CN100460857C - Fourier spectrometer based on dynamic stable scanning technology - Google Patents
Fourier spectrometer based on dynamic stable scanning technology Download PDFInfo
- Publication number
- CN100460857C CN100460857C CNB2006100349662A CN200610034966A CN100460857C CN 100460857 C CN100460857 C CN 100460857C CN B2006100349662 A CNB2006100349662 A CN B2006100349662A CN 200610034966 A CN200610034966 A CN 200610034966A CN 100460857 C CN100460857 C CN 100460857C
- Authority
- CN
- China
- Prior art keywords
- control
- module
- michelson interferometer
- shifter
- scanning technology
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Abstract
This invention relates to a fourier spectrometer based on dynamic stable scanning technology<0}. Wherein, it comprises a white light and laser source, an optical system mainly with Michelson interferometer, a feedback module to detect and convert the weak optical signal into electric signal, an A/D control module, an actuator module to control the phase difference of two arms of the interferometer, and a measurement module to detect the feedback and actuator modules for locked phase condition. This invention overcomes the defects in prior art, and can large-stroke continual scan with high precision, resolution and SNR.
Description
Technical field
The present invention relates to optical, mechanical and electronic integration direction micrometric displacement control technology field and spectral analysis field, is a kind of big stroke spectroscopic analysis system that can realize laser phase locking control under nano-precision.
Technical background
Nanometer technology is 21 century one of the most promising new branch of science, and its growth momentum is very swift and violent.The diameter that requires to write a little in present chip production technology is 1 nanometer, and the some distance is 2 nanometers; Ultra-thin section on the medical surgery cut the thick 100 ± 5nm of being; The nanometer scale that the range of application that present various at home and abroad industrial fields have begun the MEMS (micro electro mechanical system) (MEMS) of widespread use also enters from micron realizes these nano level processing and measures the ultraprecise positioning instant nanometer positioning technology that all be unable to do without.
The principle of novel fourier spectrometer is with the difference of traditional spectrometer, structure is also different, the Fourier transform spectrometer does not have entrance slit and exit slit, and the size of light source area is so serious unlike conventional spectrometers to the influence of instrumental resolution, thereby it can use the larger area light source; And its each detected signal all comprises the signal of whole frequency, and unlike conventional spectrometers each information that can only detect a very little frequency range.Therefore, the signal to noise ratio (S/N ratio) of Fourier transform spectrometer is more much higher than the conventional spectrometers.
Yet fourier spectrometer but requires very harsh measuring condition, design according to michelson interferometer in the script fourier spectrometer, one arm is for deciding arm, one arm is a swing arm, swing arm is the combination that piezoelectric actuator adds the high precision stepper motor, the principle of work of this combination is to be elongated near full when inclined to one side at piezoelectric actuator, stopping to measure simultaneously, analyzer stops the rotation, the elongation of motor compensation micro positioner, after compensation is finished, begin to measure the rotation of analyzer continuation simultaneously, micro positioner continues elongation.So just, have a plurality of problems: 1, analyzer is in the transfer process that stops and rotating, and speed is to exist to change, and it needs the time to reach stationary value.2, there is power excursion in light source, so variation has taken place measured value when beginning to measure stopping to measure, measures curve connection and does not go up.3, piezoelectric actuator adds being combined in the transfer process of stepper motor and has vibration greatly, has certain may jump out a fringe period.4, piezoelectric actuator adds the combination of stepper motor, is difficult to reach scanning fast, even under situation the most at a high speed, scanning 1um also wants 10 minutes.
So even external environment exists small interference also can cause particularly vibration noise of many random noises, still there is very high noise in the signal that fourier spectrometer is measured.Under general laboratory condition, even having on the stable optical table of oil pressure, the interferogram of measurement carries out Fourier transform and can not get the spectrogram of being correlated with at all, but measures a lot of vibration signals, and is very high to the environmental requirement of measuring.Have only external several companies that Fourier transform spectrum device can be provided at present, their technology comparative maturity produces resolution＜0.005cm-1, but price is very expensive, maintenance cost is high, strongly professional, is difficult in China and uses on a large scale.Particularly the Lights section needs complicated supervisory system and water cooling plant.
