CN100511956C - Linear motion stepping ultrasonic motor - Google Patents
Linear motion stepping ultrasonic motor Download PDFInfo
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- CN100511956C CN100511956C CNB2005101229080A CN200510122908A CN100511956C CN 100511956 C CN100511956 C CN 100511956C CN B2005101229080 A CNB2005101229080 A CN B2005101229080A CN 200510122908 A CN200510122908 A CN 200510122908A CN 100511956 C CN100511956 C CN 100511956C
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- 239000000919 ceramic Substances 0.000 claims abstract description 14
- 229920001967 Metal rubber Polymers 0.000 abstract description 2
- 230000001186 cumulative effect Effects 0.000 abstract 1
- 230000005284 excitation Effects 0.000 description 18
- 238000010586 diagram Methods 0.000 description 10
- 238000002604 ultrasonography Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 230000004886 head movement Effects 0.000 description 1
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Abstract
The motor includes stator, mover and stator frame. The stator is composed of metal elastomer with two angular vibrator. Piezoelectric ceramics are pasted on root part of two arms of each angular vibrator. The mover is composed of a bar shaped body with even graduated gullets on its low-end face. The face with gullets of bar shaped mover is pressed on the driving head of the stator. Combined action of longitudinal vibration of two vibrating arms with Pi/2 phase difference in same vibrator makes driving head generate elliptic motion (or circular motion) to drive linear movement of the mover continuously so as to form linear ultrasonic motor. Two vibrating arms in two angular vibrators in same direction are operated alternately to drive stepping movement of the mover so as to form linear stepping ultrasonic motor. Features are: open loop control, simple drive circuit, no cumulative error, corotating / contrarotating stepping movement and continuous linear movement.
Description
One, technical field:
Linear motion stepping ultrasonic motor of the present invention belongs to the ultrasound electric machine field.
Two, background technology:
Ultrasound electric machine is to utilize the inverse piezoelectric effect of piezoelectric ceramic and the new type power output device of ultrasonic vibration.Wherein, linear motion stepping ultrasonic motor belongs to a kind of of ultrasonic step motor.This motor adopts open loop control except that the general characteristic with ultrasound electric machine, no accumulated error can realize forward and reverse stepping or continuous rectilinear motion, and with the dephased sinusoidal signal excitation of frequency, drive circuit is simple by two-way.At present, open loop control step ultrasound electric machine adopts mode rotation or self-correcting mechanism, MODAL TRANSFORMATION OF A type ultrasonic step motor utilizes the granule on the vibrating body to realize the stepping location to the phenomenon of nodel line place motion because tangential component is less and stator and rotor between have sliding friction, moment is less.Self-correcting eurymeric ultrasound electric machine adopts standing wave to drive the self-correcting positioning principle, and each step rotors must run to stator self-correcting zone and just can guarantee out-of-step free or multistep, and the open loop on the meaning is difficult fully realizes.The method of the Driven by Ultrasonic Motors power supply being implemented control realization stepping must add feedback element to eliminate accumulated error, and system is complicated.Linear motion stepping ultrasonic motor output torque and piezoelectric ceramic energy are entered as direct ratio, and the potentiality that improve moment are bigger, accurate positioning, no accumulated error.
Three, summary of the invention:
The objective of the invention is to develop a kind of moment simple in structure, big, efficient height, response speed is fast, range of application is wider linear motion stepping ultrasonic motor.
Linear motion stepping ultrasonic motor of the present invention comprises stator and mover and piezoelectric ceramic.Be characterized in: described stator is formed by having two right angle angled metal elastomers, and the root of two arms of each dihedral oscillator posts piezoelectric ceramic respectively, is used to encourage oscillator arms to produce longitudinal vibration.The bar shape that mover is worn even calibration teeth groove by the lower end is formed; Utilize the spring force of flat spring to be pressed on the stator driving head through the face of bearing with bar shaped mover spline; Excite the longitudinal vibration of stator dihedral oscillator vibration arm by piezoelectric ceramic, utilize the sinusoidal signal of phase difference pi/2 to encourage two shaker arms of same oscillator simultaneously, the synergy of these two shaker arm longitudinal vibrations makes driving head produce circular motion and promotes the continuous rectilinear motion of mover, constitutes linear ultrasonic motor; The alternation of shaker arm in the same way of two dihedral oscillators drives mover straight line step motion, and making does not need position feedback can determine the mover current location, and motor operation step number determined by oscillator conversion work number of times, and oscillator switching time is by measuring; Only need excitation two homophase oscillator arms in addition, make oscillator produce and the vertical diagonal movement of the front oscillator direction of motion, oscillator will produce reciprocal thrust, and alternation drives mover stepping in the other direction.
