CN100454475C - Plasma display screen medium protection film forming apparatus with angle control - Google Patents
Plasma display screen medium protection film forming apparatus with angle control Download PDFInfo
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- CN100454475C CN100454475C CNB2005100418827A CN200510041882A CN100454475C CN 100454475 C CN100454475 C CN 100454475C CN B2005100418827 A CNB2005100418827 A CN B2005100418827A CN 200510041882 A CN200510041882 A CN 200510041882A CN 100454475 C CN100454475 C CN 100454475C
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- angle control
- coating chamber
- siege
- protection film
- plasma display
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Abstract
The present invention relates to a medium protecting film forming device with angle control for a plasma display screen. The present invention comprises a film coating chamber of which the upper part is provided with a base board transmission mechanism and a heater, the opening part thereof is provided with an opening plate, and the inner part thereof is provided with an annular furnace bed; an electron gun is arranged on the wall of the film coating chamber in the corresponding position to the furnace bed, and an angle control device is also arranged in the film coating chamber. Because the present invention adopts the angle control device, the target angle of an evaporated MgO film material can be effectively controlled, the prepared MgO medium protecting film has the advantages of better secondary electron emission coefficient, ion bombardment resistant ability, etc., and thus, the present invention also has the advantages of increased uniformity of the dynamic margin of a plasma display panel, the brightness of the display panel, etc., reduced requirements of the manufacturing uniformity for medium layers, discharging electrodes, baffle walls, etc., improved quality of the display panel, increased work efficiency and reduced production cost.
Description
Technical field
The invention belongs to video and make the field, relate to a kind of film forming device, particularly a kind of formation device of MgO medium protection film of the plasma display panel (PDP) with angle controller.
Background technology
Characteristics such as colour plasma display (PDP:Plasma Display Panel) has that large-screen, slimming, wide visual angle, response are fast, high-resolution and total digitalization are the first-selected display devices of realizing wall-hanging TV and HDTV.Medium protection film is the important component part of color PDP, and evaporation directly contacts with discharge gas on preceding pole plate dielectric layer.The basic functional principle of color PDP is based on the process gas discharge that the medium protection film surface is taken place; the performance of medium protection film and the consistency of performance on the large tracts of land directly influence the performance of PDP; so it is very important to make the high medium protection film of function admirable and consistency of performance.
Chinese patent application file " plasma shows protection membrane formation device and diaphragm formation method " (application number 01137043.2; open May 29 2002 date) a kind of MgO media protection membrane formation device with a plurality of evaporation sources is disclosed; in coating chamber; to treat that plated substrate is placed on the carriage, and move in the horizontal direction.In the process that substrate moves, the heater of portion disposed thereon heats it, for next step plated film is prepared.Be used for evaporation and be filled into four (arrangement of two row, two row formulas) rotating annular sieges to the MgO coating materials of substrate surface; the electron beam of launching from four electron guns is got on the MgO coating materials of annular siege simultaneously; make its evaporation, be deposited on the substrate, form the PDP medium protection film.In addition, for prevent substrate when the plated film because the thermal radiation of evaporation source and excessive temperature raises, be provided with water-cooled open plate at the opening part of coating chamber.Result of study shows that last target (substrate) angle of MgO directly influences the performance of MgO medium protection film, and for making the having at a high speed of large tracts of land PDP substrate, multiple spot evaporation source protection membrane formation device, the last target angle of restriction MgO is very important.And in this application text; just the opening part of coating chamber be provided with restriction MgO on the target angle, the last target angle of MgO changes to a from 0, arrives maximum angle b again; so this device can not be controlled the target angle effectively, make MgO medium protection film performance uniformity can't reach best.
Summary of the invention
For obtained performance uniformity MgO medium protection film preferably; the object of the present invention is to provide a kind of formation device of MgO medium protection film of the plasma display panel (PDP) with angle controller; this device can suitably be controlled the last target angle of the MgO coating materials that evaporates, and obtains the good MgO medium protection film of performance uniformity.