Summary of the invention
The objective of the invention is to overcome shortcoming of the prior art, a kind of stroke continuous sweep greatly be provided, and fast, the fourier spectrometer of stable, high precision, high resolving power, high s/n ratio.
The present invention is achieved through the following technical solutions its goal of the invention.
The invention provides a kind of Fourier spectrometer, comprise on the structure: white light and LASER Light Source based on dynamic stable scanning technology; The main optical system that constitutes by michelson interferometer; Be used to survey the feedback module that weak one changes and convert thereof into corresponding electric signal; Be used for the analog quantity after the feedback module processing is converted to the control module of digital quantity; Be used for execution module according to the phase differential adjusting of control module result control Michelson two arms; Under the situation of phase differential locking, survey the measurement module of feedback module and execution module control Michelson interferometer two arm phase differential even variation with being used for.Two arms of the michelson interferometer of the optical system of this spectrometer are transfer arm, move by little shifter control fine motion arm and to be used for stable phase angle, move by thick shifter control coarse motion arm that rotation is used to adjust phase place with analyzer, described little shifter and thick shifter are controlled by execution module.
The present invention follows the trail of phase change according to the michelson interferometer principle, also can make and measure the variation of interference strength with phase differential in quite long interference range by evenly changing the continuous phase change of polarization angle control; Feedback control module is used to survey faint optical signal and converts thereof into corresponding electric signal; And carry out AD and convert digital signal to, finish pulse to the phase differential control and treatment by certain algorithm, send out control signal again and give execution module; Execution module is used for according to the control module result, in the accuracy rating of nanometer, realizes the coarse motion arm lengths of big stroke adjustment michelson interferometer.Measurement module is used to measure the interference strength variation after white light LEDs sees through sample.
Optical system is to interfere view by the shared a kind of Michelson of two-way light path.Wherein the He-Ne laser optical path is by the michelson interferometer of interference technique reflection phase information, be used to adjust 1/4 or 1/2 wave plate of phase place, the analyzer that is used for the phase place High Accuracy Control by motor driven, be used to the object lens and the diaphragm that amplify, collimate, last by the size of probe detection to space point of fixity light intensity.The white light light path is by the Michelson of He-Ne light path phase locking control even variation phase differential in addition, be used to the object lens and the diaphragm that amplify, collimate, by the light intensity of photomultiplier measurement space point of fixity, just measure the information that light intensity changes with phase differential at last.The principle of work of its optical system is that He-Ne laser is through michelson interferometer, 1/4 or 1/2 wave plate that adds is used to adjust phase place, by the locking of interference fringe reflection phase information and the little shifter realization of FEEDBACK CONTROL phase place, carry out the motion state of control Michelson interferometer coarse motion arm by the analyzer that drives by thick shifter.White light source drives analyzer Rotating with Uniform control Michelson interferometer coarse motion arm by thick shifter and evenly moves with the shared michelson interferometer of He-Ne laser, scans white light interference figure, carries out the spectrogram that Fourier transform obtains white light.
Feedback module of the present invention be one can program control adjusting gain, the optical signal detection module of zero-bit and AD conversion resolution.It comprises be used for will experiment the useful light intensity signal optical diode amplifier section that extracts and amplify, the control figure potentiometer, the opto-electronic conversion gain signal, the control step driven by motor interferes arm evenly to move, and the move noise signal of the phase differential that inhomogeneous photograph becomes of control piezoelectric actuator compensation external interference and stepper motor.
Having compared several performances with existing system is improved: 1, little shifter is operated near the central value always in whole control process, do not exist elongation full partially and shorten to 0 situation, can adopt elongation big, and littler, the more cheap piezoelectric actuator of volume replace existing expensive little shifter.2, thick shifter adopts motor to do, and motor is very little by the swing arm vibration that belt drives, and makes the control effect improve, and measures and has reduced interference source initiatively.3, can realize continuous scanning by moving continuously of coarse motion arm.4, stroke can reach infinitely great in theory, in fact just depends on the length of michelson interferometer coarse motion arm lower railway.5, can realize scanning at a high speed, as long as the analyzer rotational speed is suitable with the phase differential variation speed of coarse motion arm speed correspondence, system can working stability.So can adopt the mode of the speed of accelerating analyzer and stepper motor simultaneously, the velocity limit of scanning depends on the rotational speed of motor.Therefore the present invention is not very harsh to the requirement of experiment or measurement environment, can experimentize or measure the cost that greatly reduces experiment and measure in general environment.
