CN100414830C - Load adjustable surface acoustic wave actuator - Google Patents
Load adjustable surface acoustic wave actuator Download PDFInfo
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- CN100414830C CN100414830C CNB031553125A CN03155312A CN100414830C CN 100414830 C CN100414830 C CN 100414830C CN B031553125 A CNB031553125 A CN B031553125A CN 03155312 A CN03155312 A CN 03155312A CN 100414830 C CN100414830 C CN 100414830C
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- acoustic wave
- surface acoustic
- slide block
- sliding bearing
- location division
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Abstract
The present invention relates to a surface acoustic wave arrester for adjusting a load, which mainly comprises a positioning platform, a surface acoustic wave arrester, a slide block and a supporting structure, wherein the two corresponding sides of the positioning platform are respectively provided with a sliding bearing; the surface acoustic wave arrester is arranged on the positioning platform between the two sliding bearings, and a prearranged surface acoustic wave is generated on the top end surface of the positioning platform; the slide block is arranged on the positioning platform and provided with a stress part contacting the top end surface of the surface acoustic wave arrester and two positioning parts positioned respectively in the sliding bearings, which enables the sliding block to be moved by the surface acoustic wave of the surface acoustic wave arrester; the supporting structure can prestress the positioning part of the sliding block due to the load degree of the sliding block to enable the contact pressure between the sliding block and the surface acoustic wave arrester to be kept within a constant value.
Description
Technical field
The present invention is relevant with the surface acoustic wave actuating device, is meant a kind of surface acoustic wave actuating device of adjustable heavy burden especially.
Background technology
Surface acoustic wave Surface Acoustic Wave, SAW is the ripple of a kind of form on the physical phenomenon, this ripple can transmit along the elastomeric surface of semo-infinite.If refer to the difference electrode in the making of piezoelectric crystal surface, finish one and refer to difference electrode transducer Interdigital Transducer, IDT, from referring to difference electrode input voltage, piezoelectric crystal just can produce surface acoustic wave on the piezoelectric crystal surface because of inverse piezoelectric effect, this technology is widely used in the telecommunications field, as the function of filtering or signal processing.
Because the amplitude of surface acoustic wave is little and resonance frequency is high, therefore be found the type of drive that can be used as the nanometer positioning platform recently.Yet because the surface acoustic wave actuation technology is the surface acoustic wave that utilizes the piezoelectric crystal surface to produce, drive the effect that a slide block on the platform reaches the location, and the actuation effect of surface acoustic wave is relevant with the contact pressure between slide block and piezoelectric crystal surface, be the loading variation of slide block can influence and piezoelectric crystal between contact pressure, and its contact pressure can influence the actuation effect of surface acoustic wave.The design of common laboratory is with gravity, magnetic force or spring force produce the contact pressure between slide block and piezoelectric crystal, yet the production method of this kind contact pressure is unable to cope with the loading of locating platform to be changed, in case promptly slide block kicks the beam or during overweight loading bearing, just can influence the driveability of platform at once, as shown in Figure 1, Fig. 1 is when each drive surfaces sound wave brake in the time of 3 seconds, the slider displacement of different-diameter size and surface acoustic wave brake press the power graph of a relation indirectly, though the contact pressure between slide block and surface acoustic wave brake, the speed of big more then slide block can be fast more in the time of within a certain degree, but when the contact pressure between slide block and surface acoustic wave brake surpasses this degree when excessive, the speed of slide block but can be slack-off, so suitable adjustment slide block and the contact pressure between the surface acoustic wave brake can promote the driveability of locating platform.
From the above, also the positive force contact pressure of therefore adjusting between slide block and surface acoustic wave brake piezoelectric crystal in response to different loadings is maintained in the steady state value, to keep the driveability of platform, just seems suitable important.And general adjustment mode can generally be divided three classes at present, first utilization is adjusted by the counterweight weight that change is placed on the slide block, it two is to utilize suction between a permanent magnet and an iron plate to change to adjust, and its three is to utilize by the deflection that changes a spring to be adjusted.But, these adjustment modes not only have the difficulty of enforcement in practical application, in case and the weight of institute's load on the slide block when being weight for the unknown, contact pressure between its slide block and this surface acoustic wave brake just can't learn, just has no way of certainly being controlled and adjusts.
