CN100405090C - Method for making filters - Google Patents
Method for making filters Download PDFInfo
- Publication number
- CN100405090C CN100405090C CNB2004100275250A CN200410027525A CN100405090C CN 100405090 C CN100405090 C CN 100405090C CN B2004100275250 A CNB2004100275250 A CN B2004100275250A CN 200410027525 A CN200410027525 A CN 200410027525A CN 100405090 C CN100405090 C CN 100405090C
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- CN
- China
- Prior art keywords
- filter plate
- substrate
- making
- tool
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Physical Vapour Deposition (AREA)
Abstract
The present invention relates to a method for making filters, which comprises the steps that a basal plate is provided; the basal plate is covered with a cellular set; the basal plate covered with the cellular set is arranged in a vacuum chamber to be plated with a film; the set is disassembled from the film-plated basal plate, and a film-plated plate with a cellular non-film-plated area is obtained; the film-plated plate is cut along the non-film-plated area to obtain filters. The present invention forms a cut way of the cellular non-film-plated area on the surface of the basal plate by the cellular set, a cutter can accurately cut along the cut way of the cellular non-film-plated area, and the film can not have additional internal stress when the plate is cut because the cut area is not plated with films.
Description
[technical field]
The invention relates to a kind of filter plate method for making, especially about a kind of digital camera filter plate method for making.
[background technology]
General lens module of digital camera is many in image sensor the place ahead can to add a filter plate, and this filter plate is coated with anti-reflective film (AR coating) and infrared cut coating (IR-CUT coating) usually.The mode of production of this filter plate is usually to cut into the filter plate of required size with diamond cutter or emery wheel behind the structural glass substrate film coating.But, multilayer film can cause the internal stress between film filter plate rete bigger, if the rete of film filter plate just has bigger internal stress when forming, need guarantee when then cutting that this stress can excessively not increase, in fact, excessive stress can cause this rete to become fragile and is destroyed or peel off from substrate in cutting operation.
Above-mentioned existing method is easy to increase the internal stress of rete when cutting owing to diamond blade, the unrelieved stress stack of additonal pressure and rete, to make spectrum that film workpiece becomes distortion, cutting pressure may cause coming off of rete when adopting existing method to cut simultaneously, even the limit that collapses that can cause glass substrate, and then reduce the product yield.
In view of this, provide a kind of filter plate method for making of filter plate cutting yield that improves in fact for necessary.
[summary of the invention]
The object of the present invention is to provide a kind of filter plate method for making.
The invention relates to a kind of filter plate method for making, may further comprise the steps:
One substrate is provided;
One trellis tool is covered on the substrate, be formed with the trellis through hole on the described trellis tool;
The substrate that is covered with the trellis tool placed carry out plated film in the vacuum chamber, the relative position of described trellis tool and substrate is fixed;
The substrate of tool behind the plated film taken off, obtain one and have the not plated film sheet material of coating film area of trellis;
Cut this plated film sheet material along coating film area not and obtain filter plate.
Compare prior art, the present invention utilizes the trellis tool to form the Cutting Road of coating film area not at substrate surface, cutting tool along this not the plated film Cutting Road can accurately cut, and when cutting is because this Cutting Road zone plated film not, so can not produce additional internal stress to film.
[description of drawings]
Fig. 1 is the substrate synoptic diagram that filter plate method for making of the present invention is adopted;
Fig. 2 is tool and the board structure synoptic diagram that filter plate method for making of the present invention adopts;
Fig. 3 is the structural representation behind the substrate film coating that adopts of filter plate method for making of the present invention.
[embodiment]
The present invention is applicable to the filter plate method for making.
With reference to Figure 1 and Figure 2, this filter plate method for making may further comprise the steps: a substrate 1 at first is provided, the material of this substrate 1 be glass or polycarbonate (PC, polycarbonate), polymethylmethacrylate transparent polymers such as (PMMA, polymethyl methacrylate); Substrate 1 cleaning is covered with a trellis tool 2 then on this substrate 1, this trellis tool 2 has a plurality of trellis through holes 21, this trellis through hole 21 is that the size according to the filter plate that will make accurately makes, its material need have high-temperature stability, be the material contamination when avoiding plated film simultaneously, the material of tool 2 is preferably consistent with the composition of plating film; The substrate 1 that is covered with trellis tool 2 placed carry out plated film in the vacuum chamber; Please be simultaneously with reference to Fig. 3, then the substrate 1 of trellis tool 2 behind the plated film taken off, obtain one and have the not plated film sheet material 3 of coating film area 32; Last edge not coating film area 32 these plated film sheet materials 3 of cutting obtains filter plate.
When wherein tool 2 covered on the substrate 1, this tool 2 also can contact and can not contact with substrate 1, relatively moved but need to guarantee not produce between substrate 1 and the tool 2.