Of the present invention another this through being to adopt white light LEDs as white light source.Semiconductor light-emitting-diode (LED) is a kind of injection electroluminescence device.At full-colour display screen, aspects such as the developing of lighting source are widely used because it has plurality of advantages such as long service life, anti-vibration, luminescence efficiency height.Simultaneously, it also has coherence preferably, do not have light source thermal values such as traditional Elema, high-pressure mercury arc lamp, tungsten sodium lamp big, need water-cooled, involve great expense shortcoming such as serviceable life is short, and price is low, can be applied on the fourier spectrometer.The light that common white light LEDs emits owing to the processing reason distributes asymmetric, can't become directional light with lens focus.Therefore among the present invention the epoxy resin on LED top layer is polished polishing, become quasi-parallel light with lens focus again.
The detailed circuit structure of feedback module of the present invention comprises: the optical diode amplifier section that is used to extract light intensity signal and amplifies; Be used for the order that processing and control module transmits, the control figure potentiometer, and with control and the tcp data segment of frequency inverted one-tenth numeral back passback to control module.Feedback control module is used to survey weak one and changes and convert thereof into corresponding electric signal, be one can program control adjusting gain, the optical signal detection module of zeroing position and AD conversion, the opto-electronic conversion detection accuracy that this module is used arrives 1024 (2
10).Module mainly comprises optical diode amplifier section and control and tcp data segment.Useful light intensity signal during the optical diode amplifier section will be measured extracts and amplifies, and analog quantity is passed to single-chip microcomputer mega16.It comprises the electric current scale-up version amplifying circuit that optical diode is formed with amplifier U1, the digital zero setting circuit that digital regulation resistance X9C104 and impact damper T1064 or OP07 form, the totalizer of forming by digital regulation resistance X9C503 or X9C104 and amplifier U2 that reverse enlarging function is arranged, and second-order low-pass filter.
Analog quantity after control module is handled feedback module converts digital quantity to, the size that one side is regulated digital regulation resistance X9C104 in the feedback module, make analog quantity be in best process range, on the other hand analog quantity is converted to digital quantity, finish the phase differential control and treatment according to certain algorithm, control the action of high drive piezoelectric actuator again.Its hardware mainly is exactly single-chip microcomputer mega16, realizes pid control algorithm in mega16.By A/D electric circuit inspection process variable Y, and error of calculation e and control variable u, by outputing to execution module after the D/A conversion, process variable Y is stabilized on the point of setting, computing velocity reaches 16MIPS.PC realizes by serial communication that with the communication between the control module baud rate of communication reaches 115K, can satisfy the requirement of monitoring.
The present invention adopts computer to handle as back-end data.Computer can be realized various algorithms like a cork, has friendly interface, is easy to debugging, data such as can store at advantage, also have other a large amount of data processing softwares available simultaneously.The groundwork of computer is as data processing, and the signal of its acceptance is the original signal that feedback module is accepted extraction.So need not to change under the condition of hardware, can increase software on computers and realize multiple analytic function, make the present invention have higher functions expanding performance.
For can be stable measure, the vibrations that must make moving of fine motion arm can compensate accurately rapidly in measuring process are disturbed.The thick shifter that the coarse motion arm of described control Michelson interferometer evenly moves is a stepper motor, little shifter that control fine motion arm compensation michelson interferometer phase noise changes is a piezoelectric actuator, the thick shifter of control analyzer rotation is a direct current generator, described execution module is made of three discrete parts, the stepper motor that the coarse motion arm of difference control Michelson interferometer evenly moves, piezoelectric actuator that compensation michelson interferometer phase noise changes and the running that drives the direct current generator of analyzer rotation.Execution module is used for according to the control module result, and the phase differential of control Michelson two arms is regulated.Adjusting comprises two parts: a part is that micrometric displacement is regulated, fine motion arm lengths by the control Michelson interferometer realizes that the compensation of phase difference changes control, under the situation of phase locking control, the length that can regulate Michelson fine motion arm keeps the phase differential locking.Adopt the dynamic adjustments of the piezoelectric actuator realization high stable that the nano-precision displacement produces by German PI company.Piezoelectric actuator is in the length of the fine motion arm of the accuracy rating adjustment Michelson interferometer of nanometer, and response speed also can reach a millisecond magnitude.Piezoelectric actuator adopts a DCPS digitally controlled power source, and power supply architecture comprises the microcontroller mega16 of control DA converter, DA converter, high voltage expanded circuit.Second portion is a phase adjusted, changes the phase place of two arms by the angle that changes analyzer.Polariscope whenever rotates a circle and is equivalent to the length that michelson interferometer two arms change a wavelength under the phase locking situation; Piezoelectric actuator is united with the stepping motor and is carried out automatic tracking and compensating and make to regulate resolution and reach 1/400 of wavelength in the rotary course, greatly reduces the difficulty of control algolithm, has improved the stability of instrument.