Summary of the invention
Main purpose of the present invention is to provide a kind of surface acoustic wave actuating device of adjustable heavy burden, is to keep contact pressure between slide block and surface acoustic wave brake in a steady state value, to guarantee the driving effect of surface acoustic wave brake.
Another object of the present invention is to provide a kind of surface acoustic wave brake of adjustable heavy burden, is can keep slide block to advance with fixing direction.
For reaching above-mentioned purpose, the invention provides a kind of surface acoustic wave actuating device of adjustable heavy burden, it consists predominantly of: a locating platform, its two opposite sides have a sliding bearing respectively; One surface acoustic wave brake is to be arranged on this locating platform, and the position and can produce a predetermined surface acoustic wave in its top end face between this two sliding bearing; One slide block is to place on this locating platform, has a forced section that contacts with the top end face of this surface acoustic wave brake and two location division of set in this each sliding bearing respectively, makes to be driven this slider displacement by the surface acoustic wave of this surface acoustic wave brake; One supporting construction is can be in response to the heavy burden degree of this slide block, and to bestowing a pre-power in the location division of this slide block, the contact pressure between this slide block and this surface acoustic wave brake is remained in the steady state value.
For more deep understanding and approval being arranged to feature of the present invention and purpose, enumerate following preferred embodiment now, and after cooperating graphic being illustrated in.
Description of drawings
Fig. 1 is that slide block and surface acoustic wave brake press power and slider displacement graph of a relation indirectly;
Fig. 2 is the main member schematic diagram of the present invention's first preferred embodiment;
Fig. 3 is the cutaway view of preferred embodiment shown in Figure 1;
Fig. 4 is the stressed schematic diagram of preferred embodiment shown in Figure 1;
Fig. 5 is the schematic diagram of hertz contact theory model and contact pressure calculating formula thereof;
Fig. 6 is the stressed schematic diagram of another enforcement aspect of the present invention.
Embodiment
Seeing also Fig. 2 to Fig. 4, is the surface acoustic wave actuating device 100 of a kind of adjustable heavy burden of being provided of the present invention's first preferred embodiment, and it consists predominantly of a locating platform 10, a surface acoustic wave brake 20, a slide block 30 and a supporting construction 40.
These locating platform 10 inside are formed with an opening and can be for the ccontaining zone of this slide block 30 up, and are extended with a sliding bearing 11 on this regional two opposite side walls respectively outward, and this sliding bearing 11 is for being communicated with this regional groove.
This surface acoustic wave brake 20, be made by the piezoelectric crystal, be to be arranged at the bottom of closing the zone in this locating platform 10, the top end surface of this surface acoustic wave brake 20 is formed with some finger difference electrode (not shown), and can refer to difference electrode input voltage by this, can utilize by piezoelectric and produce inverse piezoelectric effect, make the top end surface of this surface acoustic wave brake 20 produce little and the surface acoustic wave that resonance frequency is high of an amplitude.
This slide block 30 can define the whole body portion 31, two location divisions 32 and a forced section 33.This body portion 31 is a bulk; This two location division 32 is to extend respectively to form outside two opposite sides of this body portion 31; This forced section 33 is some spherosomes, is the bottom of stay aligned in this body portion 31; This body portion 31 is the interior zones that place this locating platform 10, and make these each 32 difference positions, location division in this each sliding bearing 11, and the sidewall of this each location division 32 and this each sliding bearing 11 (on, down, lateral wall) all is formed with between and permitted crack between a little preset distances, this forced section 33 is to contact with the top end surface of this surface acoustic wave brake 20, the top of this body portion 31 also is provided with a pressure loading inductor (not shown), can convert the variation of the load-carrying on this slide block 30 to numerical value transfers in the processor (not shown), because this pressure loading inductor and processor are all existing member, just seldom give unnecessary details at this.
