CN100490989C - Nozzle device and nozzle cleaning device thereof - Google Patents
Nozzle device and nozzle cleaning device thereof Download PDFInfo
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- CN100490989C CN100490989C CNB2007101628978A CN200710162897A CN100490989C CN 100490989 C CN100490989 C CN 100490989C CN B2007101628978 A CNB2007101628978 A CN B2007101628978A CN 200710162897 A CN200710162897 A CN 200710162897A CN 100490989 C CN100490989 C CN 100490989C
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- nozzle
- cleaning device
- pedestal
- elastic
- bogey
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Abstract
The present invention discloses a nozzle cleaning device to clean a ridge nozzle. The nozzle cleaning device comprises a pedestal and a cleaning device. The pedestal is arranged in the way that the pedestal can move along the ridge line direction, which is parallel to a ridge line of the ridge nozzle. The cleaning device comprises a bearing device, a cleaning part, and a first elastic device. The bearing device is arranged in the way that the bearing device can be displaced transversely relative to the pedestal. The cleaning part is arranged at one side of the bearing device opposite to the pedestal in the way that the cleaning part can contact with the ridge nozzle surface. The cleaning part is provided with the upward-jacking displacement relative to the pedestal. The first elastic device is arranged between the bearing device and the pedestal by being opposite to the bearing device and in the way that the elastic device is capable of providing the elasticity along the transverse displacement direction. The transverse displacement direction is vertical to the upward-jacking direction, and an angle is formed between the transverse displacement direction and the ridge line direction. The present invention also discloses a nozzle device comprising the nozzle cleaning device.
Description
Technical field
The present invention relates to a kind of nozzle cleaning device, relate in particular to the nozzle cleaning device of the ridge nozzle that a kind of LCD circuit array photoresist coating process uses and comprise its spray nozzle device.
Background technology
(Liquid Crystal Display LCD) is widely used on the various electronic products such as computer, TV and mobile phone LCD.The gate array of LCD (array) is one of LCD important composition element.The production yield of the gate array of LCD directly influences the usefulness and the manufacturing cost of LCD.
One of common photoresist coating method in the middle of the process of the gate array of making LCD comprises with the ridge nozzle photoresist is sprayed, and coats on the substrate.Owing in the ejection process, have the surface that the part photoresist residues in the ridge nozzle, can drippage after residual photoresist is accumulate to a certain degree and form jelly (Gel) on the substrate, make that producing yield descends.Therefore, can use the surface of nozzle cleaning device cleaning ridge nozzle, accumulate and low formation jelly in the surface of ridge nozzle to avoid photoresist.
Prior art as shown in Figures 1 and 2, when 10 pairs of ridge nozzles 90 of nozzle cleaning device of use prior art cleaned, the top was to contacting with ridged nozzle 90 surfaces on the cleaning device 51.When bogey 53 along with pedestal 30 when crestal line direction 200 moves, the cleaning device 51 on the bogey 53 also moves thereupon.Because cleaning device 51 contacts with ridged nozzle 90 surfaces, therefore, cleaning device 51 can strike off the photoresist on ridged nozzle 90 surfaces when moving, to reach the purpose of cleaning ridge nozzle 90.Yet cleaning device 51 can produce the friction vibrations with 90 mantle frictions of ridged nozzle in the process that move on ridged nozzle 90 surfaces.Therefore, the bogey 53 of carrying cleaning device 51 can produce the vibrations skew of sideslip direction 400 with respect to pedestal 30, makes cleaning device 51 incomplete with contacting of ridged nozzle 90 surfaces, causes cleaning effect to descend.The design of the above nozzle cleaning device has improved space.
Summary of the invention
Technical problem to be solved by this invention is to provide a kind of nozzle cleaning device, for being used with a ridged nozzle, can promote the cleannes of ridge nozzle.
Another object of the present invention is to provide a kind of nozzle cleaning device,, can improve the production yield for being used with a ridged nozzle.
Another purpose of the present invention is to provide a kind of spray nozzle device, comprises the said nozzle cleaning device.
