CN100428489C - Organic light emitting diode and its producing method - Google Patents
Organic light emitting diode and its producing method Download PDFInfo
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- CN100428489C CN100428489C CNB2006101221774A CN200610122177A CN100428489C CN 100428489 C CN100428489 C CN 100428489C CN B2006101221774 A CNB2006101221774 A CN B2006101221774A CN 200610122177 A CN200610122177 A CN 200610122177A CN 100428489 C CN100428489 C CN 100428489C
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Abstract
This invention discloses a full color organic LED, in which, the RGB light emission layer in the organic function layer is composed of a same kind of light emission material doped with different object light emission materials, the cavity transmission function and an electronic transmission function layer are in the same thickness, and the manufacturing method of the OLED includes: 1, finishing the evaporation of the cavity transmission function layer at one run on a base plate with a large open-end mask, 2, evaporating the RGB light emission function layer with fine masks separately, 3, evaporating the electronic transmission function layer at one run with a large open-end mask, 4, evaporating the back electrode with large open-end mask, 5, connecting the base plate with a package cover with a drier with water and oxygen absorption function.
Description
Technical field
The present invention relates to a kind of Organic Light Emitting Diode, especially relate to a kind of full-color and white organic LED and preparation method thereof.
Background technology
Organic Light Emitting Diode (be called for short OLED) is emerging a kind of flat-panel monitor at present, and because of it has active illuminating, plurality of advantages such as the contrast height can slimming, and response speed is fast is acknowledged as the main force of display of future generation.The structure of Organic Light Emitting Diode OLED generally comprises: substrate, anode, negative electrode and organic function layer, its principle of luminosity be just at the extremely thin multilayer organic material of 1,20 evaporation of former and later two electrodes, logical dc powered and luminous.The organic function layer of Organic Light Emitting Diode OLED generally is made of three functional layers, is respectively hole transport functional layer (being called for short HTL), light emitting functional layer (being called for short EML), electric transmission functional layer (being called for short ETL).Each functional layer can be one deck, and perhaps more than one deck, for example the hole transport functional layer can be subdivided into hole injection layer and hole transmission layer sometimes; Electron transport material can be subdivided into electron transfer layer and electron injecting layer, but its function is close, so be referred to as the hole transport functional layer, the electric transmission functional layer.
The manufacture method of Full-color OLED variegates and considers mating plate method, three kinds of modes of look transformation approach based on RGB (being called for short R, G, B) three looks independent luminescence method arranged side by side, white light at present, wherein redgreenblue independent luminescence method arranged side by side is the most potential, practical application is maximum, and its manufacture method is the luminescent material that RGB selects different subjects and object for use.Because luminescent material difference, in order to allow RGB device efficiency and life-span all reach optimum efficiency, have to adopt material difference or other different functional layers of thickness, the device of different structure, Full-color OLED is made flow chart as Fig. 1, when making, need distinguish three hole transport functional layers 11 arranged side by side of evaporation RGB device, 14,17, three light emitting functional layer 12,15 arranged side by side, 18, three electric transmission functional layers 13 arranged side by side, 16,19, the processing procedure complexity, the defective that produces during making is many, and yields is low.
Summary of the invention
The object of the present invention is to provide a kind ofly can allow Organic Light Emitting Diode efficient and life-span reach best, make simpler novel full-color or white organic LED simultaneously; Another object of the present invention is to provide the manufacture method of above-mentioned novel full-color Organic Light Emitting Diode.
To achieve these goals, the present invention can realize by following technical measures: a kind of full-color Organic Light Emitting Diode, mainly form by negative and positive two electrodes and the organic function layer between negative and positive two electrodes, wherein organic function layer comprises three hole transport functional layers arranged side by side of RGB, three light emitting functional layer arranged side by side of RGB, three electric transmission functional layers arranged side by side of RGB, three independent light emitting functional layer of RGB all adopt with a kind of material of main part, the different object luminescent materials of the corresponding doping of each light emitting functional layer.
Described RGB three hole transport functional layers arranged side by side adopt once evaporation simultaneously, and three electric transmission functional layers arranged side by side of RGB adopt once evaporation simultaneously, and hole transport functional layer and electric transmission functional layer have same material and same thickness.