During plated film, the substrate 1 that is covered with tool 2 is put into vacuum chamber (figure does not show), will be evacuated to 1 in the vacuum chamber
-4～10
-8Handkerchief, feeding working gas to air pressure again in vacuum chamber is 10
-3～1.0 handkerchiefs carry out plated film by vacuum splashing and plating to substrate 1, obtain a plated film sheet material 3, and this plated film sheet material 3 has trellis coating film area 31 and reaches not coating film area 32.Intelligible, also can adopt other vacuum coating mode, (Chemical Vapor Deposition, CVD) grade is carried out plated film to substrate 1 as chemical vapor deposition.
After trellis tool 2 taken off from coated basal plate 3, the Cutting Road that forms along the not coating film area on the plated film sheet material 3 32 cuts coated basal plate 3, can adopt diamond cutter or other cutting tool during cutting, owing to be formed with the not Cutting Road of coating film area 32 on this plated film sheet material 3, so can guide cutter cutting during cutting, plated film is not exerted an influence during same the cutting, also can not produce the internal stress between rete.
Claims (8)
1. filter plate method for making may further comprise the steps:
One substrate is provided;
One trellis tool is covered on the substrate, be formed with the trellis through hole on the described trellis tool;
The substrate that is covered with tool placed carry out plated film in the vacuum chamber, the relative position of described trellis tool and substrate is fixed;
The substrate of tool behind the plated film taken off, obtain one and have the not plated film sheet material of coating film area of trellis;
Cut this plated film sheet material along coating film area not and obtain filter plate.
2. filter plate method for making as claimed in claim 1 is characterized in that: the material of described substrate is a glass.
3. filter plate method for making as claimed in claim 1 is characterized in that: the material of described substrate is polycarbonate transparent polymkeric substance or polymethylmethacrylate transparent polymer.
4. filter plate method for making as claimed in claim 1 is characterized in that: the consistent size of described trellis through hole and the plated film product that will make.
5. filter plate method for making as claimed in claim 1 is characterized in that: described coating process adopts the vacuum splashing and plating mode to carry out.
6. filter plate method for making as claimed in claim 5 is characterized in that: described vacuum splashing and plating operating air pressure is 10
-3～1.0 handkerchiefs.
7. filter plate method for making as claimed in claim 1 is characterized in that: described coating process adopts chemical vapour deposition technique to carry out.
8. filter plate method for making as claimed in claim 1 is characterized in that: the material of described tool is consistent with the material of the film that plates.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100275250A CN100405090C (en) | 2004-05-31 | 2004-05-31 | Method for making filters |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100275250A CN100405090C (en) | 2004-05-31 | 2004-05-31 | Method for making filters |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1704775A CN1704775A (en) | 2005-12-07 |
| CN100405090C true CN100405090C (en) | 2008-07-23 |
Family
ID=35576971
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2004100275250A Expired - Fee Related CN100405090C (en) | 2004-05-31 | 2004-05-31 | Method for making filters |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100405090C (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101706594B (en) * | 2009-10-10 | 2011-07-20 | 良特电子科技(东莞)有限公司 | Method and device for processing filter |
| CN108738295A (en) * | 2018-05-22 | 2018-11-02 | 江西合力泰科技有限公司 | A kind of preparation process for the metal ring on the big plate of fingerprint recognition |
| CN109262743B (en) * | 2018-10-16 | 2020-11-03 | 苏州京浜光电科技股份有限公司 | Low-warpage processing technology of ultrathin resin optical filter |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0855744A2 (en) * | 1997-01-24 | 1998-07-29 | Eastman Kodak Company | Method of making color filter arrays by thermal transfer of colorant |
| US5919364A (en) * | 1996-06-24 | 1999-07-06 | Regents Of The University Of California | Microfabricated filter and shell constructed with a permeable membrane |
| CN1341277A (en) * | 1999-12-24 | 2002-03-20 | 株式会社荏原制作所 | Apparatus for plating semiconductor substrate, method for plating semiconductor substrate |
| US20030062302A1 (en) * | 2000-05-18 | 2003-04-03 | Phillip Clark | Multiple well plate with adhesive bonded filter |
| JP2004057866A (en) * | 2002-07-25 | 2004-02-26 | Dainippon Printing Co Ltd | Method of manufacturing hydrogen producing filter |
-
2004
- 2004-05-31 CN CNB2004100275250A patent/CN100405090C/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5919364A (en) * | 1996-06-24 | 1999-07-06 | Regents Of The University Of California | Microfabricated filter and shell constructed with a permeable membrane |
| EP0855744A2 (en) * | 1997-01-24 | 1998-07-29 | Eastman Kodak Company | Method of making color filter arrays by thermal transfer of colorant |
| CN1341277A (en) * | 1999-12-24 | 2002-03-20 | 株式会社荏原制作所 | Apparatus for plating semiconductor substrate, method for plating semiconductor substrate |
| US20030062302A1 (en) * | 2000-05-18 | 2003-04-03 | Phillip Clark | Multiple well plate with adhesive bonded filter |
| JP2004057866A (en) * | 2002-07-25 | 2004-02-26 | Dainippon Printing Co Ltd | Method of manufacturing hydrogen producing filter |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1704775A (en) | 2005-12-07 |
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| PB01 | Publication | ||
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| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20080723 Termination date: 20150531 |
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| EXPY | Termination of patent right or utility model |