CN100514016C

CN100514016C - Leakage sensor and leakage detection system

Info

Publication number: CN100514016C
Application number: CNB2004100867836A
Authority: CN
Inventors: 林田建一; 岛井太; 小俣洋平
Original assignee: Tokyo Ohka Kogyo Co Ltd; Toyoko Kagaku Co Ltd; Tsuden KK
Current assignee: Tsuden KK
Priority date: 2003-10-30
Filing date: 2004-10-29
Publication date: 2009-07-15
Anticipated expiration: 2024-10-29
Also published as: KR20050041974A; JP2005156541A; CN1611924A

Abstract

Among plural liquid leakage sensors placed at the lowermost portion of a system such as a floor surface, a leaked liquid storing portion, etc., an error-activated location of the sensor can be easily identified uniquely when the sensor is detecting any abnormality. In a liquid leakage detecting system including at least one liquid leakage sensor having at least one detecting portion contactable with a leaking liquid through an air layer or a liquid permeable layer, a warning means including a sound producing means is placed within a specified spatial distance from each installation position of said liquid leakage sensor, wherein after detecting any abnormal conditions of said liquid leakage sensor, a warning signal is issued at least in an audio frequency based on said warning means in order to discriminate said error-activated leakage sensor from other non-activated leakage sensors placed outside of said specified spatial distance and uniquely identify said installation position of said activated leakage sensor.

Description

Leakage sensor and leakage detection system

Technical field

The present invention relates to the improvement of a kind of leakage sensor and leakage detection system, this leakage sensor and leakage detection system detect water, acid solution, alkaline solution etc. and have the leakage that organic solutions such as the liquid of electric conductivity and ultrapure water, alcohol, thinning agent, gasoline etc. have the liquid of insulativity.

Background technology

[patent documentation 1] special fair 4-70572 communique

[patent documentation 2] spy opens the 2002-350275 communique

In the equipment of present factory etc., by the pipe arrangement feed fluid.But, because pipe arrangement is provided with the joint that connects usefulness in a lot of places, so, a lot of from the situation of joint generation leakage.Therefore, according to the kind of liquid, people must often carry out the supervision of leakage.As this present leakage sensor, having known has: the leakage sensor of the electrically conducting manner of the impedance variation between detecting electrode, the amount of liquid measurement of required liquid detected the leakage sensor of the amount of liquid metering system of the liquid whether specified volume is provided.In addition, in patent documentation 1, put down in writing following optical profile type leakage sensor technology: then become transparent filtrator irradiates light to absorbing leakage in advance by transmittance section (light source), when leakage has taken place, by detecting, can positively detect leakage from the transmitted light of above-mentioned filtrator or the variable quantity of catoptrical light income.In this present leakage sensor; generally; when detecting sensor that unusual or sensor is not arranged on the regulation locus, the leakage that detects leakage is provided with when unusual; by display units such as LED these abnormality information being carried out alarm shows; and, with contact signal etc. its numeral is outputed to the outside.

On the other hand, in patent documentation 2, introduced following leakage monitoring arrangement: the information needed such as inter-electrode impedance that between handset-machine tool, transmit a plurality of leakage sensors, after the machine tool side is carried out calculation process, perhaps directly be shown on the display unit of machine tool side, in patent documentation 2, leakage etc. has taken place when unusual being judged as, the warning information of this leakage etc. also shows with sound such as buzzings when being shown to image and/or recording-member.

But,, for example, when detecting 20 ℃, have smaller or equal to 6 * 10 (A) as detersive/solvent ^-2Under the situation of the leakage of the liquid of the low surface tension of N/m, especially when detecting the low molecular chlorofluorocarbons (CFCs) do not contain chlorine and bromine and breathe out surface tension such as dragon at 20 ℃ smaller or equal to 3 * 10 ^-2During the leakage 2a of the liquid of N/m with low surface tension, leakage forms extremely thin stratiform and spreads, for example, shown in Fig. 6 (B), evenly and promptly be diffused as the film stratiform of the thickness d 1 of this leakage layer smaller or equal to 0.5mm, and, even smaller or equal to the very narrow space part in the interval of 0.1mm, also can easily permeate, so, leakage at first be penetrated into the retainer of the container that holds the leakage sensor main body and the gap d between the basal surface 2 (＜d1) in (Fig. 6 (C)), leakage is diffused into above the retainer needs the long period, the detection of a small amount of leakage or the problem that leakage detects delay have appearred can't carrying out fully in its result.

(B) in addition, at present, there are the following problems for leakage sensor: because its alarm numeral output to a plurality of leakage sensors connects inclusive-OR operation, to each group specified, unified carry out alarm output by sequencer or machine tool etc., so, leakage exported when detecting unusual alarm, in fact, the maintenance side that has arrived systems such as leakage, factory for the sensor that is arranged on which place can not determine the leakage occurrence positions immediately; The leakage sensor operated by rotary motion is held the foot of systems such as dish in basal surface or leakage, on the other hand, set up in the space above it under the environment for use condition of various system architecture parts etc., be installed in leakage sensor originally on one's body illuminated alarm display units such as LED taking place under the unusual situation of leakage, general very difficult visuognosis is difficult to determine the leakage occurrence positions.

(C) and then, in patent documentation 2 leakage detection systems such as grade, generally speaking, the maintenance of the people of leakage sensor and factory etc. and the people of management system are set, and it doesn't matter fully, for the people that leakage sensor is set, requirement all is set to assigned position at short notice exactly with a plurality of leakage sensors, so, even as the desktop theory, requirement with sensor to be provided with that the position signs in in the monitoring arrangement one by one be possible, but in fact, require 1 operator to connect up error-free more than or equal to 40 sensor, login exactly and be confirmed to be impossible, in the system constructing operation, implement that by a plurality of operators the operation meeting is set and make the purchase cost of device rise suddenly and sharply in rain, from leakage sensor actual the operator is set, this is fully can't practical technology.

In addition, in the technology of patent documentation 2, employing shows after the machine tool side is carried out calculation process or directly is shown to system architecture on the display unit of machine tool side, so, there is following problem: when machine tool breaks down, even leakage sensor normally detects leakage, also can't export leakage fully and detect unusual alarm.

And then, the technology of patent documentation 2 is to announce the unusual system of leakage by the alarm component of machine tool by voice message after the machine tool side is carried out calculation process or directly, so, the leakage occurrence positions must be included in the content of voice message, and, for the maintenance of factory etc. and the people of management system, if not can accurately listening to sound position information and understanding leakage occurrence positions information reality people corresponding to which position in the space, just can't determine the spatial positional information of leakage occurrence positions accurately, especially in sending the frequent post/site environment of office worker and change of personnel, at leakage sensor spended time/expense etc. in the education etc. of position is set hardly, operator for new operator and memory/learning ability deficiency just becomes complete inoperative warning system.

(D) in addition, when leakage sensor and alarm component are integrally formed, the leakage sensor operated by rotary motion narrow and near basal surface below be provided with in the space, and, easily and operator's passage space interfere mutually, so, wish that the height that sensor integral body counts from basal surface is low as far as possible.

Summary of the invention

Therefore, the present invention is based on above-mentioned situation and proposes, and the object of the present invention is to provide a kind of leakage sensor, even it is for having smaller or equal to 6 * 10 20 ℃ the time ^-2A small amount of leakage of the liquid of the low surface tension of N/m also can detect at high speed.

In addition, the object of the present invention is to provide a kind of leakage sensor and leakage detection system, even a plurality of leakage sensors are assembled in the control system by each group specified unification, exporting leakage when detecting unusual alarm, the maintenance of systems such as factory can be accurately and easily to determine to be actually the leakage sensor work that be arranged on which place and to have detected locus/place that leakage, leakage take place.

And, the present invention also aims to provide a kind of leakage sensor and leakage detection system, when being set in control system by each group specified unification a plurality of leakage sensors, even 1 operator also can all be set to a plurality of sensors the locus of regulation at short notice exactly.In addition, the present invention also aims to provide a kind of leakage sensor and leakage detection system, even break down or do not have under the situation of machine tool in control system, when leakage sensor normally detects leakage, can positively export leakage and detect unusual alarm, by the maintenance side of systems such as factory accurately and easily determining locus/place that leakage takes place.

The present invention relates to a kind of leakage detection system, it uses 1 leakage sensor at least, this leakage sensor has 1 leakage test section at least, and this leakage test section can contact with described leakage by the gas blanket or the leakage pervious course of permeable leakage, it is characterized in that:

Described relatively leakage sensor the position is set, in the spatial dimension of regulation, the alarm component that comprises pronunciation part is set,

When detecting the sensor abnormality of described leakage sensor, at least by described pronunciation part, determine the mode that the position is set of this leakage sensor with the leakage sensor that can be different from the spatial dimension outside that is arranged on described regulation, with the transmission sound of audible frequency the sensor abnormality of this leakage sensor is detected and to carry out alarm

The spatial dimension of described regulation comprises at least 1 among the space of top of the inner space of described leakage accommodation section, described leakage accommodation section,

Described leakage sensor is connected by signal wire with described alarm component and/or connects and/or integrally formed by wireless communication unit,

Described leakage sensor has at least one high speed leakage and introduces parts, at least a portion of the gas blanket of permeable described leakage or leakage pervious course is made of the space part smaller or equal to specified gap, capillarity takes place in leakage in described space part, can contact with at least one of described leakage test section, thus, even for having smaller or equal to 6 * 10 20 ℃ the time ^-2A small amount of leakage of the liquid of the low surface tension of N/m, parts are introduced in described high speed leakage also can carry out high speed detection to it.

According to the leakage detection system that the present invention relates to, relatively leakage sensor is provided with the position, the alarm component that comprises pronunciation part in the regulation spatial dimension with interior setting, when above-mentioned leakage sensor detects the sensor abnormality of this leakage sensor, at least by above-mentioned pronunciation part, the position is set and the mode that the position is set of definite this leakage sensor can be different from other leakage sensors that are arranged on the afore mentioned rules spatial dimension outside, detect with the transmission sound of audible frequency sensor abnormality alarms such as operator/this leakage sensor of circular, so, under situation about a plurality of leakage sensors being set to according to each group specified unification in the control system, even 1 operator, also can correctly a plurality of leakage sensors be arranged on the position of whole regulations at short notice, needn't resemble and basal surface be observed affirmation one by one the sensor in the past, just can confirm that this is provided with state, can improve the reliability of leakage detection system greatly by 1 people.

In addition, in leakage sensor of the present invention and leakage detection system, the machine tool that does not need this system, even when fault has taken place in transponder of system etc., as long as leakage sensor can work independently, just can normally detect the leakage state, transmission sound with audible frequency carries out alarm, when this leakage sensor detects this leakage state, the position is set and the mode that the position is set of definite this leakage sensor can positively be different from other leakage sensors that are arranged on the regulation spatial dimension outside, transmission sound with audible frequency carries out alarm/circular to operator etc., so, when safeguarding leakage sensor and leakage detection system, even obscure such easy of the semiconductor manufacturing process that is similar to the sensor that has disposed a plurality of identical functions arranged side by side/the safeguarding in the environment of misidentification, as long as rely on alarm to send sound near sound source, just can determine/find leakage occurrence positions accurately, for the actual responsible official who safeguards, even do not accept the special trainings such as study of the configuration mapping relations of leakage sensor, can not obscure/misidentification with other sensors yet, can determine/discern the leakage occurrence positions easily, very useful.

And then, in leakage sensor of the present invention and leakage detection system, even a spot of leaking liquid amount, also can positively detect water, acid solution, alkaline solution etc. and have the liquid of electric conductivity and ultrapure water, alcohol, organic solution such as thinning agent, gasoline etc. has the leakage of the liquid of insulativity, and, even have in the time of 20 ℃ smaller or equal to 6 * 10 ^-2The liquid of the low surface tension of N/m especially has smaller or equal to 3 * 10 ^-2The lamelliform liquid of the low surface tension of N/m, promptly little a spot of leakage also can detect at high speed.

