CN100409032C - Double liquid-crystal aberration correcting element and its manufacturing method - Google Patents
Double liquid-crystal aberration correcting element and its manufacturing method Download PDFInfo
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- CN100409032C CN100409032C CNB2005800106772A CN200580010677A CN100409032C CN 100409032 C CN100409032 C CN 100409032C CN B2005800106772 A CNB2005800106772 A CN B2005800106772A CN 200580010677 A CN200580010677 A CN 200580010677A CN 100409032 C CN100409032 C CN 100409032C
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
- G11B7/1392—Means for controlling the beam wavefront, e.g. for correction of aberration
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1347—Arrangement of liquid crystal layers or cells in which the final condition of one light beam is achieved by the addition of the effects of two or more layers or cells
- G02F1/13471—Arrangement of liquid crystal layers or cells in which the final condition of one light beam is achieved by the addition of the effects of two or more layers or cells in which all the liquid crystal cells or layers remain transparent, e.g. FLC, ECB, DAP, HAN, TN, STN, SBE-LC cells
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
- G11B7/1365—Separate or integrated refractive elements, e.g. wave plates
- G11B7/1369—Active plates, e.g. liquid crystal panels or electrostrictive elements
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/42—Arrangements for providing conduction through an insulating substrate
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Abstract
A novel double liquid-crystal aberration correcting element smaller and lighter than conventional ones. The double liquid-crystal aberration correcting element (1) is composed of two liquid-crystal aberration correcting elements stacked in the direction of the thickness. Each liquid-crystal aberration correcting element comprises a pair of substrates on one of which a common electrode is provided and on the other of which a segment electrode (21) having a non electrode portion is provided and a liquid crystal interposed between the paired substrates. Holes (30A, 30B, 30C) are made in the thickness direction in each of the substrates, and terminals (31A, 31B, 31C) each connected to one of the common and segment electrodes are provided to the holes respectively. An injection hole (60) through which the liquid crystal is injected is made in one of the substrates. The alignment directions of the liquid crystal of the two liquid-crystal aberration correcting elements during voltage nonapplication are perpendicular to each other.
Description
Technical field
The present invention relates in optical disc apparatus the liquid-crystal aberration correcting element that adopts for the aberration that when writing down and regenerate, produces in the calibrating optical acoustic pickup.Belong to particularly suitable at CD jumbo of future generation (the Blu-ray disc that blue violet semiconductor laser is used and has a plurality of recording layers as light source; BD) etc. in, and be used to carry out toward the double liquid-crystal aberration correcting element of the aberration correction in road and loop and the technical field of manufacture method thereof.
Background technology
In the past, as information recording carrier, various CDs such as known CD, DVD.In these CDs,,, improve the precision of record and regeneration so need to proofread and correct this aberration owing to the thickness deviation that causes of rotation and bending etc. can produce aberration (focal point crooked).
As the technology of proofreading and correct above-mentioned aberration, the known mode and the mode of utilizing liquid-crystal aberration correcting element that drives collimator lens with actuator.
Last mode is because need actuator, so that optical pick-up becomes is complicated, and has the problem of correspondence fully in high-precision correction.
In contrast, liquid-crystal aberration correcting element is that the electrode with liquid crystal panel forms for example concentrically ringed ring-type, thereby carries out different phase control at the central portion of light beam with the outer edge.Because this liquid-crystal aberration correcting element is configured on the same optical axis with object lens in optical pick-up, thus wish miniaturization and lightweight, to realize good driving.
But, in recent years, because the high NAization of the short wavelengthization of optical source wavelength and object lens being is is being researched and developed Blu-ray disc huge capacity compact discs such as (BD).This BD has a plurality of recording layers in the future on thickness direction, so need be on different depth and the focal position of laser be complementary, and because optical source wavelength is short, diminish so exist to tectal thickness deviation with to the tolerance of the degree of tilt of dish, the wavefront aberration of generation becomes big tendency.In order to address this problem, proposed by making up 2 said elements and carrying out improving the double liquid-crystal aberration correcting element of accuracy of detection toward the aberration correction in road and loop.
As existing double liquid-crystal aberration correcting element, for example in patent documentation 1, put down in writing following example, promptly emergent light total from light source to Magnetooptic recording medium toward the road and from Magnetooptic recording medium to the light path in the loop of photodetector, be provided with 2 phase correction component, arbitrary phase correction component all has 1 pair of transparency carrier of band transparency electrode, clamping has liquid crystal layer between 1 pair of transparency carrier, when applying voltage, the transparency electrode that is formed at least one of 2 phase correction component becomes the divided mode of cutting apart electrode and can proofreading and correct the wavefront aberration of emergent light, and the substantial length of delay of 2 phase correction component equates, when not applying voltage, the direction of orientation of the liquid crystal molecule of the liquid crystal layer of 2 phase correction component of formation is mutually orthogonal.
In above-mentioned existing element, shown in Figure 2 as patent documentation 1 makes the substrate of a side of element longer, forms electrode lead-out part on this part, with flexible printed circuit board etc. this electrode lead-out part is connected with control loop.
At this moment, because power is added on the part of the electrode lead-out part on the glass substrate, so, then may produce the crack and fault such as break, thereby on thickness, have the limit (about 0.3～0.5mm) aspect the intensity if want glass substrate is done thin.Therefore, when 2 elements of combination, whole thickening can not be realized enough lightweights.And, because the substrate of a side forms longly, so correspondingly element becomes big, and because the weight balancing of element self is destroyed, so also exist high-precision driving to become difficult problem.