Description of drawings
Fig. 1 is the light path principle figure of prior art;
Fig. 2 is a system construction drawing of the present invention;
Fig. 3 is the structural representation of white LED light source;
Fig. 4 is the system module figure that system data of the present invention is handled;
Fig. 5 is the partial circuit figure of the optical signal detection circuit of feedback module;
Fig. 6 is the partial circuit figure of the optical signal detection circuit of feedback module;
Fig. 7 is the circuit diagram of the processor controls part of feedback module;
Fig. 8 is the circuit diagram of execution module;
Fig. 9 is the interferogram of white light LEDs;
Figure 10 is the comparison of Fig. 9 Fourier result of variations with other spectrometers;
Figure 11 white light LEDs is the interferogram of the structure of a kind of bandpass filter of light source measurement;
Figure 12 is the comparison of Figure 11 Fourier result of variations with other spectrometers;
Figure 13 white light LEDs is the interferogram of the structure of the another kind of bandpass filter of light source measurement;
Figure 14 is the comparison of Figure 13 Fourier result of variations with other spectrometers;
Embodiment
The present invention is described further below in conjunction with accompanying drawing.
The present invention is on the basis of original control system of large stroke nanometer precision location, on light path, innovate, on circuit, improve, and in conjunction with the design concept of fourier spectrometer, design voluntarily, have the white light LEDs fourier spectrometer of nano-precision phase differential locking control.
The nano-precision positioning control system of prior art as shown in Figure 1, an arm T1 of michelson interferometer fixes, another arm T2 adds the combination of high precision step motor for piezoelectric actuator PZ, the principle of work of this combination is to be elongated near full when inclined to one side at piezoelectric actuator, stopping to measure simultaneously, analyzer stops the rotation, the elongation of motor compensation micro positioner, after compensation is finished, beginning to measure simultaneously, analyzer continues rotation, micro positioner continues elongation, so just has a plurality of problems described in the background technology.The present invention utilizes the characteristic of its FEEDBACK CONTROL locking phase on the thought basis of large stroke nanometer precision positioning system, be applied to the stabilising arrangement of spectrometer.
The ultimate principle of control system of large stroke nanometer precision location comprises white light source 3 and LASER Light Source 4 as shown in Figure 2 on the structure; The main optical system that constitutes by michelson interferometer, white light source 3 is with LASER Light Source 4 shared one group of michelson interferometer; Be used to survey the feedback module 5 that weak one changes and convert thereof into corresponding electric signal; Be used for the analog quantity after feedback module 5 processing is converted to the control module 6 of digital quantity; Be used for execution module 7 according to the phase differential adjusting of control module 6 result control Michelsons two arms; Be used under the situation of phase differential locking, survey the measurement module 8 of the michelson interferometer two arm phase differential even variation of feedback module 5 and execution module 6 controls; Two arms of the michelson interferometer of described optical system are transfer arm, move by little shifter 1 control fine motion arm 11 and to be used for stable phase angle, move by thick shifter control coarse motion arm 21 that 22 rotations are used to adjust phase place with analyzer, described little shifter 1 and thick shifter are controlled by execution module.The present invention adopts piezoelectric actuator as little shifter 1, and employing can be adjusted the length of an arm of Michelson interferometer in the accuracy rating of nanometer, and response speed also wants to reach the piezoelectric actuator of millisecond magnitude.Adopt motor as thick shifter, comprise the stepper motor 2 and the direct current generator 2 ' that drives the analyzer rotation that drive the coarse motion arm by belt.
