CN100405132C - High-precision positioner of superhigh vacuum polarizer - Google Patents
High-precision positioner of superhigh vacuum polarizer Download PDFInfo
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- CN100405132C CN100405132C CNB2005100170696A CN200510017069A CN100405132C CN 100405132 C CN100405132 C CN 100405132C CN B2005100170696 A CNB2005100170696 A CN B2005100170696A CN 200510017069 A CN200510017069 A CN 200510017069A CN 100405132 C CN100405132 C CN 100405132C
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- rotation system
- axle bolster
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- conical gear
- vacuum chamber
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Abstract
The invention relates to a kind of high precision orientation device of super high vacuum polarimeter, belonging to the optical mechanism technique field. It includes an external connection flange, a polarimeter, an orientation adjusting frame, a supporting frame, a bearing frame of the wheel system, a super high vacuum chamber, a device adjusting frame, a super high vacuum feed-in system and a driving umbrella gear. The external connection flange is welded on the crust of the super high vacuum chamber. The polarimeter is fixed at one end of the supporting frame. The orientation adjusting frame is welded on the inner side of the super high vacuum chamber crust. The orientation adjusting device is composed of the whorl bar with the bulb and screwed on the orientation adjusting frame. The supporting frame installs on the front bearing frame of the wheel system with the bearing and the gear of the driving umbrella. The bearing frame of the wheel system is fixed on the underside of the inner side of the super high vacuum chamber crust. The super high vacuum feed-in system is welded on the gear of the driving umbrella. The invention is stable and reliable and has high precision and correct orientation. It plays an important role in the scientific experiment.
Description
Technical field
The invention belongs to the optical-mechanical technical field, relate to hi-Fix mechanism polarizer, specifically a kind of high-precision positioner of superhigh vacuum polarizer.
Technical background
Hi-Fix mechanism polarizer mainly is to be applied in the light source calibration of synchrotron radiation light beam line.Because the light source of being demarcated and the polarization characteristic of synchrotron radiation are inconsistent, in calibration process, need to determine the influence of polarization characteristic, designed polarizer turn 90 degrees by revolving from 0 degree around optical axis exactly, record the light signal of this two states respectively, the process data processing is to reach the purpose of light source calibration.Therefore this device will satisfy designing requirement, just polarizer at first must be carried out the high-accuracy mechanical location when 0 spends, to determine accurate benchmark angle, make polarizer rotate to 90 degree by vacuum feedthrough system Rotatable umbrella gear, by the high-accuracy mechanical detent mechanism carry out angularity correction finish polarizer from 0 spend to 90 the degree angular transformation, hi-Fix mechanism polarizer has just satisfied this requirement.
Be used for just using in mechanical system a lot of devices in early days that ultrahigh vacuum slowly runs, its design is very ripe in " mechanical design handbook ".But no matter wherein all there is a pinpoint problem in which kind of mechanical rotation system.The way of mechanical rotation location adopts point method usually in atmosphere, promptly adds the band spring on ball, when ball runs to the position of locating slot, is subjected to just stop motion of drag effect, and this groove has just played spacing effect.Yet this physical construction can not be used in the ultrahigh vacuum device, and its shortcoming is: frictional resistance is excessive, and oil-free lubricatoin can not be moved, and the life-span is short, and is stuck easily.
Summary of the invention
In ultrahigh vacuum, use the defective that exists in order to overcome prior art, the present invention makes full use of the eccentric center principle of machinery, partly added one in mechanical rotation and laid particular stress on parts, make it automatic deflection, accurately locate in the desired position, purpose provides a kind of high-precision positioner of superhigh vacuum polarizer.This structure of invention has replaced traditional employed structure of hi-Fix mechanism polarizer fully, and effect is very good.
The present invention includes external forward flange 1, lay particular stress on device 2,0 degree location adjusting brackets 3,0 degree positioning regulator 4, bracing frame 5, rotation system rear axle bolster 6, external rear flange 7, supervacuum chamber 8, device adjusting bracket 9, ultrahigh vacuum feedthrough system 10, transmission conical gear 11, device adjusting bracket 12,90 degree positioning regulators 13,90 degree location adjusting brackets 14, rotation system front axle bolster 15.
In order to fully understand the present invention, describe formation of the present invention in detail according to accompanying drawing below.
