CN100462806C - Colorful filter and its making method and LCD device - Google Patents
Colorful filter and its making method and LCD device Download PDFInfo
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- CN100462806C CN100462806C CNB2007101788731A CN200710178873A CN100462806C CN 100462806 C CN100462806 C CN 100462806C CN B2007101788731 A CNB2007101788731 A CN B2007101788731A CN 200710178873 A CN200710178873 A CN 200710178873A CN 100462806 C CN100462806 C CN 100462806C
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Abstract
The invention relates to a color filter and a manufacturing method and a liquid crystal display device. The color filter comprises a base plate, a first lead wire which is formed on the base plate, a light activated element which is connected with the first lead wire, a black-matrix, a first through-hole which is formed on a position that the black-matrix is coated on the light activated element, a second lead wire which is formed on the black-matrix and is vertical with the first lead wire, which is connected with the light activated element which has the same road with the second lead wire through the first through-hole, and a color wood-gum. A manufacturing method of the color filter of the invention is that the first lead wire, the light activated element, the black-matrix, and a first through-hole on the black-matrix, the second lead wire, and the color wood-gum are prepared in turn. Another manufacturing method further comprises a step for preparing a jumper wire which is used to connect the first lead wire and the light activated element. The liquid crystal display device comprises the color filter of the invention and an array base plate which is opposite with the color filter and the liquid crystal layer which is arranged in the color filter. The invention achieves a screen touching function, and the thickness of products is small, the utilization of light is high, and the integral property is excellent.
Description
Technical field
The present invention relates to a kind of Color filter and its manufacturing method and liquid crystal display device, relate in particular to a kind of colored filter and manufacture method thereof with touch screen structure, and the liquid crystal indicator with touch screen function that adopts this colored filter.
Background technology
Flat-panel monitor is in being applied to life and producing more and more widely, the touch screen function of display is a kind of simple man-machine interaction mode, people can provide order to computing machine or other control systems by touch sensor or touch-screen, and touch screen function is applied to electronic watch at large, electronic toy, counter, desk calendar, handwriting pad, electronic dictionary/book, the personal digital assistant, telephone set, mobile phone, household electrical appliance, the industrial instrumentation device operating system, military command system, education and training equipment, safety monitoring system, the gps satellite positioning system, catering trade is ordered, booking system of restaurant, medicine equipment and hospital registration system, financial services system and all kinds of automatic selling system and all kinds of public places information query system or the like numerous areas.
The touch-screen kind of having developed at present is a lot, as resistance-type, condenser type, infrared type, induction, surface acoustic wave formula etc.
Conventional resistance-type, capacitive touch screen all need install sensing device additional at the display device outside surface, can increase complete machine thickness so undoubtedly, and it is about more than 15% that the light utilization ratio is reduced.The touch-screen of infrared mode is that the side at display screen disposes infrared emission and receiving element respectively, the problem that also exists display thickness to increase.Electromagnetic induction touch screen need install electromagnetic induction device additional in the bottom of display device usually, the defective of this touch-screen is to be subjected to display device driving circuit and extraneous electromagnetic interference (EMI) easily, also need to use special-purpose touch device, make the complex structure of touch-screen.The touch-screen of surface acoustic wave mode is at the side of a display device ultrasonic generator of configuration and two ultrasonic detectors, touch location is judged in variation according to ultrasonic intensity and conduction time, the defective of this mode is that resolution is very low, be subjected to the influence of extraneous mechanical vibration easily, and can only the perception single-point touches.
By above-mentioned analysis as can be known, all kinds of touch screen structures of prior art usually and the display device body be independently, independently the touch-screen parts are attached to and make it have touch screen function on the display device, the problem of Cun Zaiing like this: be that the thickness of display device is increased on the one hand, be the number of plies that has increased display device on the other hand, utilization factor to light has a significant impact, and has reduced the brightness and the performance of display device.
Summary of the invention
The purpose of this invention is to provide a kind of colored filter and manufacture method thereof, to realize that this colored filter has touch screen structure, and compare its thickness increment with existing colored filter few, and little to other function effects of colored filter, can guarantee light utilization ratio preferably.
