CN100434642C - Modularized mfg. process factory building for liquid crystal display - Google Patents
Modularized mfg. process factory building for liquid crystal display Download PDFInfo
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- CN100434642C CN100434642C CNB2005101275248A CN200510127524A CN100434642C CN 100434642 C CN100434642 C CN 100434642C CN B2005101275248 A CNB2005101275248 A CN B2005101275248A CN 200510127524 A CN200510127524 A CN 200510127524A CN 100434642 C CN100434642 C CN 100434642C
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Abstract
The invention relates to LCD making procedure direct modularization factory building. It includes many independent and storage buildings. Each the independent building respectively carries out at least one making procedure. The first independent building produces the first set of pollutant. The second is easily effected by the first set of pollutant. Each storage building is set at least one automated conveying and storing system connected with the independent building. In addition the conducted making procedure of each independent building belongs to alien 'pollution-creating source' or/and alien 'sensitive to pollution'.
Description
Technical field
The present invention relates to a kind of production process oriented module factory building that is used for LCD, particularly relate to a kind of LCD that is used to make, and to make characteristic serves as that guiding gives modularization with factory, and can avoid the factory building of cross pollution and other shortcoming between production process.
Background technology
In the constantly progressive high-tech industry of production process, the non-unique factor that causes microelectronic element and circuit defect of fine particle, the cross-contamination issue that is present between different production process becomes another key factor gradually.For example, the film forming production process is subjected to the pollution of organic substance or acidic materials easily and influences yield, and the gold-tinted production process but can produce this organic substance; And, the gold-tinted production process is subject to the influence of temperature, humidity and little vibration and yield is descended, but the film forming production process just is the production process of golf calorific value, therefore, if film forming production process and gold-tinted production process will cause cross pollution when being positioned at the same space.
With the several production process in TFT (TFT) factory is example, the film forming production process is golf calorific value production process, cleanliness factor requirement low (class 10000), and is subject to the pollution of organic substance or acidic materials with regard to degree of purity (gas molecule pollution); The gold-tinted production process is subject to the influence of little vibration and temperature/humidity, temperature/humidity requirement 23 ± 1 or 2 ℃/55% ± 1 or 2%, cleanliness factor is the high-accuracy air-conditioning (class 100 or class10) of higher lustration class and is the generation source of organic substance with regard to the production process characteristic; The etching production process is not subjected to the influence of temperature/humidity, cleanliness factor then to be generation source sour, alkaline matter for the general air-conditioning (class 10000 or 100000) of low lustration class and with regard to the production process characteristic; It is to hang down the general air-conditioning (class 10000 or 100000) of lustration class and then be the source of release of stripper with regard to the production process characteristic that the stripping production process is not subjected to influence, the cleanliness factor of temperature/humidity yet.
Comprehensive above-mentioned notion, if also do not having just different production process to be put a time-out through suitably isolating or handling, the cross pollution between production process must take place, and then yield is produced serious influence.
And with regard to leading to the photoelectricity factory of seeing at present, basically be to split into Array (array), CELL (unit), Color Filter (colour filter) and Module (module) the four operation district that produces extensively, because respectively this production process district all concentrates on all production process in the one production process floor, and TFT (TFT) is healed from generation to generation when high, its substrate is also bigger, therefore has:
One, cross pollution is serious: in same production process district, the cross pollution situation will be serious because of the bigger shape of healing of substrate between production process and the production process, even if carried out isolation, also can and being transmitted also whole causing, airborne those pollutant contacts pollute because of the contact transportation of automation haulage device.
Two, be easy to once burn or suffer serious damage by fume: all concentrate purposes because all production process all reach in a minute floor mode, therefore easily when meeting with fire accidentally, once burn totally or cause serious damage by fume to pollute and can't produce again.Therefore insurance premium also will increase simultaneously.