External forward flange 1 and external rear flange 7 are welded on respectively on the ultrahigh vacuum chamber enclosure 8, and its position is mainly used in the vacuum pipe of bunch before and after connecting on logical optical axis A.Lay particular stress on device 2 and be screwed a end, play the effect of counterweight at bracing frame 5.0 degree location adjusting bracket 3 is welded on the inboard of ultrahigh vacuum chamber enclosure 8, is used for the work of 0 degree positioning regulator 4.0 degree positioning regulator 4 mainly is the 0 degree angle of regulating polarizer, it is that threaded rod by dribbling head constitutes, be screwed on the 0 degree location adjusting bracket 3, withstand on the 0 degree angle of laying particular stress on up-down adjustment polarizer 2 on device 2 bottom surfaces, confirm to adjust the back and twist dead with being equipped with cap but the rotation threaded rod is a bulb on the threaded rod.Have bearing seat on the bracing frame 5 and be installed on the rotation system front axle bolster 15 that has bearing, transmission conical gear 11, the rotation system rear axle bolster 6, and guarantee three work packages of light hole are arranged all on same optical axis.Rotation system rear axle bolster 6 and rotation system front axle bolster 15 are the rotation system framves that have B level bearing, are specifically designed to bracing frame 5 and rotate, and two rotation system bearing bracket stands are anchored on the bottom surface of ultrahigh vacuum chamber enclosure 8 inboards with screw.Ultrahigh vacuum feedthrough system 10 is welded on the transmission conical gear 11, when rotation ultrahigh vacuum feedthrough system 10, thereby drive 11 rotations of transmission conical gear deflector is rotated.90 degree location adjusting brackets 14 are welded on ultrahigh vacuum chamber enclosure 8 inboards.13 its effects of 90 degree positioning regulators are identical with 0 degree location adjusting bracket, 3,0 degree positioning regulators 4. Device adjusting bracket 9 and 12 is welded on respectively on the bottom surface in ultrahigh vacuum chamber enclosure 8 outsides, is used for the support of device.
The present invention is installed in the synchrotron radiation laboratory and experimentizes, the experiment result of use is very good, reliable and stable, the precision height, accurate positioning, test figure accurately and reliably, in experiment, demonstrate fully, the property freely of mechanism kinematic when mechanism of the present invention rotates vacuum feedthrough system and operation repeatedly in no oily ultrahigh vacuum, when polarizer rotates to the accuracy of 0 degree and 90 detent mechanisms when spending, mechanism of the present invention has solved the lag switch that exists in the polarizer machinery prior art, stall, the problem that transition is changeed by experiment.
Description of drawings
Fig. 1 is a structural scheme of mechanism of the present invention, also is the specification digest accompanying drawing.1 is external forward flange among the figure, and 2 lay particular stress on device, and 3 is 0 degree location adjusting bracket, 4 is 0 degree positioning regulator, 5 bracing frames, 6 rotation system rear axle bolsters, 7 external rear flanges, 8 supervacuum chambers, 9 device adjusting brackets, 10 ultrahigh vacuum feedthrough systems, 11 transmission conical gear, 12 device adjusting brackets, 13 is 90 degree positioning regulators, 14 is 90 degree location adjusting brackets, 15 rotation system front axle bolsters, and A leads to optical axis.
Embodiment
Further specify The Nomenclature Composition and Structure of Complexes of the present invention below in conjunction with accompanying drawing.
As shown in Figure 1, in order to guarantee that polarizer bracing frame 5 in the accurate location when logical optical axis A rotation 0 degree and 90 is spent, is provided with 0 degree positioning regulator 4 and 90 degree positioning regulators 13, in order to the minute adjustment angle in the position of 0 degree and 90 degree.0 degree positioning regulator 4 mainly is the 0 degree angle of regulating polarizer, it is that threaded rod by dribbling head constitutes, be screwed on the 0 degree location adjusting bracket 3, withstand on the 0 degree angle of laying particular stress on up-down adjustment polarizer on device 2 bottom surfaces, confirm to adjust the back and twist dead with being equipped with cap but the rotation threaded rod is a bulb on the threaded rod.90 degree positioning regulators 13 mainly are an angle of 90 degrees of regulating polarizer, it is that threaded rod by dribbling head constitutes, be screwed on the 90 degree location adjusting brackets 14, withstand on an angle of 90 degrees of laying particular stress on up-down adjustment polarizer on the device 2, confirm to adjust the back and twist dead with being equipped with cap but the rotation threaded rod is a bulb on the threaded rod.The effect of 90 degree positioning regulators 13 and 90 degree location adjusting brackets 14 is identical with 0 degree location adjusting bracket, 3,0 degree positioning regulator 4.During work when rotation ultrahigh vacuum feedthrough system 10, driving bracing frame 5 by transmission conical gear 11 rotates, vertical transmission conical gear modulus m=1.5 of transmission conical gear 11, accuracy class is 7 grades, minimum sideshake is b (b is a CNS), the gear substitute material is a stainless steel, and the swivel bearing accuracy class is the B level.Owing to lay particular stress on the eccentric force effect of device 2, make bracing frame 5 along logical optical axis A rotation, after polarizer 2 rotated to 90 degree positions from 0 degree, meticulous adjusting positioning regulator also was locked in the desired position.In the position fixing process of debugging angle, bracing frame 5 rotation good reproducibilities were in 5.3 seconds, the light angle beat is not more than 37.8 seconds, bracing frame 5 angular errors are not more than 21.36 seconds, axle is that radially rolling amount is not more than 2.6 μ, and bracing frame 5 is orientated 1.32 μ as, and radially 1.32 μ are measured in rolling, bracing frame 5 is parallel with logical optical axis A's, and nonparallelism is better than 5.36 seconds.After integral body is adjusted, when spending positions, finishes 0 degree and 90 of rotation adjustment detent mechanism by the optical precision instrument test angle.At last supervacuum chamber 8 is evacuated to ultrahigh vacuum.So just realized the hi-Fix of polarizer in no oily ultra-high vacuum environment.
