CN100468731C - Semiconductor stacked capacitor - Google Patents
Semiconductor stacked capacitor Download PDFInfo
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- CN100468731C CN100468731C CNB2006100246666A CN200610024666A CN100468731C CN 100468731 C CN100468731 C CN 100468731C CN B2006100246666 A CNB2006100246666 A CN B2006100246666A CN 200610024666 A CN200610024666 A CN 200610024666A CN 100468731 C CN100468731 C CN 100468731C
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Abstract
The invention discloses a semiconductor laminated capacitor which is characterized in: forming at least one metallic layer on the semiconductor device; filling a dielectric layer between the metallic layers; arranging at least one metallic interconnection hole between the metallic layers. The provided semiconductor laminated capacitor, comparing with MIM capacitor, reduces one masking procedure thereby great reducing production cost.
Description
Technical field
The present invention relates to the semiconductor test technical field, particularly a kind of in the process of semiconductor test distributed capacitance characteristic in order to substitute the semiconductor alloy stacked capacitor of MIM (metal-insulator-metal type) capacitor.
Background technology
Along with the manufacturing develop rapidly of semiconductor device, semiconductor device has had the deep-submicron structure, comprises the semiconductor element of enormous quantity among the semiconductor integrated circuit IC.In this large scale integrated circuit, the high-performance between the element, highdensity connection not only interconnect in single interconnection layer, and will interconnect between multilayer.Therefore, the multilayer interconnection layer is provided usually, wherein a plurality of interconnecting metal layers pile up mutually, and interlayer dielectric places therebetween, in interlayer dielectric, form interconnected groove and connecting hole then, and with electric conducting material for example copper (Cu), tungsten (W) fill described interconnected groove and connecting hole, to form the interconnecting metal lead of interconnection multiple layer metal layer.Each metal level and the interlayer dielectric of multilayer interconnect structure have also constituted many electric capacity, promptly be included between the metal lead wire that forms when forming multilayer interconnect structure in these electric capacity, the stray capacitance between metal level and the interlayer dielectric, also comprise the electric capacity that forms between interconnecting metal and the insulating barrier.Because the conductor of interconnection layer is a metal structure, therefore the electric capacity that is formed between the interconnection layer is MIM structure, and the capacitor that will have this structure is called metal-insulator-metal type (MIM) capacitor.MIM capacitor for example is used for store charge and matching capacitance in the devices such as analog digital conversion (ADC) or digital-to-analogue conversion (DAC) circuit, radio frequency (RF) circuit, analog circuit, high-power microprocessor (MPU) and DRAM cell in mixed signal devices and logical device.
MIM electric capacity has the dielectric between metallic plate and the metallic plate, and the formation of these metallic plates typically uses the metallic conductor of interconnection layer.In the method that is used for making the semiconductor device with MIM capacitor, application number is the formation method that 200410100720.1 Chinese patent application has been introduced a kind of MIM capacitor.Fig. 1 is the profile of the manufacture method of MIM capacitor in the explanation semiconductor device.As shown in Figure 1, on insulating barrier 10, form about 6000
Metal level.Metal level is patterned by mask lithography, with following metal wire 15 and the bottom electrode 20 that forms the MINI capacitor at grade.Apply dielectric film 40 thereon.Depositing metal is to surpassing 1500 on dielectric film 40
Thickness and composition, on dielectric film 40, to form top electrode 50.On dielectric film 40 and top electrode 50, form inter-metal dielectric (inter-metal-dielectric, IMD) layer 60.In IMD layer 60, form first through hole 70 be connected to metal wire 15 down, be connected to second through hole 72 of bottom electrode 20 and the third through-hole 74 that is connected to top electrode 50.Depositing metal is to about 3000 on IMD layer 60
Thickness.Metal is patterned, forms the last metal wire 80,82 and 84 be connected respectively to first, second and third through- hole 70,72 and 74 thus.
In the stage whether performance that detects semiconductor device meets design requirement, need test the frequency response consistency of device, this test will realize by form MIM capacitor in semiconductor device.From the manufacture process of above-mentioned MIM capacitor as can be known, dielectric step comprises plasma etching on the formation MIM capacitor, because composition top electrode 50 on dielectric film 40, first and second through holes 70 and 72 the degree of depth are different from the degree of depth of third through-hole 74, therefore the etching technics that need have suitable high selectivity.If form first and second through holes 70 and 72 and third through-hole 74 dividually, need another mask so, make etching technics complicated thus, as seen, at least need twice masking process in the manufacture process of MIM capacitor, its manufacturing cost is higher relatively.
Summary of the invention
Therefore, the object of the present invention is to provide a kind of capacitor that is used for the semiconductor test frequency invariance and is easy to make, replace MIM capacitor, carry out device detection cost problem of higher to make MIM capacitor in the solution prior art.