In addition, the invention still further relates to a kind of leakage sensor, it forms at least 2 total reflection boundary surfaces that can contact leakage across gas blanket or leakage pervious course, with at least 1 light-projecting portion, light accepting part and the control assembly that combines with them are with respect to described each reflection boundary face, be configured in same side, from described light-projecting portion to described the 1st total reflection boundary surface projection light, to project described the 2nd total reflection boundary surface from the reflected light of described the 1st total reflection boundary surface, at the reflected light of described light accepting part acceptance from described the 2nd total reflection boundary surface, and calculation process is carried out in its output by described control assembly, detect leakage, it is characterized in that:

Described light-projecting portion and light accepting part be contained in the container that the bottom is made of transparent material or trnaslucent materials and it is integrated, and, perhaps,

Described light-projecting portion and light accepting part are contained in container that the bottom is made of transparent material or trnaslucent materials and it is integrated, and, end at this container is installed bottle holder, this bottle holder makes the end of container be not easy to be subjected to the character of surface that the position is set of substrate etc. of this leakage sensor or the influence of surface color, and can be used for and prevent tumbling of this container, and

Setting comprises the abnormality detection parts of described leakage sensor and the alarm component of pronunciation part,

When detecting sensor abnormality by described abnormality detection parts, with the transmission sound of audible frequency abnormality detection is carried out alarm by described pronunciation part at least,

Described leakage sensor constitutes with blast resistance construction, and,

Have at least one high speed leakage and introduce parts, at least a portion of described gas blanket or leakage pervious course is made of the space part smaller or equal to specified gap, capillarity takes place in leakage in described space part, can contact with at least one of described reflection boundary face, thus, even for having smaller or equal to 6 * 10 20 ℃ the time ^-2A small amount of leakage of the liquid of the low surface tension of N/m, parts are introduced in described high speed leakage also can carry out high speed detection to it.

Description of drawings

Fig. 1 is the block diagram that mechanical 1 structure example when leakage detection system 1a of the present invention is applied to smear display is shown.

Fig. 2 is that this leakage test section (leakage sensor portion) is with leakage sensor 20a and comprises 1 example of the integrally formed structure of the alarm component 70a of pronunciation part.

Fig. 3 is its sectional view and enlarged drawing.

Fig. 4 is the figure that 1 structure example of retainer 5 of the present invention is shown.

Fig. 5 illustrates the amplification profile that the operating principle of parts 6 is introduced in high speed leakage of the present invention.

Fig. 6 is the block diagram of 1 structure example that the signal Processing of leakage sensor 20a of the present invention is shown.

Fig. 7 is the block diagram that mechanical 1 structure example of explosion-proof type leakage detection system 1b of the present invention is shown.

Fig. 8 is that its leakage test section is 1 example with the structure of leakage sensor 20b and alarm component 70b separation setting.

Fig. 9 is the block diagram of 1 structure example that the signal Processing of explosion-proof type alarm component 70b of the present invention is shown.

Symbol description

1a, 1b, 1c: leakage detection system; 2,2a: leakage; 4: the abnormality detection parts are set; 5: retainer; 5s, 5t, 12m, 12n: optical boundary face; 6,6b: parts are introduced in the high speed leakage; 8: thin paper; D, d1～d8: space part; 12: container; 14,14b: light source part; 16,16c: light receiving component; 20a, 20b: leakage sensor; 22u, 22z: projection light; 24u, 24z: reflected light; 30: control assembly; 37,79c: communication component; 39,700: control part; 40a, 40c, 42a, 42c: optical communication means; 70a, 70b: alarm component; 72: pronunciation part; 75: acoustic resonance device; 79k: emergency warning lamp; 98: the leakage accommodation section; 99: bottom surface, basal surface.

Embodiment

Leakage detection system of the present invention uses a leakage sensor at least, and this leakage sensor has a leakage test section at least, and this leakage test section can contact with above-mentioned leakage by the gas blanket or the leakage pervious course of permeable leakage,

Above-mentioned relatively leakage sensor the position is set, the alarm component that comprises pronunciation part in the regulation spatial dimension with interior setting, when detecting the sensor abnormality of above-mentioned leakage sensor, at least by above-mentioned pronunciation part, determine the mode that the position is set of this leakage sensor with the leakage sensor that can be different from the outside that is arranged on the afore mentioned rules spatial dimension, with the transmission sound of audible frequency the sensor abnormality of this leakage sensor is detected and to carry out alarm, and

Preferably, the independent or a plurality of leakage sensors according to the inboard that is arranged on the afore mentioned rules spatial dimension can use above-mentioned alarm component jointly, and more preferably, the emergency warning lamp of this alarm component is arranged on the locus of easy visuognosis.

Yet, in the leakage sensor that in leakage detection system of the present invention, uses, can leakage sensor is integrally formed with the alarm component that comprises pronunciation part, and/or also leakage sensor can be separated setting with the alarm component that comprises pronunciation part, by wired and/or wireless, leakage sensor and the alarm component that comprises pronunciation part are interconnected.

In the system architecture that above-mentioned leakage sensor is integrally formed with comprising the alarm component of pronunciation part, because fixed configurations has been set on the position also integratedly alarm component at leakage sensor, so, can provide following system: connect the operation of numbering etc. without any need for special setting, the structure of system is very easy to, connect and take that really industry is also easy as, the maintenance of this system/supervision operation is also very directly perceived, understands easily.

In addition, above-mentioned leakage sensor is being separated setting with the alarm component that comprises pronunciation part, and by wired, with leakage sensor with comprise in the interconnective system architecture of alarm component of pronunciation part, can be in the upper space of this system the alarm component of this separation be arranged on the good position of visuognosis, has the advantage that anyone can easily carry out the adjustment operation or the maintained/managed operation of system.

And, above-mentioned leakage sensor is being separated setting with the alarm component that comprises pronunciation part, and by wireless, with leakage sensor with comprise in the interconnective system architecture of alarm component of pronunciation part, have the following advantages: can be in the upper space of this system the alarm component of this separation be arranged on the good position of visibility, and, the alarm component of blast resistance construction can be provided, can as safe as a house and positively implement the leakage detection and/or the alarm/supervision of volatile liquid or inflammability liquid handles, in addition, do not need to learn special sensor configuration mapping relations etc., anyone can easily carry out the adjustment operation and the maintained/managed operation of system.

And then, in an example of leakage sensor of the present invention, can use by the leakage sensor that constitutes as lower member: at least one reflection boundary face, this reflection boundary face can contact with above-mentioned leakage by the gas blanket or the leakage pervious course of permeable leakage; Light-projecting portion; Light accepting part; And the control assembly that combines with these parts,

Above-mentioned light-projecting portion and light accepting part be contained in the container that the bottom is made of transparent material or trnaslucent materials and it is integrated, perhaps,

Above-mentioned light-projecting portion and light accepting part be contained in the container that the bottom is made of transparent material or trnaslucent materials and it is integrated, and, end at this container is installed bottle holder, this bottle holder makes the end of this container be not easy to be subjected to the character of surface that the position is set of substrate of this leakage sensor etc. or the influence of surface color, and, be used for and prevent tumbling of this container, and

Make the abnormality detection parts of above-mentioned leakage sensor and comprise the alarm component of pronunciation part, determine the mode that the position is set of this leakage sensor with other leakage sensors that can be different from the outside that is arranged on the regulation spatial dimension, with the transmission sound of audible frequency the sensor abnormality of this leakage sensor is detected and to carry out alarm, and

Preferably, according to independent or a plurality of leakage sensors of the inboard that is arranged on the afore mentioned rules spatial dimension, can be separately or use above-mentioned alarm component jointly, more preferably, this alarm component is arranged on the locus of easy visuognosis.

Below, with reference to accompanying drawing, leakage sensor and the leakage detection system that the present invention relates to described.

Fig. 1 is the block diagram that mechanical 1 structure example when leakage detection system 1a of the present invention is applied to apply display is shown.

Fig. 2 is that its leakage test section (leakage sensor portion) is 1 example of structure that leakage sensor 20a is integrally formed with comprising the alarm component 70a of pronunciation part.

Fig. 2 (A) is the planimetric map that the structure of leakage sensor 20a of the present invention is shown.

Fig. 2 (B) is its drawing in side sectional elevation on 2B-2B.

Fig. 2 (C) is its side view.

Fig. 3 (A) is its longitudinal diagram on 3A-3A.

Fig. 3 (B) is the enlarged drawing of Fig. 2 (B).

Fig. 3 (C) is its drawing in side sectional elevation on 3C-3C.

Fig. 4 (A) is the vertical view of retainer 5 of the present invention.

Fig. 4 (B) is its central drawing in side sectional elevation.

Fig. 4 (C) is the vertical view with thin paper 8 of the 8d of cut-out portion.

Fig. 6 is the block diagram of a structure example that the signal Processing of leakage sensor 20a of the present invention is shown.

Fig. 7 is the block diagram that the mechanical structure example of explosion-proof type leakage detection system 1b of the present invention is shown.

Fig. 8 illustrates this leakage test section (leakage sensor portion) separates leakage sensor 20b the structure of setting with the alarm component 70b that comprises pronunciation part a example.

Fig. 9 is the block diagram of a structure example that the signal Processing of explosion-proof type alarm component 70b of the present invention is shown.

[embodiment 1]

Below, referring to figs. 1 through Fig. 6, the situation that leakage detection system of the present invention is applied to the coating display of semiconductor wafer (hereinafter referred to as wafer) is described.

At first, Fig. 1 is with to comprise the alarm component 70a of pronunciation part 72 integrally formed and constitute the example of the leakage detection system 1a of leakage test section of the present invention (leakage sensor) 20a with the 20a of leakage sensor portion.Be use at least that leakage sensor constitutes (be one in the example of Fig. 1, but, in area big same bottom surface and basal surface, also can disperse be provided with a plurality of leakage sensors in a plurality of positions) the example of leakage detection system 1a, this leakage sensor has a leakage test section that can contact with leakage by the gas blanket or the leakage pervious course of permeable leakage at least (in Fig. 1, this leakage test section is to be made of the optical profile type leakage test section that comprises an optical profile type reflection boundary face at least, but, can use the existence that comprises according to nonisulated property liquid, the conduction formula leakage test section of the electrode pair that inter-electrode impedance changes, perhaps liquid capacity metering formula leakage test section).With leakage sensor 20a so that each leakage accommodation section for the supvr of system/safeguard responsible official; can distinguish and spatially can identification mode be separately positioned on the bottom surface 99 of each leakage accommodation section 98 described later; this is provided with the position relatively; stipulating during spatial dimension is with interior (the bottom surface superjacent air space of leakage accommodation section 98) the alarm component 70a that comprises pronunciation part described later to be set; when the sensor abnormality that detects leakage sensor 20a (leakage detects unusual or sensor is provided with unusually); at least pass through pronunciation part; with can be easily and be different from directly that other leakage sensors that are arranged on the afore mentioned rules spatial dimension outside are provided with position (make each leakage accommodation section independent respectively and can distinguish) and the mode that the position is set of determining leakage sensor; with the transmission sound of audible frequency the sensor abnormality of leakage sensor is detected and to carry out alarm; leakage sensor 20a can be connected by signal wire with alarm component 70a, also can be provided with integrally formedly.

Yet the coating display of above-mentioned wafer is generally by constituting as lower member: the processing mechanism unit, and it disposes the processing mechanism of wafer being implemented various processing; And move into and take out of mechanism, it is used for wafer being moved into/being taken out of the processing mechanism unit.Move into and take out of mechanism and have: the wafer carrier (carrier) that holds the wafer before handling; The wafer carrier that holds the wafer after the processing; The arm of absorption and maintenance wafer; On directions X, Y direction and the θ direction of level, move directions X travel mechanism, Y direction travel mechanism and the θ direction travel mechanism of this arm respectively; Between the processing mechanism unit, carry out the mounting table of the transmission of wafer, in addition, in above-mentioned processing mechanism unit, also be provided with each processing mechanism that constitutes by following mechanism: the adhesion applying mechanism, it carries out pre-treatment in order to improve the adaptation between wafer and the etchant resist; Applying mechanism 81a, its coating on wafer liquid against corrosion; Cooling body, it cools off applied liquid against corrosion wafer before by applying mechanism 81a, adjusts to set point of temperature; Baking mechanism, it carries out heat treated in order to make solvent evaporation residual in the etchant resist that is coated on the wafer; The 81b of video picture mechanism, it carries out video picture to the resist after exposing and handles.And then, in the processing mechanism unit, on above-mentioned each processing mechanism 81a, 81b etc., directly disposed transport mechanism along carrying channel, this transport mechanism has the arm of moving into/taking out of that is used to carry out wafer, in the processing unit that as above constitutes, take out of wafer that mechanism moves into after having carried out pre-treatment by moving into by the adhesion applying mechanism, carry out cooling processing and coating processing, mechanism carries out heat treated by baking, in addition, carry out video picture by the 81b of video picture mechanism and handle, afterwards, be sent to move into and take out of mechanism, be contained in the wafer carrier.In this structure, supply with treating fluid, liquid promptly against corrosion to liquid applying mechanism 81a against corrosion from treating fluid case 82 with leakage detection system 1a of the present invention.