Three, whole factory's expense and civil engineering cost increase: because of substrate too big, plant area also must strengthen, thereby whole factory expense and civil engineering cost increase, and the duration that the work deal increases the weight of, constructs is also elongated, under the requirement of considering investment and market opportunity, compressed result of duration will be easy to cause bad quality and security incident.
Four, building is too high: new at present TFT (TFT) factory from generation to generation all utilizes the automation haulage device to carry out the production process contact, can store more substrate for asking under unit area, automated handling and warehousing system will become the highest equipment in the full building this moment.Because automated handling and warehousing system place in the same building thing with the production process board is all same, the result only causes for the automated handling and the warehousing system of minority, just building must be chosen high situation again.To waste the unnecessary cost of founding the factory virtually.
Five, the initialization and the operating cost of waste air-conditioning system: owing to will concentrate in the same building thing than the production process of low lustration class and higher lustration class, cause its whole factory all must use the air-conditioning system (that is: high-accuracy air-conditioning) of higher lustration class, can't use corresponding air-conditioning system according to the lustration class of reality, form waste.
Six, the cost of founding the factory is higher: the higher production process of common little vibration demand levels only is confined to some zone.But because of the structural entity of civil engineering considers that the whole district adopts the most harsh design often.This notion is still unlikely under small panel, little plant area situation to have significant impact to the cost of founding the factory, but new substrate from generation to generation becomes big, and it is big that plant area and then becomes, and the cost of founding the factory this moment just has great influence.
Seven, risk and the safety issue that the duration increases arranged: following new generation factory because board is excessive, assembled on site is bound to; Must treat that dust free room completion can remove machine this moment; Finish the duration but excessive building certainly will increase, this will be to forming risk the opportunity of putting goods on the market.And higher from generation to generation, substrate is bigger, and it is also bigger to produce board, with present same floor minority board carrying port is only arranged, and not only hinders the machine program of removing, and also increases safety problem simultaneously, and safety causes anxiety.
Summary of the invention
First technical problem to be solved by this invention is to provide a kind of production process oriented module factory building that is used for LCD, for factory building being divided into the detached building of a plurality of only formulas, its production process demand environment of dividing can not pollute or further have isomorphism type each other is a foundation, and respectively this detached building is implemented at least one production process in most production process and is constituted a module, to avoid the generation of cross pollution, reduce whole factory's expense and civil engineering cost, and can also when accidentally meeting with fire, can avoid once being burnt totally and avoid damage by fume to pollute, and can shorten and rebuild the time, reduce and rebuild cost.Even, can also reduce the cost of founding the factory, the effect that can also have unlikely growth of duration in addition and improve safety by little demand levels of shaking is effectively classified.
Second technical problem to be solved by this invention is to provide a kind of production process oriented module factory building that is used for LCD, have central authorities with one and collect automated handling and warehousing system with distribution function, build into the storage building of only formula, and this storage building is connected between a plurality of detached buildings, can too high problem not arranged in order to satisfy automated handling and warehousing system thereby do not have building.
The 3rd technical problem to be solved by this invention is to provide a kind of production process oriented module factory building that is used for LCD, by dividing in different detached buildings with the production process of higher lustration class than low lustration class, therefore can use corresponding air-conditioning system according to the lustration class of reality, be unlikely the waste that forms initialization and operating cost.
To achieve these goals, the invention provides a kind of production process oriented module factory building that is used for LCD, its characteristics are, this factory building comprises: first detached building, for implementing at least one production process in a plurality of production process, the production process that this first detached building is implemented can produce first group of pollutant; Second detached building, for implementing at least one production process in a plurality of production process, the production process that this second detached building is implemented is subject to the pollution of this first group of pollutant and influences yield; And a plurality of storage buildings, at least be provided with one in this storage building and have that central authorities collect and the automated handling and the warehousing system of distribution function, this storage building then is connected in by the automation haulage device and makes production process coherent between a plurality of these first and/or second detached buildings; Wherein, the production process that this first or second detached building is implemented does not repeat each other, and belongs to different pollution-creating source or different sensitive to pollution respectively.