Another object of the present invention provides a kind of liquid crystal indicator, have touch screen function to realize this liquid crystal indicator, and this device integral thickness is little, the utilization ratio height of light, strong interference immunity, functional reliability height.
For achieving the above object, a first aspect of the present invention provides a kind of colored filter, comprising:
Substrate;
First lead-in wire is formed on the substrate;
Light activated element is formed on the substrate in the arranged mode, and the light activated element of same column is connected with first lead-in wire;
Black matrix is formed on the substrate in the arranged mode, covers the light activated element position at black matrix and is formed with first via hole;
Second lead-in wire is formed on the black matrix, and is vertical with first lead-in wire, and is connected with the light activated element of going together by first via hole;
Color resin is formed between the black matrix.
For achieving the above object, a second aspect of the present invention provides a kind of method for manufacturing colored filtering substrate, comprising:
For achieving the above object, a third aspect of the present invention body provides another kind of method for manufacturing colored filtering substrate, comprising:
For realizing above-mentioned another purpose, a fourth aspect of the present invention provides a kind of liquid crystal indicator, adopt colored filter of the present invention, this liquid crystal indicator comprises and the array base palte of this colored filter to box, between this colored filter and the array base palte liquid crystal layer is set.
By above technical scheme as can be known, the present invention adopts and utilizes black matrix as insulation course on colored filter, cooperate the technological means that forms touch screen structure with light activated element, overcome in the prior art, increasing touch screen structure can bigger increase product thickness, reduce the technical matterss such as utilization factor of light.Therefore, the invention has the advantages that:
1, the integrated setting of touch screen structure and colored filter adopts original black matrix as insulation course, increased touch screen structure, and the product thickness that is increased is minimum, and the structure of product is more lightening;
2, the black matrix of utilization has blocked light activated element, and is little to the influence of light transmission, then can improve the utilization ratio of light;
3, touch screen structure is integrated in liquid crystal indicator inside, be subjected to extraneous interference little, be difficult for impaired, durability good;
4, the manufacturing process of colored filter is simple, has made full use of the manufacturing process and the material of original colored filter, and production cost is low.
Also in conjunction with the accompanying drawings the present invention is described in further detail below by specific embodiment.
Description of drawings
Figure 1A overlooks partial structurtes synoptic diagram one for colored filter specific embodiment one of the present invention;
Figure 1B be among Figure 1A A-A to sectional view;
Fig. 2 A overlooks the partial structurtes synoptic diagram for colored filter specific embodiment two of the present invention;
Fig. 2 B be among Fig. 2 A B-B to sectional view;
Fig. 3 A overlooks the partial structurtes synoptic diagram for colored filter specific embodiment three of the present invention;
Fig. 3 B be among Fig. 3 A C-C to sectional view;
Fig. 4 is the process flow diagram of a kind of method for manufacturing colored filtering substrate specific embodiment of the present invention;
Fig. 5 is the process flow diagram of the another kind of method for manufacturing colored filtering substrate specific embodiment of the present invention;
Fig. 6 is the structural representation of liquid crystal indicator specific embodiment of the present invention.
Embodiment
Colored filter of the present invention can be applied to be provided with in the flat display apparatus of colored filter, as LCD (Liquid Crystal Display, hereinafter to be referred as LCD) and organic light emitting display (Organic Light Emitting Display is hereinafter to be referred as OLED).Only be the technical scheme of example explanation colored filter of the present invention below with thin film transistor (TFT) (TFT-LCD) LCD.