This ultrasound electric machine can be realized open loop control, no accumulated error, accurate positioning, big, the reliable operation of moment.
Four, description of drawings:
Fig. 1. be the linear motion stepping ultrasonic motor structural representation.
Number in the figure title: 1. stator; 2. piezoelectric ceramic; 3. the dihedral oscillator of stator; 4. mover
Fig. 2. be the view of mover motor when the right-hand motion of diagram.
Wherein: Fig. 2 (a) is an initial condition, Fig. 2 (b) shaker arm 3
3In first cycle of vibration under power supply E=Asin (ω t+ π) excitation, the work oscillator does not contact Fig. 2 (c) shaker arm 3 with mover
3In second cycle of vibration under power supply E=Asin (ω t+ π) excitation, mover is to the state of the right-hand motion of diagram, and Fig. 2 (d) driving head is positioned at mover teeth groove place, the state that mover is motionless, and Fig. 2 (e) replys initial condition, Fig. 2 (f) shaker arm 3 for stator
1In first cycle of vibration under power supply E=Asin (ω t+ π) excitation, the work oscillator does not contact Fig. 2 (g) shaker arm 3 with mover
1In second cycle of vibration under power supply E=Asin (ω t+ π) excitation, mover is to the state of the right-hand motion of diagram, and Fig. 2 (h) driving head is positioned at mover teeth groove place, the state that mover is motionless, and Fig. 2 (i) replys initial condition for stator.
Fig. 3. be the view of mover motor when the motion of diagram left.
Wherein: Fig. 3 (a) is an initial condition, Fig. 3 (b) shaker arm 3
2In first cycle of vibration under power supply E=Asin (ω t+ π) excitation, the work oscillator does not contact Fig. 3 (c) shaker arm 3 with mover
2In second cycle of vibration under power supply E=Asin (ω t+ π) excitation, mover is to the state of the right-hand motion of diagram, and Fig. 3 (d) driving head is positioned at mover teeth groove place, the state that mover is motionless, and Fig. 3 (e) replys initial condition, Fig. 3 (f) shaker arm 3 for stator
4In first cycle of vibration under power supply E=Asin (ω t+ π) excitation, the work oscillator does not contact Fig. 3 (g) shaker arm 3 with mover
4In second cycle of vibration under power supply E=Asin (ω t+ π) excitation, mover is to the state of the right-hand motion of diagram, and Fig. 3 (h) driving head is positioned at mover teeth groove place, the state that mover is motionless, and Fig. 3 (i) replys initial condition for stator.
Five, embodiment:
A kind of linear motion stepping ultrasonic motor as shown in Figure 1.Its characteristics: stator 1 is formed by having two dihedral oscillator metallic elastic bodies 3, and the end card of two arms of each dihedral oscillator has piezoelectric ceramic 2, is used to encourage oscillator arms to produce longitudinal vibration.The bar shape that mover 4 is worn even calibration teeth groove by the lower end is formed; The face of bar shaped mover spline is pressed on the stator driving head; Exciting the longitudinal vibration of stator dihedral oscillator vibration arm, the longitudinal vibration synergy with phase difference of two shaker arms of same oscillator can make driving head produce elliptic motion by piezoelectric ceramic promotes the continuous rectilinear motion of mover, constitutes linear ultrasonic motor; The alternation of shaker arm in the same way of two dihedral oscillators can drive the mover step motion.Reciprocal stepping can be by two other shaker arm alternation realization in the same way of two dihedral oscillators.Power supply adopts the two-way same frequency to have the sinusoidal signal of pi/2 phase difference, is used to excite the elliptic motion or the skew lines motion of stator vibration head, drives continuous rectilinear motion of mover or stepping rectilinear motion.Be enough to guarantee that the next teeth groove of mover forwards the driving head place to switching time during step motion; Step pitch is half of mover adjacent sheaves spacing.This motor adopts open loop control except that the general characteristic with ultrasound electric machine, no accumulated error can realize the stepping of forward and backward.With the dephased sinusoidal signal excitation of frequency, drive circuit is simple by two-way.
Principles of structural design: 1, inspire the single order longitudinal vibration of an arm of stator dihedral oscillator by the inverse piezoelectric effect of piezoelectric ceramic piece, bring out curved the shaking of second order of another arm simultaneously, oscillator driving head and the run-off the straight of mover contact-making surface and with horizontal motion can promote the mover motion.2, with the phase difference be two of pi/2 and encourage two arms of dihedral oscillator respectively with sinusoidal signals frequently, two arms all produce the single order longitudinal vibration, synthesize the elliptical orbit of an inclination at the driving head place, and oval inclination angle is a pi/2, when two arm amplitudes equated, the driving head movement locus was a circle.3, the distance between two dihedral oscillator driving heads needs and mover tooth pitch coordinate design, condition below satisfying: the driving head spacing is 1/2 of a mover tooth pitch divided by the remainder of mover tooth pitch, to guarantee a driving head when the mover teeth groove, another driving head is positioned on the mover flank of tooth.