This supporting construction 40, be whether to control start by this processor, this supporting construction 40 is three groups of gas supply devices that distinctly have independent source of the gas, its gas supply device of first group, be that the gas outlet that it is some is arranged in the lower wall that is arranged on this each sliding bearing 11 in regular turn, and be communicated with this each sliding bearing 11, second group gas supply device, be that the gas outlet that it is some is arranged in the upper side wall that is arranged on this each sliding bearing 11 in regular turn, and be communicated with this each sliding bearing 11, the 3rd group gas supply device, be that the gas outlet that it is some is arranged in the lateral wall that is arranged on this each sliding bearing 11 in regular turn, and be communicated with this each sliding bearing 11, making can be by the gas supply device of each group respectively to the gas pressure of supply different directions in this each sliding bearing 11.
Above-mentioned each member and the composition mode thereof that is the surface acoustic wave actuating device 100 of the adjustable heavy burden of first preferred embodiment provided by the present invention then is described below its occupation mode again:
When desire moves to a preposition with an article utilization by this slide block 30, at first these article are positioned on this slide block 30, this moment is because the gravity of these article adds all on this slide block 30, and make this slide block 30 produce an extra downward positive pressure W, causing the contact pressure of 20 on the forced section 33 of this slide block 30 and this surface acoustic wave brake to change strengthens, so be arranged on this slide block 30 pressure loading inductor just can with by article the extra pressure value that increases transmit back in the processor, and control first of this supporting construction 40 by this processor, two and three groups of air pressure supplies begin to produce start and air feed, promptly by the position on this sliding bearing 11 times, on, gas outlet in the lateral wall begins to continue to import gas, make the top of this each location division 32 begin to bear downward pressure F1 by second group of gas that gas supply device is bestowed, F2, the gas of being bestowed by the first group of gas supply device support force S1 that makes progress then can be born in the below of each location division 32, S2, and the gas supply device that this gas supply device of first group can be supplied than second group is many gas, make this slide block 30 each 32 below, location division can because of bear more gas to buoyancy S1, S2, and whole slide block 30 is slightly floated toward upper support, as shown in Figure 4, (this steady state value is to learn and be preset in this processor in advance via experiment in the predetermined steady state value P for maintaining to buoyancy of the contact pressure of 20 on this slide block 30 and surface acoustic wave brake just can being utilized produced by gas, be to make this slide block 30 and this surface acoustic wave brake 20 under the contact pressure of this steady state value P, be maintained at certain and preferable driveability), the calculating formula of steady state value P is P=W+ (FI+F2)-(S1+S2), so just can utilize by contact pressure and be maintained in the steady state value P 20 on slide block 30 and this surface acoustic wave brake, and make speed that this surface acoustic wave brake 20 can be certain and preferable with this slide block 30 and the article that are carried on, utilize and slide onto the preposition place by the drive of surface acoustic wave.
In addition, the Item Weight of institute's load is lighter on slide block 30, the W of pressure downward that is produced is less, and the contact pressure that makes 20 on this slide block 30 and this surface acoustic wave brake is not when reaching within the steady state value P, pressure loading inductor on this slide block 30, just the loading numerical value on the slide block 30 can be transferred in this processor, make second group of gas supply device controlling this supporting construction 40 by this processor supply with predetermined and more than first group of gas pressure F1 that gas supply device provided, F2, as shown in Figure 4, promptly continue input more than by the gas that is provided in the lower wall by the gas outlet in these sliding bearing 11 upper side walls, make the top of this each location division 32 continue to be subjected to the pushing of more Continuous pressure-controlled air inflation, and make this slide block 30 increase downward positive pressure, increase within the steady state value P with contact pressure 20 on this slide block 30 and this surface acoustic wave brake, meeting the calculating formula of steady state value P=W+ (FI+F2)-(S1+S2), and keep certain usefulness that surface acoustic wave brake 20 drives these slide blocks 30.