Colored filter embodiment one
Overlook the partial structurtes synoptic diagram as what Figure 1A was depicted as colored filter specific embodiment one of the present invention, Figure 1B is depicted as among Figure 1A A-A to sectional view.Shown in Figure 1A and 1B, this colored filter comprises substrate 1; Several first lead-in wires, promptly several vertically go between 5, are formed on the substrate 1; Several light activated elements 4 are formed on the substrate 1 in the arranged mode, and the light activated element 4 of same column is connected with a vertical lead-in wire 5, and its concrete connected mode can be that light activated element 4 is arranged on vertical lead-in wire 5, perhaps is embedded among vertical lead-in wire 5; Black matrix 2, be formed on the substrate 1 in the arranged mode, light activated element 4 covers below the black matrix 2 fully, vertically lead-in wire 5 can part, also can all cover black matrix 2 times, cover light activated element 4 positions at black matrix 2 and be formed with first via hole 6, in liquid crystal indicator, black matrix 2 is used to stop structures such as TFT, and effect with light leak between occluded pixels, the top, subregion of each pixel all can correspondence be provided with black matrix 2, is the partial structurtes synoptic diagram of the pairing colored filter of several pixels shown in Figure 1A; Also be provided with several second lead-in wires on the colored filter, promptly several horizontal lead-in wires 3 are formed on the black matrix 2, and are vertical with vertical lead-in wire 5, shown in Figure 1A, and are connected with the light activated element 4 of going together by first via hole 6, shown in Figure 1B; Color resin on the colored filter is formed on (not shown) between the black matrix 2, and color resin and black matrix 2 relative position relations are those skilled in the art's common practise, do not influence the setting of other structures in the present embodiment.
In the present embodiment, vertically lead-in wire can be made by conductive material as the extension line of the vertical electric signal of light activated element, is used to connect same row light activated element and comes transmission of electric signals.If vertically the material of lead-in wire is nontransparent conductive material, metal for example then should in order to avoid influence the transmission of light in the liquid crystal indicator course of normal operation, avoid reducing display brightness with the width limitations that vertically goes between in the width range of black matrix.Preferred implementation is to adopt transparent conductive material to make vertical lead-in wire, for example can adopt tin indium oxide (ITO) or zinc paste to make vertically lead-in wire, then the width of vertical lead-in wire and the restriction of position are reduced greatly, vertical lead-in wire that broad can be set is to guarantee suitable resistivity.Present embodiment can be provided with the quantity and the position of light activated element according to the requirement of touch-screen resolution, and then the bar number and the position of the vertical lead-in wire of corresponding setting, vertically the interval width between lead-in wire should be corresponding with the columns of light activated element, and the width of every vertical lead-in wire self can freely be adjusted, and is not in contact with one another to get final product.The maximum touch-screen resolution that equates with liquid crystal indicator resolution can be set, a light activated element promptly all is set under the black matrix of each pixel correspondence, then vertically the minimum widith between the lead-in wire is exactly the width of single pixel, along with reduction to the touch-screen resolution requirement, can reduce the quantity of light activated element, light activated element correspondence is arranged under one of them the black matrix of several pixel cells, can reduce the vertical lead-in wire and the horizontal quantity of lead-in wire like this.On the other hand, adopt transparent conductive material to make vertical lead-in wire, also can avoid taking place reducing influence the display device contrast because of the higher direct reflection phenomenon that reflectivity caused of metal material.
In the present embodiment, light activated element is specifically as follows the photoresistance sheet, adopts following material to make: the compound photochromics that organic photoelectrical material such as inorganic photochromics such as amorphous silicon (a-Si) or cadmium sulfide or phthalein mountain valley with clumps of trees and bamboo oxygen titanium or inorganic material and organic material are formed.The conductivity of photoresistance sheet can change under the effect of illumination, plays the effect of light activated element.The size of light activated element should be less than the coverage of black matrix, is in order not influence the light of normal demonstration on the one hand, and on the other hand, black matrix can block the irradiation of backlight to light activated element.
In the present embodiment, laterally the function class of lead-in wire and vertical lead-in wire seemingly, it is the horizontal extension line of electric signal in the light activated element, connection with the light activated element of delegation with transmission of electric signals, laterally lead-in wire can be connected with signal processing circuit by the lead through being arranged on the colored filter periphery with vertical lead-in wire, by signal processing circuit electric signal is gathered and handled, the electric signal of laterally drawing cooperates the two-dimensional position that gets final product detected touch point with the electric signal of vertically drawing.Laterally lead-in wire should be made by conductive material, specifically can make by the lower metal material of resistivity, what then the width that laterally goes between can be provided with is less, to satisfy of the requirement of its width less than black matrix width, make horizontal lead-in wire can be hidden in the scope of black matrix, by deceiving the matrix isolation and not coming in contact short circuit, laterally the width that goes between is not limited to equal the width of first via hole between the horizontal lead-in wire of assurance and the vertical lead-in wire, link to each other with the photoresistance sheet as long as can pass through first via hole.