The configuration of the configuration of the treating fluid case 82 in the above-mentioned semiconductor wafer processing device and treating fluid usefulness temperature control part 84 is provided with leakage detection system 1a respectively as shown in Figure 1 on these treating fluid casees 82 and temperature control part 84.Yet, the conduit 83 of sending that comes out from treating fluid case 82 is connected to applying mechanism 81a, in the water jacket 89 that is provided with around the top for the treatment of fluid case 82, also leakage sensor can be set, be provided with temperature control unit 85 on the conduit 83 sending, by doing like this, the treating fluid that offers applying mechanism 81a is maintained stationary temperature.Thermostatted water is supplied with in circulation in temperature control unit 85, and this thermostatted water is the temperature control liquid that is controlled to steady temperature by temperature adjustment unit 84a.Temperature control part 84 is made of temperature adjustment unit 84a and the temperature control unit 85 that constitutes as heat exchanger; Wherein temperature adjustment unit 84a is made of constant temperature water tank 91, send water conduit 87 and backwater conduit 86 etc. with pump 90 and heat-sensitive module 88.Heat-sensitive module 88 does not specifically illustrate, and still, flows through herein by making Control current, temperature adjustment water can be maintained steady temperature.

Be provided with the float 94 that Level Detection is used in constant temperature water tank 91, this float 94 has electric contact 96 near its support portion 95.This contact 96 is to connect by the mode that does not have the action that illustrated logical circuit can control electromagnetic valve 97.Below this constant temperature water tank 91 and treating fluid case 82 respectively separate configurations leakage hold dish 98, leakage detects and to be configured in this leakage with leakage sensor 20a in independent and mode that can distinguish mutually respectively and to hold and coil on 98 the bottom 99.

Above-mentioned do not have illustrated logical circuit when liquid measure reduces, with solenoid valve 97 states of being changed to out, and supplying temperature control liquid (hereinafter referred to as temperature adjustment liquid).Change-over switch is used for switching supplying with temperature adjustment liquid automatically and manually.If the contact of switch is connected to the right side, then flow through electric current in the solenoid valve 97, valve open manually replenishes and supplies with temperature adjustment liquid.If the contact of switch is connected to the left side, then carries out the supply of temperature adjustment liquid automatically.

When the liquid level of case 91 reduced, float 94 reduced, and contact 96 is connected.At this moment, the input of phase inverter A1 becomes 0, and output becomes 1 (the H level state of positive logic).The output of phase inverter A1 is delivered to phase inverter A2 and A3 by dividing other delay circuit D1 and D2, and still, delay circuit D1 has about 1 minute time delay, and delay circuit D2 has the time delay in about 2 seconds.Therefore, after about 2 seconds are connected in contact 96, produce signal 1 in the lead-out terminal of phase inverter A4, so at this moment, transistor Tr is connected, and flows through electric current in the solenoid valve 97.And then after about 1 minute, the output of phase inverter A2 becomes 0, so transistor Tr disconnects once more, the electric current of solenoid valve 97 is cut off.Be provided with diode in each delay circuit D1, D2, these delay circuits D1, D2 postpone 0 → 1 signal, and still, the signal to 1 → 0 transmits without delay.Therefore,, can prevent that solenoid valve 97 is open more than 1 minute,, can prevent solenoid valve 97 because fluctuation of liquid level etc. and connect repeatedly continually and disconnect by delay circuit D2 by delay circuit D1.

Fig. 2 illustrates the example that the structure that the alarm component 70a that comprises pronunciation part among the present invention and optical profile type leakage sensor (leakage sensor that the leakage test section is made of the optical reflection face) 20a is integrally formed is amplified expression, leakage sensor 20a is made of container 12 and bottle holder 5 that this container is installed, and wherein container 12 is contained in light source part 14a and light receiving component 16 in the container that bottom 12d is made of transparent material or trnaslucent materials and carries out integrated obtaining.This leakage sensor 20a is fixedly installed on the leakage detected object bottom surface of leakage accommodation section 98 (when leakage sensor being set directly at the basal surface of buildings etc. by screw/fixed parts such as nail, refer to be provided with and use basal surface) on 99, perhaps by there not being illustrated other fixed parts to be fixed on the leakage detection position of the regulation of leakage accommodation section 98, and, it is provided with a high speed leakage described later at least and introduces parts 6, this high speed leakage (is for example introduced the space part that capillarity may take place that parts 6 utilize specified gap and regulation section shape, the gap smaller or equal to the parallel space part of 1mm and/or maximal clearance smaller or equal to 1mm and the wedge-like space part that narrows down gradually upward), be to have for surface tension 20 ℃ the time smaller or equal to 6 * 10 ^-2The leakage of the low surface tension of N/m even a spot of leakage also can be resisted gravity, is directed to the leakage detection position of leakage detection with the reflection boundary face with it from leakage detected object basal surface 99 direct promptly liftings,

It is selected from following material or its group that combines: thermoplastic resin, as ABS resin, tygon, Polyvinylchloride, polystyrene, polypropylene, polyvinyl alcohol (PVA), methacryl resin, petroleum resin, polyamide, polyvinylidene chloride, polycarbonate, polyacetal resin, fluororesin, polyimide, polyether ester ketone, polyphenylene sulfide, polybenzimidazoles, poly-cycloolefin etc.; Or thermosetting natural gum, that is, the synthetic resin members/plastic components of thermoplastic resin or thermosetting natural gum etc. is as phenolics, urea resin, unsaturated polyester (UP), polyurethane, vibrin, melmac, epoxy resin etc.; Or the Biodegradable resin parts, as polyaminoacid, aliphatic polyester, poly--ε-caprolactone, polyvinyl alcohol (PVA), poly glucosamine, starch, cellulose etc. and the polymeric potpourri of versatility etc.

And then, on the container bottom 12d that constitutes by transparent material or trnaslucent materials, according to convex form as shown in Figure 5, one end of the leakage test section that its bottom surface 12p can contact with the leakage detected object bottom surface 99 direct driving fits of leakage accommodation section 98 saliently is set, this transparent material or trnaslucent materials comprise one of following material at least: polyamide, polycarbonate, polyacetal resin, polyethylene terephthalate, polybutylene terephthalate, polyphenylene oxide, polyether ester ketone, polyphenylene sulfide, polyarylate, polysulfones, Poly-s 179, the polyketone thioether, polyetherimide, polyamide-imides, polyimide, teflon, aromatic polyester, PABM, engineering plastics parts such as triazine resin, glass or pottery

In this test section, with angles of inclination with respect to the regulations of 99 one-tenth of leakage detected object bottom surfaces (or basal surface) about 35 degree～50 degree, plane leakage is set to be detected with fully reflecting

surface

12m and 12n, fully reflecting surface 12m that these are plane and 12n are in order to play the function equal with right-angle prism, the extended line cross one another state formation of angle according to the rules with fully reflecting surface, above-mentioned relatively each reflection boundary face, at at least 1 light source part of same side configuration, light receiving component and the control assembly that combines with them, for from light source part to above-mentioned the 1st total reflection boundary surface 12m projection light, to project the 2nd total reflection boundary surface 12n from the reflected light of the 1st total reflection boundary surface 12m, light receiving component is accepted the reflected light from the 2nd total reflection boundary surface 12n, by above-mentioned control assembly, calculation process is carried out in its output detect leakage

At first, the projection light 22u of the light source part 14a of the 1st optical system of coming self-forming leakage detection usefulness, for on fully reflecting surface 12m with the angle generation total reflection of critical angle more than or equal to regulation, from the top downwards, to shine fully reflecting surface 12m with the corresponding regulation incident angle of the refractive index of transparent material or trnaslucent materials 12d, its reflected light 22v projects on the fully reflecting surface 12n, from the total reflection light 24u of fully reflecting surface 12n with the corresponding regulation light angle of the refractive index of transparent material or trnaslucent materials 12d, the light receiving component 16 of the photo-electric conversion element that is formed by CCD or MOS type photodiode etc. is accepted, the leakage that to propagate in this optical path detects light and converts electric signal to, its output is for example by multiplexer 31 shown in Figure 6, by the sampling period of each regulation, convert digital signal to by A/D converting member 32, order writes and comprises microprocessor (MPU) 36 and be also used as memory buffer 34 in leakage detection part 18 control assemblies 30, carry out digital processing, perhaps, the simulation of light receiving component 16 output is directly imported by the analogue operational unit that does not have illustrated analog comparator etc. to constitute, in the control assembly that is also used as detection part 18 30 that constitutes by mimic channel, compare with the stipulated standard level, according to the size of reflection light quantity, having or not of leakage carried out simulation process.

Yet, inside at leakage sensor 20a, to generate by calculation process, the leakage detection information that has or not of expression leakage outputs to the outside by outside output setting apparatus 33 and signal wire 26 (the outside output form that PNP output of being determined by the biserial switch of setting apparatus 33 inside etc. or NPN export) numeral, and, also output to the alarm component that works alone with this outside output information, for example, alarm component 70a, this alarm component 70a has one of following pronunciation part at least: the pronunciation part that comprises the parts that pronounce by the strike resonant; And/or comprise the pronunciation part of steam whistle or alarm; And/or comprise the parts (for example, piezoelectric buzzer etc.) that pronounce by vibration; And/or comprise by the pronunciation part 72 that passes through to vibrate parts that pronounce and the sympathetic response parts that combine with it.And then preferably alarm component 70a also connects emergency warning lamp 29, and this leakage detection position is distinguished mutually with other leakage detection positions, also can pass through the transmission sound of audible frequency and the mode of Direct Recognition is carried out alarm/notice to safeguarding the people with the beginner.

As above-mentioned light source part/light projector parts, can use LED or infrared light-emitting component, semiconductor laser, light projector with optical fiber etc., in addition, integrally formed at the alarm component 70a that will comprise pronunciation part 72 and leakage sensor 20a and among the leakage detection system 1a that constitutes, preferably the control part 700 of the alarm component 70a that will control to the driving electric that above-mentioned light source part 14a, light receiving component 16, emergency warning lamp 29, detection part 18, pronunciation part 72 provide and/or control assembly 30 etc. are integrally formed and fixing with the circuit board 7 that is also used as light screening material.In addition, inside in the electric control portion 700 of alarm component 70a, preferably be provided with wired or wireless communication unit 702, if by this communication component 702, can be by remote operation instruction from the outside, carry out on-off control or the volume control that output sends sound, the reset operation of pronunciation part 72 etc. of pronunciation part 72, then can be certain/promptly implement the maintenance/resume operation after leakage takes place, more favourable.

Yet, can make control assembly 30 be also used as the electric control portion 700 of alarm component 70a, its fixed station 71 is fixed on the circuit board 7 by fixers such as screws, and, in the above, will be (for example by piezoelectric vibration device, the piezoelectric vibration device PKLCS1212E4001-R1 of the Murata Manufacturing Co., Ltd of Kyoto Prefecture) etc. the pronunciation part 72 of formation is fixed on assigned position with the state that can vibrate, in the above, on the lower inside of hollow bottom, form vibration propagation face 74, form the fitting projection 78 of circular cylindrical shell 73 by forming on the periphery of lower end of the main part of alarm component 70a, with one touch type removably mode be formed in the chimeric recess groove that forms in the top periphery portion of optical profile type leakage sensor 20a, the hollow, upper of circular cylindrical shell 73 forms the acoustic resonance device 75 of pronunciation part 72 with cap 76, and, on the hollow, upper sidewall and/or cap 76 of circular cylindrical shell 73, form independent or a plurality of window portions 77 that launch the sonorant of pronunciation part 72.In addition, compare, form in the side and can prevent that leakage from flowing directly into the inside of acoustic resonance device 75 with the above-mentioned window of formation portion 77 on housing 73, more favourable.

And then, if acoustic resonance device 75 usefulness transparent materials and/or trnaslucent materials constitute, then can be from the illuminating state of the emergency warning lamp 29 of the direct observed configurations in outside on circuit board 7.

In addition, in the above-described embodiment, the structure that the container 12 of alarm component 70a and leakage sensor main body is integrally formed has been described, but the vibration source/vibration section of the pronunciation part of alarm component 70a also can be arranged on retainer 5 sides, in addition, also can be distributed to container and retainer two places form.In addition, above-mentioned sympathetic response parts/acoustic resonance device is except being configured in container 12 sides, also can be configured in retainer 5 sides, perhaps decentralized configuration/be formed at container and this two place of retainer, and then, as described later, also can be in addition by the communication component of wire/wireless, be arranged on locus with the regulation of the top that position separating is set of leakage sensor.