In addition, particularly in the occasion of considering purposes such as vehicle-mounted, require the storage temperature range of liquid-crystal aberration correcting element to reach-40～90 ℃, the serviceability temperature scope reaches-20～80 ℃, if but temperature variation, then liquid crystal and substrate can expand and shrink, at this moment, because the expansivity of liquid crystal and substrate is different, so as above-mentioned patent documentation 1, when making substrate form to such an extent that grow and the occasion that allows terminal compile at this place in a side, whole distortion unevenly consequently may cause bad influence to the calibration result that obtains.
Moreover, during element before making, make 2 substrates that vary in size relative, inject also encapsulated liquid crystals from the side clearance of this substrate.Therefore the problem that exists is, need to make one by one the combination that size is machined into the little substrate about several mm, and respectively to its injection and sealing of carrying out liquid crystal, production efficiency is poor, and cost is also high.In addition, for the position of the electrode lead-out part that is arranged on the side, must make 2 kinds of different elements of direction of orientation of liquid crystal molecule respectively, efficient is low.
In addition, as mentioned above,, detect, also have inefficient problem so need carry out product to each element after the final processing because electrode lead-out part is provided with highlightedly in the side of element.
On the other hand, in order to carry out good correction, it is poor to it is desirable to the aberration interpolation opposite phases that produces.But, for example resembling the occasion that the Region Segmentation of electrode is become the patent documentation 2 concentric circles, exist the phase differential that obtains to become stair-stepping problem.
Therefore, wish the double liquid-crystal aberration correcting element that research and development can be carried out linearity correction to the aberration that produces.
Patent documentation 1: the spy open the 2002-319202 communique (claim 1, paragraph 0038, Fig. 2)
Patent documentation 2: the spy opens 2002-237077 communique (claim 1, paragraph 0014)
Summary of the invention
Therefore, the objective of the invention is to, provided a kind of with former element to compare, can realize miniaturization and light-weighted novel double liquid-crystal aberration correcting element.
In addition, the present invention ground purpose also is, provides a kind of and can proofread and correct linearly because the aberration that the thickness deviation of CD etc. produce, thereby improve the double liquid-crystal aberration correcting element of the precision that writes down and regenerate.
In addition, the present invention also aims to, provide a kind of can be owing to temperature variation does not produce uneven distortion, double liquid-crystal aberration correcting element that can the holding element performance.
And then, the present invention also aims to manufacturing ten thousand methods of double liquid-crystal aberration correcting element that the high and low cost of a kind of production efficiency are provided, can carry out the detection of element efficiently.
In order to address the above problem, in the present invention, following double liquid-crystal aberration correcting element is provided, promptly constitute by 2 stacked on thickness direction liquid-crystal aberration correcting elements, above-mentioned each liquid-crystal aberration correcting element has on one and is formed with public electrode, on another, be formed with a pair of substrate and the liquid crystal that is clipped in the above-mentioned a pair of substrate of segment electrode, each upper edge thickness direction at above-mentioned a pair of substrate is penetrated with a plurality of holes, in above-mentioned hole, be provided with simultaneously the terminal on any one that is connected to above-mentioned public electrode and segment electrode, be formed with the inlet that is used to inject liquid crystal on of above-mentioned a pair of substrate, the direction of orientation of the liquid crystal when not applying voltage is quadrature in 2 liquid-crystal aberration correcting elements.
According to said structure, the inlet that is used to be connected to terminal on public electrode and the segment electrode and liquid crystal is configured in the surface of substrate by the hole.
In addition, in the present invention, following double liquid-crystal aberration correcting element is provided, promptly constitute by 2 stacked on thickness direction liquid-crystal aberration correcting elements, above-mentioned each liquid-crystal aberration correcting element has on one and is formed with public electrode, on another, be formed with a pair of substrate and the liquid crystal that is clipped in the above-mentioned a pair of substrate of segment electrode, on above-mentioned segment electrode, change size or configuration space or the two according to the position on the above-mentioned segment electrode and be formed with a plurality of non-electrode area that does not have electrode material, inboard in above-mentioned non-electrode area, the mode that produces uneven orientation according to liquid crystal when applying voltage constitutes, each upper edge thickness direction at above-mentioned a pair of substrate is penetrated with a plurality of holes, in above-mentioned hole, be provided with simultaneously the terminal on any one that is connected to above-mentioned common electrode and segment electrode, be formed with the inlet that is used to inject liquid crystal on of above-mentioned a pair of substrate, the direction of orientation of the liquid crystal when not applying voltage is quadrature in 2 liquid-crystal aberration correcting elements.
According to said structure, except that above-mentioned effect, because central part in a plurality of non-electrode area that form, on direction, form weak electric field perpendicular to electrode, end in non-electrode area, in an inclined direction form electric field, thus be orientated unevenly along this Electric Field Distribution liquid crystal molecule, thereby obtain refractive index from the center of non-electrode area to peripheral continually varying lens effect.Therefore, by the phase differential that allows light beam stipulate, aberration is proofreaied and correct by this lens component.Particularly by changing the size or the configuration space of non-electrode area, the phase differential difference that obtains in each zone is carried out the best corresponding with aberration as element integral body and is proofreaied and correct.
In addition, the invention is characterized in, in the double liquid-crystal aberration correcting element of above-mentioned record, substrate forms quadrangle, the border circular areas that light beam passed through in the aforesaid substrate is sealed with liquid crystal, near the bight beyond the above-mentioned border circular areas, is provided with the inlet and the terminal of liquid crystal.
According to said structure, be used effectively as the space that forms the hole near the bight of substrate, the weight balancing of element improves simultaneously.And in the occasion that liquid crystal expands and shrinks, integral body can be out of shape equably.
In addition, the invention is characterized in, in the double liquid-crystal aberration correcting element of above-mentioned record, be connected between the terminal on the public electrode of each stacked liquid-crystal aberration correcting element, be connected between the terminal on the segment electrode of a liquid-crystal aberration correcting element and be connected between the terminal on the segment electrode of another liquid-crystal aberration correcting element and on thickness direction, interconnect, and be pooled to respectively and be set in place on the terminal on the substrate in the outside of double liquid-crystal aberration correcting element.