Due color resin can be to re-lay color resin forming on the integrated structure of black matrix and touch screen structure on the present embodiment colored filter, be specially filling color resin material between black matrix, can not constitute influence the touch screen structure in the present embodiment.
The principle of work of present embodiment is: constitute vertical lead-in wire of conduction and the insulation course between the horizontal lead-in wire by deceiving matrix, will vertically go between and laterally go between and keep apart, and the photoresistance sheet is connected with horizontal lead-in wire with vertical lead-in wire respectively.When liquid crystal indicator is used, substrate beholder toward the outer side because of colored filter, so light activated element is in the black matrix outside, can be used for perception because of touching caused environmental light intensity variation, the conductivity of photoresistance sheet changes with extraneous light intensity, the variation that touches the time can be converted to vertical lead-in wire and the laterally variation of the electric signal of lead-in wire transmission, finally can go out to touch the coordinate position that takes place according to the change-detection of electric signal.
The colored filter of present embodiment has touch screen structure, increased the colored filter of touch screen structure than other, because of having utilized original black matrix structure as insulation course, so thickness is littler, and touch screen structure is hidden in the black matrix, other function effects to colored filter are little, can guarantee light utilization ratio preferably.Simultaneously, the touch screen structure on the present embodiment colored filter can also realize detecting simultaneously the touch of multiple spot, and the minimum resolution size can be suitable with the size of display pixel cells, has tangible performance advantage.
Colored filter embodiment two
Overlook the partial structurtes synoptic diagram as what Fig. 2 A was depicted as colored filter specific embodiment two of the present invention, Fig. 2 B is depicted as among Fig. 2 A B-B to sectional view, structure in the present embodiment is with the difference of embodiment one: vertically going between 5 does not directly contact with photoresistance sheet 4, separate by black matrix 2 storerooms, its connected mode is specifically: form second via hole 7 on the black matrix 2 above the photoresistance sheet 4, on the black matrix 2 above vertical lead-in wire 5, form the 3rd via hole 8, one bonding line 9 is set on black matrix 2, one end of this bonding line 9 is arranged in second via hole 7, link to each other with photoresistance sheet 4, the other end of bonding line 9 is arranged in the 3rd via hole 8 and links to each other with vertical lead-in wire 5, and bonding line 9 is made with the 3 the same metal materials that adopt that laterally go between usually.
The technical scheme of present embodiment realizes that with the colored filter of embodiment one principle of touch screen function is identical, 5 be and vertically go between: when adopting transparent conductive material with advantage that photoresistance sheet 4 does not directly contact, for example ITO is as vertically going between, and employing photochromics, when for example amorphous silicon is made the photoresistance sheet, bonding line connection ITO and amorphous silicon by metal material can be avoided forming bigger contact resistance between ITO and the amorphous silicon, thereby improve the vertically electric conductivity of lead-in wire.
Colored filter embodiment three
As shown in Figure 3A for colored filter specific embodiment three of the present invention overlook the partial structurtes synoptic diagram, Fig. 3 B is depicted as among Fig. 3 A C-C to sectional view.The difference of present embodiment and the foregoing description one is to adopt photodiode as light activated element 4, this photodiode is the PN junction structure, comprise first electrode 41 of n type doped amorphous silicon (a-Si) and second electrode 42 of the p type doped amorphous silicon (a-Si) on first electrode 41 that is sticked, vertically lead-in wire 5 is arranged on the substrate 1, second electrode 42 is arranged on vertical lead-in wire 5 or is embedded vertically between the lead-in wire 5, directly be connected with vertical lead-in wire 5, constitute the positive pole of photodiode, laterally lead-in wire 3 still is connected with first electrode 41 by first via hole 6, constitutes the negative pole of photodiode.Wherein, n type doped amorphous silicon realizes that by mixing phosphorus atoms p type doped amorphous silicon realizes by mixing the boron atom.
The principle of work of the touch screen structure that the present embodiment colored filter is had is: photodiode is under the effect of the reverse voltage of importing by vertical lead-in wire and horizontal lead-in wire, be in normal cut-off state, when rayed, because the effect of photo-generated carrier, inverse current increases sharply, and promptly light signal is converted into electric signal.This electric signal can further transfer to signal processing apparatus through vertically going between with horizontal lead-in wire and discern touch point position.