In addition, if with sympathetic response parts/acoustic resonance device decentralized configuration/be formed at container 12 sides and this 2 place of retainer 5 sides, then during resuming operation after maintenance test/leakage takes place, under the situation that main body container 12 is taken off from retainer 5, can reduce the volume of alarm tone, can reduce resume operation etc. in unwanted high alarm tone.

Secondly, independently be provided with optical system as the 2nd optical system that abnormality detection parts 4 are set and above-mentioned the 1st leakage detection, this is provided with abnormality detection parts 4 and carries out the inspection of the depth of parallelism, check and whether do not have the unsteady/inclination of generation with respect to the leakage detected object bottom surface 99 of container 12, in the 2nd optical system, refraction/transmission takes place at container bottom 12d in the projection light from light source part 14c, from last direction thin paper 8 projections, on the interior perimembranous of the ring-type framework 5a of hollow bulb with retainer 5, towards interior side ring center position, jut 5h and framework 5a are integrally formed, on this jut 5h, the thin paper mounting plane 5j that formation is formed by the absorbing material/light transmissive material of light, the part of mounting thin paper 8 on the 5j of this plane, with less than the incident angle of the critical angle of container bottom 12d to thin paper 8 irradiates light 22z as the 3rd optical reflection (border) face, refraction and projection take place in thin paper, its reflected light 24z is accepted by light receiving component 16c, with similarly above-mentioned, convert electric signal to, be input to control assembly 30.In addition, be preferably between light source part 14c and the light receiving component 16c, filling/formation is from the light screening material 12q of light source part 14c to the projection light of the direct incident of light receiving component 16c, in addition, separate for above-mentioned the 1st optical system and the 2nd optical system are carried out optical profile type, be preferably between the 1st and the 2nd optical system also filling/formation light screening material 12q.

In addition, can make control assembly 30 be also used as the control part 700 that unusual decision means and alarm component 70a are set that has or not decision means (leakage detection part), container of leakage and move, in addition, abnormality detection parts 4 are set in above-mentioned example to what check with respect to the depth of parallelism of the bottom surface (or basal surface) 99 of container 12, be that optical profile type is provided with the abnormality detection parts, but, in addition, also can use utilized that magnet or static capacity change the abnormality detection parts are set.

In addition, inboard at container bottom 12d, can paste light screening materials such as metal forming, if this light screening material is configured in the spatial dimension except that the photoirradiated surface of container bottom and light receiving component reflected light sensitive surface nearby, even then infiltrate under the situation of basal surface for white or the basal surface that constitutes by minute surface, also have light receiving component and do not accept unwanted catoptrical optical effect from basal surface in leakage.And then, the detection output of the leakage after will handling by control assembly 30 or sensor abnormality information such as unusual is set outputs to the outside as electric signal by cable 26, and, in the display unit 29 on the circuit board 7 that is arranged on container 12, also switch the LED light etc. and warn demonstration by carrying out green/red.In addition, if use 1.3 times the device of the external diameter of retainer 5 more than or equal to the external diameter of container 12, can prevent tumbling of sensor 20a better, under the big situation of the tenacity of cable 26, if container 12 is provided with separately, then container 12 is tumbled easily, so, usually, the retainer 5 that will insert container 12 by immobilization materials such as screws tightly is fixed on the leakage detected object bottom surface 99, and then/or, to the facial pressure welding part 60 that extends the arm shape that is provided for fixed container 12 of vessel side, pass through screw from the sidewall of buildings or device etc. or side 61, immobilization materials 64 such as nail are fixed on buildings 61 sides with one end 62, and, the other end 66 pressure weldings on the vessel side face, are prevented tumbling of container 12.

In addition, preferably the interval d4 of container bottom 12d and leakage detected object bottom surface 99 can carry out all changes according to the viscosity/surface tension of the liquid that detects, but, if because the moving etc. of earthquake and weight object, reflection boundary face 12m, the angle of 12n and leakage detected object bottom surface 99 or interval change, the leakage that then is easy to become leakage sensor has or not the reason of the malfunction of judgement, so, preferably adopt following structure: retainer 5 and container 12, as described later, can carry out the one touch type loading and unloading, and, for the vibration of outside, d4 does not change at interval.In addition, if retainer 5 is made of light screening material, then has and to prevent that noise light from invading, preventing to accept the unwanted catoptrical effect from basal surface around the container 12.In addition, do not using retainer 5, and when container 12 used as leakage sensor 20a separately,, preferably be fixed on the bottom surface 99 by pressure welding part 60 grades that are provided with separately in order to make above-mentioned interval d4 not change with respect to the vibration of outside.In addition, above-mentioned light source part 14c, light receiving component 16c and display unit 29 etc. are also preferably integrally formed and be fixed on the circuit board 7 that is also used as light screening material.

Secondly, preferably, to leakage detect position that the fully reflecting surface 12m with projection light 22u shines be fully reflecting surface 12m the position, near the position of the below of leakage detected object bottom surface 99, be arranged on the sealing sheet pressing plate that the leakage test section bottom surface 12p etc. of the convex form of container 12 bottoms can be used as thin paper 8 and use, this thin paper 8 has formed cut-out lines 8d shown in Fig. 4 (C) at assigned position.In addition, be preferably between light source part 14a and the light receiving component 16, filling/formation is from the light screening material 12q of light source part 14c to the projection light of light receiving component 16 direct incidents.

Yet, as main contents of the present invention, container 12 is whole by insertion/installation, chimeric and be fixed on the retainer 5 (Fig. 4 (A) that constitutes by ring-type framework 5a with central hollow portion, (B)) go up (Fig. 2), framework 5a and leakage detected object bottom surface 99 opposed bottom surface 5b (Fig. 4 (B)) keep predetermined distance d5 (preferably can form the interval of the space part of 2mm～5mm scope usually) to form with its almost parallel ground with leakage detected object bottom surface 99, on the 12d of the bottom of container 12, be provided with leakage test section (Fig. 2 (B) with the convex form projection, Fig. 5), the bottom surface 12p of this leakage test section clips thin paper 8 and directly closely contacts with bottom surface 99, so, can directly detect leakage 2a from leakage detected object bottom surface 99, wherein spread to central hollow portion this leakage detected object bottom surface 99, this leakage 2a to leakage detected object bottom surface 99 with film like diffusion and have low surface tension, on the other hand, retainer 5 also can utilize through hole 5d, be fixed on the bottom surface 99 by immobilization materials such as nail/screws, wherein, this through hole 5d forms in protrusion 5c, this protrusion 5c is arranged on from the ring center laterally on the single or multiple position of the peripheral part of direction, also can on the fan-shaped bottom surface of this protrusion 5c, paste bonding agent, closely bond and be fixed on (Fig. 4) on the bottom surface 99.In addition, can not fix yet, but only merely be positioned on the leakage detected object bottom surface 99 in the mode of freedom of movement.And then, the pressure welding part 60 that extends the arm shape that is provided for fixed container 12 to the vessel side face from the sidewall or the side 61 of buildings or device etc., by immobilization material 64 one end 62 is fixed on buildings 61 sides (Fig. 8), and, the other end 66 pressure weldings on the vessel side face, are prevented tumbling of container 12.

And then, the example of Fig. 2 is with light source part 14a, 14c and light receiving component 16,16c is contained in internal tank that bottom 12d is made of transparent material or trnaslucent materials and an example of carrying out integrated resulting container, by the bottle holder 5 and the container 12 of container 12 are installed, constitute the high speed leakage and introduce parts 6, its structure (Fig. 5) for example is: on the interior perimembranous of framework 5a, towards interior side ring center position, with the integrally formed terminal part 5f of the framework 5a cuboid jut .5e that is wedge-like, this jut 5e is preferably formed by absorbing material/light transmissive material that leakage detects with projection light, the bottom surface 5g of jut 5e does not closely contact with leakage detected object bottom surface 99, and leakage detected object bottom surface 99 between form smaller or equal to specified gap d6=1mm (preferably smaller or equal to 0.9mm, be more preferably less than and equal 0.5mm) parallel space part d6, utilize the capillarity of parallel space part d6, make under 20 ℃ smaller or equal to 6 * 10 ^-2The leakage 2a of the low surface tension of N/m is to spreading at a high speed with leakage detected object bottom surface 99 opposed bottom surface 5g, in addition, end at bottom surface 5g, between the fully reflecting surface 12m of the terminal part 5f of jut 5e and container 12, formation smaller or equal to specified gap d7=1mm (preferably smaller or equal to 0.9mm, be more preferably less than and equal 0.5mm) parallel space part d7, and/or the maximal clearance that forms the bottom smaller or equal to d7=1mm (preferably smaller or equal to 0.9mm, be more preferably less than and equal 0.5mm) the wedge-like space part d7 that narrows down gradually upward, utilize the capillarity of this space part d7, under 20 ℃ smaller or equal to 6 * 10 ^-2Even the leakage 2a of the low surface tension of N/m a spot of, also can resist gravity, and 99 direct promptly liftings are directed to the top that leakage detects the leakage detection position of the regulation of using reflection boundary face 12m from the bottom surface with it.

In addition, also can have the part of the leakage detection of cut off machine 8d with thin paper 8 by plug-in mounting in space part d7, according to experiment, no matter whether thin paper 8 is inserted among the space part d7, and the detection speed of the leakage 2a of low surface tension almost is the detection speed of same degree.In addition, the following structure of preferred employing: container 12 is whole by insertion/installation, chimeric and can be fixed on the upright chimeric fastener 5n that establish in a plurality of positions that are arranged at perimembranous in ring-type framework 5a top with rotating freely and go up (Fig. 2 (A), (B)), on the terminal part 5p of fastener 5n, form taper surface obliquely upward, can be with singly touching the charge and discharge operations (Fig. 4 (B)) that carries out container 12.

In this structure, with reference to Fig. 3 (C) and Fig. 5, action to leakage sensor 20a describes, at first, when container 12 is not securely fixed in leakage detected object bottom surface 99 by retainer 5 or pressure welding part 60, container 12 can relative retainer 5 floats or tilts and be in the abnormality that is provided with of tumbling, therefore, projection light/catoptrical optical path 22z/24z that optical profile type is provided with abnormality detection parts 4 can't be formed on the normal position, the projection light 22z of light source part 14c sees through/diffusion to gas blankets such as air from the optical profile type reflection boundary face 12a of main part 12d, can not arrive reflection part (thin paper 8), perhaps throwed with angular bend more than or equal to regulation, its reflected light 24z nearly all can not arrive light receiving component 16c, so, output by the light receiving component 16c that reduces significantly with 18 pairs of light incomes of detection part compares with normal reflecting light level, it is unusual easily to detect being provided with of leakage sensor 20a, by the control assembly 30 that constitutes by MPU etc., abnormality alarm signal (or malfunction code ER-A) is set to be set in the output format for numbers that PNP exports or NPN exports in the outside output setting apparatus 33, output to the outside by cable 26, and then, by there not being illustrated power control part, stop light source part 14a, 14c and light receiving component 16, the power supply of 16c is supplied with, and leakage sensor 20a becomes wrong holding state.

At this moment, from 4 pairs of alarm component 70a outputs of abnormality detection parts and the above-mentioned independently alarm letter signal of audible frequency of abnormality alarm signal that is provided with are set, the vibration of pronunciation part 72 is exaggerated by acoustic resonance device 75, be transmitted into aerial, the operator who is set up the warning of abnormality alarm signal (usually, in maintenance room etc., wait for) promptly arrive in alarm and take place under the on-the-spot situation, checking that immediately the place is provided with where leakage sensor has taken place to be provided with when unusual, needn't be as in the past, check basal surface one by one, the bottom surface of leakage accommodation section, and determine that this is provided with out-of-the way position as long as the alarm tone that relies on the audible frequency that sends from pronunciation part 72 and acoustic resonance device 75, just can be different from easily that other leakage sensors are provided with the position near sound generation source.In addition, the alarm tone from pronunciation part 72 and acoustic resonance device 75 transmissions can use: interruption tone that frequency is constant or variable and/or continuant; Interruption tone that tone color is constant or variable and/or continuant; Interruption tone that the sound intensity is constant or variable and/or continuant; Interruption tone that beat is constant or variable and/or continuant; Interruption tone that dutycycle is constant or variable and/or continuant; Or comprise the transmission sound of the alarm tone that they are combined.

