CN100416788C - Multifunctional probe card - Google Patents
Multifunctional probe card Download PDFInfo
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- CN100416788C CN100416788C CNB2004100082794A CN200410008279A CN100416788C CN 100416788 C CN100416788 C CN 100416788C CN B2004100082794 A CNB2004100082794 A CN B2004100082794A CN 200410008279 A CN200410008279 A CN 200410008279A CN 100416788 C CN100416788 C CN 100416788C
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Abstract
The present invention relates to a multifunctional probe card which comprises a printed circuit board, a plurality of probes, a counter for obtaining a 'number sequential parameter' by counting the number of wafers, an electric signal number measuring device for measuring signals of current, voltage, etc. passing through the probe to obtain the parameters of current, voltage, etc., and a parameter processing system, wherein the parameter processing system comprises an input/output unit, a processing unit, a time providing unit, na instant display unit and a storage unit. The time providing unit provides a time reference of each object to be measured for the processing unit, and the parameters of number sequence, current, voltage, etc. can be input into the processing unit through the input/output unit; a parameter data structure is established for the references and the parameters to carry out record and calculation and display the use process and state of the probe through the instant display unit.
Description
Technical field
The invention relates to a kind of multiprobe card, be meant a kind of common probe that is applied in especially, can measure the state of probe, and can write down the complete parameter data of probe and provide instant playback or the multiprobe card of caution.
Background technology
In semiconductor fabrication, after the wafer manufacturing is finished, just need enter wafer (wafer of this encapsulation last stage is called naked crystalline substance again) test phase.Wafer sort is to utilize a tester table and a probe (probe card)) come each chip on the test wafer, whether meet the specification of designing with the electrical characteristic and the performance of the wafer guaranteeing to manufacture.Tester table is through particular design its detecting head to be loaded onto carefully as the probe of hair, is used for contacting with weld pad (pad) on the wafer, so that to the wafer input signal or detect and read output valve.
When carrying out wafer sort, fail to be put on the sign mark of defective products, and when carrying out the wafer cutting thereafter, come out, and normally functioning wafer just can carry out the encapsulation procedure of next stage by screening by the wafer of test.Wafer sort is for reducing the cost and improving the indispensable process of yield.The probe of high-quality is the target of the required effort of probe manufacturing research and development unit.
As shown in Figure 1, first kind of existing probe 10 comprises a printed circuit board (PCB) (PCB, Printed CircuitBoard) 11, a plurality of conductive seat (Pogo) 14, a plurality of lead 12, an adapter ring 15, a detecting head (Probe Head; PH) 13 and a plurality of probe (Probe Needle) 17.In testing, naked brilliant 16 be called determinand (DUT, device under test).The electric connection of probe is by the power supply (not shown) conductive seat stitch of board (pogo pin) (not shown) after tested, by conductive seat 14, inner conductor coiling (trace) (not shown) that sees through PCB 11 again is connected with lead 12.The other end of lead 12 is fixing by adapter ring 15, and its center that electrically connects via PCB 11 down extends to detecting head 13.Then, probe 17 continues by the coating of detecting head 13 and location, and it electrically connects, thereby reaches the effect of transmitting signals and the naked crystalline substance of test.The tester table (not shown) is connected mode by this, provides curtage to probe 17 with its conductive seat stitch, and naked brilliant 16 (determinands) then place detecting head 13 belows to contact with probe 17, to reach the purpose of test naked brilliant 16 (determinands).
As shown in Figure 2, second kind of existing probe 20, comprise a PCB 21, a plurality of conductive seat (Pogo) 24, an adapter ring 25, a plurality of probe (Probe Needle) 27, be positioned at the below of adapter ring 25 and be used for fixing the epoxy resin 23 of probe 27.The electric connection of probe is by the power supply (not shown), conductive seat stitch (pogopin) (not shown) through board, by conductive seat 24, the inner conductor that sees through PCB 21 again winds the line (trace) (not shown) and down extends to probe 27.Tester table is connected mode by this, and the curtage that test usefulness is provided is to probe 27, and determinand 26 then places probe 20 belows to contact with probe 27, to reach the purpose of test determinand.