The above-mentioned production process oriented module factory building that is used for LCD, its characteristics are, also comprise one the 3rd detached building, it is for implementing at least one production process in a plurality of production process, the production process that the 3rd detached building is implemented uses general air-conditioning or the instructions for use high-accuracy air-conditioning than high-cleanness, high, the production process that described first detached building is implemented then instructions for use than the high-accuracy air-conditioning or the general air-conditioning of high-cleanness, high.
The above-mentioned production process oriented module factory building that is used for LCD, its characteristics are that the 3rd detached building also is connected with described storage building by the automation haulage device.
The above-mentioned production process oriented module factory building that is used for LCD, its characteristics are, also comprise a plurality of other detached buildings, this other detached building is also implemented at least one production process in a plurality of production process respectively and is not repeated, other detached building is also divided according to the dividing mode of described first and second detached building, and the production process that this other detached building is implemented belongs to different pollution-creating source or different sensitive to pollution respectively.
The above-mentioned production process oriented module factory building that is used for LCD, its characteristics are that this other detached building also is connected with described storage building by the automation haulage device.
The above-mentioned production process oriented module factory building that is used for LCD, its characteristics are, also be connected with a storage building between any a plurality of other detached buildings in this other detached building, this storage building also is connected in the described production process that makes between a plurality of other detached buildings arbitrarily by the automation haulage device and links up.
The above-mentioned production process oriented module factory building that is used for LCD, its characteristics are, the production process that this first detached building and/or second detached building are implemented must further have the production process demand environment of isomorphism type.
The above-mentioned production process oriented module factory building that is used for LCD, its characteristics are that this automated handling and warehousing system comprise a plurality of storage bins and a plurality of Handling device.
The above-mentioned production process oriented module factory building that is used for LCD, its characteristics are that this storage building is the building of one only formula.
Effect of the present invention is as follows:
One, avoid cross pollution: by factory building 100 being divided into a plurality of detached buildings (for example figure number 1,2,3), and its production process demand environment of dividing can not pollute or further have isomorphism type each other is foundation, to avoid the generation of cross pollution.
Two, avoid once burning or meeting with serious damage by fume: by factory building 100 is divided into a plurality of detached buildings,, also has and to avoid once being burnt totally or avoid causing serious damage by fume to pollute and the effect that can't produce again even if when therefore meeting with fire accidentally.
Three, whole factory's expense and civil engineering cost is unlikely increases: by adopting the way of most detached buildings, reducing the building size, whole factory's expense and civil engineering cost is unlikely increases, and do not compress the duration.
Four, avoid building too high: automated handling and warehousing system by will this only formula be connected between most detached buildings, therefore, only there is the height of this storage building 4 higher with automated handling and warehousing system 41, can be and do not have that detached building (1～3 etc.) is whole because this automated handling and warehousing system 41 and too high problem.
Five, the avoid waste initialization and the operating cost of air-conditioning system: by dividing in different detached buildings with the production process of higher lustration class than low lustration class, therefore can use corresponding air-conditioning system according to the lustration class of reality, be unlikely the waste that forms initialization and operating cost.
Six, reduce the cost of founding the factory: divide a notion by production process, little demand levels of shaking effectively can be classified and react on the fabric structure, thereby effectively reduce the cost of founding the factory.
Seven, unlikely growth of duration and can improve safety:,, increase safety, and can shorten simultaneously and finish the duration can lower the construction complexity by adopting the way of many detached buildings.And most detached buildings have most board carrying ports relatively, remove motor speed thereby increase, and improve and remove the machine safety, especially can also quicken the time-histories of test running.
Describe the present invention below in conjunction with the drawings and specific embodiments, but not as a limitation of the invention.
Description of drawings
Fig. 1 is the schematic top plan view of production process oriented module factory building of the present invention.
Wherein, Reference numeral:
The 100-factory building
1-first detached building
2-second detached building
3-the 3rd detached building
The 4-building of storing in a warehouse
41-automated handling and warehousing system
5-automation haulage device
The specific embodiment
The present invention is providing a kind of production process oriented module factory building that is used for LCD.
See also shown in Figure 1ly, be the embodiment of the thin film transistor (TFT) production process (Array) that is used to make LCD in this factory building, division is as follows.
Should implement to have comprised production process such as film forming, gold-tinted, etching and stripping in order to the factory building 100 of Production Example such as TFT-LCD (TFT LCD) LCD.
Wherein, the film forming production process is the golf calorific value production process, and its cleanliness factor requires low (class10000), and is subject to the pollution of organic substance or acidic materials with regard to degree of purity, and in other words, it is one " sensitive to pollution person ".
The gold-tinted production process is subject to the influence (to little vibration and temperature/humidity sensitive) of little vibration and temperature/humidity, its cleanliness factor is the high-accuracy air-conditioning (class 100 or class10) of higher lustration class, and with regard to the production process characteristic, be the generation source of organic substance, in other words, it is one " pollution-creating source ".
The etching production process is not subjected to the influence of temperature/humidity, and its cleanliness factor is the general air-conditioning (class 10000 or 100000) of low lustration class, and is to change speech in the generation source of acid, alkaline matter with regard to the production process characteristic, and it is one " pollution-creating source ".
The stripping production process is not subjected to the influence of temperature/humidity, and its cleanliness factor is the general air-conditioning (class 10000 or 100000) of low lustration class, then is the source of release of stripper with regard to the production process characteristic, and in other words, it also is one " pollution-creating source ".
And just the situation of cross pollution takes place, and the production process that the vulnerable to pollution material pollutes, the production process that should avoid participant to produce these pollutants concentrates in together, and so draws first restrictive condition.Moreover the production process that belongs to high-accuracy air-conditioning can not concentrate in together with the production process that only belongs to general air-conditioning again, so draws second restrictive condition.And the production process that can concentrate in together in this production process also need have the production process demand environment of isomorphism type, and this is the 3rd restrictive condition.
At least one production process in implementing this production process of first detached building 1 wherein, for example comprise gold-tinted, etching and stripping production process and constitute first module, and the production process that this first detached building 1 is implemented can produce first group of pollutant, for example organic substance or acid, alkaloid substance etc.
2 at least one production process in implementing this production process of second detached building wherein, and the production process of implementing with second detached building does not repeat, for example comprise the film forming production process and constitute second module, and the production process that this second detached building 2 is implemented is subject to the pollution of above-mentioned first group of pollutant and influences yield.
If in the production process of in first detached building 1, being implemented, high-accuracy air-conditioning and general air-conditioning have been mixed again, for example only belong to the etching and the stripping production process of general air-conditioning and be not suitable for and the gold-tinted production process that belongs to high-accuracy air-conditioning concentrates in together, therefore this etching and stripping production process that belongs to general air-conditioning is then changed into the 3rd detached building 3 interior enforcements wherein and is constituted the 3rd module, and first detached building 1 that can constitute first module only implements to belong to the gold-tinted production process of high-accuracy air-conditioning, different air-conditioning grades is divided respectively in different detached buildings, and be unlikely waste.
Wherein, except being implemented as the film production operation, also implement to be unlikely the cleaning and the dry ecthing production process of cross pollution in second detached building 2; Then implementing wet etching and stripping production process in the 3rd detached building 3.The above-mentioned production process of respectively being implemented between this first, second, third detached building does not repeat each other, and respectively the production process implemented of this first, second, third detached building also adheres to different " pollution-creating source " or different " sensitive to pollution person " separately.
Therefore, after dividing according to first～the 3rd above-mentioned restrictive condition, a plurality of production process of being implemented in arbitrary detached building, all belong to isomorphism type, and the problem of cross pollution can not take place, in the present embodiment, certain utmost point is beneficial to the carrying out of the thin film transistor (TFT) production process (Array) of LCD.
See also shown in Figure 1, the storage building 4 of this only formula is linked between first, second, third detached building by automation haulage device 5, automated handling in this storage building 4 and warehousing system 41 are playing the part of the role that central authorities collect and distribute, so that production process is linked up.Wherein, this automated handling and warehousing system 41 comprise a plurality of storage bins and a plurality of Handling device (not indicating figure number).
Based on above-mentioned theory, same cross pollution situation also may betide between CELL (unit) and ColorFilter (colour filter) production process, therefore, the notion of " building distinctly gives only detached building that changes into according to different production process characteristics; again by also being linked between this detached building for the storage building 4 of only change " also can correspondingly be used.
In the detached building, if when also having a plurality of other detached building except the first～three detached building, other detached building can be by automation haulage device 5 with above-mentioned storage building 4 be connected except also, can also link between any a plurality of other detached buildings in this other detached building has another storage building, and this another storage building also is linked to by automation haulage device 5 production process is linked up.
Advantage of the present invention is as follows:
One, avoid cross pollution: by factory building 100 being divided into a plurality of detached buildings (for example figure number 1,2,3), and its production process demand environment of dividing can not pollute or further have isomorphism type each other is foundation, to avoid the generation of cross pollution.
Two, avoid once burning or meeting with serious damage by fume: by factory building 100 is divided into a plurality of detached buildings,, also has and to avoid once being burnt totally or avoid causing serious damage by fume to pollute and the effect that can't produce again even if when therefore meeting with fire accidentally.
Three, whole factory's expense and civil engineering cost is unlikely increases: by adopting the way of most detached buildings, reducing the building size, whole factory's expense and civil engineering cost is unlikely increases, and do not compress the duration.
Four, avoid building too high: automated handling and warehousing system by will this only formula be connected between most detached buildings, therefore, only there is the height of this storage building 4 higher with automated handling and warehousing system 41, can be and do not have that detached building (1～3 etc.) is whole because this automated handling and warehousing system 41 and too high problem.
Five, the avoid waste initialization and the operating cost of air-conditioning system: by dividing in different detached buildings with the production process of higher lustration class than low lustration class, therefore can use corresponding air-conditioning system according to the lustration class of reality, be unlikely the waste that forms initialization and operating cost.
Six, reduce the cost of founding the factory: divide a notion by production process, little demand levels of shaking effectively can be classified and react on the fabric structure, thereby effectively reduce the cost of founding the factory.
Seven, unlikely growth of duration and can improve safety:,, increase safety, and can shorten simultaneously and finish the duration can lower the construction complexity by adopting the way of many detached buildings.And most detached buildings have most board carrying ports relatively, remove motor speed thereby increase, and improve and remove the machine safety, especially can also quicken the time-histories of test running.
Certainly; the present invention also can have other various embodiments; under the situation that does not deviate from spirit of the present invention and essence thereof; those of ordinary skill in the art can make various corresponding changes and distortion according to the present invention, but these corresponding changes and distortion all should belong to the protection domain of claim of the present invention.
Claims (8)
1, a kind of production process oriented module factory building that is used for LCD is characterized in that this factory building comprises:
First detached building, for implementing at least one production process in a plurality of production process, the production process that this first detached building is implemented can produce first group of pollutant;
Second detached building, for implementing at least one production process in a plurality of production process, the production process that this second detached building is implemented is subject to the pollution of this first group of pollutant and influences yield; And
A plurality of storage buildings, at least be provided with one in this storage building and have that central authorities collect and the automated handling and the warehousing system of distribution function, this storage building then is connected in by the automation haulage device and makes production process coherent between a plurality of these first and/or second detached buildings;
Wherein, the production process that this first or second detached building is implemented does not repeat each other, and belongs to different pollution-creating source or different sensitive to pollution respectively.