For achieving the above object, the invention provides a kind of nozzle cleaning device, comprise pedestal and cleaning device.Pedestal is being provided with along the mode that the crestal line direction moves.Wherein, the crestal line direction is parallel to the crestal line of ridged nozzle.Cleaning device comprises bogey, cleaning device and first elastic device.Bogey has the mode of sideslip direction displacement to be provided with pedestal relatively.
Cleaning device is arranged at the in addition side of bogey with respect to pedestal in the mode that can contact with the ridged nozzle surface.Wherein, cleaning device relatively pedestal the displacement of last top direction is arranged.Cleaning device is preferably use silica gel, also can use rubber.First elastic device is arranged between bogey and the pedestal can provide along the relative bogey of mode of the elastic force of sideslip direction.First elastic device is preferably spring, also can use elastic caoutchouc, elastic sheet material etc. can produce the object of deformation when stressed.
Sideslip direction is perpendicular to last top direction.Sideslip direction and crestal line direction are pressed from both sides an angle.The angle of angle is 45 °～135 °, and is preferably 90 °.
And for achieving the above object, the present invention also provides a kind of spray nozzle device, comprises: a ridged nozzle; One nozzle cleaning device comprises: a pedestal, and being provided with along the mode that a crestal line direction moves, this crestal line direction is parallel to the crestal line of this ridged nozzle; And a cleaning device, comprise: a bogey has the mode of a sideslip direction displacement to be provided with this pedestal relatively; One cleaning device is arranged at the in addition side of this bogey with respect to this pedestal in the mode that can contact with this ridged nozzle surface, and this cleaning device this pedestal relatively has the displacement of top direction on; And one first elastic device, with can provide along the mode of the elastic force of this sideslip direction relatively this bogey be arranged between this bogey and this pedestal; This sideslip direction is perpendicular to top direction on this, and this sideslip direction and this crestal line direction are pressed from both sides an angle.
Adopt nozzle cleaning device of the present invention to be used, can promote the cleannes of ridge nozzle, and improve and produce yield with a ridged nozzle.
Describe the present invention below in conjunction with the drawings and specific embodiments, but not as a limitation of the invention.
Description of drawings
Fig. 1 is the prior art schematic perspective view;
Fig. 2 is the prior art front elevational schematic;
Fig. 3 is an embodiment of the invention schematic perspective view;
Fig. 4 a is an embodiment of the invention front elevational schematic;
Fig. 4 b comprises damping unit embodiment front elevational schematic for the present invention;
Fig. 5 a is a preferred embodiment schematic diagram of the present invention;
Fig. 5 b is another embodiment of the present invention schematic diagram;
Wherein, Reference numeral:
10: nozzle cleaning device 100: nozzle cleaning device
200: crestal line direction 30: pedestal
300: pedestal 400: sideslip direction
50: cleaning device 500: cleaning device
51: cleaning device 510: cleaning device
53: bogey 530: bogey
600: go up 710: the first elastic devices of top direction
750: damping unit 90: the ridge nozzle
900: ridge nozzle 91: crestal line
910: crestal line θ: rotation direction
γ: angle
The specific embodiment
The invention provides a kind of spray nozzle device and nozzle cleaning device thereof.With preferred embodiment, this spray nozzle device and nozzle cleaning device refer to be used for making the employed ridge nozzle of photoresist coating process and the nozzle cleaning device thereof of LCD circuit array.Yet in different embodiment, this nozzle cleaning device is also in order to cleaning employed ridge nozzle in the different process of making different electron product circuit arrays.
Embodiment shown in Fig. 3 and Fig. 4 a, nozzle cleaning device 100 is used with ridged nozzle 900.Nozzle cleaning device 100 comprises pedestal 300 and cleaning device 500.Ridge nozzle 900 has crestal line 910, and pedestal 300 is being provided with along the mode that crestal line direction 200 moves.Wherein, crestal line direction 200 is parallel to the crestal line 910 of ridged nozzle 900.In preferred embodiment, pedestal 300 can be connected with guide rail 310 by connector 330, and is driven and moved along guide rail 310 by a drive unit.Guide rail 310 is provided with in the mode that is parallel to crestal line 910.