The electroluminescent visible light main peak of the main body of described light emitting functional layer material of main part is less than 480nm, and energy gap mixes and launches the luminescent material of different objects in 400～700nm wave-length coverage at 2.8ev～4ev.
The weight ratio of described light emitting functional layer guest materials and material of main part is between 0.1%～10%, and object can be a kind of or more than one.
Described light emitting functional layer material of main part also mixes a kind of secondary main body of or more than one energy delivery effects, and the weight ratio of secondary main body in hybrid agent is between 20%～70%.
The above-mentioned full-color method of organic light emitting diodes of a kind of making may further comprise the steps successively:
A), complete transparent before on the clean substrate of electrode pattern, insulating barrier and cathode isolation layer, once finish the evaporation of hole transport functional layer with big opening mask;
B), three light emitting functional layer of RGB are distinguished evaporation with meticulous mask;
C), adopt big opening mask once to finish the evaporation of electric transmission functional layer;
D), with big opening mask evaporation rear electrode;
E), at last the substrate that has plated film is connected with the cap of packaging plastic with the drier that has suction oxygen uptake effect, carry out the anti-oxygen of waterproof and encapsulate.
A kind of white organic LED, mainly form by negative and positive two electrodes and the organic function layer between negative and positive two electrodes, wherein organic function layer comprises hole transport functional layer, red blue double-deck stack or RGB three stacked light emitting functional layer, the electric transmission functional layers of adding, described red blue double-deck stack or the RGB three stacked light emitting functional layer that add all adopt with a kind of material of main part the different object luminescent materials of the corresponding doping of each light emitting functional layer.The electroluminescent visible light main peak of described light emitting functional layer material of main part is less than 480nm, and energy gap is at 2.8ev～4ev, and the luminescent material of different objects in 400～700nm wave-length coverage is launched in the corresponding doping of each light emitting functional layer.
The present invention adopts with the material of main part of a kind of luminescent material as each light emitting functional layer, and RGB RGB three primary colors device is to adopt close structure like this, makes the decay of three coloured light consistent, and the device white balance is good, prolongs the life-span of full-color device.When making, wherein three of RGB RGB hole transport functional layer HTL and three electric transmission functional layer ETL need not distinguish evaporation, once finish, only the evaporation of three light emitting functional layer RGB-EML of RGB is for finishing respectively, processing procedure than general full-color device is simpler, save organic material, reduce device defects, greatly reduce production cost.The present invention also is applicable to white light parts.
Description of drawings
Fig. 1 is a prior art Full-color OLED production order schematic flow sheet;
Fig. 2 is a Full-color OLED production order schematic flow sheet of the present invention.
Embodiment
The full-color Organic Light Emitting Diode of the present invention, mainly form by negative and positive two electrodes and the organic function layer between negative and positive two electrodes, wherein organic function layer comprises hole transport functional layer, three light emitting functional layer of RGB, electric transmission functional layer, three independent light emitting functional layer of above-mentioned RGB all adopt with a kind of material of main part, the electroluminescent visible light main peak of material of main part is less than 480nm, energy gap is at 2.8ev～4ev, and the luminescent material of different objects in 400～700nm wave-length coverage is launched in the corresponding doping of each light emitting functional layer; The weight ratio of each light emitting functional layer guest materials and material of main part is between 0.1%～10%, and object can be a kind of or more than one.Above-mentioned hole transport functional layer and electric transmission functional layer have same material and same thickness condition.
Because energy transfer efficiency was low when big energy gap main body was launched little energy light, energy bite between the subject and object is big, in order to improve luminous efficiency, can add a kind of in each light emitting functional layer or more than one energy delivery materials as secondary main body, secondary main body energy gap will be between subject and object, as the energy delivery person between the subject and object, also can not adopt secondary main body; Main body and secondary main body are evenly mixed, and the weight ratio of secondary main body in hybrid agent is generally between 20%～70%.