As shown in Figure 3, the third existing probe 30 comprises a printed circuit board (PCB) (PCB, Printed CircuitBoard) 31, a plurality of conductive seat (Pogo) 34, a substrate 35, a detecting head (Probe Head; PH) 33, with a plurality of probes (Probe Needle) 37.In testing, naked brilliant 36 be called determinand (DUT, device undertest).The electric connection of probe is by conductive seat stitch (pogo pin) (not shown) of power supply (not shown) through board, by conductive seat 34, inner conductor coiling (trace) (not shown) that sees through PCB 31 again is connected with substrate 35, substrate 35 thus, down extend to detecting head 33 through the center of PCB 31 again.Then, probe 37 continues by the coating of detecting head 33 and location, and it electrically connects, and reaches the effect of transmitting signals and the naked crystalline substance of test.The tester table (not shown) is connected mode by this, provide curtage to probe 37 with its conductive seat stitch (not shown), naked brilliant 36 (determinands) then place detecting head 33 belows to contact with probe 37, and reach the purpose of test naked brilliant 36 (determinands).
Because test environment is increasingly sophisticated, at the also more and more difficult judgement of the source of damage of the existing probe 10 of above-mentioned first kind of carrying, second kind of existing probe 20 and the third existing probe 30.Because existing probe 10,20,30 all can't be detected its behaviour in service voluntarily, we often need learn the part information that probe 10,20,30 is used through operating personnel or maintenance personal with indirect mode.For example, see through data such as the voltage make a copy of the number of times that is stored in tester table test determinand or test is provided and electric current.For the guardian, the not only consuming time and trouble of mode of this diagnosis, maintenance probe 10,20,30 is when unusual condition takes place in probe 10,20,30 especially in use, often because of being difficult for being found the abnormality processing of missing the very first time.Very and, because obtaining of information is to see through tester table to make a copy of indirectly, and the scattered often fragment of the record of this use information but not complete record, be no lack of getting sth into one's head therebetween or surmise and lack the data of objective or science, this can cause being difficult to judge the fault of probe 10,20,30 or the place of Problem-Error, causes the erroneous judgement in the diagnosis.Facing to dwindling day by day of wafer size and weld pad spacing, healing of wafer product becomes accurate, and semiconductor industry is increasingly sophisticated, and the design of probe device and probe and maintenance still have sizable room for improvement, and this also is the emphasis of wafer sort technology future development.
Summary of the invention
At the shortcoming of the above existing technology, the invention provides a kind of multiprobe card, to be used for improving the shortcoming in some prior art at least or to provide the substitute of usefulness.Multiprobe card provided by the present invention adopts various instruments and device to make complete record to obtain objective parameter data, so that the acquisition of data and analysis, and instant playback and alarm function can be provided, in order to do interpretation that helps abnormal cause and diagnosis, to promote maintenance efficiency.
So one of purpose of the present invention is providing a kind of multiprobe card, it has a counter to count the number of packages of wafer to be measured, and produce one " number of packages sequential parameter " and a telecommunication measuring equipment, and produce parameters such as electric current, voltage with signals such as the electric current of obtaining probe, voltages.
Another object of the present invention is providing a kind of multiprobe card, and it has a parameter processing system, record can be handled and made to the parameter of above generation, does and analyzes and computing.
Another purpose of the present invention is providing a kind of multiprobe card, and it has an instant playback unit, with the usefulness as interpretation He the diagnosis of abnormal cause.
In one embodiment of this invention, the processing unit in the multiprobe card of the present invention can be a microprocessor, program execution memory body, the temporary memory body of the data that reaches, and carries out the function of keeping in the processing data to reach formula.
In another embodiment of the present invention, storage element in the multiprobe card of the present invention can be the storage device of a magnetic disc tape deck, a fast flash memory bank and a packaged type memory card etc., to store these parameter data that this processing unit is set up.
In another embodiment of the present invention, instant playback unit in the multiprobe card of the present invention can be a visual device of a LCD, " seven-segment display ", an iconoscope display unit or an instant tabulation device etc., with demonstration of reaching this probe and the function of monitoring the state of this probe.
In an embodiment more of the present invention, the instant playback unit in the multiprobe card of the present invention can be an alarming device of a warning lamp or a buzzer, with caution of reaching this probe and the function of monitoring the state of this probe.