The technical solution adopted in the present invention is; plasma display screen medium protection film with angle control forms device; comprise coating chamber; its top is provided with board transport mechanism and heater; the coating chamber opening part is provided with open plate; annular siege is set in the coating chamber, with the siege corresponding position electron gun is set on the wall of coating chamber, also be provided with angle controller in the coating chamber.
A kind of angle controller provided by the invention comprises support bar, the support bar vertical fixing is in coating chamber, the upper end fixed angle control board of the top of siege, support bar, have the through hole that equates with siege quantity on the angle control board, and through hole is corresponding with the position of siege, and through hole is circle, ellipse or arbitrary polygon.
Another kind of angle controller provided by the invention comprises angle control bucket, angle is controlled bucket and is equated with siege quantity, and is placed on each siege, and angle control bucket is gone up and the perforate of electron gun corresponding position, angle control bucket loam cake is opened the hole, and through hole is circle, ellipse or arbitrary polygon.
The present invention compared with prior art has following advantage:
1. because MgO media protection membrane formation device provided by the invention has adopted angle controller; the last target angle of the MgO coating materials that evaporates is effectively controlled, and the MgO medium protection film for preparing has more performance uniformity (as secondary electron yield, anti-ion bombardment ability etc.).
2. the MgO medium protection film that has better performance uniformity helps increasing the uniformity of the dynamic nargin of plasma display panel and display panel brightness etc., improves the quality of display panel.
3. under the display panel same performance was required, the superperformance uniformity of MgO medium protection film can reduce made inhomogeneity requirement to dielectric layer, sparking electrode and barrier etc., thereby improves their process margin, reduces production costs.
Description of drawings
Fig. 1 is the structural representation of prior art MgO media protection membrane formation device;
Fig. 2 is the structural representation of media protection membrane formation device of the present invention;
Fig. 3 is the shape figure of through hole in the structure shown in Figure 2, and wherein a is circular, and b is oval, and c is a polygon;
Fig. 4 is another structural representation of media protection membrane formation device of the present invention;
Fig. 5 is the shape figure of through hole in the structure shown in Figure 4, and wherein a is circular, and b is oval, and c is a polygon;
Fig. 6 goes up target angle (incident angle) and secondary electron yield than the graph of relation between (secondary electron discharging amount than), and wherein, abscissa is an incident angle, and ordinate is a secondary electron discharging amount ratio;
Among the figure, 1 coating chamber, 2 electron guns, 3 sieges, 4 substrates, 5 carriages, 6 heaters, 7 electron beams, 8 open plate, 9 support bars, 10 angle control boards, 11 through holes, 12 angles control bucket, 13 holes, 14 through holes.
Embodiment
The present invention is described in further detail below in conjunction with accompanying drawing.
A kind of MgO media protection membrane formation device of a plurality of evaporation sources in the prior art that Fig. 1 shows; this device comprises coating chamber 1; the top of coating chamber 1 is provided with board transport mechanism and heater 6; coating chamber 1 opening part is provided with open plate 8; four (arrangement of two row, two row formulas) rotating annular sieges 3 are set in the coating chamber 1, with siege 3 corresponding positions four electron guns 2 are set on the wall of coating chamber 1.
To treat that plated substrate 4 is placed on the carriage 5; and move in the horizontal direction by board transport mechanism; in the process that substrate 4 moves; the heater 6 of portion disposed thereon heats it; for next step plated film is prepared; in coating chamber 1; be used for evaporation and be filled into four (arrangement of two row, two row formulas) rotating annular sieges 3 to the MgO coating materials on substrate 4 surfaces; the electron beam of launching from four electron guns 27 is got to respectively on the MgO coating materials of four annular sieges 3 simultaneously; make its evaporation, be deposited on the substrate 4, form the PDP medium protection film; the setting of open plate 8 in addition, be for prevent substrate 4 when the plated film because the thermal radiation of evaporation source and excessive temperature raises.As can be seen from FIG., the last target angle of MgO changes to a from 0, can also change to maximum angle b, so this device can not control the target angle effectively, thereby makes MgO medium protection film performance uniformity can't reach best.