When incident light is the He-Ne Lasers of vertical polarization, can draw according to the theory of this system:
From top relational expression as can be seen, the light intensity I that the optical diode detection obtains is made up of two parts, and first is a DC voltage, is because half-reflecting half mirror is not ideal enough, i.e. E
1=E
2Direct current component can not be eliminated fully, and this point can solve by the method for improving electronic circuit.The second portion of intensity I be together michelson interferometer a relevant cosine function square.According to the explanation of control system of large stroke nanometer precision location, an arm of michelson interferometer is the fixed arm of deciding, the swing arm that another arm is.When system kept the I value constant by the PID FEEDBACK CONTROL, δ just equaled 2 φ---and the optical path difference δ between two arms depends on the angle of orientation φ of analyzer, so if this moment, φ rotated uniformly, then the phase differential δ of two arms will change uniformly.
The present invention is designed to swing arm with two arms of michelson interferometer, and wherein 1 control of fine motion arm 11 usefulness piezoelectric actuators compensates small phase differential and changes.Coarse motion arm 21 is that stepper motor 2 adds the belt drive, and it is suitable with the variation delta φ that analyzer 22 rotational speeies cause that coarse motion arm 21 moves the phase differential variation Δ δ that causes, and analyzer 22 is driven by direct current generator 2 '.Like this, having compared several performances with existing system is improved: 1, piezoelectric actuator 1 is operated near the central value always in whole control process, do not exist elongation full partially and shorten to 0 situation, can adopt the maximum elongation amount, littler, more cheap piezoelectric actuator.2, motor 2 is very little by coarse motion arm 21 vibrations that belt drives, and makes the control effect improve, and measures and has reduced interference source initiatively.3, can realize continuous scanning.4, stroke can reach infinitely great in theory, in fact just depends on the length of michelson interferometer coarse motion arm 21 lower railway.5, can realize scanning at a high speed, as long as analyzer 22 rotational speeies are suitable with the phase differential variation speed of coarse motion arm 21 speed correspondences, system can working stability.Can accelerate the speed of analyzer and stepper motor simultaneously, the velocity limit of scanning depends on the rotational speed of motor.
Optical system is to interfere view by the shared a kind of Michelson of two-way light path.In conjunction with Fig. 2, wherein the He-Ne laser optical path is by the michelson interferometer of interference technique reflection phase information, be used to adjust 1/4 or 1/2 wave plate of phase place, the analyzer 22 that is used for the phase place High Accuracy Control by motor 2 ' driving, be used to the object lens and the diaphragm that amplify, collimate, last by the size of probe detection to space point of fixity light intensity.The white light light path is by the Michelson of He-Ne light path phase locking control even variation phase differential in addition, be used to the object lens and the diaphragm that amplify, collimate, by the light intensity of photomultiplier measurement space point of fixity, just measure the information that light intensity changes with phase differential at last.In conjunction with shown in Figure 4, the principle of work of its optical system is that He-Ne laser is through michelson interferometer, 1/4 or 1/2 wave plate that adds is used to adjust phase place, by the locking of interference fringe reflection phase information and the little shifter 1 realization phase place of FEEDBACK CONTROL, carry out the motion state of control Michelson interferometer coarse motion arm 21 by the analyzer 22 that drives by thick shifter 2 '.White light source drives analyzer 22 Rotating with Uniform control Michelson interferometer coarse motion arms by thick shifter 2 ' and evenly moves with the shared michelson interferometer of He-Ne laser, scans white light interference figure, carries out the spectrogram that Fourier transform obtains white light.
Another improvement of the present invention is to adopt white light LEDs as white light source, at present mainly to be day inferior chemistry (Nichia) be coated with last layer YAG fluorescent material with the InGaN blue light crystal grain of 460nm wavelength to this commercial white light LEDs, utilize blue-ray LED to shine this fluorescent material with the 555nm wavelength gold-tinted of generation with the blue light complementation, utilize lens principle that gold-tinted, the blue light of complementation are mixed again, just can draw the required white light of naked eyes.LED is about 250um * 250um in intracrystalline size usually, so can be regarded as, led light source disperses light source on schedule, in order to obtain testing used directional light, must use lens focus, the poly-encapsulation of the epoxy resin of common LED adopts the refraction type light gathering form to improve light gathering efficiency and luminous intensity, but owing to the processing reason, the light that emits distributes asymmetric, can't become directional light with lens focus.Therefore the epoxy resin with the LED top layer in testing polishes polishing, becomes quasi-parallel light with lens focus again, as shown in Figure 3.
