CN100464149C - 多晶硅铸锭炉的热场结构 - Google Patents
多晶硅铸锭炉的热场结构 Download PDFInfo
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- CN100464149C CN100464149C CNB2007100705394A CN200710070539A CN100464149C CN 100464149 C CN100464149 C CN 100464149C CN B2007100705394 A CNB2007100705394 A CN B2007100705394A CN 200710070539 A CN200710070539 A CN 200710070539A CN 100464149 C CN100464149 C CN 100464149C
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- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims description 25
- 229920005591 polysilicon Polymers 0.000 title description 8
- 238000009413 insulation Methods 0.000 claims description 51
- 238000007789 sealing Methods 0.000 claims description 3
- 239000000725 suspension Substances 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 8
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 6
- 238000005266 casting Methods 0.000 abstract description 6
- 229910052710 silicon Inorganic materials 0.000 abstract description 6
- 239000010703 silicon Substances 0.000 abstract description 6
- 238000002425 crystallisation Methods 0.000 abstract description 3
- 230000008025 crystallization Effects 0.000 abstract description 3
- 238000005265 energy consumption Methods 0.000 abstract description 2
- 239000013078 crystal Substances 0.000 description 12
- 239000002994 raw material Substances 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000005755 formation reaction Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 239000004484 Briquette Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 230000001172 regenerating effect Effects 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 238000001149 thermolysis Methods 0.000 description 1
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CNB2007100705394A CN100464149C (zh) | 2007-08-23 | 2007-08-23 | 多晶硅铸锭炉的热场结构 |
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CNB2007100705394A CN100464149C (zh) | 2007-08-23 | 2007-08-23 | 多晶硅铸锭炉的热场结构 |
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CN101109602A CN101109602A (zh) | 2008-01-23 |
CN100464149C true CN100464149C (zh) | 2009-02-25 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI577468B (zh) * | 2016-07-11 | 2017-04-11 | 中美矽晶製品股份有限公司 | 定向凝固鑄造裝置及其散熱模組 |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101565852B (zh) * | 2008-04-25 | 2011-10-12 | 比亚迪股份有限公司 | 晶体连续生产设备及使用该设备连续生产多晶硅的方法 |
CN101503821B (zh) * | 2008-11-17 | 2011-06-15 | 上海普罗新能源有限公司 | 一种多晶硅坩锅平台支撑装置 |
IT1396761B1 (it) * | 2009-10-21 | 2012-12-14 | Saet Spa | Metodo e dispositivo per l'ottenimento di un materiale semiconduttore multicristallino, in particolare silicio |
CN102080259B (zh) * | 2011-03-10 | 2012-12-26 | 无锡开日能源科技股份有限公司 | 多晶硅铸锭炉的三段式热场 |
CN102747412B (zh) * | 2011-04-21 | 2015-11-25 | 江苏协鑫硅材料科技发展有限公司 | 用于定向凝固法生长单晶硅的装置及其使用方法 |
CN102134744B (zh) * | 2011-04-26 | 2012-06-13 | 安阳市凤凰光伏科技有限公司 | 多晶硅铸锭炉隔热装置 |
CN102162125B (zh) * | 2011-05-12 | 2012-06-13 | 石金精密科技(深圳)有限公司 | 多晶硅铸锭炉热场结构 |
CN102703968B (zh) * | 2012-06-05 | 2015-02-04 | 湖南红太阳光电科技有限公司 | 一种铸造单晶过程中通过气流控制籽晶熔化程度的方法及装置 |
CN102877127B (zh) * | 2012-09-28 | 2015-10-28 | 北京京运通科技股份有限公司 | 一种多晶铸锭炉及用其生长多晶硅锭的方法 |
CN102912416A (zh) * | 2012-10-25 | 2013-02-06 | 宁夏日晶新能源装备股份有限公司 | 新型多晶炉加热装置 |
CN104195634B (zh) * | 2014-09-10 | 2016-08-17 | 韩华新能源科技有限公司 | 大尺寸硅锭多晶铸锭炉热场结构 |
CN114216344A (zh) * | 2021-12-29 | 2022-03-22 | 湖南红太阳新能源科技有限公司 | 一种制备碳碳复合材料的设备 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1206755A (zh) * | 1997-02-13 | 1999-02-03 | 三星电子株式会社 | 通过控制拉速分布制造单晶硅锭和晶片的方法及其产品 |
CN1603475A (zh) * | 2004-09-06 | 2005-04-06 | 周永宗 | 一种纯静态双加热温梯法晶体生长装置 |
CN201081543Y (zh) * | 2007-08-23 | 2008-07-02 | 浙江精工科技股份有限公司 | 多晶硅铸锭炉的热场结构 |
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2007
- 2007-08-23 CN CNB2007100705394A patent/CN100464149C/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1206755A (zh) * | 1997-02-13 | 1999-02-03 | 三星电子株式会社 | 通过控制拉速分布制造单晶硅锭和晶片的方法及其产品 |
US6146459A (en) * | 1997-02-13 | 2000-11-14 | Samsung Electronics Co., Ltd. | Czochralski pullers for manufacturing monocrystalline silicon ingots by controlling temperature at the center and edge of an ingot-melt interface |
CN1603475A (zh) * | 2004-09-06 | 2005-04-06 | 周永宗 | 一种纯静态双加热温梯法晶体生长装置 |
CN201081543Y (zh) * | 2007-08-23 | 2008-07-02 | 浙江精工科技股份有限公司 | 多晶硅铸锭炉的热场结构 |
Non-Patent Citations (2)
Title |
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多晶硅锭的制备及其形貌组织的研究. 刘秋娣,林安中,林喜斌.稀有金属,第26卷第6期. 2002 |
多晶硅锭的制备及其形貌组织的研究. 刘秋娣,林安中,林喜斌.稀有金属,第26卷第6期. 2002 * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI577468B (zh) * | 2016-07-11 | 2017-04-11 | 中美矽晶製品股份有限公司 | 定向凝固鑄造裝置及其散熱模組 |
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CN101109602A (zh) | 2008-01-23 |
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