Embodiment shown in Fig. 3 and Fig. 4 a, cleaning device 500 comprise bogey 530, cleaning device 510 and first elastic device 710.Bogey 530 has the mode of sideslip direction 400 displacements to be provided with pedestal 300 relatively.In preferred embodiment, bogey 530 is for hollow and have the rectangular object of opening, and is sheathed on the pedestal 300.Bogey 530 cleaning devices 510 are arranged at the in addition side of bogey 530 with respect to pedestal 300 in the mode that can contact with ridged nozzle 900 surfaces.Wherein, cleaning device 510 relatively pedestal 300 produce reciprocal displacement in last top direction 600.First elastic device 710 is can providing along the elastic force of sideslip direction 400, and bogey 530 is arranged between bogey 530 and the pedestal 300 relatively.In preferred embodiment, cleaning device 510 is a silica gel.Yet in different embodiment, cleaning device 510 also can be rubber-like materials such as rubber, sponge.
In the different embodiment shown in Fig. 4 b, can between bogey 530 and pedestal 300, damping unit 750 be set by further relative bogey 530, produce the shift reciprocately of relative pedestal 300 because of the elastic force that first elastic device 710 provides at sideslip direction 400 in order to extenuate bogey 530.
Embodiment shown in Fig. 3 and Fig. 4 a, sideslip direction 400 are perpendicular to last top direction 600, and sideslip direction 400 presss from both sides an angle γ with crestal line direction 200.The angle of angle γ is 45 °～135 °, and is preferably 90 °.When using 100 pairs of ridge nozzles 900 of nozzle cleaning device to clean, cleaning device 510 contacts with ridged nozzle 900 surfaces.When bogey 530 along with pedestal 300 when crestal line direction 200 moves, the cleaning device 510 on the bogey 530 also moves thereupon.Because cleaning device 510 contacts with ridged nozzle 900 surfaces, therefore, cleaning device 510 can comprise ridged nozzle 900 surfaces photoresist and strike off at interior ejection residue when moving, to reach the purpose of cleaning ridge nozzle 900.
In preferred embodiment, first elastic device 710 is a spring.Yet in different embodiment, first elastic device 710 also can use other can produce the object of deformation when stressed, comprises elastic caoutchouc and elastic sheet material etc.The deformation of this place speech comprises the deformation of modes such as compression, stretching and bending.
The quantity of first elastic device 710 and the position is set can be on demand and different.In embodiment as shown in Figure 3, first elastic device 710 is provided with one group respectively with respect to pedestal 300 between bogey 530 and pedestal 300 with sideslip direction 400.In the preferred embodiment shown in Fig. 5 a, first elastic device 710 is provided with two groups respectively with respect to pedestal 300 between bogey 530 and pedestal 300 with sideslip direction 400.In the different embodiment shown in Fig. 5 b, first elastic device 710 is provided with one group with respect to pedestal 300 between bogey 530 and pedestal 300 with crestal line direction 200.
Certainly; the present invention also can have other various embodiments; under the situation that does not deviate from spirit of the present invention and essence thereof; those of ordinary skill in the art work as can make various corresponding changes and distortion according to the present invention, but these corresponding changes and distortion all should belong to the protection domain of the appended claim of the present invention.
Claims (14)
1, a kind of nozzle cleaning device for being used with a ridged nozzle, is characterized in that, comprises:
One pedestal, being provided with along the mode that a crestal line direction moves, wherein this crestal line direction is parallel to the crestal line of this ridged nozzle; And
One cleaning device comprises:
One bogey has the mode of a sideslip direction displacement to be provided with this pedestal relatively;
One cleaning device is arranged at the in addition side of this bogey with respect to this pedestal in the mode that can contact with this ridged nozzle surface, wherein this cleaning device relatively this pedestal the displacement of top direction on is arranged; And
One first elastic device, with can provide along the mode of the elastic force of this sideslip direction relatively this bogey be arranged between this bogey and this pedestal;
Wherein, this sideslip direction is perpendicular to top direction on this, and this sideslip direction and this crestal line direction are pressed from both sides an angle.