In order to guarantee polarizer unlubricated not stall of when work oil, not lag switch, not stuck in ultrahigh vacuum, make the position hi-Fix of polarizer at 0 degree and 90 degree, guarantee the designing requirement of design objective, determined following technical indicator during design: polarizer 5 centre distance go out to stitch 327mm, and its caused light angle beat is not more than 37.8 seconds.Bracing frame 5 angle errors are not more than 21.36 seconds.Axle is that radially rolling amount is not more than 2.6 μ.Bracing frame 5 is orientated 1.32 μ as, and radially 1.32 μ are measured in rolling.Bracing frame 5 is parallel with logical optical axis A's, and nonparallelism is better than 5.36 seconds.In order to guarantee above-mentioned technical requirement, vertical transmission conical gear modulus m=1.5, accuracy class is 7 grades, minimum sideshake is b (CNS), and the gear substitute material is a stainless steel, and the swivel bearing accuracy class is the B level, after whole the adjustment, bracing frame rotation good reproducibility was in 5.36 seconds.When the position that 0 degree and 90 of rotation adjustment detent mechanism is spent, finish by the optical precision instrument test angle.
Claims (5)
1. high-precision positioner of superhigh vacuum polarizer is characterized in that comprising external forward flange (1), lays particular stress on device (2), 0 ° of location adjusting bracket (3), 0 ° of positioning regulator (4), bracing frame (5), rotation system rear axle bolster (6), external rear flange (7), supervacuum chamber (8), device adjusting bracket (9), ultrahigh vacuum feedthrough system (10) transmission conical gear (11), device adjusting bracket (12), 90 ° of positioning regulators (13), 90 ° of location adjusting bracket (14) rotation system front axle bolsters (15); External forward flange (1) and external rear flange (7) are welded on respectively on the ultrahigh vacuum chamber enclosure (8), its position is on logical optical axis A, lay particular stress on device (2) and be screwed a end at bracing frame (5), 0 ° of location adjusting bracket (3) is welded on the inboard of ultrahigh vacuum chamber enclosure (8), 0 ° of positioning regulator (4) is screwed on 0 ° of location adjusting bracket (3), have bearing seat on the bracing frame (5) and be installed in the rotation system front axle bolster (15) that has bearing, transmission conical gear (11), on the rotation system rear axle bolster (6), rotation system front axle bolster (15) and rotation system rear axle bolster (6) are anchored on the inboard bottom surface of ultrahigh vacuum chamber enclosure (8) with screw, ultrahigh vacuum feedthrough system 10 is welded on the transmission conical gear 11,90 ° of location adjusting brackets (14) are welded on ultrahigh vacuum chamber enclosure (8) inboard, 90 ° of positioning regulators (13) are screwed on 90 ° of location adjusting brackets (14), and device adjusting bracket (9) and (12) is welded on respectively on the bottom surface in ultrahigh vacuum chamber enclosure (8) outside.
2. high-precision positioner of superhigh vacuum polarizer according to claim 1, it is characterized in that on rotation system front axle bolster (15), transmission conical gear (11), the rotation system rear axle bolster (6) light hole being arranged all, the light hole on rotation system front axle bolster (15), transmission conical gear (11), the rotation system rear axle bolster (6) is on logical optical axis A.