Moreover in the stroke of slide block 30 translations, the 3rd group of gas supply device of this supporting construction 40 also can appropriateness provide gas pressure T1, the T2 of side direction, as shown in Figure 4, makes this slide block 30 can be maintained at fixing direction and advances.
In this, the heavy burden of visual this slide block of supporting construction among the present invention size and adjust and provide in good time support force that slide block makes progress or downward downforce at any time, to keep the contact pressure between slide block and surface acoustic wave brake to maintain within the steady state value, and reach the travel rate of slide block the best, and can avoid situation, or avoid taking place because of the situation that the heavy burden pressure of slide block too small (deficiency) causes surface acoustic wave can't drive this slide block translation because of the excessive damaging surface sound wave of the heavy burden pressure brake of slide block.This supporting construction also can provide relative lateral pressure in good time, advances so that this slide block can be maintained at a fixing direction.
In this special instruction, the forced section of this slide block is some spheroids that are spherical shape among the present invention, be since the fluctuation amplitude of surface acoustic wave only several nanometers are big, so the contact conditions between surface acoustic wave brake and slide block is just extremely important, surface roughness as the surface acoustic wave brake, cleanliness factor and contact pressure ... Deng being all the important contact conditions that influences the surface acoustic wave brake performance, and the most important thing is that wherein the contact pressure between slide block and surface acoustic wave brake is essential enough big, because the surface acoustic wave brake is to vibrate with the frequency of counting MHz, so if the contact pressure between slide block and surface acoustic wave brake is too little, can make the generation of extruding air film is arranged between slide block and surface acoustic wave brake, and then make slide block can't contact fully with the surface acoustic wave brake and influence driven nature between surface acoustic wave brake and slide block, be the most suitable with contacting of spheroidal between slide block and surface acoustic wave brake therefore also.
Please cooperate consult shown in Figure 5, it is the model of Hertz theory, wherein E1 and E2 are respectively the coefficient of elasticity of slide block and surface acoustic wave brake, ν 1 and ν 2 are respectively the Bai Song of slide block and surface acoustic wave brake than (Poisson, s Rati), N is the positive force between slide block and surface acoustic wave brake, R is the radius of slide block, can push away to such an extent that the maximum contact pressure between slide block and surface acoustic wave brake is Pmax according to the hertz contact theory, therefore contact between slide block and surface acoustic wave brake design suitably whether, can have influence on the performance performance of whole driving, so be the most suitable with contacting of spheroidal between slide block and surface acoustic wave brake.
In addition, supporting construction of the present invention not only can be arranged on the sliding bearing of this locating platform, in fact also this supporting construction can be arranged on this slide block, as shown in Figure 6, and change with each the group gas supply device the gas outlet be arranged on this slide block location division on, down, on the outer side surface, make the loading of working as slide block bigger, and make contact pressure between slide block and surface acoustic wave brake greater than in the steady state value, this supporting construction position is in the gas outlet of this slide block lower wall, just can supply with predetermined according to the indication of processor and greater than the gas supplied pressure S1 of upper side wall institute, S2, make slide block can obtain suitable support buoyancy with keep and the surface acoustic wave brake between the contact pressure position in steady state value, certainly too small as the loading of this slide block, and when making contact pressure between this slide block and this surface acoustic wave brake less than steady state value, then be to supply with more gas pressure F1 by the gas supply device of slide block upper side wall, F2, make this slide block can obtain suitable pressure downward, and the contact pressure between this slide block and this surface acoustic wave brake is remained within the steady state value.Certainly also can supply with suitable lateral pressure T1, T2, with the direct of travel of dimension slide block by the gas outlet of this slide block lateral wall.
Then, supporting construction in the foregoing description is to control contact pressure between slide block and surface acoustic wave brake with pneumatically supported principle, but in fact also supporting construction can be changed to adopt and be hydraulic pressure or the floating mode of magnetic, reach the variable characteristic of support force of support slipper, keep contact pressure stable between slide block and brake, even make the load of slide block load Different Weight, also can both be maintained at certain driveability.