The technical scheme of present embodiment can make colored filter have touch screen structure equally, and compare its thickness increment with the common color optical filter few, and little to other function effects of colored filter, can guarantee light utilization ratio preferably.
Certainly, colored filter of the present invention is not limited to adopt photodiode as light activated element, can also adopt phototriode etc., it all can be by utilizing black matrix as the insulation course in the touch screen structure, the original structure of touch screen structure and colored filter is integrated, promptly can realize high-resolution touch screen function, the thickness of colored filter is again little, and normal function can not be affected yet.In addition, the touch screen structure that this colored filter had also has extremely strong anti-interference, and the stability of touch-screen work is better.
Colored filter of the present invention is not limited to be applied in the liquid crystal indicator, can also be applied in other display device that adopt colored filter.
A kind of method for manufacturing colored filtering substrate embodiment
Be illustrated in figure 4 as the process flow diagram of a kind of method for manufacturing colored filtering substrate specific embodiment of the present invention, comprise the steps:
Present embodiment can be used for preparing colored filter of the present invention, selects different mask plates when photoetching for use, can etch required pattern, thereby determines the laterally position and the size of lead-in wire, vertical lead-in wire, light activated element and first via hole.The foregoing description can specifically be used to prepare the colored filter that the present invention adopts the photoresistance sheet.When the colored filter of photodiode is adopted in preparation, step 12 should be specially: deposition is mixed the amorphous silicon material of boron atom on the substrate of completing steps 11, and deposition is mixed the amorphous silicon material of phosphorus atoms on the amorphous silicon material that mixes the boron atom, by exposure and etch process form arrange with matrix-style, first electrode is arranged on the photodiode on second electrode, second electrode and first below the photodiode of same column goes between and is connected.
Present embodiment can have the preparation of the colored filter of touch screen structure with simple method realization, makes full use of the preparation technology and the material of existing colored filter, and technological process is easy, and cost is low.
Another kind of method for manufacturing colored filtering substrate embodiment
Be illustrated in figure 5 as the process flow diagram of method for manufacturing colored filtering substrate specific embodiment of the present invention, the method for present embodiment can specifically be used to make colored filter of the present invention, and this method specifically comprises the steps:
The technical scheme of present embodiment is applicable to that the colored filter of manufacturing is: adopt transparent conductive material, for example tin indium oxide or zinc paste form first lead-in wire, adopt amorphous silicon to form the photoresistance sheet, connect first lead-in wire and the colored filter by the metal bonding line.This technical scheme can avoid first lead-in wire directly to contact the bigger contact resistance that is produced with colored filter, has improved electric conductivity.
Liquid crystal indicator embodiment
Adopt colored filter of the present invention in the specific embodiment of liquid crystal indicator of the present invention, and comprise and the array base palte of colored filter, between this colored filter and the array base palte liquid crystal layer is set box.
Present embodiment can adopt the colored filter of the structure of the arbitrary embodiment of colored filter of the present invention as self, the liquid crystal indicator of present embodiment as shown in Figure 6, can be specially Thin Film Transistor-LCD, its structure specifically can comprise outermost upper polarizer 10, colored filter 20 is arranged under the polaroid 10, then sets gradually liquid crystal layer 30, thin film transistor array layer 40 from top to bottom, infrabasal plate 50, following polaroid 60 and backlight 70.Colored filter 20 wherein comprises the composite bed 22 of upper substrate 21 and chromatic filter layer and light activated element, promptly be provided with light activated element, laterally lead-in wire, vertically go between and the composite bed of black matrix.Laterally lead-in wire can be connected with signal processing circuit 80 by the lead through being arranged on the colored filter periphery with vertical lead-in wire.Signal processing circuit 80 can be the independent control circuit that is provided with, and also can integrate the signal processing function of realizing touch-screen with the driving circuit of liquid crystal indicator self.
In the present embodiment, the lead that the horizontal lead-in wire of light activated element is connected with vertical lead-in wire on the colored filter can be configured in the edge of upper substrate, also can be configured in the edge of infrabasal plate by the transfer printing electrode, thereby link to each other with the corresponding signal process device, be used to detect the variation of electric signal with the identification touch point position.Perhaps laterally lead-in wire and vertical lead-in wire can also link together with the integrated configuration of the driving circuit of liquid crystal indicator self.