Detector of the present invention uses S1320 type photomultiplier; Chronotron adopts the WSM-200 Michelson interferometer, use the step motor control program of design voluntarily to control moving of chronotron during measurement, the velocity contrast (generation phase differential) that it and piezoelectric actuator move depends on the rotational speed of analyzer, during this period, photomultiplier is surveyed, the time interval of its sampling is 0.0359fs, and corresponding precision is 10.7nm.
The amplifier section of optical diode comprises the electric current scale-up version amplifying circuit that optical diode is formed with amplifier U1 in the feedback module of the present invention, digital regulation resistance X9C104 and or the digital zero setting circuit formed of OP07, as shown in Figure 5.The totalizer of forming by digital regulation resistance X9C503 or X9C104 and amplifier U2 that reverse enlarging function is arranged, and second-order low-pass filter, as shown in Figure 6.Control and tcp data segment are made of single-chip microcomputer mega16 and usb interface module in the feedback module, finish the AD conversion by the AD converter that mega16 carries, as shown in Figure 7.Control module adopts the pid algorithm stable phase angle, the Digital Implementation of pid control algorithm partly is that main mega16 single-chip microprocessor system is by A/D electric circuit inspection process variable Y, and error of calculation e and control variable u, by outputing to execution module after the D/A conversion, process variable Y is stabilized on the point of setting.Execution module of the present invention is made of three discrete parts, the stepper motor that the coarse motion arm of difference control Michelson interferometer evenly moves, piezoelectric actuator that compensation michelson interferometer phase noise changes and the running that drives the direct current generator of analyzer rotation, as shown in Figure 8.Piezoelectric actuator adopts a DCPS digitally controlled power source, and power supply architecture comprises DA converter and a high voltage operational amplifier, high voltage expanded circuit.
Fig. 9 to 14 is for adopting the comparison of the measurement result to white light LEDs and two kinds of bandpass filter measurement results and existing high precision measuring instrument of the present invention, can be as seen from the figure, the measurement result of measurement result of the present invention and existing high precision instrument is very approaching, and manufacturing cost of the present invention is lower.
Claims (10)
1. Fourier spectrometer based on dynamic stable scanning technology is characterized in that comprising:
White light source (3) and LASER Light Source (4);
The main optical system that constitutes by michelson interferometer, white light source is with the shared one group of michelson interferometer of LASER Light Source;
Be used to survey the feedback module (5) that weak one changes and convert thereof into corresponding electric signal;
Be used for the analog quantity after the feedback module processing is converted to the control module (6) of digital quantity;
Be used for execution module (7) according to the phase differential adjusting of control module result control Michelson two arms; With
Be used under the situation of phase differential locking, survey the measurement module (8) of the michelson interferometer two arm phase differential even variation of feedback module and execution module control;
Two arms of the michelson interferometer of described optical system are transfer arm, by the mobile stable phase angle that is used for of little shifter (1) control fine motion arm (11), move and analyzer (22) rotation is used to adjust phase place by thick shifter control coarse motion arm (21), described little shifter and slightly shifter control by execution module.
2. the Fourier spectrometer based on dynamic stable scanning technology according to claim 1 is characterized in that adopting white light LEDs as white light source, and the epoxy resin on LED top layer polishes polishing, and scioptics are focused into the quasi-parallel light source.
3. the Fourier spectrometer based on dynamic stable scanning technology according to claim 1 and 2, it is characterized in that adopting piezoelectric actuator as little shifter, employing can be adjusted the length of an arm of Michelson interferometer in the accuracy rating of nanometer, and response speed also wants to reach the piezoelectric actuator of millisecond magnitude.
4. the Fourier spectrometer based on dynamic stable scanning technology according to claim 1 and 2 is characterized in that adopting motor as thick shifter, comprises by belt driving the stepper motor (2) of coarse motion arm and driving the direct current generator (2 ') that analyzer rotates.