Wherein, because the action principle of the supporting construction of fluid pressure type or maglev type and the action principle of aforementioned vapour-pressure type are roughly the same, therefore only slightly explain below with literal, when this supporting construction is adopted fluid pressure type, this supporting construction is three groups of liquid supplies that distinctly have independent hydraulically controlled source, first group liquid supply wherein, be that the liquid outlet that it is some is arranged in the lower wall that is arranged on this each sliding bearing in regular turn, and be communicated with this each sliding bearing, second group liquid supply, be that the liquid outlet that it is some is arranged in the upper side wall that is arranged on this each sliding bearing in regular turn, and be communicated with this each sliding bearing, the 3rd group liquid supply, be that the liquid outlet that it is some is arranged in the lateral wall that is arranged on this each sliding bearing in regular turn, and be communicated with this each sliding bearing, making to provide appropriateness to this slide block and more than the support force of second group of downforce that liquid supply provides by first group liquid supply, or provide appropriateness to this slide block and more than the downforce of first group of power that liquid supply provides support by this liquid supply of second group, to keep contact pressure position between this slide block and this surface acoustic wave brake within this steady state value, and provide the side force of appropriateness in this slider displacement the time by the 3rd group liquid supply, to keep the fixedly direct of travel of this slider displacement.Certainly, this also can be arranged at three groups liquid supply respectively on the upper and lower lateral wall of location division of this slide block, and can keep contact pressure between this slide block and this surface acoustic wave brake equally within steady state value.
In addition, when this supporting construction is adopted the floating mode of magnetic, this supporting construction is three groups of electromagnetic assemblies that distinctly have the drive source, first group electromagnetic assembly wherein, be to be arranged on the correspondence position of the lower wall of this each sliding bearing and slide block location division, second group electromagnetic assembly, be arranged on the correspondence position of the upper side wall of this each sliding bearing and slide block location division, the 3rd group electromagnetic assembly, be arranged on the correspondence position of the lateral wall of this each sliding bearing and slide block location division, make and to pass to scheduled current by first group electromagnetic assembly and produce to come-up support power, reach by second group of electromagnetic assembly and pass to scheduled current and produce appropriate downward magnetic pressure, to keep contact pressure position between this slide block and this surface acoustic wave brake within this steady state value, and in this slide block slippage, provide the side force of appropriateness to this slide block by the 3rd group electromagnetic assembly, to keep the direct of travel of this slider displacement.In addition, because the floating mode of above-mentioned magnetic is with the magnetic force start of the electromagnetic assembly between slide block and sliding bearing to repel each other, but in fact also can be with the magnetic force start of electromagnetic assembly to inhale mutually between slide block and sliding bearing, the purpose of same attainable cost invention.
Claims (16)
1. the surface acoustic wave actuating device of an adjustable heavy burden is characterized in that, includes:
One locating platform, its two opposite sides have a sliding bearing respectively;
One surface acoustic wave brake is arranged on this locating platform, between these two sliding bearings, produces a predetermined surface acoustic wave in its top end face;
One slide block places on this locating platform, has a forced section that contacts with the top end face of this surface acoustic wave brake and two location divisions of set in this each sliding bearing respectively, drives this slider displacement by the surface acoustic wave of this surface acoustic wave brake;
One supporting construction is looked the heavy burden degree of this slide block, and to bestowing a pre-power in the location division of this slide block, the contact pressure between this slide block and this surface acoustic wave brake is remained in the steady state value.
2. the surface acoustic wave actuating device of adjustable heavy burden according to claim 1 is characterized in that described this supporting construction is arranged on this sliding bearing.
3. the surface acoustic wave actuating device of adjustable heavy burden according to claim 1 is characterized in that described this supporting construction is arranged on the location division of this slide block.
4. the surface acoustic wave actuating device of adjustable heavy burden according to claim 1 is characterized in that, described this locating platform is formed with a zone of putting for this slide block, and this each sliding bearing is institute's groove of forming of extension respectively from these regional two opposite sides.