In addition, the invention is characterized in, in the double liquid-crystal aberration correcting element of above-mentioned record, be connected between the terminal on the public electrode of each stacked liquid-crystal aberration correcting element, be connected between the terminal on the segment electrode of a liquid-crystal aberration correcting element and be connected between the terminal on the segment electrode of another liquid-crystal aberration correcting element and on thickness direction, interconnect, and be pooled to respectively and be set in place on the terminal on the substrate in the outside of double liquid-crystal aberration correcting element.
According to said structure, each terminal that is used for driving element compiles and is configured in a substrate.
In addition, the invention is characterized in, in the double liquid-crystal aberration correcting element of above-mentioned record, be connected to the terminal on the segment electrode of a liquid-crystal aberration correcting element and be connected to terminal on the segment electrode of another liquid-crystal aberration correcting element and be set in place near the bight at the diagonal angle of tetragonal substrate, be connected to the terminal on the public electrode and the inlet of liquid crystal and be arranged near the remaining bight.
According to said structure, consider that the efficient when making element is provided with the position of each terminal.
And, the invention provides the manufacture method of the double liquid-crystal aberration correcting element of above-mentioned record, it has following operation: to as the substrate setting of the mother metal terminal corresponding with a plurality of liquid-crystal aberration correcting elements and the operation of inlet; Form the operation of segment electrode; To having formed the substrate of above-mentioned terminal, inlet and segment electrode, on relative position, terminal is set, will form the operation that another substrate of public electrode makes up simultaneously; After combination, inject the operation of liquid crystal from inlet; With respect to the group of arranging, make another group upset that obtains through each same operation and revolve and carry out stacked operation after turning 90 degrees through a plurality of liquid-crystal aberration correcting element of above-mentioned each operation manufacturing; And the operation that is divided into each double liquid-crystal aberration correcting element.
And, the invention provides the manufacture method of the double liquid-crystal aberration correcting element of above-mentioned record, it has following operation: to the operation as the substrate setting of the mother metal terminal corresponding with a plurality of liquid-crystal aberration correcting elements; Form the operation of segment electrode; To having formed the substrate of above-mentioned terminal and segment electrode, terminal is set on relative position and inlet further is set, will form the operation that another substrate of public electrode makes up simultaneously; After combination, inject the operation of liquid crystal from inlet; With respect to the group of arranging, make another group upset that obtains through each same operation and revolve and carry out stacked operation after turning 90 degrees through a plurality of liquid-crystal aberration correcting element of above-mentioned each operation manufacturing; And the operation that is divided into each double liquid-crystal aberration correcting element.
According to said method, in the manufacturing of double liquid-crystal aberration correcting element, all keeping carrying out as the state of the substrate of mother metal up to final operation.And the past road of the direction of orientation phase quadrature of liquid crystal and 2 liquid-crystal aberration correcting elements in loop are by same operation manufacturing.
In addition, the invention is characterized in, in the manufacture method of above-mentioned record, forming the detection distribution that is connected to jointly on each terminal on the surface of substrate, before the operation of stacked another group of group that a plurality of liquid-crystal aberration correcting element is arranged, or before being divided into the operation of each double liquid-crystal aberration correcting element, perhaps before these two operations, utilize above-mentioned distribution to detect.
According to said method, can under the mother metal state before being divided into each element, carry out the confirming operation of element once.
In addition, the invention is characterized in, in the manufacture method of above-mentioned any record, when stacked another of the group that a plurality of liquid-crystal aberration correcting element is arranged organized, in a vacuum, carry out stacked across closed material with the closure state setting of surrounding the border circular areas that light beam passed through.
According to said method,, there is not bonding agent, so can keep high transmission rate owing to become vacuum state between 2 liquid-crystal aberration correcting elements.
And then, the invention is characterized in, in the manufacture method of above-mentioned any record, when stacked another of the group that a plurality of liquid-crystal aberration correcting element is arranged organized, in air, across carrying out stacked with the closed material of the state setting that partially opens of surrounding the border circular areas that light beam passed through and the bonding agent that is arranged on above-mentioned closed material inboard.
According to said method, the operation of stacked 2 liquid-crystal aberration correcting elements can be carried out in air effectively.At this moment, preferred selective refraction rate and the approaching bonding agent of substrate.
Double liquid-crystal aberration correcting element of the present invention is because run through porose on the surface of substrate, the part in this hole forms terminal, thus be provided with in the side terminal before element compare, can on substrate, not apply excessive power.Therefore, can adopt thinner substrate, the result can realize the lightweight of element.
And, by on the surface of substrate, disposing terminal, correspondingly can realize the miniaturization of element.
Moreover, on segment electrode, be formed with the occasion of a plurality of non-electrode area, by making liquid crystal molecule 1, can produce lens effect along the locational non-uniform electric field that is formed on this non-electrode area orientation that distributes.Thereby can proofread and correct aberration linearly by the generations such as thickness deviation of CD.
In addition, because the central portion at tetragonal substrate circularly sandwiches liquid crystal, and is provided with terminal etc. in the bight of this substrate, the weight balancing of element is good, even cause that in temperature variation liquid crystal expands and the occasion of contraction can not produce uneven distortion yet, can keep the performance of element.
In addition, manufacture method according to double liquid-crystal aberration correcting element of the present invention, all carry out under the mother metal state before being divided into each element because form the operation of terminal and the operation of injection liquid crystal etc.,, can reduce cost significantly so production efficiency improves.
And, owing to when detecting each element, also can under the mother metal state, carry out, so can realize high-level efficiency.
