CN100491967C - Micro mirror box for scan probe microscope - Google Patents
Micro mirror box for scan probe microscope Download PDFInfo
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- CN100491967C CN100491967C CNB2004100653659A CN200410065365A CN100491967C CN 100491967 C CN100491967 C CN 100491967C CN B2004100653659 A CNB2004100653659 A CN B2004100653659A CN 200410065365 A CN200410065365 A CN 200410065365A CN 100491967 C CN100491967 C CN 100491967C
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- electrostriction
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Abstract
The micro mirror box for scanning probe microscope includes an electrostrictive stepped unit, an electrostrictive scanning tube, a box, a box cover, a sample seat, a probe, a probe rack, a communication interface and a pumping hole, as well as a sample cutting push rod and an auxiliary probe. The probe and the auxiliary probe may be available probe for scanning tunnel microscope, atomic force microscope and/or magnetic microscope. The present invention has the features of simple and reasonable structure, low cost, small size, etc. and is favorable to raising vacuum degree, lowering temperature, raising S/N ratio, raising signal stability, etc. It may be used for vacuum cutting, vacuum probe replacement and scanning with different kinds of probe, in scanning tunnel microscope, atomic force microscope, magnetic microscope and their combination.
Description
Technical field
The present invention relates to a kind of scanning probe microscopy, the micro mirror box for scan probe microscope that particularly a kind of suitable ultralow temperature, ultrahigh vacuum and super low noise use belongs to the microscope field.
Background technology
Invented first scanning probe microscopy since nineteen eighty-two--since-the scanning tunnel microscope (being called for short STM), with its high resolution (atom definition), abundant physical message (sample surfaces cloud density information), and cheap cost have obtained using very widely at once.Soon, atomic force microscope has appearred, magnetic force microscopy or the like again.Device such as electrostriction ledex and electrostriction scanatron that they utilize electrostrictive effect use corresponding probe that sample surfaces is scanned, and to measure dissimilar sample surfaces character, are referred to as scanning probe microscopy.It has developed into a very big microscope family now.The recent research of scanning probe microscopy mainly concentrates on ultralow temperature with using, the development of ultrahigh vacuum scanning probe microscopy and with them sample surfaces being measured under these extreme physical conditions.At this moment, how to reduce temperature to greatest extent, gas clean-up reduces noise and reduces vibrations and disturb and just become current exigence.Scanning probe microscopy vacuum chamber in the past generally designs greatlyyer, and reason is that mechanical arm or some other gearing must be housed in the vacuum chamber, so that cutting prepares sample in a vacuum, obtains fresh surface to be measured.What so, vacuum just was difficult to take out is very high.Bigger vacuum chamber makes that also indoor temperature is difficult to be fallen very lowly.In addition, vibrations are disturbed and all poorly control of other noise.Have that the vacuum chamber volume is big, Heavy Weight, carry inconvenience, weak points such as complex structure, gas leakage easily, production cost height.
Summary of the invention
The objective of the invention is to have weak points such as complex structure, volume are too big, vacuum is difficult to take out very high, temperature are difficult to be fallen very lowly in order to overcome above-mentioned scanning probe microscopy, design a kind of simple and reasonable, production cost is low, volume is little, the micro mirror box for scan probe microscope that is easy to carry, is convenient to pumping high vacuum and/or reduce temperature and reduce noise.
Another object of the present invention is on the basis of above-mentioned micro mirror box, in box, also can finish sample is carried out vacuum cutting, design a kind of simple and reasonable, production cost is low, volume is little, the micro mirror box for scan probe microscope that is easy to carry, is convenient to pumping high vacuum and/or reduce temperature and reduce noise.
A further object of the present invention is on the basis of above-mentioned micro mirror box, can realize multiple scan-probe integrated in micro mirror box, both can the disposable scanning of sample being carried out the number of different types probe, and can be in box carry out vacuum and change probe, design a kind of simple and reasonable, production cost is low, volume is little, the micro mirror box for scan probe microscope that is easy to carry, is convenient to pumping high vacuum and/or reduce temperature and reduce noise.
The object of the invention can be achieved by following measure, this micro mirror box for scan probe microscope, comprise the electrostriction ledex, the electrostriction scanatron, also include box body, lid, specimen holder, probe, probe carriage, communication interface and aspirating hole, described specimen holder is located on the inboard wall of cartridge, communication interface and aspirating hole are located on box body or the lid, the electrostriction ledex is in spring pressure is contained in box body, the rear end of electrostriction scanatron is fixed on the electrostriction ledex, probe carriage is located at the front end of electrostriction scanatron, probe is contained on the probe carriage, and the probe signals line is connected with communication interface with electrostriction ledex control line and electrostriction scanatron control line.