Cooperate the use of present embodiment lcd touch device, can use the light pen of finger, bar-shaped object or top outgoing as touch device, need to prove that especially liquid crystal indicator of the present invention can adopt light pen as touch device, strengthened the dirigibility that touch screen function is realized.
Adopt the liquid crystal indicator of colored filter of the present invention can have touch screen function, and has the display of touch screen structure than other, its integral thickness is little, and is lightening on the structure, to the utilization ratio height of light, can improve brightness, strong interference immunity, the functional reliability height can realize that also multiconductor discerns simultaneously, it is suitable with the display pixel size that the minimum of touch-screen is differentiated size, has very significantly performance and cost advantage.
Liquid crystal indicator of the present invention has adopted colored filter of the present invention, and other structures of liquid crystal indicator are not limited to the content that the foregoing description is put down in writing, and can adjust as the case may be.
It should be noted that at last: above embodiment only in order to technical scheme of the present invention to be described, is not intended to limit; Although with reference to previous embodiment the present invention is had been described in detail, those of ordinary skill in the art is to be understood that: it still can be made amendment to the technical scheme that aforementioned each embodiment put down in writing, and perhaps part technical characterictic wherein is equal to replacement; And these modifications or replacement do not make the essence of appropriate technical solution break away from the spirit and scope of various embodiments of the present invention technical scheme.
Claims (17)
1. a colored filter is characterized in that, comprising:
Substrate,
First lead-in wire is formed on the described substrate;
Light activated element is formed on the described substrate in the arranged mode, and the light activated element of same column is connected with described first lead-in wire;
Black matrix is formed on the described substrate in the arranged mode, covers described light activated element position at described black matrix and is formed with first via hole;
Second lead-in wire is formed on the described black matrix, and is vertical with described first lead-in wire, and is connected with the light activated element of going together by described first via hole;
Color resin is formed between the described black matrix.
2. colored filter according to claim 1 is characterized in that: described light activated element is the photoresistance sheet that amorphous silicon, cadmium sulfide and/or phthalein mountain valley with clumps of trees and bamboo oxygen titanium material are made.
3. colored filter according to claim 1 is characterized in that: described light activated element is sticked and is connected with described first lead-in wire on described first lead-in wire.
4. colored filter according to claim 2 is characterized in that also comprising:
Second via hole is formed on the described black matrix of described photoresistance sheet top;
The 3rd via hole is formed on the described black matrix of the described first lead-in wire top;
Bonding line is arranged on the described black matrix, and an end of described bonding line is arranged in described second via hole and links to each other with described photoresistance sheet, and the other end of described bonding line is arranged in described the 3rd via hole and links to each other with described first lead-in wire.
5. colored filter according to claim 1, it is characterized in that: described light activated element is a photodiode, first electrode paste of described photodiode is located on described first lead-in wire, second electrode paste of described photodiode is located on described first electrode, and is connected with described second lead-in wire by described first via hole.
6. colored filter according to claim 5 is characterized in that: the material of described first electrode is to mix the amorphous silicon of boron atom, and the material of described second electrode is to mix the amorphous silicon of phosphorus atoms.
7. colored filter according to claim 1 is characterized in that: described light activated element is a phototriode.
8. according to the described arbitrary colored filter of claim 1～7, it is characterized in that: the material of described first lead-in wire is tin indium oxide or zinc paste.
9. according to claim 1～3,5～7 described arbitrary colored filters, it is characterized in that: the material of described second lead-in wire is a metal.
10. colored filter according to claim 4 is characterized in that: the material of described second lead-in wire and described bonding line is a metal.
11. a manufacturing method of color filters is characterized in that, comprising:
Step 1, on substrate deposits conductive material, form first by exposure and etch process and go between;
Step 2, deposit photochromics on the substrate of completing steps 1, form the light activated element of arranging with matrix-style by exposure and etch process, the light activated element of same column and described first goes between and is connected;
Step 3, the black matrix that formation is arranged with matrix-style on the substrate of completing steps 2 cover described light activated element position at described black matrix and form first via hole;
Step 4, on the substrate of completing steps 3 deposits conductive material, by exposure and etch process form with described first go between vertical, and by second going between that described first via hole is connected with the light activated element of going together;
Step 5, at the color resin that forms successively on the substrate of completing steps 4 between described black matrix.