For achieving the above object, semiconductor stacked capacitor provided by the invention comprises:
The metal level of one deck at least that on semiconductor device, forms;
Be filled in the dielectric layer between the described metal level;
Has at least one metal interconnected hole between the described metal level.
Described metal level comprises at least one metal electrode board.
Described metal electrode board is a pectinate texture.
Described metal electrode board is a snake shape structure.
Described metal level is the combining structure of comb electrode plate and snake shape battery lead plate.
Described metal level is the combining structure of two or more comb electrode plates.
Described dielectric layer comprises silica or silicon nitride at least.
Described dielectric layer is filled in the slit of battery lead plate.
Another kind of semiconductor stacked capacitor provided by the invention comprises:
At least one battery lead plate that on semiconductor device, forms;
Be filled in the dielectric layer between the described battery lead plate; And
At least one the metal interconnected hole that connects described battery lead plate.
Described battery lead plate is a pectinate texture.
Described battery lead plate is a snake shape structure.
Described battery lead plate is the combining structure of comb electrode and/or snake shape electrode.
Described dielectric layer comprises silica or silicon nitride at least.
Described dielectric layer is filled in the slit of battery lead plate.
Compared with prior art, the present invention has the following advantages:
The battery lead plate of semiconductor stacked capacitor of the present invention is arranged in the tested semiconductor device in the mode parallel with device surface, has dielectric between the battery lead plate, and multi-layer electrode plate becomes the laminated capacitance structure with set of dielectrics.Two-layer battery lead plate and between dielectric form one group of electric capacity, each battery lead plate has an electrode leads to client.The electric capacity of Xing Chenging has saved and has made the step that through hole forms the metal electrode lead-in wire like this, and this step needs to carry out masking process and finishes in the manufacture process of MIM capacitor.Therefore semiconductor stacked capacitor of the present invention has advantage simple in structure and that cost is low with respect to MIM capacitor.
The version of the battery lead plate of semiconductor stacked capacitor of the present invention is flexible and varied, it promptly can be pectinate texture, also can be snake shape structure, promptly can be the combination of pectinate texture between battery lead plate and the battery lead plate, also can be the combination of pectinate texture and snake shape structure.Can design different battery lead plate combination forms according to actual semiconductor device matching degree and frequency response test needs,, thereby obtain different matching capacitance values by the compound mode of electric capacity flexibly between the battery lead plate.
Description of drawings
Fig. 1 is the structural representation of MIM capacitor in the existing semiconductor device;
Fig. 2 is the longitudinal sectional drawing of semiconductor stacked capacitor of the present invention;
The structural representation of Fig. 3 semiconductor stacked capacitor comb electrode of the present invention plate;
Fig. 4 is semiconductor stacked capacitor comb electrode plate of the present invention and snake shape battery lead plate combination form schematic diagram;
Fig. 5 is the pectination of semiconductor stacked capacitor of the present invention and the another kind of combining form schematic diagram of snake shape battery lead plate;
Fig. 6 is the structural representation by semiconductor stacked capacitor group of the present invention.
Embodiment
Capacitor in being usually used in semiconductor device as the element of store charge, capacitor mainly comprises two with the spaced-apart conducting plate of upper insulator, capacitance or unit revolve and power up that to be pressed on the amount of charge that capacitor comprises be to be decided by many parameters, for example the dielectric constant of insulator between Ping Ban area, dull and stereotyped distance and flat board.Capacitor is used for filter, analog/digital converter, storage arrangement, control is used and the semiconductor device of many other types.Wherein a kind of capacitor is metal/insulator/metal (MIM) capacitor, through being usually used in mixed-signal device and logic device, in various semiconductor device, MIM capacitor is in order to store charge, and frequent storage node (Storage Node) as storage arrangement, MIM capacitor mainly is to form in a horizontal manner on semiconductor crystal wafer, is parallel to the dielectric layer of crystal column surface two dull and stereotyped clampings one.Generally speaking, wherein a metal plate is positioned on the metal layer or metal interconnect layer of semiconductor device.Yet MIM capacitor needs to utilize mask to form metal wire and electrode, its technology relative complex in making.In the design and the performance test stage of device, be used as the matching capacitance of device with MIM capacitor, manufacturing cost is higher relatively.Therefore, in order to reduce the manufacturing cost of measured device, semiconductor stacked capacitor of the present invention adopts pectination or snake shape electrode, and the multiple layer metal electrode is arranged in parallel, and dielectric layer places therebetween, has simple relatively structure and manufacturing process.Area by the design battery lead plate is adjusted electric capacity with different combination of electrodes modes, obtains the matching capacitance value of design expectation, to replace MIM capacitor.