Above-mentioned purpose of the present invention also can be achieved by following measure, this micro mirror box for scan probe microscope, comprise the electrostriction ledex, the electrostriction scanatron, also include box body, lid, specimen holder, probe, probe carriage, communication interface and aspirating hole, described probe carriage is located on the inboard wall of cartridge, probe is contained on the probe carriage, communication interface and aspirating hole are located on box body or the lid, the electrostriction ledex is in spring pressure is contained in box body, the rear end of electrostriction scanatron is fixed on the electrostriction ledex, specimen holder is located at the front end of electrostriction scanatron, and the probe signals line is connected with communication interface with electrostriction ledex control line and electrostriction scanatron control line.
Another object of the present invention can be achieved by following measure, its structure mainly is on the basis of above-mentioned micro mirror box, set up sample and cut off push rod, be located on the inboard wall of cartridge and probe carriage is located at the mirror case of electrostriction scanatron front end for specimen holder, described sample cuts off the front end that push rod is located at the electrostriction ledex.Be located at electrostriction scanatron front end and probe carriage is located at the mirror case on the inboard wall of cartridge for specimen holder, described sample cuts off push rod and is located near the probe carriage the inboard wall of cartridge.
A further object of the present invention can be achieved by following measure, its structure mainly is on the basis of above-mentioned micro mirror box, assist probes after being provided with the position near the probe carriage the probe and leaning on, described probe and assist probes can be selected scanning tunnel microscope probe and/or atomic force microscope probe and/or magnetic microscope probe for use.
Micro mirror box for scan probe microscope of the present invention, because its volume only is subject to probe, the electrostriction ledex, the assembly of minority small sizes such as electrostriction scanatron, so the volume of mirror case can be done very for a short time, can accomplish at present little of cigarette case because volume is little, to improve microscopical vacuum tightness, reduce temperature, all very favourable to improving signal to noise ratio (S/N ratio) and signal stabilization etc.When probe is bumped when disconnected by sample, assist probes after available position leans on replaces and works on, also can in box, carry out the vacuum cutting to sample, and can disposablely finish the scanning of sample being carried out the number of different types probe, have simple and reasonable, production cost is low, volume is little, be easy to carry, be convenient to pumping high vacuum, reduce advantages such as temperature and reduction noise, both be fit to scanning tunnel microscope, atomic force microscope, the scanning probe microscopy of number of different types such as magnetic force microscopy uses separately, and the scanning probe microscopy that also is fit to scanning tunnel microscope and number of different types such as atomic force microscope and magnetic force microscopy is used in combination.
Description of drawings
Accompanying drawing 1 is a kind of structural representation in the embodiment of the invention;
Accompanying drawing 2 is the another kind of structural representations in the embodiment of the invention;
Accompanying drawing 3 is to have additional a kind of structural representation that sample cuts off push rod;
Accompanying drawing 4 is to have additional the another kind of structural representation that sample cuts off push rod;
Among the accompanying drawing 1-4 1 be miniature box body, lid through Mi Quan cover on box body, the 2nd, specimen holder, the 3rd, sample, the 4th, probe, the 5th, probe carriage, the 6th, electrostriction ledex, the 7th, spring leaf, the 8th, electrostriction scanatron, the 9th, communication interface, the 10th, aspirating hole.Among accompanying drawing 3 and Fig. 4 11 is that sample cuts off push rod, the 12nd, prejudge foot piece on the sample.