And, can make 2 stacked liquid-crystal aberration correcting elements with identical operation, only make a upset and revolve to turn 90 degrees, just can easily make the dual element of the direction of orientation phase quadrature of liquid crystal.Therefore, greatly improve throughput rate, can access stable quality.
Description of drawings
Fig. 1 is the vertical view of an embodiment of expression double liquid-crystal aberration correcting element of the present invention.
Fig. 2 is the A-A cut-open view of Fig. 1.
Fig. 3 is the B-B cut-open view of Fig. 1.
Fig. 4 is the enlarged drawing of the S part of Fig. 1.
Fig. 5 is the figure that the state of orientation of liquid crystal when applying voltage is described.
Fig. 6 is the process flow diagram of the manufacturing process of expression double liquid-crystal aberration correcting element.
Fig. 7 is the process flow diagram of the manufacturing process of expression double liquid-crystal aberration correcting element.
Fig. 8 is the figure of state of the S103 of expression P direction.
Fig. 9 is the cut-open view of terminal part of the state of expression S103.
Figure 10 is the figure of state of the S106 of expression P direction.
Figure 11 is the figure of state of the S108 of expression P direction.
Figure 12 is the figure of state of the S205 of expression Q direction.
Figure 13 is the figure of state of the S104 of expression R direction.
Figure 14 is the figure of the state of expression S501.
Figure 15 is the figure of the state of expression S305.
Figure 16 is the figure of the state of expression S504.
Figure 17 is the figure of other embodiment of the state of expression S305.
Symbol description
1 double liquid-crystal aberration correcting element
1A, 1B liquid-crystal aberration correcting element
10,11 substrates
101 bights
20 public electrodes
21 segment electrodes
211 non-electrode area
30A～30F hole
31A～31F terminal
40 liquid crystal
50,51,51A closed material
52 bonding agents
60 inlets
61 encapsulants
70 conductive material
80 masks
90 distributions
100,110 substrates as mother metal
Embodiment
Below, be elaborated to being used to implement preferred plan of the present invention.
Fig. 1 is the vertical view of an embodiment of double liquid-crystal aberration correcting element of the present invention.In addition, Fig. 2 is the A-A cut-open view of Fig. 1, and Fig. 3 is the B-B cut-open view of Fig. 1.As Fig. 1～shown in Figure 3, double liquid-crystal aberration correcting element 1 makes by conductive material 70 and closed material 51 that 2 liquid-crystal aberration correcting element 1A, 1B being formed by same structure are stacked on thickness direction to be constituted.And liquid-crystal aberration correcting element 1A (1B too) is by at the substrate 10 that has formed public electrode 20 with formed and sandwich liquid crystal 40 between the substrate 11 of segment electrode 21 and roughly constitute.In addition, operated by rotary motion is between public electrode 20 and the liquid crystal 40 and liquid crystal orientation film, transparent insulating layer between segment electrode 21 and the liquid crystal 40 and be arranged on antireflection film on the substrate 10,11 etc. and omit diagram.In addition, by closed material 50 liquid crystal 40 is enclosed in the inboard.
In this double liquid-crystal aberration correcting element 1, make light beam by in the zone that is provided with liquid crystal 40, this moment is by applying voltage between public electrode 20 and segment electrode 21, thereby is phase differential according to the state of orientation that the position in the zone gives different liquid crystal 40, proofreaies and correct the aberration of light thus.At this moment, because liquid-crystal aberration correcting element 1A, 1B make the direction of orientation quadrature of the liquid crystal 40 when not applying voltage, so can proofread and correct aberration on road and the loop well.
Structure to segment electrode 21 is elaborated below.
In this embodiment, promptly shown in Figure 4 as the S partial enlarged drawing of Fig. 1, on segment electrode 21, do not exist a plurality of non-electrode area 211 of electrode material to be formed poroid.And a plurality of non-electrode area 211 change size and configuration space according to the position on segment electrode 21 continuously.And the quantity of non-electrode area 211 is described lessly in Fig. 4 for simplicity, has formed a plurality of non-electrode area 211 more imperceptibly but be actually.And, in this embodiment, along the radial direction r of segment electrode 21, temporarily become minor diameter according to the big or small d1 of non-electrode area 211 from major diameter and become major diameter again, and configuration space d2 temporarily becomes the mode that narrow interval becomes wide interval again from wide interval and forms continuous pattern.
Apply the occasion of voltage between public electrode 20 and segment electrode 21, the state of the electric field E the non-electrode area 211 near as shown in Figure 5.That is, in the relative part a of public electrode 20 and segment electrode 21, forming highfield to the direction perpendicular to electrode, is among the part b at the central part of non-electrode area 211, also forms weak electric field to the direction perpendicular to electrode.And in the part c near the border of non-electrode area 211 and segment electrode 21, electric field becomes the state that tilts to segment electrode 21.
Like this, be positive occasion in the dielectric anisotropy of liquid crystal 40, liquid crystal molecule is along electric field E orientation, so in part a, liquid crystal molecule is with respect to the electrode homeotropic alignment, in part b, because a little less than the electric field, so keep the state parallel constant, in part c, be orientated obliquely with electrode.Promptly in the inboard of non-electrode area 211, liquid crystal 40 becomes uneven state of orientation.At this moment, to the refractive index of the light by element (unusual light) because form the distribution that the mind-set periphery diminishes continuously from non-electrode area 211, so can show the effect of convex lens in the part of non-electrode area 211.The light that thereby phase differential can be given to pass through.
Therefore, in size that makes non-electrode area 211 according to the position on the segment electrode 21 and configuration space continually varying occasion, because the phase differential difference that on each position, obtains, so by according to the suitable configuration pattern of the non-electrode area 211 of design of the aberration that produces, then as element integral body aberration correction linearly.