Fig. 2 is the longitudinal profile structural representation of semiconductor stacked capacitor of the present invention.As shown in Figure 2, stacked capacitor of the present invention is placed in the semiconductor device structure, with other measured device, utilizes technologies such as for example oxidation of common process, photoetching, etching to form.With the method that forms plain conductor, formation has difform battery lead plate on metal level.In the process of making semiconductor integrated circuit, plain conductor is a plurality of elements in the device circuitry that is used for connecting alternately on the semiconductor wafer, is used for comprising at the general process of plated metal wire pattern on the semiconductor wafer: depositing conducting layer on silicon wafer substrate; Utilize standard photolithography techniques to form photoresist or other mask with required metal conductive line pattern; This wafer substrates is carried out dry etch process, remove with the conductive layer that will not be subjected to the zone that mask covers, and stay metal level battery lead plate with mask pattern; And utilize technologies such as plasma etching to remove mask layer usually, to expose the surface of metal electrode board.Usually, at a plurality of alternating layers between successive sedimentation electric conductor and the insulating material on the wafer substrates, and can be electrically connected each other between the conductor layer of the different layers on the wafer.By in insulating barrier, etching interlayer hole or opening, and in interlayer hole filling aluminum, tungsten or other metal, can between conductor layer, set up and be electrically connected.Stacked capacitor of the present invention comprises metal level and dielectric layer, and metal level and dielectric layer are that multilayer is superimposed.I.e. at first deposit layer of metal layer etches the battery lead plate of varying number and shape, then grown dielectric layer on metal level, for example silica or silicon nitride on metal level; Deposited metal again on dielectric layer can form the capacitor of sandwich construction according to design needs continued growth dielectric layer and metal level.Metal level is 8 layers among the embodiment as shown in Figure 2 of the present invention, and from M1 to M8, dielectric is filled between the metal level.Here, metal level can be to comprise a battery lead plate, also can make up structure by the battery lead plate that a plurality of battery lead plates are formed.Between the battery lead plate of each layer metal level, also be formed with the metal interconnected hole that connects adjacent two battery lead plates, make two battery lead plates form and be electrically connected.
As previously mentioned, metal level M can be made up of a battery lead plate or a plurality of battery lead plate according to the design needs of matching capacitance value.The battery lead plate of stacked capacitor of the present invention can be pectination, snake shape or their combination.The structural representation of Fig. 3 semiconductor stacked capacitor comb electrode of the present invention plate.Comb electrode plate shown in Figure 3 is interted by two comb electrode plates and forms together, and each battery lead plate comprises exit 30 and 33, electrode 31 and 32, and electrode 31 and 32 quantity are definite according to designing requirement.Between electrode 31 and 32, be filled with dielectric, therefore between each electrode 31 and 32, will form electric capacity.Like this, the capacitance that obtains between the exit 30 and 33 is exactly the combination of capacitance between each electrode 31 and 32.According to the difference of number of electrodes, the output capacitance between the exit 30 and 33 of battery lead plate will obtain different capacitances, and this compound mode is very flexibly.This only is the output capacitance of single-layer electrodes plate, in fact because dielectric is to be filled between the slit of every layer of electrode and each electrode layer, therefore not only can forms electric capacity between every layer electrode, and also can form electric capacity between two-layer or multi-layered electrode.The array output of this individual layer electric capacity and multi-layer capacity makes stacked capacitor of the present invention have flexile output capacitance value.
Fig. 4 is semiconductor stacked capacitor pectination of the present invention and snake shape battery lead plate combination form schematic diagram.As shown in Figure 4, comb electrode 41 and snake shape electrode 42 are pegged graft each other.Fig. 5 is the schematic diagram of the another kind of combining form of the pectination of semiconductor stacked capacitor of the present invention and snake shape battery lead plate.As shown in Figure 5, comb electrode 52 and 53 and this compound mode of pegging graft each other of snake shape electrode 51, two capacitor C 1 and C2 between comb electrode 52 and 53, have been formed, the structure shown in Figure 3 of comparing, under the situation that does not increase a lot of battery lead plate areas, the electric capacity quantity of formation is than having increased by one times.Therefore the compound mode of electric capacity is also more rich and varied.