And then, in alarm component 70a, can make emergency warning lamp/display unit 29 make mistakes (redness) light, but, also can be corresponding to the change of the alarm tone of the audible frequency that sends from pronunciation part 72, make the brightness change of emergency warning lamp 29, this corresponding relation can be that the change with alarm tone synchronously changes brightness or emission wavelength etc., also can change independently respectively.

Do not exporting under the common state that normally is provided with of this alarm signal, from power control part to

light source part

14a, 14c and light receiving component 16, the 16c supply power, leakage sensor 20a becomes duty, when not having any leakage, shown in Fig. 3 (C), projection light/catoptrical optical path 22z/24z that optical profile type is provided with abnormality detection parts 4 is formed on the normal position, projection light 22z from light source part 14c reflects on the reflecting surface of the reflecting material on the 5j of retainer bottom surface (thin paper 8) in mounting, its reflected light 24z is input to photo detector 16c, by comparing, can easily detect the state that normally is provided with of leakage sensor 20a with 18 pairs of these outputs of detection part and normal reflecting light level.

In addition, come the self-forming leakage to detect projection light 22u with the light source part 14a of optical system in order on fully reflecting surface 12m, to carry out total reflection with angle more than or equal to the regulation critical angle, from the top downwards, to shine on the 1st fully reflecting surface 12m with the corresponding regulation incident angle of the refractive index of transparent material or trnaslucent materials 12d, its total reflection light 22v projects on the 2nd fully reflecting surface 12n, from the total reflection light 24u of fully reflecting surface 12n with the light angle of the corresponding regulation of refractive index of transparent material or trnaslucent materials 12d, accept by light receiving component 16, the leakage that to propagate in this optical path detects light and converts electric signal to by photo-electric conversion element, its output is carried out digital processing in the control assembly 30 that is also used as detection part 18, perhaps with the direct analogue operational unit that constitutes by analog comparator etc. of input of the simulation of light receiving component 16 output, in the control assembly that is also used as detection part 18 30 that constitutes by mimic channel, carry out simulation process.In addition, when not having leakage, in above-mentioned example, detecting any light receiving component all is normal light income, and the phenomenon that light income reduces does not take place.

Secondly, under 20 ℃ smaller or equal to 6 * 10 ^-2The leakage 2a of the low surface tension of N/m with film like diffusion when the leakage detected object bottom surface 99, the leakage 2a of liquid level d1 be diffused into form the high speed leakage and introduce the zone of the relative leakage detected object bottom surface 99 of the bottom surface 5g of cuboid jut 5e of a part of parts 6 in, by at the parallel space part d6 that forms between leakage detected object bottom surface 99 and the bottom surface 5g, when the length with the interval of space part d6 and the liquid level d1 of leakage 2a is set at roughly equal length in advance, or be set at liquid level d1 in advance〉at interval during the length of d6, utilize the capillarity of space part d6, leakage 2a is incorporated into (2a1 of Fig. 5) among the parallel space part d6 rapidly, leakage 2a contacts with bottom surface 5g, and, be diffused at a high speed on the whole bottom surface 5g relative with leakage detected object bottom surface 99.

Afterwards, end at bottom surface 5g, when leakage 2a is diffused into the lowest end (2a2 of Fig. 5) of an end of the terminal part 5f that forms jut 5e, leakage 2a and then arrive the end of the parallel space part d7 that forms by the fully reflecting surface 12m of container 12 and terminal part 5f, space part d7 is set at specified gap d7 and makes leakage 2a that capillarity take place, so, even the leakage rate of leakage 2a is very little, also can resist gravity, 99 direct promptly liftings are directed to the top (2a3 of Fig. 5) that leakage detects the leakage detection position of the regulation of using reflection boundary face 12m from leakage detected object bottom surface.Like this, if leakage 2a arrives the top by the regulation leakage detection position that leakage detects with reflection boundary face 12m, then total reflection does not take place in the most of light from the projection light 22u of light source part 14a on fully reflecting surface 12m, in bottom 12d and fully reflecting surface 12m, roughly keep straight on, and then, after refraction is kept straight in being full of the leakage 2a of space part d7, in the leakage 2a of cuboid jut 5e that the absorbing material/light transmissive material that is full of by projection light forms and space part d6, roughly keep straight on, on leakage detected object bottom surface 99, reflect, propagate/advance to the direction opposite with fully reflecting surface 12n.

Therefore, total reflection takes place on the fully reflecting surface 12m of formation leakage detection with the part of optical path, afterwards, light 24u after also total reflection taking place on the fully reflecting surface 12n received light quantity in light receiving component 16 reduces significantly, carry out calculation process by 30 pairs of these outputs of control assembly, just begun initial period of spreading thinly at a small amount of leakage 2a, just can detect very at high speed to leakage detected object bottom surface 99.In addition, in that the leakage 2a of low surface tension is disposable when escaping to leakage detected object bottom surface 99 in a large number, the periphery of container 12 all immerses among the leakage 2a, and, the leakage detection position that leakage detects with the regulation of reflection boundary face 12n also is immersed among the leakage 2a, so, even total reflection takes place in the projection light 22u from light source part 14a on fully reflecting surface 12m, its total reflection light 22v projects on the fully reflecting surface 12n, because leakage 2a, total reflection does not take place on fully reflecting surface 12n yet, but directly in fully reflecting surface 12n, roughly keep straight on, and then, after refraction is kept straight in being full of the leakage 2a of space part d4, to the peripheral direction diffusion/emission of container 12, to propagating/advance with the irrelevant fully direction in position that is provided with of light receiving component 16.Therefore, form leakage detect with the fully reflecting surface 12n of the part of optical path on light 24u received light quantity in light receiving component 16 after the generation total reflection reduce significantly, by control assembly 30 calculation process is carried out in its output, in the initial period, just can detect a large amount of generations of leakage 2a very at high speed.

Like this, when detecting leakage 2a by the control assembly 30 that is also used as leakage detection part 18, display unit 29 is lighted from normal (green) to be become make mistakes (redness) and lights, and, the PNP that sets in the setting apparatus 33 exports or the output format for numbers of NPN output externally to export, by cable 26, leakage detection signal numeral is outputed to outside (leakage detects error code ER-B).

This moment, from the 18 couples of alarm component 70a of leakage test section output when being outputed to the different alarm tone transmission signal of outside leakage detection signal by numeral, drive pronunciation part 72, for example, be transmitted into aerial after the vebrato that is generated by the vibration of piezoelectric element etc. is amplified by sympathetic response by acoustic resonance device 75, so, the operator who waits in safeguarding monitoring room etc. has been warned leakage by leakage detection signal ER-B take place after, promptly arriving under the on-the-spot situation of alarm generation, when checking that the leakage sensor of locating setting where has detected leakage immediately, can be as in the past, check basal surface one by one, the bottom surface of leakage accommodation section, and as long as rely on the amplification alarm tone that sends from pronunciation part 72 and acoustic resonance device 75 near sound generation source, just can be different from easily that other leakage sensors are provided with the position and determine this leakage occurrence positions.

In addition, the alarm tone from pronunciation part 72 and acoustic resonance device 75 transmissions can be: interruption tone that frequency is constant or variable and/or continuant; Interruption tone that tone color is constant or variable and/or continuant; Interruption tone that the sound intensity is constant or variable and/or continuant; Interruption tone that beat is constant or variable and/or continuant; Interruption tone that dutycycle is constant or variable and/or continuant; Or the alarm tone that they are combined.

And then, preferably, when carrying out leakage and detecting from the alarm of pronunciation part 72 emissions send sound with being provided with of container when unusual the alarm transmission sound of emission inequality, but the different transmission sound that can distinguish mutually, so that can discern is which sensor has taken place unusually, as this different transmission sound that can distinguish mutually, for example, can adopt various combinations such as following transmission sound: changing warning sends the transmission sound of the volume of sound; Changing warning sends the transmission sound of the tone color of sound; Changing warning sends the transmission sound of the frequency of sound; Changing warning sends the transmission sound of the dutycycle of sound; Send the transmission sound of sound with continuant and interruption tone output alarm; Or the transmission sound that they are combined.

Secondly, under 20 ℃ more than or equal to 6 * 10 ^-2When the capillary leakage 2 of N/m is diffused into leakage detected object bottom surface 99, since among the d4 of parallel clearance portion that between leakage detected object bottom surface 99 and container bottom 12d, forms plug-in mounting thin paper 8, so, leakage 2 at liquid level d3 contacts (Fig. 5) afterwards with the peripheral part or the part of thin paper 8, leakage 2 is permeated immediately/is diffused on whole of thin paper 8, and leakage 2 is incorporated near the fully reflecting surface 12n rapidly by thin paper 8.Like this, when leakage 2 arrival leakages detect the regulation leakage detection position of using reflection boundary face 12n, total reflection takes place in the projection light 22u from light source part 14a on fully reflecting surface 12m, its total reflection light 22v is on fully reflecting surface 12n, because leakage 2, total reflection does not take place, but in fully reflecting surface 12n, roughly keep straight on, and then, after refraction is kept straight in the thin paper 8 that has soaked into leakage 2, on leakage detected object bottom surface 99, reflect, to propagating/advance with the irrelevant fully direction in position that is provided with of light receiving component 16.Therefore, form leakage detect with the fully reflecting surface 12n of the part of optical path on light 24u received light quantity in light receiving component 16 after the generation total reflection reduce significantly, by control assembly 30 calculation process is carried out in its output, just begun initial period of spreading thinly in leakage 2, just can detect very at high speed to bottom surface 99.

In addition, when a large amount of leakage 2 of disposable generation, the periphery of container 12 all is soaked in the leakage 2, and, the regulation leakage detection position that leakage detects with reflection boundary face 12n also is immersed in the leakage 2, so, from the projection light 22u of light source part 14a when fully reflecting surface 12m is immersed in the leakage 2, total reflection does not take place, but roughly keeps straight in fully reflecting surface 12m, and then, refraction is kept straight in the leakage 2 that is full of space part d7, to propagating/advance, perhaps with the irrelevant fully direction of fully reflecting surface 12n

Total reflection takes place on fully reflecting surface 12m, when its total reflection light 22v projects on the fully reflecting surface 12n, because leakage 2, total reflection does not take place on fully reflecting surface 12n, but directly in fully reflecting surface 12n, roughly keep straight on, and then, after refraction is kept straight in the leakage 2 that is full of space part d4, on leakage detected object bottom surface 99, reflect, to propagating/advance with the irrelevant fully direction in position that is provided with of light receiving component 16.

Therefore, when a large amount of leakage 2 of disposable generation, form leakage detect with the fully reflecting surface 12n of the part of optical path on light 24u after the generation total reflection received light quantity in light receiving component 16 compare when not having leakage 2, reduce significantly, by control assembly 30 calculation process is carried out in its output, just can detect a large amount of generations of leakage 2 very at high speed in the initial period.

Like this, when detecting leakage 2a or leakage 2, display unit 29 is made mistakes light by the control assembly 30 that is also used as leakage detection part 18, and, by cable 26 nil that has of leakage is outputed to outside (leakage detects error code ER-B).

Simultaneously, send signal from 18 pairs of alarm component 70a output of leakage detection part alarm, the vibration of pronunciation part 72 is amplified the back to aerial emission by acoustic resonance device 75 by sympathetic response, waited when promptly arriving in leakage generation scene by the operator who safeguards monitoring room of leakage detection signal ER-B warning, when checking that the leakage sensor of locating setting where has detected leakage immediately, can be as in the past, check basal surface one by one, the bottom surface of leakage accommodation section, but send the position by the alarm tone that amplifies the back emission near sympathetic response, just can be different from easily that other leakage sensors are provided with the position and determine this leakage occurrence positions.

In addition, when in above-mentioned light receiving area reason, using 1 dimension or 2 dimension sensor arraies, after the numeral after can the A/D conversion of a plurality of each photo detector is exported and be write double-buffer memory 34, carry out following processing by MPU36 etc. as light receiving component.

A) carried out each photo detector 28i and (after the sensitivity compensating of i=a～n),, carried out smoothing being subjected to the light figure by moving average processing etc.

Whether b1) peak to the light and shade that is subjected to the light figure of having carried out smoothing carries out computing, be in according to this position and judge in the no leakage scope and have or not leakage.

B2) carried out the center of gravity XG of Luminance Distribution of the reflection light quantity that is subjected to light figure R (j) of smoothing by following formula operation, whether be in according to this centre of gravity place and judge in the no leakage scope and have or not leakage.

XG=∑ R (j) j/ ∑ j (j=1 is to n) ... (1)

Wherein, R (j): be subjected to the light level, j=1 is to n: light receiving position

B3) intercepting that in advance the waveform rising part of catoptrical shading graphic and/or waveform peak part and/or waveform falling portion graded from the reflected light figure that leakage is arranged is come out, as leakage template graphics T (j), sign in in template storage 35 grades, by carrying out the computing that is subjected to carry out among the light figure R (j) correlation CR (m) of smoothing, try to achieve similar waveform position with this template graphics T (j).

For example, with the distance of no leakage position more than or equal to the position of predetermined distance (mth) (m〉mth), and, detect similar degree more than or equal to regulation similar degree Thcr with the similar shading graphic CR of template waveforms (m) time, be judged as leakage, during other situations, be judged as no leakage.

C) like this, control assembly 30 when by being also used as leakage detection part 18 passes through b1) to b3) computing in required computing or the computing of combination, when detecting leakage 2, by cable 26, the nil that has of leakage is outputed to outside (leakage detects error code ER-B).

In addition, at above-mentioned b1) and processing b2) in, by extensively concentrating reflected light, can be the light accepting part (element) at 2 places by Min. with optically focused parts such as camera lens, concave mirrors, carry out the computing that has or not of leakage.In addition, at b3) related operation in, preferably collecting from Min. is the reflected light data of the light accepting part (photo detector) of 4～8 diverse locations.

And then, in leakage sensor 20a, between container 12 and retainer 5, be fitted with thin paper 8, so, leakage 2 orders that are diffused into leakage detected object bottom surface 99 are permeated thin paper 8, converting thin paper 8 to hyaline layer on one side spreads on one side, when leakage 2 infiltrations are diffused into the mounting plane 5j that forms above the jut 5h that is being arranged at all sides in the ring-type framework 5a, do not reflect on the surface of thin paper 8 to the light 22z that the thin paper 8 as the 3rd optical profile type (reflection) boundary surface shines from container bottom 12d, directly in the thin paper 8 that has permeated leakage, keep straight on, and then, with the keep straight on inside of the mounting plane 5j that absorbing material/light transmissive material by light forms, regulation refraction angle, so, the light quantity of the reflected light 24z that is accepted by light receiving component 16c reduces significantly, as the control assembly that abnormality detection parts 4 are set 30 work of container, even, also can detect leakage 2 as the exception error that is provided with of container.Therefore, during malfunction,, also can detect leakage 2, can further improve the measuring ability of makeing mistakes of sensor as the exception error that is provided with of container even the 1st optical system that detects usefulness in leakage breaks down.

Like this, the leakage sensor 20a of Fig. 2 (B) and Fig. 5 is the leakage sensor that constitutes with lower member: at least 1 leakage detects with reflection boundary face 12m, 12n, this reflection boundary face can be by permeable leakage gas blanket d6, d7 or the leakage pervious course (for example, in Fig. 5, the part of the thin paper 8 that clips by the leakage detected object bottom surface 99 and the container bottoms 12p of leakage accommodation section 98) contact with above-mentioned leakage; Light source part 14a; Light receiving component 16; And the control assembly 30 that combines with these parts, part or all of the face that gas blanket d6 or leakage pervious course bottom surface (thin paper 8 that is clipped by d4 or leakage detected object bottom surface 99 and bottom surface 12p) and leakage accommodation section 98 99 is relative directly opened (in the example at Fig. 5 to leakage detected object bottom surface 99 sides, gas blanket d6 is whole basal surface side), or, part as gas blanket or leakage pervious course (for example constitutes basal surface, in Fig. 5, the part of the thin paper 8 that clips by the leakage detected object bottom surface 99 and the container bottoms 12p of leakage accommodation section 98), and then, at least have 1 high speed leakage and introduce parts 6, this high speed leakage is introduced parts 6 and is utilized the space part that capillarity may take place with specified gap d0 and regulation section shape, for surface tension 20 ℃ the time smaller or equal to 6 * 10 ^-2The leakage 2a of the low surface tension of N/m, even it is a spot of, also can resist gravity, with its leakage detected object bottom surface 99 from leakage accommodation section 98, directly promptly promote and be directed to leakage detection reflection boundary face 12m, to shine leakage from the projection light 22u of light source part 14a detects with reflection boundary face 12m, reflected light from reflection boundary face 12m is accepted by light receiving component 16, by control assembly 30 calculation process is carried out in its output, the leakage 2a that can form a prompt judgement and have or not low surface tension.

In addition, the leakage sensor 20a of Fig. 2 (B) and Fig. 5 is a kind of leakage sensor, this leakage sensor is by gas blanket d6, d7 or leakage pervious course are (for example, in Fig. 5, the part of the thin paper 8 that is clipped by the leakage detected object bottom surface 99 and the container bottoms 12p of leakage accommodation section 98) forming at least 2 leakages that may contact leakage detects with total reflection boundary surface 12m, 12n, to 1 light source part 14a of major general, light receiving component 16 and the control assembly 30 that combines with these parts are with respect to each reflection boundary face, be configured in same side, from light source part 14a to the 1st total reflection boundary surface 12m projection light 22u, to project the 2nd total reflection boundary surface 12n from the reflected light 22v of the 1st total reflection boundary surface 12m, with the reflected light 24u of light receiving component 16 acceptance from the 2nd total reflection boundary surface 12n, by control assembly 30 calculation process is carried out in its output, detect leakage, with gas blanket d6, part or all of the face relative with leakage detected object bottom surface 99 of d7 or leakage pervious course directly opened to leakage detected object bottom surface 99 sides, perhaps, constitute bottom surface 99 sides of leakage accommodation section 98 as the part of gas blanket or leakage pervious course, and then, at least have 1 high speed leakage and introduce parts 6, this high speed leakage is introduced parts 6 and is utilized the space part that capillarity may take place with specified gap d0 and regulation section shape, opposing gravity is to have smaller or equal to 6 * 10 for surface tension 20 ℃ the time ^-2The leakage 2a of the low surface tension of N/m, even a spot of, also can directly promptly promote and be directed to leakage detection reflection boundary face 12m with it from leakage detected object bottom surface 99, even a spot of leakage rate, the leakage 2a that also can form a prompt judgement and have or not low surface tension.

In addition, specified gap d0 as the space part that above-mentioned capillarity may take place, preferably with equal length of thickness d shown in Fig. 1 (C) when a small amount of water clock of leakage 2a of low surface tension is to the leakage detected object bottom surface 99 of leakage accommodation section 98 and leakage 2a 1 or the littler (length of d0＜d1), be the length that the capillarity of leakage 2a can stably take place, in addition, as the regulation section shape that above-mentioned capillarity can stably take place, for example, can use the parallel space part section of gap smaller or equal to d0, and/or the maximal clearance is smaller or equal to d0 and the wedge-like space part section that narrows down gradually upward etc., so long as the section shape of capillarity can stably take place, can use Any shape.

[embodiment 2]

Secondly, Fig. 7 to Fig. 9 of corresponding expression with Fig. 1 to Fig. 6 illustrates and leakage test section of the present invention (leakage sensor portion) is separated into leakage sensor main body 20b and comprises the alarm component 70b of pronunciation part and the leakage detection system 1b that is provided with and another embodiment of 1c, device with identical numbering plays identical function, and, in the leakage detection system 1b of Fig. 7, leakage sensor 20b constitutes by the wireless explosion-proof type leakage detection system 1b that carries out signal relay with the alarm component 70b that separates setting, in addition, in leakage detection system 1c, leakage sensor 20b constitutes by wired explosion-proof type leakage detection system 1c that carries out relaying with the alarm component 70b that separates setting.

And then, in the explosion-proof type leakage detection system, as shown in Figure 8, be arranged on 20b of leakage sensor portion (leakage test section) and the control part 39 that is arranged on the forming circuit in the safe space in the dangerous space, separate physically and be provided with, and, only constitute the high speed leakage and introduce parts 6b in container 12 sides, and, in leakage test section 20b side, can realize there is not electrical wiring fully, the blast resistance construction of electrically-ignited/pyrophoricity accident takes place anything but, and, do not need retainer 5, the sensor container monomer just can be worked, by optical fiber grade in an imperial examination 1 optical communication means 40a, 40c, in the control part 39 of light source part 14 to being arranged on safety area at a distance of other isolation setting, respectively by optical communication means 40a, 42a, with projection light 22x, 22z is transferred to leakage test section 20b, formation is to reflection boundary face 12m, 12n carries out the 1st optical system (14-40a-12m-12n-42a-16) of the projection acceptance of light, by optical communication means 40c, 42c, formation to the reflection mounting surface 5j that forms on parts 6b is introduced in high speed leakage described later (in this example, face 5j does not use thin paper 8, so, preferably use light reflecting material (white or minute surface)) (optical profile type is provided with the optical path of abnormality detection parts 4b: 14-40c-5j-42c-16c) to carry out the 2nd optical system that the projection of light accepts, therefore, even detect with liquid 2/2a owing to volatility has burning in leakage, during explosion danger, also can carry out leakage as safe as a housely and detect.

Promptly, in above-mentioned the 1st optical system, part from the irradiates light that is arranged on light source part 14 at a distance is directed in the container 12 by optical communication means 40a, with predetermined angular more than or equal to the critical angle that total reflection takes place, shine the reflection boundary face 12m of container bottom as projection light 22u, and then on the face 12n of reflection boundary total reflection takes place, its reflected light 24u is accepted by optical communication means 42a, be transferred to the photo detector 16 that is arranged in the control part at a distance 39, by multiplexer 31, AD converting member 32, double buffering 34 is input to the control assembly 30 that is also used as detection part 18.

In addition, in above-mentioned the 2nd optical system, another part from the irradiates light that is arranged on light source part 14 at a distance is directed in the container 12 by optical communication means 40c, with critical angle with interior or more than or equal to the predetermined angular of critical angle, shine reflection part 5j as projection light 22z, its reflected light 24z is accepted by optical communication means 42c, be transferred to and be arranged on photo detector 16c at a distance, by multiplexer 31, AD converting member 32, double buffering 34, be input to the control assembly 30 that is also used as detection part 18.And then, preferably, the bottom of container 12 will be made of as basic material the transmitted light parts 12d that transparent material or trnaslucent materials constitute, its outside is except the shadow surface and reflecting surface/sensitive surface of light, light screening materials such as synthetic resin with light-proofness cover or formation, and it is integrally formed with transmitted light parts 12d, when using this light screening material, can be achieved as follows optical texture: even without retainer 5, also be not easy to be subjected to the influence of ambient noise light, in addition, when leakage is infiltrated, even the basal surface as the leakage detected object is white or minute surface, can not accept unwanted reflected light from basal surface yet.

Yet, in control part 39,, ceaselessly check the reflection light quantity of leakage detection faces by

light receiving component

16 and 16c, in the example of Fig. 8, when not detecting the reflection light quantity of regulation, be judged as detected leakage or taken place to be provided with unusual, with the past similarly, anomaly detection signal outputs to outside control part by wired 26, and, by comprising wireless communication units 37 such as WLAN, anomaly detection signal is transferred to the part of wireless receive 79c of alarm component 70b described later.

In addition, in leakage sensor 20b, do not use retainer 5, container 12 is used as leakage sensor separately, so the pressure welding part 60 of the arm shape that will be used for fixing container 12 from the sidewall or the side 61 of buildings or device etc. extends and is arranged on the container upper cover, by immobilization material 64 one end 62 is fixed on buildings 61 sides, simultaneously, the other end 66 pressure weldings on container top, are prevented tumbling of container 12.

And then, in the example of Fig. 8, only constitute the high speed leakage and introduce parts 6b in container 12 sides, its structure is: for example, and between container bottom 12d and leakage detected object bottom surface 99, towards the center position of container 12, relative container bottom 12d, the cuboid jut 12u that with terminal part 12v is wedge-like constitutes with transparent material or trnaslucent materials, and, by can be crooked/be divided into that parts 6b is introduced in main part 12d and high speed leakage and integrally formed synthetic resin material constitutes.This jut 12u is preferably formed by absorbing material/light transmissive material that leakage detects with projection light, the bottom surface 12w of jut 12u does not closely contact with leakage detected object bottom surface 99, and bottom surface 99 between form smaller or equal to specified gap d6=1mm (preferably smaller or equal to 0.9mm, be more preferably less than and equal 0.5mm) parallel space part d6, utilize the capillarity of parallel space part d6, make under 20 ℃ smaller or equal to 6 * 10 ^-2The leakage 2a of the low surface tension of N/m is to spreading at a high speed with leakage detected object bottom surface 99 opposed bottom surface 12w, in addition, end at bottom surface 12w, between the fully reflecting surface 12m of the terminal part 12v of jut 12u and container 12, formation smaller or equal to specified gap d7=1mm (preferably smaller or equal to 0.9mm, be more preferably less than and equal 0.5mm) parallel space part d7, and/or the maximal clearance that forms the bottom smaller or equal to d7=1mm (preferably smaller or equal to 0.9mm, be more preferably less than and equal 0.5mm) and the wedge-like space part d7 that narrows down gradually upward, utilize the capillarity of this space part d7, under 20 ℃ smaller or equal to 6 * 10 ^-2Even the leakage 2a of the low surface tension of N/m a spot of, also can resist gravity, and 99 direct promptly liftings are directed to the top that leakage detects the regulation leakage detection position of using reflection boundary face 12m from leakage detected object bottom surface with it.