And in the occasion that makes the change in voltage that applies, the state of orientation of liquid crystal molecule can correspondingly change.For example, in the occasion that increases voltage, liquid crystal molecule is also vertical orientated at the center of non-electrode area 211, becomes big concavees lens effect so show refractive index mind-set periphery from non-electrode area 211 on the contrary.Promptly because the phase differential curvilinear motion that can element integral body be obtained, thus by for example according to regeneration (RF) waveform calculation correction amount, and control voltage according to its result, can proofread and correct the aberration of generation in real time.
In addition, in the example of Fig. 4, the size of non-electrode area 211 and configuration space are changed along radial direction r.Like this, because can obtain being the phase differential curve that concentric circles changes, so can proofread and correct the spherical aberration that the thickness deviation by CD causes well corresponding to the configuration pattern of non-electrode area 211.And, because the size of non-electrode area 211 and configuration space are changed continuously, so be not, carry out stepped discontinuous correction, but can carry out more linear correction as the former aberration correcting element that segment electrode is divided into concentric circles.
Moreover (for example regional M, regional N) is configured to irregular (random configuration) in each zone when configuration space of non-electrode area 211 preferably is divided into concentric circles on segment electrode 21.Promptly as shown in Figure 4, configuration space h1 is different slightly with h2.Like this, can prevent to interfere mutually by the light of adjacent non-electrode area respectively, thus the situation of wave front confusion.
And, when the occasion that does not almost have interference effect from the relation estimation of optical wavelength and configuration space, also can make h1 identical with h2 and regularly the configuration.
In addition,, be fit to adopt following method, promptly at first on whole on the substrate 11, form electrode material, form a plurality of non-electrode area 211 by optical processing with the configuration pattern of expecting then as the method that forms non-electrode area 211.Like this, can easily make the fine configuration pattern of continually varying.The method of being undertaken by mask in the time of perhaps also can adopting the evaporation that on substrate 11, carries out segment electrode 21 and plating etc.
Next, adopt transparency carrier such as glass substrate as substrate 10,11.In addition, suitably employing has formed the transparency electrodes such as ITO of indium-tin oxide film as public electrode 20 and segment electrode 21.
And, in this embodiment, on the thickness direction of substrate 11, run through porose 30A, 30B, 30C, on substrate 10, also run through porose 30D, 30E, 30F equally.In each hole, be provided for being connected to terminal 31A, 31B, 31C, 31D, 31E, 31F on public electrode 20 and the segment electrode 21 respectively.Be that terminal 31A, 31D are connected on the segment electrode 21 of liquid-crystal aberration correcting element 1A, terminal 31B, 31E are connected on the public electrode 20, and terminal 31C, 31F are connected on the segment electrode 21 of liquid-crystal aberration correcting element 1B.(for example, terminal 31B and 31E) is connected by conductive material 70 between the relative terminal.And each terminal is by forming along the metals such as inner peripheral surface plating Ni-Au in hole etc.
As mentioned above, by with each terminal arrangement on the surface of substrate 10,11, with compile in the side of substrate the configuration terminal before element compare, can not apply unbalanced power, fault such as be difficult for to produce the crack and break to element.Therefore, can make substrate 10,11 thinner (for example 0.2mm), lighter element is quantized.Specifically, and compared in the past, can make weight saving more than 40% (from before terminal become the effect that is configured in lip-deep terminal and be about 10%, make the thickness of substrate be about 33% from the effect that 0.3mm becomes 0.2mm).
In addition, in this embodiment, be used for liquid crystal 40 is injected into the surface that inlet 60 between the substrate 10,11 is formed on substrate 11.Inlet 60 be shaped as circle, ellipse etc., inject after the liquid crystal 40, suitably seal with encapsulant 61.
Particularly in the example of Fig. 1, the inlet 60 of terminal 31A～31F and liquid crystal all is configured on the surface of substrate 10,11, on thickness direction, interconnect between the relative terminal, the liquid-crystal aberration correcting element 1A that collects in upside goes up the driving of setting with on each terminal, so can improve as described later, the production efficiency of element.
And, in the example of Fig. 1, border circular areas (having formed the zone of segment electrode 21 and public electrode 20) that light beam passed through in addition, form near the inlet 60 that forms porose 30A～30F and liquid crystal the bight 101 on the dimetric substrate 11 (10).And, closed material 50 is arranged to circular, liquid crystal 40 is sealed in the border circular areas that light beam passes through.Like this, because the remainder on the substrate 11 that light beam did not pass through effectively can be utilized as the position of terminal etc., so can make element miniaturization more.In addition, by terminal etc. is configured in bight 101, the weight balancing that can make element is for best.Consequently, high-precision driving can be carried out, and,,, the performance of element can be kept so can not cause uneven distortion because substrate 11 is exerted pressure equably in the occasion that temperature variation causes liquid crystal to expand and shrink.
Also have, in the element of the liquid crystal that former employing is general (liquid crystal display cells etc.),, need make margo frontalis part (remainder of substrate) narrow as far as possible along with the expansion of viewing area.And, also have the tendency of increase because cut apart number of terminals such as type of drive, so effectively utilize the idea in the bight of substrate to can be described as unprecedented original creation of the present invention corresponding to height.
In addition, the configuration pattern of a plurality of non-electrode area 211 is not limited to above-mentioned embodiment.Promptly can be corresponding to the aberration that produces etc., suitably set the size of non-electrode area 211 or configuration space or these two according to the position on the segment electrode 21.Specifically, for example can list the size that makes non-electrode area on the contrary with Fig. 4 from the center of segment electrode 21 towards periphery by minor diameter to major diameter again to minor diameter continually varying situation etc.In addition, be not limited to and make size and configuration space on segment electrode 21, be the situation that concentric circles ground changes, for example about segment electrode 21 is divided into, when regional, also can in each zone, form different configuration patterns.At this moment, can proofread and correct the coma aberration that bending by CD etc. causes effectively.