Fig. 6 is the structural representation by semiconductor stacked capacitor group of the present invention.As shown in Figure 6, capacitor C1 and C2 combine the capacitance structure that forms by a plurality of comb electrode plates.In the middle of semiconductor stacked capacitor of the present invention, this can be the combinations thereof structure at the battery lead plate with one deck not only, and can be the capacitance structure of this combining form every layer of multi-layer electrode plate, wherein the area of battery lead plate, number of electrodes can be arranged and select for use according to designing requirement.Because dielectric is filled between every layer of battery lead plate and the slit of battery lead plate in, the compound mode of stacked capacitor capacitance of the present invention promptly comprises the electric capacity combination between the battery lead plate electrode, for example C1 and C2; Comprise the electric capacity combination between each layer battery lead plate electrode again.Therefore, semiconductor stacked capacitor of the present invention has quite abundant electric capacity compound mode, is very beneficial for the electric capacity coupling between the device in device detection stage.For example, in the frequency response test process, because all multifactor influences such as process conditions, the parameter consistency of device is difficult to reach level very, therefore need by adjusting matching capacitance, the input and output impedance matching property of device in the circuit, frequency response characteristic etc. are carried out conforming adjustment.When utilizing capacitor of the present invention to mate, make measured device link to each other with capacitor, because the electric capacity compound mode is very flexible, can obtain different capacitances, by adjusting the output capacitance of capacitor, make the frequency response characteristic between the different components reach coupling, with respect to MIM electric capacity, improve the efficient of debugging work, greatly reduced testing cost simultaneously.
Though oneself discloses the present invention as above with preferred embodiment, the present invention is defined in this.Any those skilled in the art without departing from the spirit and scope of the present invention, all can do various changes and modification, so protection scope of the present invention should be as the criterion with claim institute restricted portion.
Claims (6)
1, a kind of semiconductor stacked capacitor is characterized in that comprising:
The multiple layer metal layer that on semiconductor device, forms;
Described metal level comprises at least two metal electrode boards and at least two exits, and is filled in the dielectric layer in the slit of metal electrode board;
Be filled in the dielectric layer between the described metal level;
Has at least one metal interconnected hole between the described metal level;
Form electric capacity between the battery lead plate of every layer of metal level, and also form electric capacity between the battery lead plate of two-layer or multiple layer metal layer.
2, semiconductor stacked capacitor as claimed in claim 1 is characterized in that: described metal electrode board is a pectinate texture.
3, semiconductor stacked capacitor as claimed in claim 1 is characterized in that: described metal electrode board is a snake shape structure.
4, semiconductor stacked capacitor as claimed in claim 1 is characterized in that: described metal level is the combining structure of comb electrode plate and snake shape battery lead plate.
5, semiconductor stacked capacitor as claimed in claim 1 or 2 is characterized in that: described metal level is the combining structure of two or more comb electrode plates.
6, semiconductor stacked capacitor as claimed in claim 1 is characterized in that: described dielectric layer comprises silica or silicon nitride at least.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100246666A CN100468731C (en) | 2006-03-14 | 2006-03-14 | Semiconductor stacked capacitor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100246666A CN100468731C (en) | 2006-03-14 | 2006-03-14 | Semiconductor stacked capacitor |
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| CN101038911A CN101038911A (en) | 2007-09-19 |
| CN100468731C true CN100468731C (en) | 2009-03-11 |
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Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8848390B2 (en) * | 2011-02-16 | 2014-09-30 | Taiwan Semiconductor Manufacturing Co., Ltd. | Capacitive proximity communication using tuned-inductor |
| CN102437176B (en) * | 2011-08-17 | 2014-04-02 | 上海华力微电子有限公司 | Process for increasing capacitance density of integrated circuit |
| TWI550813B (en) * | 2012-06-26 | 2016-09-21 | 聯華電子股份有限公司 | Semiconductor structure |
| CN103337491B (en) * | 2013-06-26 | 2016-01-27 | 中国科学院计算技术研究所 | A kind of metal capacitance for omnidirectional's connection and layout method |
| CN103325766A (en) * | 2013-06-27 | 2013-09-25 | 上海华力微电子有限公司 | Metal interconnecting wire capacitor structure |
| CN104733438B (en) * | 2013-12-19 | 2017-08-04 | 中芯国际集成电路制造(上海)有限公司 | A kind of wafer permits Acceptance Tests structure |
| US10559568B1 (en) | 2018-09-10 | 2020-02-11 | Nanya Technology Corporation | Method for preparing semiconductor capacitor structure |
| CN109638155A (en) * | 2018-12-10 | 2019-04-16 | 中国电子科技集团公司第二十四研究所 | Mim capacitor structure and preparation method thereof |
| CN111146181B (en) * | 2019-11-26 | 2022-03-04 | 上海集成电路研发中心有限公司 | Semiconductor structure and manufacturing method |
| CN114582860B (en) * | 2022-05-05 | 2022-08-23 | 苏州领慧立芯科技有限公司 | Many electric capacity matching formula MOM condenser |
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Effective date of registration: 20111109 Address after: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Co-patentee after: Semiconductor Manufacturing International (Beijing) Corporation Patentee after: Semiconductor Manufacturing International (Shanghai) Corporation Address before: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |