CN100429745C - 半导体制造设备控制系统及其方法 - Google Patents
半导体制造设备控制系统及其方法 Download PDFInfo
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- CN100429745C CN100429745C CNB2005101263984A CN200510126398A CN100429745C CN 100429745 C CN100429745 C CN 100429745C CN B2005101263984 A CNB2005101263984 A CN B2005101263984A CN 200510126398 A CN200510126398 A CN 200510126398A CN 100429745 C CN100429745 C CN 100429745C
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CNB2005101263984A CN100429745C (zh) | 2005-12-08 | 2005-12-08 | 半导体制造设备控制系统及其方法 |
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CNB2005101263984A CN100429745C (zh) | 2005-12-08 | 2005-12-08 | 半导体制造设备控制系统及其方法 |
Publications (2)
Publication Number | Publication Date |
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CN1851587A CN1851587A (zh) | 2006-10-25 |
CN100429745C true CN100429745C (zh) | 2008-10-29 |
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CNB2005101263984A Active CN100429745C (zh) | 2005-12-08 | 2005-12-08 | 半导体制造设备控制系统及其方法 |
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Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102007035158A1 (de) * | 2007-07-25 | 2009-01-29 | Endress + Hauser Flowtec Ag | Verfahren zum Bedienen eines Feldgerätes der Automatisierungstechnik |
CN101419449B (zh) * | 2007-10-23 | 2011-01-12 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 一种工厂自动化接口的实现方法和系统 |
CN103186420A (zh) * | 2011-12-31 | 2013-07-03 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 集群设备控制系统及其调度方法 |
CN104166378B (zh) * | 2013-05-17 | 2017-08-04 | 上海和辉光电有限公司 | Amoled厂物料cim自动管理系统的管理方法 |
CN110629207B (zh) * | 2019-11-01 | 2024-02-20 | 吉姆西半导体科技(无锡)股份有限公司 | 全自动化学镍钯金生产设备控制系统 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1280343A (zh) * | 1999-06-30 | 2001-01-17 | 株式会社东芝 | 半导体处理控制系统及控制方法和记录其处理的记录媒体 |
CN1402879A (zh) * | 2000-09-28 | 2003-03-12 | 株式会社东芝 | 制造设备、制造设备的控制方法、制造设备的控制系统、其中记录有制造设备的控制程序的计算机可读记录介质及制造设备的控制程序 |
CN1493511A (zh) * | 2002-10-28 | 2004-05-05 | 台湾积体电路制造股份有限公司 | 自动化物料传输系统及方法 |
US6748280B1 (en) * | 2001-10-23 | 2004-06-08 | Brooks Automation, Inc. | Semiconductor run-to-run control system with state and model parameter estimation |
US20050187649A1 (en) * | 2002-09-30 | 2005-08-25 | Tokyo Electron Limited | Method and apparatus for the monitoring and control of a semiconductor manufacturing process |
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2005
- 2005-12-08 CN CNB2005101263984A patent/CN100429745C/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1280343A (zh) * | 1999-06-30 | 2001-01-17 | 株式会社东芝 | 半导体处理控制系统及控制方法和记录其处理的记录媒体 |
CN1402879A (zh) * | 2000-09-28 | 2003-03-12 | 株式会社东芝 | 制造设备、制造设备的控制方法、制造设备的控制系统、其中记录有制造设备的控制程序的计算机可读记录介质及制造设备的控制程序 |
US6748280B1 (en) * | 2001-10-23 | 2004-06-08 | Brooks Automation, Inc. | Semiconductor run-to-run control system with state and model parameter estimation |
US20050187649A1 (en) * | 2002-09-30 | 2005-08-25 | Tokyo Electron Limited | Method and apparatus for the monitoring and control of a semiconductor manufacturing process |
CN1493511A (zh) * | 2002-10-28 | 2004-05-05 | 台湾积体电路制造股份有限公司 | 自动化物料传输系统及方法 |
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Publication number | Publication date |
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CN1851587A (zh) | 2006-10-25 |
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Owner name: BEIFANG MICROELECTRONIC BASE EQUIPMENT PROCES RESE Free format text: FORMER OWNER: BEIJING YUANHE ELECTRONIC TECHNOLOGY CO., LTD. Effective date: 20110311 |
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Address after: 100176 8 Wenchang Avenue, Beijing economic and Technological Development Zone, Beijing Patentee after: Beijing North China microelectronics equipment Co Ltd Address before: 100015 Jiuxianqiao East Road, Chaoyang District, Chaoyang District, Beijing Patentee before: Beifang Microelectronic Base Equipment Proces Research Center Co., Ltd., Beijing |
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