5. the Fourier spectrometer based on dynamic stable scanning technology according to claim 1 and 2 is characterized in that described feedback module comprises:
The optical diode amplifier section that is used to extract light intensity signal and amplifies;
Be used for the order that processing and control module transmits, the control figure potentiometer, and with control and the tcp data segment of frequency inverted one-tenth numeral back passback to control module.
6. the Fourier spectrometer based on dynamic stable scanning technology according to claim 5, it is characterized in that the amplifier section of optical diode comprises the electric current scale-up version amplifying circuit that optical diode is formed with amplifier U1 in the feedback module, the digital zero setting circuit that digital regulation resistance X9C104 and impact damper T1064 or OP07 form, the totalizer of forming by digital regulation resistance X9C503 or X9C104 and amplifier U2 that reverse enlarging function is arranged, and second-order low-pass filter.
7. the Fourier spectrometer based on dynamic stable scanning technology according to claim 5, it is characterized in that in the described feedback module that control and tcp data segment are made of single-chip microcomputer mega16 and usb interface module, finish the AD conversion by the AD converter that mega16 carries.
8. the Fourier spectrometer based on dynamic stable scanning technology according to claim 1 and 2, the evenly mobile thick shifter of coarse motion arm that it is characterized in that the control Michelson interferometer is a stepper motor, little shifter that control fine motion arm compensation michelson interferometer phase noise changes is a piezoelectric actuator, the thick shifter of control analyzer rotation is a direct current generator, described execution module is made of three discrete parts, the stepper motor that the coarse motion arm of difference control Michelson interferometer evenly moves, piezoelectric actuator that compensation michelson interferometer phase noise changes and the running that drives the direct current generator of analyzer rotation.
9. the Fourier spectrometer based on dynamic stable scanning technology according to claim 1 and 2, it is characterized in that control module adopts the pid algorithm stable phase angle, the Digital Implementation of pid control algorithm partly is by A/D electric circuit inspection process variable Y by the mega16 single-chip microprocessor system, and error of calculation e and control variable u, by outputing to execution module after the D/A conversion, process variable Y is stabilized on the point of setting.
10. the Fourier spectrometer based on dynamic stable scanning technology according to claim 3 is characterized in that piezoelectric actuator adopts a DCPS digitally controlled power source, and power supply architecture comprises DA converter and a high voltage operational amplifier, high voltage expanded circuit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100349662A CN100460857C (en) | 2006-04-13 | 2006-04-13 | Fourier spectrometer based on dynamic stable scanning technology |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100349662A CN100460857C (en) | 2006-04-13 | 2006-04-13 | Fourier spectrometer based on dynamic stable scanning technology |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1837784A CN1837784A (en) | 2006-09-27 |
| CN100460857C true CN100460857C (en) | 2009-02-11 |
Family
ID=37015246
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2006100349662A Expired - Fee Related CN100460857C (en) | 2006-04-13 | 2006-04-13 | Fourier spectrometer based on dynamic stable scanning technology |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100460857C (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102222558B (en) * | 2010-04-14 | 2016-03-02 | 李岩松 | Optical current mutual inductor and optoelectronic information processor thereof |
| CN102095498B (en) * | 2010-11-12 | 2012-10-31 | 北京工业大学 | Scanning type high-accuracy Fourier transformation spectroscopy method |
| CN110460313B (en) * | 2019-08-22 | 2020-08-18 | 湘潭大学 | Weak signal reading circuit for radiation detector |
| CN111398183B (en) * | 2020-03-10 | 2023-06-09 | 上海卫星工程研究所 | Zero offset adjustment method for satellite-borne Fourier transform spectrometer |