And in the above-described embodiment, the occasion circular to being shaped as of a plurality of non-electrode area 211 is illustrated, but is not limited to this, for example considers the kind of aberration of generation and frictional direction etc., can form other shape.Specifically, can list ellipse, semicircle etc.
In addition, in the example of Fig. 1, form the pattern of segment electrode 21 in the mode that is directly connected on the terminal 31A, but in addition, for example also can after forming each electrode pattern that constitutes by the border circular areas that seals, connect each electrode and each terminal with lead-in wire etc.
Also have, interconnect on thickness direction for making between the terminal that is arranged on the substrate 10,11, and it is pooled on the terminal on the uppermost substrate, in the above-described embodiment, with the occasion that has formed a plurality of non-electrode area 211 on segment electrode 21 is that example is illustrated, but be not limited thereto, for example can be suitable for too with being concentric circles in the occasion that segment electrode is divided into a plurality of zones.At this moment, by on substrate, disposing terminal, also can realize the miniaturization and the lightweight of element.Cut apart about perhaps also can carrying out segment electrode.Can proofread and correct the coma aberration that causes by the bending of CD etc. this moment well.
Above double liquid-crystal aberration correcting element 1 can constitute optical pick-up together with for example LASER Light Source, polarizer, 1/2 wavelength plate, 1/4 wavelength plate, object lens, photo detector etc., is assembled in the optical disc apparatus and uses.
Particularly because can proofread and correct toward the aberration in road and loop, so also be suitable for use in the high density compact discs such as BD of future generation (Blu-ray disc) and multilayer disk.
Below, the manufacture method of the illustrative double liquid-crystal aberration correcting element 1 of above-mentioned Fig. 1 is described based on Fig. 6～Figure 17.
Manufacturing procedure to the substrate 11 among the liquid crystal correcting element 1A describes at first, successively.Fig. 8～Figure 11 shows the state of observing from the P direction of Fig. 2.At first, as Fig. 6 and shown in Figure 8, on substrate 110, form the inlet 60 (S101) of hole 30A, 30B, 30C and the liquid crystal corresponding at assigned position with a plurality of liquid-crystal aberration correcting elements as mother metal.Then, forming antireflection film (AR film) (S102), afterwards, terminal 31A, 31B, 31C are arranged on (S103) in each hole as on whole of the substrate 110 of mother metal.In addition, as described later, terminal 31A～31C is at substrate overturn 110 and make it revolve the occasion that turn 90 degrees, and must overlap between the terminal, so the substrate 110 as mother metal is preferably square, and a plurality of liquid-crystal aberration correcting elements of arranging form identical quantity on vertical and horizontal.In addition, when each terminal (for example terminal 31A) is set, can carry out well by following method, promptly as shown in Figure 9, it is after 80s to form mask on the part beyond the 30A of hole, by formation terminal 31A such as coating metals, removes mask 80 afterwards.
Next, the side of seeing from the R direction of Fig. 2 is formed the distribution that is used to detect described later, (S104), utilize evaporation etc. on assigned position, to form electrode material (S105) then, utilize etching etc. to form pattern, thereby make segment electrode 21 (S106).This state shown in Figure 10.In addition, the operation of above-mentioned terminal and the operation of the distribution that is formed for detecting being set also can carry out front and back.
Then, as required at the stacked transparent insulating layer in the side of P direction, form liquid crystal orientation films such as PVA, (S107) rubs.Wait the closed material 50 (S108) that is used for encapsulated liquid crystals in the arranged outside of segment electrode 21 by printing again.This state shown in Figure 11.
On the other hand, about another relative substrate (substrate 10 sides), shown in Figure 12 as what observe from the Q direction of Fig. 2, to substrate 100 as mother metal, on the position identical, form hole 30D, 30E, 30F (S201) with aforesaid substrate 110, form AR film (S202), terminal 31D, 31E, 31F (S203) are set then, carry out (S204) such as evaporations of electrode material, form pattern, thereby form public electrode 20 (S205).In addition, rub (S206) behind the formation liquid crystal orientation film, be provided for the conductive material (S207) that is connected with each terminal of opposing substrates 110 by printing etc.
In addition, according to circumstances, can also form inlet 60, perhaps at substrate 10 sides printing closed material 50, in substrate 11 sides printing conductive material in substrate 10 sides.
Then, the substrate 110 and the substrate 100 (S301) of above-mentioned terminal etc. relatively have been combined to form.This operation waits with the bonding agent applying across pad carries out.
Then, inject liquid crystal (S302) to the inboard of closed material 50, seal by encapsulant from inlet 60.Then, use each terminal of arranging on as the substrate 100 of mother metal, carry out the motion detection (S303) of element.At this moment, on substrate 110, as shown in figure 13, because be pre-formed distribution 90 (S104), so can utilize this distribution 90 to carry out all detections once.For the underproof position of testing result, carry out NG mark (S304).
Through each above operation (S101～S303), obtain a plurality of liquid-crystal aberration correcting element 1A and arrange the group that forms.Then, (another group (arranging liquid-crystal aberration correcting element 1B) that S 101～S303) makes (S501) this to be organized each same operation of stacked process.At this moment, as shown in figure 14, in Z direction another group of overturning, and it is revolved turn 90 degrees, after becoming this state, substrate 100 sides of the group that stacked liquid-crystal aberration correcting element 1A is arranged and substrate 100 sides of the group that liquid-crystal aberration correcting element 1B is arranged thus with between the public terminal, make up between the corresponding section terminal, and obtain the state of the direction of orientation quadrature of liquid crystal.