3. high-precision positioner of superhigh vacuum polarizer according to claim 2 is characterized in that 0 ° of positioning regulator (4) and 90 ° of positioning regulators (13) are made of the threaded rod of dribbling head.
4. high-precision positioner of superhigh vacuum polarizer according to claim 3 is characterized in that rotation system rear axle bolster (6) and rotation system front axle bolster (15) are to be used for the rotation system frame that has B level bearing that bracing frame (5) rotates.
5. high-precision positioner of superhigh vacuum polarizer according to claim 4, the vertical transmission conical gear modulus m=1.5 that it is characterized in that transmission conical gear (11), accuracy class is 7 grades, minimum sideshake is b, the swivel bearing accuracy class is the B level, and above-mentioned accuracy class, minimum sideshake and swivel bearing accuracy class have all adopted CNS; Bracing frame (5) rotation good reproducibility was in 5.3 seconds, and the light angle beat is not more than 37.8 seconds, and angle error is not more than 21.36 seconds, and axle is that radially rolling amount is not more than 2.6 μ, and radially 1.32 μ are measured in rolling.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100170696A CN100405132C (en) | 2005-08-22 | 2005-08-22 | High-precision positioner of superhigh vacuum polarizer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100170696A CN100405132C (en) | 2005-08-22 | 2005-08-22 | High-precision positioner of superhigh vacuum polarizer |
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| Publication Number | Publication Date |
|---|---|
| CN1896800A CN1896800A (en) | 2007-01-17 |
| CN100405132C true CN100405132C (en) | 2008-07-23 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB2005100170696A Expired - Fee Related CN100405132C (en) | 2005-08-22 | 2005-08-22 | High-precision positioner of superhigh vacuum polarizer |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102722020B (en) * | 2011-03-30 | 2014-05-21 | 同济大学 | Microscope focusing device for plasma diagnosis and application thereof |
| CN102393564B (en) * | 2011-11-04 | 2013-08-21 | 中国科学院长春光学精密机械与物理研究所 | Device used for precise angle transmission in ultrahigh vacuum and control method for same |
| US9846294B2 (en) * | 2014-09-23 | 2017-12-19 | FMB FEINWERK-UND MESSTECHNIK GmbH | Adjustment system for aligning optical elements or samples in vacuum |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6061190A (en) * | 1999-03-11 | 2000-05-09 | Optics For Research | Devices for holding optical components at fixed positions |
| CN2405203Y (en) * | 1999-12-16 | 2000-11-08 | 中国科学院长春光学精密机械研究所 | Optical slit arrangement used in super high vacuum condition |
| US6414792B1 (en) * | 1998-06-18 | 2002-07-02 | Leica Microsystems Wetzlar Gmbh | Analyzer insert for a polarizing microscope |
| JP2005014088A (en) * | 1998-07-02 | 2005-01-20 | Gsi Lumonics Corp | Device and method for controlling laser polarization |
| CN1214239C (en) * | 2001-01-04 | 2005-08-10 | 中国科学院长春光学精密机械与物理研究所 | Eccentrical axle chain for monochromator with soft X-ray, variable pitch, and planar raster |
| CN2833646Y (en) * | 2005-08-22 | 2006-11-01 | 中国科学院长春光学精密机械与物理研究所 | Ultra-high vacuum polarizer high-precision positioning device |
-
2005
- 2005-08-22 CN CNB2005100170696A patent/CN100405132C/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6414792B1 (en) * | 1998-06-18 | 2002-07-02 | Leica Microsystems Wetzlar Gmbh | Analyzer insert for a polarizing microscope |
| JP2005014088A (en) * | 1998-07-02 | 2005-01-20 | Gsi Lumonics Corp | Device and method for controlling laser polarization |
| US6061190A (en) * | 1999-03-11 | 2000-05-09 | Optics For Research | Devices for holding optical components at fixed positions |
| CN2405203Y (en) * | 1999-12-16 | 2000-11-08 | 中国科学院长春光学精密机械研究所 | Optical slit arrangement used in super high vacuum condition |
| CN1214239C (en) * | 2001-01-04 | 2005-08-10 | 中国科学院长春光学精密机械与物理研究所 | Eccentrical axle chain for monochromator with soft X-ray, variable pitch, and planar raster |
| CN2833646Y (en) * | 2005-08-22 | 2006-11-01 | 中国科学院长春光学精密机械与物理研究所 | Ultra-high vacuum polarizer high-precision positioning device |
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| Publication number | Publication date |
|---|---|
| CN1896800A (en) | 2007-01-17 |
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Granted publication date: 20080723 Termination date: 20100822 |