Synthetic resin members as this integrally formed usefulness, can use general theRMOPLASTIC RESINS and thermoplastic elastomer, as theRMOPLASTIC RESINS, for example, can use poly terephthalic acid ethene, noncrystal poly terephthalic acid ethene, tygon, polystyrene, polypropylene etc., in addition, as the thermoplastic elastomer of integrally formed usefulness, can use polybutadiene.

Specifically, container bottom introduces by main part 12d and high speed leakage that parts 6b is connected with hinge and integrally formed, main part 12d introduces parts 6b with the high speed leakage and is connected at the slot part of outer peripheral edges by V word shape, by the synthetic resin material is that thermoplastics resin or thermoplastic elastomer are integrally formed, slot part by V word shape, when fully reflecting surface 12m lateral bending is bent, a plurality of kicks by the specified altitude d7 that forms in the terminal part side of face 12v, form space part d7, or, a plurality of kicks of the specified altitude d6 that forms by the face 12w side of introducing parts 6b in the high speed leakage, when crooked, and leakage detected object bottom surface 99 between, form space part d6, and, constitute the switching mechanism that generates bounce.Therefore, the main part 12d and the high speed leakage of container are introduced parts 6b to fully reflecting surface 12m lateral bending song, the face that is provided with of relative container 12, when closing with the approximate horizontal state, by deadweight or from the pressure welding part 60 of outside, can keep main part 12d and high speed leakage and introduce the state that parts 6b forms space part d7, and, the part that optical profile type is provided with the optical path of abnormality detection parts 4b formed.That is, when being provided with container 12 on the leakage detected object bottom surface 99 of level, the face that is provided with of container 12 is with respect to the datum water level maintenance level of regulation such as spirit-leveling instrument/parallel.

Secondly, with reference to Fig. 9, a structure example of separating the explosion-proof type alarm component 70b that is provided with is described, pass through the explosion-proof grid 78a of Zener type from separate the power supply 79a that is arranged on safe space (nonhazardous area) with control part 39, the alarm component 70b that is arranged on the hazardous area to separation supplies with the regulation power supply, in addition, the identiflication number set parts 79d that will be used to be different from separately other alarm component 70b of being provided with etc. and discern this alarm component 70b (for example, constitute by biserial switch etc.) output be input to control part 79b, and then, in alarm component 70b, part of wireless receive 79c is set in control part 79b, this part of wireless receive 79c is when detecting leakage by control part 39 or be judged as and taken place to be provided with when unusual, reception is from the anomaly detection signal of wireless communication unit 37 outputs, when passing through switch block 79e, when output driver part 79h supplies with power from the explosion-proof grid 78a of Zener type, light the emergency warning lamp 79k such as signal lamp that driving is made of red LED etc., and, by pronunciation part 72, warning tones takes place to aerial emission in acoustic resonance device 75 etc. unusually.

This leakage sensor 20b is separated setting with the alarm component 70b that comprises pronunciation part 72, by wireless, in leakage sensor 20b and the interconnective structure of alarm component 70b, preferably the alarm component 70b with this separation is arranged in the upper space of leakage detection system 1b, with the horizontal cross-section of leakage accommodation section 98 in the upper space that the approximate vertical top extends to form, with other leakage containers 98 according to the rules the distance (for example, in the 2m, more preferably in 1.5m, most preferably in 1m) be separated from each other so that the good upper space position of the visuognosis that can discern, use the alarm component 70b of this blast resistance construction, can as safe as a house and positively implement the leakage detection and/or the alarm of volatile liquid and flammable liquid handles, in addition, even do not accept special training, anyone can easily carry out the adjustment operation and the maintenance/supervision operation of system.

Below, action to this structure describes, the high speed leakage of introducing parts 6 and Fig. 8 in the high speed leakage of Fig. 5 attracts among the parts 6b, structure that

parts

6 and 6b are introduced in the high speed leakage is not except using thin paper 8 and having added respectively in the part of optical path the optical communication means that light projector/be subjected to light uses, identical, so its action is also identical substantially.

Specifically, at first, be provided with among the abnormality detection parts 4b in optical profile type, projection light 22z from light source part 14-optical communication means 40c shines the top reflecting material 5j that is arranged on high speed leakage introducing parts 6b with the incident angle less than critical angle, its reflected light 24z is accepted by optical communication means 42c-light receiving component 16c, convert electric signal to, be input to control assembly 30.In addition, based on the reflecting surface of the reflecting material 5j of white or mirror-like etc. can be arranged on jut 12u above, and adhere, weld, be pressed into and be formed on the jut 12u, perhaps also can on jut 12u, establish concavo-convex reflecting surface quarter, form the reflecting surface of projection light 22z.

On the other hand, when the main part 12d of container 12 and jut 12u do not form space part d7 according to the rules at interval, by the bounce that generates by above-mentioned linkage, main part 12d and jut 12u float mutually or tilt and become the abnormality that is provided with of tumbling, can keep main part 12d and jut 12u is pushed on the container 12 in advance for the switching mechanism more than or equal to the state of interval d7, therefore, be provided with under the abnormality, do not form normal the 2nd optical path, projection light spreads to gas blankets such as air, projection light and catoptrical optical path 22z/24z that above-mentioned optical profile type is provided with abnormality detection parts 4b can't be formed on the normal position, it is unusual easily to detect being provided with of container 12, in the control part 39 in being arranged on non-danger zone, by the control assembly 30 that constitutes by MPU etc., abnormality alarm signal (or malfunction code ER-A) will be set output to the outside by cable 26 numerals, leakage sensor 20b becomes the holding state of makeing mistakes.

This moment, and then, by being arranged on the wireless communication unit 37 in the control part 39 in the non-danger zone, anomaly detection signal will be set from abnormality detection parts 4b wireless signal transmission is set, by being arranged on the receiving-member 79c in the alarm component 70b in the danger zone, when receiving this wireless anomaly detection signal, in control part 79b, by switch block 79e, to the supply capability of output driver part 79h supply from the explosion-proof grid 78a of Zener type, emergency warning lamp 79k such as signal lamp are lighted driving, and, by pronunciation part 72, warning tones will take place and be transmitted into the outside in acoustic resonance device 75 etc. unusually.In addition, when using common alarm component 70b according to a plurality of leakage sensor 20b are common, or when being provided with a plurality of alarm component 70b in the nigh space, in order to distinguish these a plurality of alarm component 70b mutually, be preferably in the additional above-mentioned radio detection signal of back outputs such as identiflication number that is used for determining each alarm component from the wireless abnormal signal of communication component 37 emissions.By control part 79b this identiflication number is extracted out automatically, and compared, judge whether to have selected this alarm component 70b with the identiflication number of exporting from set parts 79d.

Like this, when having determined alarm component 70b with identiflication number etc., output driver part 79h by this alarm component 70b, drive pronunciation part 72, vibrate by being transmitted into after acoustic resonance device 75 amplifications it aerial, checked immediately that by the operator that abnormality alarm signal 26 warning is set of otherwise processed the place is provided with where leakage sensor has taken place to be provided with when unusual, can be as in the past, check basal surface one by one, the bottom surface of leakage accommodation section, when promptly arriving in alarm generation scene, leakage source warning after can be easily amplifying according to sympathetic response sends sound, is different from that other leakage sensors are provided with the position and determines that this is provided with the abnormality detection position.

Do not exporting under the common state that normally is provided with of this alarm signal, leakage sensor 20b becomes duty, when not having any leakage, projection light/catoptrical optical path 22z/24z that optical profile type is provided with abnormality detection parts 4b is formed on the normal position, projection light 22z from light source part 14-optical communication means 40c reflects on the reflecting surface 5j of jut 12u, this reflected light 24z is by optical communication means 42c transmission, be input to photo detector 16c, by its output and normal reflecting light level being compared, can easily detect the state that normally is provided with of leakage sensor 20a with detection part 18.

And then, come the self-forming leakage to detect the projection light 22u of the light source part 14-optical communication means 40a that uses optical system, for on fully reflecting surface 12m with more than or equal to the regulation critical angle angle generation total reflection, from the top downwards, to shine the 1st fully reflecting surface 12m with the corresponding regulation incident angle of the refractive index of transparent material or trnaslucent materials 12d, its total reflection light 22v projects the 2nd fully reflecting surface 12n, from the total reflection light 24u of fully reflecting surface 12n with the light angle of the corresponding regulation of refractive index of transparent material or trnaslucent materials 12d, end at optical communication means 42a is accepted, by optical communication means 42a, be transferred to light receiving component 16, the leakage of propagating in this optical path detects light and converts electric signal to by photo-electric conversion element 16, its output is carried out digital processing in the control assembly 30 that is also used as detection part 18, the perhaps direct analogue operational unit that constitutes by analog comparator etc. of input of the simulation of light receiving component 16 output, in the control assembly that is also used as detection part 18 30 that constitutes by mimic channel, carry out simulation process.In addition, when not having leakage, in above-mentioned example, detecting any light receiving component all is normal light income, and the phenomenon that light income reduces does not take place.

Secondly, under 20 ℃ smaller or equal to 6 * 10 ^-2When the leakage 2a of the low surface tension of N/m is diffused into leakage detected object bottom surface 99 with the film stratiform, the leakage 2a of liquid level d1 be diffused into form the high speed leakage and introduce the zone of the relative leakage detected object bottom surface 99 of the bottom surface 12w of cuboid jut 12u of a part of parts 6b in, by at the parallel space part d6 that forms between leakage detected object bottom surface 99 and the container bottoms 12w, when the length setting with the liquid level d1 of the interval of space part d6 and leakage 2a is roughly equal length, or be set at liquid level d1〉at interval during the length of d6, utilize the capillarity of space part d6, leakage 2a is incorporated into parallel space part d6 (2a1 of Fig. 5) rapidly, leakage 2a contacts with bottom surface 12w, and, be diffused at a high speed the integral body of the container bottoms 12w relative with leakage detected object bottom surface 99.

Afterwards, end at bottom surface 12w, when leakage 2a is diffused into the lowest end of an end of the terminal part 12v that forms jut 12u (2a2 of Fig. 5), leakage 2a and then arrive the end of the parallel space part d7 that fully reflecting surface 12m and terminal part 12v by container 12 form, because space part d7 is configured to take place with specified gap d7 the capillarity of leakage 2a, so, even the leakage rate of leakage 2a is very little, also can resist gravity, 99 quilts directly promptly promote and are directed to the top (2a3 of Fig. 5) that leakage detects the regulation leakage detection position of using reflection boundary face 12m from leakage detected object bottom surface.Like this, when leakage 2a detects regulation leakage detection position with reflection boundary face 12m to the top by leakage, total reflection does not take place in the most of light from the projection light 22u of light source part 14 on fully reflecting surface 12m, in bottom 12d and fully reflecting surface 12m, roughly keep straight on, and then, after refraction is kept straight in being full of the leakage 2a of space part d7, in the leakage 2a of cuboid jut 12u that the absorbing material/light transmissive material that is full of by projection light forms and space part d6, roughly keep straight on, on leakage detected object bottom surface 99, reflect, propagate/advance to the direction opposite with fully reflecting surface 12n.Therefore, after on the fully reflecting surface 12m of a part that forms leakage detection usefulness optical path total reflection taking place, light 24u after also total reflection taking place on the fully reflecting surface 12n is accepted at the end of optical communication means 42a, by optical communication means 42a, the light light quantity that is subjected to that is transferred to light receiving component 16 reduces significantly, by control assembly 30 calculation process is carried out in its output, just begun initial period of spreading thinly at a small amount of leakage 2a, just can detect very at high speed to leakage detected object bottom surface 99.

