, also can use the band that is formed with the perforation f in the hole that is formed on the length direction in both sides with set interval.Under the situation of using this kind workpiece F, the operational throughput of workpiece F also can be utilized perforation and be counted by Photo Interrupter (photointerrupter) and to measure.Also can detect the edge of perforation and detect the position of workpiece F in when location again.
Claims (5)
1. projection aligner, this projection aligner uses the exposure desk that is disposed on the vertical direction, utilize irradiates light with the graphic pattern projection of mask on the film belt-shaped workpieces and expose, it is characterized in that this projection aligner comprises:
Carrying mechanism, it moves described workpiece on vertical direction towards described exposure desk; And
Projection optics mechanism, it has wears gloomy optical system, this wear gloomy optical system configurations with this carrying mechanism be on the adjacent position on border with described exposure desk,
Describedly wear gloomy optical system configurations and become to make the optical axis that incides this irradiates light of wearing gloomy optical system and wear the optical axis of the irradiates light that gloomy optical system penetrates and the workpiece of described exposure desk is orthogonal from this.
2. projection aligner as claimed in claim 1 is characterized in that, above-mentioned exposure desk can move from the above-mentioned optical axis direction of wearing the irradiates light of gloomy optical system ejaculation.
3. projection aligner as claimed in claim 1 or 2 is characterized in that, this projection aligner also comprises:
The surface of the work position measuring device, it is configured to be inserted in above-mentionedly wears the exposure area between gloomy optical system and the above-mentioned exposure desk or keeps out of the way out from this exposure area, and this surface of the work position measuring device is measured the position of the above-mentioned surface of the work on the above-mentioned optical axis direction; And
The mark acquisition device, it is configured to be inserted in above-mentionedly wears the exposure area between gloomy optical system and the above-mentioned exposure desk or keeps out of the way out from this exposure area, this mark acquisition device is obtained image to be used to confirm the position offset of the above-mentioned workpiece on the direction with above-mentioned optical axis direction quadrature
The positional information on the surface that records according to above-mentioned surface of the work position measuring device, above-mentioned exposure desk move on optical axis direction, and the information according to the measured position offset of above-mentioned mark acquisition device moves aforementioned mask simultaneously.
4. as claim 1, each described projection aligner in 2 is characterized in that,
Above-mentioned carrying mechanism comprises: the supply spool of sending above-mentioned workpiece; Supply side first guide rolls and supply side second guide rolls of the above-mentioned workpiece that guiding is sent from this supply spool; The above-mentioned workpiece that is directed is applied first tension adjusting device of tension force between this supply side first guide rolls and supply side second guide rolls; To carry along above-mentioned exposure desk from the above-mentioned workpiece of above-mentioned supply side second guide rolls, be disposed at the first carrying roller and the second carrying roller of the top and the below of this exposure desk; Guiding is from winding side first guide rolls and winding side second guide rolls of the above-mentioned workpiece of this second carrying roller; For second tension adjusting device that applies tension force by the above-mentioned workpiece that is directed between this winding side first guide rolls and winding side second guide rolls; And reel from the winding reel of the above-mentioned workpiece of above-mentioned winding side second guide rolls,
Above-mentioned supply spool, above-mentioned supply side first guide rolls, above-mentioned supply side second guide rolls, above-mentioned first tension adjusting device and the above-mentioned first carrying roller are disposed at the top of the above-mentioned second carrying roller, above-mentioned winding side first guide rolls, above-mentioned winding side second guide rolls, above-mentioned second tension adjusting device and above-mentioned winding reel.
5. projection aligner as claimed in claim 3 is characterized in that,
Above-mentioned carrying mechanism comprises: the supply spool of sending above-mentioned workpiece; Supply side first guide rolls and supply side second guide rolls of the above-mentioned workpiece that guiding is sent from this supply spool; The above-mentioned workpiece that is directed is applied first tension adjusting device of tension force between this supply side first guide rolls and supply side second guide rolls; To carry along above-mentioned exposure desk from the above-mentioned workpiece of above-mentioned supply side second guide rolls, be disposed at the first carrying roller and the second carrying roller of the top and the below of this exposure desk; Guiding is from winding side first guide rolls and winding side second guide rolls of the above-mentioned workpiece of this second carrying roller; For second tension adjusting device that applies tension force by the above-mentioned workpiece that is directed between this winding side first guide rolls and winding side second guide rolls; And reel from the winding reel of the above-mentioned workpiece of above-mentioned winding side second guide rolls,
Above-mentioned supply spool, above-mentioned supply side first guide rolls, above-mentioned supply side second guide rolls, above-mentioned first tension adjusting device and the above-mentioned first carrying roller are disposed at the top of the above-mentioned second carrying roller, above-mentioned winding side first guide rolls, above-mentioned winding side second guide rolls, above-mentioned second tension adjusting device and above-mentioned winding reel.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006122194 | 2006-04-26 | ||
| JP2006122194 | 2006-04-26 | ||
| JP2007002918 | 2007-01-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101063826A CN101063826A (en) | 2007-10-31 |
| CN100529970C true CN100529970C (en) | 2009-08-19 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2007100922409A Active CN100529970C (en) | 2006-04-26 | 2007-04-02 | Projection exposing device |
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| JP5554753B2 (en) * | 2011-06-29 | 2014-07-23 | 株式会社日立ハイテクノロジーズ | Exposure method and apparatus |
| KR101924309B1 (en) * | 2011-12-20 | 2018-11-30 | 가부시키가이샤 니콘 | Substrate processing device, device manufacturing system and device manufacturing method |
| CN108646525B (en) * | 2017-06-16 | 2020-05-12 | 深圳市前海野马自动化设备有限公司 | Automatic alignment device with lifting mechanism and exposure equipment thereof |
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