12. method for manufacturing colored filtering substrate according to claim 11, it is characterized in that, described step 1 is specially: adopt magnetically controlled sputter method, electron-beam vapor deposition method or thermal evaporation deposition tin indium oxide or zinc oxide material on substrate, form first lead-in wire by exposure and etch process.
13. method for manufacturing colored filtering substrate according to claim 11, it is characterized in that, described step 2 is specially: adopt chemical gaseous phase depositing process deposited amorphous silicon materials on the substrate of completing steps 1, form the photoresistance sheet of arranging with matrix-style by exposure and etch process, the photoresistance sheet of same column is connected with described first lead-in wire.
14. method for manufacturing colored filtering substrate according to claim 11, it is characterized in that, described step 2 is specially: deposition is mixed the amorphous silicon material of boron atom on the substrate of completing steps 1, and deposition is mixed the amorphous silicon material of phosphorus atoms on the amorphous silicon material that mixes the boron atom, by exposure and etch process form arrange with matrix-style, first electrode is arranged on the photodiode on second electrode, second electrode of the photodiode of same column and described first goes between and is connected.
15. method for manufacturing colored filtering substrate according to claim 11, it is characterized in that, described step 4 is specially: adopt magnetically controlled sputter method, electron-beam vapor deposition method or thermal evaporation deposit metallic material on the substrate of completing steps 3, form by exposure and etch process and go between vertical with described first and by second going between that described first via hole is connected with the light activated element of going together.
16. a method for manufacturing colored filtering substrate is characterized in that comprising:
Step 21, on substrate deposits conductive material, form first by exposure and etch process and go between;
Step 22, deposit photochromics on the substrate of completing steps 21, form the light activated element of arranging with matrix-style by exposure and etch process, the light activated element and the first lead-in wire interval formation do not contact;
Step 23, the black matrix that formation is arranged with matrix-style on the substrate of completing steps 22 cover described light activated element position at described black matrix and form first via hole and second via hole, cover the described first lead-in wire position at described black matrix and form the 3rd via hole;
Step 24, on the substrate of completing steps 23 deposits conductive material, form vertical and by second going between that described first via hole is connected with the light activated element of going together by exposure and etch process, and formation is passed through, and described second via hole is connected and pass through described the 3rd via hole and described first bonding line that goes between and be connected with described light activated element with described first lead-in wire;
Step 25, at the color resin that forms successively on the substrate of completing steps 24 between described black matrix.
17. a liquid crystal indicator that adopts the described arbitrary colored filter of claim 1～10 is characterized in that: comprise and the array base palte of described colored filter, between described colored filter and the array base palte liquid crystal layer is set to box.
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| CNB2007101788731A CN100462806C (en) | 2007-12-06 | 2007-12-06 | Colorful filter and its making method and LCD device |
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| KR100989959B1 (en) * | 2008-10-27 | 2010-10-26 | 하이디스 테크놀로지 주식회사 | In-Cell Type Optical Touch Sensing Liquid Crystal Display and Method for Detecting Light Performed by the LCD |
| CN101738768B (en) * | 2008-11-18 | 2012-12-19 | 深圳富泰宏精密工业有限公司 | Touch screen and manufacturing method thereof |
| TWI452491B (en) * | 2009-03-06 | 2014-09-11 | Chi Mei Comm Systems Inc | Touch panel and method for fabricating the same |
| CN102236189B (en) * | 2010-04-28 | 2014-02-19 | 北京京东方光电科技有限公司 | Basal plate for display, manufacturing method thereof and liquid crystal display |
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Assignee: Chengdu BOE Optoelectronics Technology Co., Ltd. Assignor: BOE Technology Group Co., Ltd. Contract fulfillment period: 2009.6.5 to 2014.6.30 contract change Contract record no.: 2009990000636 Denomination of invention: Colorful filters and method of manufacture and LCD device Granted publication date: 20090218 License type: Exclusive license Record date: 2009.6.11 |
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