2, nozzle cleaning device according to claim 1 is characterized in that, this cleaning device comprises a silica gel.
3, nozzle cleaning device according to claim 1 is characterized in that, this cleaning device comprises a rubber.
4, nozzle cleaning device according to claim 1 is characterized in that, this first elastic device comprises a spring.
5, nozzle cleaning device according to claim 1 is characterized in that, this first elastic device comprises an elastic caoutchouc.
6, nozzle cleaning device according to claim 1 is characterized in that, this first elastic device comprises an elastic sheet material.
7, nozzle cleaning device according to claim 1 is characterized in that, the angle of this angle is 45 °～135 °.
8, a kind of spray nozzle device is characterized in that, comprises:
One ridged nozzle;
One nozzle cleaning device comprises:
One pedestal, being provided with along the mode that a crestal line direction moves, this crestal line direction is parallel to the crestal line of this ridged nozzle; And
One cleaning device comprises:
One bogey has the mode of a sideslip direction displacement to be provided with this pedestal relatively;
One cleaning device is arranged at the in addition side of this bogey with respect to this pedestal in the mode that can contact with this ridged nozzle surface, and this cleaning device this pedestal relatively has the displacement of top direction on; And
One first elastic device, with can provide along the mode of the elastic force of this sideslip direction relatively this bogey be arranged between this bogey and this pedestal;
This sideslip direction is perpendicular to top direction on this, and this sideslip direction and this crestal line direction are pressed from both sides an angle.
9, spray nozzle device according to claim 8 is characterized in that, this cleaning device comprises a silica gel.
10, spray nozzle device according to claim 8 is characterized in that, this cleaning device comprises a rubber.
11, spray nozzle device according to claim 8 is characterized in that, this first elastic device comprises a spring.
12, spray nozzle device according to claim 8 is characterized in that, this first elastic device comprises an elastic caoutchouc.
13, spray nozzle device according to claim 8 is characterized in that, this first elastic device comprises an elastic sheet material.
14, spray nozzle device according to claim 8 is characterized in that, the angle of this angle is 45 °～135 °.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007101628978A CN100490989C (en) | 2007-10-22 | 2007-10-22 | Nozzle device and nozzle cleaning device thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007101628978A CN100490989C (en) | 2007-10-22 | 2007-10-22 | Nozzle device and nozzle cleaning device thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101138757A CN101138757A (en) | 2008-03-12 |
| CN100490989C true CN100490989C (en) | 2009-05-27 |
Family
ID=39190957
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2007101628978A Expired - Fee Related CN100490989C (en) | 2007-10-22 | 2007-10-22 | Nozzle device and nozzle cleaning device thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100490989C (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101271277B (en) * | 2008-05-06 | 2010-12-22 | 友达光电股份有限公司 | Nozzle cleaning device |
| CN101592867B (en) * | 2009-06-18 | 2011-10-26 | 友达光电股份有限公司 | Coating machine platform and method for cleaning nozzle of coating machine platform |
| CN102688833B (en) * | 2012-06-05 | 2014-10-08 | 友达光电(厦门)有限公司 | Glue coating equipment for base plate |
| CN104128285B (en) * | 2014-07-16 | 2016-08-24 | 深圳市华星光电技术有限公司 | A kind of nozzle cleaning device and clean method thereof |
| US9737914B2 (en) | 2014-07-16 | 2017-08-22 | Shenzhen China Star Optoelectronics Technology Co., Ltd. | Nozzle cleaning device and method of using the same |
| CN105700294B (en) * | 2016-01-14 | 2020-02-18 | 武汉华星光电技术有限公司 | Nozzle cleaning jig of spreading machine and cleaning block thereof |
-
2007
- 2007-10-22 CN CNB2007101628978A patent/CN100490989C/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN101138757A (en) | 2008-03-12 |
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