| WO2023024018A1 (en) * | 2021-08-26 | 2023-03-02 | 江苏旭海光电科技有限公司 | Segmented scanning fourier transform spectrometer |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3694088A (en) * | 1971-01-25 | 1972-09-26 | Bell Telephone Labor Inc | Wavefront measurement |
| JP2000146517A (en) * | 1998-11-17 | 2000-05-26 | Mitsutoyo Corp | Light wave interferometer and length measuring method using light wave interferometer |
| CN2519256Y (en) * | 2002-01-29 | 2002-10-30 | 中国科学院物理研究所 | Bifunction miniature super short laser pulse self correlation measuring apparatus |
| US20050002041A1 (en) * | 2002-01-25 | 2005-01-06 | Mater Michael J. | Object imaging system using changing frequency interferometry method |
| CN1758167A (en) * | 2004-12-31 | 2006-04-12 | 中山大学 | Control system of large stroke nanometer precision location |
-
2006
- 2006-04-13 CN CNB2006100349662A patent/CN100460857C/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3694088A (en) * | 1971-01-25 | 1972-09-26 | Bell Telephone Labor Inc | Wavefront measurement |
| JP2000146517A (en) * | 1998-11-17 | 2000-05-26 | Mitsutoyo Corp | Light wave interferometer and length measuring method using light wave interferometer |
| US20050002041A1 (en) * | 2002-01-25 | 2005-01-06 | Mater Michael J. | Object imaging system using changing frequency interferometry method |
| CN2519256Y (en) * | 2002-01-29 | 2002-10-30 | 中国科学院物理研究所 | Bifunction miniature super short laser pulse self correlation measuring apparatus |
| CN1758167A (en) * | 2004-12-31 | 2006-04-12 | 中山大学 | Control system of large stroke nanometer precision location |
Non-Patent Citations (2)
| Title |
|---|
| 基于LED的透射型傅里叶变换光谱仪的研究. 朱健，李俊韬，李鸣，王自鑫，周建英.中山大学学报（自然科学版），第43卷第5期. 2004 |
| 基于LED的透射型傅里叶变换光谱仪的研究. 朱健，李俊韬，李鸣，王自鑫，周建英.中山大学学报（自然科学版），第43卷第5期. 2004 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1837784A (en) | 2006-09-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN100460857C (en) | Fourier spectrometer based on dynamic stable scanning technology | |
| US7193724B2 (en) | Method for measuring thickness of thin film-like material during surface polishing, and surface polishing method and surface polishing apparatus | |
| JP3791620B2 (en) | Scanning monochromator | |
| US6844935B2 (en) | Multi-function opto-electronic detection apparatus | |
| CN1224829C (en) | Differential numerical aperture methods and device | |
| US20080204879A1 (en) | Miniature Lamellar Grating Interferometer Based on Silicon Technology | |
| CN106017519B (en) | A kind of Demodulation System for Fiber Optic Fabry-Perot Sensors and method | |
| WO2016154780A1 (en) | Laser interference wavelength lever-type absolute distance measurement apparatus and method | |
| CN101231239A (en) | System and method for measuring light spectrum bias ellipsoid imaging with changing incidence angle | |
| US5978091A (en) | Laser-bump sensor method and apparatus | |
| US7342664B1 (en) | Scanning double-beam interferometer | |
| CN101231238A (en) | Method and apparatus for regulating light intensity in bias ellipsoid measurement | |
| CN104330147A (en) | Micro-cantilever thermal shock signal measuring apparatus | |
| KR100421427B1 (en) | High precision displacement gauge and variable displacement measuring method used a unit displacement using conforcal theory | |
| CN201000428Y (en) | Varied incident angle spectrum ellipsometric imaging device for nana film surface measurement | |
| CN103697832A (en) | Method of vertical white light scanning interference open-loop control | |
| CN1529123A (en) | Shaping ring light-beam differiential confocal sensor with high space resolution capability | |
| CN110274551B (en) | High-sensitivity surface morphology measuring system based on white light homodyne interference | |
| CN110987864A (en) | Wide-spectrum micro near-infrared spectrometer based on scanning grating micro-mirror | |
| CN203350529U (en) | Micro-electro-mechanical interference platform with closed-loop control system | |
| CN110178005A (en) | Optical splitter, analytical equipment and Wavelength variable light source | |
| CN103185638B (en) | Broadband polarization spectrograph and optical measuring system | |
| CN112945385A (en) | Multi-reflection interference automatic measuring system | |
| CN100514036C (en) | Scanned imagery device of angle type portable surface plasma resonant vibration biochemical analyzer | |
| CN217466175U (en) | Device for measuring diffraction efficiency of efficient diffraction optical element |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090211 Termination date: 20100413 |