Above-mentioned Full-color OLED is made flow chart as shown in Figure 2, and its steps in sequence is as follows:
A), carry out transparent before on the clean substrate 10 of electrode pattern 1, insulating barrier 2 and cathode isolation layer 3, once finish the evaporation of hole transport functional layer simultaneously with big opening mask 5;
B), the light emitting functional layer of RGB RGB is distinguished evaporations with meticulous mask 4;
C), adopt big opening mask 5 once to finish the evaporation of electric transmission functional layer simultaneously;
D), with big opening mask 6 evaporation rear electrodes 20;
E), at last the substrate that has plated film is connected with the cap 9 of packaging plastic 7 with the drier 8 that has suction oxygen uptake effect, carry out the anti-oxygen of waterproof and encapsulate 21, prevent component failure.
The present invention is applied in the processing procedure of dot matrix resolution 96 * 64 * RGB Full-color OLED screen, and the RGB pixel size is identical, all is 0.07mm * 0.21mm.The material of selecting for use in this example has: hole mobile material HT1 and electron transport material GH1 (from Kodak), the same material of main part of RGB-EML is selected TC1556 (from the brilliant suitable company in Taiwan) for use, red secondary material of main part YD1 and red object luminescent material RD3 (from Kodak), green object luminescent material TC1733 and blue guest material TC1757 (from the brilliant suitable company in Taiwan).
Manufacturing process is: select glass substrate for use, with tin indium oxide (ITO) as preceding electrode, make ITO pattern 1, insulating barrier 2, electrode isolation layers 3 successively with photoetching process, the glass substrate of doing good pattern with examples such as oxygen cleaning after, in the high-vacuum apparatus more than vacuum degree is held in the palm greater than 5 * 10-6, earlier with big opening mask 5 evaporation HTL functional layers, thickness 80 nanometer HT1.Use meticulous mask 4 and substrate ± 5 micron high accuracy contraposition then, thick 50 mixed nanometers of evaporation have the emitting red light functional layer R-EML of secondary main body YD1 respectively, and YD1 and TC1556 weight ratio are 2: 3, the RD3 of doping weight ratio 0.5%; Thickness 30 nano green light emitting functional layer G-EML, TC1556 doping weight ratio is 8% TC1733; Thickness 35 nanometer blue-light-emitting functional layer B-EML, TC1556 doping weight ratio is 3% TC1757; Main body, secondary main body, object adopt the method for steaming altogether evenly to mix.Then with big opening mask evaporation thickness 20 nanometer ETL functional layer GH1, evaporation rear electrode: 1 nano-lithium fluoride and 200 nano high purity aluminium.In the environment of pure nitrogen gas, encapsulate at last.The device detection data are as follows:
From above data as can be seen, under same current density, voltage is approaching, illustrates that the RGB device resistance is approaching, efficient height, the white light CIE white color coordinate (0.33,0.33) that is near the mark.
RGB among the present invention selects for use with a kind of main body and does light emitting functional layer, also be fit to be applied in the making of white organic LED device, the light emitting functional layer of white light parts is made R, B double-deck stack light emitting functional layer or R, G, the B three stacked light emitting functional layer that add, lighting function layer main body luminescent material is all selected commaterial TC1556 for use, it is luminescent layer guest materials difference, used material of main part, and the ratio between the main body, secondary main body, object is identical with full-color organic light emitting diode device.Two luminescent layer white organic LED device architectures of this example are: HT1 (thickness 80nm)/TC1556:40%YD1:0.5%RD3 (thickness 15nm)/TC1556:2%TC1757 (thickness 20nm)/GH1 (thickness 20nm)/lithium fluoride (thickness 1nm)/aluminium (thickness 200nm); The Organic Light Emitting Diode white light parts structure of three luminescent layers is: HT1 (thickness 80nm)/TC1556:40%YD1:0.5%RD3 (thickness 10nm)/TC1556:5%TC1733 (thickness 15nm)/TC1556:2%TC1757 (thickness 10nm)/GH1 (thickness 20nm)/lithium fluoride (thickness 1nm)/aluminium (thickness 200nm).The gained white light parts is excellent in efficiency not only, and the life-span is long.