5. as the surface acoustic wave actuating device of adjustable heavy burden as described in the claim 4, it is characterized in that, described this supporting construction, have two groups of gas supply devices that have independent source of the gas respectively, first group gas supply device wherein, be that the gas outlet that it is some is arranged in the lower wall that is arranged on this each sliding bearing in regular turn, and be communicated with this each sliding bearing, second group gas supply device, the gas outlet that it is some is arranged in the upper side wall that is arranged on this each sliding bearing in regular turn, and be communicated with this each sliding bearing, the location division of this slide block is provided the support force of appropriateness by first group gas supply device, or provide the downforce of appropriateness to the location division of this slide block by this gas supply device of second group, be positioned within this steady state value to keep the contact pressure between this slide block and this surface acoustic wave brake.
6. as the surface acoustic wave actuating device of adjustable heavy burden as described in the claim 5, it is characterized in that, described this supporting construction also has one the 3rd group gas supply device, be that the gas outlet that it is some is arranged in the lateral wall that is arranged on this each sliding bearing in regular turn, and be communicated with this each sliding bearing, provide appropriate side force to this slide block, to keep the direct of travel of this slider displacement.
7. as the surface acoustic wave actuating device of adjustable heavy burden as described in the claim 4, it is characterized in that, described this supporting construction, have two groups of gas supply devices that have independent source of the gas respectively, first group gas supply device wherein, be that the gas outlet that it is some is arranged in the lower wall that is arranged on this each location division in regular turn, and be communicated with this each sliding bearing, second group gas supply device, be that the gas outlet that it is some is arranged in the upper side wall that is arranged on this each location division in regular turn, and be communicated with this each sliding bearing, by first group gas supply device to air feed in the sliding bearing, and make this location division obtain the appropriateness support force, or by this gas supply device of second group to air feed in this sliding bearing, make this location division obtain the downforce of appropriateness, be positioned within this steady state value to keep the contact pressure between this slide block and this surface acoustic wave brake.
8. as the surface acoustic wave actuating device of adjustable heavy burden as described in the claim 7, it is characterized in that, described this supporting construction also has one the 3rd group gas supply device, the gas outlet that it is some is arranged in the lateral wall that is arranged on this each location division in regular turn, and be communicated with this each sliding bearing, provide appropriate side force to this slide block, to keep the direct of travel of this slider displacement.
9. as the surface acoustic wave actuating device of adjustable heavy burden as described in the claim 4, it is characterized in that, described this supporting construction has two groups of liquid supplies that have independent hydraulically controlled source respectively, first group liquid supply wherein, the liquid outlet that it is some is arranged in the lower wall that is arranged on this sliding bearing in regular turn, and be communicated with this each sliding bearing, second group liquid supply, the liquid outlet that it is some is arranged in the upper side wall that is arranged on this sliding bearing in regular turn, and be communicated with this each sliding bearing, and by first group of liquid supply feed flow, make the location division of this slide block obtain appropriate support force, or by this liquid supply feed flow of second group, and make the location division of this slide block obtain appropriate downforce, be positioned within this steady state value to keep the contact pressure between this slide block and this surface acoustic wave brake.
10. as the surface acoustic wave actuating device of adjustable heavy burden as described in the claim 9, it is characterized in that, described this supporting construction also has one the 3rd group liquid supply, the liquid outlet that it is some is arranged in the lateral wall that is arranged on this each sliding bearing in regular turn, and be communicated with this each sliding bearing, location division to this slide block provides appropriate side force, to keep the direct of travel of this slider displacement.
11. surface acoustic wave actuating device as adjustable heavy burden as described in the claim 4, it is characterized in that, described this supporting construction has two groups of liquid supplies that have independent hydraulically controlled source respectively, first group liquid supply wherein, the liquid outlet that it is some is arranged in the lower wall that is arranged on this each location division in regular turn, and be communicated with this each sliding bearing, second group liquid supply, the liquid outlet that it is some is arranged in the upper side wall that is arranged on this each location division in regular turn, and be communicated with this each sliding bearing, liquid supply feed flow by first group, make the location division of this slide block obtain appropriate support force, or, make the location division of this slide block obtain appropriate downforce by this second group of liquid supply feed flow, be positioned within this steady state value to keep the contact pressure between this slide block and this surface acoustic wave brake.