For reaching above-mentioned purpose, the invention provides a kind of multiprobe card, it comprises a printed circuit board (PCB), a plurality of probe, a counting wafer number of packages and the counter, that obtains one " number of packages sequential parameter " is used for measuring signals such as electric current by this probe, voltage to obtain electric current, the isoparametric telecommunication measuring equipment of voltage and a parameter processing system; This parameter processing system comprises an I/O unit, a processing unit, a time provides unit, an instant playback unit and a storage element; See through this I/O unit, number of packages sequential parameter, current parameters and voltage parameter can input to the time benchmark that each this determinand in this processing unit that the unit provides was provided by this time, and at these benchmark, and parameter set up a parameter data structure, write down, calculate, and see through use and the state that this instant playback unit demonstrates this probe.
Description of drawings
Fig. 1 is the whole generalized section of first kind of existing probe.
Fig. 2 is the whole generalized section of second kind of existing probe.
Fig. 3 is the whole generalized section of the third existing probe.
Fig. 4 decomposes configuration diagram for the whole section of multiprobe card of the present invention.
Fig. 5 is the package assembly block schematic diagram of multiprobe card of the present invention.
Fig. 6 is for looking three-dimensional part sectional drawing on the preferable installation position of multiprobe card parameter processing system of the present invention.
Embodiment
It below is a kind of multiprobe card that is made according to aforementioned the third existing probe.As Fig. 4 and shown in Figure 6, multiprobe card 40 of the present invention comprises a printed circuit board (PCB) (PCB, Printed Circuit Board) 41, a plurality of conductive seat (Pogo) 44, a substrate 45, a detecting head (Probe Head; PH) 43, a plurality of probe (ProbeNeedle) 47, a counter 71, a telecommunication measuring equipment 72 and a parameter processing system 74.In testing, naked brilliant 46 be called determinand (DUT, device under test).The electric connection of probe is by conductive seat stitch (pogo pin) (not shown) of power supply (not shown) through board, by conductive seat 44, inner conductor coiling (trace) (not shown) that sees through PCB 41 again is connected with substrate 45, substrate 45 thus, down extend to detecting head 43 through the center of PCB 41 again.Then, probe 47 continues by the coating of detecting head 43 and location, and it electrically connects, and reaches the effect of transmitting signals and the naked crystalline substance of test.Probe 47 needs to cooperate the fine pitch of determinand, and the inner conductor of PCB 41 coiling (trace) (not shown) spacing is about more than 10 times of probe 47 spacings.The spacing conversion (space transformation) of mat substrate 45, can be with the big spacing of the inner conductor of PCB 41 coiling (trace), be converted to the less spacing of probe 47, so substrate 45 has been played the part of the role of spacing change-over panel (space transformer) again.The tester table (not shown) is connected mode by this, with its conductive seat stitch (not shown), provide curtage to probe 47, naked brilliant 46 (determinands) then place detecting head 43 belows to contact with probe 47, in order to reach the purpose of test naked brilliant 46 (determinands).
This telecommunication measuring equipment 72 can be a current measurement device, a voltage measurer or a resistance measurer (not shown) etc.For example current measurement device (not shown) can be detected the conductor of any and its binding on this probe 40, this conductor comprises the conductor coiling of conductive seat 44 or PCB 41, then the current signal that the coiling of each or arbitrary conductor is passed through can be detected and capture to current measurement device 72, and produce a current parameters.
Same, for example voltage measurer (not shown) can be detected the conductor of any and its binding on this probe 40, this conductor comprises the conductor coiling of conductive seat 44 or PCB 41, then the voltage signal that the coiling of each or arbitrary conductor is passed through can be detected and capture to voltage measurer 73, and produce a voltage parameter.
As shown in Figure 5, parameter processing system 74 comprises an I/O unit 51/59, a processing unit 52, a time provides unit 55, an instant playback unit 56, an and storage element 57, (seeing also the three-dimensional top view of the preferable installation position of parameter processing system shown in Figure 6 74).Wherein processing unit 52 more comprises the memory body 54 that a microprocessor 53, can have formula execution and the temporary memory body function of data concurrently.Processing unit 52 is responsible for the execution of formula, and the hardware demand among this embodiment is not limited thereto, can be according to the number of packages that increases microprocessor 53 or memory body 54 of considering of processing speed.