Claims (6)
1, a kind of full-color Organic Light Emitting Diode, mainly form by negative and positive two electrodes and the organic function layer between negative and positive two electrodes, wherein organic function layer comprises three hole transport functional layers arranged side by side of RGB, three light emitting functional layer arranged side by side of RGB and three electric transmission functional layers arranged side by side of RGB, it is characterized in that: three independent light emitting functional layer of RGB all adopt with a kind of material of main part, the different object luminescent materials of the corresponding doping of each light emitting functional layer.
2, full-color Organic Light Emitting Diode according to claim 1, it is characterized in that: three hole transport functional layers arranged side by side of described RGB are once the functional layer that the while evaporation forms, RGB three electric transmission functional layers arranged side by side are once the functional layer that the while evaporation forms, and hole transport functional layer and electric transmission functional layer are two functional layers with same material and same thickness condition.
3, full-color Organic Light Emitting Diode according to claim 1, it is characterized in that: the electroluminescent visible light main peak of described light emitting functional layer material of main part is less than 480nm, energy gap is between 2.8ev～4ev, and the different object luminescent materials in 400～700nm wave-length coverage are launched in the corresponding doping of each light emitting functional layer.
4, full-color Organic Light Emitting Diode according to claim 1 is characterized in that: the weight ratio of described light emitting functional layer guest materials and material of main part is between 0.1%～10%, and object is a kind of or more than one.
5, full-color Organic Light Emitting Diode according to claim 1, it is characterized in that: described light emitting functional layer material of main part also mixes a kind of or more than one have the secondary main body of energy delivery effect, and the weight ratio of secondary main body in hybrid agent is between 20%～70%.
6, a kind of manufacture method of full-color Organic Light Emitting Diode is characterized in that: may further comprise the steps:
A), complete transparent before on the clean substrate (10) of electrode pattern (1), insulating barrier (2) and cathode isolation layer (3), once finish the evaporation of hole transport functional layer with big opening mask (5);
B), three light emitting functional layer of RGB are distinguished evaporation with meticulous mask (4);
C), adopt big opening mask (5) once to finish the evaporation of electric transmission functional layer;
D), with big opening mask (6) evaporation rear electrode (20);
E), at last the substrate that has plated film is connected with the cap (9) of packaging plastic (7) with the drier (8) that has suction oxygen uptake effect, carry out the anti-oxygen of waterproof and encapsulate (21).
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| CN105154823B (en) * | 2015-09-07 | 2017-12-08 | 信利（惠州）智能显示有限公司 | Mask plate and preparation method thereof is deposited |
| CN107275514B (en) * | 2017-06-15 | 2018-12-18 | 京东方科技集团股份有限公司 | A kind of OLED device and preparation method thereof, display device |
| CN109671854B (en) * | 2018-12-05 | 2020-09-08 | 武汉华星光电半导体显示技术有限公司 | Display device, organic electroluminescent display device and method of manufacturing the same |
| CN110034248B (en) * | 2019-04-17 | 2021-09-03 | 京东方科技集团股份有限公司 | Mask equipment, method for preparing OLED device and method for preparing OLED display panel |
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| US20030184217A1 (en) * | 2002-03-26 | 2003-10-02 | Semiconductor Energy Laboratory Co., Ltd. | Light emitting device and method of manufacturing the same |
| US20040217697A1 (en) * | 2003-05-01 | 2004-11-04 | Kwan-Hee Lee | High efficiency organic electroluminescent display and method for fabricating the same |
| CN1633222A (en) * | 2004-11-26 | 2005-06-29 | 信利半导体有限公司 | A white light organic electroluminescent display device |
| US20050140275A1 (en) * | 2003-12-29 | 2005-06-30 | L.G.Philips Lcd Co. Ltd. | Organic electroluminescence device |
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| US20030184217A1 (en) * | 2002-03-26 | 2003-10-02 | Semiconductor Energy Laboratory Co., Ltd. | Light emitting device and method of manufacturing the same |
| US20040217697A1 (en) * | 2003-05-01 | 2004-11-04 | Kwan-Hee Lee | High efficiency organic electroluminescent display and method for fabricating the same |
| US20050140275A1 (en) * | 2003-12-29 | 2005-06-30 | L.G.Philips Lcd Co. Ltd. | Organic electroluminescence device |
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