In addition, in that the leakage 2a of low surface tension is disposable when escaping to leakage detected object bottom surface 99 in a large number, the periphery of container 12 all is immersed among the leakage 2a, and, the regulation leakage detection position that leakage detects with reflection boundary face 12n also is immersed among the leakage 2a, so, total reflection takes place in the projection light 22u from light source part 14a on fully reflecting surface 12m, even its total reflection light 22v projects fully reflecting surface 12n, because leakage 2a, total reflection does not take place on fully reflecting surface 12n yet, but directly refraction and roughly craspedodrome in fully reflecting surface 12n, and then, after refraction is kept straight in being full of the leakage 2a of space part d4, on leakage detected object bottom surface 99, reflect, to propagating/advance with the irrelevant fully direction in position that is provided with of optical communication means 42a.Therefore, form leakage detect with the fully reflecting surface 12n of the part of optical path on light 24u after the generation total reflection reduce significantly in the received light quantity of an end of optical communication means 42a, carry out calculation process by 30 pairs of control assemblies by the light output that is subjected to that optical communication means 42a is transferred to light receiving component 16, in the initial period, just can detect a large amount of generations of leakage 2a very at high speed.

Like this, when detecting leakage 2a and/or leakage 2,, the nil that has of leakage is outputed to outside (leakage detects error code ER-B) by cable 26 by the control assembly 30 that is also used as leakage detection part 18.

This moment, and then, by being arranged on the wireless communication unit 37 in the control part 39 in the non-danger zone, detect error signal from the 18/30 emission leakage of leakage detection part, by being arranged on the receiving-member 79c in the alarm component 70b in the danger zone, receive this leakage when makeing mistakes detection signal, in control part 79b, by switch block 79e, to exporting the supply capability of driver part 79h supply from the explosion-proof grid 78a of Zener type, emergency warning lamp 79k such as signal lamp are made mistakes light driving, and, by pronunciation part 72, acoustic resonance device 75 etc. have carried out the unusual generation warning tones that sympathetic response has been amplified to external emission.In addition, when in common when using common alarm component 70b or nigh space, being provided with a plurality of alarm component 70b according to a plurality of leakage sensor 20b, in order to distinguish these a plurality of alarm component 70b mutually, be preferably in the additional above-mentioned radio detection signal of back outputs such as identiflication number that is used for determining alarm component from the wireless abnormal signal of communication component 37 emissions.Control part 79b extracts this identiflication number out automatically, and itself and the identiflication number of exporting from set parts 79d are compared, and judges whether to have selected this alarm component 70b.

Like this, when having determined alarm component 70b with identiflication number etc., output driver part 79h by this alarm component 70b, drive pronunciation part 72, undertaken sympathetic response amplify after be transmitted into aerial by acoustic resonance device 75 its vibration, the operator who is detected the error signal warning by the leakage of otherwise processed is when arriving in leakage generation scene immediately, can be as in the past, check basal surface one by one, the bottom surface of leakage accommodation section, can be by sending the source near the alarm tone that has been amplified by sympathetic response, can be different from easily that other leakage sensors are provided with the position and determine this leakage occurrence positions.

Secondly, in the time of 20 ℃ more than or equal to 6 * 10 ^-2The capillary leakage 2 of N/m (shown in Fig. 6 (D)) is when being diffused into leakage detected object bottom surface 99, in the example of Fig. 8, even the leakage of liquid level d3 2 is diffused into the parallel space part d4 that forms between bottom surface 99 and container bottom 12d, owing to there is not plug-in mounting thin paper 8, so directly the direction to fully reflecting surface 12n spreads in leakage detected object bottom surface 99.Like this, when leakage 2 arrival leakages detect the regulation leakage detection position of using reflection boundary face 12n, total reflection takes place in the projection light 22u from light source part 14-optical communication means 40a on fully reflecting surface 12m, its total reflection light 22v is on fully reflecting surface 12n, total reflection does not take place owing to leakage 2, but refraction and roughly craspedodrome in fully reflecting surface 12n, and then, after refraction is kept straight in leakage 2, on leakage detected object bottom surface 99, reflect, propagate/advance to the direction that the assigned position with an end that is provided with optical communication means 42a has nothing to do fully.Therefore, form leakage detect with the fully reflecting surface 12n of the part of optical path on light 24u after the generation total reflection reduce significantly in the received light quantity of an end of optical communication means 42a, carry out calculation process by 30 pairs of outputs of control assembly by the light receiving component 16 of optical communication means 42a transmission, just begun initial period of spreading thinly in leakage 2, just can detect very at high speed to leakage detected object bottom surface 99.

In addition, when a large amount of leakage 2 of disposable generation, the periphery of container 12 all is immersed in the leakage 2, and, the regulation leakage detection position that leakage detects with reflection boundary face 12n also is immersed in the leakage 2, so, even total reflection takes place in the projection light 22u from light source part 14-optical communication means 40a on fully reflecting surface 12m, its total reflection light 22v projects fully reflecting surface 12n, because leakage 2, on fully reflecting surface 12n, total reflection does not take place yet, but refraction and roughly craspedodrome in fully reflecting surface 12n immediately, and then, after refraction is kept straight in the leakage 2 that is full of space part d4, on leakage detected object bottom surface 99, reflect, propagate/advance to the direction that the position with an end that is provided with optical communication means 42a has nothing to do fully.Therefore, form leakage detect with the fully reflecting surface 12n of the part of optical path on light 24u after the generation total reflection reducing significantly by optical communication means 42a received light quantity in light receiving component 16, by control assembly 30 calculation process is carried out in its output, can detect a large amount of generations of leakage 2 very at high speed in the initial period.

Like this, when detecting

leakage

2a or 2, in order wait to send warning to operator, the nil that has of leakage is outputed to outside (leakage detects error code ER-B) by cable 26 by the control assembly 30 that is also used as leakage detection part 18.In addition, in above-mentioned light receiving area reason,, can improve the sensitivity of light receiving component (element) 16,16c by extensively assembling reflected light with optically focused parts such as camera lens, concave mirrors.

This moment, and then, by being arranged on the wireless communication unit 37 in the control part 39 in the non-danger zone, detect error signal from the wireless leakage of leakage detection part 18/30 emission, by being arranged on the receiving-member 79c in the alarm component 70b in the danger zone, receive this wireless leakage when makeing mistakes detection signal, in control part 79b, by switch block 79e, to the supply capability of output driver part 79h supply from the explosion-proof grid 78a of Zener type, emergency warning lamp 79k such as signal lamp are lighted driving, and, by pronunciation part 72, acoustic resonance device 75 etc. have carried out the unusual generation warning tones that sympathetic response is amplified to external emission.Like this, when having determined alarm component 70b with identiflication number etc., output driver part 79h by this alarm component 70b, drive pronunciation part 72, be transmitted into aerial after its vibration amplified by acoustic resonance device 75, the operator who is detected the error signal warning by the leakage of otherwise processed is checking that immediately leakage sensor which place is provided with has taken place to be provided with when unusual, can be as in the past, check basal surface one by one, the bottom surface of leakage accommodation section, take place when on-the-spot arriving in alarm, can be different from easily that other leakage sensors are provided with the position and determine this leakage occurrence positions.

Therefore, leakage sensor 20b according to as shown in Figure 8 structure, as long as leakage sensor 20b is placed on the leakage detected object bottom surface 99, even without

retainer

4,5 and thin paper 8, also be subjected to the influence of ambient light hardly, and, only flow out to leakage detected object bottom surface 99 on a small quantity and initial period that leakage before arriving above the retainer 4 is flowed out at

leakage

2a or 2, just can promptly detect leakage.In addition, because it is not obstructed fully in the leakage test section by any electric signal, so, even for volatile leakage, also can detect processing as safe as a housely, both made and once flowed out a large amount of leakages, to this leakage carry out 2 heavy, 3 heavily check and detect, can further improve leakage and detect the reliability of handling, and, by the length of change optical communication means 40/42, can be with light source part 14 and

light receiving component

16,16c etc., change to required variable range with the physical distance of reflection boundary face 12m/12n etc.

In addition, main part 12d and jut 12u at container can't keep predetermined distance d6, under the state of d7, the optical path that optical profile type is provided with abnormality detection parts 4b is not formed on assigned position, bounce by the linkage generation, main part 12d floats mutually with jut 12u, tilt, become the abnormality that is provided with of tumbling, by keeping the switching mechanism of main part 12d and jut 12u open mode, the reflex path of projection light is macrobending greatly, so, can easily detect abnormality is set, distinguish the leakage mistake and exception error is set and detect, can transmit simultaneously, reply.

In addition, even the leakage sensor 20b of Fig. 8 also can similarly use thin paper 8 with Fig. 5.

In the above-described embodiment, the leakage of the liquid against corrosion that subtend liquid applying mechanism against corrosion 81a supplies with and liquid against corrosion are illustrated with the detection of the leakage of temperature adjustment liquid, but, in the leakage and the detection of imaging liquid of the imaging liquid of supplying with to the 81b of video picture mechanism, equally also can use the present invention as mentioned above with the leakage of temperature adjustment liquid.In addition, also can be applied to etch processes, cleaning etc.Can also be applied to store the detection of leakage of the case of above-mentioned each treating fluid temporarily.As the reason of above-mentioned leakage, for example can list the breakage of each liquid case, by the leakage of overflowing of causing of the fault of feed system, pipe arrangement portion etc., by overflowing of causing of the fault of the system of discharge etc.

In addition, in the above-described embodiment, the situation that treating apparatus of the present invention is applied to the coating display of semiconductor wafer is illustrated, but, certainly be not limited in this device, also can be applied to other treating apparatus of semiconductor wafer and the treating apparatus of LCD substrate, glass substrate or CD/DVD substrate etc.According to leakage detection system of the present invention, because constitute as mentioned above, so, can be accurately and detect treating fluid and temperature control leakage safely with liquid, can prevent the pollution of the periphery that leakage causes and corrosion etc.In addition, when detecting the leakage generation, according to the warning transmission sound of the audible frequency after the sympathetic response amplification, can understand intuitively spatially where leakage has taken place at the place, therefore, it is easy that maintenance becomes, and can improve the treatment effeciency for the treatment of apparatus.

In addition, even above-mentioned high speed leakage attracts parts only to be arranged on the retainer side, also can adopt optical mode to constitute.In addition, even be not the leakage sensor of blast resistance construction, as shown in Figure 7, also can leakage sensor portion and alarm component be interconnected by wireless communication unit.

Claims

1. leakage detection system, it uses 1 leakage sensor at least, and this leakage sensor has 1 leakage test section at least, and this leakage test section can contact with described leakage by the gas blanket or the leakage pervious course of permeable leakage, it is characterized in that:

2. leakage detection system as claimed in claim 1 is characterized in that: described leakage test section is made of the optical profile type leakage test section that comprises 1 optical profile type reflection boundary face at least; And/or constitute by comprising the optical profile type leakage test section that 1 optical profile type sees through boundary surface at least; And/or constitute by the conduction formula leakage test section that comprises existence according to nonisulated property liquid, electrode pair that inter-electrode impedance changes.

3. leakage detection system as claimed in claim 1 or 2, it is characterized in that: when the alarm tone of the audible frequency that sends from described pronunciation part reaches being provided with of this sensor unusually and carries out alarm unusually the leakage of this sensor, discerning is the mode of which sensor abnormality, carries out alarm with different transmission sounds respectively.

4. leakage detection system as claimed in claim 1 or 2, it is characterized in that: described alarm component constitutes with blast resistance construction, and, provide power supply by the explosion-proof grid of Zener type, described alarm component can be instructed by peripheral operation, carries out the on-off control of described alarm tone, the control that resets and restart.

5. leakage detection system as claimed in claim 3, it is characterized in that: described alarm component constitutes with blast resistance construction, and, provide power supply by the explosion-proof grid of Zener type, described alarm component can be instructed by peripheral operation, carries out the on-off control of described alarm tone, the control that resets and restart.

6. leakage sensor, it forms at least 2 total reflection boundary surfaces that can contact leakage across gas blanket or leakage pervious course, with at least 1 light-projecting portion, light accepting part and the control assembly that combines with them are with respect to described each reflection boundary face, be configured in same side, from described light-projecting portion to described the 1st total reflection boundary surface projection light, to project described the 2nd total reflection boundary surface from the reflected light of described the 1st total reflection boundary surface, at the reflected light of described light accepting part acceptance from described the 2nd total reflection boundary surface, and calculation process is carried out in its output by described control assembly, detect leakage, it is characterized in that:

Described leakage sensor constitutes with blast resistance construction, and,

7. leakage sensor as claimed in claim 6 is characterized in that: be set up in parallel the thin paper of the bleach by the infiltration of leakage at least 1 of described reflection boundary face, and make its tight contact.