Be a linear motion stepping ultrasonic motor example below:
Utilize the inverse piezoelectric effect d31 of piezoelectric ceramic piece to inspire the single order longitudinal vibration of stator dihedral oscillator vibration arm.Fig. 1 is the structural representation of this motor, and it mainly is made up of stator module, mover and support.The mover lower surface has the even calibration teeth groove of tooth pitch 2mm, facewidth 1mm, groove depth 1mm, is used for motor stepping location; Stator dihedral oscillator vibration arm roots is pasted 8 to unidirectional polarized piezoelectric potsherd, is used to encourage the longitudinal vibration of stator vibration arm single order; Two oscillator driving heads of stator spacing 27mm, two shaker arms of each dihedral oscillator are orthogonal.
Fig. 2, Fig. 3 are seen in the analysis of straight line step motion.The mover stepping is by two dihedral oscillators of alternative excitation, two shaker arms (3 parallel to each other
1, 3
3Or 3
2, 3
4) realize.
See Fig. 2 to the analysis of the right-hand straight line step motion of diagram.:
Initial condition is seen Fig. 2. (a), stator right side dihedral oscillator driving head left hand edge is positioned on the mover flank of tooth; Provide sinusoidal excitation E=Asin (ω t+ π) to give shaker arm 3
3, excited vibration arm 3
3Single order extensional vibration, induced vibration arm 3 simultaneously
4Curved the shaking of second order, at the upper half of each vibration period, this oscillator do not contact with mover (see Fig. 2. (b)), mover is motionless; At the lower half of each vibration period, oscillator driving head end face left part contact with the mover flank of tooth (Fig. 2. (c)), promote mover and move right; When this driving head left part is positioned at mover teeth groove place (Fig. 2. (d)), mover no longer is driven; At this moment mover is to half mover tooth pitch of right-hand motion, and the motion of the mover first step finishes, the dihedral oscillator driving head end face left part in stator left side be positioned on the mover flank of tooth (see Fig. 2. (e)); Now drive signal is switched to shaker arm 3
1, excited vibration arm 3
1Single order extensional vibration, induced vibration arm 3 simultaneously
2Curved the shaking of second order, at the upper half of each vibration period, this oscillator do not contact with mover (see Fig. 2. (f)), mover is motionless; At the lower half of each vibration period, oscillator driving head end face left part contact with the mover flank of tooth (Fig. 2. (g)), promote mover and move right; When this driving head left part is positioned at mover teeth groove place (Fig. 2. (h)), mover no longer is driven; At this moment mover is again to half mover tooth pitch of right-hand motion, and the motion in second step of mover finishes, the dihedral oscillator driving head end face left part on stator right side be positioned on the mover flank of tooth (see Fig. 2. (i)); So, the alternative excitation shaker arm 3
1, 3
3Can realize electric mover to right-hand straight line step motion of diagram, can determine by experiment switching time.
See Fig. 3 to the analysis of diagram left straight line step motion. (a-i):
With said method in like manner, alternative excitation shaker arm 3
2, 3
4Can realize the straight line step motion of electric mover to the diagram left.
This ultrasonic step motor can be realized minimum step pitch 1mm, and littler step pitch can realize by the tooth pitch that reduces on the mover.
The continuous rectilinear motion of this motor can adopt two kinds of methods to realize:
1) to shaker arm 3
1, 3
3Or 3
2, 3
4Apply the sinusoidal excitation that phase difference is π simultaneously, can realize that mover just or reciprocal continuous rectilinear motion; Also can be with shaker arm 3
1, 3
3Or 3
2, 3
4Piezoelectric ceramic direction is counter pastes by intensifying, like this to shaker arm 3
1, 3
3Or 3
2, 3
4Apply synchronous sinusoidal excitation simultaneously and can realize that mover just or reciprocal continuous rectilinear motion;
2) to shaker arm 3
1, 3
2With 3
3, 3
4Apply the sinusoidal excitation that phase difference is pi/2 or 3 pi/2s simultaneously, can make the oscillator driving head produce the circular motion of positive and negative direction.3
1, 3
3Between phase difference be π, can realize that mover is just or reciprocal continuous rectilinear motion.