Accompanying drawing 5 is the structural representations that are provided with scanning-tunnelling probe and assist probes and probe carriage thereof;
Accompanying drawing 6 is the structural representations that are provided with atomic force probe and assist probes and probe carriage thereof;
Accompanying drawing 7 is the structural representations that are provided with magnetic force probe and assist probes and probe carriage thereof;
Embodiment
Referring to accompanying drawing 1, specimen holder 2 among the figure is located on box body 1 inwall, communication interface 9 and aspirating hole 10 are located on the box body 1, electrostriction ledex 6 is in spring leaf 7 is fitted in box body 1, the rear end of electrostriction scanatron 8 is fixed on the electrostriction ledex 6, probe carriage 5 is located at the front end of electrostriction scanatron 8, and probe 4 is contained on the probe carriage 5, and probe 4 signal wires are connected with communication interface 9 with electrostriction ledex 6 control lines and electrostriction scanatron 8 control lines.During use, testing sample 3 is contained on the specimen holder 2 in the box body 1, used probe 4 is contained on the probe carriage 5, build the sealing lid.Aspirating hole 10 is connected with vacuum pump, and the probe signals line of communication interface 9 is connected with microscope, and the electrostriction ledex control line of communication interface 9 and electrostriction scanatron control line are connected with box scan control circuit outward respectively.Specimen holder 2 in the above-mentioned mirror case also can be exchanged mutually with the installation site of probe carriage 5, its structure as shown in Figure 2, the probe carriage 5 of this moment changes and is located on box body 1 inwall, specimen holder 2 changes the front end that is located at electrostriction scanatron 8 and gets final product.Before the use, earlier sample 3 is contained on the specimen holder 2, used probe 4 is contained on the probe carriage 5, build gland bonnet and get final product.During use, mirror case can place liquid helium vessel or with the adiabatic demagnetization refrigeration or with methods such as (He3+He4) dilution refrigerations, sample be detected in ultrahigh vacuum and/or low temperature, ultralow temperature and super low noise environment.During work, make probe move towards sample or make sample move towards probe and realize that the distance between probe and the sample is the coarse adjustment of Z direction with electrostriction ledex 6, with electrostriction scanatron 8 is the fine tuning of Z direction again to the distance between probe and the sample, then can with electrostriction scanatron 8 line by line traveling probe or sample make probe carry out the scanning of X and Y direction to sample surfaces, realize sample is scanned detection.
For needs in a vacuum cutting sample can on sample, increase and prejudge foot piece 12 when obtaining fresh sample surfaces, and the corresponding sample that has additional cuts off push rod 11.Be located on the inboard wall of cartridge and probe carriage is located at the mirror case of the front end of electrostriction scanatron for specimen holder, described sample cuts off the front end that push rod 11 is located at the electrostriction ledex, and its structure as shown in Figure 3.During work, electrostriction ledex 6 makes probe move towards in the process of sample to cut off push rod 11 with sample will to prejudge foot piece 12 and push away, and finish the cutting to sample, and make sample 3 expose fresh surface to be measured in vacuum environment.Be located at the front end of electrostriction scanatron and probe carriage is located at the mirror case on the inboard wall of cartridge for specimen holder, described sample cuts off push rod 11 and is located near the probe carriage the inboard wall of cartridge, and its structure as shown in Figure 4.During work, electrostriction ledex 6 drives electrostriction scanatrons 8 and makes sample move towards also to make in the process of probe to prejudge foot piece 12 to cut off push rods 11 and cut off push rod 11 by sample near samples to push away, finish cutting, make sample 3 in vacuum environment, expose fresh surface to be measured sample.Replaced the labyrinth that sample cut with the relevant mechanical driving device of mechanical arm or other.
Because probe is very tiny, might damage in use, can near the probe on the probe carriage 54, be provided with assist probes 13 (its probe type is identical with probe 4), its structure is shown in Fig. 5-7.During use, broken as probe 4, assist probes 13 after the position can being leaned on is readjusted through electrostriction ledex and electrostriction scanatron and is put in place, be located at electrostriction scanatron front end and probe carriage is located at the mirror case on the inboard wall of cartridge for specimen holder, broken as probe 4, can the sample on the specimen holder be readjusted through electrostriction ledex and electrostriction scanatron and put in place, with external circuit the signal wire of assist probes is connected with scanning probe microscopy again and get final product.Replaced the labyrinth probe changed with the relevant mechanical driving device of mechanical arm or other.Described probe and assist probes can be selected scanning tunnel microscope probe (as shown in Figure 5) or atomic force microscope probe (as shown in Figure 6) or magnetic microscope probe (as shown in Figure 7) for use.
When carrying out multiple probe scanning to sample is disposable as need, can on sample, initiatively push up the probe of been scanned disconnected, another other type probes after again the position being leaned on is readjusted through electrostriction ledex and electrostriction scanatron and is put in place, be located at electrostriction scanatron front end and probe carriage is located at the mirror case on the inboard wall of cartridge for specimen holder, can initiatively push up disconnected with sample the probe of been scanned, through electrostriction ledex and electrostriction scanatron the sample on the specimen holder is readjusted again and put in place, at this moment, only need the signal wire of this probe to be connected with microscope and can finish the disposable scanning of carrying out the number of different types probe of sample with external circuit.Described probe can be selected scanning tunnel microscope probe and/or atomic force microscope probe and/or magnetic microscope probe (as shown in Figure 8) for use.