Fig. 2 is that the plasma display screen medium protection film with angle control of the present invention forms device; this device comprises coating chamber 1; its top is provided with board transport mechanism and heater 6; coating chamber 1 opening part is provided with open plate 8; four (arrangement of two row, two row formulas) rotating annular sieges 3 are set in the coating chamber 1; with siege 3 corresponding positions four electron guns 2 are set on the wall of coating chamber 1; be provided with angle controller in the coating chamber 1; angle controller comprises support bar 9; support bar 9 vertical fixing are in coating chamber 1; the top of siege 3; the upper end fixed angle control board 10 of support bar 9; have four through holes 11 on the angle control board 10, and through hole 11 is corresponding with the position of siege 3.
To treat that plated substrate 4 is placed on the carriage 5, and move in the horizontal direction that in the process that substrate 4 moves, the heater of portion disposed thereon 6 heats it, for next step plated film is prepared by board transport mechanism.In coating chamber 1, be used for evaporation and be filled into four sieges 3 to the MgO coating materials on substrate 4 surfaces, the electron beam of launching from four electron guns 27 is got on the MgO coating materials of siege 3 simultaneously, makes its evaporation, is deposited on the substrate 4, forms the PDP medium protection film.In coating chamber 1; angle control board 10 relies on supporting bracket 9 to support; through hole 11 on the angle control board 10 is used for coating materials to be passed through; because the restriction of supporting bracket 9 and angle control board 10; the last target angle that is evaporated to the MgO coating materials on the substrate 4 is between 0 to a; reduced the last target angle of the MgO coating materials that evaporates, available is the MgO medium protection film uniformly.
Referring to Fig. 3, with siege 3 one to one through hole 11 can be made as circle, ellipse or arbitrary polygon, also available other form constitutes, the size of through hole 11 and shape each other can be identical also can be inequality, with siege 3 can be concentric also can non-concentric arrangement, as long as can reach the purpose of target angle on the restriction coating materials.
The position of angle control board 10 can be higher or lower than open plate 8, also can equal open plate 8, target angle on the maximum of the MgO coating materials that the size that can be by changing through hole 11 and the height adjustment of angle control board 10 evaporate.
Fig. 4 is the another kind of device that forms of plasma display screen medium protection film with angle control of the present invention; the top of coating chamber 1 is provided with board transport mechanism and heater 6; coating chamber 1 opening part is provided with open plate 8; four (arrangement of two row, two row formulas) rotating annular sieges 3 are set in the coating chamber 1; with siege 3 corresponding positions four electron guns 2 are set on the wall of coating chamber 1; be provided with angle controller in the coating chamber 1; angle controller comprises four angle control buckets 12; and be placed on each siege 3; with electron gun 2 corresponding position perforates 13, angle control bucket 12 loam cakes are opened hole 14 on the angle control bucket 12.
To treat that plated substrate 4 is placed on the carriage 5, and move in the horizontal direction that in the process that substrate 4 moves, the heater of portion disposed thereon 6 heats it, for next step plated film is prepared by board transport mechanism.In coating chamber 1; being used for evaporation is filled in four (arrangement of two row, two row formulas) rotating sieges 3 to the MgO coating materials on substrate 4 surfaces; the electron beam of launching from four electron guns 27 is got on the MgO coating materials of four sieges 3 by the hole 13 on the angle control bucket 12 respectively simultaneously; make its evaporation; be deposited on the substrate 4; form the PDP medium protection film; the through hole 14 that angle control bucket 12 loam cakes are opened is used to evaporate passing through of coating materials; because the restriction of angle control bucket 12; the last target angle that is evaporated to the MgO coating materials on the substrate 4 is between 0 to a; reduced the last target angle of MgO coating materials, available is the MgO medium protection film uniformly.
Referring to Fig. 5, with siege 3 one to one through hole 14 be circular, ellipse or arbitrary polygon, also available other form formation, the size of through hole 14 and shape each other can be identical also can be inequality.