12. surface acoustic wave actuating device as adjustable heavy burden as described in the claim 11, it is characterized in that, described this supporting construction also has one the 3rd group liquid supply, the liquid outlet that it is some is arranged in the lateral wall that is arranged on this each location division in regular turn, and be communicated with this each sliding bearing, and the location division that makes this slide block obtains the side force of appropriateness, to keep the direct of travel of this slider displacement.
13. surface acoustic wave actuating device as adjustable heavy burden as described in the claim 4, it is characterized in that, described this supporting construction has two groups of electromagnetic assemblies that have the drive source respectively, first group electromagnetic assembly wherein, be arranged on the correspondence position of the lower wall of this each sliding bearing and location division, second group electromagnetic assembly, be arranged on the correspondence position of the upper side wall of this each sliding bearing and location division, utilization is by first, two groups electromagnetic assembly passes to scheduled current, and produce the make progress downward pressure of support force and appropriateness of appropriateness to this slide block respectively, be positioned at this steady state value to keep the contact pressure between this slide block and this surface acoustic wave brake.
14. surface acoustic wave actuating device as adjustable heavy burden as described in the claim 13, it is characterized in that, described this supporting construction also has one the 3rd group electromagnetic assembly, be arranged on the correspondence position of the lateral wall of this each sliding bearing and location division, scheduled current produces the appropriate side force to this slide block, to keep the direct of travel of this slider displacement.
15. the surface acoustic wave actuating device of adjustable heavy burden according to claim 1, it is characterized in that, described this slide block defines the whole body portion and respectively from the location division of this body portion both sides horizontal expansion, this slide block is to deploy on locating platform with its body, and make this each location division be arranged in this each sliding bearing respectively, and all have between the sidewall of this each location division and this each sliding bearing predetermined between the crack.
16. the surface acoustic wave actuating device of adjustable heavy burden is characterized in that according to claim 1, described this slide block also has a pressure loading inductor, the load-carrying of this slide block is changed transferring in the processor, is controlled the action of this supporting construction by this processor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB031553125A CN100414830C (en) | 2003-08-26 | 2003-08-26 | Load adjustable surface acoustic wave actuator |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB031553125A CN100414830C (en) | 2003-08-26 | 2003-08-26 | Load adjustable surface acoustic wave actuator |
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| Publication Number | Publication Date |
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| CN1592072A CN1592072A (en) | 2005-03-09 |
| CN100414830C true CN100414830C (en) | 2008-08-27 |
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| CNB031553125A Expired - Fee Related CN100414830C (en) | 2003-08-26 | 2003-08-26 | Load adjustable surface acoustic wave actuator |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102522916B (en) * | 2011-12-23 | 2015-04-01 | 中国科学院苏州纳米技术与纳米仿生研究所 | Nano-motor based on frictional force variation |
| CN106142121B (en) * | 2015-07-31 | 2018-08-31 | 宁夏巨能机器人系统有限公司 | A kind of device and its control method for reinforcing articulated robot heavy burden ability |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000245173A (en) * | 1999-02-18 | 2000-09-08 | Nikon Corp | Vibrating actuator |
| CN1292735A (en) * | 1998-03-11 | 2001-04-25 | 希尔舍博士有限公司 | Method for activating sieve frame with ultrasounds |
-
2003
- 2003-08-26 CN CNB031553125A patent/CN100414830C/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1292735A (en) * | 1998-03-11 | 2001-04-25 | 希尔舍博士有限公司 | Method for activating sieve frame with ultrasounds |
| JP2000245173A (en) * | 1999-02-18 | 2000-09-08 | Nikon Corp | Vibrating actuator |
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