In addition, will organize and group is carried out when stacked, between group, print (S305, S401) such as closed material 51 and conductive material 70 in advance.This closed material 51 and conductive material 70 can be separately positioned on liquid-crystal aberration correcting element 1A side, also can be arranged on relative liquid-crystal aberration correcting element 1B side.
As shown in figure 15, closed material 51 can be provided with the closure state that surrounds the border circular areas that light beam passed through.At this moment, can not be compromised, group and group are carried out stacked action need and carried out in a vacuum owing to the expansion of the gas that is enclosed in closed material 51 inboards in order to make stacked state.At closed material 51 is closure state and inboard during for vacuum, and dust etc. can not invaded inside, can improve transmittance, so be preferred.
Then, will organize and group carry out stacked after, use to be configured in as each terminal on the substrate 110 of mother metal, carry out the motion detection (S502) of double liquid-crystal aberration correcting element.At this moment, identical with above-mentioned occasion, also can utilize the distribution 90 that is formed on the substrate 110 to carry out all detections once.For the underproof position of testing result, carry out NG mark (S503).
At last, as shown in figure 16, utilize cutter etc. will be divided into each double liquid-crystal aberration correcting element 1 (S504), through the detection operation (S505) of single product afterwards, load and transport (S507) as the substrate of mother metal.And in the detection of single product, underproof element will be discarded or repair, and perhaps transfers to step for regeneration (S506).
In addition, will organize and group carries out also can replacing the closed material 51 shown in Figure 15 when stacked, get involved closed material 51A as shown in Figure 17, that be provided with the state that partially opens that surrounds the border circular areas that light beam passed through.At this moment, bonding agent 52 is set, utilizes this bonding agent 52 to make between the group bonding in the inboard of closed material 51A.In the example of Figure 17, because the lamination operation that can in air, organize and organize, so have advantage of high production efficiency.
According to above manufacture method, the formation of each terminal and electrode and the injection process of liquid crystal carry out under the mother metal state before being divided into each element all, so production efficiency is very high, can also significantly reduce cost.In addition, can also expand the scale of production at an easy rate.
2 particularly stacked liquid-crystal aberration correcting elements are not to make respectively, but by same operation manufacturing, only turn 90 degrees by the side and revolving of overturning just passable, so improved whole production efficiency widely.
And, inject and detection operation that encapsulated liquid crystals carries out afterwards also can the mother metal state next and carry out, so industrial be very useful.
Claims (13)
1. a double liquid-crystal aberration correcting element is characterized in that,
Be made of 2 stacked on thickness direction liquid-crystal aberration correcting elements, described each liquid-crystal aberration correcting element has and is formed with public electrode and is formed with a pair of substrate of segment electrode and by the liquid crystal of described a pair of substrate clamping on another substrate on a substrate;
Each upper edge thickness direction at described a pair of substrate is penetrated with a plurality of holes, is provided with the terminal on any one that is connected to described public electrode and segment electrode simultaneously in described hole;
Be connected between the terminal on the public electrode of each stacked liquid-crystal aberration correcting element, be connected between the terminal on the segment electrode of a liquid-crystal aberration correcting element and be connected between the terminal on the segment electrode of another liquid-crystal aberration correcting element, on thickness direction, interconnect;
On of described a pair of substrate, be formed with the inlet that is used to inject liquid crystal, the direction of orientation quadrature of the liquid crystal when not applying voltage in 2 liquid-crystal aberration correcting elements.
2. a double liquid-crystal aberration correcting element is characterized in that,
Be made of 2 stacked on thickness direction liquid-crystal aberration correcting elements, described each liquid-crystal aberration correcting element has and is formed with public electrode and is formed with a pair of substrate of segment electrode and by the liquid crystal of described a pair of substrate clamping on another substrate on a substrate;
On described segment electrode, be formed with a plurality of non-electrode area that does not have electrode material, these a plurality of non-electrode area change size and/or configuration space according to the position on the described segment electrode, in the inboard of described non-electrode area, when applying voltage, liquid crystal produces uneven orientation;
Each upper edge thickness direction at described a pair of substrate is penetrated with a plurality of holes, in described hole, be provided with simultaneously the terminal on any one that is connected to described public electrode and segment electrode, on of described a pair of substrate, be formed with the inlet that is used to inject liquid crystal, the direction of orientation quadrature of the liquid crystal when not applying voltage in 2 liquid-crystal aberration correcting elements.
3. according to the double liquid-crystal aberration correcting element of claim 2 record, it is characterized in that substrate forms quadrangle, the border circular areas that passes through along the light beam of described substrate is sealed with liquid crystal, near the bight beyond the described border circular areas, be provided with the inlet and the terminal of liquid crystal.
4. according to the double liquid-crystal aberration correcting element of claim 2 record, it is characterized in that, be connected between the terminal on the public electrode of each stacked liquid-crystal aberration correcting element, be connected between the terminal on the segment electrode of a liquid-crystal aberration correcting element and be connected between the terminal on the segment electrode of another liquid-crystal aberration correcting element, on thickness direction, interconnect, and be pooled to respectively on the terminal that is provided with on the substrate in the outside that is positioned at double liquid-crystal aberration correcting element.
5. according to the double liquid-crystal aberration correcting element of claim 3 record, wherein, be connected between the terminal on the public electrode of each stacked liquid-crystal aberration correcting element, be connected between the terminal on the segment electrode of a liquid-crystal aberration correcting element and be connected between the terminal on the segment electrode of another liquid-crystal aberration correcting element, on thickness direction, interconnect, and be pooled to respectively on the terminal that is provided with on the substrate in the outside of double liquid-crystal aberration correcting element.