As can be seen from Figure 6 secondary electron yield becomes with the last target angle of coating materials, thus on the restriction coating materials target angle performance of MgO medium protection film is improved is very necessary.The present invention has adopted angle controller, will go up the control of target angle within limits, thereby can obtain the good MgO medium protection film of performance uniformity.
Claims (4)
1. the plasma display screen medium protection film that has angle control forms device; comprise coating chamber (1); its top is provided with board transport mechanism and heater (6); coating chamber (1) opening part is provided with open plate (8); annular siege (3) is set in the coating chamber (1); with siege (3) corresponding position electron gun (2) is set on the wall of coating chamber (1); it is characterized in that; described coating chamber also is provided with angle controller in (1); described angle controller comprises support bar (9); support bar (9) vertical fixing is in coating chamber (1); the top of siege (3); the upper end fixed angle control board (10) of support bar (9); have the through hole (11) that equates with siege (3) quantity on the angle control board (10), and through hole (11) is corresponding with the position of siege (3).
2. plasma display screen medium protection film according to claim 1 forms device, it is characterized in that, described through hole (11) is circle, ellipse or arbitrary polygon.
3. plasma display screen medium protection film according to claim 1 forms device; it is characterized in that; described angle controller comprises angle control bucket (12); described angle control bucket (12) equates with siege (3) quantity; and be placed on each siege (3); angle control bucket (12) is gone up and electron gun (2) corresponding position perforate (13), and angle control bucket (12) loam cake is opened hole (14).
4. plasma display screen medium protection film according to claim 3 forms device, it is characterized in that, described through hole (14) is circle, ellipse or arbitrary polygon.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100418827A CN100454475C (en) | 2005-03-31 | 2005-03-31 | Plasma display screen medium protection film forming apparatus with angle control |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100418827A CN100454475C (en) | 2005-03-31 | 2005-03-31 | Plasma display screen medium protection film forming apparatus with angle control |
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| Publication Number | Publication Date |
|---|---|
| CN1702807A CN1702807A (en) | 2005-11-30 |
| CN100454475C true CN100454475C (en) | 2009-01-21 |
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| CNB2005100418827A Expired - Fee Related CN100454475C (en) | 2005-03-31 | 2005-03-31 | Plasma display screen medium protection film forming apparatus with angle control |
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Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102392220A (en) * | 2010-09-30 | 2012-03-28 | 四川虹欧显示器件有限公司 | Vapor deposition device used for forming protective layers of plasma display screen |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002083546A (en) * | 2000-09-08 | 2002-03-22 | Matsushita Electric Ind Co Ltd | Plasma display device and its manufacturing method |
| CN1351193A (en) * | 2000-10-20 | 2002-05-29 | 爱发科股份有限公司 | Apparatus and method for forming protective film on plasma display |
| JP2002212715A (en) * | 2001-01-23 | 2002-07-31 | Matsushita Electric Ind Co Ltd | Method for forming thin film and method for manufacturing plasma display panel |
| JP2003297237A (en) * | 2002-04-04 | 2003-10-17 | Matsushita Electric Ind Co Ltd | Manufacturing method of plasma display panel and manufacturing device of dielectric protecting film |
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2005
- 2005-03-31 CN CNB2005100418827A patent/CN100454475C/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002083546A (en) * | 2000-09-08 | 2002-03-22 | Matsushita Electric Ind Co Ltd | Plasma display device and its manufacturing method |
| CN1351193A (en) * | 2000-10-20 | 2002-05-29 | 爱发科股份有限公司 | Apparatus and method for forming protective film on plasma display |
| JP2002212715A (en) * | 2001-01-23 | 2002-07-31 | Matsushita Electric Ind Co Ltd | Method for forming thin film and method for manufacturing plasma display panel |
| JP2003297237A (en) * | 2002-04-04 | 2003-10-17 | Matsushita Electric Ind Co Ltd | Manufacturing method of plasma display panel and manufacturing device of dielectric protecting film |
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| CN1702807A (en) | 2005-11-30 |
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Granted publication date: 20090121 Termination date: 20110331 |