2, the production process oriented module factory building that is used for LCD according to claim 1, it is characterized in that, also comprise one the 3rd detached building, it is for implementing at least one production process in a plurality of production process, the production process that the 3rd detached building is implemented uses general air-conditioning or the instructions for use high-accuracy air-conditioning than high-cleanness, high, the production process that described first detached building is implemented then instructions for use than the high-accuracy air-conditioning or the general air-conditioning of high-cleanness, high.
3, the production process oriented module factory building that is used for LCD according to claim 2 is characterized in that the 3rd detached building also is connected with described storage building by the automation haulage device.
4, the production process oriented module factory building that is used for LCD according to claim 1, it is characterized in that, also comprise a plurality of other detached buildings, this other detached building is also implemented at least one production process in a plurality of production process respectively and is not repeated, other detached building is also divided according to the dividing mode of described first and second detached building, and the production process that this other detached building is implemented belongs to different pollution-creating source or different sensitive to pollution respectively.
5, the production process oriented module factory building that is used for LCD according to claim 4 is characterized in that this other detached building also is connected with described storage building by the automation haulage device.
6, the production process oriented module factory building that is used for LCD according to claim 1, it is characterized in that, the production process that this first detached building and/or second detached building are implemented must further have the production process demand environment of isomorphism type.
7, the production process oriented module factory building that is used for LCD according to claim 1 is characterized in that this automated handling and warehousing system comprise a plurality of storage bins and a plurality of Handling device.
8, the production process oriented module factory building that is used for LCD according to claim 1 is characterized in that this storage building is the building of one only formula.
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| CNB2005101275248A CN100434642C (en) | 2005-12-05 | 2005-12-05 | Modularized mfg. process factory building for liquid crystal display |
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| CNB2005101275248A CN100434642C (en) | 2005-12-05 | 2005-12-05 | Modularized mfg. process factory building for liquid crystal display |
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| CN100434642C true CN100434642C (en) | 2008-11-19 |
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| CN101382237B (en) * | 2007-09-07 | 2012-02-08 | 亚威朗光电(中国)有限公司 | LED energy-conserving photoelectric city |
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| JPH1096333A (en) * | 1996-09-24 | 1998-04-14 | Mitsubishi Electric Corp | Clean room |
| JPH11145022A (en) * | 1997-11-13 | 1999-05-28 | Matsushita Electron Corp | Facility for manufacturing semiconductor |
| CN1081388C (en) * | 1996-05-08 | 2002-03-20 | 财团法人工业技术研究院 | Semiconductor modular making unit system |
| CN1353233A (en) * | 2000-11-08 | 2002-06-12 | 夏普公司 | Ultra clean room for semi conductor device |
| CN1135331C (en) * | 1996-09-20 | 2004-01-21 | 三菱电机株式会社 | Punification room |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1106887A (en) * | 1993-09-14 | 1995-08-16 | 塞米泰克股份有限公司 | Integrated building and conveying structure for manufacturing under ultraclean conditions |
| CN1081388C (en) * | 1996-05-08 | 2002-03-20 | 财团法人工业技术研究院 | Semiconductor modular making unit system |
| CN1135331C (en) * | 1996-09-20 | 2004-01-21 | 三菱电机株式会社 | Punification room |
| JPH1096333A (en) * | 1996-09-24 | 1998-04-14 | Mitsubishi Electric Corp | Clean room |
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Address after: Fonda street Suzhou Industrial Park in Jiangsu province 215000 No. 33 Patentee after: L&K Engineering (Suzhou) Co., Ltd. Address before: Fonda street Suzhou Industrial Park in Jiangsu province 215000 No. 33 Patentee before: Engineering (Suzhou) Co., Ltd. |