" the number of packages sequential parameter " that counter 71 is produced, the current parameters that telecommunication measuring equipment 72 is produced, voltage parameter etc., then see through input unit 51, these parameters are inputed to processing unit 52, and processing unit 52 is a determinand number of packages benchmark with the number of packages sequential parameter, provide unit 55 to offer a time benchmark of processing unit 52 each naked crystalline substance to be measured by the time again, then processing unit 52 is further at naked brilliant number of packages benchmark to be measured, current parameters, voltage parameter etc., set up a parameter data structure with time reference, be used for writing down the use and the state of probe.For example: when n of probe 40 test to be measured naked when brilliant, 71 in counter produces number of packages sequential parameter n, telecommunication measuring equipment 72 detecting backs produce the current parameters of Xu (t) ampere, the voltage parameter of Yu (t) volt, wherein parameter u represents probe 47 numberings, and t can be the specific continuous time interval (particular continuous time interval) or the time point (discrete instantaneous time) of arbitrary probe 47, these parameters input to processing unit 52, and this time provides unit 55 to offer the time reference of processing unit 52 AA:BB:CC simultaneously.AA, BB, CC typical example are as the time reference of " year: month: day " or " time: divide: second " or " month: day: time " or the like herein.Further again, processing unit 52 is according to the parameter data structure of above-mentioned parameter foundation [n, Xu (t), Yu (t), AA:BB:CC], and by that analogy, probe 40 is tested the parameter data structure of n+1 naked crystalline substance to be measured.This embodiment further is described in detail in detail, when the 1st of probe 40 test to be measured naked when brilliant, 71 numerical value that produce number of packages sequential parameter 1 of counter, and this probe 40 has 10 probes 47, is respectively a with u, b, c, d, e, f, g, h, i, the numbering of j, telecommunication measuring equipment 72 after detecting these 10 probes 47 sometime, produces x simultaneously
a=3.12m ampere, x
b=3.22m ampere ...., x
jThe current parameters of=3.56m ampere etc., and y
a=4.51 volts, y
b=4.22 volts ...., y
j=4.56 volts etc. voltage parameter, then these parameters input to processing unit 52, to provide unit 55 to offer processing unit 52 present times be the time reference of 23:10:31 this time simultaneously, expression is at this moment that 23: 10: 31 night is whole, further processing unit 52 by above-mentioned parameter set up [1, x
a=3.12m, y
a=4.51,23:10:31], [l, x
b=3.22m, y
b=4.22,23:10:31]. ... [l, x
j=3.56m, y
j=4.56,23:10:31] the parameter data structure, by above-mentioned can be by that analogy, the parameter data structure of the 2nd naked crystalline substance to be measured of probe 40 tests, this parameter data structure is not limited thereto embodiment, can need add or delete other parameter according to the user.
Parameter data structure that processing unit 52 is set up or probe card state are delivered to storage element 57 and are stored, and this storage element 57 is at least once be not limited to magnetic disc tape deck, fast flash memory bank etc., for example microdrive, embedded flash memory body etc.Convenient according to the user, storage element 57 also can be the packaged type memory card, for example CF Card (CompactFlash Card), SM Card (Smart Media Card) etc., when desiring to obtain these storage element 57 inside informations or changing this storage element 57, only need insert or remove this packaged type memory card, conveniently take data to reach the user.
The state user of probe also can see through output unit 59 and exports the state of parameter data structure or probe to parameter processing system 74 peripheral equipment or the external world in addition, so this output unit 59 also can be described as outside output interface, can be interface, network interface of tool independent control etc., peripheral equipment or the extraneous document library system that has set up that can be, to make things convenient for data to preserve and to inspect problem, for example with the parameter data structure through the time cycle two days later, export in the document library system.
Because probe of the present invention has the function of recording status, therefore the data that are stored in mnemon just can provide objective reference when probe needs repairing, this just can shorten Diagnostic Time for the personnel of maintenance probe, and the correct direction of grasping maintenance and improving.
Simultaneously, the device of instant playback unit can allow the probe user grasp the processing of the very first time when abnormality appears in probe, avoids the bigger loss that postpones to note abnormalities and caused.
For the manufacturer of probe, because the data in the storage element of the present invention are to write down the use course of this probe, so can follow the trail of the use of probe, and then understand the life cycle of probe, the quantum jump on the probe manufacturing field of can saying so.
Though the preferred embodiment of lifting at above execution mode only is a kind of multiprobe card that is made for example according to aforementioned the third existing probe, probe of the present invention also can be made according to the existing probe of aforementioned first, second kind and other similarly existing probe of not giving an example.And this preferred embodiment is only in order to be easy to illustrate technology contents of the present invention, and be not with narrow sense of the present invention be limited to this embodiment, all many variations of doing according to spirit of the present invention and the listed situation of claim scope implement all to belong to scope of the present invention.