Claims (3)
1. linear motion stepping ultrasonic motor, comprise base, stator, mover and piezoelectric ceramic, it is characterized in that two right angle dihedral drive vibrator (3) are arranged on the described stator (1), the end of two arms of each right angle dihedral drive vibrator is pasted with piezoelectric ceramic (2) respectively; Described mover (4) is the bar shaped mover that the lower surface has even calibration teeth groove; The spring force that utilizes flat spring (6) to provide is pressed on the stator driving head through the face of bearing (5) with bar shaped mover spline.
2. linear motion stepping ultrasonic motor according to claim 1 is characterized in that, is that the sinusoidal signal of pi/2 encourages two shaker arms of an oscillator can make the oscillator head produce ellipse simultaneously or circular motion promotes the continuous rectilinear motion of mover with phase difference.
3. linear motion stepping ultrasonic motor according to claim 1 and 2 is characterized in that, the alternation of the in phase vibration arm of two right angle dihedral oscillators promotes the straight line step motion that mover is realized motor, and step pitch equals half of mover adjacent teeth distance.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101229080A CN100511956C (en) | 2005-12-07 | 2005-12-07 | Linear motion stepping ultrasonic motor |
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| CNB2005101229080A CN100511956C (en) | 2005-12-07 | 2005-12-07 | Linear motion stepping ultrasonic motor |
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| CN100511956C true CN100511956C (en) | 2009-07-08 |
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| CNB2005101229080A Expired - Fee Related CN100511956C (en) | 2005-12-07 | 2005-12-07 | Linear motion stepping ultrasonic motor |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102355161A (en) * | 2011-09-22 | 2012-02-15 | 哈尔滨工业大学 | Rotary motor using composite bending vibration biped linear ultrasonic oscillators |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101119079B (en) * | 2007-09-13 | 2010-06-30 | 上海大学 | Triangle bended plate type piezoelectric straight line ultrasound electric motor |
| CN102097974B (en) * | 2011-02-17 | 2011-11-02 | 广东嘉和微特电机股份有限公司 | Travelling-wave linear ultrasonic micromotor |
| CN102403924B (en) * | 2011-07-06 | 2014-12-10 | 南京航空航天大学 | Wear mitigation method of linear ultrasonic motor and linear ultrasonic motor |
| CN103701358B (en) * | 2013-09-26 | 2016-02-17 | 南京航空航天大学 | Balance weight type variable contact force piezoelectric motor |
| CN104467519A (en) * | 2014-12-09 | 2015-03-25 | 苏州科技学院 | Single electric signal excitation ultrasonic elliptic vibration multi-vibrator bidirectional material conveying device |
| CN104444135B (en) * | 2014-12-09 | 2016-09-21 | 苏州科技大学 | A kind of single excitation ultrasonic elliptical vibratory many oscillators bidirectional material conveyer device |
| CN108847782B (en) * | 2018-06-07 | 2019-06-28 | 西安交通大学 | The big stroke piezoelectric straight line actuator and actuation method driven using micro- tooth |
| CN110190775B (en) * | 2019-05-31 | 2021-03-23 | 维沃移动通信（杭州）有限公司 | Terminal equipment |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1066348A (en) * | 1991-04-27 | 1992-11-18 | 广东工学院 | Linear actuator |
| US5610468A (en) * | 1990-10-22 | 1997-03-11 | Seiko Epson Corporation | Ultrasonic step motor |
| CN1299180A (en) * | 2000-12-08 | 2001-06-13 | 南京航空航天大学 | Multi-phase ultrasonic step motor |
-
2005
- 2005-12-07 CN CNB2005101229080A patent/CN100511956C/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5610468A (en) * | 1990-10-22 | 1997-03-11 | Seiko Epson Corporation | Ultrasonic step motor |
| CN1066348A (en) * | 1991-04-27 | 1992-11-18 | 广东工学院 | Linear actuator |
| CN1299180A (en) * | 2000-12-08 | 2001-06-13 | 南京航空航天大学 | Multi-phase ultrasonic step motor |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102355161A (en) * | 2011-09-22 | 2012-02-15 | 哈尔滨工业大学 | Rotary motor using composite bending vibration biped linear ultrasonic oscillators |
| CN102355161B (en) * | 2011-09-22 | 2014-06-04 | 哈尔滨工业大学 | Rotary motor using composite bending vibration biped linear ultrasonic oscillators |
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|---|---|
| CN1777011A (en) | 2006-05-24 |
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Effective date of registration: 20130121 Address after: Liuhe District of Nanjing City, Jiangsu province 211514 Dong Gou Zhen Fu Qian Jie No. 1 Patentee after: Jiangsu Fengke Utrasonic Motors Technology Co., Ltd. Address before: 210061 Xincheng Science Park, Jianye District, Jiangsu, Nanjing 5108 Patentee before: Nanjing Wanma Ultrasonic Motors Co.,Ltd. |
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