Claims (6)
1, a kind of micro mirror box for scan probe microscope, comprise the electrostriction ledex, the electrostriction scanatron, it is characterized in that also including box body, lid, specimen holder, probe, probe carriage, communication interface and aspirating hole, described specimen holder is located on the inboard wall of cartridge, communication interface and aspirating hole are located on box body or the lid, the electrostriction ledex is in spring pressure is contained in box body, the rear end of electrostriction scanatron is fixed on the electrostriction ledex, probe carriage is located at the front end of electrostriction scanatron, probe is contained on the probe carriage, and the probe signals line is connected with communication interface with electrostriction ledex control line and electrostriction scanatron control line.
2, micro mirror box for scan probe microscope as claimed in claim 1, it is characterized in that also including sample and cut off push rod, described sample cuts off the front end that push rod is located at the electrostriction ledex, and described sample to cut off the position of prejudging foot piece of presetting on push rod and the sample of waiting to be contained on the specimen holder corresponding.
3, micro mirror box for scan probe microscope as claimed in claim 1 or 2, it is characterized in that the assist probes after being provided with the position near the probe carriage the probe and leaning on, described probe and assist probes can be selected scanning tunnel microscope probe and/or atomic force microscope probe and/or magnetic microscope probe for use.
4, a kind of micro mirror box for scan probe microscope, comprise the electrostriction ledex, the electrostriction scanatron, it is characterized in that also including box body, lid, specimen holder, probe, probe carriage, communication interface and aspirating hole, described probe carriage is located on the inboard wall of cartridge, probe is contained on the probe carriage, communication interface and aspirating hole are located on box body or the lid, the electrostriction ledex is in spring pressure is contained in box body, the rear end of electrostriction scanatron is fixed on the electrostriction ledex, specimen holder is located at the front end of electrostriction scanatron, and the probe signals line is connected with communication interface with electrostriction ledex control line and electrostriction scanatron control line.
5, micro mirror box for scan probe microscope as claimed in claim 4, it is characterized in that also including sample and cut off push rod, described sample cuts off push rod and is located near the probe carriage the inboard wall of cartridge, and described sample to cut off the position of prejudging foot piece of presetting on push rod and the sample of waiting to be contained on the specimen holder corresponding.
6, as claim 4 or 5 described micro mirror box for scan probe microscope, it is characterized in that the assist probes after being provided with the position near the probe carriage the probe and leaning on, described probe and assist probes can be selected scanning tunnel microscope probe and/or atomic force microscope probe and/or magnetic microscope probe for use.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100653659A CN100491967C (en) | 2004-11-29 | 2004-11-29 | Micro mirror box for scan probe microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100653659A CN100491967C (en) | 2004-11-29 | 2004-11-29 | Micro mirror box for scan probe microscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1782692A CN1782692A (en) | 2006-06-07 |
| CN100491967C true CN100491967C (en) | 2009-05-27 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2004100653659A Expired - Fee Related CN100491967C (en) | 2004-11-29 | 2004-11-29 | Micro mirror box for scan probe microscope |
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| CN (1) | CN100491967C (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101202125B (en) * | 2007-08-14 | 2010-07-14 | 中国科学院物理研究所 | Active mode noise-relieving method and device for scanning tunnel microscope |
| CN101521197B (en) * | 2009-04-07 | 2010-12-08 | 中国科学技术大学 | Stepper for juxtaposedly pushing three or four piezoelectrics and scanning probe microscope body thereof |
| CN104181335A (en) * | 2013-05-24 | 2014-12-03 | 中国科学院物理研究所 | Scanning tunneling microscope scanning probe head |
| CN103592818B (en) * | 2013-11-21 | 2016-08-17 | 中国科学院半导体研究所 | The location nano impression system of graph substrate prepared by the probe utilizing AFM |
| CN103969104B (en) * | 2014-05-21 | 2017-02-22 | 上海华力微电子有限公司 | Vibration reduction device and method for focusing ion beam machine probe |
| CN105891549A (en) * | 2016-04-08 | 2016-08-24 | 西南交通大学 | Atomic force microscope-based multifunctional combined probe system |
| GB2550897B (en) * | 2016-05-27 | 2020-12-23 | Oxford Instruments Nanotechnology Tools Ltd | Cryogenic cooling system |
| CN109580693B (en) * | 2018-11-27 | 2022-07-08 | 中国科学院上海技术物理研究所 | Infrared microscopic imaging system |
-
2004
- 2004-11-29 CN CNB2004100653659A patent/CN100491967C/en not_active Expired - Fee Related
Non-Patent Citations (2)
| Title |
|---|
| 扫描探针显微镜. 白春礼等.现代科学仪器，第4期. 1994 |
| 扫描探针显微镜. 白春礼等.现代科学仪器，第4期. 1994 * |
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| Publication number | Publication date |
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| CN1782692A (en) | 2006-06-07 |
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Granted publication date: 20090527 Termination date: 20111129 |