6. according to the double liquid-crystal aberration correcting element of claim 5 record, wherein, be connected to the terminal on the segment electrode of a liquid-crystal aberration correcting element and be connected to terminal on the segment electrode of another liquid-crystal aberration correcting element, be set in place near the bight at the diagonal angle of tetragonal substrate, be connected to the terminal on the public electrode and the inlet of liquid crystal and be arranged near remaining bight.
7. the manufacture method of the double liquid-crystal aberration correcting element of claim 6 record has following operation: to as the substrate setting of the mother metal terminal corresponding with a plurality of liquid-crystal aberration correcting elements and the operation of inlet; Form the operation of segment electrode; On the substrate that has formed described terminal, inlet and segment electrode, be combined in the operation that opposed position is provided with terminal and has formed another substrate of public electrode; After combination, inject the operation of liquid crystal from inlet; With respect to the group of arranging, make another group upset that obtains through each same operation and revolve and carry out stacked operation after turning 90 degrees through a plurality of liquid-crystal aberration correcting element of described each operation manufacturing; And the operation that is divided into each double liquid-crystal aberration correcting element.
8. according to the manufacture method of the double liquid-crystal aberration correcting element of claim 6 record, has following operation: to operation as the substrate setting of the mother metal terminal corresponding with a plurality of liquid-crystal aberration correcting elements; Form the operation of segment electrode; On the substrate that has formed described terminal and segment electrode, be combined in the operation that opposed position is provided with terminal and inlet and is formed with another substrate of public electrode; After combination, inject the operation of liquid crystal from inlet; With respect to the group of arranging, make another group upset that obtains through each same operation and revolve and carry out stacked operation after turning 90 degrees through a plurality of liquid-crystal aberration correcting element of described each operation manufacturing; And the operation that is divided into each double liquid-crystal aberration correcting element.
9. according to claim 7 or 8 manufacture methods of putting down in writing, wherein, be provided with inlet and becoming on the surface of substrate of above-mentioned mother metal, form be connected to jointly the terminal that is connected with a plurality of liquid-crystal aberration correcting elements public electrode separately and with terminal that segment electrode is connected on the detection distribution, before the operation of stacked another group of group that a plurality of liquid-crystal aberration correcting element is arranged, perhaps before being divided into the operation of each double liquid-crystal aberration correcting element, utilize described distribution to detect.
10. according to claim 7 or 8 manufacture methods of putting down in writing, wherein, when stacked another of the group that a plurality of liquid-crystal aberration correcting element is arranged organized, in a vacuum, carry out stackedly across closed material, wherein closed material is to surround the closure state setting of light beam by formed border circular areas.
11. manufacture method according to claim 9 record, wherein, when stacked another of the group that a plurality of liquid-crystal aberration correcting element is arranged organized, in a vacuum, carry out stackedly across closed material, wherein closed material is to surround the closure state setting of light beam by formed border circular areas.
12. manufacture method according to claim 7 or 8 records, wherein, when stacked another of the group that a plurality of liquid-crystal aberration correcting element is arranged organized, in air, carry out stackedly across closed material and the bonding agent that is arranged on described closed material inboard, wherein closed material is to surround light beam by formed border circular areas and there is the state setting of part opening.
13. manufacture method according to claim 9 record, wherein, when stacked another of the group that a plurality of liquid-crystal aberration correcting element is arranged organized, in air, carry out stackedly across closed material and the bonding agent that is arranged on described closed material inboard, wherein closed material is to surround light beam by formed border circular areas and there is the state setting of part opening.
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| JP105099/2004 | 2004-03-31 | ||
| JP2004105099 | 2004-03-31 |
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| KR (1) | KR100803340B1 (en) |
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| US8558985B2 (en) | 2008-06-06 | 2013-10-15 | Lensvector Inc. | Contact structure for a tunable liquid crystal optical device |
| WO2011008443A2 (en) | 2009-06-29 | 2011-01-20 | Lensvector Inc. | Wafer level camera module with active optical element |
| JP5647887B2 (en) * | 2010-12-24 | 2015-01-07 | 株式会社スマートセンシング | Multi-structure liquid crystal optical element and manufacturing method thereof |
| US9671671B2 (en) * | 2013-10-10 | 2017-06-06 | Stmicroelectronics Pte Ltd | Optical assembly including electrically conductive coupling member and related methods |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05232463A (en) * | 1992-02-21 | 1993-09-10 | Matsushita Electric Works Ltd | Liquid crystal element |
| JP2002237077A (en) * | 2001-02-07 | 2002-08-23 | Pioneer Electronic Corp | Element and unit for aberration correction |
| JP2002319202A (en) * | 2001-04-24 | 2002-10-31 | Asahi Glass Co Ltd | Magneto-optical head device |
| US6532202B1 (en) * | 1999-07-07 | 2003-03-11 | Matsushita Electric Industrial Co., Ltd. | Optical element, optical head and optical recording reproducing apparatus |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62106219U (en) * | 1985-12-25 | 1987-07-07 |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05232463A (en) * | 1992-02-21 | 1993-09-10 | Matsushita Electric Works Ltd | Liquid crystal element |
| US6532202B1 (en) * | 1999-07-07 | 2003-03-11 | Matsushita Electric Industrial Co., Ltd. | Optical element, optical head and optical recording reproducing apparatus |
| JP2002237077A (en) * | 2001-02-07 | 2002-08-23 | Pioneer Electronic Corp | Element and unit for aberration correction |
| JP2002319202A (en) * | 2001-04-24 | 2002-10-31 | Asahi Glass Co Ltd | Magneto-optical head device |
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| JP4532482B2 (en) | 2010-08-25 |
| CN1938606A (en) | 2007-03-28 |
| KR100803340B1 (en) | 2008-02-13 |
| JPWO2005098479A1 (en) | 2008-02-28 |
| KR20060132935A (en) | 2006-12-22 |
| WO2005098479A1 (en) | 2005-10-20 |
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