Label declaration
10,20,30,40 probe card 11,21,31,41 PCB
12 leads 13,33,43 detecting heads
14,24,34,44 conductive seats 15,25 adapter rings
16,26,36,46 naked brilliant 17,27,37,47 probes
23 epoxy resin 35,45 substrates
51 input blocks, 52 processing units
53 microprocessors, 54 memory bodys
55 times provided the unit 56 instant playback unit
57 storage elements, 59 output units
71 counters, 72 telecommunication measuring equipments
74 parameter processing system
Claims (12)
1. multiprobe card, comprise: a PCB, a plurality of probe, a counter, a telecommunication measuring equipment, a parameter processing system constitute; It is characterized in that:
A plurality of probes, an end of each this probe is connected with this PCB;
One counter is used for detecting this probe on this multiprobe card, counting the number of packages of the determinand that this probe tested, and produces a number of packages sequential parameter;
One telecommunication measuring equipment is used for measuring electric current, voltage signal by this probe, to produce a current parameters and a voltage parameter; And
One parameter processing system, comprise an I/O unit, one processing unit, one time provided the unit, an one instant playback unit and a storage element, this number of packages sequential parameter wherein, this current parameters, this voltage parameter can see through this I/O unit and input to this processing unit, and this processing unit is a determinand number of packages benchmark with this number of packages sequential parameter, and this time provides the unit to be an element that time message and tool clock characteristic can be provided, provide the unit that one time benchmark of each this determinand is offered this processing unit by this time, and this processing unit is further at this determinand number of packages benchmark, this current parameters, voltage parameter, and this time reference is set up use and state that a parameter data structure writes down this probe; Then this processing unit calculates the state of each probe immediately, and sees through use and the state of this instant playback unit to show this probe;
Wherein this processing unit can be set up this parameter data structure and calculate the state of at least one probe, and the restriction of execution sequence before and after these foundation or the action of calculating there is no, and this storage element can store this parameter data structure that this processing unit sets up or the state of this probe, it can comprise complete documentation probe and its probe and use state information until each use from dispatching from the factory, with the complete probe data of person that provides the working service, and can see through this I/O unit and export the state of this parameter data structure and this probe to peripheral equipment.
2. multiprobe card as claimed in claim 1 is characterized in that: wherein this counter can measure time slot that voltage on each this probe or current signal switch at interval, to produce this number of packages sequential parameter, reaches the function of this determinand number of packages of counting.
3. multiprobe card as claimed in claim 1 is characterized in that: wherein this processing unit is that a microprocessor, a formula are carried out memory body and the temporary memory body of a data, with execution and the temporary function of processing data of reaching formula.
4. multiprobe card as claimed in claim 1, it is characterized in that: wherein this instant playback unit is one to be selected from any one visual device from the group of a LCD, " seven-segment display ", an iconoscope display unit and an instant tabulation device, with demonstration of reaching this probe and the function of monitoring the state of this probe.
5. multiprobe card as claimed in claim 1, it is characterized in that: wherein this instant playback unit is one to be selected from any one alarming device from the group that a warning lamp and a buzzer are formed, with caution of reaching this probe and the function of monitoring the state of this probe.
6. multiprobe card as claimed in claim 1, it is characterized in that: wherein this storage element is one to be selected from any one storage device from the group that a magnetic disc tape deck, a fast flash memory bank and a packaged type memory card are formed, to store this number of packages sequential parameter, this current parameters, this voltage parameter that this processing unit is set up; Wherein this packaged type memory card is when desiring to obtain this storage element inside information or changing this storage element, only need insert or remove this packaged type memory card, to reach the function that the user conveniently takes data.
7. a multiprobe card comprises: a PCB, a plurality of probe, a counter, a parameter processing system; It is characterized in that:
A plurality of probes, an end of each this probe is connected with this PCB;
One counter is used for detecting this probe on this multiprobe card, counting the number of packages of the determinand that this probe tested, and produces a number of packages sequential parameter; And
One parameter processing system, comprise an I/O unit, one processing unit, one time provided the unit, an one instant playback unit and a storage element, wherein this number of packages sequential parameter can see through this I/O unit and input to this processing unit, and this processing unit is a determinand number of packages benchmark with this number of packages sequential parameter, and this time provides the unit to be an element that time message and tool clock characteristic can be provided, provide the unit that one time benchmark of each this determinand is offered this processing unit by this time, and this processing unit is further set up use and the state that a data structure writes down this probe at this determinand number of packages benchmark and this time reference; Then this processing unit calculates the state of each probe immediately, and sees through this instant playback unit to show the number of times of this probe;
Wherein this processing unit can be set up this parameter data structure and calculate the state of each probe, and the restriction of execution sequence before and after these foundation or the action of calculating there is no, and this storage element can store this parameter data structure that this processing unit sets up or the state of this probe, it can comprise complete documentation probe and its probe and use state information until each use from dispatching from the factory, with the complete probe data of person that provides the working service, and can see through this I/O unit and export the state of this parameter data structure and this probe to peripheral equipment.
8. multiprobe card as claimed in claim 7 is characterized in that: wherein this counter can measure time slot that voltage on each this probe or current signal switch at interval, to produce this number of packages sequential parameter, reaches the function of this determinand number of packages of counting.
9. multiprobe card as claimed in claim 7 is characterized in that: wherein this processing unit is that a microprocessor, a formula are carried out memory body and the temporary memory body of a data, with execution and the temporary function of processing data of reaching formula.
10. multiprobe card as claimed in claim 7, it is characterized in that: wherein this instant playback unit is one to be selected from any one visual device from the group of a LCD, a seven-segment display, an iconoscope display unit and an instant tabulation device, with demonstration of reaching this probe and the function of monitoring the state of this probe.
11. multiprobe card as claimed in claim 7, it is characterized in that: wherein this instant playback unit is one to be selected from any one alarming device from the group that a warning lamp and a buzzer are formed, with caution of reaching this probe and the function of monitoring the state of this probe.
12. multiprobe card as claimed in claim 7, it is characterized in that: wherein this storage element is one to be selected from any one storage device from the group that a magnetic disc tape deck, a fast flash memory bank and a packaged type memory card are formed, to store this number of packages sequential parameter that this processing unit is set up; Wherein this packaged type memory card is when desiring to obtain this storage element inside information or changing this storage element, only need insert or remove this packaged type memory card, conveniently takes data to reach the user.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100082794A CN100416788C (en) | 2004-03-02 | 2004-03-02 | Multifunctional probe card |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100082794A CN100416788C (en) | 2004-03-02 | 2004-03-02 | Multifunctional probe card |
Publications (2)
| Publication Number | Publication Date |
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| CN1665011A CN1665011A (en) | 2005-09-07 |
| CN100416788C true CN100416788C (en) | 2008-09-03 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB2004100082794A Expired - Fee Related CN100416788C (en) | 2004-03-02 | 2004-03-02 | Multifunctional probe card |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101231322B (en) * | 2007-02-09 | 2011-01-26 | 段超毅 | Test connection method for integrated circuit open circuit/ short-circuit |
| CN103400238A (en) * | 2013-08-14 | 2013-11-20 | 上海华力微电子有限公司 | Wafer test probe card management system and using method thereof |
| CN113917205B (en) * | 2020-07-08 | 2024-01-19 | 台湾中华精测科技股份有限公司 | Probe card device and fan-out type probe thereof |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6072325A (en) * | 1993-07-20 | 2000-06-06 | Tokyo Electron Kabushiki Kaisha | Probe device |
| US6590381B1 (en) * | 1999-01-29 | 2003-07-08 | Tokyo Electron Limited | Contactor holding mechanism and automatic change mechanism for contactor |
| CN1431693A (en) * | 2002-01-10 | 2003-07-23 | 裕沛科技股份有限公司 | Wafer class probe card and its mfg. method |
-
2004
- 2004-03-02 CN CNB2004100082794A patent/CN100416788C/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6072325A (en) * | 1993-07-20 | 2000-06-06 | Tokyo Electron Kabushiki Kaisha | Probe device |
| US6590381B1 (en) * | 1999-01-29 | 2003-07-08 | Tokyo Electron Limited | Contactor holding mechanism and automatic change mechanism for contactor |
| CN1431693A (en) * | 2002-01-10 | 2003-07-23 | 裕沛科技股份有限公司 | Wafer class probe card and its mfg. method |
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